JP3008074B2 - Gyro device and manufacturing method thereof - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an acceleration detecting gyro device suitable for use in a moving body such as an automobile, a ship, an aircraft, etc., for detecting an angular velocity or an angular change and an acceleration with respect to an inertial space. More specifically, the present invention relates to an extremely small acceleration detecting gyro device of a type in which a gyro rotor is floatingly supported by an electrostatic supporting force.

[0002]

2. Description of the Related Art An example of a conventional gyro apparatus will be described with reference to FIGS. This gyro apparatus is disclosed in Japanese Patent Application No. 6-136074 filed on June 17, 1994 by the same applicant as the present applicant. See that application for details.

First, the structure of this gyro device will be described with reference to FIG. This gyro device is called an electrostatic gyro, and has a disk-shaped gyro rotor 20 floatingly supported by an electrostatic supporting force and a gyro case 21 for accommodating the gyro rotor 20 therein.

Here, XYZ coordinates are set for the gyro device as shown in the figure. The Z-axis is taken upward along the central axis of the gyro device, and the X-axis and Y-axis are taken perpendicular to it. The spin axis of the gyro rotor 20 is arranged along the Z axis.

The gyro case 21 has an upper bottom member 22 and a lower bottom member 24, and an annular spacer 23 connecting them, which may be connected by a suitable fastening means, for example, a small screw 25. Thus, a disk-shaped hollow portion 26 for accommodating the gyro rotor 20 is formed inside the gyro case 21.

As shown in FIG. 13A, the upper bottom member 22 and the lower bottom member 24 have holes 22A,
2A 'is formed, and a cap 32 is mounted in the hole 22A of the upper bottom member 22. The cap 32 has a built-in getter member 33 for maintaining the cavity 26 at a high degree of vacuum for a long period of time. A pipe 34 is connected to the hole 22A 'of the lower bottom member 24, and the cavity 26 is evacuated and evacuated via the pipe 34.

The gyro rotor 20 is formed of a conductive material. As shown in FIG. 13A, the gyro rotor 20 preferably has a thin center portion 20B and a thicker annular electrode portion 20 outside the center portion 20B.
C may be provided. A through hole 20A is formed in the central portion 20B along the central axis.

The gyro device has a displacement detecting device for detecting a displacement of the gyro rotor 20 with respect to the gyro case 21. The displacement detecting device detects a radial displacement of the gyro rotor 20. Such a displacement detection device may include, for example, as shown in FIG. 13A, a light emitting element 27 and a light receiving element 28 disposed on the upper surface and the lower surface inside the hollow portion 26 of the gyro case 21, respectively. As shown in FIG. 13B, the light receiving element 28 may be configured by one divided into four segments 28-1, 28-2, 28-3, and 28-4.

The light emitting element 27 and the light receiving element 28 are arranged on both sides of the gyro rotor 20 so that the optical path passes through the hole 20A. When the gyro rotor 20 is displaced in the radial direction, the position of the hole 20A is deviated from the optical path, so that the amount of light received by the light receiving element 28 out of the light generated by the light emitting element 27 changes. Since the amounts of change in the amounts of received light of the four light receiving element segments are different from each other, the magnitude and direction of the radial displacement of the gyro rotor 20 are obtained.

Electrostatic support electrodes 29-1 to 29-4 and rotor rotation driving coils 30-1 to 30-4 are arranged concentrically on the inner surface of the upper bottom member 22. On the inner surface of the material 24, the electrostatic support electrodes 29'-1 to
29'-4 and rotor rotation driving coils 30'-1 to 30'-3
0'-4 is arranged. Such an electrostatic support electrode 29-
1 to 29-4, 29'-1 to 29'-4 and rotor rotation driving coils 30-1 to 30-4, 30'-1 to 30 '
-4 is arranged corresponding to the electrode portion 20C of the gyro rotor 20 and spaced apart therefrom. The positional relationship between the electrostatic support electrodes 29-1 to 29-4 and 29'-1 to 29'-4 and the electrode section 20C of the gyro rotor 20 will be described later in detail.

As shown in FIG. 13B, for example, a first pair of electrostatic support electrodes 29-1, 29'-1 and a third pair of electrostatic support electrodes 29-3, 29'-3 are connected to the X-axis. And the second pair of electrostatic support electrodes 29-2 and 29'-2 and the fourth pair of electrostatic support electrodes 29-4 and 29'-4 are arranged along the Y-axis. . Electrostatic support electrodes 29-1 to 29-4,
29′-1 to 29′-4 are the rotor rotation driving coils 3
0-1 to 30-4 and 30'-1 to 30'-4. Electrostatic support electrodes 29-1 to 29-4 and 2
9'-1 to 29'-4 may be formed in a sector shape as shown.

The rotor driving coils 30-1 to 30-
4, when a driving AC voltage is applied to 30'-1 to 30'-4, the gyro rotor 20 rotates at high speed with the Z axis as the spin axis. When the desired number of revolutions is reached, the AC voltage is cut off, but the gyro rotor 20 continues to rotate by inertia during subsequent use. Since the gyro rotor 20 is supported in a non-contact manner by the hollow portion 26 of the gyro case 21 maintained in a high vacuum, the gyro rotor 20 keeps rotating for several months or more.

Since no torque is applied to the gyro rotor 20 from the outside, the direction of the spin axis of the gyro rotor 21 is constant with respect to the inertial space according to the law of inertia regardless of the movement of the gyro case 21. Maintained in the direction.

Next, the configuration and operation of the Z constraint control system, the XY constraint control system, and the rotor drive system 100 provided in the gyro device of this embodiment will be described with reference to FIG. The Z restriction control system functions to restrict the displacement of the gyro rotor 20 in the Z axis direction. That is, the gyro rotor 20 has a function of floating and holding the gyro rotor 20 at a predetermined position. The XY constraint control system functions to restrict the displacement of the gyro rotor 20 in the XY axis direction, and the rotor drive system 100 functions to rotate the gyro rotor 20 around the spin axis.

[0015] Among the electrode portion 20C of the gyro rotor 20, the portion corresponding to the electrostatic supporting electrode 29-1,29'-1 of the first pair and the first portion P _1, the electrostatic second pair a portion corresponding to the supporting electrode 29-2,29'-2 and a second portion P _2, a third pair of electrostatic supporting electrodes 29-3,29'-
The portion corresponding to No. 3 is referred to as a third portion P _3, and the portion corresponding to the fourth pair of electrostatic support electrodes 29-4 and 29′-4 is referred to as a fourth portion P3.
And of the part P _4.

First, the configuration and operation of the Z constraint control system will be described. The Z constraint control system of this example is of an electrostatic type, and the gyro rotor 20 is supported and restrained in a floating manner by an electrostatic force generated between the gyro rotor 20 and the electrostatic support electrode.

The Z-restriction control system of this embodiment has a gyro rotor 2
The four electrode pairs 20-1, 29'-1, 29-2, and 29'- provided on both sides of the gyro rotor 20 and the electrode portion 20C of 0 (parts P ₁ and P _{3 in} FIG. 14). 2,29
-3, 29'-3, 29-4, 29'-4 (only 29-1, 29'-1, 29-3, 29'-3 are shown in FIG. 14) and each of the electrostatic supporting electrodes. Four connected transformers 41, 42, 43, 44 (41, 43 in FIG. 14)
Only shown).

Here, for simplicity, the gyro rotor 2
It is assumed that a displacement Δx in the X-axis direction and a displacement Δy in the Y-axis direction of zero are zero. As shown in FIG. 14, the first and third
Of each of the transformers 41 and 43 has a displacement Δx
The modified AC voltage (1 ± K ₁ Δx) V _TX is applied, where the coefficient is (1 ± K ₁ Δx) =
It becomes 1. The point T1, T4 hence the reference frequency AC voltage V _TX of f _o is applied. The output terminals T2 and T3 of the first transformer 41 are respectively connected to the electrostatic support electrodes 29-1 and 29-2.
9'-1 and the output terminal T of the third transformer 43.
5 and T6 are electrostatic supporting electrodes 29-3 and 29'-3, respectively.
It is connected to the.

The first pair of electrostatic support electrodes 29-1, 29 '
The first portion P ₁ and the capacitor electrode portion 20C of -1 and the gyro rotor 20 (the capacitance and C.) Is configured, the such capacitor and a first transformer 41 (inductance and L. ) Constitute a resonance circuit. The resonance frequency f _{a of such a} resonance circuit [= 1 / 2π
√ (LC)] is set to the reference frequency f _o is smaller than value of the AC voltage V _TX applied to the first transformer 41.

Next, the operation of the Z constraint control system of the gyro device of this embodiment will be described with reference to FIG. FIG. 15 shows a first transformer 41 and electrostatic support electrodes 29-1, 2 connected thereto.
9 is a graph of a resonance curve showing the operation of the resonance circuit including 9′−1, and the vertical axis represents the electrode voltage V _T of one electrode, for example, the electrostatic support electrode 29-1 disposed above the gyro rotor 20. The horizontal axis indicates the frequency ratio (f _O / f _a ). Here, f _O is the reference frequency of the AC voltage V _TX as described above, and f _a is the resonance frequency f _a [= １ ／ π√} of the resonance circuit.
(LC)].

As described above, at the operating point, the resonance frequency of the resonance circuit
Wave number f_aIs the reference frequency f of the AC power supply _oSmaller and higher frequency
Number ratio (f_O/ F_a) Is greater than 1. Therefore, FIG.
As shown, near the operating point, the electrode voltage V_TIs the decreasing function
is there.

The first part of the electrode part 20C of the gyro rotor 20
Consider the case where portions P ₁ of displaced upward. Such a first
Portion P ₁ and the disposed above the electrostatic supporting electrodes of 29-
1 decreases, and the capacitance C between the two increases. Therefore, the resonance frequency f _a [= 1 / 2π√ (LC)]
Decrease and the frequency ratio (f _O / f _a ) increases. As a result, as shown in the figure, the electrode voltage V of the electrostatic support electrode 29-1 is changed.
_T becomes smaller than the operating voltage V _TO . Thus, the attractive force acting between the first portion P ₁ of the upper electrostatic supporting electrode 29-1 and the gyro rotor 20 is reduced.

The relationship between the first portion P ₁ and the electrostatic supporting electrode 29 '- 1 that is disposed on the lower side of the gyro rotor 20 is just the same in reverse. The distance between the first part P ₁ and the electrostatic supporting electrode 29 '- 1 that is disposed on the lower side is increased, the capacitance C between them decreases. Therefore, the resonance frequency f _a [= １ ／ π√ (LC)] increases, and the frequency ratio (f _O / f _a ) decreases. As a result, the electrostatic support electrode 2
Electrode voltage V _T of 9'-1 is greater than the operating voltage V _TO. Thus, the attractive force acting between the first portion P ₁ of the lower electrostatic supporting electrode 29 '- 1 and the gyro rotor 20 is increased.

When the first portion P ₁ of the gyro rotor 20 is displaced upward, the force for biasing the first portion P ₁ upward becomes small, and the force for biasing the first portion P ₁ downward becomes large. part P ₁ is biased downward relative operates as back to the original position.

According to the Z constraint control system of the present embodiment, the first transformer 41 and the first pair of electrostatic support electrodes 29-1, 29'-
And the first resonance circuit including the gyro rotor 2
First Z-axis direction displacement of a portion P ₁ 0 of the electrode portion 20C is always kept at zero, the third transformer 43 and the electrostatic supporting electrode 29-3,29'-3 of the third pair the third resonant circuit including, Z-axis direction of the displacement of the third portion P ₃ of the electrode portion 20C of the gyro rotor 20 is always maintained at zero. Similarly, by the second and fourth resonance circuits, the second and fourth portions P ₂ ,
Z-axis direction of displacement of the P ₄ is always maintained at zero.

The first part P of the gyro rotor 20₁But
The force Fz1 received from the gyro case 21 is the electrostatic support on both sides.
Voltage applied to holding electrodes 29-1 and 29'-1
A₁, B ₁Is proportional to the difference between Electrode of gyro rotor 20
Third part P of part 20C_ThreeOperation, second and fourth parts
Minute P_Two, P_FourIs the same.

[0027]

[Number 1] _{Fz1 = K (A 1 -B 1} ) Fz2 = K (A 2 -B 2) Fz3 = K (A 3 -B 3) Fz4 = K (A 4 -B 4)

Next, the configuration and operation of the rotor drive system 100 of this embodiment will be described with reference to FIG. Rotor drive system 10
Reference numeral 0 denotes a gyro rotor 20, a driving AC power supply 101, and four pairs of coils connected thereto (only the lower coils 30'-1, 30'-2, 30'-3, and 30'-4 are shown in FIG. 14). ). Basic phase V ₀ which two-phase AC voltage is connected to two coils 30'-1,30'-3 connected in series, 90 ° phase V ₉₀ of the two-phase AC voltage of two coils connected in series 30'-2 and 30'-4.

The four pairs of coils 30-1, 30'-1, 30
-2, 30'-2, 30-3, 30'-3, 30-4,
When an alternating voltage is applied to 30′-4 from the driving AC power supply 101, a rotating magnetic field proportional to the frequency of the driving AC power supply 101 is generated in the cavity 26 of the gyro case 21, and the magnetic field and the gyro rotor 20 are rotated. The gyro rotor 20 rotates by the interaction with the eddy current generated therein.

Next, the configuration and operation of the XY constraint control system of the gyro device of this embodiment will be described with reference to FIG. The XY constraint control system includes a displacement detection device including the electrode unit 20C of the gyro rotor 20, the electrostatic support electrodes 29-1 to 29-4, 29'-1 to 29'-4, the light emitting element 27, and the light receiving element 28. X and Y control system 5 for inputting the output signal of the displacement detecting device
0 and 60. The gyro rotor 20 has an X-axis and a Y-axis.
Even in the case of deviation in the axial direction, the XY constraint control system
The positions of the gyro rotor 20 in the X-axis and Y-axis directions are controlled so that the spin axis is aligned with the center axis of the gyro device, that is, the Z axis.

As shown in FIG. 16A, X control system 50 is a frequency f _o AC power source 50-1 and V _TX computing unit 50-2 supplies an AC voltage V _T of the two multipliers 50-3,50- 4
And The V _TX calculation unit 50-2 inputs a signal indicating the displacement Δx in the X-axis direction of the gyro rotor 20 supplied from the light receiving element 28 of the displacement detection device, and a coefficient of 1 ± K ₁ Δ
x (K ₁ is a constant.) is calculated. One end of the AC power supply 50-1 is grounded, and the other end is connected to two multipliers 50-3 and 50-4. Thus, the two multipliers 50-3, 5
From 0-4, the coefficient ₁ ± K 1 Δx modified by AC voltage _{V T (1 ± K 1 Δx} ) is output. As shown in FIG. 16B, the configuration of the Y control system 60 is similar to the configuration of the X control system 50.

Here, the electrode portion 20C of the gyro rotor 20 and the electrostatic support electrodes 29-1 to 29-4, 29'-1 to 29 '
Next, the positional relationship between -4 and -4 will be described. The electrode section 20C of the gyro rotor 20 includes electrostatic support electrodes 29-1 to 29-4,
It is arranged concentrically with respect to 9'-1 to 29'-4, but at the same time it is arranged offset radially inward or outward.

As shown in FIGS. 13 and 14, the electrode section 20C of the gyro rotor 20 is
9-4, 29'-1 to 29'-4 will be described in the case where they are arranged so as to be deviated inward in the radial direction. As shown, the electrostatic support electrodes 29-1 to 29-4, 29'-
The electrode part 2 of the gyro rotor 20 has an outer diameter of 1-29′-4.
It is formed so as to be larger than the outer diameter of 0C, so that the electrostatic support electrode protrudes radially outward from the gyro rotor 20 by a length δ ₂ .

Further, the electrostatic supporting electrodes 29-1 to 29-4,
The inner diameter of 29'-1 to 29'-4 is formed to be larger than the inner diameter of the electrode section 20C of the gyro rotor 20, and the electrode section 20C of the gyro rotor 20 is radially inward by the length δ _{1 for the} electrostatic support electrode 29-1. ~ 29-4, 29'-1 ~ 29'-4
It is configured to protrude more.

Thus, the electrode section 20 of the gyro rotor 20
C is the electrostatic supporting electrodes 29-1 to 29-4, 29'-1 to 2
By disposing radially inward with respect to 9′-4, the gyro rotor 20 is provided to the gyro rotor 20 by a first pair of electrostatic support electrodes 29-1, 29′-1 radially outward (X
A force Fx1 acts in the positive direction of the axis) and a force Fx3 acts radially outward (in the negative direction of the X-axis) by the third pair of electrostatic support electrodes 29-3 and 29'-3. I do. These forces Fx1 and Fx3 change according to the magnitude of the AC voltage applied to the midpoints T1 and T4 of the transformers 41 and 43, respectively. If such alternating voltages are equal, the two forces Fx1 and Fx3 are equally balanced.

The acceleration α in the X-axis direction is applied to the gyro rotor 20.
_X acts, and the gyro rotor 20 is turned into the gyro case 2.
It is assumed that it is displaced by Δx in the positive direction of the X axis with respect to 1. The displacement Δx is output by the light receiving element 28 as a voltage signal. Such signal is supplied to the V _TX computing unit 50-2 of the X control system 50, a signal for instructing the coefficient ₁ ± K 1 Δx is produced. Thus, the two multipliers 50-3, 5
Voltage signals different from 0-4 (1-K ₁ Δx)
V _T , (1 + K ₁ Δx) V _T is generated.

The two voltage signals (1 ± K ₁ Δx) V _T are respectively applied to the middle points _T 1 and T 4 of the transformers 41 and 43, and the first pair of electrostatic support electrodes 29-1 and 29 ′- 1 generates a force Fx1 and a third pair of electrostatic support electrodes 2
9-3 and 29'-3 generate the force Fx3. X-axis positive force Fx1 acting on the gyro rotor 20
And the force Fx3 in the negative direction of the X-axis are expressed by the following equation (2).

[0038]

[Number 2] _{Fx1 = k 1 (1-K} 1 Δx) V T Fx3 = k 1 (1 + K 1 Δx) V T

K ₁ is a constant. The resultant force of the forces acting on the gyro rotor 20 in the X-axis direction is as follows.

[0040]

Fx1−Fx3 = −2k ₁ K ₁ V _T · Δx

Thus, the gyro rotor 20 is pulled in the negative direction of the X-axis by the force proportional to the displacement Δx as expressed by the equation (3), whereby the displacement becomes zero. The same applies when the gyro rotor 20 is deviated in the Y-axis direction. In this way, the displacement amounts Δx and Δy are always maintained at zero even when the gyro rotor 20 is displaced in the X-axis and Y-axis directions by the XY constraint control system of this example. That is, the spin axis of the gyro rotor 20 is always controlled to be aligned with the central axis of the gyro device, that is, the Z axis.

In the above description, two transformers 41, 4
The amount of change in the voltage applied to the midpoints T1 and T4 is the displacement Δ
was assumed to be proportional to x, the voltage actually applied also includes term _{K D (dΔx / dt) V} T due to damping in addition claim K ₁ ΔxV _T proportional to such displacement [Delta] x.

Referring to FIG. 13 and FIG. 14, the electrode portion 20C of the gyro rotor 20 is
-4, 29'-1 to 29'-4, the case where they are arranged radially inward is described, but the electrostatic support electrodes 29-1 to 29-4, 29'-1 29'-4
The same applies to the case where the antennas are arranged to be deviated radially outward with respect to. However, in this case, the directions of the forces Fx1 and Fx3 acting on the gyro rotor 20 are reversed. Further, the gyro rotor 20 receives an acceleration α _Y in the Y-axis direction.
Acts, and the gyro rotor 20 is moved to the gyro case 21.
The same applies to the case of displacement by Δy in the Y-axis direction.

Referring to FIGS. 17 to 19, the configurations and operations of the gyro operation unit and the acceleration operation unit of this embodiment will be described. The gyro calculator has an X gyro calculator 51 for calculating an angular velocity dφ / dt around the X axis and a Y gyro calculator 61 for calculating an angular velocity dθ / dt around the Y axis. X acceleration calculator 53 for calculating acceleration and Y
It has a Y acceleration calculator 63 for calculating the acceleration in the axial direction and a Z acceleration calculator 73 for calculating the acceleration in the Z axis direction.

The configuration and operation of the X gyro operation section 51 and the X acceleration operation section 53 will be described with reference to FIG. The X gyro operation unit 51 includes four voltage dividing units 51-
1 to 51-4, four rectifiers 51-5 to 51-8 connected to each of the voltage dividers, and two pairs of rectifiers 51-5,
Two subtraction units 51-9, 51-10 connected to 51-6 and 51-7, 51-8, a third subtraction unit 51-11 connected to the two subtraction units, and a calculation unit 51- And 12.

The X gyro operation unit 51 has an input terminal 51a,
Two transformers 4 via 51b and 51c, 51d
The terminal outputs A ₁ , B ₁ and A ₃ , B ₃ of the output terminals T2, T3 and T5, T6 of ₁ , 43 are input. Since the terminal outputs A ₁ , B ₁ and A ₃ , B ₃ of the output terminals T 2, T 3 and T 5, T 6 of the two transformers 41, 43 are usually high voltages of 1000 V or more, each of these voltages is divided into four voltages. Part 5
The voltage is divided into a low voltage by 1-1 to 51-4, and is rectified to a DC voltage by four rectifiers 51-5 to 51-8. Such DC voltage signals are subtracted by subtraction units 51-9, 51-10, 51
A subtraction operation is performed at -11. Thus, the operation unit 51-1
A gyro signal indicating the rotational angular velocity dφ / dt around the X axis of the gyro rotor 20 is obtained from the output terminal of the gyro rotor 20.

Next, the operation of the X gyro operation unit 51 will be described in detail.
Will be described. Angular velocity dφ / dt input around X axis
Consider the case. Due to the spin motion of the gyro rotor 20
The angular motion vector H is increased along the Z axis as shown in FIG.
Take the direction. The speed of the gyro rotor 20 is determined by the law of inertia.
The pin axis tends to continue to be arranged along the Z-axis direction.
On the other hand, the gyro case 21 has an angular velocity dφ / d around the X axis.
When rotated at t, the second pair of electrostatic support electrodes 29-
2, 29'-2 and a fourth pair of electrostatic support electrodes 29-4,
29'-4, the second and the second gyro rotor 20
Part 4 of P_Two, P _FourBetween the upper electrode and the lower electrode
There is a difference between the gap and the gap. The difference between the upper and lower gaps is Y
It becomes zero by the operation of the control system 60. At this time,
The second and fourth portions P of the gyro rotor 20_Two,
P_FourAnd two forces Fz2 in opposite directions along the Z axis.
Fz4 acts, thereby causing the
Luc T_XOccurs.

[0048]

[Number 4] _{T X = (Fz2-Fz4)} × r

Here, r is the distance from the spin axis to the point of application of the force.

The spin axis of the gyro rotor 20 is precessed at a small angle around the Y axis by the torque T _X. By such a precession movement, the first pair of electrostatic support electrodes 29-1, 29'-1 and the third pair of electrostatic support electrodes 29-3, 29'-3 and the first and The gap between the _third portions P ₁ and P ₃ changes. That is, there is a difference between the upper gap and the lower gap.

Similarly, the operation of the X control system 50 controls such that the difference between the upper gap and the lower gap becomes zero. At this time, as described above, the gyro rotor 20
, Two opposite forces Fz1 and Fz3 act on the first and third portions P ₁ , P ₃ , thereby generating a torque T _Y represented by the following equation:

[0052]

T _Y = (Fz1−Fz3) × r

With the torque T _Y , the spin axis of the gyro rotor 20 performs a precession motion around the X axis at a small angle. Such a precession movement becomes the same movement as the input angular velocity dφ / dt, and as a result, the spin axis and the gyro case 21 rotate around the X axis integrally at an angular velocity dφ / dt.

The following equation is obtained by using the equation of Equation 1 to form the equation of angular motion from the equations of Equations 4 and 5.

[0055]

[6] H = (dφ / dt) = (Fz3-Fz1) × r _{[(A 3 -B 3) - (} A 1 -B 1) ] × r × K H (dθ / dt) = (Fz4- Fz2) × r = [(A ₄ −B ₄ ) − (A ₂ −B ₂ )] × r × K

Here, H is the angular momentum of the gyro rotor 20. Therefore,

[0057]

Dφ / dt = [(A ₃ −B ₃ ) − (A ₁ −B ₁ )] × Kr / H dθ / dt = [(A ₄ −B ₄ ) − (A ₂ −B ₂ )] × Kr / H

Thus, the X gyro operation section 51 and the Y gyro operation section 53 receive the terminal outputs A ₁ , B ₁ , A ₂ , B ₂ , A ₃ , B ₃ , A ₄ , and B ₄ of the _four transformers. X gyro signal dφ / dt and Y gyro signal d
θ / dt is output.

Next, the configuration and operation of the X acceleration calculator 53 will be described.
I will tell. The X acceleration calculation unit 53 includes an X gyro calculation unit 51
Output signals of the first pair of rectifiers 51-5 and 51-6
a₁, B ₁And an adder 53-1 for inputting
Output signals a of the rectifiers 51-7 and 51-8_Three, B_ThreeEnter
Connected to the addition unit 53-2 and the two addition units
And a subtraction unit 53-3.

The adder units 53-1 and 53-2 output the X
Sum a of internal outputs of gyro operation unit 51 ₁+ B₁, A_Three+ B
_ThreeIs required. Such a sum is the sum of the voltages applied to each electrode.
Sum A ₁+ B₁, A_Three+ B_ThreeIt corresponds to. Accordingly
The outputs of the adders 53-1 and 53-2 are respectively X-axis
It corresponds to the directional forces Fx1 and Fx3.

In the subtraction section 53-3, the addition sections 53-1 and 5
3-2 Output a₁+ B₁, A_Three+ B _ThreeDifference (a₁+
b₁)-(A_Three+ B_Three) Is required. The difference is (A
₁+ B₁)-(A_Three+ B_Three). Therefore,
The output of the subtraction unit 53-3 is the force Fx1 in the positive direction of the X axis and X
This corresponds to the difference from the force Fx3 in the negative direction of the axis.

In this way, the subtraction unit 53-3 outputs a signal indicating the displacement Δx represented by the equation (3),
From this, the acceleration α _X is obtained.

Since the configurations and operations of the Y gyro operation section 61 and the Y acceleration operation section 63 are the same, the description will be omitted.

Referring to FIG. 19, the configuration and operation of Z acceleration calculation section 73 will be described. The Z acceleration calculation unit 73 includes the internal signals a ₁ , b _1, a ₃ , and b ₃ of the X gyro calculation unit 51 and the internal signals a ₂ , b _2, a ₄ , and b _{4 of the} Y gyro calculation unit 61.
To calculate the acceleration α _Z in the Z-axis direction.

Next, the operation of the Z acceleration calculator 73 will be described.
You. In the above description, the mass of the gyro rotor 20 is set to zero.
, But is not actually zero. Gairolo
Let the mass of the data 20 be m and divide it into four parts
Think. Acceleration α in the Z-axis direction _ZWorks,
First and third portions P of the gyro rotor 20₁, P_ThreeMade in
The forces Fz1 and Fz3 to be used are respectively given by the following equation (8).
Is represented by

[0066]

Equation 8] _{Fz1 = mα Z / 4- (H} / r) (dφ / dt) Fz3 = mα Z / 4 + (H / r) (dφ / dt)

The acceleration α _Z in the Z-axis direction can be obtained by calculating the sum of these two equations.

[0068]

Α _z = (Fz1 + Fz3) × 2 / m = [(A ₃ −B ₃ ) + (A ₁ −B ₁ )] × 2 K / m

The acceleration α _Z in the Z-axis direction is determined by the force F acting on the second and fourth portions P ₂ and P ₄ of the gyro rotor 20.
It can also be determined by z2 and Fz4. Therefore,
In the Z acceleration calculator 73 of this example, four forces Fz1, Fz2, Fz3, F acting on each part of the gyro rotor 20
The acceleration α _{Z in the} Z-axis direction is calculated from z4.

[0070]

As described with reference to FIGS. 14, 15 and 16, the Z gyro control system and the XY gyro control system of the conventional gyro apparatus use a gyro rotor using an LC resonance circuit. It is configured such that displacements in the Z-axis direction and the XY direction of 20 are always maintained at zero. For example,
In the first part P ₁ of the electrode portion 20C of the gyro rotor 20, an AC power source 50-1 of X control system 50 and the transformer 4
An LC resonance circuit is configured by a system including the first pair and the first pair of electrostatic support electrodes 29-1 and 29'-1.

The Z constraint control system and the XY constraint control system using the LC resonance circuit include a path from the power supply to the gyro rotor 20, in the above-described example, from the AC power supply 50-1 to the X control system 5.
0, a transformer 41 and a first pair of electrostatic support electrodes 29-
There is a drawback that various errors occur in the path leading to the gyro rotor 20 via 1, 29'-1. Such errors include the generation of stray capacitance due to the enlargement of wiring and coils.

In the conventional Z, XY constraint control system, when the magnitude of the levitation force or the restoring force on the gyro rotor 20 is adjusted, the coefficient 1 ± K ₁ of the V _TX calculation unit 50-2 is used.
It was necessary to change Δx, and the operation was complicated. In particular, there is a disadvantage that it is difficult to control the gyro rotor 20 to levitate at the time of starting.

In view of the above, an object of the present invention is to provide a gyro apparatus having a constraint control system that can be more easily controlled.

In view of the above, an object of the present invention is to provide a constraint control system that is active with respect to a conventional passive constraint control system.

[0075]

According to the present invention, as shown in FIG. 1, for example, a gyro case having a Z axis along a center axis direction and an X axis and a Y axis orthogonal thereto, and an inner portion of the gyro case. A disk-shaped gyro rotor supported in a non-contact manner by an electrostatic support force and having a spin axis in the central axis direction, electrode portions formed on both surfaces of the gyro rotor along a circumferential direction, and the gyro rotor At least three pairs of electrostatic supporting electrodes respectively corresponding to and separated from the electrode portions on both surfaces of the gyro rotor and spaced apart from each other at a central angle equal to each other in the circumferential direction; A gyro device of an acceleration detection type having a rotor drive system for rotating the gyro around the gyro corresponding to each of the at least three pairs of electrostatic support electrodes. And a control DC voltage for generating the electrostatic supporting force is applied to the at least three pairs of electrostatic electrodes. A control operation unit for applying to the support electrode, and applying a displacement detection AC voltage for detecting displacement of the gyro rotor to be superimposed on the control DC voltage to the at least three pairs of electrostatic support electrodes. When,
Displacement detection electrode portions formed at the center of both surfaces of the gyro rotor, and a displacement detection electrode provided on the gyro case corresponding to each of the displacement detection electrode portions and spaced therefrom, A displacement detection system including a displacement detection circuit that detects a displacement detection current flowing through the displacement detection electrode and outputs a displacement detection voltage signal that indicates displacement of the gyro rotor, and an output signal of the control operation unit. A gyro output calculation unit for calculating a gyro output by inputting the gyro output, wherein the control calculation unit receives the displacement detection voltage signal output from the displacement detection circuit, Linear displacement in the axial and Z-axis directions, around the Y-axis and X
It is configured to calculate the rotational displacement around the axis, calculate the correction amount of the control DC voltage so that the linear displacement and the rotational displacement of the gyro rotor become zero, and feed it back to the control DC voltage. It is characterized by being.

According to the present invention, in the gyro device,
The control calculation unit calculates a displacement amount for calculating a linear displacement and a rotational displacement of the gyro rotor, a PID calculation unit for calculating a force and a rotation moment to be applied to the gyro rotor, and calculates a correction amount of the control DC voltage. A control voltage calculation unit.

According to the present invention, in the gyro device,
The gyro output calculation unit is configured to calculate a gyro output by inputting an output signal of a PID calculation unit of the control calculation unit.

According to the present invention, in the gyro device,
The displacement detection AC voltage includes an AC voltage component having a displacement detection frequency different from each other in accordance with the linear displacement and the rotational displacement of the gyro rotor.

According to the present invention, in the gyro device,
The electrostatic support electrodes include four pairs of electrostatic support electrodes that are circumferentially separated from each other at a central angle of 90 degrees.

According to the present invention, in the gyro device,
A first pair of electrostatic support electrodes of the four pairs of electrostatic support electrodes
The AC voltage for displacement detection applied to_1A, A
C_1BDetecting the displacement applied to the second pair of electrostatic support electrodes.
AC output voltage_2A, AC_2B, A third pair of electrostatic support
The AC voltage for displacement detection applied to the pole is AC_3A, AC
_3BDetecting the displacement applied to the fourth pair of electrostatic support electrodes
AC voltage for_4A, AC _4BThen they are of the form
It is characterized by being represented by AC_1A= -EX-Eθ-EZ AC_1B= −EX + Eθ + EZ AC_2A= -EY-Eφ-EZ AC_2B= −EY + Eφ + EZ AC_3A= + EX + Eθ-EZ AC_3B= + EX-Eθ + EZ AC_4A= + EY + Eφ-EZ AC_4B= + EY-Eφ + EZ Here, ± EX indicates that the phases differ by 180 ° from each other.
AC for detecting the linear displacement of the rotor in the X-axis direction
The voltage components ± EY differ in phase by 180 ° from each other.
Interchange for detecting linear displacement of the gyro rotor in the Y-axis direction
The current voltage component, ± EZ, is 180 ° out of phase with each other
For detecting the linear displacement of the gyro rotor in the Z-axis direction.
AC voltage component ± Eθ is 180 ° out of phase with each other
To detect the rotational displacement of the gyro rotor around the Y axis
AC voltage components ± Eφ are 180 ° out of phase with each other
For detecting the rotational displacement of the gyro rotor around the X axis.
AC voltage components, which are different from each other.
Having the above-mentioned frequency for displacement detection.

According to the present invention, in the gyro device,
The correction amounts of the control DC voltage applied to the first and third pairs of electrostatic support electrodes are represented by ΔV _1A , ΔV _1B and ΔV _3A ,
ΔV _3B , where ΔV _2A , ΔV _2B and ΔV _4A , ΔV _4B are correction amounts of the control DC voltage applied to the second and fourth pairs of electrostatic support electrodes, the following relationship is satisfied. And ΔV _1A + ΔV _1B + ΔV _3A + ΔV _3B = 0 ΔV _2A + ΔV _2B + ΔV _4A + ΔV _4B = 0

According to the present invention, in the gyro device,
The displacement detection circuit includes a field effect transistor.

According to the present invention, in the gyro device,
Each of the electrostatic support electrodes of each pair of the electrostatic support electrodes includes a pair of spaced apart combs, each of the combs including a plurality of circumferentially extending circumferential portions and the combs. And a connecting portion for connecting the circumferential portions, wherein the circumferential portions of the two comb-shaped portions are alternately arranged so as to sandwich the other.

According to the present invention, in the gyro device,
The control DC voltages applied to the first and second comb portions of each electrostatic support electrode of the electrostatic support electrode have the same magnitude and different polarities.

According to the present invention, in the gyro device,
The electrode portion of the gyro rotor includes a plurality of annular portions corresponding to each of the circumferential portions of the comb-shaped portion of the electrostatic support electrode, and each of the circumferential portions of the comb-shaped portion of the electrostatic support electrode corresponds to the corresponding circumferential portion. The gyro rotor is disposed radially outwardly or inwardly displaced from each of the annular portions of the electrode portions, so that the displacement of the gyro rotor in the X-axis direction and the Y-axis direction with respect to the center axis is zero. It is characterized by generating such a force.

According to the present invention, in the gyro device,
The gyro rotor is made of a conductive material, and the electrode portions are configured as protrusions formed on both surfaces of the gyro rotor.

According to the present invention, in the gyro device,
The gyro rotor is made of single crystal silicon.

According to the present invention, in the gyro device,
The gyro case includes an upper bottom member and a lower bottom member made of an insulating material, and the electrostatic support electrode is configured as a metal thin film mounted on inner surfaces of the upper bottom member and the lower bottom member. And

According to the present invention, in the gyro device,
The upper and lower bottom members of the gyro case are made of glass.

According to the present invention, in the gyro device,
The electrostatic support electrode is formed by a thin film generation technique including vapor deposition, ion plating, and photofabrication.

According to the present invention, in the gyro device,
The gyro case includes a spacer disposed between the upper bottom member and the lower bottom member, and the spacer is connected to the upper bottom member and the lower bottom member by anodic bonding.

According to the present invention, in the gyro device,
The gyro case is provided with a stopper for both discharge and discharge. The stopper has a function of limiting displacement of the gyro rotor and discharging static electricity accumulated in the gyro rotor to the outside.

According to the present invention, in the gyro device,
The gyro case is formed with a recess for accommodating a getter member, and the recess is connected to the inside of the gyro case by a passage.

According to the present invention, in the gyro device,
The rotor drive system includes a rotor drive electrode portion provided on both surfaces of the gyro rotor, a rotor drive electrode corresponding to the rotor drive electrode portion and spaced apart therefrom, and a rotor drive electrode provided at the rotor drive electrode. A rotor driving AC voltage circuit for applying an AC voltage for driving, wherein the rotor driving electrode section includes a plurality of spaced apart electrode sections arranged in a row in a circumferential direction; The driving electrode includes a plurality of spaced apart electrodes arranged in a row in a circumferential direction.

According to the present invention, in a method of manufacturing a gyro device having a gyro case and a disk-shaped gyro rotor supported in a non-contact manner by an electrostatic supporting force inside the gyro case, the gyro device is made of a conductive material. Forming protrusions by forming grooves on both surfaces of the plate material; separating a circular portion from the plate material into a disk-shaped gyro rotor and an outer spacer surrounding the gyro rotor; And joining the upper and lower bottom members to each other.

According to the present invention, in the method of manufacturing the gyro device, the spacer, the upper bottom member, and the lower bottom member are joined by anodic joining.

According to the present invention, in the method of manufacturing a gyro device, the upper bottom member and the lower bottom member made of an insulating material are prepared, and the inner surfaces of the upper bottom member and the lower bottom member are each formed of a metal thin film. And forming an electrostatic support electrode.

According to the present invention, in the method for manufacturing a gyro device, the electrostatic support electrodes formed on the upper bottom member and the lower bottom member include at least three pairs of electrostatic support electrodes, and Each include a pair of comb-shaped portions, the comb-shaped portion having a plurality of circumferential portions extending in a circumferential direction and a connecting portion connecting the circumferential portions, and the circle of the pair of comb-shaped portions. The peripheral portion is arranged so as to alternately sandwich the other.

[0099]

The gyro device according to the present invention comprises an electrode portion formed on the upper surface and the lower surface of the gyro rotor and at least three pairs, for example, four pairs of electrostatic support electrodes formed on the inner surface of the gyro case. Gyro case 4
The pair of electrostatic support electrodes are disposed so as to be deviated radially inward or outward with respect to the electrode portion of the gyro rotor. The gyro device further has a constraint control system for floatingly supporting the gyro rotor at a predetermined position by electrostatic force.

A displacement detecting electrode portion and a displacement detecting electrode portion are provided on both surfaces of the gyro rotor and the corresponding inner surface of the gyro case, respectively. Further, a rotor driving electrode portion for rotating and driving the gyro rotor is provided. An electrode for driving the rotor is provided.

The control support DC voltage for generating the electrostatic support force and the displacement detection AC voltage for detecting the displacement of the gyro rotor are applied to the electrostatic support electrode. A displacement detection current is generated at a displacement detection electrode on the inner surface of the gyro case, and the displacement detection current is detected by a displacement detection circuit.

The displacement detection voltage signal output from the displacement detection circuit is equivalent to all the displacements of the gyro rotor, that is, the linear displacements ΔX, ΔY and ΔZ in the X-axis direction, the Y-axis direction and the Z-axis direction, and the Y-axis rotation. And the rotational displacements Δθ and Δφ about the X axis. The control calculation unit inputs the displacement detection voltage output from the displacement detection circuit and calculates the displacement of the gyro rotor and the control DC voltage to be applied to the four pairs of electrostatic support electrodes.
Thus, the displacement of the gyro rotor detected by the displacement detection circuit is fed back to the control DC voltage,
The displacement of the gyro rotor is actively kept at zero.

The control calculation unit further includes accelerations fx in the X-axis direction, the Y-axis direction, and the Z-axis direction to be applied to the gyro rotor,
fy and fz, and rotational moments fθ and fφ around the Y axis and around the X axis, and the forces Fx, Fy and Fz in the X, Y, and Z directions to be applied to the gyro rotor, around the Y axis, and X The torques around the axis Tθ and Tφ are determined.
Thereby, the gyro output is calculated.

Each of the electrostatic support electrodes includes a pair of spaced apart combs, which connect the plurality of circumferentially extending circumferentials with the circumferentials. The circumference of the two comb-shaped portions including a radius portion is alternately arranged so as to sandwich the other.

By applying the control DC voltages ± V _1A to ± V _4B having the same absolute value and opposite signs to each pair of comb portions, the potential of the gyro rotor 20 is always kept at zero.

The upper bottom member 22 and the lower bottom member 24 of the gyro case 21 are made of an insulating material such as glass, and the gyro rotor 20 and the spacer 23 surrounding the gyro rotor 20 are made of a conductive material such as single crystal silicon (silicon). The gyro rotor 20 and the spacer 23 are manufactured from the same material.

[0107]

FIG. 1 shows an example of a gyro device according to the present invention. The gyro device of this example has a thin disk-shaped gyro rotor 20 and a gyro case 21 for accommodating the gyro rotor 20 therein.

Here, XYZ coordinates are set for the gyro device as shown. The Z-axis is taken upward along the central axis of the gyro device, and the X-axis and Y-axis are taken perpendicular to it. The spin axis of the gyro rotor 20 is arranged along the Z axis.

As shown in FIG. 1A, the gyro case 21
Has an upper bottom member 22, a lower bottom member 24, and a spacer 23 connecting the both, and the spacer 23 has an annular inner wall 23A.
Having. Thus, the upper bottom member 22 and the lower bottom member 2
4 and the inner wall 23 </ b> A of the spacer 23, a disk-shaped closed cavity 26 for accommodating the gyro rotor 20 is formed inside the gyro case 21. Such a cavity 26 is evacuated by a suitable method.

A recess 23B is formed outside the annular inner wall 23A of the spacer 23, and the recess 23B is connected to the cavity 26 by a passage 23C. The height of such a passage 23C may be 2-3 μm. A getter member 33 is disposed in such a concave portion 23B. Thereby, the cavity 26 can be maintained at a high degree of vacuum for a long time.

[0111] The gyro rotor 20 is formed of a conductive material. For example, single-crystal silicon (silicon) may be used as such a conductive material. By using a single crystal material, it is possible to provide a high-accuracy gyro rotor that is less affected by thermal distortion and aging. The upper bottom member 22 and the lower bottom member 24 of the gyro case 21 are formed of a non-conductive material, for example, glass. The spacer 23 may be formed of the same material as the gyro rotor 20. The method for manufacturing the gyro rotor 20 and the gyro case 21 will be described later in detail.

As shown on the right side of FIGS. 1A and 1B, a plurality of annular electrode portions 200A, 200B, 200C, 2
00D and 200A ', 200B', 200C'200
D 'is formed. That is, a plurality of annular grooves 200a, 200b, 200c, 20 are concentrically formed on the upper surface and the lower surface.
0d and 200a ', 200b', 200c ', 200
d 'is formed, and the annular groove forms a projecting annular electrode portion.

The upper and lower surfaces of the gyro rotor 20 of this example are provided with annular electrode portions 200A, 200B, 200C,
00D and 200A ', 200B', 200C ', 20
Drive electrode portions 200E and 200E 'are formed inside 0D'. Such drive electrode units 200E, 200
E ′ is configured as a plurality of sector-shaped protrusions formed between two concentric annular grooves 200d, 200e and 200d ′, 200e ′, and may be arranged in a ring along the circumference in a line. .

On the upper and lower surfaces of the gyro rotor 20,
In the center, that is, the driving electrode portions 200E and 200E '
Are formed with displacement detection electrode portions 200F and 200F ′. Such displacement detection electrode portions 200F, 2
Depressions 200f, 200f 'are formed at the center of 00F'.

The annular electrode portions 200A, 200B formed as protrusions on the upper and lower surfaces of the gyro rotor 20 are provided.
200C, 200D and 200A ', 200B', 20
0C ′, 200D ′, drive electrode units 200E, 200
E ′ and the displacement detection electrode portions 200F, 200F ′ may be formed coplanar.

On the other hand, as shown on the left side of FIG. 1A and FIG. 1B, at least three pairs of electrostatic support electrodes, in this example, on the inner surfaces of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21. First, second, third and fourth pairs of electrostatic support electrodes 2
21, 231, 222, 232, 223, 233 and 2
24 and 234 are arranged. The four pairs of electrostatic support electrodes are arranged at an angular interval of 90 ° from each other along the circumferential direction. For example, first and third pairs of electrostatic support electrodes 22
1, 231 and 223 and 233 are arranged along the X-axis, and the second and fourth pairs of electrostatic support electrodes 222, 232 and 224 and 234 are arranged along the Y-axis.

Each electrostatic support electrode is composed of a pair of comb portions.
For example, on the left side of FIG. 1B, a third pair of electrostatic support electrodes 22
3 and 233, an electrostatic support electrode 223 formed on the inner surface of the upper bottom member 22 is shown. This electrostatic support electrode 223 is composed of two comb-shaped portions 223-1 and 22-1 separated from each other.
23-2, wherein the two combs are spaced apart from each other.

One comb-shaped portion 223-1 has a radial portion 223R extending in the radial direction and a plurality of circumferential portions 223A and 223C extending in the circumferential direction. Similarly, the other comb-shaped portion 223-2 has a radial portion 223R extending in the radial direction and a plurality of circumferential portions 223B and 223D extending in the circumferential direction. Circumferential part 223 of each comb-shaped part 223-1, 223-2
A, 223C and 223B, 223D are alternately arranged so as to sandwich the other. Each comb 223-1, 22
Terminal portions 2 are provided at the ends of the radius portions 223R and 223R of 3-2.
23R 'and 223R' are formed respectively.

On the inner surfaces of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21, four pairs of electrostatic support electrodes 221 are provided.
231, 222, 232, 223, 233 and 224;
Driving electrodes 225 and 235 are formed inside 234, respectively. The driving electrodes 225 and 235 may be formed in a plurality of sectors arranged in a line along the circumference in a line.

On the inner surfaces of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21, the displacement detection electrodes 226, 236 are provided at the center, that is, inside the drive electrodes 225, 235.
Are formed.

Next, the annular electrode portion 2 of the gyro rotor 20
00A, 200B, 200C, 200D and 200
A ′, 200B ′, 200C ′, 200D ′ and the electrostatic support electrodes 221, 222, 223, 224 and 231 of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21;
The dimensions and relative positional relationships of 232, 233, and 234 will be described.

The outer diameter D of the gyro rotor 20 may be 5 mm or less, the thickness t may be 0.1 mm or less,
The mass may be less than 10 milligrams. In FIG. 1, 4
Book-shaped annular electrode portions 200A, 200B, 200C, 20
0D and 200A ', 200B', 200C ', 200
Although D 'is shown, a large number of annular electrode portions are actually formed. For example, the radial width L of each electrode portion
Is about 10 μm and is formed at regular intervals at a pitch of about 20 μm, and about 100 annular electrode portions are formed in an annular region having a width of about 2 mm in the radial direction. It is preferable that the width L and the pitch of each electrode portion in the radial direction are as small as possible as long as the manufacturing method allows.

The electrostatic support electrodes 221, 222, 22 of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21
3, 224 and 231, 232, 233, and 234 have the dimensions of the annular electrode portions 200A, 200B, 200C, and 200.
D and 200A ', 200B', 200C ', 200
It may be formed corresponding to the dimension of D ′. For example, in FIG. 1, each of the comb portions 223-1 of the third electrostatic support electrode 223,
223-2 circumferential portions 223A, 223C and 223B,
223D is shown as including a total of four,
Actually, a large number of circumferential portions are formed. For example, the radial width L of each circumferential portion is about 10 μm, and about 20 μm
, About 100 circumferential portions are formed in an annular region having a width of about 2 mm in the radial direction.

Next, the positional relationship between the electrode portion of the gyro rotor 20 and the electrostatic support electrode of the gyro case 21 will be described. For example, the electrode portions 200A of the gyro rotor 20 and 2
00B, 200C, 200D and 200A ', 200
The positional relationship between B ′, 200C ′, 200D ′ and the third pair of electrostatic support electrodes 223, 233 will be described. The first circumferential portions 223A and 233A of the third pair of electrostatic support electrodes 223 and 233 correspond to the first electrode portions 200A and 200A 'of the gyro rotor 20, and the second electrode portion 200
B, a third pair of electrostatic support electrodes 223 for 200B '
Correspond to the second circumferential portions 223B and 233B. Similarly, the third and fourth circumferential portions 2 are formed with respect to the third and fourth electrode portions 200C and 200C 'and 200D and 200D'.
23C, 233C and 223D, 233D correspond.

The gap δ between the electrode portion of the gyro rotor 20 and the corresponding electrostatic support electrode of the gyro case 21 may be several μm, for example, δ = 2 to 3 μm.

Each electrode section 200A of the gyro rotor 20
200B, 200C, 200D and 200A ', 200
B ′, 200C ′, and 200D ′ are the circumferential portions 223A, 233A, and 223 of the corresponding electrostatic support electrodes 223 and 233.
B, 233B, 223C, 233C and 223D, 23
It is arranged concentrically with respect to 3D but at the same time it is arranged radially inward or outward.

For example, each electrode section 2 of the gyro rotor 20
00A, 200B, 200C, 200D and 200
The widths and pitches of A ′, 200B ′, 200C ′, and 200D ′ correspond to the circumferential portions 223A, 233A, 223B, 233B, and 223C of the corresponding electrostatic support electrodes 223 and 233.
Equal to the width and pitch of 233C and 223D, 233D, they are offset radially inward or outward by a predetermined distance from each other.

Each electrode section 200A of the gyro rotor 20
200B, 200C, 200D and 200A ', 200
The case where B ′, 200C ′, and 200D ′ are arranged radially inward from the circumferential portion of the corresponding electrostatic support electrode will be described using the third electrostatic support electrodes 223 and 233 as an example.

For example, the inner diameters of the first electrode portions 200A and 200A 'of the gyro rotor 20 are smaller than the inner diameters of the corresponding first circumferential portions 223A and 233A, respectively, and the outer diameters of the first electrode portions 200A and 200A'. Are smaller than the outer diameters of the corresponding first circumferential portions 223A and 233A, respectively. Similarly, the second, third and fourth electrode portions 200B, 200B ', 200C, 200C' and 2 of the gyro rotor 20
The inner diameters of 00D and 200D 'correspond to the second, third and fourth circumferential portions 223A, 233A, 223B, 233B,
The second, third and fourth electrode portions 200B, 200B ', 200C, 200 of the gyro rotor 20 are smaller than the inner diameters of 223C, 233C and 223D, 233D, respectively.
The outer diameters of C ′ and 200D, 200D ′ correspond to the second,
Third and fourth circumferential portions 223A, 233A, 223B,
233B, 223C, 233C and 223D, 233D
Smaller than the outer diameter of each.

The electrode portion of the gyro rotor 20 and the first and second
And a fourth pair of electrostatic support electrodes 221, 231, 222,
The same applies to the positional relationship among the 232, 224, and 234. Also, the electrode portions 200A, 200A of the gyro rotor 20
B, 200C, 200D, 200A ', 200B', 2
The same applies to the case where each of 00C 'and 200D' is disposed radially outward from each of the corresponding circumferential portions of the electrostatic support electrodes.

Here, the reason why the electrostatic support electrode of the present example is configured to include a pair of comb-shaped portions arranged so as to sandwich the other staggeredly will be described. With this configuration, the capacitance between each pair of comb portions and the corresponding electrode portion of the gyro rotor 20 is equal on the upper side and the lower side of the gyro rotor 20. For example, in the first electrostatic support electrodes 221 of the first pair of electrostatic support electrodes 221 and 231, the first comb-shaped portions 221-1 (221A and 221C) and the first and second gyro rotors 20 corresponding to the first comb-shaped portions 221-1 and 221C are formed. The capacitance between the third electrode portions 200A and 200C is the second comb-shaped portion 221-2 (221B and 221D) and the corresponding second and third electrode portions 200C and 200C of the gyro rotor 20.
Equal to the capacitance between the 00D are both C _1A.

Accordingly, the first comb portions 221-1 (221)
A, 221C) and the control DC voltage applied to the second comb portions 221-2 (221B, 221D) are equal in magnitude and opposite in polarity, for example, ± V _1A . Thus, the potential of the gyro rotor 20 can be always set to zero. This will be described again later with reference to FIG.

The same applies to the second electrostatic support electrode 231 of the first pair of electrostatic support electrodes 221 and 231. Also, the second, third and fourth electrostatic support electrodes 222, 232, 2
The same applies to 23, 233, 224, and 234.

The driving electrode 2 of the gyro rotor 20
00E, 200E 'and displacement detection electrode portions 200F, 2
Drive electrode 2 of gyro case 21 corresponding to 00F '
25, 235 and the displacement detection electrodes 226, 236 may be arranged in the same shape and at the same position in the radial direction.

Discharge stoppers 127 and 128 are provided at the center of the inner surfaces of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21, that is, at the center of the displacement detection electrodes 226 and 236, respectively. Have been. The stoppers 127 and 128 are arranged corresponding to recesses 200f and 200f 'formed at the center of the upper and lower surfaces of the gyro rotor 20, respectively.

The discharge and stoppers 127 and 128 limit the displacement of the gyro rotor 20 in the Z-axis direction, the X-axis direction and the Y-axis direction, and prevent the gyro rotor 20 from contacting the inner surface of the gyro case 21. It is provided for discharging static electricity accumulated in the gyro rotor 20.

When the gyro rotor 20 is displaced in the Z-axis direction and approaches the inner surface of the gyro case 21, before the electrodes of the gyro rotor 20 come into contact with the electrodes of the gyro case 21, the discharge / stop stoppers 127 and 128 are turned on. 20 abuts the bottoms of the recesses 200f, 200f '. Further, when the gyro rotor 20 is displaced in the X-axis or Y-axis direction, before the gyro rotor 20 comes into contact with the circumferential inner wall 23A of the gyro case 21, the discharge and stopper 127, 1
28 are recesses 200f, 200f 'of the gyro rotor 20.
Abuts the inner circumferential wall of

As a result, the displacement of the gyro rotor 20 in the Z-axis direction, the X-axis direction and the Y-axis direction is restricted, and the gyro rotor 20 is prevented from contacting the inner surface of the gyro case 21. When the gyro rotor 20 stops and lands, the discharge / stop stoppers 127 and 128 abut against the concave portions 200f and 200f ′ of the gyro rotor 20, so that the static electricity accumulated in the gyro rotor 20 causes the discharge / stop stoppers 127 and 128 to move. Discharged to the outside via

The electrostatic supporting electrodes 221 and 23 formed on the upper bottom member 22 or the lower bottom member 24 of the gyro case 21
1, 222, 232, 223, 233, 224, 23
4. Drive electrodes 225 and 235 and displacement detection electrode 22
6, 236 and an external power supply or an external circuit may be electrically connected by through-hole connection. Upper bottom member 2
A small hole, that is, a through hole is provided in the second or lower bottom member 24, and a metal film is formed on an inner surface of the through hole. With such a metal film, the electrostatic support electrode, the drive electrode, and the displacement detection electrode are connected to an external power supply or an external circuit.

As shown in FIG. 1A, a preamplifier 35, for example, a field effect transistor is disposed on the outer surface of the upper bottom member 22, and the preamplifier 35 is connected to displacement detection electrodes 226 and 236. . Upper bottom member 2
2 and through hole 22A in lower bottom member 24 (only through hole 22A provided in upper bottom member 22 is shown)
Are provided, and the preamplifier 35 is connected to the displacement detection electrodes 226 and 326 by a metal thin film formed on the inner surface of the through hole 22A.

As will be described later with reference to FIG. 3, the comb portions of each pair are electrically connected. Therefore, for example, the comb-shaped portion 22 of the third pair of first electrostatic support electrodes 223
A through hole 22B (only one is shown) is provided corresponding to each of the terminal portions 223R 'and 223R' of 3-1 and 223-2, and the metal thin film formed on the inner surface of the through hole 22B is an upper bottom member. 22 is connected to a common terminal provided outside. Thereby, the two comb-shaped parts 223-
Terminal portions 223R 'and 223R' of 1, 223-2 are electrically connected. Similarly, the terminal portions 23 of the comb-shaped portions 231-1 and 231-2 of the first pair of the second electrostatic support electrodes 231.
Through holes 24 corresponding to each of 1R 'and 231R'
A (only one shown) is provided, and the through hole 2
The metal thin film formed on the inner surface of 4A is connected to a common terminal provided outside lower bottom member 24. Thereby 2
Terminals 231 of two comb-shaped portions 231-1, 231-2
R 'and 231R' are electrically connected.

FIG. 2 shows an example of a control loop of the gyro device according to the present invention. The control loop of this example is a constraint control unit 150.
, A rotor drive system including the rotor drive unit 160, and a sequence control unit 170.

The constraint control unit 150 of this embodiment detects a displacement detection current i _P and converts it into a displacement detection voltage V _P , that is, the preamplifier 35 and the displacement detection voltage V _P. Input _P to control DC voltage ± V _1A to ±
V _4A and ± V _1B to ± V _4B . DC control outputted by the control arithmetic unit 140 voltage _{± V 1A ~ ± V 4A,} ± V 1B ~ ± V 4B each displacement detection AC voltage _{AC 1A ~AC 4A, AC 1B ~AC} 4B is added static It is supplied to the electrode 221 to 224 and 231 to 234. The gyro device of this example has a control operation unit 1
Gyro acceleration output calculator 1 for inputting 40 output signals
45 are provided, which will be described in detail later.

Electrostatic support electrodes 221-224, 231-2
DC voltage for control ± V_1A~ ± V _4A, ± V_1B~ ± V_4B
Gyro rotor 20 is applied to
Floatingly supported and restrained in the sub-position. Electrostatic support electrode 2
21 to 224 and 231 to 234 are AC voltages A for detecting displacement.
C_1A~ AC_4A, AC_1B~ AC_4BBy applying
For detecting the displacement formed on the inner surface of the gyro case 21
Displacement detection current i is applied to electrodes 226 and 236._PFlows. Such
Current i for displacement detection_PIs the voltage by the preamplifier 35
Signal V_PIs converted to Such a voltage signal V_PIs gyro
Includes all linear and rotational displacements of the rotor 20.

Such a voltage signal V_PTo the control operation unit 140
Supplied. Gyro rotor by control arithmetic unit 140
20 displacements in the Z-axis direction ± Δz, displacements in the X-axis direction ± Δx and
And Y-axis displacement ± Δy and rotation around X-axis and Y-axis
Displacement Δφ, Δθ (positive in the direction of the arrow shown in the upper right of FIG. 2)
You. ) Is detected. Furthermore, the electrostatic supporting
For control to be applied to poles 221 to 224, 231 to 234
DC voltage ± V_1A~ ± V _4A, ± V_1B~ ± V_4BIs calculated
You. Thus, the control DC voltage ± V_1A~ ± V_4A, ± V_1B~
± V_4BIs changed, and the gyro rotor 20 has a deviation amount of zero.
It is returned to its original position.

The control loop or the restraint system of this embodiment is different from the conventional one in that the amount of deviation of the gyro rotor 20 is actually measured and the electrostatic force is positively changed so that the amount of deviation becomes zero. Unlike the passive type restraint system, the active type is configured.

Next, the operation of the constraint control system according to the present invention will be described in detail with reference to FIG. Although the gyro rotor 20 is actually rotating at high speed, four portions of the gyro rotor 20 located at positions corresponding to the first, second, third and fourth pairs of electrostatic support electrodes are respectively separated. P _1, P _2, P
₃ and P ₄ to.

FIG. 3 shows the gyro device of this embodiment in the XZ plane.
Is shown along the X-axis.
First and third pairs of electrostatic support electrodes 221, 23 placed
1 and 223, 233 and the corresponding gyro rotor
20 first and third parts P ₁, P_ThreeIt is shown.
Second and fourth pairs of electrostatic support electrodes arranged along the Y axis
The second and fourth poles of the gyro rotor 20 corresponding to the poles
Part P_TwoAnd P_FourIs not shown, but is perpendicular to the paper.
Are arranged along different directions.

Circumferential part 2 of first pair of electrostatic support electrodes 221
21A, 221B, 221C and 221D are electrode portions 200A, 200B, 200C on the upper surface of the gyro rotor 20;
200D, a first pair of electrostatic support electrodes 23
1 are provided on the lower surface of the gyro rotor 20 with the electrode portions 200A ', 200A', 231B, 221C, 221D.
B ′, 200C ′, and 200D ′, corresponding to the circumferential portions 223A, 223B,
223C and 223D correspond to the electrode portions 200A, 200B, 200C and 200D on the upper surface of the gyro rotor 20, and the circumferential portion 233 of the third pair of electrostatic support electrodes 233.
A, 233B, 233C and 233D are gyro rotors 2
0 electrode portions 200A ′, 200B ′, 200
C 'and 200D'.

First, the application of the control DC voltage will be described. First comb-shaped portion 2 of first pair of electrostatic support electrodes 221
The circumferential portions 221A and 221C of 21-1 are added to an adder 36-1.
A is connected to the DC voltage −V _1A via A, and the circumferential portions 221B and 221D of the second comb portion 221-2 are connected to the adder 36+
1A is connected to the DC voltage + V _1A, and the circumferential portions 231A and 231C of the first comb-shaped portion 231-1 of the first pair of electrostatic support electrodes 231 are connected to the DC voltage via the adder 36-1B. is connected to a voltage -V _1B, circumferential portions of the second comb-shaped portion 231-2 231B, 231D are connected to the DC voltage + V _1B via an adder 36 + 1B.

[0151] Similarly, circumference of the first comb-shaped portion 223-1 of the electrostatic supporting electrode 223 of the third pair 223A, 223C are connected to the DC voltage -V _3A via the adder 36-3A , Circumferential portion 223B, 223 of second comb-shaped portion 223-2
D is connected to the DC voltage + V _3A via the adder 36 + 3A, and is connected to the first comb-shaped portion 2 of the third pair of electrostatic support electrodes 233.
The circumferential portions 233A and 233C of 33-1 are added to an adder 36-3.
B is connected to the DC voltage −V _3B, and the circumferential portions 233B and 233D of the second comb-shaped portion 233-2 are connected to the adder 36+
It is connected to DC voltage + V _3B via 3B.

Next, application of the detection AC voltage will be described. First and third pairs of electrostatic support electrodes 221, 231
223 and 233 are applied with detection AC voltages AC _1A , AC _1B , AC _3A and AC _3C superimposed on the control DC voltage. As shown, the first pair of adders 36-1A, 36-1
+ 1A, 36-1B, and 36 + 1B are supplied with detection AC voltages AC _1A , AC _1B and AC _3A , and AC _3C , respectively, and a third pair of adders 36-3A, 36 + 3A and 36-3B, 3
The detection AC voltages AC _3A and AC _3C are applied to 6 + 3B. Such detection AC voltages AC _1A , AC _1B , A
C _3A and AC _3C are respectively expressed as follows.

[0153]

AC _1A = −EX−Eθ−EZ AC _1B = −EX + Eθ + EZ AC _3A = + EX + Eθ−EZ AC _3B = + EX−Eθ + EZ

Here, detection AC voltages AC _1A , AC _1B ,
The terms on the right side of AC _3A and AC _3B are expressed as follows.

[0155]

+ EX = E ₀ cos (ω ₁ t + ζ ₁ ) −EX = E ₀ cos (ω ₁ t + η ₁ ) + Eθ = E ₀ cos (ω ₄ t + ζ ₄ ) −Eθ = E ₀ cos (ω ₄ t + η ₄ ) + EZ = E ₀ cos (ω ₃ t + ζ ₃ ) −EZ = E ₀ cos (ω ₃ t + η ₃ )

Here, ± EX is the X of the gyro rotor 20.
Voltage component for detecting axial linear displacement ΔX, ± E
θ is a voltage component for detecting a rotational displacement Δθ of the gyro rotor 20 around the Y axis, and ± EZ is a voltage component for detecting a linear displacement ΔZ of the gyro rotor 20 in the Z-axis direction. ω ₁ , ω ₃ , ω ₄ are displacement detection frequencies. The signs ± EX, ± Eθ, and ± EZ indicate a phase difference of 180 degrees from each other. Therefore, the following relationship exists between the phase differences ζ and η.

[0157]

Η ₁ = ζ ₁ ± 180 ° η ₃ = ζ ₃ ± 180 ° η ₄ = ζ ₄ ± 180 °

The gyro device of this example is cut along the YZ plane.
Although the cut section is not shown, it is arranged along the Y axis.
Second and fourth pairs of electrostatic support electrodes 222, 232 and 2
24, 234 and the corresponding gyro rotor 20
2nd and 4th part P_TwoAnd P _FourA similar argument holds for
Holds. Second and fourth pairs of electrostatic support electrodes 222, 2
32 and 224, 234, the first comb
And the second comb-shaped part have the same size but opposite polarity.
Pressure is applied.

[0159] The first circumferential portion 222A of the comb-shaped portion 222-1 of the electrostatic supporting electrode 222 of the second pair, 222C are connected to a DC voltage -V _2A, the circumference of the second comb-shaped portion 222-2 Part 2
22B and 222D are connected to the DC voltage + V _2A , the circumferential portions 232A and 232C of the first comb portion 232-1 of the second pair of electrostatic support electrodes 232 are connected to the DC voltage -V _2B ,
Circumference of the second comb-shaped portion 232-2 232B, 232D are connected to the DC voltage + V _2B.

Similarly, the fourth pair of electrostatic support electrodes 224
The circumferential portions 224A and 224C of the first comb-shaped portion 224-1 are
DC voltage -V_4ATo the second comb-shaped part 224-2.
The circumference parts 224B and 224D are DC voltage + V_4AConnected to
And the first comb-shaped portion 23 of the fourth pair of electrostatic support electrodes 234.
4-1 circumferential portions 234A and 234C are DC voltage -V._4BTo
Connected, the circumferential portion 234B of the second comb portion 234-2,
234D is DC voltage + V _4BIt is connected to the.

The detection AC voltages AC _2A , AC _2B , AC _4A , and AC _4C applied to the second and fourth pairs of electrostatic support electrodes 222, 232 and 224, 234 corresponding to the equation (10).
The following equation is obtained for

[0162]

## EQU13 ## AC _2A = −EY−Eφ−EZ AC _2B = −EY + Eφ + EZ AC _4A = + EY + Eφ−EZ AC _4B = + EY−Eφ + EZ

The detection AC voltages AC _2A , AC _2B , AC _4A ,
Each term on the right side of AC _4B is expressed as follows.

[0164]

+ EY = E ₀ cos (ω ₂ t + ζ ₂ ) −EY = E ₀ cos (ω ₂ t + η ₂ ) + Eφ = E ₀ cos (ω ₅ t + ζ ₅ ) −Eφ = E ₀ cos (ω ₅ t + η ₅ ) + EZ = E ₀ cos (ω ₃ t + ζ ₃ ) −EZ = E ₀ cos (ω ₃ t + η ₃ )

Here, ± EY is the Y of the gyro rotor 20.
Voltage component for detecting axial linear displacement ΔY, ± E
φ is a voltage component for detecting a rotational displacement Δφ of the gyro rotor 20 around the X axis, and ± EZ is a voltage component for detecting a linear displacement ΔZ of the gyro rotor 20 in the Z-axis direction. ω ₂ , ω ₃ , ω ₅ are detection frequencies. The phase difference included in such a voltage component is expressed as follows.

[0166]

Η ₂ = ζ ₂ ± 180 ° η ₃ = ζ ₃ ± 180 ° η ₅ = ζ ₅ ± 180 °

Next, the principle of the displacement detection system of this embodiment will be described with reference to FIG. FIG. 4 shows an equivalent circuit of the constraint control system and the rotor drive system. In the equivalent circuit of the constraint control system, the first and third
Pairs of electrostatic support electrodes 221, 231 and 223, 233
And the corresponding electrode section 200 of the gyro rotor 20
A, 200A ', 200C, 200C' have been replaced by capacitors. As described above, in the first electrostatic support electrodes 221 of the first pair of electrostatic support electrodes 221 and 231, between the first comb-shaped portion 221-1 and the first and third electrode portions 200A and 200C. And the second comb-shaped portion 22
1-2, the capacitance between the second and fourth electrode units 200B, 200D is equal to _C1A , and the second electrostatic support electrode 2
31, the first comb-shaped portion 231-1 and the first and third
Of the capacitance between the electrode portions 200A 'and 200C'
221-2 and the second and fourth electrode portions 200
The capacitance between B 'and 200D' is equal to _C1B .

Similarly, a third pair of electrostatic support electrodes 223,
233, the first comb-shaped part 223-1 and the first and third electrode parts 200A and 200A.
Capacitance between 0C and second comb-shaped portion 223-2 and the second and fourth electrode portions 200B, the capacitance between the 200D is equally C _3A, in the second electrostatic supporting electrode 233 ,
First comb portion 233-1 and first and third electrode portions 200
The capacitance between A ′ and 200C ′ and the second comb portion 233
-2 and the second and fourth electrode portions 200B ', 200D' capacitance between the equally C _3B. Displacement detection electrode 22
6, 236 and the corresponding capacitances of the capacitors constituted by the displacement detecting electrode portions 200F and 200F 'of the gyro rotor 20 are denoted by C _FA and C _FB , respectively.

For example, it is assumed that the gyro rotor 20 is linearly displaced by ΔX in the X-axis direction, is rotationally displaced about the Y-axis by a rotation angle Δθ, and is linearly displaced by ΔZ in the Z-axis direction. Assuming that such displacement is sufficiently small, the capacitance of each capacitor is expressed as follows.

[0170]

C _1A = C ₀ (1 + ΔX + ΔZ + Δθ) C _1B = C ₀ (1 + ΔX−ΔZ−Δθ) C _3A = C ₀ (1−ΔX + ΔZ−Δθ) C _3B = C ₀ (1−ΔX−ΔZ + Δθ)

Here, C ₀ is the capacitance of each capacitor when all displacements are zero. Conversely, from this equation, each displacement Δ
X, ΔZ, and Δθ can be represented by the capacitance of a capacitor.

[0172]

ΔX = (1 / 4C ₀ ) (C _1A + C _1B −C _3A −C _3B ) Δθ = (1/4 C ₀ ) (C _1A −C _1B −C _3A + C _3B ) ΔZ = (1 / 4C _{0) (C 1A -C 1B +} C 3A -C 3B)

In each electrostatic support electrode, two comb-shaped portions 221-1 and 221-2, 231-1 and 231-2, and
23-1 and 223-2, 233-1 and 233-2,
Control DC voltage ± V of equal and opposite polarities
_1A , ± V _1B , ± V _3A , ± V _3B are applied, so that the potentials at the midpoints Q ₁ , Q ₃ of the two pairs of capacitors become zero. According to this example, since the control DC voltages having the same magnitude and different polarities are applied to the comb-shaped portions of each pair of the electrostatic support electrodes, the potential of the gyro rotor 20 is zero.

The first and third electrostatic support electrodes 221 and 23
1 and 223, 233 superimposed on the control DC voltage,
AC voltage for detection AC _1A , AC _1B and AC _3A , A
When C _3B is applied, a displacement detection AC current i _P is generated in the displacement detection capacitor. Such displacement detection AC current i
_P is represented by the following equation. Note that s and Laplace operator.

[0175]

I _P = K ₁₃ (C _1A AC _1A + C _1B AC _1B + C _3A AC _3A + C _3B AC _3B ) K ₁₃ = 2 (C _FA + C _FB ) s / (2C _1A + 2C _1B + 2C _3A + 2C _3B + C _FA) + C _FB )

Here, s is a Laplace operator. this
The detection AC voltage A expressed by the equation (10)
C_1A, AC_1BAnd AC_3A, AC_3BAnd Equation 16
Expressed capacitance C_1A, C_1BAnd C_3A, C_3BSubstituting
When tidy, AC current i for displacement detection _PIs represented as
You.

[0177]

I _P = K ₁₃ ′ (EXΔX + EθΔθ + EZΔZ) K ₁₃ ′ = −8 s (C _FA + C _FB ) / (8C ₀ + C _FA + C _FB )

The gyro device of this example is cut along the YZ plane.
Although the cut section is not shown, it is arranged along the Y axis.
Second and fourth pairs of electrostatic support electrodes 222, 232 and 2
24, 234 and the corresponding gyro rotor 20
2nd and 4th part P_TwoAnd P _FourA similar argument holds for
Holds.

For example, the gyro rotor 20 is linearly displaced by ΔY in the Y-axis direction, linearly displaced by ΔZ in the Z-axis direction,
It is assumed that it is rotationally displaced around the X axis by a rotational angle Δφ. Corresponding to the equation (16), the capacitance of each capacitor is expressed as follows.

[0180]

C _2A = C ₀ (1 + ΔY + ΔZ + Δφ) C _2B = C ₀ (1 + ΔY−ΔZ−Δφ) C _4A = C ₀ (1−ΔY + ΔZ−Δφ) C _4B = C ₀ (1−ΔY−ΔZ + Δφ)

The displacement ΔX, Δ
When Y and Δφ are represented by the capacitance of a capacitor, the result is as follows.

[0182]

ΔY = (1 / 4C ₀ ) (C _2A + C _2B −C _4A −C _4B ) Δφ = (1 / 4C ₀ ) (C _2A −C _2B −C _4A + C _4B ) ΔZ = (1 / 4C) _{0) (C 2A -C 2B +} C 4A -C 4B)

As a result, the gyro rotor 20 is shifted in the X-axis direction by Δ
Linearly displaced by X and linearly displaced by ΔY in the Y-axis direction;
Displaces linearly by ΔZ in the axial direction, and has a rotation angle Δθ around the Y axis.
And a rotational displacement around the X axis by a rotational angle Δφ
In this case, the displacement detection AC current i _PIs represented by the following equation
You.

[0184]

## EQU22 ## i _P = K _I (EXΔX + EYΔY + EZΔZ + EθΔθ + EφΔφ) K _I = −8 sC ₀ (C _FA + C _FB ) / (8C ₀ + C _FA + C _FB )

Here, K _I is a proportional constant, and s is a Laplace operator. The displacement detection AC current i _P is supplied to a preamplifier 35 via a resistor 36 having a resistance value R.
It is converted for displacement detection AC voltage V _P. Such displacement detection AC voltage V _P is expressed by the following equation.

[0186]

_VP = _VP (X) + _VP (Y) + _VP (Z) + _VP (θ) + _VP (φ)

Here, the terms on the right side are the displacements ΔX, ΔY, Δ
These are voltage components corresponding to Z, Δθ, and Δφ, and are expressed as follows.

[0188]

V _P (X) = K _I EXΔX = K _{V 1} E ₀ ω ₁ ΔX sin (ω ₁ t + ζ ₁ ) V _P (Y) = K _I EYΔY = K _{V 2} E ₀ ω ₂ ΔY sin (ω ₂ t + ζ ₂ ) V _P (Z) = K _I EZΔZ = K _V3 E ₀ ω ₃ ΔZ sin (ω ₃ t + ζ ₃ ) V _P (θ) = K _I EθΔθ = K _V4 E ₀ ω ₄ Δθ sin (ω ₄ t + ζ ₄ ) V _P (φ _{) = K I EφΔφ = K V5} E 0 ω 5 Δφsin (ω 5 t + ζ 5)

Here, K _{V1 to} K _V5 are constants determined by the capacitances C ₀ , C _FA , and C _FB of the capacitors. As apparent from the formula of the formula and the number 24 of the number 23, the output voltage V _P is independently include all displacements of the gyro rotor 20. Therefore, if a desired voltage component is extracted from the equation (23), a corresponding displacement can be obtained. For example, linear displacement ΔX, Δ
Even when two or more Y and ΔZ and two or more rotational displacements Δθ and Δφ are superimposed, each displacement can be obtained by extracting the corresponding voltage component. Also, this equation shows that the output voltage _VP is linear displacement Δ
It shows that the amplitude is modulated by the displacement detection frequencies ω _{1 to} ω ₅ corresponding to X, ΔY, ΔZ and the rotational displacements Δθ, Δφ.

Next, the rotor drive system in the gyro device of the present invention will be described. As shown in FIGS. 2, 3 and 4,
The rotor drive system of the present embodiment includes drive electrode portions 200E and 200E 'formed on the upper and lower surfaces of the gyro rotor 20, and the upper bottom member 22 or the lower bottom member 2 of the gyro case 21.
4 includes the drive electrodes 225 and 235 and the rotor drive unit 160. The rotor drive system of this example receives a command signal from the sequence control unit 170 and
5 and 235, the gyro rotor 2
0 is started, rotated, and stopped.

As shown in FIG. 1B and as described above, the driving electrode portion 200E and the driving electrode 225 of the gyro rotor 20 and the driving electrode portion 200E ′ and the driving electrode 235 have the same radius. It is arranged in one row on the circumference and is composed of a plurality of sector-shaped portions each having the same shape.

The driving electrode portions 200E and 200 of the present example
E ′ and the driving electrodes 225 and 235 constitute a three-phase electrode. According to this example, the upper drive electrode portion 200E of the gyro rotor 20 includes four fan-shaped portions separated by a central angle of 90 ° from each other, and the lower drive electrode portion 200E ′.
Includes four sectors separated by a central angle of 90 ° from each other.

Correspondingly, the upper driving electrode 225 of the gyro case 21 includes twelve fan-shaped portions spaced at the same central angle, and the lower driving electrode 235 at the same central angle. Includes twelve spaced sectors. Each of the twelve drive electrodes 225 or 235 comprises four sets of sectors, each set having three sectors,
That is, it is composed of a first phase, a second phase, and a third phase sector.

The sector of the corresponding phase of each set of driving electrodes 225 or 235 is electrically connected to each other. For example, four driving electrodes 225 or 235 of the first phase are connected to each other, and four driving electrodes 225 or 23 of the second phase are connected.
5 are connected to each other, and the four driving electrodes 225 or 235 of the third phase are connected to each other.

A three-phase driving voltage is applied to the three-phase common terminal. The driving voltage may be a step voltage or a pulse voltage. Such drive voltages are sequentially switched to four adjacent sectors of the next phase. The switching of the driving voltage is performed in synchronization with the rotation of the gyro rotor 20. Thereby, the gyro rotor 20 rotates at high speed. Since the gap 26 of the gyro case 21 is maintained in a vacuum, the driving voltage may be cut off when the rotation speed of the gyro rotor 20 increases, but the driving voltage may be constantly applied.

The driving electrode section 20 constituting the three-phase electrode
OE and 200E 'and drive electrodes 225, 235 may be configured to include more sectors. For example,
Each of the driving electrode portions 200E and 200E 'may include five sectors, and correspondingly, each of the driving electrodes 225 and 235 may include five sets (15) of sectors. .

The equivalent circuit of the rotor drive system is shown on the right side of FIG. The driving electrode section 200E of the gyro rotor 20 and the driving electrode section 225 of the gyro case 22 are replaced with capacitors, and the driving electrode section 200E of the gyro rotor 20 is replaced with a capacitor.
E ′ and the drive electrode 235 of the gyro case 24 are replaced by capacitors. Each capacitor has a driving DC voltage VR for rotationally driving the gyro rotor 20.
AC voltages ACR1, ACR2, AC for detecting the rotation angles of the gyro rotor 20 and VR1, VR2 and VR3.
R3 is applied.

The operation of the drive motor of this embodiment will be described in detail with reference to FIG. FIG. 5 shows the driving electrode unit 200 on the upper side of the gyro rotor 20 which is actually arranged in a circumferential shape.
A state where E and the corresponding drive electrode 225 on the upper side of the gyro case 22 are arranged linearly is shown.

The driving electrode portion 200E on the upper side of the gyro rotor 20 has four fan-shaped portions 200E-1, 200E-2, 200E-3, and 2 which are separated from each other at a central angle of 90 °.
00E-4. In response, gyro case 2
2, the upper drive electrode 225 includes twelve sectors,
These consist of four sets, each set containing three or three-phase sectors. Reference numerals 225-1, 225-2, and 225 are assigned to the first, second, and third phase sectors of each set of sectors.
Add -3.

The four sectors 225-1 of the first phase are electrically connected to each other, and the four sectors 225-225 of the second phase.
2 are electrically connected to each other, and the four sectors 225-3 of the third phase are electrically connected to each other.

A command signal from the sequence control section 170 is supplied to the rotor drive section 160, and the three-phase drive electrodes 225-1, 225-2, and 225 are supplied by the command signal.
-3 are applied with the driving DC voltages VR1, VR2, VR3 and the detecting AC voltages ACR1, ACR2, ACR3.

The first, second and third phase driving electrodes 22
5-1, 225-2 and 225-3 have a predetermined switching time Δ
The driving DC voltages VR1, VR2, and VR3 are applied in order at every t. As a result, the gyro rotor 20 moves 360 degrees around the center axis, that is, the spin axis every switching time Δt.
Rotate by degrees / 12 = 30 degrees.

The lower graph of FIG. 5 shows the rotation angle detection currents generated at the displacement detection electrodes 226 and 236 or the rotation angle detection voltages ACQ1, ACQ2 and ACQ3 corresponding thereto.
It is. Such rotation angle detection signals ACQ1, ACQ2,
The rotation angle of the gyro rotor 20 is detected by the ACQ3.

For example, the first-phase driving electrode 225-1
Is applied with the driving DC voltage VR1, the four driving electrode units 200E-1, 200E-2, 200E-3,
00E-4 is the first phase drive electrodes 225-1 and 225
-1, 225-1, 225-1, that is,
The gyro rotor 20 rotates around the central axis by 30 degrees, and when the driving DC voltage VR2 is applied to the second-phase driving electrode 225-2, the four driving electrode portions 200 are rotated.
E-1, 200E-2, 200E-3, and 200E-4 are driving electrodes 225-2, 225-2, and 225 of the second phase.
-2, 225-2, that is, the gyro rotor 20 rotates around the central axis by 30 degrees.

Referring to FIG. 6, the structure and operation of the rotor driving section 160 will be described. Displacement detection current i _p generated in the displacement detection electrode 226, 236 is converted to a voltage V _p for the displacement detected by the displacement detecting circuit 35, such a displacement detection voltage V _p is supplied to the rotor drive unit 160. Displacement detection current i _p is the rotation angle detection current ACQ shown on the lower side of FIG. 5
1, ACQ2 and ACQ3. Thus the displacement detection voltage V _p includes a rotational angle detection voltage signal of such a waveform shown at the bottom of FIG.

[0206] Such displacement detection voltage V _P is synchronously detected by the three synchronous detector 160-1,160-2,160-3, three rotation angle detection voltage of the waveform shown at the bottom of FIG. 5 ACQ1 , ACQ2 and ACQ3 are obtained. Synchronous detector 160-1,160-2,160-3 is synchronously detects a reference signal ACR1, ACR2, ACR3 displacement detection voltage V _P as a reference signal having a predetermined period. Output signals of the synchronous detectors 160-1, 160-2, and 160-3 are supplied to the rotation angle calculator 160-7 via the filters 160-4, 160-5, and 160-6.

The rotation angle calculator 160-7 calculates the rotation angle of the gyro rotor 20. That is, the four drive electrode portions 200E-1, 200E-2, 20 of the gyro rotor 20
0E-3 and 200E-4 are three-phase driving electrodes 225-
It is determined which of the phases 1, 22, 25, and 225-3 corresponds to the driving electrode of which phase.

The commutation calculation section 160-8 generates a switching signal based on the rotation angle of the gyro rotor 20. The rotor drive voltage generator 160-9 receives the switching signal supplied from the commutation calculator 160-8 and receives the three-phase drive electrodes 225-1, 225-2, and 22.
Drive DC voltages VR1, VR2, VR supplied to 5-3
Generates 3.

Next, the operation of sequence control section 170 will be described. The sequence control unit 170 has a start mode, a steady operation mode, and a stop mode, and supplies a command signal corresponding to each mode to the rotor drive unit 160. In the start mode, the commutation calculation section 160-7 generates a predetermined switching signal or a switching time signal so that the rotation speed of the gyro rotor 20 increases. When the rotation speed of the gyro rotor 20 reaches a certain speed, the sequence control section 170 generates a steady operation mode signal and supplies it to the rotor drive section 160.

In the steady operation mode, the commutation calculation section 160-8 supplies a constant switching time signal to the rotor drive voltage generation section 160-9. In the stop mode, a predetermined switching signal or switching time signal is generated so that the rotation speed of the gyro rotor 20 decreases.

FIG. 7 shows the configuration of the control operation unit 140 and the gyro acceleration output operation unit 145 of the gyro device according to the present invention.
Is shown. Control calculation unit 140 of this embodiment, the linear displacement ΔX inputs the output voltage V _P of the preamplifier 35, [Delta] Y, [Delta] Z and rotational displacement [Delta] [theta], the displacement of the displacement calculation part 141 and the gyro rotor 20 for calculating the Δφ zero Acceleration (dimensionless amount) fx, f to be applied to the gyro rotor 20
PI for calculating y, fz and rotational moments fθ, fφ
D calculation unit 142 and control DC voltage change amount ΔV _1A , ΔV
_1B , ΔV _2A , ΔV _2B , ΔV _3A , ΔV _3B , ΔV _4A , ΔV _4B
And a control voltage generator 144 that generates control DC voltages V _1A , V _1B , V _2A , V _2B , V _3A , V _3B , V _4A , and V _4B . The gyro device has a gyro acceleration output calculation unit 145. The gyro acceleration output calculation unit 145 inputs the accelerations fx, fy, fz and the rotational moments fθ, fφ output by the control calculation unit 140, and outputs a gyro output. α _X , α _Y ,
Calculate α _Z , dθ / dt, dφ / dt.

The configuration and operation of the displacement calculator 141 of this example will be described with reference to FIG. The displacement calculation unit 141 of the present example includes:
The first synchronous detector 141-1, the frequency omega ₂ of the reference signal to determine the first equation voltage component V _P of the formula synchronous detection number 24 a voltage signal V _P by the reference signal in the frequency omega ₁ (X) second synchronous detector for obtaining the second equation of the voltage component V _P (Y) of the formula synchronous detection number 24 a voltage signal V _P by 141-
2, a third synchronous detector 141-3 for obtaining a third expression of the voltage component V _P of formula frequencies omega ₃ of the reference signal synchronous detection number 24 a voltage signal V _P by (Z), the frequency omega ₄ fourth synchronization detector 1 to obtain a fourth equation of the voltage component V _P (theta) formula of synchronous detection number 24 a voltage signal V _P by the reference signal
Voltage signal V _P by the reference signal 41-4 and the frequency omega ₅
Is synchronously detected, and the voltage component V _P (φ) of the fifth equation of the equation (24) is obtained.
And a fifth synchronous detector 141-5.

Each of the synchronous detectors 141-1 and 141-
2, 141-3, 141-4 and 141-5 are provided on the output side with a filter 141 for rectifying an AC waveform into a DC waveform.
6, 141-7, 141-8, 141-9, 141-1
0 may be provided.

The output voltage of each filter is expressed by the linear displacement ΔX, ΔY, ΔZ and the rotational displacement Δθ, Δ
represents φ. Such a displacement signal is supplied to the PID operation unit 142 and the control voltage operation unit 143.

Referring to FIG. 9, PID calculation section 142 of the present example
Will be described. PID calculation unit 142 of this example
Are five PID calculators 142-1, 142-2, 142
-3, 142-4, and 142-5, each of which has a linear displacement ΔX, ΔY, ΔZ and a rotational displacement Δ
By inputting θ and Δφ, linear accelerations fx, fy, fz and rotational moments fθ, fφ are calculated.

FIG. 9 shows the structure of the first PID calculator 142-1. The first PID calculator 142-1 includes a differentiator 142-1A for performing a differential operation by inputting the linear displacement ΔX, a proportional unit 142-1B for performing a proportional operation, and an integrating unit 14 for performing an integral operation.
2-1C and an adding unit 142 for adding the operation results thereof
1D. The output signal of adder 142-1D is PI
It is an output signal of the D calculator 142-1. Note that in FIG. 9, S is a Laplace operator, K _P is a proportional constant, T _D and T
_I is a differentiation time constant and an integration time constant.

The other three PID calculators included in the PID calculator 142 of this example, ie, the second, third, fourth and fifth PID calculators
The configuration of the PID calculator 142-1 of FIG.
May be the same as the configuration of the PID calculator 142-1.

The output signals fx, f of the PID operation unit 142
y, fz, fθ, and fφ are supplied to the control voltage calculation unit 143 and the gyro acceleration output calculation unit 145. The gyro acceleration output calculation unit 145 includes an addition unit 142-1D to an addition unit 142-1D.
142-5D output signals fx, fy, fz, fθ, fφ
Instead, the output signals of the integrators 142-1C to 142-5C may be supplied.

Referring to FIG. 10, control voltage calculation according to this example
The configuration and operation of the unit 143 will be described. Control power according to this example
The pressure calculation unit 143 calculates the linear accelerations fx, fy, fz, and rotation.
From the moments fθ and fφ, the change amount ΔV of the control DC voltage
₁~ ΔV₈Is calculated. According to this example, first the linear acceleration
fx, fy, fz and rotational moments fθ, fφ and straight lines
Dimensionless displacement ΔX, ΔY, ΔZ and rotational displacement Δθ, Δφ
Then, the displacement of the gyro rotor 20 actually becomes zero.
Fx, F to be applied to the gyro rotor 20
Calculate y, Fz and torques Tθ, Tφ. Such a force F
x, Fy, Fz and torques Tθ, Tφ are dimensionless quantities
can get. Finally, such forces Fx, Fy, Fz and torque
DC voltage V for control from Tθ and Tφ_1A~ V_4BChange amount Δ
V_1A~ ΔV _4BIs calculated.

With reference to FIG. 10, the dimensionlessness of the input signal of the control voltage calculator 143 will be described. As shown in FIG. 10A, a circumferential portion 221A of the electrostatic support electrode of the gyro case 21 corresponding to the electrode portion 200A of the gyro rotor 20 is considered as a schematic capacitor. Circumferential part 22 of electrostatic support electrode
1A is a distance δ ₂ radially outward with respect to the electrode portion 200A.
And the portion where the two overlap is the capacitor.

It is assumed that such a capacitor is disposed at a position of a radius r, has a width in the radial direction L, a width in the circumferential direction B, and a gap δ. The dimensionless transformation of the linear displacements ΔX, ΔY, ΔZ and the rotational displacements Δθ, Δφ is performed by the following equation.

[0222]

ΔX _N = ΔX / L ΔY _N = ΔY / L ΔZ _N = ΔZ / δ Δθ _N = Δθ / (δ / r) Δφ _N = Δφ / (δ / r)

Here, the subscript N represents a dimensionless quantity. Next, FIG.
A method for making the linear accelerations fx, fy, fz and the rotational moments fθ, fφ dimensionless will be described with reference to FIG. The linear accelerations fx, fy, fz are given by the following equations.

[0224]

Fx _N = fx (C ₀ V ₀ ² / L) ^-1 fy _N = fy (C ₀ V ₀ ² / L) ^-1 fx _N = fz (C ₀ V ₀ ² / δ) ^-1 fθ _N = fθ (rC ₀ V ₀ ² / δ) ⁻¹ fφ _N = fφ (rC ₀ V ₀ ² / δ) ⁻¹

Here, the subscript N represents a dimensionless quantity. C ₀ is the capacitance when the displacement of the gyro rotor 20 is zero, and is expressed as C ₀ = εBL / δ using the dielectric constant ε.
V ₀ is a control DC voltage when the displacement of the gyro rotor 20 is zero, r is a radius, and δ is an interval between the electrode portions. Forces Fx, Fy, F to be applied to gyro rotor 20
z and torques Tθ and Tφ can be expressed as follows.

[0226]

[Number 27] _{Fx = fx N Fy = fy N} Fz = fz N Tθ = fθ N Tφ = fφ N

Next, the non-dimensionalized forces Fx, Fy, Fz
And the amount of change ΔV in the control DC voltage from the torque Tθ and Tφ.
_{1A to} ΔV _4B are calculated.

The first and third electrostatic support electrodes 221 and 22
Control DC voltage ± V _1A , ± V _1B and ±
V _3A , ± V _3B change amount ΔV _1A , ΔV _1B and ΔV _3A , ΔV
Think about _3B . Four variations ΔV _1A , ΔV _1B and Δ
V _3A and ΔV _3B are three dimensionless forces Fx and Fx, respectively.
z and the torque Tθ. Similarly,
Consider the control DC voltages ± V _2A , ± V _2B and ± V _4A applied to the second and fourth electrostatic electrodes 222 and 224, and the variations ΔV _2A , ΔV _2B and ΔV _4A and ΔV _4B of the ± V _4B. . 4
Each of the two variations ΔV _2A , ΔV _2B and ΔV _4A , ΔV _4B can be represented by three dimensionless forces Fy, Fz and torque Tφ.

Therefore, the four change amounts ΔV _1A , ΔV _1B and Δ
Another condition is provided for obtaining V _3A , ΔV _3B and ΔV _2A , ΔV _2B and ΔV _4A and ΔV _4B .

[0230]

[Expression 28] ΔV _1A + ΔV _1B + ΔV _3A + ΔV _3B = 0 ΔV _2A + ΔV _2B + ΔV _4A + ΔV _4B = 0

This first equation is based on the XZ of the gyro rotor 20.
A portion along a plane, ie, first and third portions P₁, P
_ThreeThat the sum of the control DC voltage changes is 0
And the second equation is along the YZ plane of the gyro rotor 20.
Part, ie, the second and fourth parts P_Two, P_FourSmell
That the sum of the changes of the control DC voltage is 0
Represents. By setting such conditions,
Unnecessary charges are prevented from flowing into the rotor 20.
At the same time, the change amount ΔV of the eight control DC voltages _1A~ Δ
V_4BCan be uniquely determined.

Next, the non-dimensionalized forces Fx, Fy, Fz
Then, the amounts of change ΔV _{1A to} ΔV _4B of the control DC voltage are calculated based on the torques Tθ and Tφ. Such an arithmetic expression is expressed as follows.

[0233]

Equation 29] _{ΔV 1A = (V 0/4} ) (Fx + Fz / 2 + Tθ) ΔV 1B = (V 0/4) (Fx-Fz / 2-Tθ) ΔV 3A = (V 0/4) (- Fx + Fz / 2 _{-Tθ) ΔV 3B = (V 0} /4) (- Fx-Fz / 2 + Tθ) ΔV 2A = (V 0/4) (Fy + Fz / 2 + Tφ) ΔV 2B = (V 0/4) (Fy-Fz / 2- _{Tφ) ΔV 4A = (V 0} /4) (- Fy + Fz / 2-Tφ) ΔV 4B = (V 0/4) (- Fy-Fz / 2 + Tφ)

The control voltage generator 144 includes four pairs of electrostatic support electrodes 221, 231, 222, 232, 223, 233,
, Control DC voltages V _1A , V _1B ,
_V2A , _V2B , _V3A , _V3B , _V4A and _V4B are generated. Such a control DC voltage is represented by the following equation.

[0235]

V _1A = V ₀ + ΔV _1A V _1B = V ₀ + ΔV _1B V _2A = V ₀ + ΔV _2A V _2B = V ₀ + ΔV _2B V _3A = V ₀ + ΔV _3A V _3B = V ₀ + ΔV _3B V _4A = V ₀ + ΔV _4A V _4B = V ₀ + ΔV _4B

V ₀ is a reference voltage. V _1A and V _1B are control DC voltages applied to the first pair of electrostatic support electrodes 221 and 231, and V _2A and V _2B are second pair of electrostatic support electrodes 22.
The control DC voltages applied to the electrodes 2, 232, V _3A and V _3B are the control DC voltages applied to the third pair of electrostatic support electrodes 223, 233, and V _4A and V _4B are the fourth pairs of electrostatic support electrodes. Support electrode 2
24, 234 are control DC voltages to be applied.

Next, the force actually acting on the gyro rotor 20 is determined. The expressions of Expression 1 to Expression 9 described in the conventional example and the description corresponding thereto are also valid in the present invention. The electrostatic force acting on the _four portions P ₁ , P ₂ , P ₃ , and P ₄ of the gyro rotor 20 has four pairs of corresponding electrostatic support electrodes 221,
231, 222, 232, 223, 233, 224, 2
The control DC voltages V _1A , V _1B , V _2A , V
_It is proportional to the difference between _2B , _V3A , _V3B , _V4A , and _V4B .

[0238]

Equation 31] _{Fz1 = K Z (V 1A -V} 1B) Fz2 = K Z (V 2A -V 2B) Fz3 = K Z (V 3A -V 3B) Fz4 = K Z (V 4A -V 4B)

K _Z is a constant determined by the shape of the capacitor formed by the electrostatic support electrode of the gyro case 21 and the electrode portion of the gyro rotor 20. The resultant force of the electrostatic force acting on the gyro rotor 20 has four parts P ₁ ,
It is the sum of the electrostatic forces acting on P ₂ , P ₃ and P ₄ .

[0240]

Fz = K _Z (V _1A −V _1B + V _2A −V _2B + V _3A −V _3B + V _4A −V _4B )

As described above, the electrostatic support electrode of the gyro case 21 is deviated radially outward or inward from the electrode portion of the gyro rotor 20, whereby the gyro rotor 20 is moved in the X-axis direction and the Y-axis direction. Receiving power. The X-axis direction force acting on the first and third parts P ₁ and P ₃ of the gyro rotor 20 is expressed as follows.

[0242]

Fx1 = K _X (V _1A + V _1B ) Fx 2 = K _X (V _3A + V _3B )

The force acting on the gyro rotor 20 in the X-axis direction is the difference between the forces acting on the first and third portions P ₁ and P ₃ .

[0244]

Equation 34] _{Fx = Fx1-Fx2 = K X} (V 1A + V 1B -V 3A -V 3B)

Similarly, Y acting on the gyro rotor 20
The axial force is the second and fourth parts P _Two, P_FourAct on
The difference in power.

[0246]

Fy = Fy1−Fy2 = K _Y (V _2A + V _2B −V _4A −V _4B )

The above discussion is based on the first and second gyro rotors 20.
And the third part P₁, P_ThreeIn the same direction as each other
1, when Fz3 acts and the second and fourth parts
P_Two, P _FourThe electrostatic forces Fz2 and Fz4 in the same direction
This is the case when it works. First and second gyro rotors 20
Part 3 of P₁, P_Three, The electrostatic forces Fz1 in opposite directions to each other,
When Fz3 acts, the gyro rotor 20 is rotated around the Y axis.
, A torque Tθ is generated. Similarly,
Second and fourth portions P of the rotor 20_Two, P_FourEach other
When electrostatic forces Fz2 and Fz4 in opposite directions act on
Rotor 20 generates torque Tφ to rotate around X axis
Is done. Such torques Tθ and Tφ are expressed by the following equations.
It is.

[0248]

Tθ = (Fz3-Fz1) r Tφ = (Fz4-Fz2) r

The configuration and operation of the gyro acceleration output calculation unit 145 according to the present invention will be described with reference to FIG. The gyro acceleration output calculation unit 145 of this embodiment first performs the same calculation as the equation (26) to thereby obtain the forces Fx, Fy, Fz and the torques Tθ, Tφ to be applied to the gyro rotor.
Such an operation is performed by multipliers 145-1 to 145-5. The forces Fx, Fy, Fz and the torques Tθ, Tφ obtained by the multipliers 145-1 to 145-5 are dimensionless quantities.

Next, the force F to be applied to the gyro rotor 20
external force acceleration α from x, Fy, Fz and torques Tθ, Tφ
_X , α _Y , α _Z and angular velocities dθ / dt, dφ / dt are obtained. External force acceleration and angular velocity are expressed as follows.

[0251]

Α _X = Fx / mg α _Y = Fy / mg α _Z = Fz / mg dθ / dt = Tφ / H dφ / dt = Tθ / H

M is the mass of the gyro rotor 20, g is the gravitational acceleration, and H is the spin angular momentum of the gyro rotor 20. The right side of Expression 37 is a force or torque to be applied to the gyro rotor 20 so that the displacement of the gyro rotor 20 becomes zero, and is expressed by Expressions 32 to 36. The left side is the external force acceleration or angular velocity applied to the gyro device.

An external force angular velocity dθ around the Y axis is applied to the gyro device.
When / dt acts, the gyro case 21 is rotationally displaced around the Y axis. The gyro rotor 20 is torqued around the X axis by the torque Tφ. The gyro rotor 20 is rotationally displaced around the Y axis by the precession motion, and the rotational displacement around the Y axis with respect to the gyro case 21 becomes zero. When an external force angular velocity dφ / dt around the X axis acts on the gyro device, the gyro rotor 20 torques around the Y axis by the torque Tθ. Gyro rotor 20
Is rotated around the X axis by the precession motion, and the rotational displacement of the gyro rotor 20 around the X axis with respect to the gyro case 21 becomes zero.

A method for manufacturing the gyro rotor 20 and the spacer 23 of the gyro device according to the present invention will be described with reference to FIG. A thin plate material or a disc-shaped member made of a conductive material is prepared, and circular concave portions having a depth δ are formed on the upper surface and the lower surface as shown in FIG.
00a, 200b, 200c, 200d, 200e, 2
00f, 200a ', 200b', 200c ', 200
The electrodes are formed by forming d ', 200e', and 200f '. At the same time, annular grooves 200g, 20
0 g 'is formed.

As described with reference to FIG. 1, the recess 23B for accommodating the getter member 33 and the recess 23
A passage 23C for connecting B and the gap 26 is formed.

The depth δ of the circular recess formed first corresponds to the gap δ between the electrode portion of the gyro rotor 20 and the corresponding electrostatic support electrode of the gyro case 21. Such a depth may be several μm, for example δ = 2 to 3 μm. Groove 2
00a, 200b, 200c, 200d, 200e, 2
00f, 200a ', 200b', 200c ', 200
The depth of d ', 200e', 200f 'may be any suitable size.

Next, the annular grooves 200g and 200g 'for cutting are used.
And further separate the central disc-shaped part. The separated disk-shaped portion is the gyro rotor 20, and the remaining outer portion is the spacer 23.

According to this embodiment, the gyro rotor 20 and the spacer 23 can be manufactured simultaneously from the same material. The gyro rotor 20 and the spacer 23 may be manufactured by lithography or the like, for example, by etching.

Next, the upper bottom member 22 of the gyro case 21
The method of manufacturing the lower bottom member 24 will be described. First, a plate material or a disc-shaped member made of an insulating material, for example, glass is prepared. An electrostatic support electrode is formed on the inner surface of such a plate or disk-shaped member. The electrostatic support electrode may be manufactured by forming a metal thin film by a suitable thin film forming technique. Thin film generation techniques include vapor deposition, ion plating, photofabrication, and the like. In addition, a through hole is formed in such a plate material or a disc-shaped member, and a similar metal thin film is formed on the inner surface thereof. This forms a through-hole connection between the electrostatic support electrode and an external power supply or circuit. After the through-hole connection has been formed, the through-hole is sealed.

The gyro rotor 2 is sandwiched between the upper bottom member 22 and the lower bottom member 24 thus manufactured.
0 and the spacer 23 are inserted. Further, a getter member 33 is disposed in the recess 23B. Next, the upper bottom member 22 and the lower bottom member 24 and the spacer 23 are joined by an appropriate joining method. Preferably, the two are joined by anodic bonding. Such a bond may be made in a vacuum atmosphere.

Although the embodiments of the present invention have been described in detail above, it is easy for those skilled in the art that the present invention is not limited to the above-described embodiments and can adopt various other configurations without departing from the gist of the present invention. Will be understood.

[0262]

According to the present invention, the electrostatic support electrode is provided with the AC voltage for displacement detection superimposed on the DC voltage for control, and the gyro rotor 2 is obtained from the output voltage of the circuit for displacement detection.
0, that is, linear displacement in the XYZ axis direction and Y
There is an advantage that rotational displacement around the axis and the X axis can be detected.

According to the present invention, since an optical displacement detecting device including a light emitting element and a light receiving element is not used unlike the conventional electrostatic gyro, there is an advantage that the gyro device can be miniaturized.

According to the present invention, a field effect transistor is used as a circuit for detecting displacement, and such a field effect transistor is provided adjacent to the electrode for detecting displacement, thereby providing a stable current for detecting displacement with little error. There is an advantage that can be detected.

According to the present invention, there is provided a feedback loop for feeding back the displacement of the gyro rotor 20 detected by the displacement detection system to the control DC voltage.
There is an advantage that the position of the gyro rotor 20 can be actively controlled to make its displacement zero.

According to the present invention, the position of the gyro rotor 20 is controlled by an active control having a feedback loop, and a coil and a transformer are not used unlike a conventional passive electrostatic gyro, so that the size of the apparatus is reduced. There are advantages that can be.

According to the present invention, since the position of the gyro rotor 20 is controlled by the active control, there is an advantage that the position of the gyro rotor 20 can be accurately and easily controlled. In particular, it is easy to float the gyro rotor 20 at a predetermined position at the time of startup.

According to the present invention, the gyro rotor 20 and the spacer 23 can be simultaneously manufactured from a thin plate made of one conductive material by a lithography technique or the like.
There is an advantage that a gyro device with low manufacturing cost and high accuracy can be obtained.

According to the present invention, a single crystal metal, for example, silicon (silicon) can be used for the gyro rotor 20 and the spacer 23. Therefore, it is possible to provide a high-precision gyro device which is not affected by temperature change and aging. There are advantages that can be done.

According to the present invention, since the spacer 23 and the upper bottom member 21 and the lower bottom member 24 are joined by anodic bonding, the gyro case 21 is manufactured with the gyro rotor 20 sealed inside in a vacuum. There are advantages that can be.

According to the present invention, four pairs of electrostatic support electrodes disposed on the inner surfaces of the upper bottom member 21 and the lower bottom member 24 are manufactured by forming metal thin film electrodes by a thin film forming technique. Therefore, there is an advantage that the upper bottom member 21 and the lower bottom member 24 can be formed concentrically and in the same shape.

According to the present invention, each of the four pairs of electrostatic support electrodes formed on the inner surfaces of the upper bottom member 21 and the lower bottom member 24 includes a pair of comb portions, and the comb portions are alternately arranged. The gyro rotor 20 is disposed so as to sandwich the other.
There is an advantage that the change rate of the electric energy (E = CV ² ) stored between the electrode portion of the gyro case 21 and the electrostatic support electrode of the gyro case 21 can be increased.

According to the present invention, each pair of comb-shaped portions of the electrostatic support electrode has a control DC voltage having the same absolute value and opposite sign.
Since V _1A to ± V _4B is applied, there is an advantage that the potential of the gyro rotor 20 can be always set to zero.

[Brief description of the drawings]

FIG. 1 is a diagram showing an example of a gyro device of the present invention.

FIG. 2 is an explanatory diagram for explaining a control loop of the gyro device of the present invention.

FIG. 3 is an explanatory diagram for explaining a constraint control system of the gyro device of the present invention.

FIG. 4 is a diagram showing an equivalent circuit of a constraint control system and a rotor drive system of the gyro device of the present invention.

FIG. 5 is an explanatory diagram illustrating an operation of a rotor drive system of the gyro device of the present invention.

FIG. 6 is a diagram illustrating a configuration example of a rotor drive unit of the gyro device of the present invention.

FIG. 7 is a diagram illustrating a configuration of a control calculation unit and a gyro acceleration output calculation unit of the gyro device of the present invention.

FIG. 8 is a diagram illustrating a configuration example of a displacement calculation unit of the gyro device of the present invention.

FIG. 9 is a diagram illustrating a configuration example of a PID calculation unit of the gyro device of the present invention.

FIG. 10 is an explanatory diagram for explaining an operation of a control voltage calculation unit of the gyro device of the present invention.

FIG. 11 is an explanatory diagram for explaining an operation of a gyro acceleration output calculation section of the gyro device of the present invention.

FIG. 12 is an explanatory diagram for explaining a method of manufacturing the gyro rotor and the spacer of the gyro device of the present invention.

FIG. 13 is a diagram illustrating an example of a conventional gyro device.

FIG. 14 is an explanatory diagram for explaining operations of a constraint control system and a rotor drive system of a conventional gyro device.

FIG. 15 is an explanatory diagram illustrating an operation of a Z control system of the gyro device.

FIG. 16 is a diagram illustrating a configuration example of an XY control system of a conventional gyro device.

FIG. 17 shows an X gyro operation unit and X of a conventional gyro device.
FIG. 4 is a diagram illustrating an example of an acceleration calculation unit.

FIG. 18 shows a Y gyro operation unit and Y of a conventional gyro device.
FIG. 4 is a diagram illustrating an example of an acceleration calculation unit.

FIG. 19 is a diagram illustrating an example of a Z acceleration calculator of a conventional gyro device.

[Explanation of symbols]

Reference Signs List 20 gyro rotor 20A hole 20B center part 20C electrode part 21 gyro case 22 upper bottom member 22A, 22A 'hole 23 spacer 23A inner wall 23B recess 23C passage 24 lower bottom member 25 screw 26 cavity 27 light emitting element 28 light receiving element 29-1 , 29-2, 29-3, 29-4 Electrode 29'-1, 29'-2, 29'-3, 29'-4 Electrode 30-1, 30-2, 30-3, 30-4 Coil 30 '-1, 30'-2, 30'-3, 30'-4 Coil 32 Cap 33 Getter member 34 Pipe 35 Preamplifier 36 Resistance 41, 42, 43, 44 Transformer 50 X control system 50-1 AC power supply 50-2 Arithmetic Units 50-3, 50-4 Multiplier 51 X Gyro Arithmetic Units 51-1, 51-2, 51-3, 51-4 Voltage Dividers 51-5, 51-6, 51-7, 5 -8 Rectification unit 51-9, 51-10, 51-11 Subtraction unit 51-12 Operation unit 53 X acceleration operation unit 53-1, 53-2 Addition unit 53-3 Subtraction unit 60 Y control system 60-1 AC power supply 60-2 arithmetic unit 60-3, 60-4 multiplier 61 Y gyro arithmetic unit 61-1, 61-2, 61-3, 61-4 voltage dividing unit 61-5, 61-6, 61-7, 61 -8 Rectification unit 61-9, 61-10, 61-11 Subtraction unit 61-12 Operation unit 63 Y acceleration operation unit 63-1, 63-2 Addition unit 63-3 Subtraction unit 73 Z acceleration operation unit 73-1 73-2 Addition unit 73-3 Subtraction unit 100 Rotor drive system 101 Driving power supply 127, 128 Discharge / stopper 140 Control operation unit 141 Displacement operation unit 142 PID operation unit 143 Control voltage operation unit 144 Control voltage generator 145 Jai B acceleration output calculation unit 150 constraint control unit 160 rotor drive unit 170 sequence control unit 200A, 200B, 200C, 200D, 200E,
200F, 200A ', 200B', 200C ', 20
0D ', 200E', 200F 'Electrode unit 200a, 200b, 200c, 200d, 200e,
200f, 200g, 200a ', 200b', 200
c ', 200d', 200e ', 200f', 200g
Grooves 221, 222, 223, 224, 225, 226 Electrodes 231, 232, 233, 234, 235, 236 Electrodes

Continued on the front page (72) Inventor Takafumi Nakaishi 2-16-46 Minami Kamata, Ota-ku, Tokyo Inside Tokimec Co., Ltd. (72) Inventor Shigeru Nakamura 2-16-46 Minami Kamata, Ota-ku, Tokyo Co., Ltd. Inside Tokimec (72) Inventor Masaki Esashi 1-9-9, Yagiyama Minami, 1-chome, Taishiro-ku, Sendai, Miyagi Prefecture (56) References JP-A-7-71965 (JP, A) JP-A-7-4972 (JP, A) JP 47-10166 (JP, A) JP-B 51-34553 (JP, B2) JP-B 51-34552 (JP, B2) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01C 19 / 00-19/54

Claims (24)

(57) [Claims] 1. A gyro case having a Z axis along a center axis direction and an X axis and a Y axis orthogonal thereto, and a gyro case which is supported inside the gyro case in a non-contact manner by electrostatic supporting force and is provided in the center axis direction. A disk-shaped gyro rotor having a spin axis, electrode portions formed on both surfaces of the gyro rotor along the circumferential direction, and respectively corresponding to and separated from the electrode portions on both surfaces of the gyro rotor, An acceleration detection type having at least three pairs of electrostatic support electrodes spaced at equal central angles in a circumferential direction, and a rotor drive system for rotating the gyro rotor at high speed around the spin axis. In the gyro device, each of the at least three pairs of electrostatic support electrodes is radially outward or radially inward with respect to a corresponding electrode portion of the gyro rotor. A control operation unit for applying a control DC voltage to the at least three pairs of electrostatic support electrodes to generate the electrostatic support force; Applying a displacement detecting AC voltage for detecting the displacement of the gyro rotor to the at least three pairs of electrostatic support electrodes in a superposed manner; and a displacement detecting electrode formed at the center of both surfaces of the gyro rotor. A displacement detection electrode provided in the gyro case corresponding to and spaced from each of the displacement detection electrode portions; and detecting the displacement detection current flowing through the displacement detection electrode by the gyro. A displacement detection system that includes a displacement detection circuit that outputs a displacement detection voltage signal that instructs the displacement of the rotor; a gyro output calculation unit that inputs an output signal of the control calculation unit and calculates a gyro output; The control operation unit receives the displacement detection voltage signal output from the displacement detection circuit and receives the linear displacement of the gyro rotor in the X-axis direction, the Y-axis direction and the Z-axis direction, and Y
A rotational displacement around the axis and around the X-axis is calculated, and a correction amount of the control DC voltage is calculated so that the linear displacement and the rotational displacement of the gyro rotor become zero, and the corrected amount is fed back to the control DC voltage. A gyro device characterized by being configured as described above. 2. The gyro device according to claim 1, wherein
The control calculation unit calculates a displacement amount for calculating a linear displacement and a rotational displacement of the gyro rotor, a PID calculation unit for calculating a force and a rotation moment to be applied to the gyro rotor, and calculates a correction amount of the control DC voltage. A gyro device comprising a control voltage calculation unit. 3. The gyro apparatus according to claim 1, wherein the gyro output operation section includes a PI of the control operation section.
A gyro device, wherein the gyro device is configured to calculate an output of a gyro by inputting an output signal of a D operation unit. 4. The gyro apparatus according to claim 1, wherein the displacement detection AC voltage is an AC voltage component having a displacement detection frequency different from each other corresponding to a linear displacement and a rotational displacement of the gyro rotor. A gyro device characterized by including: 5. The gyro device according to claim 1, wherein said electrostatic supporting electrodes are circumferentially separated from each other by nine.
A gyro device comprising four pairs of electrostatic support electrodes separated by a central angle of 0 degrees. 6. The gyro device according to claim 5, wherein
A first pair of electrostatic support electrodes of the four pairs of electrostatic support electrodes
The AC voltage for displacement detection applied to_1A, A
C_1BDetecting the displacement applied to the second pair of electrostatic support electrodes.
AC output voltage_2A, AC_2B, A third pair of electrostatic support
The AC voltage for displacement detection applied to the pole is AC _3A, AC
_3BDetecting the displacement applied to the fourth pair of electrostatic support electrodes
AC voltage for_4A, AC_4BThen they are of the form
A gyro device represented by: AC_1A= -EX-Eθ-EZ AC_1B= −EX + Eθ + EZ AC_2A= -EY-Eφ-EZ AC_2B= −EY + Eφ + EZ AC_3A= + EX + Eθ-EZ AC_3B= + EX-Eθ + EZ AC_4A= + EY + Eφ-EZ AC_4B= + EY-Eφ + EZ Here, ± EX indicates that the phases differ by 180 ° from each other.
AC for detecting the linear displacement of the rotor in the X-axis direction
The voltage components ± EY differ in phase by 180 ° from each other.
Interchange for detecting linear displacement of the gyro rotor in the Y-axis direction
The current voltage component, ± EZ, is 180 ° out of phase with each other
For detecting the linear displacement of the gyro rotor in the Z-axis direction.
AC voltage component ± Eθ is 180 ° out of phase with each other
To detect the rotational displacement of the gyro rotor around the Y axis
AC voltage components ± Eφ are 180 ° out of phase with each other
For detecting the rotational displacement of the gyro rotor around the X axis.
AC voltage components, which are different from each other.
Having the above-mentioned frequency for displacement detection. 7. The gyro device according to claim 5, wherein the correction amounts of the control DC voltage applied to the first and third pairs of electrostatic support electrodes are ΔV _1A , ΔV _1B and ΔV _3A. ,
ΔV _3B , where ΔV _2A , ΔV _2B and ΔV _4A , ΔV _4B are correction amounts of the control DC voltage applied to the second and fourth pairs of electrostatic support electrodes, the following relationship is satisfied. And a gyro device. ΔV _1A + ΔV _1B + ΔV _3A + ΔV _3B = 0 ΔV _2A + ΔV _2B + ΔV _4A + ΔV _4B = 0 8. The gyro device according to claim 1, wherein the displacement detection circuit includes a field effect transistor. 9. The gyro apparatus according to claim 1, wherein each of the electrostatic support electrodes of each pair of the electrostatic support electrodes is spaced apart from each other by a pair. Wherein each of the plurality of comb-shaped portions has a plurality of circumferential portions extending in a circumferential direction and a connecting portion connecting the circumferential portions.
A gyro device, wherein the circumferential portions of two comb portions are alternately arranged so as to sandwich the other. 10. The gyro device according to claim 9, wherein the control DC voltages applied to the first and second comb-shaped portions of each electrostatic support electrode of the electrostatic support electrode have the same magnitude and are mutually equal. A gyro device having different polarities. 11. The gyro device according to claim 9, wherein the electrode portion of the gyro rotor includes a plurality of annular portions corresponding to respective circumferential portions of the comb-shaped portion of the electrostatic support electrode, and Each of the circumferential portions of the comb-shaped portion of the support electrode is radially outwardly or inwardly biased with respect to each of the corresponding annular portions of the electrode portion of the gyro rotor, whereby the gyro rotor A gyro device that generates a force such that displacements in an X-axis direction and a Y-axis direction with respect to a center axis become zero. 12. The gyro device according to claim 1, wherein the gyro rotor is made of a conductive material, and the electrode portions are configured as protrusions formed on both surfaces of the gyro rotor. A gyro device characterized in that: 13. The gyro device according to claim 12, wherein the gyro rotor is made of single crystal silicon. 14. The gyro device according to claim 1, wherein the gyro case includes an upper bottom member and a lower bottom member made of an insulating material, and the electrostatic support electrode includes the upper bottom member. A gyro device configured as a metal thin film mounted on the inner surface of the lower bottom member. 15. The gyro device according to claim 14, wherein the upper bottom member and the lower bottom member of the gyro case are made of glass. 16. The gyro device according to claim 1, wherein the electrostatic supporting electrode is formed by a thin film forming technique including vapor deposition, ion plating, and photofabrication. Gyro device to do. 17. The gyro device according to claim 14, wherein the gyro case includes a spacer disposed between the upper bottom member and the lower bottom member.
The gyro device, wherein the spacer is connected to the upper bottom member and the lower bottom member by anodic bonding. 18. The gyro device according to claim 1, wherein a stopper for discharging is mounted on the gyro case, and the stopper limits the displacement of the gyro rotor and the gyro. A gyro device having a function of discharging static electricity accumulated in a rotor to the outside. 19. The gyro device according to claim 1, wherein a recess for accommodating a getter member is formed in the gyro case, and the recess is connected to the inside of the gyro case by a passage. A gyro device characterized in that: 20. The gyro device according to claim 1, wherein the rotor drive system corresponds to rotor drive electrode portions provided on both surfaces of the gyro rotor and the rotor drive electrode portions. And a rotor driving AC voltage circuit for applying a rotor driving AC voltage to the rotor driving electrode, wherein the rotor driving electrode portion is arranged in a circumferential direction. And a plurality of spaced apart electrode portions arranged in a single row, and the rotor driving electrodes include a plurality of spaced apart electrodes arranged in a circumferential row. Gyro device. 21. A method of manufacturing a gyro device having a gyro case and a disk-shaped gyro rotor supported inside the gyro case in a non-contact manner by an electrostatic supporting force, wherein both surfaces of a plate made of a conductive material are provided. Forming a protruding portion by forming a groove in the plate material; cutting out a circular portion from the plate material to separate into a disk-shaped gyro rotor and an outer spacer surrounding the gyro rotor; and upper bottom portions on both surfaces of the spacer. Joining the material and the lower bottom member. 22. The method for manufacturing a gyro device according to claim 21, wherein the joining of the spacer and the upper bottom member and the lower bottom member is performed by anodic bonding. 23. The method for manufacturing a gyro device according to claim 21, wherein the upper bottom member and the lower bottom member made of an insulating material are prepared, and the inner surfaces of the upper bottom member and the lower bottom member are provided. Forming an electrostatic support electrode made of a metal thin film. 24. The method for manufacturing a gyro device according to claim 23, wherein the electrostatic support electrodes formed on the upper bottom member and the lower bottom member include at least three pairs of electrostatic support electrodes, and Each of the support electrodes includes a pair of comb-shaped portions, the comb-shaped portion having a plurality of circumferential portions extending in a circumferential direction and a connecting portion connecting the circumferential portions, and the pair of comb-shaped portions. A gyro device manufacturing method, wherein the circumferential portions of the gyro device are alternately arranged so as to sandwich the other.