JP2001255151A - Gyro device and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrostatic support-type acceleration detecting gyro device which is constituted, in such a way that the displacement of a gyro rotor is set to zero actively. SOLUTION: The acceleration detecting gyro device comprises a gyro case, a gyro rotor which is supported at the inside of the gyro case in a noncontact manner by an electrostatic supporting force, electrostatic support electrodes which generate electrostatic supporting force, a gyro drive system which turns the gyro rotor at high speed around a spin axial line, displacement detecting system which detects the displacement of the gyro rotor, and a constraint control system which comprises a feedback loop used to correct a control voltage to be applied across the electrostatic support electrodes, in such a way that the displacement of the gyro rotor becomes zero. The magnetic field across the electrostatic support electrodes on both sides of the gyro rotor is generated, so as to pas through a through-hole in the gyro rotor.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an acceleration detecting gyro device suitable for use in a moving body such as an automobile, a ship, an aircraft, etc., for detecting an angular velocity or an angular change and an acceleration with respect to an inertial space. More specifically, the present invention relates to an extremely small acceleration detecting gyro device of a type in which a gyro rotor is floatingly supported by an electrostatic supporting force.

[0002]

2. Description of the Related Art An example of a conventional gyro device will be described with reference to FIGS. This gyro apparatus is disclosed in Japanese Patent Application No. 7-125345 (T9500028) filed on May 24, 1995 by the same applicant as the present applicant, and for details, refer to the same application. .

First, the gyro device will be described with reference to FIG. The gyro device has a thin disk-shaped gyro rotor 20 and a gyro case 21 for accommodating the gyro rotor 20 therein.

Here, XYZ coordinates are set for the gyro device as shown in the figure. The Z-axis is taken upward along the central axis of the gyro device, and the X-axis and Y-axis are taken perpendicular to it. The spin axis of the gyro rotor 20 is arranged along the Z axis.

As shown in FIG. 11A, a gyro case 2
1 has an upper bottom member 22 and a lower bottom member 24 and a spacer 23 for connecting them, and the spacer 23 is an annular inner wall 23.
A. Thus, the inner surfaces of the upper bottom member 22 and the lower bottom member 24 and the inner wall 23A of the spacer 23 form a disk-shaped closed cavity 26 for housing the gyro rotor 20 inside the gyro case 21. .
Such a cavity 26 is evacuated by a suitable method.

A recess 23B is formed outside the annular inner wall 23A of the spacer 23, and the recess 23B is connected to the cavity 26 by a passage 23C. The height of such a passage 23C may be 2-3 μm. A getter member 33 is disposed in such a concave portion 23B. Thereby, the cavity 26 can be maintained at a high degree of vacuum for a long time.

[0007] The gyro rotor 20 is formed of a conductive material. For example, single-crystal silicon (silicon) may be used as such a conductive material. By using a single crystal material, it is possible to provide a high-accuracy gyro rotor that is less affected by thermal distortion and aging. The upper bottom member 22 and the lower bottom member 24 of the gyro case 21 are formed of a non-conductive material, for example, glass. The spacer 23 may be formed of the same material as the gyro rotor 20.

As shown in the right half of FIGS. 11A and 11B, a plurality of annular electrode portions 200A, 200B, 200C,
200D and 200A ', 200B', 200C'20
0D 'is formed. That is, a plurality of annular grooves 200a, 200b, 200c, 2
00d and 200a ', 200b', 200c ', 20
Od ′ is formed, and a protruding annular electrode portion is formed by the annular groove.

On the upper and lower surfaces of the gyro rotor 20,
Annular electrode parts 200A, 200B, 200C, 200D
And 200A ', 200B', 200C ', 200D'
Are formed with driving electrode portions 200E and 200E '. Such drive electrode units 200E, 200E '
Are two concentric annular grooves 200d, 200e and 20
It may be configured as a plurality of sector-shaped projections formed between Od 'and 200e', and may be arranged in a line in a ring along the circumference.

On the upper and lower surfaces of the gyro rotor 20,
In the center, that is, the driving electrode portions 200E and 200E '
Are formed with displacement detection electrode portions 200F and 200F ′. Such displacement detection electrode portions 200F, 2
Depressions 200f, 200f 'are formed at the center of 00F'.

Annular electrode portions 200A and 200B formed as protrusions on the upper and lower surfaces of the gyro rotor 20 are provided.
200C, 200D and 200A ', 200B', 20
0C ′, 200D ′, drive electrode units 200E, 200
E ′ and the displacement detection electrode portions 200F, 200F ′ may be formed coplanar.

On the other hand, as shown in the left half of FIGS. 11A and 11B, at least three pairs of electrostatic support electrodes, in this example, are provided on the inner surfaces of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21. , First, second, third and fourth pairs of electrostatic support electrodes 221, 231, 222, 232, 223, 23
3 and 224, 234 are arranged. The four pairs of electrostatic support electrodes are arranged at an angular interval of 90 ° from each other along the circumferential direction. For example, the first and third pairs of electrostatic support electrodes 221, 231 and 223, 233 are arranged along the X axis and the second and fourth pairs of electrostatic support electrodes 222,
32 and 224, 234 are arranged along the Y axis.

Each electrostatic support electrode comprises a pair of combs.
For example, on the left side of FIG. 11B, a third pair of electrostatic support electrodes 2
Out of 23 and 233, the electrostatic support electrodes 223 formed on the inner surface of the upper bottom member 22 are shown. The electrostatic support electrode 223 includes two comb-shaped portions 223-1 separated from each other,
223-2, wherein the two combs are spaced apart from each other.

One comb-shaped portion 223-1 has a radial portion 223R extending in the radial direction and a plurality of circumferential portions 223A and 223C extending in the circumferential direction. Similarly, the other comb-shaped portion 223-2 has a radial portion 223R extending in the radial direction and a plurality of circumferential portions 223B and 223D extending in the circumferential direction. Circumferential part 223 of each comb-shaped part 223-1, 223-2
A, 223C and 223B, 223D are alternately arranged so as to sandwich the other. Each comb 223-1, 22
Terminal portions 2 are provided at the ends of the radius portions 223R and 223R of 3-2.
23R 'and 223R' are formed respectively.

On the inner surfaces of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21, four pairs of electrostatic support electrodes 221 are provided.
231, 222, 232, 223, 233 and 224;
Driving electrodes 225 and 235 are formed inside 234, respectively. The driving electrodes 225 and 235 may be formed in a plurality of sectors arranged in a line along the circumference in a line.

On the inner surfaces of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21, displacement detection electrodes 226, 236 are provided at the center, that is, inside the drive electrodes 225, 235.
Are formed.

Next, the annular electrode portion 2 of the gyro rotor 20
00A, 200B, 200C, 20D and 200A ',
200B ', 200C', 200D 'and the electrostatic support electrodes 221, 222, 223, 224 and 231, 23 of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21.
The dimensions and relative positional relationships of 2, 233, and 234 will be described.

The outer diameter D of the gyro rotor 20 may be 5 mm or less, the thickness t may be 0.1 mm or less,
The mass may be less than 10 milligrams. In FIG.
Four annular electrode portions 200A, 200B, 200C, 2
00D and 200A ', 200B', 200C ', 20
Although 0D 'is illustrated, a large number of annular electrode portions are actually formed. For example, when the width L in the radial direction of each electrode portion is about 10 μm and is formed at equal intervals at a pitch of about 20 μm, about 100 annular rings are formed in an annular region having a width of about 2 mm in the radial direction. An electrode portion is formed. The radial width L and pitch of each electrode portion are preferably as small as possible as far as the manufacturing method allows.

The electrostatic support electrodes 221, 222, 22 of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21
3, 224 and 231, 232, 233, and 234 have the dimensions of the annular electrode portions 200A, 200B, 200C, and 200.
D and 200A ', 200B', 200C ', 200
It may be formed corresponding to the dimension of D ′. For example, FIG.
, Each comb-shaped portion 223 of the third electrostatic support electrode 223
1, 223-2 circumferential portions 223A, 223C and 223
Although B and 223D are illustrated as including a total of four, a large number of circumferential portions are actually formed. For example,
The radial width L of each circumference is about 10 μm, and about 20 μm.
When formed at equal intervals with a pitch of μm, about 100 circumferential portions are formed in an annular region having a width of about 2 mm in the radial direction.

Next, the positional relationship between the electrode section of the gyro rotor 20 and the electrostatic support electrode of the gyro case 21 will be described. For example, the electrode portions 200A of the gyro rotor 20 and 2
00B, 200C, 200D and 200A ', 200
The positional relationship between B ′, 200C ′, 200D ′ and the third pair of electrostatic support electrodes 223, 233 will be described. The first circumferential portions 223A and 233A of the third pair of electrostatic support electrodes 223 and 233 correspond to the first electrode portions 200A and 200A 'of the gyro rotor 20, and the second electrode portion 200
B, a third pair of electrostatic support electrodes 223 for 200B '
Correspond to the second circumferential portions 223B and 233B. Similarly, the third and fourth circumferential portions 2 are formed with respect to the third and fourth electrode portions 200C and 200C 'and 200D and 200D'.
23C, 233C and 223D, 233D correspond.

The gap δ between the electrode portion of the gyro rotor 20 and the corresponding electrostatic support electrode of the gyro case 21 may be several μm, for example, δ = 2 to 3 μm.

Each electrode section 200A of the gyro rotor 20
200B, 200C, 200D and 200A ', 200
B ′, 200C ′, and 200D ′ are the circumferential portions 223A, 233A, and 223 of the corresponding electrostatic support electrodes 223 and 233.
B, 233B, 223C, 233C and 223D, 23
It is arranged concentrically with respect to 3D but at the same time it is arranged radially inward or outward.

For example, each electrode section 2 of the gyro rotor 20
00A, 200B, 200C, 200D and 200
The widths and pitches of A ′, 200B ′, 200C ′, and 200D ′ correspond to the circumferential portions 223A, 233A, 223B, 233B, and 223C of the corresponding electrostatic support electrodes 223 and 233.
Equal to the width and pitch of 233C and 223D, 233D, they are offset radially inward or outward by a predetermined distance from each other.

Here, the reason why the electrostatic support electrode of the present embodiment is constituted so as to include a pair of comb-shaped portions arranged so as to sandwich the other electrode alternately will be described. With this configuration, the capacitance between each pair of comb portions and the corresponding electrode portion of the gyro rotor 20 is equal on the upper side and the lower side of the gyro rotor 20. For example, in the first electrostatic support electrodes 221 of the first pair of electrostatic support electrodes 221 and 231, the first comb-shaped portions 221-1 (221A and 221C) and the first and second gyro rotors 20 corresponding to the first comb-shaped portions 221-1 and 221C are formed. The capacitance between the third electrode portions 200A and 200C is the second comb-shaped portion 221-2 (221B and 221D) and the corresponding second and third electrode portions 200C and 200C of the gyro rotor 20.
Equal to the capacitance between the 00D are both C _1A.

Accordingly, the first comb portions 221-1 (221)
A, 221C) and the control DC voltage applied to the second comb portions 221-2 (221B, 221D) are equal in magnitude and opposite in polarity, for example, ± V _1A . Thus, the potential of the gyro rotor 20 can be always set to zero. This will be described again later with reference to FIG.

The same applies to the second electrostatic support electrode 231 of the first pair of electrostatic support electrodes 221 and 231. Also, the second, third and fourth electrostatic support electrodes 222, 232, 2
The same applies to 23, 233, 224, and 234.

The driving electrode unit 2 of the gyro rotor 20
00E, 200E 'and displacement detection electrode portions 200F, 2
Drive electrode 2 of gyro case 21 corresponding to 00F '
25, 235 and the displacement detection electrodes 226, 236 may be arranged in the same shape and at the same position in the radial direction.

Discharge / stoppers 127 and 128 are provided at the center of the inner surfaces of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21, that is, at the center of the displacement detection electrodes 226 and 236, respectively. Have been. The stoppers 127 and 128 are arranged corresponding to recesses 200f and 200f 'formed at the center of the upper and lower surfaces of the gyro rotor 20, respectively.

The discharge and stoppers 127 and 128 limit the displacement of the gyro rotor 20 in the Z-axis direction, the X-axis direction and the Y-axis direction, and prevent the gyro rotor 20 from contacting the inner surface of the gyro case 21. It is provided for discharging static electricity accumulated in the gyro rotor 20.

When the gyro rotor 20 is displaced in the Z-axis direction and approaches the inner surface of the gyro case 21, before the electrodes of the gyro rotor 20 come into contact with the electrodes of the gyro case 21, the discharge / stop stoppers 127 and 128 are turned on. 20 abuts the bottoms of the recesses 200f, 200f '. Further, when the gyro rotor 20 is displaced in the X-axis or Y-axis direction, before the gyro rotor 20 comes into contact with the circumferential inner wall 23A of the gyro case 21, the discharge and stopper 127, 1
28 are recesses 200f, 200f 'of the gyro rotor 20.
Abuts the inner circumferential wall of

As a result, the displacement of the gyro rotor 20 in the Z-axis direction, the X-axis direction and the Y-axis direction is restricted, and the gyro rotor 20 is prevented from contacting the inner surface of the gyro case 21. When the gyro rotor 20 stops and lands, the discharge / stop stoppers 127 and 128 abut against the concave portions 200f and 200f ′ of the gyro rotor 20, so that the static electricity accumulated in the gyro rotor 20 causes the discharge / stop stoppers 127 and 128 to move. Discharged to the outside via

Electrostatic support electrodes 221 and 23 formed on the upper bottom member 22 or the lower bottom member 24 of the gyro case 21
1, 222, 232, 223, 233, 224, 23
4. Drive electrodes 225 and 235 and displacement detection electrode 22
6, 236 and an external power supply or an external circuit may be electrically connected by through-hole connection. Upper bottom member 2
A small hole, that is, a through hole is provided in the second or lower bottom member 24, and a metal film is formed on an inner surface of the through hole. With such a metal film, the electrostatic support electrode, the drive electrode, and the displacement detection electrode are connected to an external power supply or an external circuit.

As shown in FIG. 11A, a preamplifier 35, for example, a field-effect transistor, is disposed on the outer surface of the upper bottom member 22, and the preamplifier 35 is connected to the displacement detecting electrodes 226 and 236. . A through hole 22A (only the through hole 22A provided in the upper bottom member 22 is shown) is provided in the upper bottom member 22 and the lower bottom member 24, and a preamplifier is formed by a metal thin film formed on the inner surface of the through hole 22A. 35 is connected to the displacement detecting electrodes 226, 326.

As will be described later with reference to FIG. 13, the comb-shaped portions of each pair are electrically connected. Therefore, for example, the comb-shaped portion 22 of the third pair of first electrostatic support electrodes 223
A through hole 22B (only one is shown) is provided corresponding to each of the terminal portions 223R 'and 223R' of 3-1 and 223-2, and the metal thin film formed on the inner surface of the through hole 22B is an upper bottom member. 22 is connected to a common terminal provided outside. Thereby, the two comb-shaped parts 223-
Terminal portions 223R 'and 223R' of 1, 223-2 are electrically connected. Similarly, the terminal portions 23 of the comb-shaped portions 231-1 and 231-2 of the first pair of the second electrostatic support electrodes 231.
Through holes 24 corresponding to each of 1R 'and 231R'
A (only one shown) is provided, and the through hole 2
The metal thin film formed on the inner surface of 4A is connected to a common terminal provided outside lower bottom member 24. Thereby 2
Terminals 231 of two comb-shaped portions 231-1, 231-2
R 'and 231R' are electrically connected.

FIG. 12 shows an example of a control loop of the gyro apparatus. The control loop of this example includes a constraint control system including a constraint control unit 150, a rotor drive system including a rotor drive unit 160, and a sequence control unit 170.

The restraining control unit 150 of the present example, the displacement detecting circuit for converting it to detect a displacement detection current i _p in the displacement detection voltage V _p, i.e., preamplifier 35 and such displacement detection voltage V Input _p to control DC voltage ± V _1A to ±
V _4A and ± V _1B to ± V _4B . DC control outputted by the control arithmetic unit 140 voltage _{± V 1A ~ ± V 4A,} ± V 1B ~ ± V 4B each displacement detection AC voltage _{AC 1A ~AC 4A, AC 1B ~AC} 4B is added static It is supplied to the electrode 221 to 224 and 231 to 234. The gyro device of this example has a control operation unit 1
Gyro acceleration output calculator 1 for inputting 40 output signals
45 are provided.

Electrostatic support electrodes 221-224, 231-2
DC voltage for control ± V_1A~ ± V _4A, ± V_1B~ ± V_4B
Gyro rotor 20 is applied to
Floatingly supported and restrained in the sub-position. Electrostatic support electrode 2
21 to 224 and 231 to 234 are AC voltages A for detecting displacement.
C_1A~ AC_4A, AC_1B~ AC_4BBy applying
For detecting the displacement formed on the inner surface of the gyro case 21
Displacement detection current i is applied to electrodes 226 and 236._pFlows. Such
Current i for displacement detection_pIs the voltage by the preamplifier 35
Signal V_pIs converted to Such a voltage signal V_pIs gyro
Includes all linear and rotational displacements of the rotor 20.

The control arithmetic unit 140 is rotated about the X-axis direction of displacement ± [Delta] X, Y-axis direction of displacement ± [Delta] Y and Z-axis direction of displacement ± [Delta] Z and Y axis and the X-axis of the gyro rotor 20 than the voltage signal V _p The displacements Δθ and Δφ (the direction of the arrow shown in the upper right of FIG. 12 is defined as positive) are detected. Further, control DC voltages ± V _1A to ± V _4A and ± V _1B to ± V _4B to be applied to the electrostatic support electrodes 221 to 224 and 231 to 234 are calculated from the displacement. Thus, the control DC voltage ± V _1A to ± V _4A ,
V _1B to ± V _4B change, and the gyro rotor 20 is returned to the original position so that the amount of deviation becomes zero.

The control loop or the restraint system of the present embodiment is passive in that it actually measures the amount of deviation of the gyro rotor 20 and positively changes the electrostatic force so that the amount of deviation becomes zero. It is an active formula, not a formula constraint system.

Next, the operation of the constraint control system will be described with reference to FIG.
This will be described in detail. The gyro rotor 20 is actually fast
The gyro rotor 20 is rotating.
At positions corresponding to the second, third and fourth pairs of electrostatic support electrodes
Each of the four parts is P ₁, P_Two, P_ThreeAnd P_FourWhen
I do.

FIG. 13 shows a cross section of the gyro device of the present example cut along the XZ plane, and includes a first and a third pair of electrostatic support electrodes 221 arranged along the X axis. 2
31 and 223, 233 and the first and third portions P ₁ of the gyro rotor 20 corresponding thereto, P ₃ is shown. Second and second and fourth portions P ₂ and P ₄ of the fourth pair of electrostatic supporting electrode and the gyro rotor 20 corresponding thereto are not shown disposed along the Y-axis, perpendicular to the paper surface Are arranged along different directions.

Circumferential portion 2 of first pair of electrostatic support electrodes 221
21A, 221B, 221C and 221D are electrode portions 200A, 200B, 200C on the upper surface of the gyro rotor 20;
200D, a first pair of electrostatic support electrodes 23
1 are provided on the lower surface of the gyro rotor 20 with the electrode portions 200A ', 200A', 231B, 221C, 221D.
B ′, 200C ′, and 200D ′, corresponding to the circumferential portions 223A, 223B,
223C and 223D correspond to the electrode portions 200A, 200B, 200C and 200D on the upper surface of the gyro rotor 20, and the circumferential portion 233 of the third pair of electrostatic support electrodes 233.
A, 233B, 233C and 233D are gyro rotors 2
0 electrode portions 200A ′, 200B ′, 200
C 'and 200D'. The same applies to the second pair of electrostatic electrodes and the fourth pair of electrostatic support electrodes.

First, application of the control DC voltage will be described. First comb-shaped portion 2 of first pair of electrostatic support electrodes 221
The circumferential portions 221A and 221C of 21-1 are added to an adder 36-1.
A is connected to the DC voltage −V _1A via A, and the circumferential portions 221B and 221D of the second comb portion 221-2 are connected to the adder 36+
1A is connected to the DC voltage + V _1A, and the circumferential portions 231A and 231C of the first comb-shaped portion 231-1 of the first pair of electrostatic support electrodes 231 are connected to the DC voltage via the adder 36-1B. is connected to a voltage -V _1B, circumferential portions of the second comb-shaped portion 231-2 231B, 231D are connected to the DC voltage + V _1B via an adder 36 + 1B.

[0044] Similarly, circumference of the first comb-shaped portion 223-1 of the electrostatic supporting electrode 223 of the third pair 223A, 223C are connected to the DC voltage -V _3A via the adder 36-3A , Circumferential portion 223B, 223 of second comb-shaped portion 223-2
D is connected to the DC voltage + V _3A via the adder 36 + 3A, and is connected to the first comb-shaped portion 2 of the third pair of electrostatic support electrodes 233.
The circumferential portions 233A and 233C of 33-1 are added to an adder 36-3.
B is connected to the DC voltage −V _3B, and the circumferential portions 233B and 233D of the second comb-shaped portion 233-2 are connected to the adder 36+
It is connected to DC voltage + V _3B via 3B.

Although not shown, the circumferential portion 222 of the first comb portion 222-1 of the second pair of electrostatic support electrodes 222 is not shown.
A and 222C are connected to the DC voltage −V _2A, and the circumferential portions 222B and 222D of the second comb portion 222-2 are connected to the DC voltage −V _2A.
V _2A and the first pair of electrostatic support electrodes 232 of the second pair.
The circumferences 232A and 232C of the comb-shaped part 232-1 are connected to the DC voltage −V _2B, and the circumferences 232B and 232D of the second comb-shaped part 232-2 are connected to the DC voltage + V _2B .

Similarly, the fourth pair of electrostatic support electrodes 224
The circumferential portions 224A and 224C of the first comb-shaped portion 224-1 are
DC voltage -V_4ATo the second comb-shaped part 224-2.
The circumference parts 224B and 224D are DC voltage + V_4AConnected to
And the first comb-shaped portion 23 of the fourth pair of electrostatic support electrodes 234.
4-1 circumferential portions 234A and 234C are DC voltage -V._4BTo
Connected, the circumferential portion 234B of the second comb portion 234-2,
234D is DC voltage + V _4BIt is connected to the.

Next, the application of the detection AC voltage will be described.
I do. First and third pairs of electrostatic support electrodes 221, 231
223 and 233 are superimposed on the control DC voltage and detected
AC voltage AC_1A, AC_1B, AC_3A, AC_3CIs applied
You. As shown, the first pair of adders 36-1A, 36-1
+ 1A and 36-1B, 36 + 1B have an AC voltage for detection.
AC_1A, AC_1BAnd AC_3A, AC_3CIs applied and the third
Paired adders 36-3A, 36 + 3A and 36-3B, 3
6 + 3B has AC voltage for detection AC_3A, AC_3CIs applied
ing. Similarly, the second and fourth pairs of adders have
AC voltage AC_2A, AC_2BAnd AC_4A, AC_4CIs applied
You. Such detection AC voltage AC_1A, AC _1B, AC_3A, A
C_3C, AC_2A, AC_2BAnd AC_4A, AC_4CIs the next
It is represented as

[0048]

AC _1A = −EX−Eθ−EZ AC _1B = −EX + Eθ + EZ AC _3A = + EX + Eθ−EZ AC _3B = + EX−Eθ + EZ

[0049]

AC _2A = −EY−Eφ−EZ AC _2B = −EY + Eφ + EZ AC _4A = + EY + Eφ−EZ AC _4B = + EY−Eφ + EZ

Here, detection AC voltages AC _1A , AC _1B ,
The terms on the right side of AC _3A , AC _3B and AC _2A , AC _2B , AC _4A , AC _4B are expressed as follows.

[0051]

+ EX = E ₀ cos (ω ₁ t + ζ ₁ ) −EX = E ₀ cos (ω ₁ t + η ₁ ) + EY = E ₀ cos (ω ₂ t + ζ ₂ ) −EY = E ₀ cos (ω ₂ t + η ₂ ) + EZ = E ₀ cos (ω ₃ t + ζ ₃ ) −EZ = E ₀ cos (ω ₃ t + η ₃ ) + Eθ = E ₀ cos (ω ₄ t + ζ ₄ ) −Eθ = E ₀ cos (ω ₄ t + η ₄ ) + Eφ = E ₀ cos (ω ₅ t + ζ ₅ ) −Eφ = E ₀ cos (ω ₅ t + η ₅ )

Here, ± EX is the X of the gyro rotor 20.
Voltage component for detecting axial linear displacement ΔX, ± E
Y is a voltage component for detecting a linear displacement ΔY of the gyro rotor 20 in the Y-axis direction, ± EZ is a voltage component for detecting a linear displacement ΔZ of the gyro rotor 20 in the Z-axis direction, ±
Eθ is a voltage component for detecting the rotational displacement Δθ of the gyro rotor 20 around the Y axis, ± Eφ is the gyro rotor 20
Is a voltage component for detecting the rotational displacement Δφ around the X axis of the above.

Ω ₁ , ω ₂ , ω ₃ , ω ₄ , ω ₅ are detection frequencies. The signs ± EX, ± EY, ± EZ, ± Eθ, and ± Eφ represent 180 degrees phase difference from each other. Therefore, the following relationship exists between the phase differences ζ and η.

[0054]

Η ₁ = ζ ₁ ± 180 ° η ₂ = ζ ₂ ± 180 ° η ₃ = ζ ₃ ± 180 ° η ₄ = ζ ₄ ± 180 ° η ₅ = ζ ₅ ± 180 °

Next, the principle of the displacement detection system of this embodiment will be described with reference to FIG. FIG. 14 shows an equivalent circuit of the constraint control system and the rotor drive system. In the equivalent circuit of the constraint control system, the first and third pairs of electrostatic support electrodes 221, 231 and 223, 2
33 and the corresponding electrode section 20 of the gyro rotor 20
0A, 200A ', 200C and 200C' have been replaced by capacitors. As described above, in the first electrostatic support electrodes 221 of the first pair of electrostatic support electrodes 221 and 231, between the first comb-shaped portion 221-1 and the first and third electrode portions 200A and 200C. And the second comb-shaped portion 2
The capacitance between 21-2 and the second and fourth electrode units 200B and 200D is equal to C _1A , and in the second electrostatic support electrode 231, the first comb-shaped unit 231-1 and the first and second electrode units 200B and 200D have the same capacitance. The capacitance between the third electrode portions 200A 'and 200C', the second comb portion 221-2, and the second and fourth electrode portions 200
The capacitance between B 'and 200D' is equal to _C1B .

Similarly, a third pair of electrostatic support electrodes 223,
233, the first comb-shaped part 223-1 and the first and third electrode parts 200A and 200A.
Capacitance between 0C and second comb-shaped portion 223-2 and the second and fourth electrode portions 200B, the capacitance between the 200D is equally C _3A, in the second electrostatic supporting electrode 233 ,
First comb portion 233-1 and first and third electrode portions 200
The capacitance between A ′ and 200C ′ and the second comb portion 233
-2 and the second and fourth electrode portions 200B ', 200D' capacitance between the equally C _3B.

The gyro device of this embodiment is cut along the YZ plane.
Although the cut section is not shown, it is arranged along the Y axis.
Second and fourth pairs of electrostatic support electrodes 222, 232 and 2
24, 234 and the corresponding gyro rotor 20
2nd and 4th part P_TwoAnd P _FourA similar argument holds for
Holds.

The displacement detection electrodes 226 and 236 and the corresponding displacement detection electrode 200 of the gyro rotor 20
The capacitances of the capacitors constituted by F and 200F 'are denoted by C _FA and C _FB , respectively.

For example, the gyro rotor 20 is linearly displaced by ΔX in the X-axis direction, linearly displaced by ΔY in the Y-axis direction,
Linearly displaced by ΔZ in the Z-axis direction and the rotation angle Δθ around the Y-axis
It is assumed that the rotational displacement has been performed only by the rotation angle Δφ around the X axis. Assuming that the displacement of the gyro rotor 20 is sufficiently small, the capacitance of each capacitor is expressed as follows.

[0060]

C _1A = C ₀ (1 + ΔX + ΔZ + Δθ) C _1B = C ₀ (1 + ΔX−ΔZ−Δθ) C _2A = C ₀ (1 + ΔY + ΔZ + Δφ) C _2B = C ₀ (1 + ΔY−ΔZ−Δφ) C _3A = C ₀ ( 1−ΔX + ΔZ−Δθ) C _3B = C ₀ (1−ΔX−ΔZ + Δθ) C _4A = C ₀ (1−ΔY + ΔZ−Δφ) C _4B = C ₀ (1−ΔY−ΔZ + Δφ)

Here, C ₀ is the capacitance of each capacitor when all displacements are zero. Conversely, from this equation, each displacement Δ
X, ΔY, ΔZ, Δθ, and Δφ can be represented by the capacitance of a capacitor.

[0062]

ΔX = (1 / 4C ₀ ) (C _1A + C _1B −C _3A −C _3B ) ΔY = (1 / 4C ₀ ) (C _2A + C _2B −C _4A −C _4B ) ΔZ = (1 / 4C _{0) (C 1A -C 1B +} C 3A -C 3B) = (1 / 4C 0) (C 2A -C 2B + C 4A -C 4B) Δθ = (1 / 4C 0) (C 1A -C 1B -C 3A + C _3B ) Δφ = (1 / 4C ₀ ) (C _2A -C _2B -C _4A + C _4B )

In each electrostatic support electrode, two comb-shaped portions 221-1 and 221-2, 231-1 and 231-2, and
23-1 and 223-2, 233-1 and 233-2,
Control DC voltage ± V of equal and opposite polarities
_1A , ± V _1B , ± V _3A , ± V _3B are applied. Therefore, the midpoints Q ₁ , Q ₂ , Q ₃ and Q _{4 of the} two pairs of capacitors (FIG. 14)
In this case, the potentials of only Q ₁ and Q ₃ are zero. That is,
Since control DC voltages having the same magnitude and different polarities are applied to the comb-shaped portions of each pair of the electrostatic support electrodes, the potential of the gyro rotor 20 is zero.

First to fourth pairs of electrostatic support electrodes 221 and 2
31, 222, 232, 223, 233, 224, 23
4 is superimposed on the control DC voltage, and the detection AC voltages AC _1A , AC _1B , AC _2A , AC _2B , AC _3A , A
When C _3B , AC _4A , and AC _4B are applied, a displacement detection AC current i _P is generated at the displacement detection electrodes 226 and 236. The displacement detection AC current i _P is represented by the following equation.

[0065]

[Equation 7] i_P= K '(C_1AAC_1A+ C_1BAC_1B+ C_2AA
C_2A+ C_2BAC_2B+ C_3AAC_3A+ C_3BAC_3B+ C_4AAC
_4A+ C_4BAC_4B) K '= 2 (C_FA+ C_FB) S / (2C_1A+ 2C_1B+ 2C_2A
+ 2C_2B+ 2C_3A+ 2C _3B+ 2C_4A+ 2C_4B+ C_FA+ C
_FB)

Here, K 'is a proportional constant, and s is a Laplace operator. In this equation, the detection AC voltages AC _1A , AC _1B , AC _2A , AC _2B , and A expressed by the equations 1 and 2
By substituting C _3A , AC _3B, AC _4A , AC _4B and the capacitances C _1A , C _1B , C _2A , C _2B , C _3A , C _3B, C _4A , C _4B represented by the equation (5) When arranged, the displacement detection AC current i _P is represented by the displacement. After all, gyro rotor 2
0 is linearly displaced by ΔX in the X-axis direction, is linearly displaced by ΔY in the Y-axis direction, is linearly displaced by ΔZ in the Z-axis direction, is rotationally displaced by a rotation angle Δθ around the Y-axis, and is a rotation angle around the X-axis. Δφ
When the rotation is displaced only by the amount, the displacement detection AC current i _P is represented by the following equation.

[0067]

## EQU8 ## i _P = K _I (EXΔX + EYΔY + 2EZΔZ)
_{+ EθΔθ + EφΔφ) K I =} -8sC 0 (C FA + C FB) / (16C 0 + C FA +
C _FB )

Here, K _I is a proportional constant, and s is a Laplace operator. The displacement detection AC current i _P is supplied to a preamplifier 35 via a resistor 36 having a resistance value R.
It is converted for displacement detection AC voltage V _P. Such displacement detection AC voltage V _P is expressed by the following equation.

[0069]

## EQU9 ## _VP = _VP (X) + _VP (Y) + _VP (Z) +
V _P (θ) + V _P (φ)

Here, the terms on the right side are the displacements ΔX, ΔY, Δ
These are voltage components corresponding to Z, Δθ, and Δφ, and are expressed as follows.

[0071]

[Number 10] _{V P (X) = K I} EXΔX = K V1 E 0 ω 1 Δ
Xsin (ω ₁ t + ζ ₁ ) V _P (Y) = K _I EYΔY = K _V2 E ₀ ω ₂ ΔY sin
(Ω ₂ t + ζ ₂ ) V _P (Z) = K _I EZΔZ = K _V3 E ₀ ω ₃ ΔZ sin
_{(Ω 3 t + ζ 3)} V P (θ) = K I EθΔθ = K V4 E 0 ω 4 Δθsin
(Ω ₄ t + ζ ₄ ) V _P (φ) = K _I EφΔφ = K _V5 E ₀ ω ₅ Δφ sin
(Ω ₅ t + ζ ₅ )

Here, K_V1~ K_V5Is the capacitance of the capacitor
C₀, C_FA, C_FBIt is a constant determined by Equation 9
And the output voltage V_PHaji
Includes all displacements of gyro rotor 20 independently. Therefore
Taking out the desired voltage component from equation (9)
Resulting displacement is obtained. For example, linear displacement ΔX, ΔY, Δ
Even when Z and two or more rotational displacements Δθ and Δφ overlap,
By extracting the corresponding voltage component, each displacement can be obtained.
You. In addition, this equation is equivalent to the output voltage V_PAre linear displacements ΔX, Δ
Displacement detection corresponding to Y, ΔZ and rotational displacement Δθ, Δφ
Frequency ω₁~ Ω _FiveThat it is amplitude modulated by
Is shown.

The linear displacement ΔX, Δ of the gyro rotor 20
When Y, ΔZ and rotational displacements Δθ, Δφ are obtained, a control DC voltage is obtained based on the obtained values. The control DC voltage is represented by the following equation.

[0074]

## _EQU11 ## V _1A = V ₀ + ΔV _1A V _1B = V ₀ + ΔV _1B V _2A = V ₀ + ΔV _2A V _2B = V ₀ + ΔV _2B V _3A = V ₀ + ΔV _3A V _3B = V ₀ + ΔV _3B V _4A = V ₀ + ΔV _4A V _4B = V ₀ + ΔV _4B

V _1A and V _1B are the first pair of electrostatic support electrodes 2
DC voltage for control, V _2A and V _2B applied to 21, 231
Is a control DC voltage applied to the second pair of electrostatic support electrodes 222 and 232, and V _3A and V _3B are control DC voltages applied to the third pair of electrostatic support electrodes 223 and 233, V _4A and V
_4B is a control DC voltage applied to the fourth pair of electrostatic support electrodes 224 and 234.

V ₀ is a reference voltage, which is known. Therefore, in order to obtain the control DC voltage, the variation ΔV
_1A , ΔV _1B , ΔV _2A , ΔV _2B , ΔV _3A , ΔV _3B , Δ
V _4A and ΔV _4B may be obtained. These changes are calculated from the linear displacements ΔX, ΔY, ΔZ and the rotational displacements Δθ, Δφ. First, the forces Fx, Fy, Fz made dimensionless from the linear displacements ΔX, ΔY, ΔZ and the rotational displacements Δθ, Δφ.
And the torques Tθ and Tφ. Details of the dimensionless operation are omitted here. See the above application for details.

The dimensionless forces Fx, Fy, Fz and G
An operation to determine the amount of change in the control DC voltage from the torques Tθ and Tφ
In the calculation, the number of conditional expressions
Absent. Therefore, the change amount ΔV_1A, ΔV_1BAnd ΔV_3A, ΔV
_3BAnd ΔV_2A, ΔV_2BAnd ΔV _4A, ΔV_4BEven more
Another condition is provided.

[0078]

ΔV _1A + ΔV _1B + ΔV _3A + ΔV _3B = 0 ΔV _2A + ΔV _2B + ΔV _4A + ΔV _4B = 0

Using these conditions, the amounts of change ΔV _{1A to} ΔV _4B of the control DC voltage are calculated. Such an arithmetic expression is expressed as follows.

[0080]

Equation 13] _{ΔV 1A = (V 0/4} ) (Fx + Fz / 2 + Tθ) ΔV 1B = (V 0/4) (Fx-Fz / 2-Tθ) ΔV 2A = (V 0/4) (Fy + Fz / 2 + Tφ) _{ΔV 2B = (V 0/4} ) (Fy-Fz / 2-Tφ) ΔV 3A = (V 0/4) (- Fx + Fz / 2-Tθ) ΔV 3B = (V 0/4) (- Fx-Fz / _{2 + Tθ) ΔV 4A = (} V 0/4) (- Fy + Fz / 2-Tφ) ΔV 4B = (V 0/4) (- Fy-Fz / 2 + Tφ)

The non-dimensionalized forces Fx, Fy, Fz and the torques Tθ, Tφ are supplied to a gyro acceleration output calculator 145, and the external force accelerations α _X , α _Y , α _Z and angular velocity dθ /
dt and dφ / dt are calculated. External force acceleration and angular velocity are expressed as follows.

[0082]

Α _x = Fx / mg α _Y = Fy / mg α _Z = Fz / mg dθ / dt = Tφ / H dφ / dt = Tθ / H

M is the mass of the gyro rotor 20, g is the gravitational acceleration, and H is the spin angular momentum of the gyro rotor 20.

Next, the rotor drive system in the gyro apparatus will be described. As shown in FIGS. 12, 13 and 14, the rotor drive system of the present embodiment includes drive electrode portions 200 E and 200 E ′ formed on the upper and lower surfaces of the gyro rotor 20 and the upper bottom member 22 or the lower portion of the gyro case 21. Side bottom member 24
And the drive electrodes 225 and 235 and the rotor drive section 160 formed in the first and second sections. The rotor drive system of this example receives a command signal from the sequence control unit 170 and
5 and 235, the gyro rotor 2
0 is started, rotated, and stopped.

As shown in FIG. 11B and as described above, the driving electrode portion 200E and the driving electrode 225 of the gyro rotor 20 and the driving electrode portion 200E 'and the driving electrode 235 have the same radius. It is arranged in one row on the circumference and is composed of a plurality of sector-shaped portions each having the same shape.

The drive electrode portions 200E and 200 of this embodiment
E ′ and the driving electrodes 225 and 235 constitute a three-phase electrode. According to this example, the upper drive electrode portion 200E of the gyro rotor 20 includes four fan-shaped portions separated by a central angle of 90 ° from each other, and the lower drive electrode portion 200E ′.
Includes four sectors separated by a central angle of 90 ° from each other.

Correspondingly, the upper drive electrode 225 of the gyro case 21 includes twelve fan-shaped portions spaced at the same center angle, and the lower drive electrode 235 at the same center angle. Includes twelve spaced sectors. Each of the twelve drive electrodes 225 or 235 comprises four sets of sectors, each set having three sectors,
That is, it is composed of a first phase, a second phase, and a third phase sector.

The sector of the corresponding phase of each set of drive electrodes 225 or 235 is electrically connected to each other. For example, four driving electrodes 225 or 235 of the first phase are connected to each other, and four driving electrodes 225 or 23 of the second phase are connected.
5 are connected to each other, and the four driving electrodes 225 or 235 of the third phase are connected to each other.

A three-phase driving voltage is applied to the three-phase common terminal. The driving voltage may be a step voltage or a pulse voltage. Such drive voltages are sequentially switched to four adjacent sectors of the next phase. The switching of the driving voltage is performed in synchronization with the rotation of the gyro rotor 20. Thereby, the gyro rotor 20 rotates at high speed. Since the gap 26 of the gyro case 21 is maintained in a vacuum, the driving voltage may be cut off when the rotation speed of the gyro rotor 20 increases, but the driving voltage may be constantly applied.

The driving electrode section 20 constituting the three-phase electrode
OE and 200E 'and drive electrodes 225, 235 may be configured to include more sectors. For example,
Each of the driving electrode portions 200E and 200E 'may include five sectors, and correspondingly, each of the driving electrodes 225 and 235 may include five sets (15) of sectors. .

An equivalent circuit of the rotor drive system is shown on the right side of FIG. The driving electrode section 200E of the gyro rotor 20 and the driving electrode section 225 of the gyro case 22 are replaced with capacitors, and the driving electrode section 200E of the gyro rotor 20 is replaced with a capacitor.
E ′ and the drive electrode 235 of the gyro case 24 are replaced by capacitors. Each capacitor has a driving DC voltage VR for rotationally driving the gyro rotor 20.
AC voltages ACR1, ACR2, AC for detecting the rotation angles of the gyro rotor 20 and VR1, VR2 and VR3.
R3 is applied.

The operation of the drive motor of this embodiment will be described in detail with reference to FIG. FIG. 15 shows the driving electrode portion 2 on the upper side of the gyro rotor 20 which is actually arranged circumferentially.
00E and the corresponding drive electrode 225 on the upper side of the gyro case 22 are linearly arranged.

The driving electrode portion 200E on the upper side of the gyro rotor 20 has four fan-shaped portions 200E-1, 200E-2, 200E-3, and 2 which are separated from each other at a central angle of 90 °.
00E-4. In response, gyro case 2
2, the upper drive electrode 225 includes twelve sectors,
These consist of four sets, each set containing three or three-phase sectors. Reference numerals 225-1, 225-2, and 225 are assigned to the first, second, and third phase sectors of each set of sectors.
Add -3.

The four sectors 225-1 of the first phase are electrically connected to each other, and the four sectors 225-225 of the second phase.
2 are electrically connected to each other, and the four sectors 225-3 of the third phase are electrically connected to each other.

A command signal from the sequence control unit 170 is supplied to the rotor drive unit 160, and the three-phase drive electrodes 225-1, 225-2, and 225 are supplied by the command signal.
-3 are applied with the driving DC voltages VR1, VR2, VR3 and the detecting AC voltages ACR1, ACR2, ACR3.

Driving electrode 22 of first, second and third phases
5-1, 225-2 and 225-3 have a predetermined switching time Δ
The driving DC voltages VR1, VR2, and VR3 are applied in order at every t. As a result, the gyro rotor 20 moves 360 degrees around the center axis, that is, the spin axis every switching time Δt.
Rotate by degrees / 12 = 30 degrees.

The lower graph in FIG. 15 shows the rotation angle detection currents generated at the displacement detection electrodes 226 and 236 or the rotation angle detection voltages ACQ1, ACQ2 and ACQ corresponding thereto.
3. Such rotation angle detection signals ACQ1, ACQ
2. The rotation angle of the gyro rotor 20 is detected by the ACQ3.

For example, the first-phase driving electrode 225-1
Is applied with the driving DC voltage VR1, the four driving electrode units 200E-1, 200E-2, 200E-3,
00E-4 is the first phase drive electrodes 225-1 and 225
-1, 225-1, 225-1, that is,
The gyro rotor 20 rotates around the central axis by 30 degrees, and when the driving DC voltage VR2 is applied to the second-phase driving electrode 225-2, the four driving electrode portions 200 are rotated.
E-1, 200E-2, 200E-3, and 200E-4 are driving electrodes 225-2, 225-2, and 225 of the second phase.
-2, 225-2, that is, the gyro rotor 20 rotates around the central axis by 30 degrees.

[0099]

In the gyro device restraint control system, when the gyro rotor is deviated from the reference position, a restraining force or a restoring force is generated to return the gyro rotor to the reference position. This restraining force is the electrostatic supporting force of the capacitor formed by the electrode portion of the gyro rotor and the electrostatic supporting electrode of the gyro case. For example, the constraint forces in the X-axis direction, the Y-axis direction, and the Z-axis direction are as follows.

[0100]

Fx = (CV ² ) / (2L) fy = (CV ² ) / (2L) fz = (CV ² ) / (2δ)

Here, C is the capacitance of the capacitor, V is the voltage, L is the dimension of one side of the capacitor, and δ is the distance between the capacitors. The rotational moment fθ around the Y axis and the rotational moment fφ around the X axis are obtained by multiplying the constraint force fz in the Z axis direction by the arm r of the moment.

The electrostatic support voltage V for generating the restraining force is the sum of the reference voltage V ₀ and the amount of change ΔV as expressed by the equation (11), and the amount of change is smaller than the reference voltage V _0. small. Therefore, assuming that the voltage V is the same in each of the equations (15), the binding force is a function of the dimension L of the capacitor and the gap δ. Assuming that the size of one side of the capacitor is about 30 μm and the distance between the capacitors is about 5 μm, the constraint force in the X-axis direction and the Y-axis direction is about six times smaller than the constraint force in the Z-axis direction.

Therefore, the constraint control in the X-axis direction and the Y-axis direction has a disadvantage that the sensitivity and accuracy are lower than the constraint control in the Z-axis direction and the constraint control around the X-axis and the Y-axis.

For example, when accelerations having the same magnitude are applied in the X-axis direction, the Y-axis direction, and the Z-axis direction, the constraint forces fx and fy in the X-axis direction and the Y-axis direction and the rotational moment fθ around the Y-axis are applied. And the rotational moment fφ around the X-axis increases, and the variation ΔV _{1A to} ΔV _{4B of the} control DC voltage expressed by the equation (13) increases, and it is necessary to generate a high voltage.

The stopper of the conventional gyro device is composed of a projection provided at the center of the inner surface of the gyro case and a groove provided at the center of both surfaces of the gyro rotor. It was difficult. Also,
So that the stopper contacts the outer periphery of the gyro rotor,
If it is provided outside the gyro rotor, there is a possibility that a large impact may occur due to the contact between the outer periphery of the gyro rotor and the stopper.

In the conventional method of manufacturing a gyro device, when forming the electrode portion of the gyro rotor, it is necessary to form grooves on both surfaces of the gyro rotor by etching or the like. At this time, the electrodes on both surfaces of the gyro rotor had to be formed in the same shape and at the same position, and an accurate positioning operation was required.

Therefore, an object of the present invention is to perform constraint control in the X-axis direction and Y-axis direction with the same sensitivity and precision as constraint control in the Z-axis direction and constraint control around the X-axis and Y-axis. It is an object of the present invention to provide a gyro device and a manufacturing method thereof.

It is a further object of the present invention to provide a gyro rotor stopper which can be manufactured accurately and easily and has less impact.

A further object of the present invention is to enable the electrode portions on both surfaces of the gyro rotor to be manufactured accurately and by a simple method.

A further object of the present invention is to make it possible to manufacture a stopper, a spacer and a gyro rotor accurately and simultaneously.

[0111]

According to the present invention, there is provided a gyro case having a Z-axis along a central axis direction, and an X-axis and a Y-axis orthogonal to the Z-axis. A disk-shaped gyro rotor having a centrally supported spin axis in the central axis direction, and a plurality of electrostatic support electrodes arranged at a distance from the gyro rotor and configured to apply a control voltage, A rotor drive system for rotating the gyro rotor at high speed around the spin axis; and a linear displacement of the gyro rotor in the X-axis direction, Y-axis direction and Z-axis direction, and a rotational displacement around the Y-axis and around the X-axis. A displacement detection system for detecting the displacement, and a constraint control system having a feedback loop for correcting the control voltage so that the displacement detected by the displacement detection system becomes zero. In time detection type gyro apparatus,
The electrostatic support electrodes are arranged corresponding to both surfaces of the gyro rotor and are formed annularly along a plurality of concentric circles,
The gyro rotor has a plurality of annular through holes formed along a plurality of concentric circles. The gyro rotor has a plurality of annular through holes. An electric field penetrating through the through-hole of the gyro rotor is generated up to this time, and the gyro rotor rotating at high speed is restrained at a predetermined position by an electrostatic supporting force generated by the electric field.

According to the present invention, an electric field penetrating the through-hole of the gyro rotor is generated by the electrostatic support electrodes on both sides of the gyro rotor, so that the X-axis and Y-axis constraints on the gyro rotor can be increased. There is an effect that can be done.

According to the present invention, in the gyro device,
An annular land formed between the annular through-holes of the gyro rotor constitutes an electrode portion of the gyro rotor, and the electrode portion of the gyro rotor and the corresponding electrostatic support electrode are located radially inside each other. Or outward. There is an effect that the restraining force on the gyro rotor in the X-axis and Y-axis directions can be increased.

According to the present invention, in the gyro device,
The rotor drive system includes a plurality of rotor drive electrodes arranged so as to be separated from the gyro rotor and configured to receive a rotor drive voltage, and the gyro rotor has a through-hole corresponding to the rotor drive electrode. An electric field penetrating the through hole of the gyro rotor from the rotor driving electrode on one side of the gyro rotor to the rotor driving electrode on the other side of the gyro rotor, the electric field being generated by the electric field; The gyro rotor is configured to generate a rotational driving force by the generated electrostatic supporting force.

Therefore, according to the present invention, an electric field penetrating the through hole of the gyro rotor is generated by the rotor driving electrodes on both sides of the gyro rotor, so that there is an effect that the rotational driving force for the gyro rotor can be increased.

According to the present invention, in the gyro device,
The gyro case has a stopper along the central axis, and the stopper is configured to penetrate a through hole along the central axis of the gyro rotor to limit displacement of the gyro rotor in the XY directions. .

Since the stopper mechanism is provided at the central portion where the peripheral speed of the gyro rotor is low, the impact caused by the contact between the gyro rotor and the stopper can be reduced. Further, there is an effect that the deflection of the gyro case can be made substantially zero at the stopper.

According to the present invention, a gyro case including a gyro case including an upper bottom member and a lower bottom member and a spacer therebetween, and a gyro rotor supported in a non-contact and floating manner inside the gyro case. In the method of manufacturing a device, a masking pattern corresponding to an electrode portion is formed on a first surface of a first plate-shaped member made of a conductive material, and a second and third plate-shaped made of a non-conductive material are formed. Forming an electrode pattern made of a metal thin film on the first surface of the member; and forming the first pattern on the first surface of the second plate-like member.
Are arranged so that the second surfaces of the plate members face each other, the two are anodically bonded, and a portion other than the masking pattern of the first surface of the first plate member is removed by etching. Forming a through hole penetrating from the first surface to the second surface, and arranging the first surface of the first plate member such that the first surface of the third plate member faces the first surface of the first plate member; And anodically joining them, and cutting around the second and third plate members. Further, in the method for manufacturing a gyro device, the masking pattern on the first surface of the first plate-like member is formed in a portion corresponding to a stopper and a spacer other than the electrode portion.

Therefore, according to the method for manufacturing a gyro device of the present invention, there is an effect that the gyro device can be manufactured with few steps and with high accuracy.

[0120]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An example of a gyro device according to the present invention will be described with reference to FIGS. The gyro device according to the present invention includes a gyro rotor 40 having a disc shape and a gyro case 41 that houses the gyro rotor 40. The gyro case 41 has an upper bottom member 42, a lower bottom member 44, and a spacer 43 for connecting them, and the spacer 43 has an annular inner wall 43A. Thus, the gyro case 4 is formed by the inner surfaces of the upper bottom member 42 and the lower bottom member 44 and the inner wall 43A of the spacer 43.
A disk-shaped closed cavity 46 is formed inside 1. Such a cavity 46 may be evacuated by any suitable method.

As shown in FIG.
Set the Z coordinate. The Z-axis is taken upward along the central axis of the gyro device, and the X-axis and Y-axis are taken perpendicular to it. In a steady state, the spin axis of the gyro rotor 40 is arranged along the Z axis.

As shown in the left half of FIG. 1 and FIG. 2, the gyro rotor 40 has a plurality of holes 400a, 400b, 400c, 400d, and 400e penetrating from the upper surface to the lower surface. Holes 400a, 400b, 400c, 4
00d are arranged at equal angular intervals in the circumferential direction along a plurality of concentric circles. Of the part between these holes,
Circumferentially extending portions 400A, 400B, 400
C and 400D are called lands, and a portion extending in the radial direction is called a bridge.

Lands 400A, 400B, 400C, 4
00D substantially forms an electrode portion of the gyro rotor 40. Therefore, the lands will be appropriately referred to as electrode portions below. Holes 400a, 400b, 400 provided on the outer peripheral side
Although a large number c is formed in the circumferential direction, eight holes 400d provided on the inner circumferential side are provided along the circumferential direction. The inner hole 400d and the center hole 400e will be described later.

On the other hand, as shown in the right half of FIG. 1 and FIG. 2, each of the inner surfaces of the upper bottom member 42 and the lower bottom member 44 of the gyro case 41 has at least three groups of electrostatic support electrodes. Now, the first, second, third and fourth electrostatic support electrodes 421, 422, 423, 424 and 431, 43
2, 433 and 434 are arranged. These four electrostatic support electrodes are arranged at an angular interval of 90 ° from each other along the circumferential direction. For example, the first and third electrostatic support electrodes 421, 423 and 431, 433 are arranged along the X axis, and the second and fourth electrostatic support electrodes 422, 42
4 and 432, 434 are arranged along the Y axis.

These eight electrostatic support electrodes have the same shape and the same structure. Here, the first electrostatic support electrode 42
1 will be described. The electrostatic support electrode 421 includes a plurality of electrodes 421A, 421B, and 421 arranged along concentric circles.
C, 421D (FIGS. 1 and 2 show three electrodes 421A,
Only 421B and 421C are shown. )including.
These multiple electrodes consist of two groups. That is, the first group 421-1 includes the odd-numbered electrodes 4 from the outer peripheral side.
21A, 421C, 421E, etc., which are electrically connected to each other. Second group 421-2
Are the even-numbered electrodes 421B, 421D, and 42 from the outer peripheral side.
1F, etc., which are electrically connected to each other.

Next, the configuration of the central portions of the gyro rotor 40 and the gyro case 41 will be described. Eight holes 400 are formed on the inner peripheral side of the gyro rotor 40 along the circumferential direction.
d is provided. On the other hand, the inner surfaces of the upper bottom member 42 and the lower bottom member 44 of the gyro case 41 are provided with six rotor driving electrodes 425 and 435 along the circumferential direction, respectively. Electrode 42
6, 436 are respectively formed.

The hole 400d of the gyro rotor 40 and the rotor driving electrodes 425, 435 of the gyro case 41 are arranged correspondingly, that is, along the circumference of the same radius. The radial width of the hole 400d of the gyro rotor 40 and the rotor driving electrodes 425, 435 of the gyro case 41 may be the same.

A discharge / stopper 427 is disposed in the center hole 400e of the gyro rotor 40 as shown in the figure. As shown in FIG. 2, both ends of the stopper 427 are connected to the inner surface of the upper bottom member 42 of the gyro case 41 and the lower bottom member 44.
Is connected to the inner surface of the The stopper 427 is formed in a columnar shape, and its outer diameter is the center hole 400 of the gyro rotor 40.
e is smaller than the inner diameter, and there is a gap between them.

The displacement of the gyro rotor 40 in the direction along the XY plane is restricted by the center hole 400e of the gyro rotor 40 and the stopper 427. For example, when the gyro rotor 40 is displaced in the X and Y directions,
Can be displaced by a distance corresponding to this gap, but cannot be displaced any further.

In the case of this embodiment, since the stopper mechanism is provided at the center of the gyro rotor 40, the effect is smaller than when a stopper mechanism is provided at the outer periphery of the gyro rotor 40. That is, even if the gyro rotor 40 is displaced and the center hole 400e of the gyro rotor 40 comes into contact with the stopper 427, the diameter of the center hole 400e is small, the peripheral speed is small, and the impact due to the contact is small. The smaller the diameter of the center hole 400e, the smaller the impact can be.

The stopper 427 is further provided with the gyro case 41
Has the function of imparting strength to That is, gyro case 4
The bending of the central portions of the upper and lower bottom members 42 and 44 is substantially prevented. Further, the gyro rotor 40
The contact between the gyro rotor 40 and the stopper 427
Unnecessary charges are released.

The gyro rotor 40 is formed of a conductive material. For example, single-crystal silicon (silicon) may be used as such a conductive material. By using a single crystal material, it is possible to provide a high-accuracy gyro rotor that is less affected by thermal distortion and aging.

The stopper 427 and the spacer 43 may be formed of the same material as the gyro rotor 40. The method of manufacturing the gyro device will be described in detail later, but the upper bottom member 42 and the lower bottom member 44 of the gyro case 41 are preferably connected to the stopper 427 and the spacer 43 by anodic bonding.

The upper bottom member 42 and the lower bottom member 44 of the gyro case 41 are formed of a non-conductive material, for example, glass. The upper and lower electrodes formed on the inner surfaces of the upper bottom member 42 and the lower bottom member 44 of the gyro case 41 may be formed of a conductive material, for example, a metal thin film.

Electrostatic support electrodes, rotor driving electrodes, and displacement detecting electrodes 421, 422, 423, 424, 425, 42 formed on the upper bottom member 42 of the gyro case 41.
6 and the lower support member 44, the electrostatic support electrode, the rotor drive electrode, and the displacement detection electrodes 431, 432, 43
3, 434, 435, 436 may be connected to an external circuit board or the like by through-hole connection.

The through-hole connection will be described. Although not shown, the upper bottom member 42 and the lower bottom member 44 are provided with small holes, that is, through holes. The through hole is provided at a position close to the electrostatic support electrode, the rotor drive electrode, and the displacement detection electrode. A metal film is formed on the inner surface of the through hole, and the metal film and an electrode adjacent thereto are electrically connected. The metal film is electrically connected to a circuit board and the like.

Referring to FIG. 3, electrode portions 400A, 400B, 400C and 400D of gyro rotor 40 and electrostatic support electrodes 421, 423 and 431 of gyro case 41,
The relative positional relationship between 433 and 422, 424 and 432, 434 will be described. 3 shows only the electrode portions 400A, 400B and 400a of the gyro rotor 40 and the electrode portions 421A, 421B and 431A and 431B of the electrostatic support electrodes 421 and 431 of the gyro case 41.

Assume that the gyro rotor 40 is at the reference position. That is, it is assumed that the gyro rotor 40 rotating at a high speed is in a state parallel to the XY plane and its spin axis is on the Z axis.

The electrode portions 400A, 4A of the gyro rotor 40
00B, 400C, and 400D have the same radial width, and the radial pitch is constant. The widths in the radial direction of the electrostatic support electrodes 421, 423 and 431, 433 and the electrodes 422, 424 and 432, 434 are all the same, and the pitch in the radial direction is constant. For example, each electrostatic support electrode 421A, 421 of the first electrostatic support electrode 421
B, 421C, 421D, and the like have the same radial width, and the radial pitch is constant.

The electrode portions 400A, 4A of the gyro rotor 40
00B, 400C, and 400D, the width in the radial direction is L ₁ , and the pitch in the radial direction is p _1, and the electrostatic support electrodes 421, 423 and 431, 433, 422 of the gyro case 41,
424, 432, and 434, the radial width of each electrode is L
_2, the pitch in the radial direction and p _2. Both pitches p ₁ and p ₂ in the radial direction are equal. Both radial widths L ₁ ,
L ₂ is preferably equal.

[0141]

## EQU15 ## p ₁ = p ₂ = p L ₁ = L ₂ = L

The electrode portions 400A, 4A of the gyro rotor 40
Gyro case 4 for each of 00B, 400C and 400D
One electrostatic support electrode 421, 423 and 431, 433 and 422, 424 and 432, 434 are arranged corresponding to each electrode. Electrode portions 400A, 4 of gyro rotor 40
00B, 400C, mean radius of 400D, i.e., the electrostatic supporting electrodes 421 and 423 and 431,43 the distance from Z axis to the center position of the width of the electrode portions and r _1, the corresponding
3 and 422, 424 and the average radius of each electrode 432 and 434, i.e., the distance from the Z axis to the center position of the width of the electrostatic supporting electrodes and r _2.

As shown, the average radii r ₁ , r ₂
Are not equal to one another, ie one is greater than or less than the other. FIG. 3 shows a case where the average radius r ₁ of the electrode portion of the gyro rotor 40 is larger than the average radius r ₂ of the electrostatic support electrode. The difference in the mean radius r ₂ of the average radius r ₁ and the electrostatic support electrode 421B of the electrode portions 400B may be a half of the radial width L as shown, there quarters of the pitch p in the radial direction May be.

[0144]

Δr = | r ₂ −r ₁ | = L / 2 = p / 4

The outer diameter D of the gyro rotor 40 may be 5 mm or less, and the thickness t may be 0.3 mm or less.
Also, its mass may be less than or equal to 10 mm grams. In the example shown in FIGS. 1 and 2, three rows of holes 400 a, 400 b, 400 c and four rows of electrode portions 4 are provided in the gyro rotor 40.
Although 00A, 400B, 400C, and 400D are formed, many holes, many electrode portions, and electrostatic support electrodes are actually formed.

Each electrode (for example, 421A,
421B, 421C, etc.) have a width L in the radial direction of about 20 μm and are formed at regular intervals at a pitch of about 40 μm. Are formed. Note that the radial width L and the pitch p of the electrode portion of the gyro rotor 40 and the electrostatic support electrode of the gyro case 41 should be as small as possible as far as the manufacturing method allows.

The electrode portions 400A, 4A of the gyro rotor 40
00B, 400C, and 400D, and an electrostatic support electrode, a rotor drive electrode, and a displacement detection electrode 421 formed on the upper bottom member 42 of the gyro case 41 corresponding thereto.
Gap δ between 422, 423, 424, 425, 426
And electrode portions 400A, 400B of the gyro rotor 40,
An electrostatic support electrode formed on the lower surface of the gyro case 41 corresponding to the lower surface of 400C and 400D,
A rotor driving electrode and a displacement detecting electrode 431, 432;
The gap δ between 433, 434, 435, 436 is equal.

Referring to FIGS. 4 and 5, the configuration of the control loop of the gyro device of this embodiment will be described. As shown in FIG. 4, the configuration of the control loop of this example is basically the same as the configuration of the conventional control loop. The function of each component is basically the same,
A detailed description of the operation is omitted.

FIG. 5 shows an equivalent circuit of the electrode section of the gyro rotor 40 and the electrostatic support electrode of the gyro case 41 of the gyro apparatus of this embodiment. A capacitor is formed by the electrode portion of the gyro rotor 40 and the corresponding electrostatic support electrode of the gyro case 41. Like a conventional gyro device,
Controlling DC voltages ± V _1A to ± V _4A , ± V _1B to ± V _4B and displacement detection AC currents AC _{1A to} AC _4A , AC _{1B to} AC _4B are applied to the electrostatic support electrodes 421 to 424 and 431 to 434. The rotor drive electrodes 425 and 435 are applied to the rotor drive voltages ± VR1 to ± VR3 and the position detection AC current ACR1.
ACR3 is applied.

According to this embodiment, the control DC voltage ± V _1A applied to the electrostatic support electrodes 421 to 424 of the upper bottom member 42.
± V _4A and the control DC voltage ± V _1B applied to the electrostatic supporting electrodes 431 to 434 of the lower bottom member 44 corresponding thereto.
The polarities of ± V _4B are opposite to each other. Therefore, the upper bottom member 4
2 from the electrostatic support electrodes 421 to 424 to the electrostatic support electrodes 431 to 434 of the lower bottom member 44.
An electric field penetrating through holes 400a, 400b, 400c is formed.

The rotor driving voltages + VR1 to + VR applied to the rotor driving electrode 425 of the upper bottom member 42
3 and the corresponding rotor drive voltage −VR1 to −VR applied to the rotor drive electrode 425 of the lower bottom member 44.
The polarities of 3 are opposite to each other. Therefore, the upper bottom member 42
From the rotor driving electrode 425 of the gyro rotor 40 to the rotor driving electrode 425 of the lower bottom member 44.
An electric field penetrating through 00d is formed.

Thus, in this example, the upper electrostatic support electrode 42
The holes 400a, 400b, 40 of the gyro rotor 40 extend from the electrodes 1 to 424 and the rotor driving electrode 425 to the lower electrostatic support electrodes 431 to 434 and the rotor driving electrode 425.
Since an electric field penetrating through 0c and 400d is formed, the electrostatic supporting force in the X-axis and Y-axis directions and the electrostatic supporting force in the circumferential direction (tangential direction) are increased. This will be described below.

With reference to FIG. 6, the electrostatic supporting force in the gyro device of this embodiment will be described. Electrode portions 400A, 400B, 400C and 400D of gyro rotor 40 and electrostatic support electrodes 421, 423 and 43 of gyro case 41
1,433 and 422,424 and 432,434 form a capacitor. FIG. 6A shows the electrode section 200B of the gyro rotor of the conventional gyro apparatus and the electrostatic support electrode 223 of the gyro case, and FIG. 6B shows the electrode section 400A of the gyro rotor of the gyro apparatus according to the present invention and the electrostatic support electrode 421A of the gyro case. 431A.

As shown in FIG. 6A, in the conventional example, an electric field having sparse equipotential lines is generated in the groove 200a of the gyro rotor 20. As shown in FIG. 6B, in the gyro device of this example, an electric field is generated in the hole 400 a of the gyro rotor 40, and the equipotential lines are transferred from the electrostatic support electrode 423 formed on the upper bottom member 42 to the lower bottom member 44. It extends to the formed electrostatic support electrode 433.

In this example, there is an effect that the electrostatic supporting force in the horizontal direction, that is, in the X-axis and Y-axis directions is increased. In this example, a larger electrostatic supporting force or restraining force in the X-axis direction and the Y-axis direction can be obtained as compared with the conventional gyro device.

The inner peripheral hole 40 of the gyro rotor 40
0d and the electrode 425 for driving the rotor of the gyro case 41,
The same applies to the electrostatic supporting force generated during 435. The bridge between the adjacent holes 400d of the gyro rotor 40 and the rotor driving electrodes 425, 435 of the gyro case 41
To form a capacitor, and the electric field generated in the capacitor penetrates the hole 400d. Accordingly, the electrostatic supporting force in the lateral direction, that is, the circumferential direction (tangential direction) increases, and the driving force for rotating the gyro rotor 40 increases.

A method of manufacturing the gyro device according to the present embodiment will be described with reference to FIGS. First, a process of forming a portion corresponding to the gyro rotor 40 will be described with reference to FIG.

In the oxide film forming step of FIG. 7A, a silicon dioxide film 601 is formed on both surfaces of a silicon thin plate 600.
The thin plate 600 may be made of polycrystalline silicon, but is preferably made of single-crystal silicon. The thickness of the silicon dioxide film 601 may be, for example, 0.5 μm. FIG. 7B
In the first patterning step, a mask having a predetermined shape is formed on the silicon dioxide film. The masking is formed at a portion corresponding to the stopper 427 at the center of the gyro rotor 40 and the surrounding spacer 43. The silicon dioxide film is removed leaving the masked portion.

In the etching step of FIG. 7C, silicon is etched using a potassium hydroxide solution. Silicon is removed from portions other than the masked portion, and the concave portions 6 are formed.
02 is formed. After the etching, the masked portion of the silicon dioxide 601 is removed.

In the oxidation step of FIG. 7D, a silicon dioxide film or a resist film 603 is formed on both surfaces. The thickness of this film 603 may be about 1 μm. Second of FIG. 7E
In the patterning step, a masking pattern 801 having a predetermined shape is formed on the concave portion 602 on the upper surface. The masking pattern 801 is formed in a portion corresponding to an electrode portion formed on the gyro rotor 40. The film 603 on the lower surface is removed.

A process for forming electrodes on the upper bottom member 42 and the lower bottom member 44 of the gyro case 41 will be described with reference to FIG. 8A, a thin film of chromium Cr is formed on the upper surface of the glass plate 700, and a thin film of gold Au is formed thereon. The thickness of the gold film may be about 500 nm, and the thickness of the chromium film may be about 50 nm. In the patterning step of FIG. 8B, a mask of a predetermined shape is formed on the metal film 701. The masking is formed at a portion that is joined to the gyro rotor 40, that is, at a portion corresponding to the stopper 427 at the center of the gyro rotor and the surrounding spacer 43. The metal film is removed leaving the masked portion. In the etching step of FIG. 8C, a resist is applied to the lower surface, and etching is performed on the upper surface. A concave portion 702 is formed in a portion not masked by the etching. After the etching, the masking 701 is removed.

In the lift-off step shown in FIG.
An electrode pattern 703 composed of a platinum thin film and a titanium thin film is formed thereon. This electrode pattern is formed so as to correspond to the electrode portion of the gyro rotor 40. The resist on the lower surface is removed. In the lift-off step of FIG. 8E, a wiring pattern 704 composed of a gold thin film and a chromium thin film is formed on the outer concave portion. This wiring pattern 704 is for connecting an electrode and a circuit. Thus, an electrode pattern and a wiring pattern are formed on the upper bottom member 42 and the lower bottom member 44.

The process of assembling the gyro rotor 40 with the upper bottom member 42 and the lower bottom member 44 will be described with reference to FIGS. In the anodic bonding process of FIG. 9A, a portion 610 corresponding to the gyro rotor manufactured in the process of FIG.
Then, a portion 710 corresponding to the lower bottom member 44 manufactured in the process of FIG. 8 is anodically bonded. Anodic bonding is performed on the surfaces of both projections that are in contact with each other, such as a portion corresponding to a stopper at the center of the gyro rotor 40 and a surrounding spacer.

In the one-sided etching step shown in FIG. 9B, silicon is removed at the portion where the masking pattern 801 is not applied, and a through hole 802 is formed. In this step, a through hole is formed from the upper surface to the lower surface of the gyro rotor, the gyro rotor is separated from the stopper and the spacer, and the spacer is separated from the surrounding members. In the step of FIG. 9C, the masking pattern 801 is removed.

The anodic bonding process of FIG. 10A is the same as that of FIG. 9A. A portion 720 corresponding to the upper bottom member 42 is disposed above a portion 610 corresponding to the gyro rotor, and a contacting portion between them is anodically bonded. In the dicing step of FIG. 10B, portions 710 and 7 corresponding to the upper and lower bottom members are provided.
20 glass plates are cut. In the separation step of FIG. 10C,
Remove unnecessary parts around the glass plate.

As described above, according to the method of this embodiment, the gyro rotor 40, the central stopper 427, and the surrounding spacer 43 are formed simultaneously from the same material, so that the efficiency and the manufacturing error are small.

Although the embodiments of the present invention have been described in detail above, it is easy for those skilled in the art that the present invention is not limited to the above-described embodiments and can adopt various other configurations without departing from the gist of the present invention. Will be understood.

[0168]

According to the present invention, an electric field penetrating the through hole of the gyro rotor is formed from the upper electrostatic support electrode to the lower electrostatic support electrode. There is an advantage that the supporting force or the restraining force can be increased, and the magnitude can be the same level as the electrostatic supporting force or the restraining force in the Z-axis direction.

According to the present invention, the magnitudes of the electrostatic supporting force or the restraining force in the X-axis direction and the Y-axis direction and the electrostatic supporting force or the restraining force in the Z-axis direction can be made substantially equal. There is an advantage that the accuracy and sensitivity of the constraint control in the direction and the Y-axis direction can be made the same level as the accuracy and sensitivity of the constraint control in the Z-axis direction.

According to the present invention, the electric field penetrating the through hole of the gyro rotor is formed from the upper rotor driving electrode to the lower rotor driving electrode, so that the circumferential or tangential rotor driving force is increased. This has the advantage that the voltage supplied to the rotor drive system can be reduced.

According to the gyro device of the present invention, since the stopper mechanism is provided at the center of the gyro rotor,
There is an advantage that the impact due to the contact between the gyro rotor and the stopper is smaller than when a stopper mechanism is provided on the outer peripheral portion of the gyro rotor.

Further, according to the gyro device of the present invention, since the stopper is provided at the center of the gyro rotor, the bending of the upper bottom member and the lower bottom member of the gyro case is substantially prevented, and the strength of the gyro case is reduced. There are advantages to improve.

According to the method for manufacturing a gyro device of the present invention, the gyro rotor, the stopper, and the spacer can be manufactured simultaneously and from the same member by through etching from one side, so that a gyro device at low cost and with few manufacturing errors is provided. There are advantages that can be.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view illustrating a plan configuration of an example of a gyro device according to the present invention.

FIG. 2 is a cross-sectional view showing a structure of an example of a gyro device according to the present invention.

FIG. 3 is a diagram showing a relative positional relationship between an electrostatic support electrode of a gyro case and an electrode of a gyro rotor of the gyro device of the present invention.

FIG. 4 is an explanatory diagram for explaining a control loop of the gyro device of the present invention.

FIG. 5 is a diagram showing an equivalent circuit of a constraint control system and a rotor drive system of the gyro device of the present invention.

FIG. 6 is an explanatory diagram for explaining an electric field formed between an electrostatic support electrode of a gyro case and an electrode of a gyro rotor of the gyro device of the present invention.

FIG. 7 is a diagram illustrating a method of manufacturing a gyro rotor portion of the gyro device of the present invention.

FIG. 8 is a view showing a method of manufacturing the upper bottom member and the lower bottom member of the gyro device of the present invention.

FIG. 9 is a view showing a process of assembling the gyro device of the present invention.

FIG. 10 is a diagram showing a process of assembling the gyro device of the present invention.

FIG. 11 is a diagram showing an example of a conventional gyro device.

FIG. 12 is a diagram illustrating an example of a control loop of a conventional gyro device.

FIG. 13 is a diagram showing a constraint control system of a conventional gyro device.

FIG. 14 is a diagram showing an equivalent circuit of a displacement detection system, a constraint control system, and a rotor drive system of a conventional gyro device.

FIG. 15 is an explanatory diagram for explaining an operation of a rotor drive system of a conventional gyro device.

[Explanation of symbols]

Reference Signs List 20 gyro rotor 20A, 20B, 20C, 20D surface 21 gyro case 22 upper bottom member 22A, 22A 'hole 23 spacer 23A inner wall 23B recess 23C passage 24 lower bottom member 24A hole, 25 screw 26 cavity portion 33 getter member 40 gyro rotor 41 Gyro case 42 Upper bottom member 43 Spacer 43A Inner wall 44 Lower bottom member 127, 128 Discharge / stopper 135 Preamplifier 136 Resistance 140 Control operation unit 145 Gyro acceleration output operation unit 150 Restraint control unit 160 Rotor drive unit 170 Sequence control unit 200A 200B, 200C, 200D, 200E,
200F, 200A ', 200B', 200C ', 20
0D ', 200E', 200F 'Electrode unit 200a, 200b, 200c, 200d, 200e,
200f, 200g, 200a ', 200b', 200
c ', 200d', 200e ', 200f', 200g
Grooves 221 to 226, 231 to 236 Electrodes 421 to 424, 431 to 434 Electrostatic support electrodes 425, 435 Rotor drive electrodes 426, 436 Displacement detection electrodes 427 Discharge stopper

Claims (6)

[Claims] 1. A gyro case having a Z axis along a center axis direction and an X axis and a Y axis orthogonal thereto, and a gyro case which is supported inside the gyro case in a non-contact manner by electrostatic supporting force and is provided in the center axis direction. A disk-shaped gyro rotor having a spin axis; a plurality of electrostatic support electrodes arranged so as to be separated from the gyro rotor and configured to apply a control voltage; A rotor drive system for rotating the gyro rotor at high speed, a displacement detection system for detecting linear displacement of the gyro rotor in the X-axis direction, Y-axis direction and Z-axis direction, and rotation displacement around the Y-axis and X-axis. A constrained control system having a feedback loop for correcting the control voltage so that the displacement detected by the displacement detection system becomes zero. Te, the electrostatic supporting electrode is formed annularly along and a plurality of concentric circles are arranged corresponding to both sides of the gyro rotor,
The gyro rotor has a plurality of annular through holes formed along a plurality of concentric circles. The gyro rotor has a plurality of annular through holes. An electric field penetrating through the through hole of the gyro rotor is generated up to this time, and the gyro rotor rotating at high speed is restrained at a predetermined position by an electrostatic supporting force generated by the electric field. And a gyro device. 2. The gyro device according to claim 1, wherein
An annular land formed between the annular through-holes of the gyro rotor constitutes an electrode portion of the gyro rotor, and the electrode portion of the gyro rotor and the corresponding electrostatic support electrode are located radially inside each other. A gyro device characterized in that the gyro device is biased outward or outward. 3. The gyro device according to claim 1, wherein
The rotor drive system includes a plurality of rotor drive electrodes arranged so as to be separated from the gyro rotor and configured to receive a rotor drive voltage, and the gyro rotor has a through-hole corresponding to the rotor drive electrode. An electric field penetrating the through hole of the gyro rotor from the rotor driving electrode on one side of the gyro rotor to the rotor driving electrode on the other side of the gyro rotor, the electric field being generated by the electric field; A gyro device, wherein the gyro rotor is configured to generate a rotational driving force by the generated electrostatic supporting force. 4. The gyro device according to claim 1, wherein
The gyro case has a stopper along the central axis, and the stopper is configured to pass through a through hole along the central axis of the gyro rotor to limit displacement of the gyro rotor in the XY directions. A gyro device characterized in that: 5. Production of a gyro device having a gyro case including an upper bottom member, a lower bottom member, and a spacer therebetween, and a gyro rotor supported in a non-contact and floating manner inside the gyro case. Forming a masking pattern corresponding to an electrode portion on a first surface of a first plate-like member made of a conductive material; and forming a masking pattern of a second and third plate-like member made of a non-conductive material. Forming an electrode pattern made of a metal thin film on each of the first surfaces, and arranging the second surface of the first plate-shaped member on the first surface of the second plate-shaped member; Anodically joining the two, and removing a portion other than the masking pattern on the first surface of the first plate-like member by etching to form a through hole penetrating from the first surface to the second surface. And the first plate shape Disposing the first surface of the third plate-shaped member on the first surface of the material so as to face each other, anodically bonding them, and cutting the periphery of the second and third plate-shaped members That
A method for manufacturing a gyro device including: 6. The method for manufacturing a gyro device according to claim 5, wherein the masking pattern on the first surface of the first plate-like member is formed in a portion corresponding to a stopper and a spacer other than the electrode portion. A method for manufacturing a gyro device, comprising: