JPH08313479A - Ion sensor - Google Patents

Abstract

PURPOSE: To obtain an ion sensor not generating the error caused by ions to be measured by detecting the voltage of the soln. to be measured received in the hole of a plate member by ion responsive and ion non-responsive electrodes. CONSTITUTION: When a liquid to be measured is dripped in the bottomed hole forming the through-hole 21 of a case 20 to the upper surface of a sensor unit 40, the ion responsive electrode 41 and ion non-responsive electrode 42 on the upper surface of the unit 40 are immersed in the liquid to be measured. Ions to be measured are bonded to the ion selective film 412 of the electrode 41 and the voltage induced in the selective film 412 is detected by a metal sintered film 411. At this time, a substance adsorbing ions to be measured is not bonded to the electrode 41 and, therefore, the measuring error caused by the ions to be measured is not generated. The selective film 422 of the electrode 42 adsorbs no ions to be measured and the sintered film 412 detects the voltage by the ion to be measured and does not detect the voltage by the ion to be measured. The detection signals of the sintered films 411, 421 are amplified by field-effect transistors 43, 44 to be sent to a measuring electronic circuit.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to an ion sensor.
More specifically, it is a liquid ion sensor in which a pair of an ion-sensitive electrode and an ion-insensitive electrode is provided on a common substrate.

[0002]

2. Description of the Related Art An example of a liquid ion sensor in which a pair of an ion sensitive electrode and an ion insensitive electrode is provided on a common substrate is shown in FIG. FIG. 13 is an external view, and FIG. 14 shows an AA or BB sectional view thereof. 13 and 14, 10 is a substrate,
An ion sensitive electrode 12, an ion insensitive electrode 13, and field effect transistors 14 and 15 are arranged on this. The field effect transistor 14 is sealed with a waterproof resin 16.

The ion sensitive electrode 12 is a sintered metal film 121.
And an ion selective film 122 covering the surface thereof. The gate terminal 14G of the field effect transistor 14 is joined to the metal sintered film 121 by soldering or the like. The drain terminal 14D and the source terminal 14S of the field effect transistor 14
Each is drawn to the outside. Further, the common terminal CO is pulled out to the outside. These terminals are connected to a measuring electronic circuit (not shown).

Regarding the system of the ion insensitive electrode 13,
It has the same configuration as above. However, the difference is that the portion corresponding to the ion selective film 122 is the ion insensitive film 132. In FIG. 14, those belonging to the BB cross-sectional view are indicated by symbols with parentheses.

In the ion sensor thus constructed, the ion sensitive electrode 12 and the ion insensitive electrode 13 are immersed in the liquid to be measured in use, and the ion sensitive electrode 12 and the ion insensitive electrode 13 in the liquid to be measured are based on the voltage difference generated between the electrodes. The ion concentration is measured. The type of ion to be measured is determined according to the material of the ion selective film 122 included in the ion sensitive electrode 12.

When using this ion sensor, in order to completely immerse the electrode portion in the liquid to be measured, the substrate 10 is inserted deep into the liquid to be measured so that the resin 16 is immersed in the liquid to be measured. At this time, as shown in FIG.
Ions to be measured adhere to 2. As a result, charges are distributed in the ion selective film 122 and a voltage is induced, and this voltage is transmitted to the gate terminal 14G of the field effect transistor through the metal sintered film 121, is amplified by the field effect transistor 14, and is measured by an electronic circuit. Be transmitted to.

[0007]

[Problems to be Solved by the Invention] As shown in FIG.
During the measurement, ions (non-measurement target ions) corresponding to the material (composition) of the resin also adhere to the surface of the resin 16. Therefore, the electric charge is also distributed in the portion of the ion selective film 122 below the resin 16 corresponding to the electric charge of the ions on the resin 15. However, since the charge in this portion is not the charge due to the measurement target ions to which the ion selective film 122 is sensitive, an error occurs in the ion concentration measurement.

The field effect transistors 14, 15 and their gate terminals 14G, 15G and the metal sintered film 1 are also provided.
When the joint portion with 21 and 131 is sealed with the resin 16, this portion is exposed to high temperature, so that thermal stress is applied. In addition, it takes a long time for the resin to cool and harden. further,
After sealing with resin once, the field effect transistor 14,
Even if it is found that there is a defect in the joint portion of 15 or those gate terminals 14G, 15G and the sintered metal films 121, 131, it is impossible to replace or rework the parts, so that the whole must be discarded.

Further, since this ion sensor measures by inserting the substrate 10 into the liquid to be measured, the liquid to be measured is the substrate 10.
It is necessary to have a sufficient amount to insert. The present invention has been made to solve the above problems, and one object thereof is to realize an ion sensor that does not cause an error due to non-measurement target ions.

Another object of the present invention is that it is not necessary to seal an electronic component such as an amplifying element with a resin, and there are problems such as heat stress due to resin sealing, a long production time, and inconvenience of component replacement and rework. It is to realize a non-ion sensor.

Another object of the present invention is to realize an ion sensor capable of measuring with a small amount of liquid to be measured.

[0012]

[Means for Solving the Problems] A first means for solving the above problems is to provide a plate member having a bottomed hole that opens toward one side and a bottom side of the hole of the plate member. An ion-sensitive electrode having an electrode portion arranged and an electrode portion arranged on the other side of the plate member that communicates with each other by a penetrating portion formed in the bottom, and arranged on the bottom side of the hole of the plate member. Ion-insensitive electrode having an electrode part formed on the other side of the plate member that communicates with the electrode part formed on the bottom and a penetrating part formed on the bottom, and the ion-sensitive electrode on the other side of the plate member. An ion sensor, comprising: a first amplifying element having an input terminal connected to the input terminal; and a second amplifying element having an input terminal connected to the ion insensitive electrode on the other side of the plate member. Is.

A second means for solving the above-mentioned problems is attached to a first plate member having a through hole and a bottomed hole formed in the first plate member by closing the through hole. The second plate member, the electrode portion arranged on the side forming the bottom surface of the bottomed hole of the second plate member, and the second portion communicating with the penetrating portion formed in the second plate member. An ion-sensitive electrode having an electrode portion arranged on the other side of the plate member, and an electrode portion arranged on the side forming the bottom surface of the bottomed hole of the second plate member and the second electrode member. An ion insensitive electrode having an electrode portion arranged on the other side of the second plate member, which communicates with a penetrating portion formed in the plate member, and the ion sensitive electrode on the other side of the second plate member. A first amplifying element having an input terminal connected to an electrode, and the other of the second plate members An ion sensor characterized by comprising a second amplifier element having an input terminal to the non-ion-sensitive electrode at the side are connected.

A third means for solving the above problems is attached to a first plate member having a through hole, and a bottomed hole formed in the first plate member by closing the through hole. The second plate member, the electrode portion arranged on the side forming the bottom surface of the bottomed hole of the second plate member, and the second portion communicating with the penetrating portion formed in the second plate member. An ion-sensitive electrode having an electrode portion arranged on the other side of the plate member, and an electrode portion arranged on the side forming the bottom surface of the bottomed hole of the second plate member and the second electrode member. An ion insensitive electrode having an electrode portion arranged on the other side of the second plate member that communicates with a penetrating portion formed in the plate member, and provided on the other side of the second plate member. A conductive path formed by a printed circuit and the ion-sensing electric field on the other side of the second plate member. A first amplifier element having an input terminal is connected to the output terminal to the conductive path connected to said second
A second amplifier element having an input terminal connected to the ion insensitive electrode and an output terminal connected to the conductive path on the other side of the plate member, and a conductive path corresponding to the conductive path of the second plate member. And a printed wiring circuit board in which the corresponding conductive paths are connected to each other.

In the third means for solving the above-mentioned problems, the conductive path of the second plate member and the conductive path of the printed wiring circuit board are connected by a zebra rubber having conductive paths corresponding to these conductive paths. However, it is preferable in that it can be connected by a simple means.

In any one of the first to third means for solving the above problems, the ion-sensitive electrode is a metal sintered film and an ion selective film covering a portion of the metal sintered film arranged at the bottom of the hole. And the ion-insensitive electrode has a metal sintered film and an ion-insensitive film covering a portion of the metal sintered film disposed at the bottom of the hole. It is preferable because it can be easily formed.

A fourth means for solving the above-mentioned problems includes a case member having a through hole, a plate member which closes the through hole of the case member to form a bottomed hole, and a bottomed hole. An ion-sensitive electrode having a lead portion provided on a portion of the plate member forming a bottom surface; an ion insensitive electrode having a lead portion provided on a portion of the plate member forming a bottom surface of the bottomed hole; A first amplifying element arranged in a case member and having an input terminal connected to a lead portion of the ion-sensitive electrode; and a first amplifying element arranged in the case member and having an input terminal connected to a lead portion of the ion-insensitive electrode. It is an ion sensor characterized by comprising two amplification elements.

[0018]

In the first means for solving the problem, with respect to the liquid to be measured received in the hole of the plate member, the voltage is detected by the ion-sensitive electrode and the ion-insensitive electrode arranged at the bottom of the hole, and these voltages are detected. The signals are respectively output through the first amplification element and the second amplification element.

According to a second means for solving the problem, with respect to the liquid to be measured received in the bottomed hole formed by the first plate member and the second plate member, the ion-sensitive electrode arranged at the bottom of the hole. Voltages are respectively detected by the ion-insensitive electrode and the ion-insensitive electrode, and these voltages are output respectively through the first amplifying element and the second amplifying element.

According to a third means for solving the problem, with respect to the liquid to be measured received in the bottomed hole formed by the first plate member and the second plate member, the ion-sensitive electrode arranged at the bottom of the hole. Voltages are respectively detected by the ion-insensitive electrode and the ion-insensitive electrode, these voltages are respectively amplified by the first amplifying element and the second amplifying element, and these amplified outputs are output through the conductive path of the printed wiring board.

According to a fourth means for solving the problem, with respect to the liquid to be measured received in the bottomed hole formed by the case member and the plate member, an ion-sensitive electrode and an ion-insensitive electrode arranged at the bottom of the hole are used. The respective voltages are detected, and these voltages are amplified by the first amplifying element and the second amplifying element, respectively.

[0022]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is an external view of an apparatus according to an embodiment of the present invention, an exploded view of which is shown in FIG. 2 and a CC sectional view thereof is shown in FIG.

In FIGS. 1 to 3, 20 is a case and 3
Reference numeral 0 is an O-ring, 40 is a sensor unit, 50 is a zebra rubber, 60 is a dummy rubber, and 70 is a printed circuit board.
The case 20 has a through hole 21. An O-ring groove 22 is provided at the lower end of the through hole 21, and an O-ring 30 is fitted therein. The case 20 and the printed circuit board 70 are integrally assembled with the screw 80 and the nut 90 with the sensor unit 40 interposed therebetween. In this state, the through hole 21 of the case 20 is watertightly closed by the O-ring 30 and the upper surface of the sensor unit 40.

Such case 20 and sensor unit 4
The combination of 0 is an embodiment of the plate member in the present invention.
The case 20 is an example of the first plate member in the present invention.

A zebra rubber 50 and a dummy rubber 60 are sandwiched between the lower surface of the sensor unit 40 and the printed circuit board 70. The zebra rubber 50 has a conductive pattern corresponding to the printed pattern 71 of the printed circuit board 70. The lead wire 72 is joined to the print pattern 71 of the printed circuit board 70 by soldering or the like. The lead wire 72 is connected to a measuring electronic circuit (not shown). The printed circuit board 70 is an example of the printed wiring circuit board according to the present invention.

The details of the sensor unit 40 are shown in FIGS.
Shown in 4 is a top view, FIG. 5 is a DD or EE sectional view of FIG. 4, and FIG. 6 is a bottom view. 4 to 6, 4
00 is a substrate made of alumina or the like, 41 is an ion sensitive electrode, 42 is an ion insensitive electrode, 43 and 44 are, for example, MOS type field effect transistors with high input impedance, and 45 is a printed pattern.

The substrate 400 is an embodiment of the second plate member of the present invention. The field effect transistors 43 and 44 are examples of the first amplifying element and the second amplifying element in the present invention, respectively. The printed pattern 45 is an example of a conductive path formed by a printed circuit according to the present invention.

The ion sensitive electrode 41 has a metal sintered film 411.
An ion selective film 412 covering the surface is formed. AEON selection
As the selective film, use a material that is suitable for the ion to be measured.
Ions for measuring hydrogen ion concentration, that is, pH
In the sensor, for example, Ta ₂O_FiveMembranes are used. Money
The metal sintered film 411 is connected through the through hole 401 of the substrate 400.
It is formed as a double-sided film that passes through. Ion selective membrane 412
Is provided on the entire surface of the sintered metal film 411 on the upper surface side of the substrate 400.
Can be

The metal sintered film 411 is formed by applying a metal paste of platinum or gold to the substrate 400 and sintering it. Examples of the metal paste include "cellulosic resin and butycarbitol" and "gold or platinum".
Use a mixture of and at a ratio of 2: 8.

By forming the metal sintered film 411 so as to communicate with each other through the through hole 401, a metal sintered film firmly bonded to the substrate 400 can be obtained. The sintered metal film 411 does not necessarily have the same area on the lower surface side of the substrate 400 as the upper surface side, and may be larger than the cross-sectional area of the through hole 401.

On the lower surface side of the substrate 400, the gate terminal 43G of the field effect transistor 43 is formed on the metal sintered film 411.
And the drain terminal 43D and the source terminal 43S are joined to the printed pattern 45. It is preferable to perform the joining with, for example, a conductive paint or the like because it does not require heating, but since the metal sintered film 411 is firmly bonded to the substrate 400, there is no possibility of peeling due to heating even if soldering is performed. .

The ion insensitive electrode 42 is a sintered metal film 421.
And an ion non-selective film 422 covering the surface thereof. The metal sintered film 421 of the ion insensitive electrode 42 is also formed in the same manner as the metal sintered film 411. The entire surface of the metal sintered film 421 on the upper surface side of the substrate 400 is covered with the ion non-selective film 422.
Covered with. As the ion insensitive film 422, for example, a polymethylmethacrylate film is used.

On the lower surface side of the substrate 400, the field effect transistor 44 is bonded between the metal sintered film 421 and the printed pattern 45 in the same manner as the field effect transistor 43. The print pattern 45 is formed in the same pattern as the print pattern 71 of the printed circuit board 70, and the corresponding patterns are connected via the zebra rubber 50.

Since such a sensor unit 40 is not sealed with resin, it is free from various problems associated with resin sealing as in the above-mentioned conventional example. That is, no heat stress is applied and it does not take a long time for the resin to cool and harden, and the field effect transistors 43 and 44 or their gate terminals 43G and 44G after assembly can be manufactured.
Even if a defect is found in the joint between the metal sintered films 411 and 421, the parts can be replaced or repaired.

Assembling the sensor unit 40,
The assembly of the apparatus of this embodiment using the case 20, the sensor unit 40, the zebra rubber 50, the dummy rubber 60 and the printed circuit board 70 can be performed at high speed by an automatic assembly machine.

Next, the ion concentration measurement using the apparatus of the embodiment of the present invention will be described. When using the apparatus of this embodiment, the through hole 21 of the case 20 and the sensor unit 4 are used.
The liquid to be measured is dropped into a bottomed hole formed on the upper surface of 0. The amount of liquid to be dropped is sufficient to fill the holes, and is about 0.1 cc, although it depends on the volume of the holes.

As a result, the ion sensitive electrode 41 and the ion insensitive electrode 42 on the upper surface of the sensor unit 40 are immersed in the liquid to be measured, and the ion selective film 412 of the ion sensitive electrode 41 is formed.
Ions to be measured are attached to, and the voltage induced thereby in the ion selective film 412 is detected by the metal sintered film 411. At this time, since the ion-sensitive electrode 41 is not provided with one that adsorbs the non-measurement target ions, no measurement error occurs due to the non-measurement target ions. Ions to be measured are not adsorbed on the ion non-selective film 422 of the ion insensitive electrode 42, and the metal sintered film 421 does not detect the voltage due to the ions to be measured. The detection signals of the metal sintered film 411 and the metal sintered film 421 are amplified by the field effect transistors 43 and 44, respectively, and given to an electronic circuit for measurement (not shown).

FIG. 7 shows an ion concentration measuring device constructed using the apparatus of this embodiment. FIG. 7 is an external view, and an exploded view thereof is shown in FIG. 7 and 8, the same parts as those in FIG. 2 are designated by the same reference numerals and the description thereof will be omitted. This ion concentration measuring device is composed of two parts, a detecting part DT and a measuring part MS. The base portion of the detecting portion DT is inserted into the tip portion of the measuring portion MS and integrated with a screw. The detector DT is housed in the sheath SL when not in use.

The detection unit DT includes an upper case 200 and a lower case 5.
00, and they are watertightly integrated with each other with a packing 300 sandwiched therebetween. An O-ring 30, a sensor unit 40, a zebra rubber 50, a dummy rubber 60, and a printed circuit board 70 are incorporated in the cases 200 and 500. Their assembly is performed in the same manner as that shown in FIG. However, what corresponds to the case 20 in FIG. 2 is the upper case 200 in FIG.

The measuring unit MS includes an upper case 600 and a lower case 7.
00, and both are integrated with a screw. The measurement / display unit 800 is incorporated inside these cases. The measurement / display unit 800 is a display 80 using a liquid crystal or the like.
1, a zebra rubber 802, a dummy rubber 803, and a printed circuit board 804.

An electronic circuit (not shown) is mounted on the printed circuit board 804, and the lead wire 72 is used to detect the detector D.
It is connected to the T sensor unit 40. The electronic circuit has a required function such as a battery remaining amount check function in addition to the ion concentration measurement function. The display 801 is connected to an electronic circuit by a zebra rubber 802.

A required number of light emitting display elements (not shown) such as operation switches 805 and light emitting diodes are mounted on the printed circuit board 804. Windows are provided in the upper case 600 corresponding to the display device 801, the light emitting display element and the operation switch 805, and a waterproof cover sheet 601 is attached to cover the windows.

A portion of the cover sheet 601 corresponding to the display 801 and the light emitting display element is transparent, and symbols and characters showing their functions are printed (not shown).
Further, a concave portion for accommodating a battery is formed on the lower surface of the lower case 700, and a back lid 701 is attached thereto.

For the measurement, the upper case 2 of the detection unit DT is used.
Liquid to be measured is dropped into the hole formed on the upper surface of the sensor unit 40 and the through hole 201 of 00, and the operation switch 805 is appropriately operated to perform the measurement. When a large amount of liquid to be measured is present, the detection unit DT can be inserted into the liquid to be measured for measurement.

9 to 11 show the construction of another embodiment of the present invention. 9 is an external view of the detection unit DT ', FIG. 10 is an exploded view, and FIG. 11 is a sectional view taken along the line FF of FIG. As shown in FIG. 10, the detection unit DT 'includes an upper case 200' and a printed circuit board 7 '.
0 ', O-ring 30', zebra rubber 50 ', sensor unit 40', dummy rubber 60 'and lower case 50
It consists of 0 '.

A printed pattern 71 'is provided on the lower surface of the printed circuit board 70', and this printed pattern 71 'is provided.
A lead wire 72 'is pulled out from the. Sensor unit 4
As shown in FIG. 12, 0'is an ion sensitive electrode 41 ', an ion insensitive electrode 42', field effect transistors 43 'and 44' and a printed pattern 4 on one surface of the substrate 400 '.
5 '. The ion sensitive electrode 41 'and the ion insensitive electrode 42' have lead portions 411 'and 421', respectively.

The ion sensitive electrode 41 'is composed of a metal sintered film and an ion selective film covering the surface thereof. The ion selective film also covers the lead portion 411 '. Ion-insensitive electrode 42 '
Consists of a metal sintered film and an ion non-selective film covering its surface. The ion non-selective film also covers the lead portion 421 '.

Gate terminals 43G 'of the field effect transistors 43' and 44 'are provided at the ends of the lead portions 411' and 421 '.
44G 'are respectively joined by a conductive paint or soldering. Field effect transistors 43 ', 44'
Drain terminal 43D ', 44D' and source terminal 43 of
S'and 44S 'are joined to the printed pattern 45' by a conductive paint or soldering.

The upper case 200 'has a stepped lower end, and has a through hole 201' therein. Upper case 20
The printed circuit board 70 ', the zebra rubber 50', and the sensor unit 40 'are provided in the internal space formed by 0'and the lower case 500'.
And a dummy rubber 60 'is incorporated as shown in FIG.

In this state, the through hole 2 of the upper case 200 '
01 'is the ion sensitive electrode 41' of the sensor unit 40 '
And a portion having the ion-insensitive electrode 42 'is closed to form a bottomed hole. The O-ring 30 'provides water tightness to the bottomed hole. The print pattern 45 ′ of the sensor unit 40 ′ and the print pattern 71 ′ of the printed board 70 ′ are connected by the zebra rubber 50 ′.

The dummy rubber 60 'is sandwiched between the lower case 500' and the sensor unit 40 ', and the elasticity of the dummy rubber 60' presses the sensor unit 40 'against the upper case 200', and further the printed circuit board 70 'is attached via the zebra rubber 50'. It is pressed against the upper case 200 '.

In such a detecting section DT ', the liquid to be measured is dropped into the through hole 201' or the tip portion is inserted into the liquid to be measured for ion measurement in the use state. As a result, the same operational effect as that of the detection unit DT described above can be obtained. Further, in the sensor unit 40 ′, the ion sensitive electrode 41 ′, the ion insensitive electrode 42 ′, the field effect transistors 43 ′ and 44 ′, and the print pattern 45 ′ are provided only on one surface of the substrate 400 ′, It has an effect that processing becomes easier.

In the above embodiments, the ion-sensitive electrode and the ion-insensitive electrode have a rectangular shape.
The shape of the electrode is not limited to a rectangle, but may be any shape such as a circle, an ellipse, a semicircle, a triangle, and a trapezoid.

Further, an example has been shown in which the hole for receiving the liquid to be measured is formed by a combination of the through hole of the case and the substrate of the sensor unit closing the hole. This hole has a bottomed hole in a single plate. You may form as.

The shape of the hole is not limited to the circular shape, but may be an elliptical shape, a quadrangular shape or another polygonal shape.

[0056]

As described in detail above, according to the present invention, a pair of an ion-sensitive electrode and an ion-insensitive electrode is arranged at the bottom of the hole provided in the plate member, and the liquid to be measured is placed in the hole. Since the measurement is performed by receiving the ions, it is possible to obtain an effect that an ion sensor that does not cause an error due to non-measurement target ions can be realized.

Further, according to the present invention, since it is configured as described above, it is not necessary to seal the electronic parts such as the amplifying element with the resin, and the thermal stress due to the resin sealing, the long production time, the parts replacement or the reworking. It is possible to obtain an effect that an ion sensor that does not have problems such as inconvenience can be realized.

Furthermore, according to the present invention, since it is configured as described above, it is possible to obtain an effect that an ion sensor capable of measuring with a small amount of the liquid to be measured can be realized.

[Brief description of drawings]

FIG. 1 is an external view of an apparatus according to an embodiment of the present invention.

FIG. 2 is an exploded view of an apparatus according to an embodiment of the present invention.

FIG. 3 is a sectional view of an apparatus according to an embodiment of the present invention.

FIG. 4 is a top view of a sensor unit in the device according to the embodiment of the present invention.

FIG. 5 is a sectional view of a sensor unit in the apparatus according to the embodiment of the present invention.

FIG. 6 is a bottom view of the sensor unit in the apparatus according to the embodiment of the present invention.

FIG. 7 is an external view of an ion concentration measuring instrument using the apparatus of the embodiment of the present invention.

FIG. 8 is an exploded view of an ion concentration measuring instrument using the apparatus of the embodiment of the present invention.

FIG. 9 is an external view of a detection unit of an ion concentration measuring device according to another embodiment of the present invention.

FIG. 10 is an exploded view of a detection unit of an ion concentration measuring device according to another embodiment of the present invention.

FIG. 11 is a sectional view of a detection unit of an ion concentration measuring device according to another embodiment of the present invention.

FIG. 12 is a top view of a sensor unit according to another embodiment of the present invention.

FIG. 13 is an external view of a conventional example.

FIG. 14 is a sectional view of a conventional example.

FIG. 15 is an operation explanatory diagram of a conventional example.

[Explanation of symbols]

 20 Case 21 Through Hole 30 O Ring 40 Sensor Unit 50 Zebra Rubber 60 Dummy Rubber 70 Printed Circuit Board 400 Substrate 401 Through Hole 41 Ion Sensitive Electrode 42 Ion Insensitive Electrode 411,421 Metal Sintered Film 412 Ion Selective Film 422 Ion Nonselective Film 43, 44 field effect transistor 45 printed pattern

Claims (6)

[Claims] 1. A plate member having a bottomed hole that opens toward one side, and an electrode portion arranged on the bottom side of the hole of the plate member and a penetrating portion formed in the bottom communicate with each other. And an ion-sensitive electrode having an electrode portion arranged on the other side of the plate member, which communicates with the electrode portion arranged on the bottom side of the hole of the plate member and a penetrating portion formed on the bottom. An ion-insensitive electrode having an electrode portion arranged on the other side of the plate member; a first amplification element having an input terminal connected to the ion-sensitive electrode on the other side of the plate member; An ion sensor, comprising: a second amplifying element having an input terminal connected to the ion insensitive electrode on the other side of the member. 2. A first plate member having a through hole, a second plate member attached to the first plate member so as to close the through hole and form a bottomed hole, and the second plate member. Is disposed on the other side of the second plate member that communicates with the electrode portion disposed on the side of the plate member that forms the bottom surface of the bottomed hole and the penetrating portion formed in the second plate member. And an electrode part disposed on the side forming the bottom surface of the bottomed hole of the second plate member, and an ion-sensing electrode having an electrode part and a penetrating part formed in the second plate member. An ion-insensitive electrode having an electrode portion arranged on the other side of the second plate member, and a first terminal connected to the ion-sensitive electrode on the other side of the second plate member. And the ion-insensitive electric field on the other side of the second plate member. Ion sensor characterized by comprising a second amplifier element having an input terminal connected to. 3. A first plate member having a through hole; a second plate member attached to the first plate member so as to close the through hole and form a bottomed hole; Is disposed on the other side of the second plate member that communicates with the electrode portion disposed on the side of the plate member that forms the bottom surface of the bottomed hole and the penetrating portion formed in the second plate member. And an electrode part disposed on the side forming the bottom surface of the bottomed hole of the second plate member, and an ion-sensing electrode having an electrode part and a penetrating part formed in the second plate member. An ion-insensitive electrode having an electrode portion arranged on the other side of the second plate member, a conductive path by a printed circuit provided on the other side of the second plate member, and the second An input terminal is connected to the ion sensitive electrode on the other side of the plate member of A first amplifying element having an output terminal connected to the path, and a second amplifying element having an input terminal connected to the ion insensitive electrode and an output terminal connected to the conductive path on the other side of the second plate member. An ion sensor, comprising: an amplifier element; and a printed wiring circuit board in which conductive paths corresponding to the conductive paths of the second plate member are formed and corresponding conductive paths are connected to each other. 4. The conductive path of the second plate member and the conductive path of the printed wiring circuit board are connected by a zebra rubber having conductive paths corresponding to these conductive paths. Ion sensor. 5. The ion-sensitive electrode has a sintered metal film and an ion-selective film covering a portion of the sintered metal film located at the bottom of the hole, and the non-ion-sensitive electrode comprises the sintered metal film and the metal. 5. An ion-insensitive film that covers a portion of the sintered film, which is arranged at the bottom of the hole.
2. The ion sensor described in any one of 1. 6. A case member having a through hole, a plate member for closing the through hole of the case member to form a bottomed hole, and a plate member forming a bottom surface of the bottomed hole. An ion-sensitive electrode having a lead portion, an ion-insensitive electrode having a lead portion provided in a portion of the plate member forming the bottom surface of the bottomed hole, and the ion-sensitive electrode arranged in the case member. A first amplifying element having an input terminal connected to the lead portion of the first amplifying element, and a second amplifying element having an input terminal connected to the lead portion of the ion insensitive electrode disposed in the case member. Characteristic ion sensor.