JPH08309978A - Ink jet apparatus and manufacture thereof - Google Patents

Abstract

PURPOSE: To obtain an ink jet apparatus excellent in mass productivity and reliability and capable of easily performing electrical connection. CONSTITUTION: A lower piezoelectric ceramics layer 4 and an upper piezoelectric ceramics layer 5 are laminated and integrated through a thermistor layer 8 composed of a thermistor material of negative temp. characteristics reduced in electric resistance at predetermined temp. lower than the Curie temp. of the piezoelectric material of both layers 4, 5, for example, at 70 deg.C or higher to be baked. Continuously, for example, in oil of 150 deg.C, the thermistor layer 8 is used as an electrode to apply an electric field across the upper and lower piezoelectric ceramics layers 5, 4. By this method, both layers 4, 5 become a piezoelectric ceramics plate 2 having an inversed polyarizing direction. A plurality of jet grooves 12 and non-jet grooves 13 are alternately provided to the plate 2 and an ink jet apparatus 1 is constituted of a cover plate 3, a nozzle plate 30 having nozzles 31 and the piezoelectric ceramics plate 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink ejecting apparatus for ejecting ink droplets for printing and a method for manufacturing the same.
More specifically, the present invention relates to an ink ejecting apparatus that ejects ink droplets by utilizing the piezoelectric thickness sliding effect, and a manufacturing method thereof.

[0002]

2. Description of the Related Art Among the non-impact type printers, which have been expanding the market to replace the impact type printers used up to now, the principle is the simplest, and multi-gradation and colorization are possible. An example of a printer that is easy to perform is an inkjet printer. Above all, a drop that ejects only the ink drops used for printing
The on-demand type is rapidly spreading due to its good injection efficiency and low running cost.

The Kaiser type disclosed in Japanese Patent Publication No. 53-12138 as a drop-on-demand type,
Alternatively, a thermal jet type disclosed in Japanese Patent Publication No. 61-59914 is a typical method.
Of these, the former is difficult to miniaturize, and the latter requires a high heat resistance of the ink in order to apply high heat to the ink, and each has a very difficult problem.

A method proposed at the same time to solve the above problems is disclosed in Japanese Patent Laid-Open No. 63-24705.
It is a shear mode type using the piezoelectric ceramics disclosed in Japanese Patent Laid-Open No.

As shown in FIG. 8, the shear mode type ink jet apparatus 600 comprises a bottom wall 601, a ceiling wall 602 and a shear mode actuator wall 603 therebetween. The actuator wall 603 is bonded to the bottom wall 601 and is polarized in the direction of arrow 611.
And an upper wall 605 bonded to the ceiling wall 602 and polarized in the direction of arrow 609. The actuator walls 603 are paired to form an ink flow path 613 therebetween, and a space 615 narrower than the ink flow path 613 is formed between the next pair of actuator walls 603.

The nozzle 6 is provided at one end of each ink flow path 613.
A nozzle plate 617 having 18 is fixed, and electrodes 619 and 621 are provided as metal layers on both side surfaces of each actuator wall 603. Each electrode 619, 621 is covered with an insulating layer (not shown) for insulating the ink. The electrode 621 facing the space 615 is connected to the ground 623, and the electrode 619 provided in the ink flow path 613 is connected to the silicon chip 625 which provides the actuator drive circuit.

Next, a method for manufacturing the ink jet device 600 will be described. First, the piezoelectric ceramic layer polarized in the arrow 611 is bonded to the bottom wall 601, and the piezoelectric ceramic layer polarized in the arrow 609 is bonded to the ceiling wall 602. The thickness of each piezoelectric ceramic layer is as follows.
Equal to 5 height. Next, parallel grooves are formed in the piezoelectric ceramics layer by rotating a diamond cutting disk or the like to form a lower wall 607 and an upper wall 605. Then, the electrode 61 is formed on the side surface of the lower wall 607 by vacuum deposition.
9 is formed, and the insulating layer is provided on the electrode 619.
Similarly, an electrode 621 is formed on the side surface of the upper wall 605,
The insulating layer is provided thereon.

The zenith of the upper wall 605 and the zenith of the lower wall 607 are adhered to each other to form an ink flow path 613 and a space 615. Next, a nozzle plate 617 on which the nozzles 618 are formed is adhered to one end of the ink flow passage 613 and the space 615 so that the nozzles 618 correspond to the ink flow passages 613, and the ink flow passages 613 and the space 615 are connected. The other end is connected to silicon chip 625 and ground 623.

Then, the electrode 61 of each ink flow path 613
When the silicon chip 625 applies a voltage to 9, 621, each actuator wall 603 undergoes piezoelectric thickness slip deformation in a direction of increasing the volume of the ink flow path 613, and after a predetermined time, the voltage application is stopped and the ink flow is stopped. Road 613
Of the ink flow path 61 from the increased state to the natural state.
Pressure is applied to the ink in the nozzle 3, and ink drops are generated in the nozzle 61.
It is injected from 8.

[0010]

However, in the ink ejecting apparatus 600 having the above-described structure, the electrodes 619 and 621 facing the space 615 are connected to the ground 623,
Electrodes 619 and 62 provided in the ink flow path 613
1 is connected to a silicon chip 625, which provides the actuator drive circuit, but the specific configuration and method of its electrical connection are not disclosed. Therefore, for example, after bonding the upper wall 605 and the lower wall 607, the electrode 61
9 and 621 are electrically connected, or the electrode 61
It is necessary to separately connect 9, 621 to the silicon chip 625 which provides the actuator drive circuit, but in both cases, there is a problem that the process takes time and mass productivity is poor.

Further, when the upper wall 605 and the lower wall 607 are bonded, it is necessary to perform highly accurate alignment,
This is also a cause of poor mass productivity. Further, in reality, even if the alignment is performed, a displacement of the girder is inevitable at the joint. Therefore, in the manufactured ink ejecting apparatus, variations in durability and ink ejecting characteristics easily occur,
The yield was not good.

The present invention has been made in order to solve the above-mentioned problems, and provides an ink ejecting apparatus in which electrodes can be easily taken out and which can be electrically connected with high reliability. An object of the present invention is to provide a method for manufacturing an ink ejecting apparatus that is easy to manufacture and has excellent mass productivity.

[0013]

In order to achieve this object, an ink ejecting apparatus of the present invention has at least an ink liquid chamber filled with ink and a piezoelectric portion which constitutes the ink liquid chamber and is polarized. An actuator having a side wall partially formed and a drive electrode formed on the side wall to generate a drive electric field in the piezoelectric portion substantially orthogonal to the polarization direction is applied from the drive electrode. In response to an electric field, the side wall is deformed by a piezoelectric thickness slip effect, and pressure is applied to the ink in the ink liquid chamber to eject the ink. Further, the actuator is made of a piezoelectric material,
In addition, the electrical resistance decreases at a predetermined temperature lower than the Curie temperature of the piezoelectric material, which is sandwiched between the two piezoelectric layers that are polarized in the stacking direction and in mutually opposite directions and that is lower than the Curie temperature of the piezoelectric material. Is formed of a thermistor layer made of a thermistor material that exhibits negative temperature characteristics and becomes an insulator by increasing electrical resistance at the temperature when the ink ejecting apparatus is driven.

The actuator may be an integral sintered body of the two piezoelectric layers and the thermistor layer.

The thermistor material may be a vanadium oxide based thermistor material.

In order to achieve the above object, the method of manufacturing an ink ejecting apparatus of the present invention is such that at least a part of an ink liquid chamber filled with ink and a piezoelectric portion which constitutes the ink liquid chamber and is polarized. An actuator having a configured side wall and a drive electrode formed on the side wall for generating a drive electric field in the piezoelectric portion substantially orthogonal to a polarization direction,
A method for producing an ink ejecting apparatus, which receives an electric field applied from the drive electrode, deforms the side wall due to a piezoelectric thickness sliding effect, applies pressure to the ink in the ink liquid chamber, and ejects the ink. Sandwiching a flat sheet made of a material between two piezoelectric sheets made of a piezoelectric material to form a laminated body in which the three sheets are integrated;
Electrode surfaces are provided on both end faces in the stacking direction of the stack, respectively, under a Curie temperature of the piezoelectric material, and under an environment of a predetermined temperature or higher at which the electric resistance of the thermistor material becomes a conductor and becomes a conductor, A step of applying an electric field between a layer made of a thermistor material and the electrode surface to polarize the piezoelectric sheet; and forming a groove portion in the laminated body, the depth being the laminating direction and extending to the piezoelectric sheet located in the lower layer. The method includes a step, a step of forming a conductive film on at least a side wall surface of the groove, and a step of adhering a cover plate to an upper layer of the laminated body so as to cover the opening of the groove.

[0017]

In the ink ejecting apparatus according to the first aspect of the present invention having the above-described structure, the actuator is made of a piezoelectric material, and the two-layer piezoelectric element is polarized in the laminating direction and the opposite directions. Layer and each of the piezoelectric layers, and the electrical resistance decreases to become a conductor at a predetermined temperature or lower lower than the Curie temperature of the piezoelectric material, and at the temperature when the ink ejecting apparatus is driven, the electrical resistance is And a thermistor layer made of a thermistor material exhibiting a negative temperature characteristic that increases and becomes an insulator.

The thermistor layer of the actuator is 2
It is used as an electrode when polarizing the piezoelectric layer of the layer. still,
In order to perform printing, even if a voltage is applied to the pair of drive electrodes formed on the piezoelectric portion so as to generate an electric field substantially orthogonal to the polarization direction, at that time, the thermistor material becomes an insulator, There is no short circuit between the drive electrodes. When the piezoelectric portion receives an electric field, the side wall is surely deformed by the piezoelectric thickness sliding effect, and pressure is applied to the ink in the ink liquid chamber to eject the ink.

The ink ejecting apparatus according to the second aspect is robust because the layers constituting the actuator are integrated by sintering. Therefore, the actuator has high durability and high driving accuracy, and the ink ejecting apparatus provided with this actuator exhibits high printing quality.

In the ink jet apparatus according to the third aspect, the thermistor material is a vanadium oxide based thermistor material. The vanadium oxide-based thermistor material is a thermistor with a sudden change in electric resistance in a narrow temperature range, and the temperature range (generally 70 ° C. or lower) for driving the ink ejecting apparatus.
Shows a high resistance value. Further, this type of thermistor has high reliability in terms of durability and temperature characteristics. Therefore, it is suitable for the ink ejecting apparatus.

In the method of manufacturing an ink jet device according to a fourth aspect, first, a flat plate sheet made of a thermistor material is sandwiched by two piezoelectric sheets made of a piezoelectric material to form a laminated body in which the three sheets are integrated. To do. Electrode surfaces are provided on both end faces in the stacking direction of the stack, respectively, under a Curie temperature of the piezoelectric material, and under an environment of a predetermined temperature or higher at which the electric resistance of the thermistor material becomes a conductor and becomes a conductor, An electric field is applied between the thermistor material layer and the electrode surface to polarize the piezoelectric sheet. Subsequently, a groove portion is formed in the laminated body so as to have a depth in the laminating direction and extends to a piezoelectric sheet located in a lower layer, and a conductive film is formed on at least a side wall surface of the groove portion. Then, a cover plate is adhered to the upper layer of the laminated body so as to cover the opening of the groove, thereby manufacturing the ink ejecting apparatus. With this method, it is possible to easily and surely perform polarization on two layers of piezoelectric sheets at the same time. Further, since the grooves which will be the ink chambers are processed in the integrated laminated body, the digit shift does not occur in each layer. Further, since there is no shift in the digits, the drive electrodes can be formed easily, and the electrical connection is ensured by the upper and lower piezoelectric layers.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

As shown in FIG. 1, the ink ejecting apparatus 1 is
It is composed of a piezoelectric ceramic plate 2, a cover plate 3, and a nozzle plate 30 having nozzles 31 for ejecting ink.

The piezoelectric ceramic plate 2 is formed by laminating a lower piezoelectric ceramic layer 4 and an upper piezoelectric ceramic layer 5 with a thermistor layer 8 sandwiched therebetween, and a plurality of side walls 11
A plurality of injection grooves 12 and non-injection grooves 13 are provided which are separated by. The injection groove 12 and the non-injection groove 13 have a depth in the stacking direction of the piezoelectric ceramic plates 2, and extend from the upper side to the lower piezoelectric ceramic plate 4 in the drawing. The drive electrode 9 is formed on the surface of the side wall 11.

The lower piezoelectric ceramics layer 4 and the upper piezoelectric ceramics layer 5 are made of a lead zirconate titanate (PZT) piezoelectric ceramics material having ferroelectricity, as shown by arrows 6 and 7, respectively. And are polarized in the stacking direction and in mutually opposite directions.

On the other hand, the thermistor layer 8 is formed of a vanadium oxide based thermistor material (CTR thermistor material) having negative temperature characteristics. Although the thermistor layer 8 is an insulator at room temperature, it has a predetermined temperature lower than the temperature at which the ferroelectricity of the lead zirconate titanate (PZT) piezoelectric material is lost, that is, the Curie temperature (eg, 250 ° C.). Above Tc (for example, 70 ° C.), the electric resistance sharply decreases as shown in FIG. 2 to become a conductor.

The thermistor layer 8 can be made of not only vanadium oxide based thermistor material but also silver sulfide based thermistor material. However, vanadium oxide-based thermistor materials are preferable in terms of durability and reliability of temperature characteristics.

A method of manufacturing the piezoelectric ceramic plate 2 will be described below with reference to FIGS.

First, a lead zirconate titanate (PZT) -based piezoelectric material forming the lower piezoelectric ceramics layer 4 and the upper piezoelectric ceramics layer 5 and a CTR thermistor material forming the thermistor layer 8 are prepared. A doctor blade method, a screen printing method or the like is used to form a sheet having a predetermined thickness. Then, the formed flat plate made of the thermistor material is laminated so as to be sandwiched by two piezoelectric sheets made of a piezoelectric material, and subjected to pressure-bonding, degreasing, and sintering steps to form a piezoelectric laminate 20 which is an integral sintered body. (See FIG. 3). At this stage, the spontaneous polarization directions of the lower piezoelectric ceramics layer 4 and the upper piezoelectric ceramics layer 5 are random and do not have piezoelectric characteristics.

Next, as shown in FIG. 4, polarization electrodes 14 are formed on the upper and lower surfaces of the obtained piezoelectric laminate 20 by a known method such as a baking method, a sputtering method, an evaporation method or the like. And
The thermistor layer 8 serves as a conductor, and the lower piezoelectric ceramics layer 4 and the upper piezoelectric ceramics layer 5 are kept at a temperature at which the ferroelectricity is not lost (that is, below the Curie temperature). Polarize in insulating oil such as. Under this temperature environment, the thermistor layer 8 becomes a conductor and becomes an electrode provided inside the piezoelectric laminate 20. In the polarization process, an electric field of about 10 to 35 kV / cm is applied to the upper piezoelectric ceramics layer 5 and the lower piezoelectric ceramics layer 4 by the polarization power supply 15 through the three electrodes of the thermistor layer 8 and the polarization electrode 14. . At this time, the upper piezoelectric ceramics layer 5
Is polarized in the direction of the arrow 6, and the lower piezoelectric ceramics layer 4
Is polarized in the direction of arrow 7. As a result, the lower piezoelectric ceramics layer 4 and the upper piezoelectric ceramics layer 5 become a piezoelectric laminate 20 having opposite polarization directions. After the polarization process is completed, the polarization electrode 14 is removed by grinding.

Next, the piezoelectric laminate 20 is the polarization electrode 1
After removing 4, 4 is cut with a diamond blade or the like to form a plurality of grooves 22 having a depth of 300 μm and a width of 50 μm, for example. Further, the side wall 11 which is the side surface forming the groove 22 has a width of 60 μm, for example. Side wall 11
The electrode 23 is formed on the surface of the substrate by a method such as vapor deposition. However, the electrode 23 is not formed on the bottom of the groove 22. The grooves 22 are classified into the ejection grooves 12 and the non-ejection grooves 13 which are alternately arranged, and the electrodes 23 are arranged in the ejection grooves 12 respectively.
It is classified into a ground electrode 10 formed inside and a drive electrode 9 formed inside the non-jet groove 13.

Then, the cover plate 3 is joined to the upper portion of the side wall 11 via the adhesive layer 24, and the nozzle plate 30 having the nozzle 31 is joined to one end face of the jet groove 12 in the longitudinal direction. The ink ejection device 1 shown is obtained.

Next, the configuration of the control unit of this embodiment will be described with reference to FIG. 7 which is a block diagram of the control unit. As shown in the figure, the drive electrode 9 and the ground electrode 10 of the ink ejecting apparatus 1 are individually connected to the LSI chip 51, and the clock line 52, the data line 53, the voltage line 54, and the ground line 55 are also the LSI chip. It is connected to 51. All the ground electrodes 10 are connected to the ground line 55. The LSI chip 51 has a clock line 52.
From the data appearing on the data line 53, which ejection groove 12
Then, it is determined whether or not ink droplets should be ejected. Then, the LSI chip 51 applies the voltage V of the voltage line 54 to the drive electrode 9 corresponding to the ejection groove 12 to be driven,
Driving electrodes 9 corresponding to the ejection grooves 12 other than the ejection groove 12
The ground line 55 is connected to and grounded.

Next, the operation of the ink ejecting apparatus 1 according to this embodiment will be described with reference to FIG. In order to eject an ink droplet from the ejection groove 12b, a voltage is applied to the drive electrodes 9d and 9e corresponding to the ejection groove 12b (here, applying a voltage to a certain drive electrode 9 means Applying a voltage to the drive electrode 9 and grounding the drive electrode 9 which is not instructed). Then, the arrows 2 are formed on the side walls 11c and 11d.
Electric fields in the 5th and 26th directions are generated, and the side walls 11c and 11d move in a direction in which the volume of the injection groove 12b increases due to the piezoelectric thickness slip effect. Then, the pressure in the injection groove 12b decreases. As a result, ink is supplied from the ink supply source (not shown) into the ejection groove 12b through the manifold (not shown).

Next, when the application of the voltage to the drive voltages 9d and 9e is removed, the volume of the injection groove 12b is decreased from the increased state to the natural state, and the pressure in the injection groove 12b is increased. As a result, the ink in the ejection groove 12b becomes an ink droplet and is ejected from a nozzle (not shown).

Further, in the above-described embodiment, first, the drive voltage is applied in the direction in which the volume of the ejection groove 12 is increased to supply the ink, and then the application of the drive voltage is stopped so that the volume of the ejection groove 12 is in a natural state. Although the ink droplets are ejected from the ejection groove 12 after being reduced to 1, the driving voltage is first applied so that the volume of the ejection groove 12 is reduced to eject the ink droplets from the ejection groove 12, and then the driving voltage is reduced. Is stopped to increase the volume of the injection groove 12 from the reduced state to the natural state,
Ink may be supplied inside.

As described above, the ink ejecting apparatus 1 according to the manufacturing method of the present embodiment is sandwiched between the two layers of piezoelectric material and each of the piezoelectric materials, and has a predetermined temperature lower than the Curie temperature of the piezoelectric material. In this case, the thermistor material having negative temperature characteristics, which becomes a conductor by reducing electric resistance, is sintered and integrated. The layers are firmly adhered and the energy loss at the joint surface is small. Therefore, the actuator has high durability and high driving accuracy, and the ink ejecting apparatus provided with this actuator exhibits high printing quality.

Further, in the present embodiment, since the polarization treatment is performed in a temperature environment where the electric resistance of the thermistor material is reduced and becomes a conductor, the thermistor layer 8 is used as one electrode and the lower piezoelectric ceramic layer 4 is used. The upper piezoelectric ceramic layer 5 and the upper piezoelectric ceramic layer 5 can be polarized simultaneously and easily in opposite directions.

In addition, in this embodiment, the piezoelectric laminated body 20 integrally sintered is grooved to form the ejection groove 12 which becomes the ink chamber and the non-ejection groove 13 which becomes the air chamber. To do. Therefore, the side wall 11 can be formed with high dimensional accuracy without causing a displacement in the joint surface of each layer.

Further, in this embodiment, since the electrode 23 is formed on the side wall 11 having a high dimensional accuracy, the electrodes are not separated between the upper piezoelectric ceramics layer 5 and the lower piezoelectric ceramics layer 4, and the electrode 23 is different from the conventional example. Easy to take out electrodes,
In addition, the piezoelectric ceramic plate 2 having high reliability of electrical connection can be easily manufactured.

That is, the manufacturing method of this embodiment solves the problems such as alignment of the piezoelectric material, formation of the internal electrode, and extraction of the electrode, which have been conventionally encountered, and is excellent in mass productivity.

Further, in the above embodiment, the injection groove 12
All the electrodes formed inside are always grounded, and no voltage difference is generated between each of the injection grooves 12. Therefore,
No electric field is applied to the ink, and the ejection groove 12 is formed by an electric effect.
The deterioration of the ink inside and the deterioration of the ground electrode 10 are not caused. As a result, there is no need to form an insulating layer on the ground electrode 10, which is conventionally provided. Even if the above driving method is not adopted, the gist of the present invention is not affected. For example, as in the conventional example, the electrodes formed in all the non-jet grooves 13 are always grounded, and normally the electrodes 1 formed in all the jet grooves 12 are formed.
25 may be grounded and a voltage V may be applied to the desired electrode of the ejection groove 12 during printing.

[0043]

As described above, in the method of manufacturing an ink jet device according to the present invention, it is possible to easily and surely polarize two layers of piezoelectric sheets at the same time. Further, since the grooves which will be the ink chambers are processed in the integrated laminated body, the digit shift does not occur in each layer. Further, since there is no shift in the digits, the drive electrodes can be formed easily, and the electrical connection is ensured by the upper and lower piezoelectric layers. Therefore, it is excellent in mass productivity.

In addition, the manufactured ink ejecting apparatus has improved reliability of electrical connection and excellent durability, and does not cause problems such as variations in ejection characteristics.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a configuration of an ink ejecting apparatus according to an embodiment of the invention.

FIG. 2 is a diagram showing temperature characteristics of electric resistance of the thermistor material of this example.

FIG. 3 is a perspective view showing a manufacturing process of the ink ejecting apparatus according to the embodiment of the invention.

FIG. 4 is a cross-sectional view showing a polarization process of the ink ejecting apparatus.

FIG. 5 is a cross-sectional view showing a manufacturing process of the ink ejecting apparatus.

FIG. 6 is an explanatory diagram showing an operation of the ink ejecting apparatus.

FIG. 7 is a block diagram showing a control unit of the ink ejecting apparatus according to the embodiment of the invention.

FIG. 8 is a diagram showing a conventional ink ejecting apparatus.

[Explanation of symbols]

 1 Ink Ejection Device 2 Piezoelectric Ceramics Plate 3 Cover Plate 4 Lower Piezoelectric Ceramics Layer 5 Upper Piezoelectric Ceramics Layer 6 Polarization Direction 7 Polarization Direction 8 Thermistor Layer 9 Drive Electrode 10 Ground Electrode 11 Sidewall 12 Jet Groove (Ink Liquid Chamber) 13 Non-jet Groove 25 electric field direction 26 electric field direction

Claims (4)

[Claims] 1. An ink liquid chamber filled with ink, a side wall that constitutes the ink liquid chamber and is at least partially formed by a polarized piezoelectric portion, and the piezoelectric portion is substantially orthogonal to the polarization direction. An actuator having a drive electrode formed on the side wall for generating a drive electric field is formed, and the side wall is deformed by a piezoelectric thickness sliding effect in response to an electric field applied from the drive electrode, and the ink liquid is formed. In an ink ejecting apparatus that applies pressure to ink in a room to eject the ink, the actuator is made of a piezoelectric material, and includes two piezoelectric layers that are polarized in a stacking direction and in mutually opposite directions; It is sandwiched between piezoelectric layers, and its electrical resistance decreases at a temperature higher than a predetermined temperature lower than the Curie temperature of the piezoelectric material to become a conductor. An ink ejecting apparatus comprising: a thermistor layer made of a thermistor material exhibiting a negative temperature characteristic that increases resistance and becomes an insulator. 2. The ink ejecting apparatus according to claim 1, wherein the actuator is an integral sintered body of two piezoelectric layers and the thermistor layer. 3. The ink jet apparatus according to claim 1, wherein the thermistor material is a vanadium oxide based thermistor material. 4. An ink liquid chamber filled with ink, a side wall that constitutes the ink liquid chamber and is at least partially formed by a polarized piezoelectric portion, and the piezoelectric portion is substantially orthogonal to the polarization direction. An actuator having a drive electrode formed on the side wall for generating a drive electric field is formed, and the side wall is deformed by a piezoelectric thickness sliding effect in response to an electric field applied from the drive electrode, and the ink liquid is formed. A method of manufacturing an ink ejecting apparatus that applies pressure to ink in a room to eject the ink, wherein a flat sheet made of a thermistor material is sandwiched between two piezoelectric sheets made of a piezoelectric material, and the three sheets are integrated. And forming electrode layers on both end faces of the laminated body in the laminating direction, the electric resistance of the thermistor material is lower than the Curie temperature of the piezoelectric material. Under an environment of a predetermined temperature or more, which decreases and becomes a conductor, a step of applying an electric field between the layer made of the thermistor material and the electrode surface to polarize the piezoelectric sheet; A step of forming a groove portion extending to a piezoelectric sheet located in a lower layer, a step of forming a conductive film on at least a side wall surface of the groove portion, and an upper layer of the laminate so as to cover an opening of the groove portion. And a step of adhering a cover plate to the method.