JP4193836B2 - Manufacturing method of ink ejecting apparatus - Google Patents

Description

The present invention relates to a manufacturing method of the ink jet equipment using a piezoelectric film as a drive source of the ink jet.

  Today, instead of conventional impact printing devices, the non-impact printing devices that are expanding the market greatly have the simplest principle and are easy to achieve multi-gradation and colorization. As an example, an ink jet printing apparatus may be used. Among them, a drop-on-demand type that ejects only ink droplets used for printing is rapidly spreading due to its good ejection efficiency and low running cost.

  As a drop-on-demand ink jet printing apparatus, there is a piezoelectric ink ejecting apparatus using piezoelectric ceramics as a pressure generation source for ejecting ink.

  An example of a conventional piezoelectric ink ejecting apparatus will be briefly described with reference to FIG. The ink ejecting apparatus 400 includes a plurality of ink ejecting channels 430 on a substrate 410 and a diaphragm 420 so as to cover the ejecting channels 430. A common electrode 450 is formed so as to adhere to the vibration plate 420, a piezoelectric element 440 is disposed so as to extend over each ejection channel 430, and a drive electrode 452 is disposed on the piezoelectric element 440. In the ink ejecting apparatus 400, a voltage is applied to the piezoelectric element 440 via the drive electrode 452 and the common electrode 450, and the piezoelectric element 440 is displaced, thereby applying pressure to the ink in the ejecting channel 430. Ink is ejected from a nozzle (not shown) communicating with the ejection channel 430.

  In Japanese Patent Publication No. 6-61936, a partition wall that separates a plurality of injection channels is composed of two piezoelectric ceramics having opposite polarization directions, and electrode layers are formed on both side surfaces of the partition wall. An ink ejecting apparatus is disclosed. When a voltage is applied between the electrode layers on both sides, the two piezoelectric ceramics are subjected to shear deformation opposite to each other, that is, the partition wall is bent into a square shape, thereby applying pressure to the ink in the ejection channel.

Japanese Patent Application Laid-Open No. 7-299904 discloses an ink ejecting apparatus in which a plurality of piezoelectric ceramics and electrode layers are laminated on a partition between a plurality of ejecting channels.
The piezoelectric ceramic extends in the direction in which the partition wall thickness increases, thereby applying pressure to the ink in the ejection channel.

  Conventionally, in this type of ink ejecting apparatus 400, an apparatus that can be driven at a low voltage is desired for the purpose of reducing the cost of the power supply apparatus. For this purpose, in the configuration of FIG. 10, it is conceivable to reduce the thickness of the piezoelectric element 440 or increase the area. For example, in order to reduce the thickness, the piezoelectric element 440 is bulk sintered. Attempts have been made to make various thin films such as sputtering, sol-gel, electrodeposition, hydrothermal synthesis, etc., instead of processing the body. However, there is a problem that sufficient piezoelectric characteristics cannot be obtained as compared with a piezoelectric element processed from a bulk sintered body. Further, increasing the area of the piezoelectric element 440 has a problem in that it goes against the needs required for the ink ejecting apparatus 400 in recent years, that the plurality of ejecting channels 430 should be arranged at a high density.

  Even the one disclosed in Japanese Examined Patent Publication No. 6-61936 cannot stack the piezoelectric ceramics because the two piezoelectric ceramics are stacked in the height direction of the partition walls. A manufacturing method is also known in which a plurality of injection channels are cut into a groove shape with two piezoelectric materials stacked, and a partition wall is left between the channels. In this case, too, the ceramic partition wall is left thin and processed. It is difficult.

  In addition, in the one disclosed in Japanese Patent Laid-Open No. 7-299904, the pressure is applied to the ink by the amount of expansion in the thickness direction of the piezoelectric ceramic, so that the desired pressure can be obtained unless the thickness of the piezoelectric ceramic is larger than a predetermined amount. I can't. Even in this configuration, the present invention, which goes against the need to arrange a plurality of injection channels at a high density, was made in order to solve the above-mentioned problems, and a piezoelectric film having no sufficient piezoelectric characteristics was formed. An object of the present invention is to provide an ink ejecting apparatus that can be driven at a low voltage without reducing the arrangement density of the ejecting channels.

According to a first aspect of the present invention, there is provided a method for manufacturing an ink ejecting apparatus, comprising: forming a plurality of diaphragms protruding at a distance from each other on one side of a channel substrate; And forming a piezoelectric film that expands and contracts in a direction perpendicular to the arrangement direction of the plurality of diaphragms by applying a voltage to the channel substrate including the side surface of each diaphragm. And a step of depositing and forming an electrode film for applying a voltage to the piezoelectric film on the piezoelectric film, thereby arranging the ejection channels at a high density and making the diaphragm It is possible to easily manufacture an ink ejecting apparatus having a sufficient area.

3. The method of manufacturing an ink ejecting apparatus according to claim 2 , wherein a conductive electrode film is formed on the channel substrate including a side surface of each diaphragm before the step of forming the piezoelectric film. A step of forming a diaphragm on the channel substrate with an arbitrary material by depositing the piezoelectric film on the electrode film, and the electrode film, the piezoelectric film, and the electrode film on the diaphragm Can be easily formed.

4. The method of manufacturing an ink ejecting apparatus according to claim 3 , further comprising the step of making at least one of the two electrode films sandwiching the piezoelectric film independent for each of the ejecting channels in the manufacturing method. Forming over channels makes it independent for each injection channel, allowing each injection channel to be driven individually.

The method of manufacturing an ink ejection device according to claim 4 , wherein the piezoelectric film and the electrode film are formed symmetrically with respect to the ejection channel on a pair of diaphragms sandwiching the ejection channel. It makes it possible to produce an ejection device that efficiently applies pressure to the ink on both sides of the ejection channel.

6. The method of manufacturing an ink ejecting apparatus according to claim 5 , wherein in the manufacturing method, the piezoelectric film is provided on the both side surfaces of the diaphragm so as to be symmetrically polarized with respect to the diaphragm, and the electrode film includes the electrode film. The channel substrate including a pair of electrode body films is deposited and formed, and the electrode films on both side surfaces of the diaphragm are made independent from each other, whereby each diaphragm is extended and contracted on both side surfaces to bend efficiently. What can be made easy to manufacture.

According to a sixth aspect of the present invention, there is provided a method for manufacturing the ink ejecting apparatus, comprising: forming a plurality of channels in a groove shape on one side of the channel substrate; and applying a voltage to the channel substrate including the inner surface of each channel. A step of depositing and forming a piezoelectric film that expands and contracts in a direction perpendicular to the arrangement direction of the plurality of channels, and an electrode film for applying a voltage to the piezoelectric film are deposited on the piezoelectric film. Forming a groove in the channel substrate between the channels, making the electrode film independent for each channel, and providing the piezoelectric film and electrode film independent for each channel on both sides of the channel. The process of forming a diaphragm with a space between the channels to allow the adjacent channels to be driven simultaneously without interfering with each other. Channels arranged at a high density and makes it possible to easily manufacture the ink jet apparatus that ensures sufficient area of the diaphragm.

As described above, according to the present invention , a piezoelectric film and an electrode film are attached to a channel substrate in which a plurality of diaphragms are projected at intervals and a channel is formed between them. In addition, it is possible to easily manufacture an ink ejecting apparatus capable of sufficiently securing the area of the diaphragm and arranging the ejection channels with high density.

BEST MODE FOR CARRYING OUT THE INVENTION

  Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 1, the ink ejecting apparatus 100 includes a channel substrate 110 and a cover plate 114. The substrate 110 is made of an insulating material, and a plurality of ink ejection channels 130 extending in the thickness direction of the paper surface are arranged on the upper side in parallel with each other with a diaphragm 120 serving also as a side wall. A drive electrode film 152 made of a conductive metallization layer is formed on the inner surface of the ejection channel 130, that is, the surface that forms a U shape along the bottom surface and the side surface of the diaphragm 120. The driving electrode films 152 in the adjacent ejection channels 130 are separated from each other at the upper end face of the side wall 120 and are electrically independent. Further, a piezoelectric film 140 made of a lead zirconate titanate (PZT) ceramic material is formed on the surface of the drive electrode film 152. The piezoelectric film 140 only needs to be formed on at least the side surface of the diaphragm 120. However, for ease of manufacturing, as will be described later, all of the ejections are made via the upper end surface of the diaphragm 120 and the bottom surface of the ejection channel 130. The piezoelectric film 140 in the channel 130 is formed to be connected. A common electrode film 150 made of a conductive metallization layer is formed over the entire surface of the piezoelectric film 140. The cover plate 114 is fixed to the upper end surface of the diaphragm 120 with an adhesive or the like through the piezoelectric film 140 and the common electrode film 150 across all the ejection channels 130. The adhesive may be either solid or flexible in the bonded state. Further, the piezoelectric film 140 is polarized in the direction (arrow P) from the drive electrode film 152 toward the common electrode film 150 on the side surface of the diaphragm 120.

  As shown in FIG. 3, a nozzle plate 115 having a plurality of nozzles 116 communicating with each ejection channel 130 is fixed to the front end surfaces of the substrate 110 and the cover plate 114, and ink is provided to all ejection channels 130 on the rear end surface. A manifold (not shown) for supplying is fixed. A plurality of connection terminals 153 electrically connected to each drive electrode film 152 are formed from the front end surface 110a of the substrate 110 to the lower side surface 110b, and all the drive electrodes are formed from the rear end surface 110c of the substrate 110 to the lower side surface 110b. A connection terminal 151 electrically connected to the film 150 is formed. The connection terminals 151 and 153 are connected to a control circuit (not shown) via a flexible wiring member 160 having conductive lines corresponding to them.

  Next, the operation of the ink ejecting apparatus 100 will be described with reference to FIG. When a voltage is applied from the control circuit to the drive electrode film 152b corresponding to the injection channel to be injected, for example, the injection channel 130b, and the drive electrode films 152a and 152c and the common electrode film 150 corresponding to the adjacent injection channels are grounded, the injection channel 130b An electric field is generated in the piezoelectric film 140 formed therein in the direction coinciding with the polarization direction (arrow P), that is, in the direction from the drive electrode film 152b toward the common electrode film 150 (arrow E). As a result, the pair of piezoelectric films 140 on the inner surface of the ejection channel 130b contract in a direction (vertical direction in the drawing) perpendicular to the polarization direction, and the diaphragms 120b and 120c that do not contract increase the volume of the ejection channel 130b. Curve and deform in the direction. At this time, the pressure in the injection channel 130b decreases. This state is maintained for a one-way propagation time T in the injection channel 130 of the pressure wave generated at this time. In the meantime, ink is supplied from an ink supply unit (not shown).

  The one-way propagation time T is a time required for the pressure wave in the ejection channel 130 to propagate in the longitudinal direction of the ejection channel 130, and the length L of the ejection channel 130 and the ink in the ejection channel 130 are contained in the ink. T = L / a is determined by the speed of sound a.

  According to the pressure wave propagation theory, the pressure in the injection channel 130 reverses and changes to a positive pressure after approximately T time from the application of the above voltage, and is applied to the drive electrode film 152b at this timing. Return the voltage to 0 (V).

  Then, the diaphragms 120b and 120c return to the state before deformation, and pressure is applied to the ink. At that time, the positively-turned pressure and the pressure generated when the diaphragms 120b and 120c return to the state before deformation are added together, and a relatively high pressure is applied to a portion near the nozzle 116 communicating with the ejection channel 130b. As a result, ink droplets are ejected from the nozzle 116.

  In this embodiment, since the diaphragm 120 is shared by the adjacent injection channels 130, the adjacent injection channels 130 cannot be injected at the same time. Therefore, it is necessary to shift the injection timing. Alternatively, every other channel may be an ejection channel, and both sides of the ejection channel may be non-ejection channels that do not contain ink.

  Next, a method for manufacturing the ink ejecting apparatus 100 according to the present embodiment will be described with reference to FIG.

  As shown in FIG. 4A, as a method for forming the substrate 110 having the ejection channel 130 and the diaphragm 120, a diamond blade or laser grinding, an etching method, press molding, injection molding, or the like can be used. . Then, a drive electrode film 152 made of a conductive metallized layer is formed on the surface of the substrate 110 including the inner surface of the ejection channel 130 by a technique such as plating, vapor deposition, or sputtering. Thereafter, the drive electrode film 152 on the upper end surface of the vibration plate 120 is removed by surface grinding or the like, and the drive electrode films 152 in each ejection channel 130 are electrically independent from each other.

  Next, as shown in FIG. 4B, a piezoelectric film 140 made of a lead zirconate titanate (PZT) ceramic material is formed on the surface of the drive electrode film 152 by a method such as a sol-gel method or an electrodeposition method. . At this time, the piezoelectric film 140 passes through the upper end surface of the diaphragm 120, and the piezoelectric films 140 in all the ejection channels 130 are continuously formed. Thereafter, a high temperature treatment for increasing the crystallinity of the piezoelectric film 140 is performed. Subsequently, as shown in FIG. 4C, a common electrode film 150 made of a conductive metallization layer is formed over the entire surface of the piezoelectric film 140 by a technique such as plating, vapor deposition, or sputtering.

  Of the connection terminals 151 and 153 in FIG. 3, the connection terminal 153 connected to the drive electrode film 152 can be formed simultaneously with the drive electrode film 152 by the same method.

  Dividing into individual connection terminals 153 corresponding to the drive electrode film 152 may be performed by performing a masking process between adjacent connection terminals in advance and plating as described above, or plating all connection terminals in a continuous state. It is possible to adopt a method in which a portion between adjacent connection terminals is removed by ablation by irradiating laser light or the like. The connection terminal 151 connected to the common drive electrode film 150 can be formed at the same time as the common drive electrode film 150 by the same technique. At this time, the connection terminal 151 is formed by masking the connection terminal 153. To prevent the conductive material from adhering. The connection terminal 151 can be connected to the common drive electrode film 150 and the rear end surface 110 c of the substrate 110, the left and right end portions of the front end surface 110 a of the substrate 110, or the left and right side surfaces of the substrate 110.

  By grounding the common electrode film 150 and applying a voltage to the drive electrode film 152, the piezoelectric film 140 is polarized in the direction (arrow P) from the drive electrode film 152 toward the common electrode film 150 as described above. Can do. Then, as shown in FIG. 1, the cover plate 114 is fixed to the upper end surface of the diaphragm 120 across all the injection channels 130, and the nozzle plate 115 and the manifold are provided on the front end surface and the rear end surface of the substrate 110 and the cover plate 114. By fixing, the ink ejecting apparatus 100 is completed.

  As described above in detail, in the ink ejecting apparatus 100 of the present embodiment, the diaphragm 120 does not extend in the direction in which the ejection channels are arranged as in the conventional ink ejecting apparatus 400 shown in FIG. Since the channels 130 extend in a direction orthogonal to the arrangement direction of the channels 130, even when the area of the diaphragm 120 is increased, the injection channels can be arranged at high density. In other words, by using a piezoelectric film that does not have sufficient piezoelectric characteristics, an ink ejecting apparatus that can obtain the pressure required for ejection and increase the recording resolution by increasing the area of the diaphragm is manufactured. Can do. Further, since the diaphragm 120 is curved and deformed by utilizing the expansion and contraction of the piezoelectric film 140 in the direction orthogonal to the arrangement direction of the diaphragm 120, the expansion / contraction amount itself of the piezoelectric body itself is disclosed in Japanese Patent Laid-Open No. 7-299904. Compared with the case where the volume of the injection channel changes, the diaphragm can be efficiently deformed and a large change in volume can be obtained. In addition, since the two diaphragms 120 and 120 are arranged for one injection channel 130, the same amount of displacement can be obtained as compared with the case where only one diaphragm is arranged as in the prior art. The voltage may be ½, and the ink can be efficiently ejected by the synergistic effect.

  Further, since the common electrode film 150 exposed to the ink in the ejection channel 130 is grounded, no electrical corrosion occurs on the ink. Since the drive electrode film to which the voltage is applied is not exposed to the ink, there is no electrical corrosion, and a special protective film for the drive electrode film is not required, and the manufacturing cost of the ink ejecting apparatus 100 can be reduced.

  FIG. 5 shows a second embodiment obtained by improving the above embodiment. The channels adjacent to both sides of the ejection channel 131 that ejects ink are non-ejection channels 132 and 132 that do not contain ink. Piezoelectric films 141b to 141e sandwiched between two electrode films 155 and 156, 157 and 158 are formed on both sides of the side walls 121a and 121b between the ejection channel 131 and the non-ejection channels 132 and 132. . However, the two electrode films 155 and 156 in the ejection channel 131 are not continuous with the electrode films in the adjacent ejection channels 132 and 132, and the electrode films 157 and 158 in the non-ejection channels 132 and 132 are not continuous. Is not continuous with the electrode film on the other side surface in the non-injection channel 132.

  The piezoelectric films 141b to 141e are polarized in the direction P toward the inside of the side walls 121a and 121b, respectively. This polarization direction is reversed if the direction of the electric field E described later is different.

  When the ink is ejected from the ejection channel 131, the inner electrode film 156 with respect to the piezoelectric films 141c and 141d in the ejection channel 131 and the outer side with respect to the piezoelectric films 141b and 141e on the non-ejection channel 132 side. A voltage is applied to the electrode film 157 to ground the outer electrode film 156 with respect to the piezoelectric films 141c and 141d and the inner electrode film 158 with respect to the piezoelectric films 141b and 141e. Then, in the side walls 121a and 121b, an electric field E in the same direction as the polarization direction P is generated for the piezoelectric films 141c and 141d in the ejection channel 131, and the piezoelectric films 141c and 141d are orthogonal to the polarization direction P. Shrink in the direction. On the other hand, an electric field E in the direction opposite to the polarization direction P is generated for the piezoelectric films 141b and 141e on the non-ejection channel 132 side, and the piezoelectric films 141b and 141e extend in a direction orthogonal to the polarization direction P. That is, the side walls 121a and 121b are efficiently curved and deformed by contraction and extension generated on both sides thereof.

  In this case, since there is a non-injection channel 132 adjacent to the diaphragm of the injection channel 131, deformation of the diaphragm does not affect the other injection channels 131, and adjacent injection channels 131 can be driven simultaneously and at high speed. Can be printed.

  Next, a third embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 6, the ink ejecting apparatus 200 includes a substrate 210 and a cover plate 214 as in the above embodiment. The substrate 210 is made of an insulating material containing titanium oxide as a main component, and an injection channel 230 and a diaphragm 220 are formed as in the above embodiment. A piezoelectric film 240 made of a lead zirconate titanate (PZT) ceramic material is formed on the inner surface of the ejection channel 230. A drive electrode film 252 made of a conductive metallization layer is formed on the inner surface of the ejection channel 230 of the piezoelectric film 240. The drive electrode film electrode films 252 and 252 facing each other in the same ejection channel 230 and the drive electrode film films 252 and 252 adjacent to each other with the diaphragm 220 interposed therebetween are all electrically insulated, that is, independent from each other.

  The cover plate 214 is fixed to the upper end surface of the diaphragm 220 across all the ejection channels 230. The piezoelectric film 240 is polarized in a direction (arrow P) from the drive electrode film 252 toward the vibration plate 220.

  Here, the injection channel 230 communicates with the nozzle at one end and communicates with the manifold at the other end as in the above embodiment. The drive electrode film 252 is electrically connected to a control circuit.

  Next, the operation of the ink ejecting apparatus 200 will be described with reference to FIG. The control circuit applies a voltage to the drive electrode films 252c and 252d in the injection channel to be injected, for example, the injection channel 230b, and the control circuit grounds the drive electrode films 252b and 252e in the adjacent injection channels 230a and 230c, An electric field is generated in the direction from the ejection channel 230b toward the adjacent ejection channels 230a and 252c, that is, from the drive electrode film 152c to the drive electrode film 152b and from the drive electrode film 152d to the drive electrode film 152e (arrow E). Since a voltage that coincides with the polarization direction is applied to the piezoelectric film 240 in the ejection channel 230b, the piezoelectric film 240 contracts in the plane direction as in the above embodiment, and the adjacent ejection channels 230a, The voltage in the direction opposite to the polarization direction is applied to the piezoelectric film 240 in 252c. Since the pressure, piezoelectric film 240 for extending in the plane direction, the diaphragm 220b, a direction to bend deformation to increase the volume of the ejection channels 230 with 252c. Thereafter, as in the above-described embodiment, when the diaphragm returns after T time, an ink droplet is ejected from the nozzle.

  Also in this embodiment, since the diaphragm 220 is shared by the adjacent injection channels 230, the adjacent injection channels 230 cannot be injected at the same time, so it is necessary to shift the injection timing. Alternatively, every other channel may be an ejection channel, and both sides of the ejection channel may be non-ejection channels that do not contain ink.

  Next, a manufacturing method of the ink ejecting apparatus 200 according to the present embodiment will be described with reference to FIG. As shown in FIG. 8A, the injection channel 230 and the diaphragm 220 are formed on the substrate 210 as in the above embodiment. Then, the substrate 210 is immersed in an alkaline solution containing lead and zirconium components, and a seed crystal of lead zirconate titanate (PZT) ceramic material is deposited on the surface of the substrate by a hydrothermal reaction method. The piezoelectric film 240 is formed. At this time, the piezoelectric film 240 also passes through the upper end surface of the diaphragm 220, and the piezoelectric films 240 in all the ejection channels 130 are continuously formed. Here, the piezoelectric film 240 produced on the substrate 210 containing titanium oxide as a main component by the above-described method is characterized in that it is polarized in the direction (arrow P) toward the diaphragm 220 without being subjected to polarization treatment. There is. These are also described in JP-A-8-133735. Subsequently, as shown in FIG. 8B, a drive electrode film 252 made of a conductive metallization layer is formed over the entire inner surface of the ejection channel 230 of the piezoelectric film 240 by the same method as in the above embodiment.

  Then, as shown in FIG. 6, the piezoelectric film 240 and the metallized layer on the upper end surface of the vibration plate 220 are removed by surface grinding or the like to electrically separate the drive electrode films 252 in the adjacent ejection channels 230. The drive electrode films 252 that are insulated from each other and are opposed to each other in the ejection channel 230 are electrically insulated by being removed and separated by a cutting process such as a diamond blade or laser light at the bottom of the ejection channel 230. A protective film (not shown) made of an insulating material is formed on the surface of the drive electrode film 252 by a technique such as a CVD method. The cover plate 214 is fixed to the upper end surface of the diaphragm 220 across all the ejection channels 230.

  As described above in detail, in the ink ejecting apparatus 200 of the present embodiment, it is possible to increase the area of the diaphragm 240 and arrange the ejecting channels at a high density, as in the above embodiment. In addition, ink can be efficiently ejected at a low voltage. Furthermore, the piezoelectric films formed on both sides of the diaphragm by the hydrothermal synthesis method originally have polarizations in opposite directions, and when a voltage is applied to the drive electrode film on the diaphragm surface during driving, the piezoelectric film on one side Since the film contracts and the piezoelectric film on the other surface extends, the deformation can be performed more efficiently.

  In addition, the board | substrate 20 may have a titanium oxide film on the surface of an insulating material even if the whole is not a titanium oxide.

    Next, the form of the fourth embodiment embodying the present invention will be described with reference to FIGS.

  As shown in FIG. 9, the ink ejecting apparatus 300 includes a substrate 310 and a cover plate 314 as in the above embodiment. The substrate 310 is made of an insulating material, and a plurality of ejection channels 330 and non-ejection channels 332 extending in the thickness direction of the paper are arranged on the substrate 310 separated by a diaphragm 320 that also serves as a side wall.

  A driving electrode film 352 made of a conductive metallization layer is formed on the surface of the substrate 310 in the ejection channel 330. The drive electrode films 352 in the adjacent ejection channels 330 are electrically isolated and insulated. Further, a piezoelectric film 340 made of a lead zirconate titanate (PZT) ceramic material is formed on the surface of the drive electrode film 352. A common electrode film 350 made of a conductive metallization layer is formed on the inner surface of the ejection channel 330 of the piezoelectric film 340. In each of the ejection channels 330, individual cover plates 314 are fixed to the upper end surface of the diaphragm 320 via the piezoelectric film 340 and the common electrode film 350. The piezoelectric film 340 is polarized in a direction (arrow P) from the drive electrode film 352 toward the common electrode film 350.

  Here, the injection channel 330 communicates with the nozzle at one end and communicates with the manifold at the other end, as in the above embodiment. Further, the common electrode film 350 and the drive electrode film 352 are electrically connected to the control circuit.

  Next, the operation of the ink ejecting apparatus 300 will be described with reference to FIG. A piezoelectric film formed in the ejection channel 330b by applying a voltage to the drive electrode film 352b corresponding to the ejection channel to be ejected, for example, the ejection channel 330b, and grounding the common electrode film 350 to the control circuit. In 340, an electric field is generated in the direction that coincides with the polarization direction (arrow P), that is, the direction from the drive electrode film 352b toward the common electrode film 350 (arrow E), and the piezoelectric film 340 contracts in the direction orthogonal to the polarization direction. To do. As a result, the diaphragms 320b and 320c are deformed in the direction of increasing the volume of the ejection channel 330. Thereafter, as in the above-described embodiment, when the diaphragm returns after T time, an ink droplet is ejected from the nozzle.

  Next, a method for manufacturing the ink ejecting apparatus 300 according to the present embodiment will be described with reference to FIG.

  As shown in FIG. 11A, the ejection channel 330 is formed on the substrate 310 while leaving the wall of the portion that becomes the vibration plate 320. As a method of forming the ejection channel 330, the same method as that of the above embodiment is used. Then, a drive electrode film 352 made of a conductive metallization layer is formed on the surface of the substrate 310 by the same method as in the above embodiment. Thereafter, the upper end surface of the wall of the portion that becomes the vibration plate 320 is subjected to surface grinding or the like, so that the drive electrode films 352 in the adjacent ejection channels 330 are separated and electrically insulated. Subsequently, as shown in FIG. 11B, a piezoelectric film 340 made of a lead zirconate titanate (PZT) ceramic material is formed on the surface of the drive electrode film 352. At this time, the piezoelectric film 340 also passes through the upper end surface of the diaphragm 320, and the piezoelectric films 340 in all the ejection channels 330 are continuously formed. Thereafter, a high temperature treatment for increasing the crystallinity of the piezoelectric film 340 is performed. Subsequently, as shown in FIG. 11C, a common electrode film 350 made of a conductive metallized layer is formed over the entire inner surface of the ejection channel 330 of the piezoelectric film 340. By grounding the common electrode film 350 and applying a voltage to the drive electrode film 352, the piezoelectric film 340 is polarized in a direction (arrow P) from the drive electrode film 352 toward the common electrode film 350.

  Then, after fixing the cover plate 314 to the upper end surface of the diaphragm 320 across all the injection channels 330, a groove reaching the substrate 310 through the cover plate 314 is formed at the center between the adjacent injection channels 330 as shown in FIG. It is formed by cutting with a diamond blade or the like. The groove serves as a non-injection channel 332, and a diaphragm 320 is formed in a portion between the non-injection channel 332 and the injection channel 330.

  As described above in detail, in the ink ejecting apparatus 300 of the present embodiment, the area of the diaphragm 320 can be increased and the ejecting channels can be arranged with high density, as in the above embodiment. In addition, ink can be efficiently ejected at a low voltage. Further, since the common electrode film 350 exposed to the ink in the ejection channel 330 is a ground electrode film, a special protective film for the drive electrode film is not necessary, and the manufacturing cost of the ink ejection apparatus 300 is reduced. . Further, since the ejection channels 330 and the non-ejection channels 332 are alternately formed with the diaphragm 320 interposed therebetween, adjacent ejection channels can be driven simultaneously and printing can be performed at high speed.

  In the first, second, and fourth embodiments, the diaphragm-side electrode of both electrode films sandwiching the piezoelectric film is made of a conductive material containing titanium, so that it is the same as the third embodiment. In addition, a polarized piezoelectric film can be formed by a hydrothermal reaction method. Furthermore, when the substrate is made of a conductive material containing titanium, the substrate can be used as a common electrode and one electrode film can be omitted. In this case, the electrode film formed on the piezoelectric film needs to be independent for each channel.

It is sectional drawing which shows the ink ejecting apparatus of the 1st Embodiment of this invention. It is a figure explaining operation | movement of the ink ejecting apparatus of the said 1st Embodiment. It is the disassembled perspective view which looked at the ink ejecting apparatus of the said 1st Embodiment from the downward direction. It is a figure which shows the manufacturing process of the ink ejecting apparatus of the said 1st Embodiment. It is sectional drawing which shows the ink ejecting apparatus of the 2nd Embodiment of this invention. It is sectional drawing which shows the ink ejecting apparatus of the 3rd Embodiment of this invention. It is a figure explaining operation | movement of the ink ejecting apparatus of the said 3rd Embodiment. It is a figure which shows the manufacturing process of the ink ejecting apparatus of the said 3rd Embodiment. It is sectional drawing which shows the ink ejecting apparatus of the 4th Embodiment of this invention. It is a figure explaining operation | movement of the ink ejecting apparatus of the said 4th Embodiment. It is a figure which shows the manufacturing process of the ink ejecting apparatus of the said 4th Embodiment. It is sectional drawing which shows the conventional ink ejecting apparatus.

Explanation of symbols

100, 200, 300 Ink ejection device 110, 210, 310 Substrate 120, 220, 320 Diaphragm 130, 230, 330 Ejecting channel 140, 240, 340 Piezoelectric film 132, 332 Non-ejecting channel

Claims (6)

Forming a plurality of diaphragms projecting at an interval from each other on one side of the channel substrate, and forming a plurality of channels including ejection channels between the side surfaces of the diaphragm in a groove shape; Applying a voltage to the channel substrate including a side surface of the plate to apply a voltage to expand and contract in a direction orthogonal to the arrangement direction of the plurality of diaphragms; and on the piezoelectric film, A method of manufacturing an ink ejecting apparatus, comprising: depositing and forming an electrode film for applying a voltage to a piezoelectric film. Prior to the step of forming the piezoelectric film, the method further includes the step of depositing and forming a conductive electrode film on the channel substrate including the side surface of each diaphragm, and the piezoelectric film is formed on the electrode film. The method of manufacturing an ink ejecting apparatus according to claim 1 , wherein the deposition is performed. The method for manufacturing an ink ejecting apparatus according to claim 1 , further comprising a step of making at least one of the two electrode films sandwiching the piezoelectric film independent for each of the ejection channels. The method of manufacturing an ink ejecting apparatus according to claim 1 , wherein the piezoelectric film and the electrode film are formed symmetrically with respect to the ejecting channel on a pair of diaphragms sandwiching the ejecting channel. The piezoelectric film is provided in a pair symmetrically with respect to the diaphragm on both side surfaces of the diaphragm, and the electrode film is deposited on the channel substrate including the pair of electrode films. The method of manufacturing an ink ejecting apparatus according to claim 1 , wherein the electrode films on both side surfaces of the diaphragm are independent of each other. A step of forming a plurality of channels in a groove shape on one side of the channel substrate, and applying a voltage to the channel substrate including the inner surface of each channel in a direction orthogonal to the arrangement direction of the plurality of channels A step of depositing and forming a piezoelectric film that expands and contracts; a step of depositing and forming an electrode film for applying a voltage to the piezoelectric film on the piezoelectric film; and a groove in the channel substrate between the channels And forming the diaphragm having the piezoelectric film and the electrode film, which are independent for each channel on both sides of the channel, and the electrode film is made independent for each channel. A method of manufacturing an ink ejecting apparatus.

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