JP3183075B2 - Ink ejecting apparatus and manufacturing method thereof - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet apparatus and a method for manufacturing the same.

[0002]

2. Description of the Related Art The non-impact type printing apparatus which has been replacing the conventional impact type printing apparatus and is now expanding its market greatly is the simplest in principle and has a multi-gradation and color printing. An easy-to-use printing apparatus is an ink jet printing apparatus. Above all, a drop that ejects only ink drops used for printing
The on-demand type is rapidly spreading due to its good injection efficiency and low running cost.

The Kaiser type disclosed in Japanese Patent Publication No. 53-12138 as a drop-on-demand type,
Alternatively, a thermal jet type disclosed in Japanese Patent Publication No. 61-59914 is a typical method.
Among them, the former is difficult to miniaturize, and the latter requires a heat resistance of the ink in order to apply high heat to the ink, and each has a very difficult problem.

A new method for simultaneously solving the above-mentioned defects has been proposed in Japanese Patent Application Laid-Open No. 63-247051.
This is a shear mode type using piezoelectric ceramics disclosed in Japanese Patent Application Laid-Open Publication No. H11-157, 1988.

As shown in FIG. 12, the above-described shear mode type ink ejecting apparatus 600 includes a bottom wall 601, a top wall 602, and a shear mode actuator wall 603 therebetween. The actuator wall 603 is bonded to the bottom wall 601 and is polarized in the direction of the arrow 611 in the lower wall 607.
And an upper wall 605 bonded to the top wall 602 and polarized in the direction of the arrow 609. The actuator walls 603 are paired to form an ink flow path 613 therebetween, and a space 615 smaller than the ink flow path 613 is formed between the next pair of actuator walls 603.

A nozzle 6 is provided at one end of each ink flow path 613.
A nozzle plate 617 having an 18 is fixed, and electrodes 619 and 621 are provided on both sides of each actuator wall 603 as a metallized layer. Each electrode 619, 621
Are covered with an insulating layer (not shown) for insulating the ink. The electrode 621 facing the space 615 is connected to the ground 623, and the electrode 619 provided in the ink flow path 613 is connected to a silicon chip 625 that provides an actuator drive circuit.

Next, a method of manufacturing the ink ejecting apparatus 600 will be described. First, the piezoelectric ceramic layer polarized in the direction of the arrow 611 is bonded to the bottom wall 601, and the piezoelectric ceramic layer polarized in the direction of the arrow 609 is bonded to the top wall 602. The thickness of each piezoelectric ceramic layer is determined by the lower wall 607 and the upper wall 60.
Equivalent to a height of 5. Next, a parallel groove is formed in the piezoelectric ceramic layer by rotation of a diamond cutting disk or the like to form a lower wall 607 and an upper wall 605. Then, the electrode 61 is formed on the side surface of the lower wall 607 by vacuum evaporation.
9 is formed, and the electrode layer is provided on the electrode 619.
Similarly, the electrode 621 and the insulating layer are provided on the side surface of the upper wall 605.

The ink channel 613 and the space 615 are formed by bonding the zenith of the upper wall 605 and the zenith of the lower wall 607. Next, the nozzle plate 617 in which the nozzle 618 is formed is adhered to one end of the ink flow path 613 and the space 615 so that the nozzle 618 corresponds to the ink flow path 613, and The other end is connected to silicon chip 625 and ground 623.

The electrodes 61 of each ink flow path 613
9 and 621, the silicon chip 625 applies a voltage, so that each actuator wall 603 undergoes a piezoelectric thickness-shear deformation in a direction to increase the volume of the ink flow path 613. After a predetermined time, the voltage application is stopped and the ink flow is stopped. Road 613
When the volume of the ink flow path changes from the increased state to the natural state,
Pressure is applied to the ink in the nozzle 3 and the ink droplets
It is injected from 8.

[0010]

However, in the ink ejecting apparatus 600 having the above-described structure, the electrodes 619 and 621 facing the space 615 are connected to the ground 623,
Electrodes 619 and 62 provided in ink channel 613
1 is connected to a silicon chip 625 that provides an actuator drive circuit, but the specific configuration and method of the electrical connection are not disclosed. Therefore, for example, assuming that there are 50 ink channels 613, 51 air chambers 615 are required, and the electrical connection between the electrodes 619 and 621 is 101 locations. There is a problem in that connection is difficult, a process for the connection is time-consuming, and mass productivity is poor.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and provides an ink ejecting apparatus which can easily take out electrodes and can perform a reliable electric connection. It is an object of the present invention to provide a method of manufacturing an ink ejecting apparatus which can easily manufacture the apparatus and has excellent mass productivity.

[0012]

According to the present invention, there is provided an ink jet apparatus comprising: a plurality of partition walls at least partially formed of a polarized piezoelectric material; An actuator having a plurality of channels separated by the partition, an ink ejecting apparatus including electrodes provided on both sides of the partition to generate a driving electric field in the piezoelectric material, wherein the actuator is provided on one side of the actuator. A connecting electrode (127) interconnecting one of the electrodes (124) of the electrodes on both sides of the plurality of partitions, and each of the other electrodes (125) of the electrodes on both sides of the plurality of partitions separately. A plurality of connected drive electrodes (122a) and a plurality of grooves (121) for separating the plurality of drive electrodes (122a) from each other are provided.

According to a second aspect of the present invention, one end of the plurality of channels is provided on one end surface of the actuator.
It further comprises a plurality of grooves (114) communicating with every other,
The other electrode (1) is inserted through an electrode (126) on the inner surface of the groove (114).
25) and the drive electrode (122a) may be connected.

According to a third aspect of the present invention, an electrode (123a) connected to the connection electrode (127) and the plurality of drive electrodes (122a) are arranged on one surface of the actuator. A groove (120) for separating the two may be further provided.

[0015] Incidentally, as described in claim 4, the channel which is located in the one of the electrodes (124), <br/> provided to a position a position which protrudes from the channel to the other electrode (125) The connection electrode (127) is located at its protruding position.
May be connected to each of the one electrodes (124) .

According to a fifth aspect of the present invention, the connecting electrode (127) is provided at the channel where the one electrode (124) is located.
It may be formed on the inner surface of the groove (119) formed over each channel at the position where the flanks protrude.

According to a sixth aspect of the present invention, there is provided a method of manufacturing an ink jet apparatus, comprising: a plurality of partition walls at least partially formed of a polarized piezoelectric material; and a plurality of channels separated by the partition walls. A method of manufacturing an ink jet apparatus, comprising: an actuator having electrodes provided on both sides of the partition for generating a driving electric field in the piezoelectric material, wherein a groove serving as the channel is formed in the actuator. And a step of forming a conductive layer on one side of the actuator and side surfaces of the plurality of partition walls, and forming a groove in the conductive layer on one side of the actuator,
The conductive layer is formed by each electrode (1) formed by the conductive layers of the plurality of partition walls.
25) and a step of separating the plurality of drive electrodes (122a) individually corresponding to each other.

According to a seventh aspect of the present invention, in the step of forming the conductive layer, the step of forming a conductive layer on one of the two surfaces of the plurality of partition walls is performed by connecting each electrode (124) to each other. The method may include a step of forming an electrode (127), and the step of separating may include a step of separating a groove (120) between the plurality of drive electrodes (122a) and the connection electrode (127).

According to another aspect of the present invention, the step of forming the groove serving as the channel includes the step of forming every other one to a position protruding from the other and forming the conductive layer. The connecting electrode (127) may be connected to the electrode (124) of every other groove at the protruding position.

[0020]

In the ink ejecting apparatus according to the first aspect of the present invention having the above-described structure, one of the electrodes on both sides of the plurality of partition walls is connected to the connecting electrode by the connecting electrode. A plurality of drive electrodes (122a) which form a common electrode and are separated from each other by the groove (121) are individually connected to the other electrodes (125) of the electrodes on both sides of the plurality of partition walls. (12
By selectively applying a voltage to 2a), each partition is deformed, and ink droplets are ejected.

In the ink ejecting apparatus according to the second aspect, the drive electrode (122a) is securely connected to the other electrode (125) through the electrode (126) in the groove (114) communicating with every other channel. Connected to.

In the ink ejecting apparatus according to the third aspect, the electrode (123a) connected to the connecting electrode (127) and the plurality of drive electrodes (122a) are separated by the groove (120), and one of the actuators is provided. By arranging them on the surface, electrical connection with others becomes easy.

In the ink ejecting apparatus according to the fourth aspect, the channel where one of the electrodes (124) is located is connected to the channel.
Protruding from the channel where the other electrode (125) is located
By providing up to the position, even if there is the other electrode (125) between the one electrode (124), one electrode (124) is connected to the connection electrode
(127) is easily connected . In the ink jet apparatus according to 請 Motomeko 5, connected to the inner surface of one of the positions to Chang <br/>, channel groove formed across each channel in the projecting position of each electrode (124) (119) By forming the electrode (127), the ink ejecting apparatus according to claim 4 can be realized with a simple configuration.

In the method of manufacturing an ink jet apparatus according to the sixth aspect of the present invention having the above-described structure, a groove serving as a channel is formed in the actuator, and one side of the actuator and side surfaces of the plurality of partition walls are formed. A conductive layer is formed, the conductive layers of the plurality of partitions are used as electrodes (125), and the conductive layer on one side of the actuator is separated by grooves, and a plurality of drive electrodes (122a) individually corresponding to the electrodes (125) are formed. I do. Thus, an electrode that can be easily electrically connected is formed by a simple processing.

According to a seventh aspect of the present invention, in the step of forming the conductive layer, the step of forming the conductive layer is interconnected with each electrode (124) formed by the conductive layer on one of the two surfaces of the plurality of partition walls. Forming a connection electrode (127), and forming the connection electrode
By forming a groove (120) and separating between (127) and the plurality of drive electrodes (122a), a connection electrode (127) serving as a common electrode can be easily formed.

In the method of manufacturing an ink jet apparatus according to the eighth aspect, when forming a groove serving as a channel,
By forming every other one to a position protruding from the other, and connecting to the electrode (124) of every other groove at the protruding position to form a connection electrode (127),
The electrode (124) and the connection electrode (127) can be easily connected.

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. However, the same members as those in the related art are denoted by the same reference numerals, and description thereof will be omitted.

As shown in FIG. 1, the upper actuator plate 101 polarized in the direction of arrow 105 and the lower actuator plate 102 polarized in the direction of arrow 106 are made of a lead zirconate titanate (PZT) piezoelectric ceramic. Made of material.

The two actuator plates 101, 102
Is cut by a diamond blade or the like. For example, the lower actuator plate 102 has a plurality of grooves 117 having a depth of 200 μm and a width of 80 μm, and grooves 118 having the same depth as the grooves 117 formed on both sides of the grooves 117. A plurality of grooves 115 having a depth of 200 μm and a width of 80 μm are formed in the actuator plate 101, and a deep groove 116 having a depth of, for example, 400 μm deeper than the grooves 115 is formed on both sides of the groove 115. The groove 115, the deep groove 116, and the groove 11
7 and the side walls of the groove 118 have a width of 80, for example.
μm. The grooves 115 and the deep grooves 116 formed in the upper actuator plate 101 may be cut using double blades having different blade depths.

Then, as shown in FIG. 2, the upper actuator plate 101 and the lower actuator plate 102 are connected to the groove 115 and the groove 117, the deep groove 116 and the groove 1
18 are bonded to each other via an epoxy adhesive (not shown) so that
Actuator 110. In this embodiment, the polarization direction of the connected partition wall 111 is reversed between the upper part and the lower part. Further, the groove 115 and the groove 117 become a plurality of ink chambers 112 which are spaced apart from each other in the lateral direction.
16 and the groove 118 become air chambers 113 arranged on both sides of the ink liquid chamber 112. The ink chamber 112
Corresponds to the injection channel of the present invention, and the air chamber 113
Corresponds to the non-injection channel of the present invention.

Next, as shown in FIG. 3, the upper part of the upper actuator plate 101 of the actuator 110 is perpendicular to the longitudinal direction of the air chamber 113 and communicates with all the air chambers 113. In addition, the first groove 119 not communicating with the ink liquid chamber 112 is formed by cutting with a diamond blade or the like. FIG. 4 shows a cross section of the actuator 110 at this time. Further, on one end surface of the ink liquid chamber 112 of the actuator 110 in the length direction, a second groove 114 extending in the vertical direction in the figure is formed at a position corresponding to all the ink liquid chambers 112 to a width of, for example, 120 μm. Formed at

Next, after a predetermined masking process is performed on both end surfaces of both sides of the actuator 110 and both end surfaces in the channel direction and a lower end surface of the lower actuator 102, the actuator 102 is applied to the actuator 102 by a method such as electroless plating. A conductive layer made of a metal or the like as shown in FIG. 5 is provided. In this plating process, a liquid chamber electrode 125 is formed on the inner surface of the ink liquid chamber 112, and a liquid chamber connecting electrode 126 is formed on the inner surface of the second groove 114. In addition, an air chamber electrode 124 is formed on the inner surface of the air chamber 113 and an air chamber connecting electrode 127 is formed on the inner surface of the first groove 119. Further, the first groove 1 is formed on the upper surface of the upper actuator plate 101.
19 is closer to one end face where the second groove 114 is formed (front side in the figure), and is closer to the one end face where the second groove 114 is not formed than the first groove 119 (far side in the figure). ), Electrodes 122 and 123 are formed. In the state of FIG. 5, each of the electrodes 122, 125, 126, 12
7, 123 and 124 are electrically connected to each other.

Next, as shown in FIG. 6, the first groove on the upper portion of the upper actuator 101 of the actuator 110 is located closer to the one end face where the second groove is formed (on the front side in the drawing) than the first groove. The electrode 127 and the electrode 122 are electrically separated by a shallow groove 120 formed by cutting using a diamond blade or the like, and a ground electrode 123a is formed. In addition, a plurality of shallow grooves 1 formed by cutting with a diamond blade or the like at a position perpendicular to the shallow grooves 120 and corresponding to the air chamber 113 above the upper actuator 101 of the actuator 110.
By means of 21, the electrodes 122 are electrically separated for each ink liquid chamber 112 to form a drive electrode 122a.

Here, the ground electrode 123a is electrically connected to all the air chamber electrodes 124 via the air chamber connecting electrodes 127, and forms a common electrode. The driving electrode 122a
The corresponding liquid chamber electrodes 1 via the liquid chamber connecting electrodes 126
And 25.

Next, as shown in FIG. 7, the substrate 140 on which the drive electrode pattern 141 and the ground electrode pattern 142 are formed and the upper portion of the upper actuator section 101 of the actuator 110 are joined. At this time, the drive electrode pattern 141 and each drive electrode 122a and the ground electrode pattern 142 and the ground electrode 123a are electrically and mechanically joined by a method such as soldering. Second groove 114 of the actuator 110
A sealing plate 133 for completely covering the air chamber 113 is joined to one end surface on the side where the is formed. At this time, the second groove 114 is not completely covered, and a passage sandwiched between the second groove 114 and the filling plate 133 is an ink supply communication passage for introducing ink into the ink liquid chamber 112. Of the role.

In the actuator 110, a nozzle plate 131 having nozzles 132 provided at positions corresponding to the positions of the respective ink liquid chambers 112 is bonded to an end surface opposite to the one end surface to which the filling plate 133 is joined. Is done. The nozzle plate is formed of a plastic such as polyalkylene (eg, ethylene) terephthalate, polyimide, polyetherimide, polyetherketone, polyethersulfone, polycarbonate, or cellulose acetate.

Thus, the actuator 110
Includes a plurality of ink liquid chambers 112, partition walls 111 at least partially made of piezoelectric ceramics, liquid chamber electrodes 125, liquid chamber connecting electrodes 126, air chamber electrodes 124, ground electrodes 123a, and drive electrodes 122a. The ink ejecting apparatus 100 is provided.

Next, the configuration of the control unit of this embodiment will be described with reference to FIG. 8 which shows a block diagram of the control unit. As shown in the drawing, the drive electrode pattern 141 and the ground pattern 142 on the substrate 140 are individually connected to the LSI chip 51, and the clock line 52, the data line 5
3. The voltage line 54 and the ground line 55 are also connected to the LSI chip 51. Note that a ground electrode pattern 142 that is electrically connected to all the air chamber electrodes 124 in the air chamber 113.
Are connected to the ground line 55. The LSI chip 51 determines which nozzle 132 should eject ink droplets from data appearing on the data line 53 based on continuous clock pulses supplied from the clock line 52. And the LSI chip 51
The voltage V of the voltage line 54 is applied to the drive electrode pattern 141 that is electrically connected to the liquid chamber electrode 125 of the ink liquid chamber 112 to be driven.
Is applied to the ink liquid chambers 11 other than the ink liquid chamber 112.
Drive electrode pattern 14 conducting to the second liquid chamber electrode 125
1 is connected to the ground line 55 and grounded.

Next, the operation of the ink ejecting apparatus 100 according to the manufacturing method of this embodiment will be described with reference to FIGS.
In order to eject ink droplets from the ink liquid chamber 112a shown in FIG. 9, a voltage pulse is applied to the corresponding liquid chamber electrode 125a. Applying a voltage to the indoor electrode 125 and grounding the liquid indoor electrode 125 that is not indicated). Then, as shown in FIG. 10, an electric field in the direction of arrow 107 is generated in the partition 111a, an electric field in the direction of arrow 108 is generated in the partition 111b, and the partitions 111a and 111b approach each other due to the piezoelectric thickness-shear effect. Move to Then, the volume of the ink liquid chamber 112a decreases, and the pressure in the ink liquid chamber 112a including the vicinity of the nozzle 132 increases. As a result, the ink in the ink liquid chamber 112 a becomes ink droplets and is ejected from the nozzle 132.

Next, the application of the driving voltage is stopped to increase the volume of the ink liquid chamber 112a from the reduced state to the natural state, and the ink liquid is supplied into the ink chamber 112a from an ink supply source (not shown) via a manifold (not shown). The ink is supplied to the chamber 112a.

In the above-described embodiment, first, a drive voltage is applied in a direction in which the volume of the ink liquid chamber 112a decreases, and ink droplets are ejected. Although the ink was supplied to the ink liquid chamber 112a by increasing the volume in a natural state, a driving voltage was first applied so as to increase the volume of the ink liquid chamber 112a, and then the ink was supplied to the ink liquid chamber 112a. Alternatively, the application of the driving voltage may be stopped, the volume of the ink liquid chamber 112a may be reduced from the increased state to the natural state, and the ink in the ink liquid chamber 112a may be ejected as ink droplets.

As described above, according to the manufacturing method of this embodiment, the ink ejecting apparatus 100 cuts the groove 115, the groove 117, the groove 118, and the deep groove 116 to form the two actuator plates 101 on which the partition wall 111 is formed. , 102 with partition wall 1
11, a first groove 119 is formed on the upper surface, and a second groove 114 is formed on one end surface by cutting. Then, the inner surface of the ink liquid chamber 112, the inner surface of the air chamber 113, and the second groove are formed. 11
4. A driving electrode 122 that forms a metal layer on the surface of the first groove 119 and is electrically connected to the liquid chamber electrode 125;
It is manufactured by electrically and mechanically joining the ground electrode 123 electrically connected to the substrate 24 to the substrate 140 via solder. Thus, since it is created only by performing a cutting process and a simple plating process, it is excellent in mass productivity.

Further, the ink ejecting apparatus 100 of this embodiment
In the above, since the bonding portion of the partition wall 111 is located at one position, the energy loss of the bonding portion is small. Furthermore, in the air chamber 113,
Since the air is filled, the partition wall 111 is easily deformed, and the voltage may be low.

Further, the drive electrode 122a conducting to the liquid chamber electrode 125 and the ground electrode 123a conducting to the air chamber electrode 124 can be formed on the same surface at a wider pitch than before. Therefore, electrical connection with each of the electrode patterns 141 and 142 formed on the substrate 140 is easy.

In the ink jetting apparatus and the method of manufacturing the same according to this embodiment, both the upper actuator plate 101 and the lower actuator plate 102 are made of lead zirconate titanate (P
Although the ceramic material is made of ZT), one of them may be made of a ceramic material having no piezoelectricity or a resin material.

Next, a second embodiment of the present invention will be described.
However, the same members as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

In the same manner as in the first embodiment, a liquid chamber electrode 125 is formed on the inner surface of the ink liquid chamber 112 by a method such as electroless plating on the actuator 110 processed to the state shown in FIG. A liquid chamber connection electrode 126 is formed on the inner surface of the second groove 114. In addition, the air chamber 113
An air chamber electrode 124 is formed on the inner surface, and an air chamber connecting electrode 127 is formed on the inner surface of the first groove 119. Further, on the upper surface of the upper actuator plate 101, the first
A ground electrode 128 (see FIG. 11) is formed closer to the one end face where the second groove 114 is not formed than the groove 119 (see FIG. 11), and an electrode (see FIG. 11) is formed on the lower surface of the lower actuator plate 102. (Not shown). In this state, the electrodes 125, 126, the electrodes provided on the lower surface of the lower actuator plate 102, and the electrodes 124, 126
127 and 128 are electrically connected to each other.

Next, as shown in FIG. 11, a plurality of parts formed by using a cutting process such as a diamond blade at a position corresponding to the air chamber 113 in a channel direction below the lower actuator 102 of the actuator 110. The electrodes provided on the lower surface of the lower actuator plate 102 are electrically separated for each ink liquid chamber 112 by the shallow groove 130, thereby forming a drive electrode 129a.

Here, the ground electrode 128 is electrically connected to all the air chamber electrodes 124 via the air chamber connecting electrodes 127, and forms a common electrode. The drive electrode 129 a is connected to the corresponding liquid chamber electrode 12 via the liquid chamber connection electrode 126.
Conducted with 5.

Then, the first substrate (not shown) on which the drive electrode pattern 141 is formed is
10 and the lower part of the lower actuator part 102 is joined,
A second substrate (not shown) formed with an ink supply port (not shown) communicating with the ground electrode pattern 142 and the second groove 114 is joined to an upper part of the upper actuator part 101 of the actuator 110. . At this time, the drive electrode pattern 141 and each drive electrode 129a are
The ground electrode pattern 142 and the ground electrode 128 are electrically and mechanically joined by a method such as soldering.

After that, as in the first embodiment, the filler plate 133 and the nozzle plate 131 are joined, so that the actuator 110 becomes an ink ejecting device.

In the ink jetting apparatus and the method of manufacturing the same according to the second embodiment, similar to the first embodiment, there are effects such as excellent mass productivity and easy driving thereof. Since the size of the electrode 129a can be increased, electrical connection is further facilitated. Also, since the ground electrode 128 and the drive electrode 129a are formed on different surfaces on the actuator 110, the drive electrode 129a is separated from the shallow groove 13
It is performed only by applying 0.

In the second embodiment, the ground electrode 128 is formed on the upper surface of the upper actuator plate 101 of the actuator 110.
, The electrical connection may be performed from the air chamber connection electrode 127.

In the first and second embodiments, all the air chamber electrodes 124 are always grounded, all the liquid chamber electrodes 125 are grounded in normal times, and the corresponding liquid chamber electrodes are ejected when ink is ejected. The ejection of ink was controlled by applying a voltage to the electrode 125.
The voltage V is always applied to all the air chamber electrodes 124, the voltage V is also applied to all the liquid chamber electrodes 125 in the normal state, and the corresponding liquid chamber electrodes 125 are grounded when the ink is ejected. The ink ejection may be controlled by setting the liquid chamber electrode 115 to a high impedance state. According to this control, no electric field is generated in the ink liquid chamber 112, so that the quality of the ink in the ink chamber 112 is changed by the electric effect and the liquid chamber electrode 125 is not changed.
Does not cause deterioration of

Further, in the ink ejecting apparatus 100 of the present embodiment, the second groove 114 is provided so as to reach from the upper surface to the lower surface of the actuator 110. Actuator 11
0 may be provided from the upper surface to the middle of the lower surface direction.

[0055]

As described above, in the ink ejecting apparatus of the present invention, the drive electrodes and the common electrodes can be formed at a wider pitch than in the prior art, so that the electrical connection to the substrate is easy.

Further, in the manufacturing method, the actuator with the electrodes is manufactured by simply performing the simple processing of the processing of forming the conductive layers together and the cutting processing, so that the mass productivity is excellent.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating a manufacturing process of an ink ejecting apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view illustrating a manufacturing process of the ink ejecting apparatus.

FIG. 3 is a perspective view illustrating a manufacturing process of the ink ejecting apparatus.

FIG. 4 is a cross-sectional view illustrating a manufacturing process of the ink ejecting apparatus.

FIG. 5 is a perspective view illustrating a manufacturing process of the ink ejecting apparatus.

FIG. 6 is a perspective view showing a manufacturing process of the ink ejecting apparatus.

FIG. 7 is a perspective view illustrating a manufacturing process of the ink ejecting apparatus.

FIG. 8 is a block diagram illustrating a control unit of the ink ejecting apparatus according to the embodiment of the present invention.

FIG. 9 is an explanatory diagram illustrating an operation of the ink ejecting apparatus according to the embodiment of the present invention.

FIG. 10 is an explanatory diagram showing an operation of the ink ejection device.

FIG. 11 is a perspective view illustrating an ink ejecting apparatus according to a second embodiment of the present invention.

FIG. 12 is a diagram illustrating a conventional ink ejecting apparatus.

[Explanation of symbols]

 REFERENCE SIGNS LIST 100 ink ejecting device 101 upper actuator plate 102 lower actuator plate 105 polarization direction 106 polarization direction 110 actuator 111 partition 112 ink liquid chamber 113 air chamber 114 second groove 115 groove 116 deep groove 117 groove 118 groove 119 first groove 120 shallow groove 121 Shallow groove 122 Drive electrode 123 Ground electrode 124 Air chamber electrode 125 Liquid chamber electrode 126 Liquid chamber connection electrode 127 Air chamber connection electrode

Claims (8)

(57) [Claims] An actuator having a plurality of partitions at least partially formed of a polarized piezoelectric material and a plurality of channels separated by the partitions is driven by the piezoelectric material provided on both sides of the partitions. An ink ejecting apparatus provided with an electrode for generating an electric field, wherein a connection electrode (127) in which one electrode (124) of one of electrodes on both sides of the plurality of partition walls is connected to one side of the actuator. ), The other of the electrodes on both sides of the plurality of partitions (125)
A plurality of driving electrodes (122a) individually connected to the plurality of driving electrodes (122a), and a plurality of grooves (1
21) An ink ejecting apparatus comprising: 2. An end face of the actuator further includes a plurality of grooves (114) communicating with every other one of the plurality of channels, and an electrode (126) on an inner surface of the groove (114). The ink ejection device according to claim 1, wherein the other electrode (125) and the drive electrode (122a) are connected. 3. An electrode (123a) connected to the connection electrode (127) and the plurality of drive electrodes (122a) are arranged on one surface of the actuator, and a groove (1) separating the two is provided.
20. The method according to claim 1, further comprising:
An ink ejecting apparatus according to claim 1. 4. A chamber in which said one electrode (124) is located.
The channel is the channel where the other electrode (125) is located.
Provided to a position which protrudes than the connection electrode (127)
The one electrode (124) in the protruding position
The ink ejecting apparatus according to any one of claims 1 to 3, wherein the ink ejecting apparatus is connected to the ink jetting apparatus. 5. Before Killen forming electrode (127), each power of the one
At the protruding position of the channel where the pole (124) is located
The ink jetting device according to claim 4, wherein the ink jetting device is formed on an inner surface of a groove (119) formed over each channel. 6. An actuator having a plurality of partition walls at least partially formed of a polarized piezoelectric material and a plurality of channels separated by the partition walls, the actuator being provided on both sides of the partition walls and driven by the piezoelectric material. A method for manufacturing an ink ejecting apparatus including an electrode for generating an electric field, wherein: a step of forming a groove serving as the channel in the actuator; and a side of the actuator and a side surface of the plurality of partition walls. Forming a conductive layer, forming a groove in the conductive layer on one side of the actuator, and forming the conductive layer on each of the electrodes (125) formed by the conductive layers of the plurality of partition walls.
And a step of separating the plurality of drive electrodes (122a) individually corresponding to each other. 7. The step of forming the conductive layer includes the step of forming each of the electrodes (12) formed by the conductive layer on one of the two surfaces of the plurality of partition walls.
4) forming a connection electrode (127) interconnected with the plurality of drive electrodes (122a) and the connection electrode (127). 7. The method according to claim 6, further comprising the step of forming. 8. The step of forming a groove serving as a channel, the step of forming every other one to a position protruding more than the other, and the step of forming the conductive layer includes the step of forming the connection electrode (1).
27) at the protruding position, the electrodes (12
The method according to claim 7, wherein the method is connected to (4).