JPH08304804A - Production of plasma address display device - Google Patents

Abstract

PURPOSE: To provide a process for producing a plasma address display device capable of effectively preventing the fall of partitions segmenting plasma chambers at the time of polishing the front ends of these partitions, preventing polishing agents from remaining between the partitions and dealing with long- term polishing and the use of other kinds of polishing agents. CONSTITUTION: The partitions are polished by a stage for forming the partitions 5 on plasma glass substrate 31 or dielectric sheet, a stage for packing a reinforcing material RA into the spacings between the formed partitions, a stage for polishing the partitions 5 while polishing the reinforcing material RA by using a polishing liquid and a stage for removing the reinforcing material RA between the partitions 5 after the polishing of the partitions 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a plasma addressed display device in which a liquid crystal cell and a plasma cell are laminated via a dielectric sheet.

[0002]

2. Description of the Related Art In recent years, there has been proposed a plasma address display device in which a liquid crystal cell and a plasma cell are laminated via a dielectric sheet. FIG. 2 shows an example of the structure of this plasma addressed display device.

The plasma addressed display device of FIG. 2 has a flat panel structure in which a liquid crystal cell 2 and a plasma cell 3 are laminated with a dielectric sheet 4 in between. The liquid crystal cell 2 is bonded to the dielectric sheet 4 with the color filter substrate 21 having a predetermined gap with the liquid crystal sealing material 22 interposed therebetween. Although not shown, stripe-shaped data electrodes made of a transparent conductive material and extending in the row direction are formed in parallel on the inner surface of the color filter substrate 21 in the column direction (the vertical direction in the drawing). Color filter substrate 21 and dielectric sheet 4
A liquid crystal layer 23 is formed by filling liquid crystal in a gap between the liquid crystal layer 23 and Although not shown in FIG. 2, spacers are provided in the liquid crystal layer 23 in order to make the gap size uniform.

In the plasma cell 3, the plasma substrate glass 31 faces the dielectric sheet 4 with a predetermined gap. Plasma substrate glass 31 on the side of the dielectric sheet 4
A striped display electrode 32 made of nickel or the like is formed on the upper side of the display electrode 32. The striped display electrode 32 extends in the column direction and is formed in parallel with a predetermined gap in the row direction. The barrier ribs 33, which are narrower than the display electrodes 32, are formed by overlapping the display electrodes 32 at an equal pitch. The plasma substrate glass 31 faces the dielectric sheet 4 with a predetermined gap therebetween via the display electrode 32 and the barrier rib 33. The display electrode 32 and the barrier rib 33 form a partition wall 5, and the partition wall 5
A closed space partitioned by is configured as a plasma chamber 34. The plasma chambers 34 extend in the column direction and are formed at predetermined intervals in the row direction. The plasma chamber 34 is filled with an ionizable gas. As this gas, for example, helium, neon, argon or a mixed gas thereof is used. In this way, the display electrode 3
2 and the barrier rib 33 serve as a partition wall 5 for partitioning each plasma chamber 34, and also serve as a gap spacer for each plasma chamber.

The display electrodes 32 are connected to the respective drivers so as to alternately serve as the anode display electrodes 32A and the cathode display electrodes 32K. A ring-shaped frit seal 35 made of low-melting glass or the like is provided around the plasma substrate glass 31, and the frit seal 3 is used.
At 5, the plasma substrate glass 31 and the dielectric sheet 4 are hermetically joined.

In the plasma addressed display device described above, the data electrode and the plasma chamber are orthogonal to each other, the data electrode serves as a column driving unit, the plasma chamber serves as a row driving unit, and a pixel is defined at the intersection thereof. In such a plasma addressed display device, when a predetermined voltage is applied between the anode display electrode 32A and the cathode display electrode 32K, the gas in the plasma chamber portion is selectively ionized to generate plasma discharge, The inside is maintained at approximately the anode potential. In this state, when a data voltage is applied to the data electrode, the data voltage is written to the liquid crystal layer 23 of the pixels arranged in the column direction corresponding to the plasma chamber 34 via the dielectric sheet 4. When the plasma discharge ends, the plasma chamber 34 becomes a floating potential, and the liquid crystal layer 2 of the corresponding pixel is
The voltage written in 3 is applied to the next writing period (for example, 1
It is held until after the frame). At this time, the plasma chamber 3
4 functions as a sampling switch, and the liquid crystal layer 23 of each pixel functions as a sampling capacitor.

The data electrode 1 is provided for the liquid crystal layer 23 of each pixel.
Since the liquid crystal operates according to the data voltage written from 5, the display is performed in pixel units. Therefore, the liquid crystal layer 23 of a plurality of pixels arranged in the column direction is generated by generating plasma discharge.
A two-dimensional image can be displayed by sequentially scanning the plasma chamber 34 in which the data voltage is written in the row direction.

A method for manufacturing such a plasma addressed display device will be briefly described with reference to FIG.
As shown in (A), a display electrode pattern is printed on the plasma substrate glass 31 in a stripe shape by, for example, a screen printing method, and then dried to form a display electrode 32.

Next, the display electrodes 3 formed in a stripe shape.
The barrier rib 33 is screen-printed on the upper surface of FIG.
As shown in (B), they are laminated at an equal pitch. in this case,
The barrier rib 33 has a height of about 200 μm, so that the height is obtained by repeating screen printing and applying multiple layers. After printing the barrier ribs with a predetermined height, baking is performed to polish the upper portions of the barrier ribs so that the barrier ribs have the same height.

Then, as shown in FIG. 3C, a ring-shaped frit seal 35 is formed around the plasma substrate glass 31.
This frit seal 3 is formed by using a dispenser, etc.
The dielectric sheet 4 made of glass is put on the barrier rib through the plate 5 and bonded to the plasma substrate glass. As a result, the region surrounded by the frit seal 35 becomes a flat sealed chamber 36 that is hermetically shielded from the outside by using the dielectric sheet 4 and the plasma substrate glass 31 as upper and lower walls and the frit seal as a side wall. After the formed sealed chamber 36 is evacuated, gas is injected.

Next, an alignment treatment (not shown) is carried out, and then, as shown in FIG.
As shown in (D), spacers 24 for making the liquid crystal layer have a uniform thickness are dispersed, and as shown in FIG. 3 (E), the color filter 21 is attached to the dielectric sheet 4 via the liquid crystal sealing material 22. To form a liquid crystal chamber, and then liquid crystal is injected to obtain the plasma addressed display device shown in FIG.

By the way, the striped barrier rib 3 is formed.
3 is formed, the barrier rib 33 is formed as described above.
Is printed in multiple layers and then baked, and then the upper surface of the barrier rib 33 is polished. The purpose of this polishing is that if the height of the barrier ribs 33 varies, the thin glass plate 4 as a dielectric sheet is used.
Since the liquid crystal layer 23 has a thickness of about 6 μm as a result, unevenness occurs in the thickness of the liquid crystal layer 23, which causes unevenness in the liquid crystal display, so that the heights of the barrier ribs 33 are made uniform. Is.

The barrier rib 33 needs to have a width of about 100 μm and a height of about 230 μm in consideration of the polishing allowance. Since the barrier rib 33 has a height as compared with the width, it is mechanically rocked by lapping. In addition, there is a problem that the barrier rib 33 falls due to the lateral stress. Therefore, as shown in FIG. 4, after forming the barrier ribs 33 ′ as shown in FIG. 4A, the reinforcing agent RA is filled in the gaps between the barrier ribs 33 ′ as shown in FIG. There is a method in which the barrier ribs 33 are polished while preventing them from falling, and after the polishing is completed, the reinforcing agent is washed away to obtain the barrier ribs 33 after polishing shown in FIG.

In this case, an oil-soluble resin is used as the reinforcing agent RA, the exposed surface of the reinforcing agent is made lower than the tip surface of the barrier rib, and the tip of the barrier rib is treated with a water-soluble polishing liquid as shown in FIG. There is a method of polishing by using it and ending the polishing when the polished surface reaches the reinforcing agent. Alternatively, a water-soluble reinforcing agent is used, and a polishing liquid containing a water-soluble solvent that dissolves the reinforcing agent is used to dissolve the reinforcing agent and gradually lower the height of the reinforcing agent to remove the tip of the barrier rib. A method is employed in which the barrier ribs are polished while being exposed, and at the end of polishing, the reinforcing agent is washed away so as not to remain, as shown in FIG.

[0015]

However, there is a problem that the oil-soluble reinforcing agent adversely affects the material of the barrier rib. In addition, it is difficult to remove it with a solvent, and it tends to remain in the gap between the barrier ribs, and if the reinforcing agent remains in the plasma substrate glass between the barrier ribs, it adversely affects the plasma discharge and deteriorates the transmittance. . For this reason, as the reinforcing agent, it is preferable to use a water-soluble reinforcing agent rather than an oil-soluble one, which has a favorable influence on the activity of the display electrode and is easily removed by water.

As the display device becomes larger, the pitch of the barrier ribs becomes larger. For example, the pitch is 0.41 mm at 14 inches, but is 0.6 at 24 inches.
It is 9 mm. For this reason, in the method of polishing by exposing the tips of the barrier ribs while dissolving the reinforcing agent, the reinforcing agent dissolves faster and the barrier rib falls. If the reinforcing agent dissolves quickly in this way, the abrasive tends to remain on the glass surface of the plasma substrate, which causes uneven discharge and uneven transmittance. Further, when the dissolution of the reinforcing agent is fast, long-time polishing cannot be performed, the polishing method is limited, and polishing cannot be performed using several types of polishing liquids, and thus polishing liquids of different types are used. In this case, it is necessary to fill the reinforcing agent each time, and there is a problem that it takes time and effort.

The present invention has been made in view of the above circumstances, and can effectively prevent the partition walls from collapsing when polishing the tip of the partition walls that partition the plasma chamber, and do not leave an abrasive between the partition walls. Another object of the present invention is to provide a method of manufacturing a plasma addressed display device that can be used for long-term polishing and use of other types of polishing agents.

[0018]

In order to achieve the above object, in a method of manufacturing a plasma addressed display device of the present invention, a liquid crystal cell and a plasma cell are laminated via a dielectric sheet to form the plasma cell. A method of manufacturing a plasma addressed display device, wherein a large number of plasma substrate glass and dielectric sheets are opposed to each other through barrier ribs provided in parallel, wherein the barrier ribs are formed on the plasma substrate glass or the dielectric sheet. A step of filling a gap between the formed partition walls with a reinforcing agent, a step of polishing the partition wall while polishing the reinforcing agent with a polishing liquid, and a step of polishing the partition wall and then the reinforcing agent between the partition walls. And a step of removing.

In this case, the reinforcing agent is water-soluble,
It is preferable that the polishing liquid contains a solvent that hardly dissolves the reinforcing agent. Further, it is preferable that the reinforcing agent contains polyethylene glycol as a main component. Further, when the polishing agent is water-soluble, the solvent of the polishing liquid is preferably oil-soluble.

In the step of filling the reinforcing agent, it is preferable to fill the reinforcing agent such that the exposed surface of the reinforcing agent is flush with the upper end surface of the partition wall or more.

[0021]

According to the method of manufacturing the plasma addressed display device of the present invention, when the barrier ribs or the like are polished, a reinforcing agent is filled between the partition walls so as to fill the partition walls, and then the reinforcing agents are simultaneously polished to form the partition walls. Is to be polished. That is, the reinforcing agent is scraped off without being dissolved in the polishing liquid, and the reinforcing agent remains in the voids between the partition walls until the end.

Therefore, since the reinforcing agent for the partition wall can exert its function as it is, it is possible to prevent the partition wall from collapsing. Further, since the abrasive does not penetrate into the space between the partition walls, the remaining problem of the abrasive does not occur.
Furthermore, it can be used for long-term polishing or polishing with different types of polishing liquids.

As described above, since the reinforcing agent remains, the polishing liquid is preferably insoluble in the reinforcing agent. When the water-soluble reinforcing agent is used, the oil-soluble polishing liquid is used. preferable. Further, when the reinforcing agent is filled, by filling the filling material so as to fill the partition wall, the reinforcing agent is first polished, so that the reinforcing effect of the reinforcing agent can be made more reliable.

[0024]

Embodiments of the present invention will be specifically described below with reference to the drawings. FIG. 1 is a flow chart for explaining the polishing process of barrier ribs in the manufacturing process of the plasma addressed display device of the present invention.

First, as shown in FIG. 1A, a stripe-shaped display electrode 32 is formed on a plasma substrate glass 31 by, for example, a screen printing method, and then barrier ribs 33 'are screened at the same pitch as the display electrode. The barrier ribs 5 ′ are formed by being overlapped with the display electrodes 32 by a printing method or the like, and the barrier ribs 5 ′ before polishing are formed. In this case, the barrier ribs may be separated from each other without overlapping the display electrodes, and the partition walls may be formed not on the plasma substrate glass 31 as shown in the drawing but on the dielectric sheet 4 side.

Next, as shown in FIG. 1B, the reinforcing agent R
A is filled so as to fill the gaps between the barrier ribs 33 'and also fill the tip surfaces of the barrier ribs. In this way, by raising the reinforcing agent RA more than the barrier rib 33 ', the reinforcing agent RA is polished first, and then the barrier rib is polished, so that the barrier rib can be surely prevented from falling. As the reinforcing agent RA, a water-soluble one is preferable, and a specific product is CARBO-WA
X1450 (made by Union Carbide Chemicals and Plastics) can be mentioned. Of course, other oil-soluble substances can be used, but in view of the activity of the electrode and the removal after polishing, a water-soluble reinforcing agent containing polyethylene glycol as a main component is preferable. Reinforcing agent R
As a filling method of A, a method of applying a solid wax-like reinforcing agent RA between the barrier ribs 33 ′ and then heating with a hot plate or the like to liquefy the reinforcing agent and flatten it is preferable. The height of the wax may be equal to or greater than the tip surface of the barrier rib.

After filling the reinforcing agent RA, the barrier ribs are polished. In the present invention, polishing is performed using a polishing liquid that hardly dissolves the reinforcing agent RA. The solvent of this polishing liquid is an oil-soluble solvent, for example, refined oil, vegetable oil,
Examples of the solvent include ethers, benzines, and esters, but are not limited thereto. When the reinforcing agent RA is oil-soluble, a polishing liquid of a water-soluble solvent such as water can be used. Cerium hydroxide can be used as an abrasive for the polishing liquid.

When a polishing liquid that does not dissolve the reinforcing agent RA is used, the reinforcing agent RA is not dissolved and is polished at the same time as the barrier rib 33 as shown in FIG. 1 (C), effectively preventing the barrier rib from collapsing. can do. As a polishing method, for example, a method of using a polishing machine to fix an object to be polished on a surface plate and polishing with a whetstone plate that rotates and rocks while rotating the surface plate can be adopted. During the polishing and at the end of the polishing, as shown in FIG. 1C, the exposed surface of the reinforcing agent RA and the tip surface of the barrier rib are flush with each other.

Finally, the reinforcing agent RA is washed and washed away.
As the cleaning liquid, water or warm water can be used when the reinforcing agent containing polyethylene glycol as the main component is used. According to such a polishing method, the reinforcing agent RA
Since the space between the barrier ribs is filled to the end, there is no risk of the polishing liquid contaminating the plasma substrate glass, and there is no risk of the transmittance being adversely affected by the remaining polishing liquid. Further, even when it is desired to perform polishing for a long time, the polishing may be performed as it is, and the same can be applied when the type of polishing liquid is changed.

Then, as shown in FIG. 3C, a frit seal 35 is formed around the plasma substrate glass 31 by a dispenser or the like, and the glass dielectric sheet 4 is used as a barrier rib through the frit seal 35. It is bonded to the plasma substrate glass in the mounted state, and gas is injected into the formed plasma chamber 34.

Next, an orientation treatment (not shown) is performed, and the alignment shown in FIG.
As shown in (D), spacers 24 for making the liquid crystal layer have a uniform thickness are scattered, and the color filter 21 is bonded to the dielectric sheet 4 via the liquid crystal sealing material 22 to form a liquid crystal chamber. Then, by injecting liquid crystal thereafter, the plasma addressed display device shown in FIG. 2 can be obtained.

The method of manufacturing the plasma addressed display device of the present invention is not limited to the above embodiment. For example, in the above example, the example in which the partition wall is composed of the electrode and the barrier rib has been shown, but the structure of the partition wall is not limited to this, and can be variously modified without departing from the scope of the present invention.

[0033]

According to the method of manufacturing a plasma addressed display device of the present invention, it is possible to effectively prevent the partition wall from collapsing when polishing the tip of the partition wall which partitions the plasma chamber.
The polishing agent is not left between the partition walls, and it is possible to polish for a long time and use other types of polishing agents.

[Brief description of drawings]

FIG. 1 is a flowchart showing a manufacturing process of a plasma addressed display device of the present invention.

FIG. 2 is a cross-sectional view showing an example of a plasma addressed display device.

3A to 3E are flowcharts showing a manufacturing process of the plasma addressed display device of FIG.

FIG. 4 is a flowchart showing a polishing process in manufacturing a conventional plasma addressed display device.

[Explanation of symbols]

 2 Liquid crystal cell 3 Plasma cell 4 Dielectric sheet 5 Partition wall 5 ′ Partition wall before polishing 21 Color filter substrate 22 Liquid crystal sealing material 23 Liquid crystal layer 31 Plasma substrate glass 32 Display electrode 33 Barrier rib 33 ′ Barrier rib before polishing 34 Plasma chamber 35 Frit seal RA reinforcement

Claims (5)

[Claims] 1. A liquid crystal cell and a plasma cell are laminated via a dielectric sheet, and a plasma substrate glass constituting the plasma cell and a large number of the dielectric sheet are opposed to each other via a partition wall provided in parallel. A method of manufacturing a plasma addressed display device, comprising: forming the partition walls on the plasma substrate glass or the dielectric sheet; filling a gap between the formed partition walls with a reinforcing agent; A method of manufacturing a plasma addressed display device, comprising: a step of polishing the partition wall while polishing the reinforcing agent; and a step of removing the reinforcing agent between the partition walls after polishing the partition wall. 2. The method of manufacturing a plasma address display device according to claim 1, wherein the reinforcing agent is water-soluble, and the polishing liquid contains a solvent which hardly dissolves the reinforcing agent. 3. The method for manufacturing a plasma addressed display device according to claim 2, wherein the reinforcing agent contains polyethylene glycol as a main component. 4. The solvent of the polishing liquid is oil-soluble.
Alternatively, the method of manufacturing the plasma addressed display device according to the above item 3. 5. The plasma address display device according to claim 1, wherein in the step of filling the reinforcing agent, the exposed surface of the reinforcing agent is flush with the upper end surface of the partition wall or more. Production method.