JPH08290804A - Cassette positioning device - Google Patents

Abstract

PURPOSE: To surely and easily perform cassette positioning on a cassette mounting base without greatly depending on the mechanism accuracy of a cassette transfer part. CONSTITUTION: Cassette positioning 'TeflonR' blocks 16 are fixed respectively to the left and right parts of a cassette mounting base 12, cylinders 19 are fixed respectively to the left and right bottom parts of the cassette mounting base 12 and 'TeflonR' blocks 18 respectively inserted into the oblong holes 20 of the cassette mounting base 12 are attached to the rod tips of the cylinders 19.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cassette positioning device provided in a cassette stocker for housing a wafer cassette in a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art FIG. 2 is a perspective view for explaining the outline of a semiconductor manufacturing apparatus. The reaction furnace 1 is provided at an upper position of the semiconductor manufacturing apparatus, and the reaction tube 2 is housed inside the reaction furnace 1. A boat elevator 3 is provided below the reaction furnace 1, and the boat elevator 3 carries a boat 5 loaded with wafers 4 into and out of the reaction tube 2. The wafer 4 is transferred between the semiconductor manufacturing apparatus and the outside while being loaded in the wafer cassette 6, the wafer cassette 6 is relayed by a wafer cassette transfer unit (not shown), and then the internal buffer cassette. The wafers 4 of the wafer cassettes 6 stored in the stocker 7 and the cassette stocker 8 and stored in the cassette stocker 8 are transferred by the wafer transfer machine 9 to the boat 5 in the lowered state. As described above, the boat elevator 3 connects the boat 5 to the reaction tube 2
When the wafer 4 is carried in and the film formation of the wafer 4 is completed, the boat 5 is taken out from the reaction tube 2. The processed wafer is carried out of the semiconductor manufacturing apparatus by reversing the above procedure. In the figure, 10 and 11 are air clean units.

Next, a conventional cassette stocker will be described. FIG. 3 is a perspective view of a conventional cassette stocker.
The cassette stocker 8 is composed of a cassette mounting table 12, an upper plate 13, a lower plate 14, and a plurality of columns 15, and the cassette mounting table 12 is provided with a cassette positioning Teflon block 16. The positioning of the cassette on the conventional cassette stocker 8 is performed only by the cassette positioning Teflon block 16 on the cassette mounting table 12.

[0004]

In the above-mentioned conventional example, since the cassette positioning on the cassette stocker is performed only by the cassette positioning Teflon block 16, the wafer cassette is mechanically positioned by the wafer cassette transfer unit. However, there is a problem that the wafer cassette cannot be easily positioned due to the large accuracy.

[0005]

In order to solve the above-mentioned problems, the apparatus of the present invention, as shown in FIG.
2, a cassette positioning mechanism 17 driven by a cylinder 19
Is installed.

[0006]

[Operation] With such a structure, the wafer cassette 6 on the cassette mounting table 12 can be easily positioned by the cassette positioning mechanism 17 driven by the cylinder 19.

[0007]

1 (A) and 1 (B) are a side view and a plan view, respectively, showing an embodiment of the device of the present invention. In this embodiment,
A cassette positioning mechanism 17 driven by a cylinder 19 is provided on the cassette mounting table 12 of the cassette stocker 8. Teflon (trade name) blocks 16 for cassette positioning are fixed to the left and right parts of the cassette mounting table 12, and cylinders 19 are fixed to the lower left and right parts of the cassette mounting table 12, respectively. Each cylinder 19
Each of the rod ends has a long hole 20 in the cassette mounting table 12.
There is provided a Teflon block 18 which is inserted into the.

When the cassette 6 is placed on the cassette loading table 12 of the cassette stocker by the cassette transfer unit (not shown), the cylinder 19 is driven so that the Teflon block 18 presses the cassette 6 against the Teflon block 16 for positioning the cassette for positioning. Will be completed.

[0009]

As described above, according to the present invention, the cassette positioning on the cassette mounting table can be surely and easily performed without largely depending on the mechanical accuracy of the cassette transfer unit.

[Brief description of drawings]

1A and 1B are a side view and a plan view, respectively, showing an embodiment of a device of the present invention.

FIG. 2 is a perspective view illustrating an outline of a semiconductor manufacturing apparatus.

FIG. 3 is a perspective view of a conventional cassette stocker.

[Explanation of symbols]

 12 cassette mount 16 cassette positioning Teflon block 17 cassette positioning mechanism 18 Teflon block 19 cylinder 20 slot

Claims (1)

[Claims] 1. A cassette positioning device characterized in that a cassette positioning mechanism driven by a cylinder is installed on a cassette mounting table.