JPH08285030A - Ball screw and manufacture thereof - Google Patents

Ball screw and manufacture thereof

Info

Publication number
JPH08285030A
JPH08285030A JP11000495A JP11000495A JPH08285030A JP H08285030 A JPH08285030 A JP H08285030A JP 11000495 A JP11000495 A JP 11000495A JP 11000495 A JP11000495 A JP 11000495A JP H08285030 A JPH08285030 A JP H08285030A
Authority
JP
Japan
Prior art keywords
joint
screw shaft
screw
ball screw
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11000495A
Other languages
Japanese (ja)
Inventor
Katsuto Imai
勝人 今井
Takeki Shirai
武樹 白井
Takao Hiyamizu
孝夫 冷水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daido Steel Co Ltd
THK Co Ltd
Original Assignee
Daido Steel Co Ltd
THK Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daido Steel Co Ltd, THK Co Ltd filed Critical Daido Steel Co Ltd
Priority to JP11000495A priority Critical patent/JPH08285030A/en
Publication of JPH08285030A publication Critical patent/JPH08285030A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To provide a method of manufacturing a ball screw, used for a linear bearing or the like, at a low cost by rolling. CONSTITUTION: Insert material with a fusing point Ti lower than the fusing, point Tb of metallic material with a lower fusing point between metallic materials forming a screw shaft 1 and an extended member 3 is inserted between the screw shaft 1 with a thread groove previously machined on the peripheral surface by rolling, and the extended member 3 to be jointed to the end face of the screw shaft 1. A joint part is heated at the temperature of Ti<T< Tb while applying pressure to the faying surface and held to this temperature for the fixed time so as to joint the extended member 3 to the screw shaft 1.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、直線軸受等に用いられ
るボールネジおよびその製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ball screw used for a linear bearing or the like and a method for manufacturing the same.

【0002】[0002]

【従来の技術】ボールネジは周知のように螺子軸の外周
面に形成された螺子溝中をボールが転がるように配置さ
れたもので、摩擦係数が極めて少ない軸受として工作機
械等の精密軸受として多用されている。ところでこのボ
ールネジの螺子軸を製造するには、従来から、素材の鋼
丸棒の外周面を切削加工して螺子溝を形成する方法と、
素材の鋼丸棒を転造盤により転造加工し螺子溝を形成す
る方法とがあった。後者の転造による製造方法は、前者
の切削加工法と比べると生産性が高く製造コストも軽減
できるため極めてその需要が高い。
2. Description of the Related Art As is well known, a ball screw is arranged so that a ball rolls in a screw groove formed on the outer peripheral surface of a screw shaft, and is often used as a precision bearing for machine tools etc. as a bearing having an extremely small friction coefficient. Has been done. By the way, in order to manufacture the screw shaft of this ball screw, conventionally, a method of forming a screw groove by cutting the outer peripheral surface of the steel round bar of the material,
There has been a method of forming a screw groove by rolling a steel round bar as a raw material with a rolling machine. The latter manufacturing method by rolling is highly demanded because it has higher productivity and can reduce manufacturing cost as compared with the former cutting method.

【0003】[0003]

【発明が解決しようとする課題】しかし転造による方法
は、素材を一対の転造型間に挟んで転動させるものであ
るので、一端に例えばフランジ部のような丸鋼棒より太
径の部分が一体に延設されたような形態のものを加工で
きないという問題があり、このためそのような形態のも
のは切削加工により螺子溝を加工せざるを得ず、素材寸
法が大きくなると、材料歩留りおよび生産性の低下を招
来し製造コストが著しく高くなる状況であった。
However, since the rolling method involves rolling the material by sandwiching it between a pair of rolling dies, a portion having a diameter larger than that of a round steel bar, such as a flange, is provided at one end. However, there is a problem that it is not possible to machine a shape in which the blades are integrally extended.Therefore, in such a shape, the screw groove must be processed by cutting, and when the material size increases, the material yield increases. In addition, the productivity is lowered and the manufacturing cost is significantly increased.

【0004】そこで、転造により製造した螺子軸の一端
に所要形状の部材を接合できれば上記のような問題点は
解決でき生産性は向上する。しかしボールネジの螺子軸
の素材として一般的に用いられる機械構造用炭素鋼は、
アーク溶接法のような融接法で接合すると割れが発生し
易く、また、溶接金属の凝固,収縮に伴う継手寸法変化
および変形が大きい等の問題がある。また、素材の溶融
を伴わない摩擦圧接による接合法を用いても、接合部の
周囲にバリが発生し、バリ除去工程が必要になるという
問題点がある。このような理由により、予めそれぞれの
部分を加工した部材を接合して構成されるボールネジ製
造に適した接合法が強く望まれていた。
Therefore, if a member having a desired shape can be joined to one end of the screw shaft manufactured by rolling, the above problems can be solved and the productivity is improved. However, carbon steel for machine structure, which is generally used as a material for the screw shaft of ball screws,
There is a problem that cracking is likely to occur when welding is performed by a fusion welding method such as arc welding, and a change in joint size and deformation due to solidification and shrinkage of weld metal is large. Further, even if the joining method by friction welding which does not involve melting of the material is used, there is a problem that burrs are generated around the joined portion and a burr removing step is required. For these reasons, there has been a strong demand for a joining method suitable for manufacturing a ball screw, which is constructed by joining members whose respective parts are processed in advance.

【0005】[0005]

【課題を解決するための手段】本発明は、このような従
来の課題に鑑みてなされたもので、高機能のボールネジ
を高能率に製造することを目的としている。そのために
本発明に係るボールネジの製造方法は、転造により予め
外周面に螺子溝を加工してなる螺子軸と、該螺子軸の端
面に接合せんとする延設部材との間にそれら金属材料の
うちの融点が低い方の金属材料の融点Tb よりもさらに
低い融点Ti を有するインサート材を挿入し、接合面に
圧力を加えつつ接合部をTi<T<Tb なる温度に加熱
して一定時間その温度に保持することにより螺子軸に延
設部材を接合することを特徴とする。また本発明は上記
ボールネジの製造方法において、高周波誘導加熱法を用
いて接合部を加熱することを特徴とする。また本発明は
上記ボールネジの製造方法において、接合部を不活性ガ
スを用いてシールドし接合することを特徴とする。また
本発明は上記ボールネジの製造方法において、接合後に
その接合部を含む螺子軸および延設部材を熱処理するこ
とを特徴とする。さらに本発明に係るボールネジの製造
装置は、接合部の加熱手段と、接合部の温度を測定する
手段と、接合面に圧力を加える手段と、その圧力を計測
する手段と、接合部近傍に不活性ガスを流す手段と、そ
れらの制御手段とからなることを特徴とする。さらに本
発明に係るボールネジは、転造により外周面に螺子溝が
加工された螺子軸の一端に液相拡散接合により延設部材
を接合してなることを特徴とする。
SUMMARY OF THE INVENTION The present invention has been made in view of such conventional problems, and an object thereof is to manufacture a highly functional ball screw with high efficiency. Therefore, the method for manufacturing a ball screw according to the present invention includes a screw shaft formed by processing a screw groove on the outer peripheral surface in advance by rolling, and an extending member that is joined to the end face of the screw shaft and is made of the metal material. Among them, an insert material having a melting point T i lower than the melting point T b of the metal material having a lower melting point is inserted, and the bonding portion is heated to a temperature of T i <T <T b while applying pressure to the bonding surface. The extension member is joined to the screw shaft by maintaining the temperature for a certain period of time. Further, the present invention is characterized in that, in the above-mentioned method for manufacturing a ball screw, the joint portion is heated by using a high frequency induction heating method. Further, the present invention is characterized in that, in the above-mentioned method for manufacturing a ball screw, the joint portion is shielded and joined with an inert gas. Further, the present invention is characterized in that, in the method for manufacturing a ball screw, the screw shaft including the joint and the extending member are heat-treated after the joint. Furthermore, the ball screw manufacturing apparatus according to the present invention includes a heating means for the joint, a means for measuring the temperature of the joint, a means for applying pressure to the joint surface, a means for measuring the pressure, and It is characterized in that it comprises means for flowing an active gas and means for controlling them. Further, the ball screw according to the present invention is characterized in that an extension member is joined by liquid phase diffusion joining to one end of a screw shaft having a screw groove formed on the outer peripheral surface by rolling.

【0006】[0006]

【作用】接合部をTi <T<Tb なる温度に加熱してイ
ンサート材を溶融させ、その温度に等温保持することに
より接合するため、螺子軸と延設部材とを溶融させず
に、しかも、極めて狭い範囲で接合できる。したがっ
て、アーク溶接法を用いて接合した場合の溶接金属のよ
うな硬度の低い領域が存在しないため接合部の局部的な
摩耗を防止できると共にアーク溶接法で接合した場合の
ような溶接割れが発生しない。また、アーク溶接法に比
べて短時間で接合できるので材質劣化を抑制できる。従
って、高品質のボールネジが低コストで製造できるよう
になる。
The joint is heated to a temperature of T i <T <T b to melt the insert material and maintain the temperature at the same temperature for bonding, so that the screw shaft and the extending member are not melted. Moreover, they can be joined in an extremely narrow range. Therefore, since there is no region of low hardness such as weld metal when joining using the arc welding method, it is possible to prevent local wear of the joining portion and to cause welding cracks when joining using the arc welding method. do not do. Further, since the welding can be performed in a shorter time than the arc welding method, deterioration of the material can be suppressed. Therefore, a high quality ball screw can be manufactured at low cost.

【0007】[0007]

【実施例】次に図面と共に本発明の実施例を説明する。
図1にこのボールネジの製造装置の概略を示し、図中1
は炭素鋼(S55C)の丸棒の外周面に転造により螺子
溝を加工してなる外径23.6ミリの螺子軸、2は該螺
子軸1を把持している固定チャック、3は該螺子軸1の
端部に接合せんとする炭素鋼(S55C)を素材とする
延設部材、4は該延設部材3を把持している可動チャッ
ク、5は両部材の接合面間に挿入されたインサート材、
6は該接合部を加熱する高周波誘導コイル、7は該接合
部の温度を検出する放射温度計、8はN2 ガス等の不活
性ガスを吹付けて該接合部をガスシールするガス吹付ノ
ズル、9は固定チャック4に設けられ螺子軸1から延設
部材3に及ぼされている接合部の圧力を検出する歪ゲー
ジあるいは圧力ゲージ(ロードセル)、10は前記高周
波誘導コイル6による加熱および可動チャック2による
加圧力をコントロールする制御装置で、該制御装置10
には前記放射温度計7により検出された接合部の温度お
よび歪ゲージあるいは圧力ゲージ(ロードセル)9によ
り検出された接合部の圧力が夫々フィードバックされ、
それらを設定値どおり正確にコントロールできるように
している。
Embodiments of the present invention will now be described with reference to the drawings.
Fig. 1 shows the outline of the ball screw manufacturing apparatus.
Is a screw shaft having an outer diameter of 23.6 mm formed by rolling a screw groove on the outer peripheral surface of a carbon steel (S55C) rod by rolling, 2 is a fixed chuck holding the screw shaft 1, and 3 is An extension member 4 made of carbon steel (S55C) to be joined to the end portion of the screw shaft 1 is a movable chuck that holds the extension member 3, and 5 is inserted between the joint surfaces of both members. Insert material,
6 is a high frequency induction coil for heating the joint, 7 is a radiation thermometer for detecting the temperature of the joint, and 8 is a gas spray nozzle for spraying an inert gas such as N 2 gas to seal the joint. Reference numerals 9 are strain gauges or pressure gauges (load cells) provided on the fixed chuck 4 for detecting the pressure of the joint extending from the screw shaft 1 to the extending member 3, and 10 is heating by the high frequency induction coil 6 and a movable chuck. 2 is a control device for controlling the pressure applied by the control device 10.
The temperature of the joint detected by the radiation thermometer 7 and the pressure of the joint detected by the strain gauge or pressure gauge (load cell) 9 are fed back to
We are trying to control them exactly as they are set.

【0008】インサート材5は螺子軸1の融点(140
0℃)および延設部材3の融点(1400℃)よりも低
い融点を有するNi−Si−B(融点1040℃)または
i−Si−Cr−B(融点1100℃)等のニッケル合
金を厚さ40μm程度のシート状にしたもの、または粉
末状態で用いる。そしてこの可動チャック4を両部材の
接合面間に挿入して可動チャック4を前進させ接合部を
加圧力5MPaに保ち、誘導コイル6による誘導加熱に
より該接合部を1200℃に加熱しその加熱状態を少な
くても60秒間保持する。これによりインサート材5は
溶融し螺子軸1および延設部材3の接合面から各金属組
織中に侵入拡散し該接合面を強固に接合させる。
The insert material 5 has a melting point of the screw shaft 1 (140
0 ° C.) and N i -S i -B (mp 1040 ° C. with a melting point lower than that of the extended members 3 (1400 ° C.)) or N i -S i -C r -B such (melting point 1100 ° C.) The nickel alloy is used in the form of a sheet having a thickness of about 40 μm or in a powder state. Then, the movable chuck 4 is inserted between the joint surfaces of both members, the movable chuck 4 is moved forward and the joint portion is kept at a pressure of 5 MPa, the joint portion is heated to 1200 ° C. by induction heating by the induction coil 6, and the heating state is maintained. Hold for at least 60 seconds. As a result, the insert material 5 is melted, penetrates and diffuses from the joint surfaces of the screw shaft 1 and the extending member 3 into each metal structure, and firmly joins the joint surfaces.

【0009】表1にインサート材5の材質、或いは部材
の組合せ,接合温度等の条件を種々異ならしめて接合を
行なった場合の引張試験結果を示す。なお表中の部材の
組合せAは図2に示したように螺子軸1の端面にこれよ
り大径の軸状の延設部材3を接合した場合であり、組合
せBは図3に示したように螺子軸1の端面に外周面に軸
方向のスプライン溝が等間隔に形成された延設部材3を
接合した場合であり、組合せCは図4に示したように互
いに逆ネジの関係にある螺子軸1R,1Lを接合した場
合である。
Table 1 shows the results of the tensile test when the materials of the insert material 5, the combination of the members, the bonding temperature and other conditions were variously changed to carry out the bonding. It should be noted that the combination A of the members in the table is a case where a shaft-shaped extending member 3 having a larger diameter than that is joined to the end surface of the screw shaft 1 as shown in FIG. 2, and the combination B is as shown in FIG. In the case where the extension members 3 having axial spline grooves formed at equal intervals on the outer peripheral surface are joined to the end face of the screw shaft 1, the combination C has mutually reverse screw relationships as shown in FIG. This is the case where the screw shafts 1R and 1L are joined.

【表1】 [Table 1]

【0010】表1中の例1はインサート材を使用しなか
ったときの比較例、例2〜例4は発明例、例5は接合面
を加圧しなかったときの比較例、例6は接合温度がイン
サート材の溶融温度よりも低いときの比較例、例7は接
合温度を保持する時間を全く採らなかった場合の比較例
であり、これらの比較例は引張試験においていずれも接
合面から破断し充分な引張強度が得られなかった。ま
た、例8はシールドガスを用いないで接合したときの発
明例で、この場合螺子軸1の表面が酸化しその酸化スケ
ールのために後で研磨してもねじ精度が他の発明例ほど
には良くならない。なお、表1中の「ねじ部の精度」は
JISB1192に規定された精度表記法による。なお
接合部にバリが発生するようなことは全くなかった。
In Table 1, Example 1 is a comparative example when no insert material is used, Examples 2 to 4 are inventive examples, Example 5 is a comparative example when no pressure is applied to the joining surfaces, and Example 6 is joining. Comparative examples when the temperature is lower than the melting temperature of the insert material, Example 7 is a comparative example when no time was taken to maintain the bonding temperature, and all of these comparative examples were fractured from the bonding surface in the tensile test. However, sufficient tensile strength was not obtained. In addition, Example 8 is an example of the invention when joined without using a shielding gas. In this case, the surface of the screw shaft 1 is oxidized, and even if it is polished later due to the oxide scale, the screw precision is as high as that of the other examples of the invention. Does not get better. The "accuracy of screw part" in Table 1 is based on the accuracy notation specified in JISB1192. No burr was generated at the joint.

【0011】また表2は、例9に示す組合せAの形態の
ものを機械切削加工により一体に削り出した比較例と、
例10,11に示す発明例により接合されたものとを、
共に950℃に高周波加熱した後、水に浸漬して急冷し
焼入れ処理し、表面硬度および焼入れ深さ(ビッカース
硬度Hv が550以上であると認められる部分)を測定
した結果を併記したものである。
Further, Table 2 shows a comparative example in which the combination A of the form shown in Example 9 is machined integrally by machining.
What was joined by the invention example shown in Examples 10 and 11,
Both were subjected to high-frequency heating at 950 ° C., then immersed in water, rapidly cooled and subjected to quenching treatment, and the results of measuring the surface hardness and the quenching depth (where Vickers hardness H v is recognized to be 550 or more) are also shown. is there.

【表2】 [Table 2]

【0012】この例10,例11のように接合後にその
螺子軸1および延設部材3を焼入れ処理したものは、例
9の削出しにより製造したものと同等の焼入れ硬化が得
られ、品質に損色のない製品が得られた。ただし削出し
は転造に比較して所要加工時間が非常に長く要するの
で、生産性は良くなく製造コストが格段に相違すること
となる。
As in Examples 10 and 11, the screw shaft 1 and the extending member 3 which have been hardened after joining have the same quench hardening as that manufactured by the shaving in Example 9 and have a high quality. A product with no discoloration was obtained. However, shaving requires a very long processing time as compared with rolling, resulting in poor productivity and markedly different manufacturing costs.

【0013】[0013]

【発明の効果】このように本発明によれば、予め転造に
より螺子溝を加工した螺子軸の端面に延設部材を高強度
に接合して高品質のボールネジを低コストで製造できる
有益な効果がある。
As described above, according to the present invention, it is possible to manufacture a high quality ball screw at a low cost by joining the extending member with high strength to the end surface of the screw shaft in which the screw groove is machined in advance by rolling. effective.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係るボールネジの製造装置の一実施例
を示す概略図。
FIG. 1 is a schematic view showing an embodiment of a ball screw manufacturing apparatus according to the present invention.

【図2】螺子軸と延設部材との接合例を示した側面図。FIG. 2 is a side view showing an example of joining a screw shaft and an extending member.

【図3】螺子軸と延設部材との接合例を示した側面図。FIG. 3 is a side view showing an example of joining a screw shaft and an extending member.

【図4】螺子軸と延設部材との接合例を示した側面図。FIG. 4 is a side view showing an example of joining the screw shaft and the extending member.

【符号の説明】[Explanation of symbols]

1 螺子軸 2 固定チャック 3 延設部材 4 可動チャック 5 インサート材 6 高周波誘導コイル 7 放射温度計 8 ガス吹付ノズル 9 歪ゲージ 10 制御装置 1 Screw Shaft 2 Fixed Chuck 3 Extension Member 4 Movable Chuck 5 Insert Material 6 High Frequency Induction Coil 7 Radiation Thermometer 8 Gas Spray Nozzle 9 Strain Gauge 10 Controller

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 転造により予め外周面に螺子溝を加工し
てなる螺子軸と、該螺子軸の端面に接合せんとする延設
部材との間にそれら金属材料のうちの融点が低い方の金
属材料の融点Tb よりもさらに低い融点Ti を有するイ
ンサート材を挿入し、接合面に圧力を加えつつ接合部を
i <T<Tb なる温度に加熱して一定時間その温度に
保持することにより螺子軸に延設部材を接合することを
特徴としたボールネジの製造方法。
1. A metal material having a lower melting point between a screw shaft formed by forming a screw groove on an outer peripheral surface in advance by rolling and an extending member to be joined to an end surface of the screw shaft. Insert material having a melting point T i lower than the melting point T b of the metal material is heated to a temperature of T i <T <T b while applying pressure to the bonding surface and kept at that temperature for a certain time. A method for manufacturing a ball screw, characterized in that the extension member is joined to the screw shaft by holding it.
【請求項2】 高周波誘導加熱法を用いて接合部を加熱
することを特徴とする請求項1に記載のボールネジの製
造方法。
2. The method of manufacturing a ball screw according to claim 1, wherein the joint portion is heated by using a high frequency induction heating method.
【請求項3】 接合部を不活性ガスを用いてシールドし
接合することを特徴とする請求項1または2に記載のボ
ールネジの製造方法。
3. The method of manufacturing a ball screw according to claim 1, wherein the joint portion is shielded and joined with an inert gas.
【請求項4】 接合後にその接合部を含む螺子軸および
延設部材を熱処理することを特徴とする請求項1,2ま
たは3に記載のボールネジの製造方法。
4. The method of manufacturing a ball screw according to claim 1, wherein the screw shaft and the extending member including the joint are heat treated after the joining.
【請求項5】 接合部の加熱手段と、接合部の温度を測
定する手段と、接合面に圧力を加える手段と、その圧力
を計測する手段と、接合部近傍に不活性ガスを流す手段
と、それらの制御手段とからなるボールネジの製造装
置。
5. A heating means for the joint, a means for measuring the temperature of the joint, a means for applying a pressure to the joint surface, a means for measuring the pressure, and a means for flowing an inert gas in the vicinity of the joint. , A ball screw manufacturing apparatus comprising these control means.
【請求項6】 転造により外周面に螺子溝が加工された
螺子軸の一端に液相拡散接合により延設部材を接合して
なることを特徴としたボールネジ。
6. A ball screw, wherein an extension member is joined by liquid phase diffusion joining to one end of a screw shaft having a screw groove formed on the outer peripheral surface by rolling.
JP11000495A 1995-04-10 1995-04-10 Ball screw and manufacture thereof Pending JPH08285030A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11000495A JPH08285030A (en) 1995-04-10 1995-04-10 Ball screw and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11000495A JPH08285030A (en) 1995-04-10 1995-04-10 Ball screw and manufacture thereof

Publications (1)

Publication Number Publication Date
JPH08285030A true JPH08285030A (en) 1996-11-01

Family

ID=14524670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11000495A Pending JPH08285030A (en) 1995-04-10 1995-04-10 Ball screw and manufacture thereof

Country Status (1)

Country Link
JP (1) JPH08285030A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0863323A1 (en) * 1996-10-02 1998-09-09 Thk Co. Ltd. Method of manufacturing bearing components having rolling surfaces for rolling elements
WO1999020412A1 (en) * 1997-10-17 1999-04-29 Aoyama Seisakusho Co., Ltd. A method for manufacturing a shaft with refined surface
WO1999035419A1 (en) * 1998-01-07 1999-07-15 Smc Kabushiki Kaisha Feed screw and method of manufacturing the same
JP2002227958A (en) * 2001-01-30 2002-08-14 Tsubaki Nakashima Co Ltd Screw shaft for ball screw

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0863323A1 (en) * 1996-10-02 1998-09-09 Thk Co. Ltd. Method of manufacturing bearing components having rolling surfaces for rolling elements
EP0863323A4 (en) * 1996-10-02 1999-02-24 Thk Co Ltd Method of manufacturing bearing components having rolling surfaces for rolling elements
WO1999020412A1 (en) * 1997-10-17 1999-04-29 Aoyama Seisakusho Co., Ltd. A method for manufacturing a shaft with refined surface
US6202283B1 (en) 1997-10-17 2001-03-20 Aoyama Seisakusho Co., Ltd. Method of manufacturing a shaft with surfaces thereof modified
WO1999035419A1 (en) * 1998-01-07 1999-07-15 Smc Kabushiki Kaisha Feed screw and method of manufacturing the same
US6446520B1 (en) 1998-01-07 2002-09-10 Smc Kabushiki Kaisha Feed screw and method of manufacturing the same
JP2002227958A (en) * 2001-01-30 2002-08-14 Tsubaki Nakashima Co Ltd Screw shaft for ball screw

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