JPH08283075A - Temperature sensor heat receiving body and its production - Google Patents

Abstract

PURPOSE: To obtain a temp. sensor heat receiving body excellent in the thermal shock characteristic in a rapid temp. change and heat responsiveness by chemically bonding a heat receiving metallic member and a ceramic temp.-sensor element through a bonding layer. CONSTITUTION: A ceramic temp.-sensor element 3 is bonded to the inner bottom face 21 of a bottomed head receiving metallic body 2 through a bonding layer 4 contg. an active metal to constitute this temp. sensor heat receiving body 1. In a temp. sensor heat receiving body 1' formed by bonding the temp.-sensor element 3 to the inner bottom face 21 of the metallic body 2 through the bonding layer 4 and a buffer member 5, the damage of the bonding part and the temp.-sensitive element due to a rapid temp. change is more effectively prevented. The element 3 is preferably provided with a couple of electrodes 31, preferably furnished with a perovskite, spinel, rutile or corundum crystal structure.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a temperature sensor for detecting the temperature of an object by coming into contact with the object. Regarding the temperature sensor to do.

[0002]

2. Description of the Related Art Regarding conventional temperature sensors, the following techniques are currently disclosed. First, as shown in FIG. 4, Si is attached to one surface of an alumina substrate 44 joined to a bottomed tubular metal member 42 via an electrical insulating layer 43 (glass adhesive layer).
A temperature sensor 41 provided with a temperature sensitive resistor 46 made of a C thermistor or platinum and an electrode 45 is disclosed. Next, as shown in FIG. 5, a temperature sensitive resistor 56 and an electrode film 55 are formed on one surface of the ceramic substrate 54, a metallized layer (not shown) is formed on the other surface, and the metallized layer is made of ceramics. There is disclosed a temperature sensor 51 fixed to the inner surface of a heat sensitive head 52 by brazing 53 (JP-A-57-14727). In addition, as shown in FIG. 6, a pair of electrodes 65 provided on the bottomed tubular metal member 62 via an electric insulating layer (glass adhesive layer) 63, and the electric insulating layer extending between the pair of electrodes 65. A temperature sensor 61 in which a temperature sensitive resistor 66 is provided on the surface of 63 is disclosed (JP-A-5-34205). On the other hand, the temperature sensor 74
Sensor 7 for mechanically directly fixing the heat to the heat receiving metal plate 72
There is also 1. For the temperature sensor 71, as shown in FIG. 7, the intermediate metal plate 75 is (spot) welded to the heat receiving metal plate 72, and the temperature sensitive element 74 is welded to the intermediate metal plate 75. It is mechanically fixed by the metal material 76.

[0003]

However, the above temperature sensors have the following problems. First, the temperature sensor 41 shown in FIG. 4 includes a metal member 42 and an alumina substrate 44.
Since the strength of the glass 43 for adhering is not sufficient, there is a problem that the glass layer 43 is cracked and damaged by thermal shock (for example, water cooling from 400 ° C.). Also,
Ceramics such as alumina generally have low thermal conductivity,
The temperature sensor 41 includes a glass layer 43 and an alumina substrate 44.
Since the metal member 42 and the temperature-sensitive element 46 are bonded via the above, the responsiveness of the temperature-sensitive element 46 is not sufficient. Next, in the temperature sensor 51 shown in FIG. 5, the thermosensitive head that comes into contact with a pot, a kettle, or the like is made of ceramics, so that it is not sufficient in terms of responsiveness. Further, since the ceramics substrate is interposed between the temperature sensitive resistor and the thermal head made of ceramics, it further deteriorates the responsiveness. Further, since the temperature sensor 61 shown in FIG. 6 is provided with the temperature sensitive resistor 66 on the surface of the electric insulating layer 63, cracks are generated in the glass layer 63 due to thermal shock (for example, water cooling from 500 ° C.). There was a problem of damage. On the other hand, the temperature sensor 71 shown in FIG.
Since 4 is mechanically fixed to the intermediate metal plate 75, the intermediate metal plate 75 and the temperature-sensitive element 74 may be in point contact with each other, and in such a case, the responsiveness to the temperature change varies. Further, since the intermediate metal plate 75 is (spot) welded to the heat receiving metal plate 72, the responsiveness of the temperature sensor depends on the quality of the weldability.

It is an object of the present invention to provide a temperature sensor heat-receiving body having excellent responsiveness by firmly joining a heat-receiving metal and a temperature sensitive element, and a method for manufacturing the same.

[0005]

The first means is a temperature sensor heat receiving body in which a ceramic temperature sensitive element is bonded to the inner bottom surface of a bottomed cylindrical heat receiving metal body through a bonding layer containing an active metal. Is. The second means is a temperature sensor heat receiving body in which a ceramic temperature sensitive element is bonded to the inner bottom surface of a bottomed cylindrical heat receiving metal body via a bonding layer containing an active metal and a buffer member. The ceramic temperature-sensitive element of the first and second means is a perovskite type, a spinel type (general formula AB ₂ 0 ₄ , for example CoO-Al ₂ 0 ₃ ), a rutile type (general formula AO ₂ , for example TiO ₂ , ZrO ₂ ) or corundum type (general formula A ₂ 0 ₃ , for example, Cr ₂ O ₃ -Al ₂
It is preferable that the crystal structure of any one of ( ₃ ) is an oxide sintered body. In addition, it is preferable that the ceramic temperature-sensitive element of the first and second means has a pair of electrodes. The third means is a method of manufacturing a temperature sensor heat receiving body in which a ceramic temperature sensing element is joined to the inner bottom surface of a bottomed cylindrical heat receiving metal body with a brazing material containing an active metal. The fourth means is a method of manufacturing a temperature sensor heat receiving body in which a ceramic temperature sensitive element is joined to the inner bottom surface of a bottomed tubular heat receiving metal body via a brazing material containing active metal and a buffer member. The fifth means is a method of manufacturing a temperature sensor heat receiving body in which a ceramic temperature sensing element is joined to the inner bottom surface of a bottomed tubular heat receiving metal body with a brazing material. The sixth means is to provide a ceramic thermosensitive element on the inner bottom surface of a bottomed cylindrical heat receiving metal body,
It is a method of manufacturing a temperature sensor heat receiving body that is joined via a brazing material and a cushioning member. It is preferable that the ceramic temperature-sensitive element of the third to sixth means is any one of oxide sintered bodies having a crystal structure such as a perovskite type, a spinel type, a rutile type, or a corundum type. Also, the above third to sixth
It is preferable that the ceramic temperature sensitive device of the above means has a pair of electrodes made of platinum, rhodium, palladium or an alloy thereof.

Here, the brazing material is an AgCu alloy brazing material,
An AgPd alloy brazing material, a pure Ag brazing material, a Cu brazing material, etc., or a brazing material containing an active metal such as Ti, Zr or Hf in these brazing materials is applicable. When joining with a brazing material containing no active metal, such as an AgCu alloy brazing material, an AgPd alloy brazing material, a pure Ag brazing material, and a Cu brazing material, it is necessary to metallize the joint surface of the ceramic temperature sensitive element in advance. On the other hand, when joining with an active brazing material containing an active metal such as Ti, Zr, or Hf, the active metal forms a reaction product at the interface with the ceramics, and therefore the bonding surface of the ceramic temperature-sensitive element is metalized in advance. There is no need to keep it. Therefore, the metallurgical process on the surface of the ceramic temperature-sensitive element can be eliminated and the manufacturing cost can be reduced. Here, regarding the method of including the active metal in the bonding layer, it is AgCuTi system, Ag
A brazing material containing Ti in advance such as a Ti-based foil is preferably used. For example, AgCu alloy foil and Ti foil or C
A method of joining by interposing a u foil and a Ti foil between the ceramic temperature-sensitive element and the heat-receiving metal body, or a method of applying a paste containing Ti and brazing and joining may be used. Here, the buffer member is preferably a member made of a low expansion metal such as W, Mo, a W alloy, Kovar, or a soft metal such as Ni or Cu. When these buffer members are interposed between the bottomed tubular heat receiving metal and the ceramic temperature-sensitive element, one or a plurality of them may be used. The thickness of the cushioning member is 0.1 mm ~
It is preferably about 1 mm. If it is less than 0.1 mm, the thermal shock cannot be sufficiently absorbed, and if it exceeds 1 mm, the effect of relaxing the stress against the thermal shock or the like is not further improved and the response is rather deteriorated. Here, the bottomed tubular heat-receiving metal body can be produced by pressing a metal plate, or can be produced by welding and friction-welding a metal tubular portion to the metal plate.

[0007]

The heat-receiving metal body and the ceramics temperature-sensitive element are chemically bonded by the components in the bonding layer diffusing at the interface between them, so that they are firmly bonded. As a result, the temperature sensor heat receiver of the present invention is excellent in the thermal shock characteristics of a sudden temperature change, and also has a good thermal response. When the bonding layer contains an active metal, a reaction generation layer (for example, TiO ₂ , TiO, etc.) is formed at the interface of the ceramic temperature sensitive element.
Is formed, which effectively functions to firmly bond the ceramics temperature-sensitive element, and further effectively functions to heat conductivity, that is, responsiveness. In addition, by interposing a cushioning member between the heat-receiving metal and the ceramics temperature sensitive element in addition to the bonding layer, damage to the bonding part and the ceramics temperature sensitive element due to rapid temperature changes (cooling, heating) can be more effectively prevented. . Further, by providing a pair of electrodes in advance on the ceramic temperature-sensitive element, there is no need to join the electrodes in a later step, and the manufacturing process is simplified. The temperature sensor heat receiving body of the present invention is manufactured at low cost by a simple manufacturing method because the ceramic temperature sensitive element is bonded to the inner bottom surface of the bottomed cylindrical heat receiving metal body by the brazing material containing the active metal. can do. The method for manufacturing the temperature sensor heat receiving body of the present invention is a simple manufacturing method since the ceramic temperature sensitive element is bonded to the inner bottom surface of the bottomed cylindrical heat receiving metal body through the brazing material and the cushioning member containing the active metal. Can be manufactured at low cost. In the method for manufacturing the temperature sensor heat receiving body of the present invention, since the ceramic temperature sensitive element is bonded to the inner bottom surface of the bottomed cylindrical heat receiving metal body by the brazing material, it can be manufactured at a low cost by a simple manufacturing method. .
In the method for manufacturing the temperature sensor heat receiving body of the present invention, the ceramic temperature sensitive element is bonded to the inner bottom surface of the bottomed cylindrical heat receiving metal body through the brazing material and the cushioning member, and thus the manufacturing method is simple and inexpensive. can do.

[0008]

【Example】

Example 1 In the temperature sensor heat receiving body 1 of the present invention, as shown in FIG. 1, the ceramic temperature sensitive element 3 has the bonding layer 4 containing an active metal on the inner bottom surface 21 of the bottomed cylindrical heat receiving metal body 2. Are joined through. It is preferable that the ceramics temperature sensitive element 3 is one of a perovskite type, a spinel type rutile type, and a corundum type. Further, it is preferable that the ceramics temperature sensitive device 3 has a pair of electrodes 31 (FIG. 2).
In the temperature sensor heat receiving body 1 of the present invention, it is preferable that the ceramic temperature sensitive element 3 is bonded to the inner bottom surface 21 of the bottomed cylindrical heat receiving metal body 2 by a brazing material containing an active metal, but the active metal is contained. In the case of bonding with a non-brazing material, it is preferable to previously provide a metal layer of an active metal on the bonding surface of the ceramics temperature sensitive element 3 by sputtering, plating, vapor deposition or the like.

-Experimental Example 1- (How to make a ceramic temperature sensitive element) Y ₂ O ₃ powder having an average particle size of about 1 μm, SrCO ₃ powder, Cr ₂ O ₃ powder, TiO ₂ powder having an average particle size of 1 μm or less, and Fe ₂ O ₃ powder (Y
_0.71 Sr _0.29 ) (Cr _0.76 Fe _0.19 Ti _0.05 ) O ₃ is weighed, wet-mixed and dried, then 1400
Calcination is performed in the atmosphere at ℃ for 2 hours. Then, 1% by weight of SiO ₂ powder having an average particle size of 0.6 μm is added to the calcined powder, and the mixture is wet mixed and dried. PV as a binder after drying
B, DBP, MEK and toluene are added to granulate the powder for press molding. This powder is then 0.4 mm in diameter
After filling in a mold in which two platinum wires are set up and press-molding, it is fired in the atmosphere at 1550 ° C. to obtain a perovskite-type ceramic temperature-sensitive element 3 (thermistor element). The thermistor element has a diameter of 4 mm.
It has a thickness of 2 mm (Fig. 2). The corners are chamfered with a radius of about 0.2 mm. (Method for manufacturing temperature sensor heat receiving body) A metal plate (SUS430) having a thickness of 0.3 mm is pressed into a cylindrical shape with a bottom (outer diameter 16 mm, height 10 mm, thickness 0.3 mm).
Thus, the heat receiving metal body 2 was obtained. Then electrolysis N
i-plated. Next, using the brazing material shown in Table 1 (thickness shown in Table 1, diameter 4 mm), the ceramic temperature sensitive element 3 and the bottomed tubular heat receiving metal body 2 are brazed at a predetermined temperature in vacuum. Were joined together to obtain a temperature sensor heat receiving body 1 (Fig. 1). (Comparative Example No. 6) As shown in FIG. 4, a temperature-sensitive resistor made of platinum is formed on one surface of an alumina substrate 44 joined to a bottomed tubular metal member 42 with an electrical insulating layer 43 (glass adhesive layer) interposed therebetween. A temperature sensor 41 provided with 46 and an electrode 45 was prepared. (Comparative Example No. 7 Mechanical Bonding) As shown in FIG. 7, the intermediate metal plate 75 is (spot) welded to the heat-receiving metal plate 72, and the glass-sealed temperature sensitive element 74 is attached to the intermediate metal plate 75.
The temperature sensor 71 mechanically directly fixed by the fixing metal material 76 welded to the intermediate metal plate 74 was prepared.
(Evaluation with respect to temperature change) The obtained temperature sensor heat receivers and the temperature sensors of the comparative examples were prepared five by five, held at 500 ° C. in the atmosphere for 10 minutes, and then immediately water-cooled. The thermal shock test was repeated 10 times. The temperature sensor of the present invention is 5
No abnormalities such as cracks were found in the ceramic temperature-sensitive element 3 and the bonding layer 4 in each case. The results are shown in Table 1.

[Table 1] (Responsiveness test) Temperature sensor heat receiving body 1 is 100 ° C. hot water 1
Soak in 00 (Fig. 8), apply a constant current, measure the output change of the voltage, and set the time to reach the voltage output of 100 ° C to 1
The time until the voltage output of 90% is generated as 00% is calculated (FIG. 9). Then, the relative value when the time until the 90% voltage output of the mechanically joined temperature sensor 71 of No. 7 shown in FIG. The results are shown in Table 1. It has been confirmed that the temperature sensor heat receiving body 1 of the present invention has higher responsiveness (that is, faster response) than the temperature sensor of the comparative example (conventional) and is excellent in practicality.

Second Embodiment As shown in FIG. 3, another temperature sensor heat receiving body 1'of the present invention has a ceramic temperature sensing element 3 on an inner bottom surface 21 of a cylindrical heat receiving metal body 2 with an active metal. Are joined together via a joining layer 4 including a cushioning member 5. It is preferable that the ceramics temperature sensitive element 3 is one of a perovskite type, a spinel type rutile type, and a corundum type. Further, it is preferable that the ceramics temperature sensitive element 3 has a pair of electrodes 31 (FIG. 3). In another temperature sensor heat receiving body 1 ′ of the present invention, the ceramic temperature sensitive element 3 can be bonded to the inner bottom surface 21 of the bottomed cylindrical heat receiving metal body 2 via the brazing material containing the active metal and the buffer member 5. Although preferable, when joining with a brazing material containing no active metal, it is preferable to previously provide a metal layer of the active metal on the joining portion of the ceramics temperature sensitive element by sputtering, plating, vapor deposition, or the like.

-Experimental Example 2- (How to make a ceramics temperature sensitive element) The same method as that of the ceramics temperature sensitive element 3 of Experimental Example 1 was used. (Method for manufacturing temperature sensor heat receiving body) A metal plate (SUS304) having a thickness of 0.25 mm is pressed into a cylindrical shape with a bottom (outer diameter 16 mm, height 10 mm, thickness 0.25 m).
By setting m), a bottomed tubular heat-receiving metal body was obtained.
After that, electrolytic Ni plating was applied. Next, a buffer plate having a diameter of 4 mm and a thickness shown in Table 2 was prepared as the buffer member 5. Then, the brazing material shown in Table 2 (thickness shown in Table 2, diameter 4 m
m), the ceramic temperature-sensitive element 3 and the buffer member 5 and the buffer member 5 and the bottomed tubular heat receiving metal body 2 are integrally joined to each other by brazing at a predetermined temperature using a temperature sensor heat receiving body. 1'was obtained (Fig. 3). (Evaluation with respect to temperature change) Evaluation was performed in the same manner as in Experimental Example 1. It was confirmed that there were no abnormalities such as cracks in the ceramic thermosensitive element and the bonding layer of the five temperature sensor heat receivers (the results are not shown in the table). (Responsiveness test) A test was conducted in the same manner as in Experimental Example 1. The time until the 90% voltage output of the mechanically joined temperature sensor of No. 7 of Experimental Example 1 was generated was 100.
The relative value was calculated as the response. Table 2 shows the results
Shown in

[Table 2] The temperature sensor heat receiving body 1 ′ of the present invention has lower responsiveness (that is, slower response) than that without the buffer member 5, but has higher responsiveness (that is, responsiveness) than the conventional temperature sensor. It was confirmed that it was excellent in practicality.

[0012]

In the temperature sensor heat receiving body of the present invention, the heat receiving metal member and the ceramic temperature sensitive element are chemically bonded via the bonding layer, so that the thermal response of the sensor becomes good. In addition, the structure is simplified and the manufacturing process is simplified.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a temperature sensor heat receiver of the present invention (Example 1).

FIG. 2 is a perspective view of a ceramics temperature sensitive element that constitutes the temperature sensor heat receiver of the present invention.

FIG. 3 is a cross-sectional view of a temperature sensor heat receiving body (Example 2) of the present invention.

FIG. 4 is a conventional temperature sensor heat receiver (comparative example N of experimental example).
o.6) is a sectional view.

FIG. 5 is a cross-sectional view of a conventional temperature sensor heat receiver.

FIG. 6 is a cross-sectional view of a conventional temperature sensor heat receiver.

FIG. 7: Conventional temperature sensor heat receiver (Comparative Example N of Experimental Example)
7 is a sectional view of FIG.

FIG. 8 is a diagram showing a method of a responsiveness test.

FIG. 9 is a diagram showing a relationship between an output voltage and time for showing a relative value of responsiveness in a responsiveness test.

[Explanation of symbols]

 1, 1'Temperature sensor heat receiving body 2 Bottomed cylindrical heat receiving metal body 21 Internal bottom surface of bottomed cylindrical heat receiving metal body 3 Ceramics temperature sensitive element 31 Ceramics temperature sensing element electrode 4 Bonding layer 5 Buffer member

Claims (10)

[Claims] 1. A temperature sensor heat-receiving body, wherein a ceramic temperature-sensitive element is bonded to an inner bottom surface of a bottomed cylindrical heat-receiving metal body via a bonding layer containing an active metal. 2. A temperature sensor heat-receiving body, wherein a ceramic temperature-sensitive element is bonded to an inner bottom surface of a bottomed cylindrical heat-receiving metal body via a bonding layer containing an active metal and a buffer member. 3. The temperature sensor heat receiving body according to claim 1, wherein the ceramics temperature sensitive device has a perovskite type, spinel type, rutile type, or corundum type crystal structure. 4. The temperature sensor heat receiver according to claim 1, wherein the ceramics temperature sensitive element has a pair of electrodes. 5. A method for manufacturing a temperature sensor heat receiving body, comprising: joining a ceramics temperature sensitive element to an inner bottom surface of a bottomed cylindrical heat receiving metal body with a brazing material containing an active metal. 6. A method of manufacturing a temperature sensor heat receiving body, comprising: joining a ceramics temperature sensitive element to an inner bottom surface of a bottomed cylindrical heat receiving metal body via a brazing material containing active metal and a buffer member. 7. A method for manufacturing a temperature sensor heat receiving body, which comprises bonding a ceramic temperature sensitive element to a bottom surface of a bottomed cylindrical heat receiving metal body with a brazing material. 8. A method for manufacturing a temperature sensor heat receiving body, comprising: joining a ceramic temperature sensitive element to an inner bottom surface of a bottomed cylindrical heat receiving metal body via a brazing material and a cushioning member. 9. The ceramic temperature-sensitive element has a perovskite type, spinel type, rutile type or corundum type crystal structure.
8. The method for manufacturing the temperature sensor heat receiving body according to any one of 8 above. 10. The method for manufacturing a temperature sensor heat receiver according to claim 5, wherein the ceramics temperature sensitive element has a pair of electrodes.