JPH08282755A - Storage container for substrate cleaning-brush - Google Patents

Abstract

PURPOSE: To eliminate a contamination of a substrate caused by that a brush body of a cleaning brush may be touched with the hand when the cleaning brush is mounted on or removed from a brush-rotating shaft of a substrate- cleaning device at the replacement of the cleaning brush and to always keep the brush body wet, as required. CONSTITUTION: A storage container consists of a container body 24 opened at the top surface thereof and provided with storage space 30, 36 for containing a brush holder 12 and a brush body 14 of a cleaning brush 10 and a support part 40 for supporting the brush holder 12 in the inner surface thereof, and a cover body 26 for covering an opening on the top surface of the container body 24 in engagement with the container body 24.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a semiconductor wafer,
While holding various substrates such as glass substrates for liquid crystal display devices or photomasks, substrates for optical disks, etc. in a horizontal posture and rotating them around a vertical axis, a cleaning liquid is supplied onto the substrates and the substrates are cleaned with a cleaning brush. In a substrate cleaning apparatus for cleaning, the present invention relates to a storage container for storing a cleaning brush to be attached to a brush rotating shaft or a cleaning brush detached from the brush rotating shaft when replacing the cleaning brush.

[0002]

2. Description of the Related Art A substrate cleaning apparatus for cleaning a substrate with a cleaning brush briefly describes an example of its configuration and operation. A substrate, for example, a semiconductor wafer is held in a horizontal posture by vacuum suction on the upper surface side of a spin chuck. Then, while rotating the substrate held by the spin chuck about the vertical axis,
The cleaning liquid is supplied onto the substrate, the brush rotating shaft of the brush holding arm is rotated, and the cleaning brush fixed to the rotating shaft and held in a suspended state by the brush holding arm is rotated and lowered from the upper position. The lower end of the cleaning brush close to the substrate surface and the lower end of the cleaning brush in contact with or close to the substrate surface, the rotating cleaning brush is placed on the substrate along the surface of the rotating substrate. Is moved so that the substrate is cleaned. In such a substrate cleaning apparatus, a cleaning brush that has deteriorated due to use is replaced, or the type of cleaning brush is changed according to the type of substrate and the purpose of cleaning. For this reason, the cleaning brush is detachably attached to the brush rotating shaft of the brush holding arm.

The cleaning brush is composed of a brush holder and a brush body, and the brush body is formed, for example, by arranging a large number of bristles on the lower surface side. Then, when replacing the cleaning brush, when attaching the cleaning brush to the brush rotating shaft of the substrate cleaning device or removing the cleaning brush from the brush rotating shaft, the operator holds the brush holder with his finger. I was doing it. Further, the cleaning brush before attachment or the cleaning brush after removal has been stored and transported in a container 2 as shown in FIG. 12, for example. Then, the cleaning brush 1 is taken out from the container 2 before the cleaning brush is attached to the brush rotating shaft, and the cleaning brush 1 is stored in the container 2 after the cleaning brush is removed from the brush rotating shaft.

[0004]

As in the prior art, when the cleaning brush is replaced, the cleaning brush is grasped with a finger to attach the cleaning brush to the brush rotating shaft and remove the cleaning brush from the brush rotating shaft. In such a case, there is a problem in that the brush main body that comes into contact with the substrate comes into contact with the substrate during the cleaning process of the substrate, which causes contamination of the substrate. Also,
Depending on the type of cleaning brush, it may be desirable to keep it in a wet state at all times because it takes time to start the substrate cleaning process if the brush body is dry.
In the conventional container 2, the cleaning brush 1 could not be kept in a wet state during storage or transportation of the cleaning brush 1. Further, in the container 2 shown in FIG. 12, the brush body 3 of the cleaning brush 1 may come into contact with the inner wall surface of the container 2, and the brush body 3 may be deformed during storage or transportation of the cleaning brush 1. .

The present invention has been made in view of the above circumstances, and when the cleaning brush is replaced, the cleaning brush is attached to the brush rotating shaft of the substrate cleaning apparatus or the cleaning brush is removed from the brush rotating shaft. When
(EN) Provided is a storage container which does not cause contamination of a substrate by touching the brush main body of a cleaning brush, and can keep the brush main body of the cleaning brush always wet if necessary. With the goal.

Another object of the present invention is to provide a storage container capable of preventing deformation of the brush main body during storage and transportation of the cleaning brush.

[0007]

The invention according to claim 1 is
A storage container for storing a substrate cleaning brush formed by attaching a brush main body for cleaning a substrate to a brush holder having an engaging portion formed on the upper surface side for engaging with a brush rotating shaft of a substrate cleaning device is described below. As described above, the container body and the lid body were used. That is, the container body has a side wall and a bottom wall that are open at the top and form an accommodation space for accommodating the brush holder for the substrate cleaning brush and the brush body, and a support portion that supports the brush holder on the inner surface side. It is constructed and set up.
Further, the lid body is formed in a shape that closes the upper opening of the container body, and is configured to have an engaging means that engages with the container main body with the upper opening of the container main body closed. The movement of the substrate cleaning brush housed in the container body is restricted or restricted within an allowable range in a state where the upper surface opening of the container is closed.

According to a second aspect of the present invention, in the storage container according to the first aspect, the side wall of the container body includes an upper side wall forming an upper storage space for storing a brush holder of a substrate cleaning brush, and a brush body. It is formed from a lower side wall that forms a lower receiving space for receiving, and a connecting portion between the upper side wall and the lower side wall is formed into a stepped surface, and the diameter of the lower receiving space is smaller than the diameter of the brush holder, In addition, the diameter of the upper housing space is made larger than the diameter of the brush holder, and the support portion for supporting the brush holder is formed by the stepped surface. .

According to a third aspect of the present invention, in the storage container according to the second aspect, the depth of the lower storage space of the container body is determined by the length of the protrusion of the brush main body from the lower surface of the brush holder of the substrate cleaning brush. The diameter of the upper accommodating space is made larger so that the movement of the brush holder is restricted so that the brush main body accommodated in the lower accommodating space does not contact the inner peripheral surface of the lower side wall.

According to a fourth aspect of the present invention, in the storage container according to the second or third aspect, a locking protrusion having a male screw threaded thereon is integrally formed at the center of the upper surface of the brush holder of the substrate cleaning brush. At the same time as forming the brush cleaning device, a brush rotating shaft of the substrate cleaning device is rotatably engaged with a nut screwed with a female screw that engages with the male screw of the locking protrusion, and is attached to the outer peripheral surface of the brush holder of the substrate cleaning brush. The anti-rotation projection is integrally formed, and the anti-rotation recess engaging with the anti-rotation projection is formed on the inner peripheral surface of the upper side wall of the container body.

According to a fifth aspect of the present invention, in the storage container according to the first aspect, the side wall of the container body is formed in a cylindrical shape having an inner diameter slightly larger than the diameter of the brush holder of the substrate cleaning brush, A projection is provided on the inner peripheral surface of the side wall, and a support portion for supporting the brush holder is formed by the upper end of the projection.

According to a sixth aspect of the present invention, in the storage container according to the fifth aspect, the height of the upper end of the protrusion protruding from the inner peripheral surface of the side wall of the container body from the inner bottom surface of the container body is The cleaning brush has a configuration that is larger than the length of protrusion of the brush main body from the lower surface of the brush holder.

According to a seventh aspect of the present invention, in the storage container according to the fifth or sixth aspect, a locking protrusion having a male screw threaded thereon is integrally formed at the center of the upper surface of the brush holder of the substrate cleaning brush. At the same time, a nut having a female screw thread to be engaged with the male screw of the locking protrusion is rotatably engaged with the brush rotation shaft of the substrate cleaning device, and the lower end of the outer peripheral portion of the brush holder of the substrate cleaning brush is formed. And a rotation preventing notch is formed in the container body, and a rotation preventing protrusion that engages with the rotation preventing notch is formed on the inner peripheral surface of the side wall of the container body.

According to an eighth aspect of the present invention, in the storage container according to any one of the first to seventh aspects, the brush cleaning shaft of the substrate cleaning apparatus is provided at the center of the upper surface of the brush holder of the substrate cleaning brush. In order to wash the substrate, the locking protrusion is integrally formed to project, and the inner upper surface of the lid is in contact with or close to the upper surface of the brush holder in a state where the upper opening of the container body is closed by the lid. The brush movement is regulated or restricted within a permissible range, and a recess is formed in the center of the inner upper surface of the lid, in which the locking protrusion of the brush holder is loosely fitted.

In the storage container of the invention according to claim 1, the substrate cleaning brush is stored in the storage space of the container main body, and the lower end peripheral portion of the brush holder is engaged with the support portion formed on the inner surface side of the container main body. The container is housed in a combined state, and the top opening of the container body is closed by the lid. Then, the lid body is engaged with the container body by the engaging means, and in this closed state, the lid body regulates the movement of the substrate cleaning brush housed in the container body or limits it within an allowable range. Therefore, even if the substrate cleaning brush is transported while being stored in the storage container, the substrate cleaning brush does not significantly swing in the storage container.

When the substrate cleaning brush is to be attached to the brush rotating shaft of the substrate cleaning apparatus, the lid of the container holding the substrate cleaning brush is removed, the upper surface of the container body is opened, and the brush holder While holding the substrate cleaning brush in the container body with the upper surface side looking through the top opening of the container body, hold the container body by hand and bring the substrate cleaning brush close to the brush rotation axis, connecting by screwing etc. The upper surface side of the brush holder of the substrate cleaning brush is attached to the brush rotating shaft by the means. In this way, when the lid of the storage container that stores the substrate cleaning brush is removed, the locking part on the upper surface side of the brush holder is exposed, so by holding the container body by hand, The substrate cleaning brush can be locked to the brush rotation shaft of the substrate cleaning device without touching the brush body of the brush. On the other hand, when removing the substrate cleaning brush from the brush rotating shaft, the empty container body is brought close to the substrate cleaning brush connected to the brush rotating shaft from below, and the container body is externally inserted to the substrate cleaning brush. Then, the container body is held by hand, and in this state, the substrate cleaning brush is removed from the brush rotating shaft. In this way, even when removing the substrate cleaning brush from the brush rotation shaft, you do not have to hold the substrate cleaning brush by hand, but you can hold the container body of the storage container by hand and operate it. There is no worry about touching.

Since the substrate cleaning brush is housed in the container with the top opening of the container body closed by the lid, the brush body of the substrate cleaning brush can be kept in a wet state at all times if necessary. it can.

In the storage container according to the second aspect of the present invention, in the substrate cleaning brush, the brush main body is stored in the lower storage space of the container main body, and the brush holder is stored in the upper storage space to form the upper storage space. The brush holder is accommodated in a state in which the stepped surface of the connecting portion between the upper side wall and the lower side wall forming the lower accommodating space is engaged with the lower edge portion of the brush holder.

In the storage container according to the third aspect of the present invention, since the depth of the lower storage space of the container body is larger than the length of protrusion of the brush body from the lower surface of the brush holder, the substrate cleaning brush is provided in the container body. With the stored
The lower end of the brush body does not come into contact with the bottom inner bottom surface of the container body. Further, since the diameter of the upper accommodation space of the container body is set to a dimension that restricts the movement of the brush holder to a predetermined value or less, the peripheral surface of the brush body does not contact the inner peripheral surface of the lower side wall. Therefore, the brush main body does not come into contact with the side wall or the bottom wall of the container main body when the substrate cleaning brush is housed in the container main body, so that the brush main body is not contaminated or deformed.

In the container of the invention according to claim 4, the brush for cleaning the substrate is attached to the brush rotating shaft of the substrate cleaning device,
When removing the substrate cleaning brush from the brush rotating shaft, the male screw threaded on the locking protrusion of the brush holder upper surface of the substrate cleaning brush is threaded onto the nut rotatably engaged with the brush rotating shaft. With the female screw screwed in,
Although the nut is rotated by hand, the rotation-preventing protrusions that are integrally formed on the outer peripheral surface of the brush holder of the substrate cleaning brush are formed on the inner peripheral surface of the upper side wall of the container body. Since it engages with the concave part, by holding the container body by hand, the brush for cleaning the substrate does not rotate together even when the nut is rotated, and the nut can be attached to and detached from the locking protrusion on the upper surface of the brush holder. It can be done without any problems.

In the storage container of the invention according to claim 5, the substrate cleaning brush is stored in the storage space of the container main body, and the lower end peripheral portion of the brush holder is attached to the upper end of the protrusion protruding from the inner peripheral surface of the side wall. Are stored in the engaged state. In addition, since the side wall of the container body has a cylindrical shape having an inner diameter slightly larger than the diameter of the brush holder, the peripheral surface of the brush main body is the inner peripheral surface of the side wall when the substrate cleaning brush is housed in the container main body. There is no contact. Therefore, the brush main body does not come into contact with the side wall of the container main body when the substrate cleaning brush is housed in the container main body, so that the brush main body is not contaminated or deformed by the side wall of the container main body.

In the storage container of the invention according to claim 6, the height of the upper end of the protrusion projecting from the inner peripheral surface of the side wall of the container body from the inner bottom surface of the container body is the protrusion of the brush body from the lower surface of the brush holder. Since the length is larger than the length, the lower end of the brush body does not come into contact with the bottom inner bottom surface of the container body when the substrate cleaning brush is housed in the container body. Therefore, the brush main body does not come into contact with the bottom wall of the container main body when the substrate cleaning brush is housed in the container main body, and therefore is not contaminated or deformed by the bottom wall of the container main body.

In the storage container according to the seventh aspect of the present invention, the substrate cleaning brush is attached to the brush rotating shaft of the substrate cleaning device,
When removing the substrate cleaning brush from the brush rotating shaft, the male screw threaded on the locking protrusion of the brush holder upper surface of the substrate cleaning brush is threaded onto the nut rotatably engaged with the brush rotating shaft. With the female screw screwed in,
Although the nut is rotated by hand, the rotation stop notch formed at the lower end of the outer peripheral portion of the brush holder of the substrate cleaning brush has a rotation prevention protrusion formed on the inner peripheral surface of the side wall of the container body. By holding the container body with your hand, the brush for cleaning the substrate does not rotate together even if you rotate the nut, which prevents the nut from being attached to or detached from the locking protrusion on the upper surface of the brush holder. It can be done without.

In the storage container of the invention according to claim 8, when the substrate cleaning brush is stored in the container body and the upper opening of the container body is closed, the substrate cleaning brush is placed at the center of the upper surface of the brush holder of the substrate cleaning brush. The locking protrusions that are integrally projected are loosely fitted in the recess formed in the center of the inner upper surface of the lid, and the inner upper surface of the lid restricts or allows the vertical movement of the substrate cleaning brush. Limited by range.

[0025]

BEST MODE FOR CARRYING OUT THE INVENTION The best mode for carrying out the present invention will be described below with reference to the drawings.

FIGS. 1 to 3 show an example of an embodiment of the present invention. FIG. 1 is a perspective view showing a state in which a storage container is separated and a cleaning brush is not stored in the storage container, and FIG. FIG. 3 is a partial vertical cross-sectional view showing a state where the cleaning brush is stored in the storage container, and FIG. 3 is a partial vertical cross-sectional view showing a state where the cleaning brush is attached to the brush rotation shaft of the substrate cleaning apparatus.

In the cleaning brush 10 of the illustrated example, a brush body 14 is formed on the lower surface side of the brush holder 12 by implanting a large number of bristles of a certain length inside the peripheral edge of the lower surface.
On the upper surface of the brush holder 12, a locking protrusion 16 is integrally provided at the center thereof, and a male screw 18 is threaded on the locking protrusion 16. Further, a square hole 20 is formed in the center of the upper end surface of the locking protrusion 16. On the outer peripheral surface of the brush holder 12, four anti-rotation protrusions 22 are equally arranged in the circumferential direction in the longitudinal direction and integrally formed.

The storage container is composed of a container body 24 and a lid body 26, and the container body 24 and the lid body 26 are made of a plastic material such as polypropylene. The container body 24 has a large-diameter upper housing space 30 whose upper surface is open and which is surrounded by an upper side wall 28, and a small-diameter lower housing space 36 which is on the lower side thereof and which is surrounded by a lower side wall 32 and a bottom wall 34. And have. Container body 24
The brush holder 12 of the cleaning brush 10 is accommodated in the upper accommodation space 30. Therefore, the diameter of the upper accommodation space 30 is slightly larger than the diameter of the brush holder 12, and the four rotation preventing projections 22 formed on the outer peripheral surface of the brush holder 12 of the cleaning brush 10 are provided. The rotation preventing recesses 38 that respectively engage with the above are formed on the inner peripheral surface of the upper side wall 28. The diameter of the upper accommodating space 30 is set so as to regulate the movement of the brush holder 12 so that the brush main body 14 accommodated in the lower accommodating space 36 does not come into contact with the inner peripheral surface of the lower side wall 32. In addition, the lower accommodation space 3
The brush main body 14 of the cleaning brush 10 is housed in the cleaning unit 6. Therefore, the diameter of the lower housing space 36 is equal to that of the brush main body 1.
4 is slightly larger than the diameter, and the depth of the lower housing space 36 is larger than the height of the brush body 14. In addition, the diameter of the lower housing space 36 is smaller than the diameter of the brush holder 12 of the cleaning brush 10, and the connecting portion between the upper side wall 28 and the lower side wall 32 is formed on the stepped surface 40 serving as a support portion. The lower surface peripheral portion of the brush holder 12 of the cleaning brush 10 contacts the stepped surface 40, and the stepped surface 40 supports the cleaning brush 10 in the container body 24. Also,
On the outer peripheral surface of the upper side wall 28 of the container body 24, a male screw 42
Is engraved.

Although not shown in FIG. 1, the inner peripheral surface of the lid body 26 has an upper side wall 28 of the container body 24 on the inner peripheral surface thereof.
A female screw that is screwed onto the male screw 42 that is screwed on the outer peripheral surface of the is threaded. Further, in the central portion of the inner upper surface of the lid 26,
A recess 44 into which the locking protrusion 16 of the cleaning brush 10 is loosely fitted
Are formed. Then, the inner upper surface of the lid 26 other than the portion where the recess 44 is formed comes into contact with or comes close to the upper surface of the brush holder 12 of the cleaning brush 10, and the movement of the cleaning brush 10 is restricted or restricted within an allowable range. It will form the braking part. Further, at the peripheral edge of the inner upper surface of the lid body 26, a male screw 42 on the outer circumferential surface of the upper side wall 28 of the container body 24 is screwed into an internal thread on the inner circumferential surface of the lid body 26, and the lid body 2
When 6 is screwed into the container body 24, a gasket 46 is attached which is in close contact with the upper end surface of the upper side wall 28 of the container body 24 and keeps the inside of the storage container airtight.

The cleaning brush 10 is contained in the container having the above-described structure. As shown in FIG.
Is accommodated in the lower accommodating space 36 of the brush holder 12, the brush holder 12 is accommodated in the upper accommodating space 30 of the brush holder 12, and the stepped surface 40 of the connecting portion between the upper side wall 28 and the lower side wall 32 is engaged with the lower peripheral portion of the brush holder 12. It is stored in the state. Then, the upper surface opening of the container body 24 is closed by the lid body 26, and the lid body 26 is screwed into the container body 24. In this closed state, the movement of the cleaning brush 10 is regulated or restricted within an allowable range by the inner upper surface of the lid body 26 that forms the braking portion, so that the cleaning brush 10 is stored in this storage container. Even if the cleaning brush 10 is transported, the cleaning brush 10 does not swing significantly in the storage container. Further, in the state where the cleaning brush 10 is stored in the storage container, the movement of the brush holder 12 is restricted, and the peripheral surface of the brush main body 14 stored in the lower storage space 36 is the lower side wall 3.
2 and the lower end of the brush body 14 does not come into contact with the inner bottom surface of the lower portion of the container body 24. Will not be deformed. Also,
In the closed state, since the inside of the storage container is kept airtight, the brush body 14 of the cleaning brush 10 can be kept in a wet state at all times, and if necessary, a cleaning liquid such as pure water can be stored in the storage container. It is also possible to inject.

Next, the cleaning brush 10 stored in the storage container having the above-described structure is attached to the brush rotating shaft of the substrate cleaning apparatus, and the cleaning brush 10 attached to the brush rotating shaft.
The operation for removing the brush from the brush rotary shaft and storing it in the storage container will be described.

As shown in FIG. 3, the brush rotary shaft 48 to which the cleaning brush 10 is attached has a flange portion 50 integrally formed near the lower end thereof, and a portion on the lower end side of the flange portion 50. 52 is formed in the shape of a square rod that fits into the square hole 20 formed in the central portion of the upper end surface of the locking protrusion 16 of the cleaning brush 10. In addition, the flange portion 50 of the brush rotary shaft 48 is provided with a nut 54 in which a female screw to be screwed with the male screw 18 of the locking protrusion 16 of the cleaning brush 10 is threaded.
Are rotatably engaged and held around the brush rotation shaft 48. Brush rotating shaft 4 of such a substrate cleaning apparatus
In order to attach the cleaning brush 10 housed in the storage container to 8, the lid 26 of the storage container is first removed to open the upper surface of the container body 24, and the upper surface side of the brush holder 12 is attached to the container body 24. Make it visible through the top opening. Next, with the cleaning brush 10 stored in the container body 24,
Holding the container body 24 by hand to bring the cleaning brush 10 close to the brush rotating shaft 48, the locking protrusion 1 of the brush holder 12
The square hole 20 of No. 6 is fitted into the square bar portion 52 at the lower end of the brush rotary shaft 48. Then, while holding the container body 24 by hand, the nut 54 is screwed into the male screw 18 of the locking protrusion 16 of the brush holder 12 and tightened. On this occasion,
The nut 54 is rotated by hand with the female screw of the nut 54 screwed into the male screw 18 of the locking protrusion 16 of the brush holder 12. However, the rotation preventing projection 22 on the outer peripheral surface of the brush holder 12 is Since it engages with the rotation preventing recess 38 on the inner peripheral surface of the upper side wall 28 of the main body 24, the container main body 2
By holding 4 by hand, the cleaning brush 10 does not rotate together even when the nut 54 is rotated. As described above, when the cleaning brush 10 is attached to the brush rotating shaft 48 as shown in FIG. 3, the container body 24 is moved downward and pulled out from the cleaning brush 10. During this time,
The series of operations described above is performed without touching the cleaning brush 10 at all.

On the other hand, when removing the cleaning brush 10 from the brush rotary shaft 48, the container body 24 is brought close to the cleaning brush 10 connected to the brush rotary shaft 48 from below,
As shown in FIG. 3, the container body 24 is externally inserted into the cleaning brush 10. Then, while the container body 24 is supported by hand, the nut 54 is rotated to disengage the nut 54 from the locking protrusion 16 of the brush holder 12. At this time, since the anti-rotation protrusion 22 on the outer peripheral surface of the brush holder 12 is engaged with the anti-rotation recess 38 on the inner peripheral surface of the upper side wall 28 of the container body 24, as described above, the container body 24 is manually operated. The cleaning brush 10 does not rotate together with the nut 54 when the nut 54 is rotated. When the nut 54 is disengaged from the locking projection 16 of the brush holder 12, the container body 24 is moved downward so that the square hole 20 of the locking projection 16 of the brush holder 12 is inserted into the square bar-shaped portion of the lower end of the brush rotary shaft 48. After removing the cleaning brush 10 from the brush rotary shaft 48 by pulling it out from the container 52, the lid body 2 is attached to the container body 24.
Screw 6 together. Even during this removing operation, the cleaning brush 10 is never touched by the hand.

The embodiment shown in FIG. 4 shows another example of the engaging means between the container body 56 and the lid 58, and is a partial vertical cross-sectional view of the cleaning brush 10 housed in the container. In this storage container, the upper end portion of the container body 56 expands outward so that the cross-sectional shape is L-shaped, the engaging portion 60 is formed in the container body 56, and the peripheral portion of the lid body 58 is formed. It has a configuration in which a fitting insertion portion 62 that is inserted into the engagement portion 60 and holds the engagement portion 60 from the outside and the inside is formed.
A gasket 64 is attached to the fitting insertion portion 62. In this storage container, the lid body 58 is engaged with the container body 56 by inserting the fitting insertion portion 64 at the peripheral edge portion of the lid body 58 into the engagement portion 60 at the upper end portion of the container body 56, and in this state, the gasket The inside of the storage container is held airtight by 64. The other configurations are the same as those of the storage container shown in FIGS. 1 to 3, and the description thereof will be omitted.

Next, in the storage container shown in FIG. 5, the upper edge of the upper side wall 68 of the container body 66 is located above the upper surface of the brush holder 12 of the cleaning brush 10 stored in the container body 66. In addition, the height dimension of the upper side wall 68 is increased, and the annular groove 70 is formed on the outer peripheral surface of the upper side wall 68, while the entire upper surface of the lid body 72 is made flat and the inner peripheral surface of the lid body 72 is formed. , An annular protrusion 74 that engages with the annular groove 70 of the upper side wall 68 is formed. In this storage container, the lid 72 is fitted into the upper side wall 68 of the container body 66, and the lid 72 is pushed down, whereby the annular projection 74 of the lid 72 is locked in the annular groove 70 of the upper side wall 68.
The lid 72 is engaged with the container body 66. In this storage container, in a state where the upper opening of the container body 66 is closed by the lid 72, the inner upper surface of the lid 72 contacts the upper end surface of the locking protrusion 16 of the brush holder 12 of the cleaning brush 10, or By approaching, cleaning brush 1
The movement of 0 will be restricted or restricted by an allowable range. The other configurations are the same as those of the storage container shown in FIGS. 1 to 3, and the description thereof will be omitted.

As means for engaging the container body and the lid, various structures other than those shown in FIGS. 1 to 3, 4 and 5 can be adopted. Further, when the container body and the lid are engaged, it is not always necessary to keep the inside of the storage container airtight,
For a cleaning brush that does not require the brush body to be kept in a wet state, the container body and the lid body may simply engage with each other. Further, in the above-described embodiment, the brush holder 12
Although a large number of bristles having a constant length were planted on the lower surface of the brush main body to constitute the brush main body, in the present invention, various other brushes having a cleaning action can be used as the brush main body. For example, as will be described later, the brush main body can be formed by using a sponge-like porous body made of polyvinyl alcohol or the like as a raw material.

Next, the embodiment shown in FIG. 6 relates to a storage container for storing a cleaning brush having a structure different from that of the cleaning brush shown in FIGS. 1 to 5. Figure 6
The cleaning brush 76 shown in FIG.
A female screw 82 is threaded on the central portion on the upper surface side of the brush holder 78 in which is formed. Reference numeral 84 is a rotation preventing projection integrally formed on the outer peripheral surface of the brush holder 78. The cleaning brush 76 is attached to a brush rotating shaft 92 having a male screw 94 screwed into a female screw 82 of a brush holder 78 and a lower end portion of which is screwed. The structure of the container body 86 is the same as that of the container body 24 shown in FIGS.
Has a flat upper surface as a whole. A female screw is threaded on the inner peripheral surface of the lid 88, and a gasket 90 is attached to the peripheral edge of the inner upper surface of the lid 88. In this storage container, when the lid body 88 is screwed onto the container body 86 and the upper surface opening of the container body 86 is closed by the lid body 88, the inner upper surface of the lid body 88 has the brush holder 7 of the cleaning brush 76.
By contacting or approaching the upper surface of 8, the movement of the cleaning brush 76 is restricted or restricted within an allowable range. Then, with the lid 88 removed, the cleaning brush 76 housed in the container body 86 is attached to the brush rotation shaft 92, and the cleaning brush 76 attached to the brush rotation shaft 92 is rotated. When removing from the shaft 92, the container body 86 is grasped by hand, and the container body 86 itself is operated to rotate together with the cleaning brush 76.

Further, the cleaning brush 96 shown in FIG.
Brush holder 9 having a brush body 100 formed on the lower surface side
A rectangular rod-shaped locking protrusion 102 is integrally formed in the central portion on the upper surface side of 8. This cleaning brush 96 has a square hole 1 that is closely fitted to the square bar-shaped locking projection 102 of the brush holder 98.
10 is fixed to the brush rotary shaft 108 that is formed at the lower end. 112 is a fixing screw. The container body 104 is the same as the container body 24 shown in FIGS. 1 to 3 except that a rotation preventing recess is not formed on the inner peripheral surface of the upper side wall 106.
It has the same configuration as. In addition, in this embodiment, it is not necessary to form a rotation preventing projection on the outer peripheral surface of the brush holder 98 of the cleaning brush 96.

Next, referring to FIGS. 8 to 10, a storage container according to an embodiment different from the above-mentioned embodiment will be described. FIG. 8 is a perspective view showing a state where the substrate cleaning brush is disassembled and a storage container for storing the cleaning brush is separated, and FIG. 9 is a partial vertical section showing a state where the cleaning brush is stored in the storage container. FIG. 10 is a partial vertical cross-sectional view showing a state in which the cleaning brush is attached to the brush rotating shaft of the substrate cleaning apparatus.

The cleaning brush 120 shown in the figure is constructed by holding a brush main body 126 in a brush holder composed of an upper attaching portion 122 and a lower holding portion 124. The brush body 126 has an upper half portion formed to have a large diameter and a lower half portion formed to be a small diameter portion 130 having a smaller diameter than the large diameter portion 128. The brush body 126 is formed of a hydrophilic sponge-like porous material, for example, a porous material made of polyvinyl alcohol. The porous material is, for example,
Polyvinyl formal is produced by a formalization reaction in which formaldehyde is bound to polyvinyl alcohol using an acid as a catalyst. At that time, a pore-forming agent is added to form pores, and an insoluble porous substrate is completed, and then a bubble-forming agent is extracted. It is manufactured by The brush main body 126 formed of this material has continuous pores, has hydrophilicity, exhibits good flexibility and elasticity when wet, and has no elasticity at all when dried, and becomes a hard material.

A locking protrusion 132 for attaching the cleaning brush 120 to the brush rotating shaft of the substrate cleaning apparatus is integrally provided at the center of the upper surface of the upper attachment portion 122 of the brush holder. A male screw 134 is threaded on the locking protrusion 132. A square hole 136 is formed in the center of the upper end surface of the locking projection 132 in the axial direction. The lower half portion of the upper attachment portion 122 is formed slightly thinner than the upper half portion, and the upper end portion of the cylindrical lower holding portion 124 is fitted to the fitting portion 138 of the lower half portion. Reference numeral 1 in FIG.
40 is a small locking protrusion formed on the outer peripheral surface of the fitting portion 138 of the upper attachment portion 122, and reference numeral 142 is the fitting portion 13
8 is a small locking recess that engages with the small locking projection 140 when the upper end of the lower holding portion 124 is fitted in the lower holding section 8. Lower holding part 1
The outer diameter of 24 is the same as the outer diameter of the upper half of the upper attachment portion 122, and the inner diameter of the lower holding portion 124 is slightly larger than the outer diameter of the large diameter portion 128 of the brush body 126. ing. Further, a support annular portion 144 is integrally formed on the inner peripheral surface near the lower end of the lower holding portion 124. The inner diameter of the support annular portion 144 is slightly larger than the outer diameter of the small diameter portion 130 of the brush body 126 and smaller than the outer diameter of the large diameter portion 128. Further, at the lower end of the lower holding portion 124, rotation preventing notches 146 are formed at two positions in a positional relationship of forming an angle of 180 ° with each other. The brush holder is made of a plastic material such as polypropylene.

In order to hold the brush main body 126 in the brush holder, the small diameter portion 130 of the brush main body 126 is inserted into the hole of the support annular portion 144 of the lower holding portion 124 to accommodate the brush main body 126 in the lower holding portion 124. After that, the fitting portion 138 of the upper attachment portion 122 may be fitted to the upper end portion of the lower holding portion 124. At this time, the brush body 12
6 is supported by the support annular portion 144 of the lower holding portion 124, and its upper surface abuts on the lower surface of the upper mounting portion 122 to restrict vertical movement with respect to the brush holder. The inner peripheral surface restricts lateral movement with respect to the brush holder. Then, when the brush main body 126 is held by the brush holder, the lower end surface of the brush main body 126 projects downward from the lower end of the lower holding portion 124.

The storage container 148 is composed of a container body 150 and a lid body 152, and the container body 150 and the lid body 152 are formed of a plastic material such as polypropylene. The container body 150 is formed in a cylindrical shape whose upper surface is open and whose side wall has an inner diameter slightly larger than the outer diameter of the brush holder of the cleaning brush 120. In addition, on the inner peripheral surface of the container body 150, the container body 1 is provided at two positions in a positional relationship of forming an angle of 180 ° with each other.
Anti-rotation rod-shaped projections 154 extending from the inner bottom surface of the container 50 along the axial direction of the container body 150 are respectively projected, and the positions including the both anti-rotation rod-shaped projections 154 form an angle of 60 ° with each other. In relation to this, supporting bar-shaped projections 156, which extend from the inner bottom surface of the container body 150 along the axial direction of the container body 150 and are slightly shorter than the locking bar-shaped projections 154, are provided at four locations. Then, as shown in FIG. 9, the cleaning brush 120 is inserted into the container body 150, and the rotation preventing notch 146 of the lower holding portion 124 of the brush holder and the position of the rotation preventing rod-shaped projection 154 of the container body 150 are arranged. When they are fitted together, the lower ends of the lower holding portions 124 of the brush holders of the cleaning brush 120 come into contact with the upper ends of the four supporting bar-shaped projections 156, and the cleaning brush 120 is moved by the four supporting bar-shaped projections 156. Container body 1
In addition to being supported in 50, the rotation preventing notches 146 are respectively fitted to the upper ends of the rotation preventing rod-shaped projections 154, so that the cleaning brush 120 is rotated around the axis in the container body 150. Fixed not to. At this time, the lower end surface of the brush body 126 of the cleaning brush 120 does not come into contact with the inner bottom surface of the container body 150. A male screw 158 is threaded on the outer peripheral surface of the upper end of the container body 150. Instead of providing a plurality of supporting rod-shaped protrusions 156 in the circumferential direction of the container body 150, one annular protrusion is provided on the inner peripheral surface of the container body, and the cleaning brush 120 is provided by the upper end surface of the annular protrusion. The brush holder may be supported. Further, the plurality of rotation preventing rod-shaped projections 154 are also used for supporting the brush holder of the cleaning brush 120, so that the support rod-shaped projections 156 are provided.
May be omitted.

Although not shown in FIG. 8, a female screw thread, which is not shown in FIG. 8, is formed on the inner peripheral surface of the lid body 152. The female screw thread is screwed onto the male screw thread 158 screwed on the outer peripheral surface of the upper end portion of the container body 150. Further, the cleaning brush 1 is attached to the central portion of the inner upper surface of the lid 152.
A recess 160 is formed in which the locking protrusion 132 of 20 is loosely fitted. Then, the concave portion 16 on the inner upper surface of the lid body 152.
The surface other than the portion where the 0 is formed contacts or comes close to the upper surface of the brush holder of the cleaning brush 120.
Will form a braking unit that regulates or limits the movement of the. In addition, at the peripheral portion of the inner upper surface of the lid body 152, a female screw on the inner peripheral surface of the lid body 152 is screwed with a male screw 158 on the outer peripheral surface of the upper end portion of the container body 150 to screw the lid body 152 into the container body 150. A gasket 162 is attached to the upper end side of the container body 150 so as to keep the inside of the storage container 148 airtight when they are put together.

The cleaning brush 120 is stored in the container body 150 of the storage container 148 in the state shown in FIG.
The upper surface opening of the container body 150 is sealed by the lid body 152. In the state where the lid body 152 is screwed into the container body 150 and the storage container 148 is hermetically closed, the movement of the cleaning brush 120 in the storage container 148 is restricted or restricted within an allowable range as described above, and storage or storage is performed. The cleaning brush 120 does not rock significantly in the storage container 148 during transportation. In addition, the lower end surface of the brush body 126 is the container body 1.
Since it is held so as not to contact the inner bottom surface of the brush 50, the brush body 126 is not deformed during storage or transportation of the cleaning brush 120. Furthermore, when the storage container 148 is hermetically closed, the storage container 14 may be stored or transported during storage or transportation.
Liquid does not leak or evaporate from inside 8,
Further, there is no concern that particles will be mixed into the storage container 148 during storage or transportation. By injecting a liquid such as pure water or a cleaning liquid into the container body 150, the brush body 126 of the cleaning brush 120 is softened and kept in an elastic state. It is possible to immediately use the substrate for cleaning processing after taking it out from the storage container 148.

Next, the cleaning brush 120 stored in the storage container 148 is attached to the brush rotating shaft 48 of the substrate cleaning apparatus, and the cleaning brush 120 attached to the brush rotating shaft 48 is attached to the brush rotating shaft. Storage container 14 removed from 48
The operation of storing in 8 will be described with reference to FIG.

In order to attach the cleaning brush 120 to the brush rotating shaft 48, first, the lid 152 of the storage container 148 is removed to open the upper surface of the container main body 150, and the upper surface side of the brush holder of the cleaning brush 120 is attached. Is viewed through the top opening of the container body 150. Next, the container body 150
With the cleaning brush 120 stored in the container body 150
The cleaning brush 120 is brought close to the brush rotary shaft 48 from below by hand, and the square hole 136 of the locking projection 132 is fitted into the square rod portion 52 at the lower end of the brush rotary shaft 48. Then, while holding the container body 150 by hand,
The nut 54 is screwed into the male screw 134 of the locking protrusion 132 and tightened. At this time, the male screw 1 of the locking protrusion 132
When the female screw of the nut 54 is screwed onto the screw 34, the nut 54 is manually rotated, but the rotation preventing notch 146 of the lower holding portion 124 of the brush holder is rotated around the inner peripheral surface of the container body 150. Since the stopper rod-shaped projection 154 is engaged with the upper end portion of the cleaning brush 1, even if the nut 54 is rotated by holding the container body 150 by hand.
Twenty never rotate together. As described above, FIG.
As shown in FIG.
Then, the container body 150 is pulled downward and pulled out from the cleaning brush 120. During this time, the series of operations described above is performed without touching the cleaning brush 120 at all.

On the other hand, when removing the cleaning brush 120 from the brush rotating shaft 48, the container body 150 is approached from below to the cleaning brush 120 attached to the brush rotating shaft 48, and the cleaning is performed as shown in FIG. The container body 150 is externally attached to the brush 120 for use. Then, the nut 54 is rotated while holding the container body 150 by hand, and the nut 54 is disengaged from the locking protrusion 132. At this time, since the detent notch 146 of the lower holding portion 124 of the brush holder is engaged with the upper end of the detent rod-shaped projection 154 on the inner peripheral surface of the container body 150, the container body 150 is grasped by hand. By doing so, even if the nut 54 is rotated, the cleaning brush 120 does not rotate together. When the nut 54 is disengaged from the locking protrusion 132, the container body 150 is pulled downward, and the square hole 136 of the locking protrusion 132 is pulled out from the square rod-shaped portion 52 at the lower end of the brush rotary shaft 48, so that the brush rotary shaft 48 can be pulled out. Then, the cleaning brush 120 is removed. Then, after injecting hydrogen peroxide solution or isopropyl alcohol into the container body 150, the container body 150 is covered with a lid 152.
Screw together. During this removal operation, the cleaning brush 1
I never touch 20.

The method of attaching the cleaning brush to the brush rotating shaft of the substrate cleaning apparatus is not limited to that of the above-described embodiment, and any method may be used. For example, FIG.
As shown in FIG. 1, the cleaning brush 164 is configured by forming a brush main body 168 on the lower surface side of a brush holder 166 whose upper part is frustoconical, and the brush holder 166 is provided on the lower end surface of the brush rotary shaft 170. A recess 172 to which the upper part of 166 is fitted is formed, and a vacuum suction passage 174 communicating with the recess 172 is formed at the axial center of the brush rotary shaft 170, and the vacuum suction passage 174 is connected to a vacuum suction source. And then
The cleaning brush 164 may be attached to the brush rotating shaft 170 by vacuum suction. In addition, various modifications can be made to the shape of the support portion that supports the brush holder of the cleaning brush, and the shape and size of the brush body and the brush holder. It is desirable to store the brush body in contact with it in order to prevent deformation of the brush body.

[0050]

When the storage container according to the first aspect of the present invention is used, when the substrate cleaning brush is replaced, the substrate cleaning brush is attached to the brush rotating shaft of the substrate cleaning device or the substrate is transferred from the brush rotating shaft. Since the operation of removing the cleaning brush can be performed without touching the substrate cleaning brush, there is no need to worry that the brush body is touched by the hand and causes contamination of the substrate. In addition, since the substrate cleaning brush is housed in the storage container with the top opening of the container body closed by the lid, it is possible to keep the brush body always in a wet state if necessary. It is possible to shorten the time required to start up the device for the cleaning process operation after the replacement.

In the storage container of the invention according to claim 2, the brush main body of the substrate cleaning brush is stored in the lower storage space of the container main body, and the brush holder is stored in the upper storage space.
The above effect is achieved by the brush holder being supported in the container body by the stepped surface of the connecting portion between the upper side wall forming the upper containing space and the lower side wall forming the lower containing space.

In the storage container according to the third aspect of the present invention, in the state where the substrate cleaning brush is stored in the container body, the lower end and the peripheral surface of the brush body do not contact the inner wall surface of the container. It is possible to prevent contamination and deformation of the brush body during storage and transportation of the brush.

In the storage container according to the fourth aspect of the present invention, when the substrate cleaning brush is attached to the brush rotating shaft of the substrate cleaning device or the substrate cleaning brush is detached from the brush rotating shaft, the nut is manually pressed. Although it is rotated, the operation of attaching and detaching the nut to the locking protrusion on the top surface of the brush holder is
It can be performed without trouble even if the brush for cleaning the substrate is not touched.

In the storage container according to the fifth aspect of the present invention, the substrate cleaning brush is stored in the storage space of the container body, and the upper end of the protrusion protruding from the inner peripheral surface of the side wall causes the brush holder to move inside the container body. By being supported by, the above-mentioned effects are exhibited. Further, since the peripheral surface of the brush body does not contact the inner wall surface of the container when the substrate cleaning brush is housed in the container body, the peripheral surface portion of the brush body during storage or transportation of the substrate cleaning brush is It is possible to prevent contamination and deformation.

In the storage container according to the sixth aspect of the present invention, since the lower end of the brush body does not contact the inner wall surface of the container when the substrate cleaning brush is stored in the container body, the substrate cleaning brush is stored. Also, it is possible to prevent the lower end portion of the brush body from being contaminated or deformed during transportation.

In the storage container according to the seventh aspect of the present invention, when the substrate cleaning brush is attached to the brush rotating shaft of the substrate cleaning device or the substrate cleaning brush is removed from the brush rotating shaft, the nut is manually pressed. Although it is rotated, the operation of attaching and detaching the nut to the locking protrusion on the top surface of the brush holder is
It can be performed without trouble even if the brush for cleaning the substrate is not touched.

In the container of the invention according to claim 8, when the substrate cleaning brush is housed in the container body to close the opening of the upper surface of the container body, the locking protrusion protruding from the upper surface of the brush holder is covered. The brush for substrate cleaning fits loosely in the recess on the inner upper surface of the body, and the movement of the substrate cleaning brush is restricted or allowed within the allowable range by the inner upper surface of the lid. There is no fear of contacting the inner wall surface and causing deformation.

[Brief description of drawings]

FIG. 1 is a perspective view showing an example of an embodiment of the present invention and showing a state in which a storage container is separated and a cleaning brush is not stored in the storage container.

FIG. 2 is a partial vertical cross-sectional view showing a state where a cleaning brush is stored in the storage container shown in FIG.

FIG. 3 is a partial vertical cross-sectional view showing a state in which a cleaning brush stored in the container body of the storage container shown in FIG. 1 is attached to a brush rotating shaft of a substrate cleaning apparatus.

FIG. 4 shows another example of the engaging means between the container body and the lid,
It is a partial longitudinal cross-sectional view of the state where the cleaning brush is stored in the storage container.

FIG. 5 is a partial vertical cross-sectional view of a state in which a cleaning brush is stored in a storage container, showing still another example of the engaging means between the container body and the cover and another configuration example of the cover.

FIG. 6 is a partial vertical cross-sectional view showing a configuration example of a storage container for storing a cleaning brush having a configuration different from that of the cleaning brush shown in FIGS. 1 to 5, in which the cleaning brush is stored in the storage container. It is a figure.

FIG. 7 is a cleaning brush shown in FIGS. 1 to 5 and FIG. 6;
Shows a configuration example of a storage container for storing the cleaning brush of a different configuration from the cleaning brush shown in, the cleaning brush housed in the container body is attached to the brush rotating shaft of the substrate cleaning device FIG.

FIG. 8 is a perspective view showing an example of an embodiment of the present invention different from FIGS. 1 to 7 and showing a state in which a storage container is separated and a cleaning brush is not stored in the storage container.

9 is a partial vertical cross-sectional view showing a state in which a cleaning brush is stored in the storage container shown in FIG.

10 is a partial vertical cross-sectional view showing a state in which the cleaning brush housed in the container body of the housing container shown in FIG. 8 is attached to the brush rotation shaft of the substrate cleaning apparatus.

FIG. 11 is a partial vertical cross-sectional view for explaining an example of a method of attaching a cleaning brush to a brush rotating shaft of a substrate cleaning apparatus.

FIG. 12 is a partial vertical cross-sectional view for explaining a conventional example of a container that stores a cleaning brush.

[Explanation of symbols]

10, 76, 96, 98, 120, 164 Cleaning brush 12, 78, 100, 166 Brush holder 14, 80, 126, 168 Brush main body 16, 102, 132 Brush holder locking protrusion 18, 134 Locking protrusion Male screw 22 and 84 Rotation preventing protrusion 24, 56, 66, 104 and 150 Container body 26, 58, 72 and 152 Lid body 28, 68 and 106 Upper side wall of container body 30 Upper accommodation space of container body 32 Container body Lower side wall of the container 34 Bottom wall of the container body 36 Lower accommodation space of the container body 38 Locking recess 40 Stepped surface 42 Male screw 44, 160 of the upper side wall Recesses of the lid 46, 64, 162 Gasket 48, 92, 108, 170 Brush rotation shaft 54 Nut 60 Engagement part of container body 62 Fitting insertion part of lid 70 Annular groove 74 Annular protrusion 82 Brush Female screw of holder 122 Upper attachment part of brush holder 124 Lower holding part of brush holder 146 Notch for detent 148 Storage container 154 Bar-shaped protrusion for detent 156 Support rod-shaped protrusion 158 Male screw for container body

Front page continuation (72) Inventor Akihiko Morita, 322 Hazushi Furukawa-cho, Fushimi-ku, Kyoto Dainichi Screen Manufacturing Co., Ltd.Rakusai Plant Screen Manufacturing Co., Ltd. Rakusai Office

Claims (8)

[Claims] 1. A substrate cleaning brush having a brush main body for cleaning a substrate attached to a brush holder having an engaging portion formed on the upper surface side for engaging with a brush rotating shaft of a substrate cleaning device. The storage container has a side wall and a bottom wall, each of which has an opening at an upper surface and forms an accommodation space for accommodating the brush holder and the brush main body of the substrate cleaning brush, and a support portion for supporting the brush holder is formed on an inner surface side. The container main body is provided with an engaging means that is formed in a shape that closes the upper opening of the container main body, and that engages with the container main body when the upper opening of the container main body is closed. A container for cleaning a substrate cleaning brush, comprising: a lid body that restricts movement of the substrate cleaning brush housed in the container body in a closed state or within a permissible range. 2. The side wall of the container main body is composed of an upper side wall forming an upper storage space for storing a brush holder of a substrate cleaning brush and a lower side wall forming a lower storage space for storing the brush main body. A connecting portion between the side wall and the lower side wall is formed on a stepped surface, the diameter of the lower accommodating space is smaller than the diameter of the brush holder and larger than the diameter of the brush main body, and the diameter of the upper accommodating space. 2. The container for cleaning a substrate cleaning brush according to claim 1, wherein the diameter of the brush is larger than the diameter of the brush holder, and the supporting portion for supporting the brush holder is formed by the stepped surface. 3. The depth of the lower accommodating space of the container body is larger than the protruding length dimension of the brush main body from the lower surface of the brush holder of the substrate cleaning brush, and the diameter of the upper accommodating space is accommodated in the lower accommodating space. The storage container for a brush for cleaning a substrate according to claim 2, wherein the brush main body is sized to regulate the movement of the brush holder so that the brush main body does not contact the inner peripheral surface of the lower side wall. 4. A locking protrusion having a male screw threaded thereon is integrally formed at a central portion of an upper surface of a brush holder of a substrate cleaning brush, and the locking protrusion is attached to a brush rotating shaft of a substrate cleaning device. The female screw that is screwed to the male screw of is rotatably engaged, and the rotation prevention protrusion is integrally formed on the outer peripheral surface of the brush holder of the substrate cleaning brush. The container for cleaning a substrate cleaning brush according to claim 2 or 3, wherein an anti-rotation concave portion that engages with the anti-rotation protrusion is formed on the inner peripheral surface of the side wall. 5. The side wall of the container body is formed into a cylindrical shape having an inner diameter slightly larger than the diameter of the brush holder of the substrate cleaning brush, and a protrusion is provided on the inner peripheral surface of the side wall to form the brush holder. The container for brushes for cleaning a substrate according to claim 1, wherein a supporting portion for supporting is formed by an upper end of the protrusion. 6. The height of the upper end of the protrusion protruding from the inner peripheral surface of the side wall of the container body from the inner bottom surface of the container body is the protrusion length of the brush body from the lower surface of the brush holder of the substrate cleaning brush. The storage container for a brush for cleaning a substrate according to claim 5, which is made larger. 7. A locking protrusion having a male screw threaded thereon is integrally formed in a central portion of an upper surface of a brush holder of a substrate cleaning brush, and the locking protrusion is attached to a brush rotating shaft of a substrate cleaning device. The external thread is threadedly engaged with a female threaded nut to rotatably engage it, and the rotation stop notch is formed in the lower end of the outer peripheral part of the brush holder of the substrate cleaning brush. The container for cleaning a substrate cleaning brush according to claim 5 or 6, wherein an anti-rotation protrusion that engages with the anti-rotation notch is formed on the inner peripheral surface of the substrate. 8. A locking protrusion, which is locked to the brush rotation shaft of the substrate cleaning device, is integrally formed at the center of the upper surface of the brush holder of the substrate cleaning brush, and the upper opening of the container body is opened. When the lid is closed, the inner upper surface of the lid comes into contact with or close to the upper surface of the brush holder to regulate or limit the movement of the substrate cleaning brush within a permissible range, and the brush holder is provided at the center of the inner upper surface of the lid. 2. A recess is formed in which the locking protrusion of FIG.
A container for a substrate cleaning brush according to any one of claims 1 to 7.