JP3328490B2 - Substrate cleaning brush housing - Google Patents
Substrate cleaning brush housingInfo
- Publication number
- JP3328490B2 JP3328490B2 JP35027695A JP35027695A JP3328490B2 JP 3328490 B2 JP3328490 B2 JP 3328490B2 JP 35027695 A JP35027695 A JP 35027695A JP 35027695 A JP35027695 A JP 35027695A JP 3328490 B2 JP3328490 B2 JP 3328490B2
- Authority
- JP
- Japan
- Prior art keywords
- brush
- cleaning
- substrate
- housing
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 title claims description 111
- 239000000758 substrate Substances 0.000 title claims description 60
- 238000003860 storage Methods 0.000 claims description 61
- 239000007788 liquid Substances 0.000 claims description 22
- 239000011148 porous material Substances 0.000 claims description 14
- 239000011261 inert gas Substances 0.000 claims description 8
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 7
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 230000006866 deterioration Effects 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- 238000007789 sealing Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical group O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 229940079593 drug Drugs 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004088 foaming agent Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Brushes (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、半導体ウエハ、
液晶表示装置用或いはフォトマスク用のガラス基板、光
ディスク用の基板等の各種基板を水平姿勢に保持して鉛
直軸回りに回転させながら基板上に洗浄液を供給して基
板をブラシ洗浄する基板洗浄装置において使用される基
板洗浄用ブラシとそのブラシ収納容器とから構成される
基板洗浄用ブラシ収納体に関する。[0001] The present invention relates to a semiconductor wafer,
A substrate cleaning apparatus that brushes a substrate by supplying a cleaning liquid onto the substrate while rotating various substrates such as a glass substrate for a liquid crystal display device or a photomask, a substrate for an optical disk, etc. in a horizontal position and rotating about a vertical axis. The present invention relates to a substrate cleaning brush housing composed of a substrate cleaning brush and a brush storage container used in the method.
【０００２】[0002]
【従来の技術】洗浄用ブラシによって基板を洗浄する基
板洗浄装置の構成及び動作の１例を簡単に説明すると、
基板、例えば半導体ウエハをスピンチャックの上面側に
真空吸着によって水平姿勢に保持し、スピンチャックに
保持された基板を鉛直軸回りに回転させながら、その基
板上に洗浄液を供給し、ブラシ保持アームのブラシ回転
軸を回転させ、その回転軸に固着されブラシ保持アーム
によって懸吊状態に保持された洗浄用ブラシを自転させ
ながら上方位置から下降させて、洗浄用ブラシの下端を
基板表面に接近させ、洗浄用ブラシ下端を基板表面に接
触させ或いは近接させた状態で、自転している洗浄用ブ
ラシを回転している基板の表面に沿って基板上を移動さ
せることにより、基板の洗浄を行なうようにする。この
ような基板洗浄装置においては、使用により劣化した洗
浄用ブラシを交換したり、基板の種類や洗浄の目的など
に応じて洗浄用ブラシの種類を変えたりしている。この
ため、洗浄用ブラシをブラシ保持アームのブラシ回転軸
に取り付け、また、洗浄用ブラシをブラシ回転軸から取
り外すことができるようにしている。2. Description of the Related Art One example of the structure and operation of a substrate cleaning apparatus for cleaning a substrate with a cleaning brush will be briefly described.
A substrate, for example, a semiconductor wafer is held in a horizontal position by vacuum suction on the upper surface side of the spin chuck, and while the substrate held by the spin chuck is rotated around a vertical axis, a cleaning liquid is supplied onto the substrate, and a brush holding arm is provided. Rotating the brush rotating shaft, lowering the cleaning brush fixed to the rotating shaft and held in a suspended state by the brush holding arm from the upper position while rotating, bringing the lower end of the cleaning brush closer to the substrate surface, With the lower end of the cleaning brush contacting or approaching the substrate surface, the substrate is cleaned by moving the rotating cleaning brush over the substrate along the surface of the rotating substrate. I do. In such a substrate cleaning apparatus, the cleaning brush deteriorated by use is replaced, or the type of the cleaning brush is changed according to the type of the substrate or the purpose of cleaning. Therefore, the cleaning brush is attached to the brush rotating shaft of the brush holding arm, and the cleaning brush can be detached from the brush rotating shaft.
【０００３】洗浄用ブラシは、ブラシホルダとブラシ本
体とから構成され、ブラシ本体としては、下面側に多数
の毛を植設して形成されたものが一般に使用されている
が、最近では、例えばポリビニルアルコールを原料とし
て製造され親水性を有するスポンジ状の多孔質素材によ
って形成されたものが使用され始めている。このような
多孔質素材で形成されたブラシ本体をブラシホルダに取
着した洗浄用ブラシは、従来、乾燥状態で容器内に収納
されて保管及び輸送され、半導体製造工場等のユーザに
おいて、洗浄用ブラシを使用する前に、ブラシ本体に純
水等の洗浄液を十分に含浸させて、ブラシ本体を一旦湿
潤状態にしてから、ダミー基板を使用してブラシ洗浄を
行ない、その後に、ライン稼動を行なうようにしてい
た。ところが、親水性を有するスポンジ状の多孔質素材
からなるブラシ本体は、乾いた状態では全く弾力性が無
く硬質物化しており、これに純水等を含浸させて使用可
能な状態にまで軟らかくするためには、相当の時間がか
かり、ライン稼動に入るまでに３０分〜６時間といった
多くの時間を費やしていた。[0003] A cleaning brush is composed of a brush holder and a brush main body. As the brush main body, a brush formed by implanting a large number of bristles on the lower surface side is generally used. A sponge-like porous material which is produced from polyvinyl alcohol as a raw material and has hydrophilicity has begun to be used. A cleaning brush in which a brush body formed of such a porous material is attached to a brush holder is conventionally stored in a dry state in a container, stored and transported, and used by a user such as a semiconductor manufacturing plant for cleaning. Before using the brush, the brush body is sufficiently impregnated with a cleaning solution such as pure water to make the brush body once wet, and then the brush cleaning is performed using a dummy substrate, and then the line is operated. Was like that. However, the brush body made of a sponge-like porous material having hydrophilicity is hardened without any elasticity in a dry state, and is impregnated with pure water or the like to soften it to a usable state. Therefore, it takes a considerable amount of time, and a large amount of time such as 30 minutes to 6 hours has been spent before the line operation is started.
【０００４】そこで、容器内に液体、例えば過酸化水素
水やイソプロピルアルコールのように、ブラシ本体を腐
食させたり変質させたりすることがなく、ブラシ本体か
ら物質を溶出させることもなく、純水に溶解し、容器内
での微生物の発生を抑制する効果のある薬液、或いは純
水などの液体を収容し、その液体中に親水性を有するス
ポンジ状の多孔質素材からなるブラシ本体を浸漬させ、
容器を蓋で密閉して、洗浄用ブラシを保管し輸送する、
といったことが行なわれる。[0004] Therefore, unlike a liquid such as hydrogen peroxide solution or isopropyl alcohol in a container, the brush body is not corroded or deteriorated, substances are not eluted from the brush body, and pure water is used. Dissolve and contain a chemical solution that has the effect of suppressing the generation of microorganisms in the container, or a liquid such as pure water, and immerse the brush body made of a sponge-like porous material having hydrophilicity in the liquid,
Seal the container with a lid, store and transport the cleaning brush,
And so on.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、容器を
蓋で密閉しても、洗浄用ブラシを例えば海外などへ長距
離輸送するといったようなときには、その輸送中に容器
内から薬液が容器外へ滲出する可能性が考えられ、それ
に伴ってブラシ本体の変質等が生じる恐れがある。ま
た、洗浄用ブラシを蓋付き容器内に収納して、例えば３
ヵ月以上の長期間保管するといったような場合にも、同
様の問題が生じる恐れがある。さらに、洗浄用ブラシを
容器内に収納して長期保管する場合には、その保管中に
ブラシ本体が空気と接触して変質や劣化を生じる可能性
がある。However, even if the cleaning brush is transported over a long distance, for example, overseas, even if the container is closed with a lid, the chemical liquid leaks out of the container during transport. There is a possibility that the brush body may be deteriorated. Further, the cleaning brush is housed in a container with a lid,
A similar problem may occur when the storage is performed for a long period of more than a month. Further, when the cleaning brush is stored in a container and stored for a long period of time, the brush body may come into contact with air during the storage and may be deteriorated or deteriorated.
【０００６】この発明は、以上のような事情に鑑みてな
されたものであり、洗浄用ブラシのブラシ本体を容器内
に収納して液体中に浸漬させた状態で保管及び輸送する
場合において、洗浄用ブラシを長距離輸送したり長期保
管したりしたときでも、容器内から薬液が容器外へ滲出
することがなく、ブラシ本体の変質等が生じる恐れを無
くすことができ、また、洗浄用ブラシの保管中にブラシ
本体が空気と接触することがなく、ブラシ本体の変質や
劣化を生じる可能性の無い基板洗浄用ブラシ収納体を提
供することを目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and is intended for cleaning and transporting when the brush body of the cleaning brush is stored in a container and immersed in a liquid and stored. Even when the brush is transported for a long distance or stored for a long period of time, the chemical does not exude from the container to the outside of the container, eliminating the risk of the brush itself being deteriorated. An object of the present invention is to provide a brush housing for cleaning a substrate, in which the brush main body does not come into contact with air during storage and there is no possibility that the brush main body is deteriorated or deteriorated.
【０００７】[0007]
【課題を解決するための手段】請求項１に係る発明は、
ブラシ本体をブラシホルダに取着してなる基板洗浄用ブ
ラシと、この基板洗浄用ブラシを収納し、内部に液体が
収容され、その液体中に前記ブラシ本体が浸漬させら
れ、蓋体によって閉塞されるブラシ収納容器とからなる
基板洗浄用ブラシ収納体において、前記ブラシ収納容器
を蓋体によって開封可能に気密に封止し、かつ、ブラシ
収納容器の内部を減圧状態とし又はブラシ収納容器の内
部に不活性ガスを封入したことを特徴とする。The invention according to claim 1 is
A brush for cleaning a substrate, in which a brush body is attached to a brush holder, and a brush for cleaning the substrate are housed therein, a liquid is housed therein, and the brush body is immersed in the liquid and closed by a lid. A brush housing for cleaning a substrate, comprising: a brush housing for cleaning a substrate, the brush housing being hermetically sealed so as to be openable by a lid, and the inside of the brush housing being in a reduced pressure state or being inside the brush housing. It is characterized by filling an inert gas.
【０００８】また、請求項２に係る発明は、ブラシ本体
をブラシホルダに取着してなる基板洗浄用ブラシと、こ
の基板洗浄用ブラシの前記ブラシ本体を収納し、内部に
液体が収容され、その液体中にブラシ本体が浸漬させら
れ、前記ブラシホルダによって閉塞されるブラシ収納容
器とからなる基板洗浄用ブラシ収納体において、前記ブ
ラシ収納容器を前記ブラシホルダによって開封可能に気
密に封止し、かつ、ブラシ収納容器の内部を減圧状態と
し又はブラシ収納容器の内部に不活性ガスを封入したこ
とを特徴とする。According to a second aspect of the present invention, there is provided a brush for cleaning a substrate, wherein the brush body is attached to a brush holder, and the brush body of the brush for cleaning a substrate is accommodated therein, and a liquid is accommodated therein. In a brush cleaning body for washing a substrate, comprising a brush housing immersed in the liquid and a brush housing closed by the brush holder, the brush housing is hermetically sealed so as to be opened by the brush holder, In addition, the inside of the brush housing is decompressed or an inert gas is sealed inside the brush housing.
【０００９】請求項３に係る発明は、請求項１又は請求
項２記載の基板洗浄用ブラシ収納体において、上記ブラ
シ本体が、ポリビニルアルコールを原料として製造され
親水性を有するスポンジ状の多孔質素材によって形成さ
れたものであることを特徴とする。According to a third aspect of the present invention, in the brush housing for cleaning a substrate according to the first or second aspect, the brush body is made of polyvinyl alcohol as a raw material and has a hydrophilic sponge-like porous material. Characterized by being formed by:
【００１０】請求項１に係る発明の基板洗浄用ブラシ収
納体では、ブラシ収納容器が蓋体により、内部に液体が
収容された状態で気密に封止されるので、ブラシ収納体
を長距離輸送したり長期保管したりした場合でも、ブラ
シ収納容器内から薬液が容器外へ滲出する可能性が全く
無い。また、ブラシ収納容器の内部が減圧状態とされ又
はブラシ収納容器の内部に不活性ガスが封入されている
ため、ブラシ収納体を長期保管する場合でも、その保管
中にブラシ本体が空気と接触して変質や劣化を生じる可
能性が無い。In the brush housing for cleaning a substrate according to the first aspect of the present invention, the brush housing is hermetically sealed by the lid so that the liquid is housed therein, so that the brush housing can be transported over a long distance. There is no possibility that the drug solution will ooze out of the brush storage container from inside the brush storage container even if it is stored for a long time. Also, since the inside of the brush housing is decompressed or an inert gas is sealed inside the brush housing, even when the brush housing is stored for a long time, the brush body may come into contact with air during the storage. There is no possibility of deterioration or deterioration.
【００１１】請求項２に係る発明の基板洗浄用ブラシ収
納体では、ブラシ収納容器が基板洗浄用ブラシのブラシ
ホルダにより、内部に液体が収容された状態で気密に封
止されるので、ブラシ収納体を長距離輸送したり長期保
管したりした場合でも、ブラシ収納容器内から薬液が容
器外へ滲出する可能性が全く無い。また、ブラシ収納容
器の内部が減圧状態とされ又はブラシ収納容器の内部に
不活性ガスが封入されているため、ブラシ収納体を長期
保管する場合でも、その保管中にブラシ本体が空気と接
触して変質や劣化を生じる可能性が無い。In the brush housing for cleaning a substrate according to the second aspect of the present invention, the brush housing is hermetically sealed by the brush holder of the brush for cleaning the substrate in a state in which the liquid is housed therein. Even when the body is transported over a long distance or stored for a long period of time, there is no possibility that the drug solution will seep out of the container from inside the brush container. Also, since the inside of the brush housing is decompressed or an inert gas is sealed inside the brush housing, even when the brush housing is stored for a long time, the brush body may come into contact with air during the storage. There is no possibility of deterioration or deterioration.
【００１２】請求項３に係る発明の基板洗浄用ブラシ収
納体では、ポリビニルアルコールを原料として製造され
た多孔質素材で形成されたブラシ本体は、乾燥した状態
では非常に硬くなり、その状態のブラシ本体に純水等を
含浸させて柔軟化させるのには相当の時間を要すること
となるが、液体中に浸漬させられて保管されることによ
り、柔軟化した状態に保たれる。In the brush housing for cleaning a substrate according to the third aspect of the present invention, the brush body formed of a porous material manufactured from polyvinyl alcohol is very hard in a dry state, and the brush in that state is hardened. It takes a considerable amount of time to impregnate the main body with pure water or the like to make it soft, but the main body is kept in a softened state by being immersed in a liquid and stored.
【００１３】[0013]
【発明の実施の形態】以下、この発明の最良の実施形態
について図面を参照しながら説明する。Preferred embodiments of the present invention will be described below with reference to the drawings.
【００１４】図１ないし図３は、この発明の実施形態の
１例を示し、図１は、基板洗浄用ブラシ収納体を分解し
た状態を示す斜視図、図２は、収納容器に洗浄用ブラシ
を収納した状態の基板洗浄用ブラシ収納体を示す部分縦
断面図、図３は、洗浄用ブラシを基板洗浄装置のブラシ
回転軸に取着した状態を示す部分縦断面図である。FIGS. 1 to 3 show an embodiment of the present invention. FIG. 1 is a perspective view showing an exploded state of a substrate cleaning brush housing, and FIG. And FIG. 3 is a partial longitudinal sectional view showing a state in which the cleaning brush is attached to a brush rotating shaft of the substrate cleaning apparatus.
【００１５】この基板洗浄用ブラシ収納体は、洗浄用ブ
ラシ１０と収納容器３８とから構成されている。洗浄用
ブラシ１０は、上部取着部１２と下部保持部１４とから
なるブラシホルダにブラシ本体１６を保持して構成され
ている。ブラシ本体１６は、上半部が大径に形成され、
下半部が大径部１８より小径の小径部２０となってい
る。このブラシ本体１６は、親水性を有するスポンジ状
の多孔質素材、例えばポリビニルアルコールを原料とし
た多孔質素材により形成されている。多孔質素材は、例
えば、ポリビニルアルコールに酸を触媒としてホルムア
ルデヒドを結合させるホルマール化反応によりポリビニ
ルホルマールを生成し、その際、気孔生成剤を加えて気
孔形成を行ない、不溶性の多孔質基質が完成した後、気
泡生成剤を抽出することにより製造される。この素材に
より形成されたブラシ本体１６は、連続的な気孔が形成
され、親水性を有し、湿潤時には良好な柔軟性、弾力性
を呈し、乾燥時には全く弾力性が無くなって硬質物化す
る。This brush housing for cleaning a substrate comprises a cleaning brush 10 and a housing 38. The cleaning brush 10 is configured by holding a brush body 16 in a brush holder including an upper attachment portion 12 and a lower holding portion 14. The brush body 16 has an upper half formed with a large diameter,
The lower half is a small diameter portion 20 having a smaller diameter than the large diameter portion 18. The brush body 16 is formed of a sponge-like porous material having hydrophilicity, for example, a porous material made of polyvinyl alcohol as a raw material. For example, the porous material generates polyvinyl formal by a formalization reaction in which formaldehyde is bound to polyvinyl alcohol using an acid as a catalyst, and at this time, a pore forming agent is added to form pores, and an insoluble porous substrate is completed. Later, it is manufactured by extracting the foaming agent. The brush body 16 formed of this material has continuous pores, has hydrophilicity, exhibits good flexibility and elasticity when wet, and has no elasticity when dry and hardens.
【００１６】ブラシホルダの上部取着部１２の上面中央
部には、洗浄用ブラシ１０を基板洗浄装置のブラシ回転
軸に取着するための係止部２２が一体に突設されてお
り、係止部２２に雄ねじ２４が螺刻されている。また、
係止部２２の上端面には、その中央部に角穴２６が軸心
線方向に穿設されている。上部取着部１２の下半部は、
上半部に比べて若干細く形成されており、この下半部の
嵌合部２８に円筒状の下部保持部１４の上端部が嵌着さ
れる。図１中の符号３０は、上部取着部１２の嵌合部２
８の外周面に形設された係止小突起であり、符号３２
は、嵌合部２８に下部保持部１４の上端部を嵌着したと
きに係止小突起３０と係合する係止小凹部である。下部
保持部１４の外径寸法は、上部取着部１２の上半部の外
径と同じにし、また、下部保持部１４の内径寸法は、ブ
ラシ本体１６の大径部１８の外径より僅かに大きくされ
ている。また、下部保持部１４の下端近くの内周面に
は、支持環状部３４が一体に形設されている。支持環状
部３４の内径寸法は、ブラシ本体１６の小径部２０の外
径より僅かに大きくかつ大径部１８の外径より小さくさ
れている。また、下部保持部１４の下端には、互いに１
８０°の角度をなす位置関係で２個所に回り止め用切欠
き３６が形成されている。このブラシホルダは、例えば
ポリプロピレン等のプラスチック材によって形成され
る。At the center of the upper surface of the upper attachment portion 12 of the brush holder, a locking portion 22 for attaching the cleaning brush 10 to the brush rotating shaft of the substrate cleaning device is integrally formed and protruded. A male screw 24 is threaded on the stop 22. Also,
A square hole 26 is formed in the center of the upper end surface of the locking portion 22 in the axial direction. The lower half of the upper attachment section 12
It is formed slightly thinner than the upper half, and the upper end of the cylindrical lower holding portion 14 is fitted to the lower half fitting portion 28. Reference numeral 30 in FIG. 1 denotes a fitting portion 2 of the upper mounting portion 12.
8 is a small locking projection formed on the outer peripheral surface of
Is a small locking recess that engages with the small locking projection 30 when the upper end of the lower holding portion 14 is fitted to the fitting portion 28. The outer diameter of the lower holding part 14 is the same as the outer diameter of the upper half of the upper attachment part 12, and the inner diameter of the lower holding part 14 is slightly smaller than the outer diameter of the large diameter part 18 of the brush body 16. Has been enlarged. Further, on the inner peripheral surface near the lower end of the lower holding portion 14, a support annular portion 34 is integrally formed. The inner diameter of the support annular portion 34 is slightly larger than the outer diameter of the small diameter portion 20 of the brush body 16 and smaller than the outer diameter of the large diameter portion 18. In addition, the lower end of the lower holding portion 14 has
Detents 36 for preventing rotation are formed at two positions with a positional relationship of 80 °. This brush holder is formed of a plastic material such as polypropylene.
【００１７】ブラシホルダにブラシ本体１６を保持する
には、下部保持部１４の支持環状部３４の孔にブラシ本
体１６の小径部２０を挿入して、下部保持部１４内にブ
ラシ本体１６を収容した後、下部保持部１４の上端部に
上部取着部１２の嵌合部２８を嵌着させるようにすれば
よい。このとき、ブラシ本体１６は、下部保持部１４の
支持環状部３４によって支持されるとともに、上面が上
部取着部１２の下面に当接して、ブラシホルダに対する
上下方向の移動が規制され、また、下部保持部１４の内
周面によってブラシホルダに対する横方向の移動が規制
される。そして、ブラシ本体１６がブラシホルダに保持
されたときに、ブラシ本体１６の下端面が下部保持部１
４の下端より下方へ突き出た状態になる。In order to hold the brush main body 16 in the brush holder, the small diameter portion 20 of the brush main body 16 is inserted into a hole of the support annular portion 34 of the lower holding portion 14, and the brush main body 16 is housed in the lower holding portion 14. After that, the fitting part 28 of the upper attachment part 12 may be fitted to the upper end of the lower holding part 14. At this time, the brush main body 16 is supported by the support annular portion 34 of the lower holding portion 14, and the upper surface abuts on the lower surface of the upper attachment portion 12, thereby restricting vertical movement with respect to the brush holder. The movement of the lower holder 14 in the lateral direction with respect to the brush holder is restricted by the inner peripheral surface. When the brush body 16 is held by the brush holder, the lower end surface of the brush body 16 is
4 protrudes downward from the lower end.
【００１８】収納容器３８は、容器本体４０と蓋体４２
とから構成されており、容器本体４０及び蓋体４２は、
例えばポリプロピレン等のプラスチック材によって形成
されている。容器本体４０は、その上面が開口し、内径
寸法が洗浄用ブラシ１０のブラシホルダの外径より僅か
に大きくされている。また、容器本体４０の内周面に
は、互いに１８０°の角度をなす位置関係で２個所に、
容器本体４０の内底面から容器本体４０の軸線方向に沿
って延びる回り止め用棒状突起４４がそれぞれ突設され
ており、また、両回り止め用棒状突起４４を含めて互い
に６０°ずつの角度をなす位置関係で４個所に、容器本
体４０の内底面から容器本体４０の軸線方向に沿って延
び回り止め用棒状突起４４より若干短い支持用棒状突起
４６がそれぞれ突設されている。そして、図２に示すよ
うに、洗浄用ブラシ１０を容器本体４０内へ、ブラシホ
ルダの下部保持部１４の回り止め用切欠き３６の位置と
容器本体４０の回り止め用棒状突起４４の位置とを合わ
せて嵌挿すると、４個の支持用棒状突起４６の上端に洗
浄用ブラシ１０のブラシホルダの下部保持部１４の下端
が当接し、４個の支持用棒状突起４６によって洗浄用ブ
ラシ１０が容器本体４０内において支持されるととも
に、各回り止め用棒状突起４４の上端部に各回り止め用
切欠き３６がそれぞれ嵌合して、洗浄用ブラシ１０が容
器本体４０内において軸心線回りに回動しないように固
定される。このとき、洗浄用ブラシ１０のブラシ本体１
６の下端面が容器本体４０の内底面に接触しないように
なっている。The storage container 38 includes a container body 40 and a lid 42.
And the container body 40 and the lid 42 are
For example, it is formed of a plastic material such as polypropylene. The upper surface of the container body 40 is open, and the inner diameter is slightly larger than the outer diameter of the brush holder of the cleaning brush 10. In addition, the inner peripheral surface of the container body 40 has two positions at an angle of 180 ° with each other,
A detent rod-like projection 44 extending from the inner bottom surface of the container main body 40 along the axial direction of the container main body 40 is provided to project from the inner bottom surface of the container main body 40. Four supporting rod-like projections 46 extending from the inner bottom surface of the container main body 40 along the axial direction of the container main body 40 and being slightly shorter than the detent rod-like projections 44 are provided at four locations in the positional relationship. Then, as shown in FIG. 2, the cleaning brush 10 is inserted into the container main body 40, and the position of the rotation preventing notch 36 of the lower holder 14 of the brush holder and the position of the rotation preventing rod-like projection 44 of the container main body 40 are determined. And the lower end of the lower holding portion 14 of the brush holder of the cleaning brush 10 abuts on the upper end of the four supporting rod-shaped projections 46, and the cleaning brush 10 is held by the four supporting rod-shaped projections 46. The cleaning brush 10 is supported in the container main body 40, and each of the rotation preventing notches 36 is fitted to the upper end of each of the rotation preventing rod-shaped projections 44, so that the cleaning brush 10 rotates around the axis in the container main body 40. It is fixed so as not to rotate. At this time, the brush body 1 of the cleaning brush 10
The lower end surface of 6 does not contact the inner bottom surface of the container body 40.
【００１９】蓋体４２の上面には、開封用把手４８が一
体形成されている。また、蓋体４２の内側上面の中央部
に、洗浄用ブラシ１０の係止部２２が遊嵌する凹部５０
が形成されている。そして、蓋体４２の内側上面の、凹
部５０の形成部分以外の面が、洗浄用ブラシ１０のブラ
シホルダ上面と接触もしくは近接して洗浄用ブラシ１０
の移動を規制もしくは許容範囲で制限する制動部をなす
ことになる。An opening handle 48 is integrally formed on the upper surface of the lid 42. A concave portion 50 into which the locking portion 22 of the cleaning brush 10 is loosely fitted is provided at the center of the inner upper surface of the lid 42.
Are formed. Then, the surface of the inner upper surface of the lid 42 other than the portion where the concave portion 50 is formed is in contact with or close to the upper surface of the brush holder of the cleaning brush 10 and the cleaning brush 10
Is restricted or restricted within an allowable range.
【００２０】洗浄用ブラシ１０は、収納容器３８の容器
本体４０内に図２に示すような状態で収納され、容器本
体４０内には純水或いは過酸化水素水やイソプロピール
アルコールなどの薬液が注入され、その後に、蓋体４２
によって容器本体４０の上面開口が気密に封止される。
この封止は、例えば、容器本体４０の上端縁に蓋体４２
の下面側周縁部を溶着させることにより行なう。そし
て、封止の際に、収納容器３８内から空気を排除して収
納容器３８内部を減圧状態にする。或いは、封止の際
に、収納容器３８内に不活性ガス、例えば窒素ガスを封
入するようにする。The cleaning brush 10 is stored in a container body 40 of a storage container 38 in a state as shown in FIG. 2, and a chemical solution such as pure water, hydrogen peroxide solution, or isopropyl alcohol is stored in the container body 40. Injected and then the lid 42
Thereby, the upper opening of the container body 40 is hermetically sealed.
This sealing is performed, for example, by attaching the lid 42 to the upper edge of the container body 40.
By welding the peripheral edge of the lower surface side. Then, at the time of sealing, air is removed from the inside of the storage container 38 to reduce the pressure inside the storage container 38. Alternatively, at the time of sealing, an inert gas such as a nitrogen gas is sealed in the storage container 38.
【００２１】収納容器３８内に注入する純水や薬液など
の液体の量は、保管や輸送中に収納容器３８が傾いたり
逆さになったりしても、ブラシ本体１６の全体が常に純
水中に浸漬された状態となる程度としておく。容器本体
４０に蓋体４２を溶着させて収納容器３８を気密に封止
した状態においては、上記したように収納容器３８内で
の洗浄用ブラシ１０の移動が規制されもしくは許容範囲
で制限され、保管や輸送中に洗浄用ブラシ１０が収納容
器３８内で大きく揺動することはない。また、ブラシ本
体１６の下端面が容器本体４０の内底面に接触しないよ
うに保持されるので、洗浄用ブラシ１０の保管や輸送中
にブラシ本体１６が変形するようなことがない。さら
に、収納容器３８が気密に封止された状態においては、
保管や輸送中に収納容器３８内から純水や薬液が容器外
へ滲出したり蒸発したりすることがなく、また、保管や
輸送中に収納容器３８内へパーティクルが混入する心配
も無い。また、洗浄用ブラシ１０のブラシ本体１６は、
常に全体が液体中に浸漬しているので、柔軟化し弾力性
を有する状態に保たれる。従って、洗浄用ブラシ１０
は、収納容器３８から取り出して直ちに基板の洗浄処理
に使用することが可能である。The amount of liquid such as pure water or chemical liquid to be injected into the storage container 38 is such that the entire brush body 16 is always in pure water even if the storage container 38 is tilted or turned upside down during storage or transportation. To the extent that it is immersed in In a state where the lid 42 is welded to the container main body 40 to hermetically seal the storage container 38, the movement of the cleaning brush 10 in the storage container 38 is restricted or limited to an allowable range as described above. The cleaning brush 10 does not swing greatly in the storage container 38 during storage or transportation. Further, since the lower end surface of the brush main body 16 is held so as not to contact the inner bottom surface of the container main body 40, the brush main body 16 is not deformed during storage or transportation of the cleaning brush 10. Furthermore, in a state where the storage container 38 is hermetically sealed,
No pure water or chemical solution leaks out or evaporates from the inside of the storage container 38 during storage or transportation, and there is no risk of particles entering the storage container 38 during storage or transportation. The brush body 16 of the cleaning brush 10 is
Since the whole is always immersed in the liquid, it is kept soft and elastic. Therefore, the cleaning brush 10
Can be used for cleaning the substrate immediately after being taken out of the storage container 38.
【００２２】次に、収納容器３８に収納された洗浄用ブ
ラシ１０を基板洗浄装置のブラシ回転軸に取着する操作
について、図３を参照しながら説明しておく。Next, the operation of attaching the cleaning brush 10 stored in the storage container 38 to the brush rotating shaft of the substrate cleaning apparatus will be described with reference to FIG.
【００２３】図３に示すように、洗浄用ブラシ１０が取
着されるブラシ回転軸５４は、その下端近くにフランジ
部５６が一体に形設されており、そのフランジ部５６よ
り下端側の部分５８が、洗浄用ブラシ１０の係止部２２
の上端面中央部に穿設された角穴２６と嵌合する角棒状
に形成されている。また、ブラシ回転軸５４のフランジ
部５６には、洗浄用ブラシ１０の係止部２２の雄ねじ２
４に螺合する雌ねじが螺刻されたナット６０が、ブラシ
回転軸５４の周りに回転可能に係合して保持されてい
る。As shown in FIG. 3, the brush rotating shaft 54 to which the cleaning brush 10 is attached has a flange portion 56 integrally formed near the lower end thereof, and a portion on the lower end side of the flange portion 56 is formed. 58 is the locking portion 22 of the cleaning brush 10
Is formed in the shape of a square rod that fits into a square hole 26 formed in the center of the upper end surface. Further, the male screw 2 of the locking portion 22 of the cleaning brush 10 is provided on the flange portion 56 of the brush rotating shaft 54.
A nut 60 threaded with a female screw to be screwed into the nut 4 is rotatably engaged and held around the brush rotation shaft 54.
【００２４】ブラシ回転軸５４に洗浄用ブラシ１０を取
着するには、まず、収納容器３８の蓋体４２を取り去っ
て容器本体４０の上面を開口させる。これには、片方の
手で収納容器３８の容器本体４０を把持し、もう一方の
手の人差指を蓋体４２の開封用把手４８に引っ掛けて、
開封用把手４８を斜め上向きに引き上げるようにする。
これにより、蓋体４２の下面側周縁部の溶着部分が容器
本体４０の上端縁から引き剥がされ、蓋体４２が容器本
体４０から分離される。従って、容器本体４０の上端縁
と蓋体４２の下面側周縁部との溶着強度は、気密が保持
される限度において溶着部分を容易に引き剥がすことが
できる程度としておくことが必要である。In order to attach the cleaning brush 10 to the brush rotating shaft 54, first, the lid 42 of the storage container 38 is removed, and the upper surface of the container body 40 is opened. To do this, hold the container body 40 of the storage container 38 with one hand and hook the index finger of the other hand on the opening handle 48 of the lid 42,
The opening handle 48 is lifted obliquely upward.
As a result, the welded portion of the lower peripheral edge of the lid 42 is peeled off from the upper edge of the container body 40, and the lid 42 is separated from the container body 40. Therefore, the welding strength between the upper end edge of the container body 40 and the peripheral edge on the lower surface side of the lid 42 needs to be such that the welded portion can be easily peeled off as long as airtightness is maintained.
【００２５】容器本体４０から蓋体４２が取り去られる
と、洗浄用ブラシ１０のブラシホルダの上面側が容器本
体４０の上面開口から覗いた状態となるので、次に、容
器本体４０に洗浄用ブラシ１０を収納したまま、容器本
体４０を手で持って洗浄用ブラシ１０を下方からブラシ
回転軸５４に接近させ、係止部２２の角穴２６をブラシ
回転軸５４の下端部の角棒状部分５８に嵌合させる。そ
して、容器本体４０を手で支え持った状態で、係止部２
２の雄ねじ２４にナット６０を螺合させて締め付ける。
この際、係止部２２の雄ねじ２４にナット６０の雌ねじ
が螺合した状態で、手でナット６０を回転させるように
操作するが、ブラシホルダの下部保持部１４の回り止め
用切欠き３６が容器本体４０の内周面の回り止め用棒状
突起４４の上端部に係合しているため、容器本体４０を
手で把持しておくことにより、ナット６０を回転させて
も洗浄用ブラシ１０が共回りすることはない。以上のよ
うにして、図３に示すように洗浄用ブラシ１０がブラシ
回転軸５４に取着されると、容器本体４０を下向きに引
き上げて洗浄用ブラシ１０から抜き出す。この間、洗浄
用ブラシ１０には一切手を触れずに、上記した一連の操
作が行なわれる。When the lid 42 is removed from the container body 40, the upper side of the brush holder of the cleaning brush 10 is viewed from the upper opening of the container body 40. While holding the container body, the cleaning brush 10 is approached to the brush rotating shaft 54 from below by holding the container body 40 by hand, and the square hole 26 of the locking portion 22 is fitted to the square rod-shaped portion 58 at the lower end of the brush rotating shaft 54. Fit. Then, while holding the container body 40 by hand, the locking portion 2
The nut 60 is screwed into the second male screw 24 and tightened.
At this time, in a state where the female screw of the nut 60 is screwed into the male screw 24 of the locking portion 22, the nut 60 is operated by hand to rotate the nut 60. The cleaning brush 10 is engaged with the upper end of the rotation-preventing rod-shaped projection 44 on the inner peripheral surface of the container main body 40, so that the cleaning brush 10 can be held even if the nut 60 is rotated by holding the container main body 40 by hand. There is no co-rotation. As described above, when the cleaning brush 10 is attached to the brush rotating shaft 54 as shown in FIG. 3, the container main body 40 is pulled downward and pulled out of the cleaning brush 10. During this time, the above-described series of operations is performed without touching the cleaning brush 10 at all.
【００２６】次に、図４に部分縦断面図を示した基板洗
浄用ブラシ収納体は、収納容器に蓋体が無く、収納容器
がブラシホルダの一部によって開封可能に気密に封止さ
れるように構成されている。Next, in the brush housing for cleaning a substrate shown in a partial longitudinal sectional view in FIG. 4, the housing has no lid, and the housing is hermetically sealed so as to be opened by a part of the brush holder. It is configured as follows.
【００２７】このブラシ収納体は、洗浄用ブラシ６２と
収納容器６４とから構成されており、洗浄用ブラシ６２
は、図１ないし図３に示したブラシ収納体と同様に、上
部取着部６６と下部保持部６８とからなるブラシホルダ
にブラシ本体７０を保持して構成されている。但し、こ
のブラシ収納体では、ブラシホルダの上部取着部６６の
外径が下部保持部６８の外径より大きく形成されてい
て、ブラシホルダの上部取着部６６の外径と収納容器６
４の外径とが同等になっている。一方、収納容器６４
は、蓋体を有しておらず、図１ないし図３に示したブラ
シ収納体の容器本体４０と同様の構成を備えている。そ
して、このブラシ収納体では、洗浄用ブラシ６２のブラ
シホルダの上部取着部６６の下端周縁部と収納容器６４
の上端外周縁部とが、環状連接帯７２を介して一体に連
接している。また、環状連接帯７２には開封用把手７４
が一体形成されており、図示されていないが、環状連接
帯７２には開封用把手７４の近くに切込みが設けられて
いる。This brush housing comprises a cleaning brush 62 and a storage container 64.
Is configured such that a brush main body 70 is held in a brush holder including an upper attachment portion 66 and a lower holding portion 68, similarly to the brush housing shown in FIGS. However, in this brush housing, the outer diameter of the upper mounting portion 66 of the brush holder is formed larger than the outer diameter of the lower holding portion 68, and the outer diameter of the upper mounting portion 66 of the brush holder and the outer diameter of the storage container 6 are different.
4 has the same outer diameter. On the other hand, the storage container 64
Has no lid and has the same configuration as the container body 40 of the brush housing shown in FIGS. 1 to 3. In this brush housing, the lower end peripheral portion of the upper attachment portion 66 of the brush holder of the cleaning brush 62 and the storage container 64
And an upper end outer peripheral edge thereof are integrally connected via an annular connecting band 72. Further, an opening handle 74 is provided on the annular connecting band 72.
Are formed integrally, and although not shown, a cut is provided in the annular connecting band 72 near the opening handle 74.
【００２８】図４に示したブラシ収納体では、洗浄用ブ
ラシ６２は、そのブラシホルダの一部である下部保持部
６８とブラシ本体７０とだけが収納容器６４内に収納さ
れる。そして、図１ないし図３に示したブラシ収納体と
同様に、収納容器６４内に純水或いは過酸化水素水やイ
ソプロピールアルコールなどの薬液が注入される。その
注入後に、ブラシホルダの上部取着部６６の下端周縁部
と収納容器６４の上端外周縁部とに跨がるように、上部
取着部６６の下端周縁部と収納容器６４の上端外周縁部
とに環状連接帯７２を溶着させ、収納容器６４の上面開
口を気密に封止する。そして、封止の際に、収納容器６
４内から空気を排除して収納容器６４内部を減圧状態に
し、或いは、収納容器６４内に窒素ガス等の不活性ガス
を封入するようにする。In the brush housing shown in FIG. 4, only the lower holding portion 68 and the brush main body 70, which are part of the brush holder, of the cleaning brush 62 are housed in the housing 64. Then, similarly to the brush housing shown in FIGS. 1 to 3, a chemical solution such as pure water, a hydrogen peroxide solution, or isopropyl alcohol is injected into the housing 64. After the injection, the lower peripheral edge of the upper mounting portion 66 and the upper peripheral edge of the storage container 64 are laid so as to straddle the lower peripheral edge of the upper mounting portion 66 of the brush holder and the upper peripheral edge of the storage container 64. The annular connecting band 72 is welded to the portion and the upper opening of the storage container 64 is hermetically sealed. Then, at the time of sealing, the storage container 6
The inside of the storage container 64 is depressurized by removing air from the inside of the storage container 4, or an inert gas such as nitrogen gas is sealed in the storage container 64.
【００２９】図４に示したブラシ収納体の洗浄用ブラシ
６２をブラシ回転軸に取着する際には、片方の手で収納
容器６４を把持し、もう一方の手の人差指を環状連接帯
７２の開封用把手７４に引っ掛けて、開封用把手７４を
外向きに引っ張るようにする。これにより、環状連接帯
７２が切込み個所で切断されるとともその一部が上部取
着部６６及び収納容器６４から引き剥がされる。次い
で、円を描くように開封用把手７４を外向きに引っ張る
ことにより、環状連接帯７２が上部取着部６６及び収納
容器６４の全周から引き剥がされ、洗浄用ブラシ６２と
収納容器６４とが分離する。従って、環状連接帯７２と
上部取着部６６及び収納容器６４との溶着程度は、気密
が保持される限度において環状連接帯７２を上部取着部
６６及び収納容器６４から容易に引き剥がすことができ
る程度としておく。洗浄用ブラシ６２と収納容器６４と
が分離した後は、図１ないし図３に示したブラシ収納体
と同様の上記操作により洗浄用ブラシ６２をブラシ回転
軸に取着するようにすればよい。When attaching the cleaning brush 62 of the brush housing shown in FIG. 4 to the brush rotating shaft, the holding container 64 is gripped by one hand, and the index finger of the other hand is connected to the annular connecting band 72. Of the opening handle 74, and pull the opening handle 74 outward. As a result, the annular connecting band 72 is cut at the cut point, and a part thereof is peeled off from the upper attachment portion 66 and the storage container 64. Next, by pulling the opening handle 74 outward in a circular shape, the annular connecting band 72 is peeled off from the entire periphery of the upper attachment portion 66 and the storage container 64, and the cleaning brush 62 and the storage container 64 Separate. Therefore, the degree of welding between the annular connecting band 72 and the upper attachment portion 66 and the storage container 64 is such that the annular connecting band 72 can be easily peeled off from the upper attachment portion 66 and the storage container 64 as long as airtightness is maintained. Keep as much as possible. After the cleaning brush 62 and the storage container 64 are separated from each other, the cleaning brush 62 may be attached to the brush rotating shaft by the same operation as that of the brush housing shown in FIGS. 1 to 3.
【００３０】この発明に係る基板洗浄用ブラシ収納体の
構成は以上説明した通りであるが、この発明の範囲は、
上記説明並びに図面の内容に限定されるものでないこと
は勿論である。すなわち、洗浄用ブラシのブラシホルダ
の構成やブラシ本体の形状、素材などは、上記説明のも
のに限定されないし、また、ブラシ収納容器を蓋体によ
って開封可能に気密に封止する手段や、ブラシ収納容器
をブラシホルダによって開封可能に気密に封止する手段
も、どのようなものであってもよい。Although the structure of the brush housing for cleaning a substrate according to the present invention is as described above, the scope of the present invention is as follows.
It goes without saying that the present invention is not limited to the above description and the contents of the drawings. That is, the configuration of the brush holder of the cleaning brush, the shape of the brush main body, the material, and the like are not limited to those described above, and a means for hermetically sealing the brush storage container so as to be openable with a lid, Any means may be used to hermetically seal the storage container so that it can be opened by the brush holder.
【００３１】[0031]
【発明の効果】請求項１及び請求項２に係る各発明の基
板洗浄用ブラシ収納体をそれぞれ使用すると、洗浄用ブ
ラシのブラシ本体を容器内に収納して液体中に浸漬させ
た状態で長距離輸送したり長期保管したりした場合で
も、容器内から薬液が容器外へ滲出することがないた
め、ブラシ本体の変質等が生じる恐れが無くなり、ま
た、洗浄用ブラシの保管中にブラシ本体が空気と接触す
ることがないため、ブラシ本体の変質や劣化を生じる可
能性が無くなる。According to the first and second aspects of the present invention, each of the brush housings for cleaning a substrate is used, and the brush body of the cleaning brush is housed in a container and long in a state of being immersed in a liquid. Even when transported over long distances or stored for a long period of time, the chemical does not exude from the inside of the container to the outside of the container, so there is no risk of deterioration of the brush main body, etc. Since there is no contact with air, there is no possibility of the brush main body being deteriorated or deteriorated.
【００３２】請求項３に係る発明の基板洗浄用ブラシ収
納体では、ポリビニルアルコールを原料として製造され
た多孔質素材で形成されたブラシ本体が、純水中に浸漬
させられて柔軟化した状態に保たれるとともに、変質や
劣化を生じることがない。In the brush housing for cleaning a substrate according to the third aspect of the present invention, the brush body made of a porous material manufactured from polyvinyl alcohol is softened by being immersed in pure water. It is maintained and does not cause deterioration or deterioration.
【図１】請求項１に係る発明の実施形態の１例を示し、
基板洗浄用ブラシ収納体を分解した状態を示す斜視図で
ある。FIG. 1 shows an example of an embodiment of the invention according to claim 1,
It is a perspective view which shows the state which disassembled the brush storage body for board | substrate washing | cleaning.
【図２】図１に示した基板洗浄用ブラシ収納体の収納容
器に洗浄用ブラシを収納した状態を示す部分縦断面図で
ある。FIG. 2 is a partial longitudinal sectional view showing a state in which a cleaning brush is stored in a storage container of the substrate cleaning brush storage body shown in FIG.
【図３】図１に示した基板洗浄用ブラシ収納体の洗浄用
ブラシを基板洗浄装置のブラシ回転軸に取着した状態を
示す部分縦断面図である。3 is a partial longitudinal sectional view showing a state in which a cleaning brush of the substrate cleaning brush housing shown in FIG. 1 is attached to a brush rotating shaft of the substrate cleaning apparatus.
【図４】請求項２に係る発明の実施形態の１例を示し、
基板洗浄用ブラシ収納体の収納容器に洗浄用ブラシのブ
ラシ本体を収納した状態を示す部分縦断面図である。FIG. 4 shows an example of the embodiment of the invention according to claim 2,
FIG. 4 is a partial longitudinal sectional view showing a state in which a brush main body of the cleaning brush is stored in a storage container of the substrate cleaning brush storage body.
１０、６２ 洗浄用ブラシ １２、６６ ブラシホルダの上部取着部 １４、６８ ブラシホルダの下部保持部 １６、７０ ブラシ本体 ３８、６４ 収納容器 ４０ 容器本体 ４２ 蓋体 ４８、７４ 開封用把手 ７２ 環状連接帯 10, 62 Cleaning brush 12, 66 Upper attachment part of brush holder 14, 68 Lower holder part of brush holder 16, 70 Brush body 38, 64 Storage container 40 Container body 42 Lid 48, 74 Opening handle 72 Ring connection band
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平７−275783（ＪＰ，Ａ) 特開 平９−38588（ＪＰ，Ａ) 特開 平９−94543（ＪＰ，Ａ) 特開 平９−167748（ＪＰ，Ａ) 特開 平８−282755（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) H01L 21/304 A46B 17/08 B08B 1/00 ──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-7-277578 (JP, A) JP-A-9-38588 (JP, A) JP-A-9-94543 (JP, A) JP-A 9-945 167748 (JP, A) JP-A-8-282755 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) H01L 21/304 A46B 17/08 B08B 1/00
Claims (3)
る基板洗浄用ブラシと、 この基板洗浄用ブラシを収納し、内部に液体が収容さ
れ、その液体中に前記ブラシ本体が浸漬させられ、蓋体
によって閉塞されるブラシ収納容器とからなる基板洗浄
用ブラシ収納体において、 前記ブラシ収納容器を蓋体によって開封可能に気密に封
止し、かつ、ブラシ収納容器の内部を減圧状態とし又は
ブラシ収納容器の内部に不活性ガスを封入したことを特
徴とする基板洗浄用ブラシ収納体。A brush for cleaning a substrate, wherein the brush body is attached to a brush holder; and a brush for storing the substrate, wherein the brush is immersed in the liquid, and the brush body is immersed in the liquid. In a brush housing for cleaning a substrate comprising a brush housing closed by a lid, the brush housing is hermetically sealed so as to be openable by a lid, and the inside of the brush housing is decompressed or brushed. A brush storage body for cleaning a substrate, wherein an inert gas is sealed in the storage container.
る基板洗浄用ブラシと、 この基板洗浄用ブラシの前記ブラシ本体を収納し、内部
に液体が収容され、その液体中にブラシ本体が浸漬させ
られ、前記ブラシホルダによって閉塞されるブラシ収納
容器とからなる基板洗浄用ブラシ収納体において、 前記ブラシ収納容器を前記ブラシホルダによって開封可
能に気密に封止し、かつ、ブラシ収納容器の内部を減圧
状態とし又はブラシ収納容器の内部に不活性ガスを封入
したことを特徴とする基板洗浄用ブラシ収納体。2. A brush for cleaning a substrate, wherein the brush body is attached to a brush holder; and a brush body for the brush for cleaning the substrate is housed therein, and a liquid is housed therein, and the brush body is immersed in the liquid. A brush storage container for cleaning the substrate comprising a brush storage container closed by the brush holder, wherein the brush storage container is hermetically sealed so as to be opened by the brush holder, and the interior of the brush storage container is sealed. A brush housing for cleaning a substrate, wherein the housing is in a reduced pressure state or an inert gas is sealed inside the brush housing.
原料として製造され親水性を有するスポンジ状の多孔質
素材によって形成されたものである請求項１又は請求項
２記載の基板洗浄用ブラシ収納体。3. The brush housing for cleaning a substrate according to claim 1, wherein the brush main body is made of a sponge-like porous material having hydrophilicity and manufactured from polyvinyl alcohol.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35027695A JP3328490B2 (en) | 1995-12-21 | 1995-12-21 | Substrate cleaning brush housing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35027695A JP3328490B2 (en) | 1995-12-21 | 1995-12-21 | Substrate cleaning brush housing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09181024A JPH09181024A (en) | 1997-07-11 |
| JP3328490B2 true JP3328490B2 (en) | 2002-09-24 |
Family
ID=18409404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP35027695A Expired - Fee Related JP3328490B2 (en) | 1995-12-21 | 1995-12-21 | Substrate cleaning brush housing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3328490B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7368992B2 (en) * | 2019-09-27 | 2023-10-25 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing equipment and brush storage container |
-
1995
- 1995-12-21 JP JP35027695A patent/JP3328490B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09181024A (en) | 1997-07-11 |
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