JPH08262739A - Device and method for preparing developer - Google Patents
Device and method for preparing developerInfo
- Publication number
- JPH08262739A JPH08262739A JP6602795A JP6602795A JPH08262739A JP H08262739 A JPH08262739 A JP H08262739A JP 6602795 A JP6602795 A JP 6602795A JP 6602795 A JP6602795 A JP 6602795A JP H08262739 A JPH08262739 A JP H08262739A
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- developing
- mixing tank
- pure water
- tank
- solution
- Prior art date
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- Photosensitive Polymer And Photoresist Processing (AREA)
- Accessories For Mixers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、現像液調合装置及び現
像液の調合方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a developing solution blending device and a developing solution blending method.
【０００２】[0002]
【従来の技術】ＬＣＤ（液晶ディスプレイ）やＬＳＩ
（大規模集積回路）の製造において要求される微細なパ
ターンを形成するために、いわゆるリソグラフィーが用
いられる。リソグラフィーに用いられるホトレジストに
は、ポジ型及びネガ型があるが、特にポジ型が寸法精度
及び解像度が優れることから、多用されている。ポジ型
レジストの現像液としては、無機又は有機のアルカリ水
溶液が用いられるが、アルカリ金属による汚染を防ぐた
め、有機アルカリ水溶液、特に水酸化テトラメチルアン
モニウム水溶液が好適に用いられ、その使用時の濃度は
約２．４重量％という希薄なものである。ところが、原
液として製造される水酸化テトラメチルアンモニウム水
溶液の濃度は、通常５〜４０重量％程度であり、したが
って使用にあたっては、該原液を純水により希釈する必
要がある。ところで、微細なパターンを正確に得るため
には、露光されたレジストを精度良く現像することが重
要であり、そのためには用いられる現像液の組成につい
て、所定の濃度に厳密に管理する必要がある。2. Description of the Related Art LCD (liquid crystal display) and LSI
So-called lithography is used to form a fine pattern required in the manufacture of (large-scale integrated circuit). The photoresist used for lithography includes a positive type and a negative type, and the positive type is widely used since it has excellent dimensional accuracy and resolution. As a positive resist developer, an inorganic or organic alkaline aqueous solution is used, but in order to prevent contamination with an alkali metal, an organic alkaline aqueous solution, particularly a tetramethylammonium hydroxide aqueous solution is preferably used, and its concentration at the time of use Is a thin substance of about 2.4% by weight. However, the concentration of the tetramethylammonium hydroxide aqueous solution produced as a stock solution is usually about 5 to 40% by weight, and therefore, it is necessary to dilute the stock solution with pure water before use. By the way, in order to accurately obtain a fine pattern, it is important to develop the exposed resist with high precision, and for that purpose, it is necessary to strictly control the composition of the developer used to a predetermined concentration. .
【０００３】従来、現像液は現像液メーカーで濃度や組
成を正確に管理して調合し、ユーザーであるＬＳＩメー
カーやＬＣＤメーカーに供給されていた。現像液の主要
成分であるアルカリ濃度は前記のとおり約２．４重量％
程度であるが、原液は５〜４０重量％程度の水溶液で得
られることを考慮すると、現像液メーカーからユーザー
に対して希釈後の現像液を供給する場合は、現像液メー
カーからユーザーへの輸送のための容器費や輸送費が割
高になるという問題点を有していた。この問題を解消す
るためには、現像液メーカーからユーザーへは原液を供
給し、ユーザー側で原液を希釈して用いればよいことに
なる。しかしながら、希釈後の現像液の濃度は、前記の
とおり、所定の濃度に厳密に調合して維持管理する必要
があり、かつ工業的実施の観点からは、迅速で省力的な
実施が可能であることも要求される。かかる状況におい
て、現像液の濃度を所定の値に厳密に調合して維持管理
することができ、かつ迅速で省力的な実施が可能である
現像液調合装置及び現像液調合方法は実現されていなか
った。Conventionally, the developer has been prepared by accurately controlling the concentration and composition by the developer manufacturer and supplying it to the users such as LSI maker and LCD maker. The alkali concentration, which is the main component of the developer, is about 2.4% by weight as described above.
Considering that the undiluted solution can be obtained as an aqueous solution of about 5 to 40% by weight, when the developer is supplied from the developer manufacturer to the user after dilution, it is transported from the developer manufacturer to the user. There was a problem that the container cost and the transportation cost for the product became expensive. In order to solve this problem, it is sufficient to supply the stock solution from the developer manufacturer to the user and dilute the stock solution on the user side for use. However, as described above, the concentration of the diluted developing solution must be strictly adjusted to a predetermined concentration and maintained, and from the viewpoint of industrial implementation, rapid and labor-saving implementation is possible. Is also required. In such a situation, a developing solution blending apparatus and a developing solution blending method capable of precisely blending and maintaining the concentration of a developing solution to a predetermined value and capable of rapid and labor-saving implementation have not been realized. It was
【０００４】[0004]
【発明が解決しようとする課題】かかる現状に鑑み、本
発明が解決しようとする課題は、現像液の濃度を所定の
値に厳密に調合して維持管理することができ、かつ迅速
で省力的な実施が可能である現像液調合装置及び現像液
調合方法を提供する点に存する。In view of the present situation, the problem to be solved by the present invention is that the concentration of the developing solution can be strictly adjusted to a predetermined value and maintained, and the method is quick and labor-saving. It is an object of the present invention to provide a developing solution preparation device and a developing solution preparation method that can be implemented in various ways.
【０００５】[0005]
【課題を解決するための手段】本発明者らは、上記の課
題を解決すべく鋭意検討の結果、本発明に到達した。The present inventors have arrived at the present invention as a result of intensive studies to solve the above problems.
【０００６】すなわち、本発明のうち、一の発明は、現
像原液と純水を混合することにより所定濃度の現像成分
を含有する現像液を得る現像液調合装置であって、現像
原液及び純水を受け入れて混合する手段を具備した混合
槽（１）と、混合槽内の液量を検出するための混合槽用
ロードセル（２）と、混合槽内の液の密度を自動的に測
定するための自動液体密度計（３）と、自動液体密度計
からの出力信号と混合槽用ロードセルからの出力信号に
基づいて混合槽内の現像液中の現像成分濃度を所定濃度
に調節する現像成分濃度調節手段（４）と、所定濃度の
現像成分を含有する混合槽内の現像液を受け入れて貯留
する貯槽（５）を備えた現像液調合装置に係るものであ
る。That is, one aspect of the present invention is a developing solution preparation device for obtaining a developing solution containing a developing component of a predetermined concentration by mixing a developing stock solution and pure water, which comprises a developing stock solution and pure water. A mixing tank (1) equipped with a means for receiving and mixing, a mixing tank load cell (2) for detecting the amount of liquid in the mixing tank, and for automatically measuring the density of the liquid in the mixing tank Automatic liquid densitometer (3), and the concentration of the developing component that adjusts the concentration of the developing component in the developing solution in the mixing tank to a predetermined concentration based on the output signal from the automatic liquid densitometer and the output signal from the load cell for the mixing tank. The present invention relates to a developing solution preparation device provided with an adjusting means (4) and a storage tank (5) for receiving and storing the developing solution in a mixing tank containing a predetermined concentration of developing components.
【０００７】また、本発明のうち、他の発明は、現像原
液と純水を混合することにより所定濃度の現像成分を含
有する現像液を得る現像液の調合方法において、上記の
装置を用い、現像原液及び純水を混合槽（１）に受け入
れて混合し、該混合槽内の液の密度を自動液体密度計
（３）により測定し、現像成分濃度調節手段（４）によ
り所定濃度の現像成分を含有する現像液を混合槽に得、
該現像液を貯槽（５）へ供給して貯留する現像液の調合
方法に係るものである。Another aspect of the present invention is a method for preparing a developing solution, which comprises mixing a developing stock solution and pure water to obtain a developing solution containing a developing component having a predetermined concentration. The undiluted developing solution and pure water are received in the mixing tank (1) and mixed, the density of the solution in the mixing tank is measured by the automatic liquid densitometer (3), and the development component concentration adjusting means (4) develops the solution to a predetermined concentration. A developer containing the components is obtained in a mixing tank,
The present invention relates to a method for preparing a developer which is supplied to and stored in the storage tank (5).
【０００８】以下、本発明を詳細に説明する。The present invention will be described in detail below.
【０００９】本発明に用いられる現像液は、特に制限は
ないが、具体例としては無機又は有機のアルカリ水溶液
をあげることができる。近年のＬＳＩの微細化を実現し
得るという観点からは、金属類の含有量の非常に少ない
有機アルカリ水溶液が好適であり、なかでも水酸化テト
ラメチルアンモニウム水溶液が特に好ましい。なお、現
像原液は、通常５〜４０重量％の現像成分を含有する水
溶液として得られる。そして、本発明により、かかる現
像原液を純水で希釈することにより、約２．４重量％程
度の所定の濃度に厳密に調整された現像液が得られるの
である。The developing solution used in the present invention is not particularly limited, and specific examples thereof include an inorganic or organic alkaline aqueous solution. From the viewpoint that the miniaturization of LSIs in recent years can be realized, an organic alkali aqueous solution having a very low content of metals is preferable, and among them, a tetramethylammonium hydroxide aqueous solution is particularly preferable. The stock solution for development is usually obtained as an aqueous solution containing 5 to 40% by weight of a developing component. Further, according to the present invention, by diluting such a developing solution with pure water, a developing solution precisely adjusted to a predetermined concentration of about 2.4% by weight can be obtained.
【００１０】本発明において用いられる純水としては、
金属イオンの含有量が数ｐｐｂ以下のものが好ましく、
金属イオンの含有量が０．１ｐｐｂ以下のいわゆる超純
水が更に好ましい。Pure water used in the present invention includes
The metal ion content is preferably several ppb or less,
So-called ultrapure water having a metal ion content of 0.1 ppb or less is more preferable.
【００１１】本発明においては、現像原液及び純水を受
け入れて混合する手段を具備した混合槽（１）が用いら
れる。具体例としては、現像原液受入れ口、純水受入れ
口及び攪拌装置を有する混合槽をあげることができる。
攪拌方法としては、混合槽の内部に設置された攪拌機を
用いる方法、混合槽内の液の一部をポンプにより抜き出
して再度混合槽に循環する方法、該循環方法の循環ライ
ンにラインミキサーを設置する方法などをあげることが
できる。更に、現像原液及び純水を混合槽に受け入れる
前に、ラインミキサーなどの混合装置で混合し、その後
該混合物を混合槽に受け入れてもよく、この方法は混合
槽内の液の濃度がより迅速に均一になるという観点か
ら、好ましい方法である。In the present invention, the mixing tank (1) equipped with a means for receiving and mixing the stock developing solution and pure water is used. As a specific example, a mixing tank having a developing solution receiving port, pure water receiving port, and a stirring device can be mentioned.
As a stirring method, a method of using a stirrer installed inside the mixing tank, a method of extracting a part of the liquid in the mixing tank with a pump and circulating it again in the mixing tank, and a line mixer installed in the circulation line of the circulation method You can list the ways to do it. Furthermore, before the development stock solution and pure water are received in the mixing tank, they may be mixed in a mixing device such as a line mixer, and then the mixture may be received in the mixing tank. In this method, the concentration of the liquid in the mixing tank is faster. It is a preferable method from the viewpoint of uniform uniformity.
【００１２】本発明においては、混合槽内の液量を検出
するための混合槽用ロードセル（２）が用いられる。該
ロードセルはその測定値を出力信号として発信できる機
能を有するものが必要である。In the present invention, a mixing tank load cell (2) for detecting the amount of liquid in the mixing tank is used. The load cell needs to have a function of transmitting the measured value as an output signal.
【００１３】本発明においては、混合槽内の液の密度を
自動的に測定するため、自動液体密度計（３）が用いら
れる。自動液体密度計としては、特に限定することなく
用いられ、要するに測定対象である現像成分の密度を正
確に測定でき、かつその測定値を出力信号として発信で
きる機能を備えているものであればよく、市販のものの
うちから選んで使用することができるが、たとえば振動
式自動液体密度計が好適に使用される。なお、混合槽内
の現像液は、混合槽又は混合槽の回りに設置された循環
ラインから所望量抜き出し、自動液体密度計へ供給する
のがよい。In the present invention, an automatic liquid density meter (3) is used to automatically measure the density of the liquid in the mixing tank. The automatic liquid densitometer may be used without particular limitation, in short, as long as it has a function capable of accurately measuring the density of the developing component to be measured and transmitting the measured value as an output signal. Although a commercially available one can be selected and used, for example, a vibration type automatic liquid density meter is preferably used. It is preferable that a desired amount of the developer in the mixing tank is extracted from the mixing tank or a circulation line installed around the mixing tank and supplied to the automatic liquid densitometer.
【００１４】本発明においては、自動液体密度計からの
出力信号と混合槽用ロードセルからの出力信号に基づい
て混合槽内の現像液中の現像成分濃度を所定濃度に調節
する現像成分濃度調節手段（４）が用いられる。なお、
該手段の好適な具体例については後記する。In the present invention, the developing component concentration adjusting means for adjusting the developing component concentration in the developing solution in the mixing tank to a predetermined concentration based on the output signal from the automatic liquid densitometer and the output signal from the mixing tank load cell. (4) is used. In addition,
A preferred specific example of the means will be described later.
【００１５】本発明においては、所定濃度の現像成分を
含有する混合槽内の現像液を受け入れて貯留する貯槽
（５）が用いられる。該貯槽については、特に制限はな
い。In the present invention, the storage tank (5) for receiving and storing the developing solution in the mixing tank containing the developing component of a predetermined concentration is used. The storage tank is not particularly limited.
【００１６】なお、本発明の装置の接液部分は、不純物
である金属の混入を防ぐため、テフロンなどのフッ素樹
脂やポリオレフィン系の樹脂などの樹脂材料又は該樹脂
でコーティングされた材料を用いることが好ましい。For the liquid contact portion of the apparatus of the present invention, a resin material such as a fluororesin such as Teflon or a polyolefin resin or a material coated with the resin is used in order to prevent mixing of metal as an impurity. Is preferred.
【００１７】本発明のうち現像液の調合方法に係る発明
は、現像原液と純水を混合することにより所定濃度の現
像成分を含有する現像液を得る現像液の調合方法におい
て、請求項１記載の装置を用い、現像原液及び純水を混
合槽（１）に受け入れて混合し、該混合槽内の液の密度
を自動液体密度計（３）により測定し、現像成分濃度調
節手段（４）により所定濃度の現像成分を含有する現像
液を混合槽に得、該現像液を貯槽（５）へ供給して貯留
する現像液の調合方法である。The invention relating to the method for preparing a developing solution in the present invention is a method for preparing a developing solution, wherein a developing solution containing a developing component having a predetermined concentration is obtained by mixing a developing stock solution and pure water. Using the above apparatus, the undiluted developing solution and pure water are received in the mixing tank (1) and mixed, and the density of the liquid in the mixing tank is measured by an automatic liquid densitometer (3), and a developing component concentration adjusting means (4) Is a method of preparing a developing solution in which a developing solution containing a developing component having a predetermined concentration is obtained in a mixing tank, and the developing solution is supplied to and stored in a storage tank (5).
【００１８】次に、本発明の好適な具体例について説明
する。Next, a preferred specific example of the present invention will be described.
【００１９】本発明の好適な具体例のひとつとして、現
像成分濃度調節手段（４）が、自動液体密度計からの出
力信号と混合槽用ロードセルからの出力信号に基づいて
求められる混合槽へ追加して供給すべき所定量の現像原
液を計量貯留するためのロードセル付現像原液計量貯槽
（６）及び上記信号に基づいて求められる混合槽へ追加
して供給すべき所定量の純水を計量貯留するためのロー
ドセル付純水計量貯槽（７）からなるもの（図１）をあ
げることができる。As one of the preferred embodiments of the present invention, the developing component concentration adjusting means (4) is added to the mixing tank obtained based on the output signal from the automatic liquid densitometer and the output signal from the mixing tank load cell. Metering storage tank (6) for developing stock solution with a load cell for metering and storing a predetermined quantity of development stock solution to be supplied and a predetermined quantity of pure water to be additionally supplied to the mixing tank determined based on the above signal. An example is a pure water measuring storage tank (7) with a load cell (Fig. 1).
【００２０】具体的な使用法は次のとおりである。ま
ず、純水を混合槽へ投入し、その量を混合槽に設置され
たロードセルにて計量する。次に、現像原液を混合槽へ
投入し、その量を混合槽に設置されたロードセルにて計
量する。次に、混合槽に設置されたポンプを運転するこ
とにより混合槽内の液を十分に混合する。次に、混合槽
に設置された自動液体密度計により混合槽内の液体の密
度を測定し、予め求めておいた現像液の密度と現像液中
の現像成分の濃度の関係を用い、追加して混合槽へ供給
すべき純水又は現像原液の量を自動演算機構により求め
る。次に、該追加して供給すべき純水又は現像原液をロ
ードセル付純水計量貯槽又はロードセル付現像原液計量
貯槽へ供給する。この際、各計量貯槽に設置されたロー
ドセルにより、純水又は現像原液の量を正確に測定して
貯留する。なお、この目的のため、各計量貯槽に設置さ
れたロードセルは混合槽に設置されたロードセルよりも
小容量でかつ高精度のものを用いる。次に、上記貯留さ
れた純水又は現像原液を混合槽へ移送する。次に、混合
槽に設置されたポンプを運転することにより混合槽内の
液を十分に混合する。次に、混合槽に設置された自動液
体密度計により混合槽内の液体の密度を測定し所定の現
像成分濃度の現像液が得られていることを確認する。The specific usage is as follows. First, pure water is charged into a mixing tank, and the amount is measured by a load cell installed in the mixing tank. Next, the undiluted developing solution is charged into the mixing tank, and the amount thereof is measured by the load cell installed in the mixing tank. Next, the liquid in the mixing tank is mixed sufficiently by operating the pump installed in the mixing tank. Next, the density of the liquid in the mixing tank was measured with an automatic liquid densitometer installed in the mixing tank, and the density of the developing solution and the concentration of the developing component in the developing solution were used in advance to add the density. Then, the amount of pure water or developing stock solution to be supplied to the mixing tank is calculated by an automatic calculation mechanism. Then, the pure water or the developing stock solution to be additionally supplied is supplied to the pure water measuring storage tank with the load cell or the developing stock solution measuring storage tank with the load cell. At this time, the amount of pure water or the undiluted developing solution is accurately measured and stored by the load cell installed in each measuring storage tank. For this purpose, the load cell installed in each metering storage tank should have a smaller capacity and higher accuracy than the load cell installed in the mixing tank. Next, the stored pure water or stock developing solution is transferred to the mixing tank. Next, the liquid in the mixing tank is mixed sufficiently by operating the pump installed in the mixing tank. Next, the density of the liquid in the mixing tank is measured with an automatic liquid densitometer installed in the mixing tank, and it is confirmed that a developer having a predetermined developing component concentration is obtained.
【００２１】なお、上記の方法は、極めて高精度下にお
いて所定の現像成分濃度を含有する現像液を得ることが
できるという観点から、特に優れた方法である。The above method is a particularly excellent method from the viewpoint that a developing solution containing a predetermined developing component concentration can be obtained with extremely high accuracy.
【００２２】更に、本発明の好適な他の具体例として、
現像成分濃度調節手段（４）が、現像原液の混合槽への
供給配管上に設けられた現像原液自動流量調節装置
（８）及び純水の混合槽への供給配管上に設けられた純
水自動流量調節装置（９）からなるもの（図２）をあげ
ることができる。そして、この装置を用いる方法として
は、現像原液及び純水を混合槽に受け入れて混合し、該
混合槽内の液の密度を自動液体密度計により測定し、自
動液体密度計からの出力信号及びロードセルからの出力
信号を現像原液自動流量調節装置（８）及び／又は純水
自動流量調節装置（９）に入力させて現像原液及び／又
は純水の混合槽への供給流量を調節することにより所定
濃度の現像成分を含有する現像液を混合槽に得、該現像
液を貯槽へ供給して貯留する方法をあげることができ
る。Furthermore, as another preferred specific example of the present invention,
The developing component concentration adjusting means (4) is provided with an automatic developing stock solution flow rate adjusting device (8) provided on the supply pipe for the developing stock solution to the mixing tank, and pure water provided on the supply pipe for the pure water mixing tank. The automatic flow controller (9) (FIG. 2) may be mentioned. Then, as a method using this apparatus, the developing stock solution and pure water are received in a mixing tank and mixed, and the density of the liquid in the mixing tank is measured by an automatic liquid densitometer, and an output signal from the automatic liquid densitometer and By inputting the output signal from the load cell to the developing stock solution automatic flow rate adjusting device (8) and / or the pure water automatic flow rate adjusting device (9) to adjust the supply flow rate of the developing stock solution and / or pure water to the mixing tank. A method in which a developer containing a developing component of a predetermined concentration is obtained in a mixing tank and the developer is supplied to a storage tank and stored therein can be mentioned.
【００２３】自動流量調節手段としては、特に制限はな
く、要するに自動液体密度計及びロードセルからの出力
信号として得られる混合槽中の現像液の重量と、現像液
中の現像成分濃度と目的とする現像成分所定濃度との偏
差に応じて現像原液及び／又は純水の混合槽への供給液
量を調節する機能を有するものであればよい。かかる機
能を有するシステムは、通常の設計方法に従い、市販の
ユニットを適当に組み合わせて作成することができる。
なお、現像原液及び純水の混合槽への供給ラインに、各
流量を検出し、該流量を出力できる機能を有する流量検
出装置を設け、上記の重量、偏差及び該流量の値に基づ
いて、現像原液及び／又は純水の混合槽への供給流量を
調節することにより、極めて精密で迅速な自動調合が可
能となる。The automatic flow rate adjusting means is not particularly limited, and in short, the weight of the developing solution in the mixing tank obtained as an output signal from the automatic liquid densitometer and the load cell, and the concentration of the developing component in the developing solution are intended. Any material may be used as long as it has a function of adjusting the amount of the stock solution for development and / or the pure water supplied to the mixing tank according to the deviation from the predetermined concentration of the developing component. A system having such a function can be produced by appropriately combining commercially available units according to a usual design method.
In the supply line to the mixing tank for developing stock solution and pure water, each flow rate is detected, and a flow rate detecting device having a function of outputting the flow rate is provided. Based on the weight, the deviation, and the value of the flow rate, By adjusting the flow rates of the stock developing solution and / or pure water supplied to the mixing tank, extremely precise and rapid automatic preparation becomes possible.
【００２４】[0024]
【実施例】以下、本発明を実施例により説明する。 実施例１ 図１の装置を用いた。なお、混合槽の容量は１ｍ3 と
し、混合槽及び貯槽の内部、攪拌機の接液部、ポンプの
接液部は全てテフロン製とし、循環ラインや供給ライン
等配管は全てテフロン製とした。The present invention will be described below with reference to examples. Example 1 The apparatus of FIG. 1 was used. The volume of the mixing tank was 1 m 3 , the insides of the mixing tank and the storage tank, the liquid contact part of the stirrer, and the liquid contact part of the pump were all made of Teflon, and all the piping such as the circulation line and the supply line were made of Teflon.
【００２５】まず、純水（約０．８ｍ3 ）を混合槽へ投
入した。次に、現像原液（水酸化テトラメチルアンモニ
ウムの約１５重量％水溶液）（約０．８ｍ3 ）を混合槽
へ投入した。次に、混合槽に設置されたポンプを運転す
ることにより混合槽内の液を十分に混合した。この時点
において、混合槽内の液体の重量を混合槽用ロードセル
にて正確に測定した（８１０ｋｇ）。次に、混合槽に設
置された自動液体密度計により混合槽内の液体の密度を
測定し、予め求めておいた現像液の密度と現像液中の現
像成分の濃度の関係を用い、該現像成分の濃度として
２．４１０重量％を得た。更に、上記混合槽用ロードセ
ルの値と混合槽内液体の現像成分の濃度から、追加して
混合槽へ供給すべき純水の量を自動演算機構により求め
た。次に、該追加して供給すべき純水又は現像原液をロ
ードセル付純水計量貯槽又はロードセル付現像原液計量
貯槽へ供給した。この際、計量貯槽に設置されたロード
セルにより、純水の量を正確に測定して貯留した。次
に、上記貯留された純水を混合槽へ移送した。次に、混
合槽に設置されたポンプを運転することにより混合槽内
の液を十分に混合した。次に、混合槽に設置された自動
液体密度計により混合槽内の液体の密度を測定し、混合
槽内の現像液の現像成分濃度は２．３８２重量％である
ことを確認した。なお、目標濃度は０．３８０重量％で
あり、調合誤差は僅か０．０８％であった。かつ、最初
の液供給から所定濃度の現像液約０．８ｍ 3 が調合され
るまでに要した時間は２．０時間であり、この間の操作
は全て自動化されており、省力化の点においても極めて
優れた方法であることが確認された。First, pure water (about 0.8 m3) To the mixing tank
I entered. Next, the developing solution (tetramethylammonium hydroxide)
About 15% by weight aqueous solution of um) (about 0.8 m3) Mixing tank
I put it in. Next, run the pump installed in the mixing tank.
By doing so, the liquid in the mixing tank was sufficiently mixed. at the time
In the load cell for the mixing tank,
Accurately measured (810 kg). Next, install in the mixing tank.
The density of the liquid in the mixing tank can be
The density of the developing solution and the
Using the relationship of the density of the image component,
2.410 wt% was obtained. Further, the load tank for the above mixing tank
Value and the concentration of the developing component of the liquid in the mixing tank
Calculate the amount of pure water to be supplied to the mixing tank using an automatic calculation mechanism
Was. Next, the pure water or the developing stock solution to be additionally supplied is filtered.
Pure water metering storage tank with load cell or developing stock solution with load cell
It was supplied to the storage tank. At this time, the load installed in the measuring storage tank
The amount of pure water was accurately measured and stored by the cell. Next
Then, the stored pure water was transferred to the mixing tank. Then mix
Inside the mixing tank by operating the pump installed in the mixing tank
Was thoroughly mixed. Next, the automatic installed in the mixing tank
Measure the density of the liquid in the mixing tank with a liquid densitometer and mix
The developer concentration of the developer in the tank is 2.382% by weight.
It was confirmed. The target concentration is 0.380% by weight.
Yes, the compounding error was only 0.08%. And first
About 0.8m of developer of specified concentration from liquid supply 3Was prepared
It took 2.0 hours to complete the operation.
Are all automated, and extremely labor-saving
It was confirmed to be an excellent method.
【００２６】[0026]
【発明の効果】以上説明したとおり、本発明により、現
像液の濃度を所定の値に厳密に調合して維持管理するこ
とができ、かつ迅速で省力的な実施が可能である現像液
調合装置及び現像液調合方法を提供することができた。As described above, according to the present invention, the developer concentration apparatus can precisely maintain the concentration of the developer at a predetermined value and maintain it, and can implement the developer concentration quickly and labor-savingly. And a developer preparation method.
【図１】本発明の具体例を示す系統図である。FIG. 1 is a system diagram showing a specific example of the present invention.
【図２】本発明の具体例を示す系統図である。FIG. 2 is a system diagram showing a specific example of the present invention.
１ 混合槽 ２ 混合槽用ロードセル ３ 自動液体密度計 ５ 貯槽 ６ ロードセル付現像原液計量貯槽 ７ ロードセル付純水計量貯槽 ８ 現像原液自動流量調節装置 ９ 純水自動流量調節装置 1 Mixing tank 2 Mixing tank load cell 3 Automatic liquid density meter 5 Storage tank 6 Development stock solution measuring storage tank with load cell 7 Pure water measuring storage tank with load cell 8 Development stock solution automatic flow rate controller 9 Pure water automatic flow rate controller
Claims (8)
定濃度の現像成分を含有する現像液を得る現像液調合装
置であって、現像原液及び純水を受け入れて混合する手
段を具備した混合槽（１）と、混合槽内の液量を検出す
るための混合槽用ロードセル（２）と、混合槽内の液の
密度を自動的に測定するための自動液体密度計（３）
と、自動液体密度計からの出力信号と混合槽用ロードセ
ルからの出力信号に基づいて混合槽内の現像液中の現像
成分濃度を所定濃度に調節する現像成分濃度調節手段
（４）と、所定濃度の現像成分を含有する混合槽内の現
像液を受け入れて貯留する貯槽（５）を備えた現像液調
合装置。1. A developing solution preparation device for obtaining a developing solution containing a developing component having a predetermined concentration by mixing a developing stock solution and pure water, which comprises means for receiving and mixing the developing stock solution and pure water. Tank (1), mixing tank load cell (2) for detecting the amount of liquid in the mixing tank, and automatic liquid densitometer (3) for automatically measuring the density of the liquid in the mixing tank
A developing component concentration adjusting means (4) for adjusting the developing component concentration in the developing solution in the mixing tank to a predetermined concentration based on the output signal from the automatic liquid densitometer and the output signal from the mixing tank load cell; A developing solution preparation device having a storage tank (5) for receiving and storing the developing solution in a mixing tank containing a developing component having a concentration.
ウムの水溶液である請求項１記載の装置。2. The apparatus according to claim 1, wherein the stock solution for development is an aqueous solution of tetramethylammonium hydroxide.
体密度計からの出力信号と混合槽用ロードセルからの出
力信号に基づいて求められる混合槽へ追加して供給すべ
き所定量の現像原液を計量貯留するためのロードセル付
現像原液計量貯槽（６）及び上記信号に基づいて求めら
れる混合槽へ追加して供給すべき所定量の純水を計量貯
留するためのロードセル付純水計量貯槽（７）からなる
請求項１記載の装置。3. A predetermined amount of development to be additionally supplied to the mixing tank, which is obtained based on the output signal from the automatic liquid densitometer and the output signal from the mixing tank load cell, by the developing component concentration adjusting means (4). A developing stock solution metering storage tank (6) with a load cell for metering and storing a stock solution, and a pure water metering tank with a load cell for metering and storing a predetermined amount of pure water to be additionally supplied to a mixing tank obtained based on the above signal The apparatus according to claim 1, which comprises (7).
液の混合槽への供給配管上に設けられた現像原液自動流
量調節装置（８）及び純水の混合槽への供給配管上に設
けられた純水自動流量調節装置（９）からなる請求項１
記載の装置。4. A developing component concentration adjusting means (4) is provided on an automatic flow rate control device for developing stock solution (8) provided on a supply pipe for supplying a developing stock solution to a mixing tank, and on a supplying pipe to a pure water mixing tank. 2. A pure water automatic flow rate control device (9) provided.
The described device.
定濃度の現像成分を含有する現像液を得る現像液の調合
方法において、請求項１記載の装置を用い、現像原液及
び純水を混合槽（１）に受け入れて混合し、該混合槽内
の液の密度を自動液体密度計（３）により測定し、現像
成分濃度調節手段（４）により所定濃度の現像成分を含
有する現像液を混合槽に得、該現像液を貯槽（５）へ供
給して貯留する現像液の調合方法。5. A method for preparing a developing solution, which comprises mixing a developing stock solution and pure water to obtain a developing solution containing a developing component having a predetermined concentration, and mixing the developing stock solution and pure water using the apparatus according to claim 1. The mixture is received in the tank (1) and mixed, the density of the liquid in the mixing tank is measured by an automatic liquid densitometer (3), and a developing solution containing a developing component of a predetermined concentration is measured by a developing component concentration adjusting means (4). A method for preparing a developer, which is obtained in a mixing tank and is supplied to and stored in a storage tank (5).
ウムの水溶液である請求項５記載の方法。6. The method according to claim 5, wherein the stock solution for development is an aqueous solution of tetramethylammonium hydroxide.
定濃度の現像成分を含有する現像液を得る現像液の調合
方法において、請求項３記載の装置を用い、現像原液及
び純水を混合槽に受け入れて混合し、該混合槽内の液の
密度を自動液体密度計により測定し、自動液体密度計か
らの出力信号及びロードセルからの出力信号に基づいて
混合槽に追加して供給すべき現像原液又は純水の量を求
め、該求められた所定量の現像原液又は純水をロードセ
ル付現像原液計量貯槽（６）又はロードセル付純水計量
貯槽（７）に計量貯留し、該貯留された所定量の現像原
液又は水を混合槽へ供給することにより所定濃度の現像
成分を含有する現像液を混合槽に得、該現像液を貯槽へ
供給して貯留する請求項５記載の現像液の調合方法。7. A method for preparing a developing solution, which comprises mixing a developing stock solution and pure water to obtain a developing solution containing a developing component having a predetermined concentration, and mixing the developing stock solution and pure water using the apparatus according to claim 3. It should be received in a tank and mixed, the density of the liquid in the mixing tank should be measured by an automatic liquid densitometer, and the liquid should be additionally supplied to the mixing tank based on the output signal from the automatic liquid densitometer and the output signal from the load cell. The amount of the developing stock solution or the pure water is determined, and the determined predetermined amount of the developing stock solution or the pure water is metered and stored in the developing stock solution metering storage tank with a load cell (6) or the pure water metering storage tank with a load cell (7). The developer according to claim 5, wherein a developer containing a predetermined concentration of the developing component is obtained in the mixing tank by supplying a predetermined amount of the undiluted developing solution or water to the mixing tank, and the developing solution is supplied to and stored in the storage tank. Preparation method.
定濃度の現像成分を含有する現像液を得る現像液の調合
方法において、請求項４記載の装置を用い、現像原液及
び純水を混合槽に受け入れて混合し、該混合槽内の液の
密度を自動液体密度計により測定し、自動液体密度計か
らの出力信号及びロードセルからの出力信号を現像原液
自動流量調節装置（８）及び／又は純水自動流量調節装
置（９）に入力させて現像原液及び／又は純水の混合槽
への供給流量を調節することにより所定濃度の現像成分
を含有する現像液を混合槽に得、該現像液を貯槽へ供給
して貯留する請求項５記載の現像液の調合方法。8. A method for preparing a developing solution, which comprises mixing a developing solution with pure water to obtain a developing solution containing a developing component having a predetermined concentration, and mixing the developing solution with pure water using the apparatus according to claim 4. The mixture is received in a tank and mixed, the density of the liquid in the mixing tank is measured by an automatic liquid densitometer, and the output signal from the automatic liquid densitometer and the output signal from the load cell are developed developing solution automatic flow rate control device (8) and / or Alternatively, by inputting it to the pure water automatic flow rate controller (9) to adjust the flow rate of the stock solution for development and / or pure water supplied to the mixing tank, a developing solution containing a developing component of a predetermined concentration is obtained in the mixing tank, The method for preparing a developing solution according to claim 5, wherein the developing solution is supplied to and stored in a storage tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6602795A JPH08262739A (en) | 1995-03-24 | 1995-03-24 | Device and method for preparing developer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6602795A JPH08262739A (en) | 1995-03-24 | 1995-03-24 | Device and method for preparing developer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08262739A true JPH08262739A (en) | 1996-10-11 |
Family
ID=13304028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6602795A Pending JPH08262739A (en) | 1995-03-24 | 1995-03-24 | Device and method for preparing developer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08262739A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11197484A (en) * | 1998-01-08 | 1999-07-27 | Nippon Aqua Kk | Device and method for preparing liquid chemical |
| JP2002329657A (en) * | 2001-05-01 | 2002-11-15 | Tokyo Electron Ltd | Method for changing concentration of treatment liquid and treatment liquid supply system |
| KR100704195B1 (en) * | 2005-09-26 | 2007-04-06 | 주식회사 케이씨텍 | chemical providing apparatus and controlling method at the same of |
| JP2018120896A (en) * | 2017-01-23 | 2018-08-02 | 株式会社平間理化研究所 | Device for displaying carbon dioxide concentration of developer, and developer management device |
-
1995
- 1995-03-24 JP JP6602795A patent/JPH08262739A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11197484A (en) * | 1998-01-08 | 1999-07-27 | Nippon Aqua Kk | Device and method for preparing liquid chemical |
| JP2002329657A (en) * | 2001-05-01 | 2002-11-15 | Tokyo Electron Ltd | Method for changing concentration of treatment liquid and treatment liquid supply system |
| KR100704195B1 (en) * | 2005-09-26 | 2007-04-06 | 주식회사 케이씨텍 | chemical providing apparatus and controlling method at the same of |
| JP2018120896A (en) * | 2017-01-23 | 2018-08-02 | 株式会社平間理化研究所 | Device for displaying carbon dioxide concentration of developer, and developer management device |
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