JPH11197484A - Device and method for preparing liquid chemical - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device for preparing liquid chemical by which liquid chemical is supplied from a small stock tank to a line without stopping. SOLUTION: A developer is supplied from a stock tank 19 to the main tank of a developing line. When the developer stored in the stock tank 19 is made little in a process for suitably supplying the developer, the developer is adjusted in a make-up tank 15 and supplied to the stock tank 19. The previously roughly measured chemical is supplied from measuring tanks 12-1-12-3 to the make-up tank 5. While checking this composition by a sensor 16, the amount of the chemical is finely adjusted by pumps 14-1-14-3 until reaching ideal composition. Thereby, the developer of ideal composition is quickly prepared in the make-up tank 15. Since this developer is supplied to the stock tank 19 in accordance with necessity, it is prevented even if the stock tank 19 is small that the chemical is out of stock.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical liquid preparation apparatus and a chemical liquid preparation method for preparing a chemical liquid such as a pattern resist developer for a printed circuit board and supplying the same to a processing step.

[0002]

2. Description of the Related Art Developers and cleaning liquids used in a developing line and an acid cleaning line need to be replenished as needed because they undergo loss and deterioration of composition during the developing step and the cleaning step. For this reason, a stock tank for replenishing a chemical solution has conventionally been provided in the processing line, and the chemical solution has been appropriately replenished from the stock tank to the processing line.

[0003]

However, when the developing step and the processing step are continued, the amount of the chemical solution stored in the stock tank also decreases. For this reason, conventionally, a stock tank has been provided which is so large that it is not necessary to replenish the chemical solution by a staff member or to replenish it during the work period. However, the above-described conventional method has disadvantages such as an increase in the number of staff members and a need for a large-scale stock tank.

An object of the present invention is to provide a chemical solution preparation apparatus and a chemical solution preparation method capable of continuously replenishing a chemical solution in a small stock tank.

[0005]

According to the first aspect of the present invention, there is provided a stock tank for supplying a chemical to a processing step, a chemical tank for storing a plurality of types of chemicals for preparing the chemical,
Inspection of the composition of a chemical tank prepared by supplying a medicine at a high speed from the chemical tank and measuring a predetermined amount of the medicine, a building bath to which the measured medicine is supplied by the measuring tank, and a chemical solution prepared in the building bath Sensor means for performing, fine adjustment means for replenishing a small amount of medicine from the chemical tank in accordance with the detection content of the sensor means, and stock means for supplying a chemical solution, which has been finely adjusted by the fine adjustment means, to the stock tank. , Is provided.

[0006] The invention of claim 2 of this application is a chemical solution preparation method for preparing a chemical solution by mixing a plurality of types of chemicals, and replenishing the chemical solution to the processing step as required. In response, replenish the drug solution stored in the stock tank, and when the amount of the drug solution stocked in the stock tank is reduced, take out the medicine from the medicine tank in which the plurality of types of medicines are stored, and use the measuring tank. The required amount is roughly measured and the solution is prepared by putting it into the construction bath,
In the construction bath, the medicine is appropriately replenished from the medicine tank, and the prepared chemical solution has a desired composition, and then is supplied to the stock tank.

[0007]

Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram of a printed circuit board developing system to which the present invention is applied. FIG. 2 is a configuration diagram of a drug solution preparation device according to an embodiment of the present invention. FIG. 3 is a diagram showing a configuration of a measuring tank of the chemical solution preparation device.

This developing system includes a developing line unit 2 for developing a pattern resist on a printed wiring board, a chemical solution preparing device 1 equipped with various chemical solution bathing equipment, and the above-mentioned developing line unit 2 and a chemical solution preparing device 1. The control unit 3 controls the entire system. The development line section 2 includes a main tank 4 for storing a developer currently used in the development process, a conveyor 5 for transporting a printed circuit board (work) having a resist layer on which a circuit pattern is exposed, and a print transported on the conveyor. Nozzle 6 for spraying developer onto substrate, main tank 4
And a pump 8 for supplying the developing solution (chemical solution) therein to the nozzle 6. The transported printed circuit board is sprayed with a developing solution on a conveyor 5, and portions other than the resist pattern exposed during the transport are melted and removed.

On the other hand, the developing solution sucked up from the main tank 4 by the pump 8 and supplied to the nozzle 6 is partly branched and supplied to the sampling tank 9. The sampling tank 9 has various sensors 26 such as a hydrometer, an electromagnetic sensor, and a pH sensor, and the composition of the sampled developer is detected by the sensors 26. Since a new developing solution is always supplied from the main tank 4 to the sampling tank 9 by the pump 8, the main tank 4 at that time is always supplied.
Can be detected. This detection content is read into the control unit 3. The main tank 4 is provided with a liquid level sensor 25, and the detection value of the liquid level sensor 25 is also read by the control unit 3. The control unit 3 detects a decrease in the level of the developer (decrease) based on the detection value of the liquid level sensor 25.

A work sensor 7 for detecting a state of a printed wiring board (work) being conveyed is detected in front of the conveyer 5, so that a load amount in a developing process can be detected in advance. . As the work sensor 7,
For example, the development area of the resist pattern may be determined using a CCD camera or the like.

The control unit 3 has a built-in microcomputer and has a sensor interface, an operation panel, and the like. Based on this, the chemical liquid preparation device 1 is operated to supply an appropriate amount of the developer to the main tank 4.

In FIG. 2, a chemical solution preparation apparatus 1 includes a stock tank 19 for storing a developer to be supplied to the main tank 4 of the developing line section 2 and a pump 21 for transporting the developer in the stock tank 19 to the main tank 4. have. The pump 21 is controlled by the control 3. The stock tank 19 is provided with a liquid level sensor 20 for detecting the level (remaining amount) of the stored developer. The detection value of the liquid level sensor 20 is read by the control unit 3. A construction bath 15 for preparing a new developer is connected to the stock bath 19 by a tube or a pipe. This tube or pipe is opened and closed by a valve 18. The opening and closing of the valve 18 is controlled by the control unit 3.

The building bath 15 has a plurality of measuring tanks 12 (3 in FIG. 3) for measuring a plurality of chemicals (including pure water (the same applies hereinafter)) necessary for preparing the developing solution and putting them into the building bath 15. Individual)
Connected by tube or pipe. Each measuring tank 12
The pipes connecting the tub 15 to the building tub 15 are opened and closed by individual valves 13, respectively. Further, the building bath 15 is provided with a pump 17 for circulating and stirring a plurality of supplied chemicals, and a sensor 16 for detecting the composition of a chemical solution (developing solution) prepared in the bath. The sensor 16 can be composed of, for example, an electromagnetic sensor or a pH sensor. The content detected by the sensor 16 is read by the control unit 3, and the operation of the pump 17 is controlled by the control unit 3.

Each of the measuring tanks 12-1, 12-2, 12
-3 is a chemical tank 10 for storing the medicine to be measured in the tank.
-1, 10-2, and 10-3 are connected by pumps 11-1, 11-2, and 11-3 via tubes or pipes. The three chemical tanks 10 are connected to the building bath 15 by a pump 14 via a tube or a pipe, and the pump 14 can add the chemicals in the chemical tank 10 to the building bath 15 little by little. By this addition, the composition of the developer in the construction bath 15 is finely adjusted.

Here, the configuration of the measuring tank 12 will be described with reference to FIG. In the figure, the measuring tank 12 has a tank main body 30 to which a chemical is supplied, and a limit switch 31 and a level adjuster 32 provided inside the tank main body 30. The limit switch 31 detects that the supplied chemical has reached a predetermined level (level 1). The level 1 is set to a level slightly higher than the measurement level, which is the required amount of the medicine to be measured in the measurement tank 12. The ON / OFF of the limit switch 31 is read by the control unit 3. The level adjuster 32 includes a pipe 32a having an inverted triangular side hole 32b and a reverse flow tube 3 for returning the chemical from the pipe 32a to the chemical tank 10.
2c. The pipe 32a is installed such that the lower end of the lateral hole 32b matches the above-mentioned measurement level. Pump 1
1 drives the chemical in the chemical tank 10 to the tank main body 30, and when the level of the chemical becomes level 1, the detection of the limit switch 31 stops the pump 11. Thereafter, the medicine overflows from the side hole 32b, and the medicine level drops to the measurement level. As described above, this measurement level is the level of the chemical necessary to prepare a predetermined amount of the developer once. After waiting for the chemical level to stabilize at the measurement level, the control unit 3 opens the valve 13 and opens the measurement tank 12.
The medicine inside is put into the building bath 15. The limit switches 31 of the three measuring tanks 12-1, 12-2, 12-3 are used.
And the level adjuster 32 are provided with the corresponding chemicals (1
0-1, 10-2, 10-3).

The operation when the chemical liquid preparation apparatus 1 prepares a new developer and stores it in the stock tank 19 will be described. First, when the control unit 3 determines that the developing solution in the main tank 4 of the developing line unit 2 is reduced or deteriorated based on the detection contents of the sensors 25 and 26, the pump 21 is driven to operate the stock tank 19. Is supplied to the main tank 4. After replenishment, the control unit 3 reads the detection value of the level sensor 20 of the stock tank 19. When it is detected that the amount of the developing solution in the stock tank 19 is reduced due to the replenishment, the control unit 3 operates each device of the chemical solution adjusting device 1 to prepare a new developing solution.

First, the pump 11 is operated to activate each of the chemical tanks 1.
The chemical is supplied from 0 to the corresponding measuring tank 12. Measuring tank 1
In 2, when the chemical is supplied to level 1, the limit switch 31 is turned on, and the control unit 3 stops the pump 11 correspondingly. Thereafter, the level of the chemical in the measuring tank 12 is reduced to the measuring level by the level adjuster 32. After waiting for the medicine level to stabilize at the measurement level, the control unit 3 opens the valve 13 and puts the medicine into the construction bath 15. This operation is performed in three series of the measuring tank 12 and the pump 1
1. Performed individually for the valve 13.

When the chemical is introduced into the bathtub 15, the pump 17 is driven to stir the chemical, and the composition of the chemical (developing liquid) prepared from the content detected by the sensor 16 is checked. If there is an excess or deficiency in the medicine as a result of the check, the pump is replenished by driving the corresponding pump and the sensor
The operations of stirring, checking, and replenishing are repeated until the detected content of No. 6 indicates a desired composition. When the developer prepared in the building bath 15 has an ideal composition, the valve 18 is opened to supply the developer to the stock tank 19.

The operation of the control section 3 will be described with reference to the flowcharts of FIGS. FIG. 4A is a flowchart showing the liquid management operation of the main tank 4. First, the liquid level sensor 25 and the sensor 26 of the sampling tank 9 are read to check the amount and state of the liquid (s1). If the liquid amount is insufficient or deteriorated as a result of the check (s2), a predetermined amount of the liquid from the stock tank 19 to the main tank 4 is removed.
(S3). At this time, by replenishing the developer from the main tank 4 to the extent that it overflows,
The developer in the main tank 4 can be replaced with a new one. After replenishment of the developing solution, the level of the solution in the stock tank 19 from which the developing solution was sent out is checked (s4).
When it is determined that the stock amount of No. 9 has decreased, a new developing solution adjusting operation is executed (s5).

FIG. 2B is a flowchart showing the predictive input operation. This operation is an operation of replenishing a developer which will be needed in advance according to the detection content of the work sensor 7. First, the detection content of the work sensor 7 is read (s10), and the load of the development line is calculated (s11). When the work sensor 7 is a CCD camera and the work is a printed wiring board on which a pattern is exposed, the image is analyzed to calculate a resist amount. And
The amount of developing solution necessary to cope with this load amount is calculated (s12), and the necessary developing solution is supplied from the stock tank 19 to the main tank 4 (s13). After the replenishment of the developing solution, the level of the solution in the stock tank 19 from which the developing solution has been sent out is inspected (s14), and when it is determined that the stock amount in the stock tank 19 has decreased, a new developing solution adjusting operation is executed. (S15).

FIG. 5 is a flowchart showing the new liquid adjusting operation. This operation is executed when the control unit 3 determines that the liquid amount in the stock tank 19 has decreased (s5 and s15 described above). First, necessary chemicals are measured in the plurality of measuring tanks 12 (s20). This measuring operation is an operation of driving the pump 11 and supplying the medicine to a level regulated by the limit switch 31 and the level adjuster 32 as described above. By this weighing, a nearly exact required quantity is quickly weighed for each drug. After the measurement, this is put into the building bath 15 (s21). The developer is adjusted by charging all the chemicals and stirring them. In this state, the composition of the developer is checked (s22), and if the composition is desirable (s23), this is transferred to the stock tank 19. Supply and stock (s25). If the composition of the developer is incomplete (s
23), the chemicals are finely adjusted by replenishing the insufficient chemicals with the pump 14 (s24). After this fine adjustment, the composition is checked again (s22). This is repeated, and when the composition of the developer becomes a desired composition, this is supplied to the stock tank (s23 → s25).

In the above embodiment, three measuring tanks 12 are provided, but the number of tanks is not limited to this. Further, in the above embodiment, the same number of measuring tanks as the number of medicines are provided. However, the number of measuring tanks may be smaller than the number of medicines, and the same measuring tank may be used for a plurality of medicines and used sequentially. Good.

The pump 11 for supplying the chemical to the measuring tank 12 and the pump 14 for supplying the chemical to the building bath 15 for fine adjustment of the composition are constituted by different types of pumps, and the pump 11 is a pump having a high transfer capacity. The pump 14 may be constituted by a pump capable of accurately transporting a small amount so that the approximate composition can be measured more quickly and the final fine adjustment can be performed more accurately.

In the above embodiment, the developing solution is prepared, but the chemical solution to be adjusted is not limited to this.
An acid washing solution, a peeling solution and the like can also be prepared.

[0025]

As described above, according to the present invention, since the approximate measurement is completed in the measuring tank and mixed in the construction bath, and the composition is finely adjusted while being inspected, efficient and accurate preparation of the chemical solution is achieved. It can be carried out.

Since the stock tank is appropriately replenished with a completely adjusted chemical solution, the chemical solution is not interrupted.
Chemical solution can be supplied to the processing process at any time, eliminating the need to stop the line for replenishing the chemical solution or having a large-scale stock tank. There is an advantage that it is not performed.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a printed circuit board developing system to which the present invention is applied.

FIG. 2 is a configuration diagram of a drug solution preparation device according to an embodiment of the present invention.

FIG. 3 is a diagram showing a configuration of a measuring tank of the chemical liquid preparation apparatus.

FIG. 4 is a flowchart showing an operation of a control unit.

FIG. 5 is a flowchart showing the operation of the control unit.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Chemical liquid adjustment device, 2 ... Development line part, 3 ... Control part, 4
... Main tank, 10 ... Chemical tank, 12 ... Measurement tank, 15 ... Building bath,
19 ... Stock tank

[Procedure amendment]

[Submission date] December 14, 1998

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0005

[Correction method] Change

[Correction contents]

[0005]

According to the first aspect of the present invention, there is provided a stock tank for supplying a chemical to a processing step, a chemical tank for storing a plurality of types of chemicals for preparing the chemical,
Supplied chemicals from drug product tank at a high speed inspection, and measuring tank for measuring the chemicals predetermined amount, the currency tub chemicals were metered in said metering tank is supplied, the composition of the chemical solution prepared in該建bathtub Sensor means, a fine adjustment means for directly replenishing a small amount of medicine from the chemical tank in accordance with the detection content of the sensor means, and a stock means for supplying a chemical solution, which has been finely adjusted by the fine adjustment means, to the stock tank. And characterized in that:

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0006

[Correction method] Change

[Correction contents]

[0006] The invention of claim 2 of this application is as follows: (1) The medicine is supplied from the medicine tank to the measuring tank, and the necessary amount is roughly calculated.
Measure (2) Supply and agitate the medicine measured in the measuring tank to the building bath
Prepare the chemical solution (3) Inspect the composition of the prepared chemical solution, and
Replenish a small amount of chemicals directly from the chemical tank until it is formed. (4) When the prepared chemical solution has the desired composition,
It characterized by having a procedure to stock the stock tank.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0025

[Correction method] Change

[Correction contents]

[0025]

As described above, according to the present invention, rough measurement is completed in the measuring tank and mixed in the building bath ,
The chemical composition can be quickly prepared with the approximate composition. Soshi
Te, from chemical tank while checking the composition of the chemical solution prepared in this
Since the chemicals are supplied little by little and finely adjusted, it is possible to quickly and accurately prepare a chemical solution.

Claims (2)

[Claims] 1. A stock tank for supplying a chemical to a processing step; a chemical tank for storing a plurality of types of chemicals for preparing the chemical; and a chemical supplied from the chemical tank at a high speed to supply a predetermined amount of the chemical. A measuring tank to be measured, a building bath to which the medicine measured by the measuring tank is supplied, a sensor means for inspecting the composition of the chemical solution prepared in the building bath, and the medicine in accordance with the detection content of the sensor means A chemical liquid preparation apparatus, comprising: fine adjustment means for replenishing a small amount of chemicals from a tank; and stock means for supplying the chemical liquid finely adjusted by the fine adjustment means to the stock tank. 2. A chemical liquid preparation method for preparing a chemical liquid by mixing a plurality of types of chemicals, and replenishing the chemical liquid to a processing step as needed, wherein the chemical liquid is stored in a stock tank according to a request from the processing step. When the amount of the chemical solution stocked in the stock tank is reduced, the medicine is taken out from the medicine tank in which the plurality of kinds of medicines are stored, and the necessary amount is roughly measured in the measuring tank. A chemical solution is prepared by being charged into a construction bath, and in the construction bath, the prepared chemical solution is appropriately replenished from the chemical bath to have a desired composition, and then supplied to a stock bath. Method.