JPH0825754B2 - Glass manufacturing method - Google Patents

Glass manufacturing method

Info

Publication number
JPH0825754B2
JPH0825754B2 JP26026986A JP26026986A JPH0825754B2 JP H0825754 B2 JPH0825754 B2 JP H0825754B2 JP 26026986 A JP26026986 A JP 26026986A JP 26026986 A JP26026986 A JP 26026986A JP H0825754 B2 JPH0825754 B2 JP H0825754B2
Authority
JP
Japan
Prior art keywords
sol
glass
gel
raw material
cracks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP26026986A
Other languages
Japanese (ja)
Other versions
JPS63117917A (en
Inventor
哲彦 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP26026986A priority Critical patent/JPH0825754B2/en
Publication of JPS63117917A publication Critical patent/JPS63117917A/en
Publication of JPH0825754B2 publication Critical patent/JPH0825754B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C1/00Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
    • C03C1/006Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels to produce glass through wet route
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/06Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00Production processes
    • C03C2203/20Wet processes, e.g. sol-gel process
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00Production processes
    • C03C2203/20Wet processes, e.g. sol-gel process
    • C03C2203/34Wet processes, e.g. sol-gel process adding silica powder

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Silicon Compounds (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、ゾル−ゲル法によるガラスの製造方法に関
する。
The present invention relates to a method for producing glass by a sol-gel method.

〔従来の技術〕[Conventional technology]

従来の、ゾル−ゲル法によるガラスの製造において
は、通常、原料としてアルキルシリケートのモノマーを
用い、これを酸性あるいは塩基性触媒により加水分解反
応させ、ゾルを調製した後、ゲル化、乾燥、焼結しガラ
スを作製するものであった。
Conventionally, in the production of glass by the sol-gel method, usually, an alkyl silicate monomer is used as a raw material, which is hydrolyzed by an acidic or basic catalyst to prepare a sol, which is then gelled, dried and baked. It was intended to make glass by binding.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

しかし、前述の従来技術では、大型のゲルの作製が非
常に困難で、収縮乾燥および焼結の際にクラックを生じ
てしまう。また、この問題点は、ゾルに超微粒子シリカ
を添加することでかなり改善されたが、乾燥に長時間を
有し、非能率的であるという問題点を有する。
However, in the above-mentioned conventional technique, it is very difficult to produce a large gel, and cracks occur during shrinkage drying and sintering. Although this problem has been considerably improved by adding ultrafine particle silica to the sol, it has a problem that it takes a long time to dry and is inefficient.

そこで本発明は、このような問題点を解決するもの
で、その目的とするところは、ゾル−ゲル法により大型
ガラスを歩留り良く、しかも、短時間にて作製する方法
を提供するところにある。
Therefore, the present invention solves such a problem, and an object of the present invention is to provide a method for producing a large glass by a sol-gel method with high yield and in a short time.

〔問題点を解決するための手段〕 アリキルシリケートと主原料として、ゾルを調製し、
これをゲル化させウェットゲルを作製した後、該ウェッ
トゲルを乾燥、焼結するゾル−ゲル法によるガラスの製
造において、少なくとも、原料のアルキルシリケートと
して、2〜8量体のアルキルポリシリケートオリゴマー
および超微粒子シリカを用いることを特徴とする。
[Means for Solving Problems] As a main material of alkyl silicate, a sol is prepared,
In the production of glass by the sol-gel method of gelling this to prepare a wet gel, then drying and sintering the wet gel, at least as a raw material alkyl silicate, a dimer to octamer alkyl polysilicate oligomer and It is characterized by using ultrafine particle silica.

〔作用〕[Action]

本発明によれば、出発原料として多量体のアルキリシ
リケートを用いるため、これがゲル構造の骨格の最小単
位となり、通常のモノマーを最小単位とする場合に比べ
多孔性構造の形成が容易であり、更に超微粒子シリカを
添加することにより、ゾル中の有効シリカ濃度が高くな
るため、ゲル化後の乾燥、焼結においてクラックを生じ
ることが少なく、しかも短期間で、大型ガラスの作製が
可能となるものである。
According to the present invention, since a multimeric alkyl silicate is used as a starting material, this is the minimum unit of the skeleton of the gel structure, and it is easy to form a porous structure as compared with the case where a normal monomer is the minimum unit. Further, by adding ultrafine particle silica, the effective silica concentration in the sol is increased, so that cracks are less likely to occur during drying and sintering after gelation, and it is possible to produce a large glass in a short period of time. It is a thing.

〔実施例〕〔Example〕

実施例1 市販のエチルシリケート(商品名:エチルシリケート
40(コルコート株式会社)4〜6量体)1,000ml、エチ
ルアルコール1,500ml、水200mlおよび、超微粒子シリカ
600gを混合し、均一なゾル溶液とするために、撹拌、超
音波を照射した。この後、1規定のアンモニア水を5ml
滴下し、10分間撹拌した後、各900mlずつ大きさ30×30
×15〔cm〕の角型容器3個に注入し、フタをして、密閉
状態にしたところ約30分でゲル化した。この後、密閉状
態にて一昼夜間、静置した後、フタを3%の開孔率のも
のにし、乾燥機に投入し、室温から昇温して1時間で70
℃にし以後70℃に保持し、5日間ほどで乾燥が終了し
た。ここで作製した乾燥ゲルは、大きさ27×27×0.9〔c
m〕、重量約400gで、クラックなどなく外観的には良好
であった。
Example 1 Commercially available ethyl silicate (trade name: ethyl silicate
40 (Colcoat Co., Ltd. 4-6-mer) 1,000 ml, ethyl alcohol 1,500 ml, water 200 ml and ultrafine silica
600 g was mixed and stirred and irradiated with ultrasonic waves to obtain a uniform sol solution. After this, 5 ml of 1N ammonia water
After dripping and stirring for 10 minutes, each 900 ml size 30 × 30
The mixture was poured into three × 15 [cm] square containers, covered with a lid, and sealed to gel in about 30 minutes. After that, after leaving it in a sealed state for one day and night, the lid was made to have a porosity of 3%, put into a dryer, and heated from room temperature to 70% in 1 hour.
After that, the temperature was maintained at 70 ° C and the drying was completed in about 5 days. The dry gel prepared here has a size of 27 × 27 × 0.9 (c
m], the weight was about 400 g, and the appearance was good without cracks.

これら3個の乾燥ゲルを、焼結炉に投入し、60℃/h
r、180℃/hr、300℃/hrの3種類の昇温速度で、加熱焼
結したところ、それぞれの昇温速度に対して、1,200
℃、1220℃、1260℃程度で、透明ガラス化した。ガラス
の大きさは、16.8×16.8×0.55〔cm〕、重量は、330g程
度であり、焼結の際、クラック、割れ等の発生はなく完
全体であった。このようにして作製したガラスに関する
諸物性分析の結果は、ビッカース硬度、比重、熱膨張係
数、赤外吸収スペクトル、近赤外吸収スペクトル、屈折
率など溶融石英ガラスと一致し、純度分析においても、
1ppm以上の不純物元素は検出されなかった。
These 3 dried gels were put into a sintering furnace and the temperature was 60 ℃ / h.
When heat-sintered at three heating rates of r, 180 ° C / hr, and 300 ° C / hr, 1,200
Transparent vitrification was performed at about ℃, 1220 ℃ and 1260 ℃. The size of the glass was 16.8 × 16.8 × 0.55 [cm] and the weight was about 330 g, and it was a perfect body with no cracks or cracks during sintering. The results of various physical properties analysis on the glass produced in this manner, Vickers hardness, specific gravity, thermal expansion coefficient, infrared absorption spectrum, near-infrared absorption spectrum, in agreement with fused silica glass such as refractive index, even in the purity analysis,
Impurity elements above 1 ppm were not detected.

実施例2 市販のエチルシリケート(商品名:エチルシリケート
40(コルコート株式会社)4〜6量体)1,000ml、エチ
ルアルコール1,500ml、水200mlおよび、超微粒子シリカ
600gを混合し、均一なゾル溶液とするために、撹拌、超
音波を照射した。この後、1規定のアンモニア水を20ml
滴下し、10分間撹拌した後、各900mlずつ大きさ30×30
×15〔cm〕の角型容器3個に注入し、フタをして、密閉
状態にしたところ約10分で、ゲル化した。この後、密閉
状態にて一昼夜間、静置した後、フタを4%の開孔率の
ものにし、乾燥機に投入し、室温から昇温して1時間で
70℃にし、以後70℃に保持し、3日間ほどで乾燥が終了
した。ここで作製した乾燥ゲルは、大きさ27.6×27.6×
0.92〔cm〕、重量約400gで、クラックなどなく、外観的
には、良好であった。
Example 2 Commercially available ethyl silicate (trade name: ethyl silicate
40 (Colcoat Co., Ltd. 4-6-mer) 1,000 ml, ethyl alcohol 1,500 ml, water 200 ml and ultrafine silica
600 g was mixed and stirred and irradiated with ultrasonic waves to obtain a uniform sol solution. After this, 20 ml of 1N ammonia water
After dripping and stirring for 10 minutes, each 900 ml size 30 × 30
The mixture was poured into three × 15 [cm] square containers, covered with a lid, and sealed to gel in about 10 minutes. After that, after leaving it in a sealed state for one day and night, the lid was made to have an opening ratio of 4%, put into a dryer, and heated from room temperature in 1 hour.
The temperature was raised to 70 ° C., and then maintained at 70 ° C., and the drying was completed in about 3 days. The dry gel produced here has a size of 27.6 × 27.6 ×
It was 0.92 [cm] and weighed about 400 g, and was good in appearance with no cracks.

これら3個の乾燥ゲルを焼結炉に投入し、60℃/hr、1
80℃/hr、300℃/hrの3種類の昇温速度で、加熱焼結し
たところ、それぞれの昇温速度に対して、1220℃、1250
℃、1285℃程度で透明ガラス化した。ガラスの大きさ
は、16.8×16.8×0.55〔cm〕、重量は、330g程度であ
り、焼結の際、クラック、割れ等の発生はなく完全体で
あった。
These 3 dried gels were put into a sintering furnace, and 60 ℃ / hr, 1
When heat-sintered at three heating rates of 80 ° C / hr and 300 ° C / hr, 1220 ° C, 1250 for each heating rate.
It became a transparent glass at about 1285 ℃. The size of the glass was 16.8 × 16.8 × 0.55 [cm], and the weight was about 330 g, and it was a perfect body with no cracks or cracks during sintering.

このようにして作製したガラスに関する諸物性分析の
結果は、ビッカース硬度、比重、熱膨張係数、赤外吸収
スペクトル、近赤外吸収スペクトル、屈折率など溶融石
英ガラスと一致し、純度分析においても、1ppm以上の不
純物元素は検出されなかった。
The results of various physical properties analysis on the glass produced in this manner, Vickers hardness, specific gravity, thermal expansion coefficient, infrared absorption spectrum, near-infrared absorption spectrum, in agreement with fused silica glass such as refractive index, even in the purity analysis, Impurity elements above 1 ppm were not detected.

〔発明の効果〕〔The invention's effect〕

このようにして、本発明により製造される石英ガラス
は、従来のゾル−ゲル法に比べ、ゲル化後の乾燥、焼結
において割れることが著しく減少し大型ガラスが、短時
間で歩留り良く作製可能となるものである。したがって
これまで石英ガラスを使用していた分野ではもちろんの
こと、IC用フォトマスク基板、光ファイバー用母材な
ど、種々の用途に応用されるものと考える。
In this way, the quartz glass produced according to the present invention is significantly less likely to crack during drying and sintering after gelation, and a large glass can be produced with a high yield in a short time, as compared with the conventional sol-gel method. It will be. Therefore, it will be applied not only in fields where quartz glass has been used until now, but also in various applications such as photomask substrates for ICs and base materials for optical fibers.

さらに、ゾル調製時にAl、Ti、Ge、Na、Ca、Mg、Li、
Teなどの諸元素を所定量添加することにより様々な特性
をもつ多成分系の高品質なガラスの作製も容易である。
Furthermore, at the time of sol preparation, Al, Ti, Ge, Na, Ca, Mg, Li,
By adding a certain amount of elements such as Te, it is easy to produce multi-component high-quality glass with various characteristics.

また、石英ガラスに関しては、他の製造方法(溶融
法、CVD法など)に比べ、低コストでの作製が可能とな
る。
Further, quartz glass can be manufactured at a lower cost than other manufacturing methods (melting method, CVD method, etc.).

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】アルキルシリケートを主原料として、ゾル
を調製し、これをゲル化させてウェットゲルを作製した
後、該ウェットゲルを乾燥、焼結するゾルゲル法による
ガラスの製造方法において、 主原料として、少なくとも原料のアルキルシリケートと
して、2〜8量体のアルキルポリシリケートオリゴマー
および超微粒子シリカを用いることを特徴とするガラス
の製造方法。
1. A method for producing glass by a sol-gel method in which a sol is prepared from an alkyl silicate as a main raw material, the sol is gelled to prepare a wet gel, and the wet gel is dried and sintered. As a raw material, at least a raw material alkyl silicate, a dimer to octamer alkyl polysilicate oligomer and ultrafine particle silica are used.
JP26026986A 1986-10-31 1986-10-31 Glass manufacturing method Expired - Fee Related JPH0825754B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26026986A JPH0825754B2 (en) 1986-10-31 1986-10-31 Glass manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26026986A JPH0825754B2 (en) 1986-10-31 1986-10-31 Glass manufacturing method

Publications (2)

Publication Number Publication Date
JPS63117917A JPS63117917A (en) 1988-05-21
JPH0825754B2 true JPH0825754B2 (en) 1996-03-13

Family

ID=17345710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26026986A Expired - Fee Related JPH0825754B2 (en) 1986-10-31 1986-10-31 Glass manufacturing method

Country Status (1)

Country Link
JP (1) JPH0825754B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0244032A (en) * 1988-08-03 1990-02-14 Koroido Res:Kk Method for synthesizing precursor of silica glass
KR100252184B1 (en) * 1997-07-29 2000-04-15 윤종용 Method of manufacturing silica glass
US6132649A (en) * 1999-01-29 2000-10-17 Lucent Technologies Inc. Fabrication including sol-gel processing

Also Published As

Publication number Publication date
JPS63117917A (en) 1988-05-21

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