JPH08255383A - Direct recording medium for optical disk and its production - Google Patents

Abstract

PURPOSE: To make it possible to rapidly and easily produce a direct recording medium for optical disks as a metal mold for molding the optical disks by forming a negative resist layer on one surface of a substrate and exposing and recording optical disk signals, then developing the negative resist layer and curing the layer. CONSTITUTION: The negative resist layer 2 is formed on one surface A side of an extremely smoothly formed metal 1 and the desired optical disk signals are exposed on the negative resist layer 2 and thereafter, the negative resist layer 2 is developed. As a result, the projecting pits 2a consisting of the remaining negative resist are formed of the patterns based on the optical disk signals on the mirror finished surface 1A of the substrate 1. In succession, the respective projecting pits 2A are cured by a prescribed method, such as irradiation with UV or heat treatment. As a result, a stamper 3 arranged with the cured projecting pits 2B on the mirror finished surface 1A of the substrate 1 in the patterns meeting the optical disk signals is obtd.

Description

Detailed Description of the Invention

[0001]

[Table of Contents] The present invention will be described in the following order. Field of Industrial Application Conventional Technology Problem to be Solved by the Invention Means for Solving the Problem (FIGS. 1, 3 to 5) Action (FIGS. 1, 3 to 5) Example (1) First Example (FIGS. 1 and 2) (2) Second Example (FIGS. 1 to 5) (3) Other Example (FIGS. 1 to 5)

[0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a direct recording medium for an optical disk and a method for manufacturing the same, and is suitable for application to a direct recording medium for an optical disk used as a stamper for molding an optical disk and a method for manufacturing the same. is there.

[0003]

2. Description of the Related Art Conventional stampers for optical disks are manufactured by the following steps. That is, first, remove residual nickel and residual resist from the used glass plate,
After the glass plate is regenerated by polishing the surface (first step), the glass plate is washed by a method such as ultrasonic cleaning to remove the polishing agent and the like remaining on the surface (second step). Process). Next, this glass plate (hereinafter, the glass plate in this state is referred to as a cleaned glass plate) is dried by various methods and then a resist is applied to the surface thereof to form a resist layer (third step). Subsequently, a desired optical disk signal is exposed and recorded on the resist layer of this glass plate (hereinafter, the glass plate in this state is referred to as a resist-coated glass plate) (fourth step), and then developed to develop An uneven pattern corresponding to the above-mentioned optical disc signal is formed on the resist layer (fifth step).

Subsequently, a thin metal layer is formed (metallization) on the surface of the resist layer by a method such as sputtering, vapor deposition or electroless plating (sixth step),
A plating layer is formed by performing plating (electroforming) on the upper surface of the metal layer until a predetermined thickness is obtained (seventh step). Furthermore, after this, after peeling off the portion consisting of the metal layer and the plating layer (hereinafter referred to as the stamper portion) from the glass plate, the resist and the like adhering to the pit surface of the stamper portion are washed away and dried, A post-process such as removing an extra portion with a press is performed (eighth process). Thereby, a stamper can be obtained.

[0005]

[Problems to be Solved by the Invention]
As described above, the manufacturing process is very long and requires a lot of equipment, so the amount of capital investment for manufacturing becomes large, and the clean room area needs to be widened accordingly. . Further, the stamper has a problem that the unit price becomes high because it requires a lot of raw material cost, running cost, time and the like at the time of manufacturing. Further, the stamper has a problem that it is difficult to manufacture because the manufacturing process is individually difficult and experience and know-how are required in each manufacturing process.

As one means for solving such a problem,
Conventionally, a SiO ₂ layer and a resist layer are sequentially formed on a glass master, and a desired optical disk signal is exposed and recorded on the resist layer and then developed, and thereafter, the resist remaining on the glass master is used as a mask for SiO. after Etsujingu _two layers, the remaining resist is removed from the SiO ₂ layer is formed over the stamper by Utsushitoru minute uneven pattern based on the above-described optical disc signal formed on the SiO ₂ layer to the transparent plate by the 2P method A method has been proposed (JP-A-3-65327). According to this method, there is an advantage that the stamper can be manufactured in a small number of steps.

However, when manufacturing a stamper using this method, the equipment required for the step of etching the SiO ₂ layer on the glass master is required, and the SiO ₂ layer is etched to a predetermined depth. However, it is difficult to manufacture the stamper inexpensively and easily. In general, a transparent plate has a high thermal conductivity. Therefore, when an optical disk is to be molded by using the stamper made of the transparent plate as described above, the stamper is formed for each optical disk. Since it takes a lot of time to cool, there is a problem that it is difficult to shorten the manufacturing time of the optical disk as a result.

The present invention has been made in consideration of the above points, and it is an object of the present invention to propose a direct recording medium for an optical disk as a mold for optical disk molding which can be easily manufactured in a short time and a manufacturing method thereof. To do.

[0009]

In order to solve the above problems, according to the present invention, one side of a direct recording medium for an optical disc, on which a desired optical disc signal is recorded, which is used as a mold for optical disc molding, is used. Substrates 1 and 23 formed to be extremely smooth and resin layers 2B and 22A for forming minute concave and convex patterns based on optical disc signals were provided on the surfaces 1A and 23A of the substrates 1 and 23.

Further, in the present invention, the resin layers 2B, 22
A was made of a cured resist resin or 2P resin resin.

Further, in the present invention, the substrates 1 and 23
Is made of a metal plate.

Further, in the present invention, in the method for manufacturing a direct recording medium for an optical disk used as a mold for optical disk molding, a negative resist is applied to the one surface 1A side of the substrate 1 whose one surface 1A is extremely smooth. The first step of forming the negative resist layer 2 by doing so, the second step of exposing and recording a desired optical disk signal on the negative resist layer 2, and then developing the negative resist layer 2, and the substrate after the development. And the third step of hardening the negative resist layer 2 of.

Further, in the present invention, the substrate 1 is composed of a metal plate and a resin layer which is provided on one surface of the metal plate and forms one surface of the substrate.

Further, in the present invention, the first step is
The one surface 1A of the substrate 1 is provided with a step of performing a surface treatment for improving the adhesion between the negative resist layer 2 and the one surface 1A of the substrate 1.

Furthermore, in the present invention, the third step is
On the surface of the cured negative resist layer 2 and the one surface 1A of the substrate 1 exposed between the cured negative resist layers 2,
A step of forming a release agent layer made of a release agent that facilitates the release of the optical disc from the direct recording medium 3 for the optical disc at the time of molding the optical disc is provided.

Further, in the present invention, in a method for manufacturing a direct recording medium for an optical disk used as a mold for optical disk molding, a positive resist is applied to one surface 20A of the master 20 having a predetermined shape to form a positive resist layer. 21
After the first step of forming a positive resist layer 21 and a desired optical disc signal is exposed and recorded on the positive resist layer 21,
And the second step of curing the positive resist layer 21 remaining on the master 20 in a pattern based on the optical disc signal, and the one surface 23A of the substrate 23 on which the one surface 23A is extremely smooth. First, the pattern of the photoresist layer 21 on the master 20 is transferred to the variable hardness resin 22 by adhering it to the one surface 20A side through the flexible variable hardness resin 22 and then curing the variable hardness resin 22. Step 3, substrate 23 and variable hardness resin 2
The second step is to integrally release 2 from the master 20, and the fourth step is performed.

Further, in the present invention, the master 20 is made of a glass plate.

Further, in the present invention, the substrate 23 is composed of a metal plate and a resin layer provided on one surface of the metal plate and forming one surface of the substrate.

Further, in the present invention, the third step is
The positive resist layer 21 and the substrate 23 are provided on the one surface 23A of the substrate 23.
The step of performing a surface treatment for improving the adhesion with the one surface 23A is provided.

Further, in the present invention, the second step is
One surface 20 of the substrate 20 exposed between the surface of the cured positive resist layer 21 and the cured positive resist layer 21.
A is provided with a step of forming a release agent layer made of a release agent that facilitates release of the optical disc from the direct recording medium 24 for the optical disc during molding of the optical disc.

Further, according to the present invention, in a method for manufacturing a direct recording medium for an optical disc used as a mold for optical disc molding, desired light is applied to one surface 1A, 20A, 23A of the substrates 1, 20, 23 having a predetermined shape. A first step of forming a minute concavo-convex pattern based on a disk signal, the substrate 1,
A second step of forming a release agent layer made of a release agent on one surface 1A, 20A, 23A of 20, 23, which facilitates release of the optical disk from the substrates 1, 20, 23 during optical disk molding. I chose

[0022]

The negative resist layer 2 is formed on the one surface 1A side of the substrate 1 on which the one surface 1A is extremely smooth, the desired optical disc signal is exposed and recorded on the negative resist layer 2, and then the negative resist layer 2 is developed. After that, the negative resist layer 2 on the substrate 1 is cured to manufacture the optical disk direct recording medium 3 used as a mold for optical disk molding. The optical disk direct recording medium 3 can be manufactured in a short time.

Further, a positive resist layer 21 is formed on one surface 20A of the master disk, a desired optical disk signal is exposed and recorded on the positive resist layer 21, and then the positive resist layer 21 is developed. The positive resist layer 21 remaining on the 20A is cured, and then the one surface 23A of the substrate 23 on which the one surface 23A is extremely smooth is formed.
After being adhered to the one surface 20A side through the flexible hardness variable resin 22, the variable hardness resin 22 is cured to transfer the pattern of the photoresist layer 21 on the master 20 to the variable hardness resin 22, Further, after that, the substrate 23 and the variable hardness resin 22 are integrally released from the master 20 to manufacture the optical disk direct recording medium 23 used as a mold for optical disk molding.
The direct recording medium 23 for an optical disk can be manufactured in a shorter time and with a shorter process than in the past.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings.

(1) First Embodiment A manufacturing process of an optical disk stamper according to the first embodiment will be described with reference to FIGS. 1 (A) to 1 (C). First, when manufacturing a stamper for an optical disk, a substrate 1 having one surface 1A formed extremely smooth (mirror surface) (hereinafter referred to as mirror surface substrate) 1 is manufactured. In practice, the mirror-like substrate 1 is a master stamper (mirror-like master) having a mirror-like one surface by sequentially performing metallization and electroforming on a cleaned glass plate or a resist-coated glass plate made by a normal process. By making a stamper) and using the mirror surface master stamper in accordance with the usual procedure to manufacture a mother stamper (mirror surface mother stamper), it is possible to manufacture a large number of the mirror surface mother stamper.

Then, a negative resist layer 2 is formed by applying a negative resist to the mirror surface 1A of the mirror-finished substrate 1 thus manufactured (FIG. 1A). In this case, the mirror surface 1A of the mirror substrate 1 has been subjected to a predetermined surface treatment in advance so as to improve the adhesion between the mirror substrate 1 and the negative resist. So that it doesn't come off accidentally. Subsequently, a desired optical disc signal is exposed and recorded on the negative resist layer 2 and then developed. Thus, the convex pits 2A made of the remaining negative resist are formed on the mirror surface 1A of the mirror substrate 1 in a pattern based on the above-mentioned optical disc signal.
(FIG. 1 (B)).

Subsequently, each of the convex pits 2A is cured by a predetermined method such as ultraviolet irradiation or heat treatment at 120 [°] or more. As a result, the cured convex pits (hereinafter referred to as curing convex pits) 2B as shown in FIG. 1C are arranged on the mirror surface 1A of the mirror substrate 1 in a pattern corresponding to the above-mentioned optical disc signal. The stamper 3 can be obtained. After that, a release agent is applied to the entire pit surface 3A of the stamper 3 as needed to form an extremely thin release agent layer. As a result, when the optical disk is subjected to the injection molding using the stamper 3A, the molded optical disk can be easily released from the stamper 3.

Actually, the step of forming an extremely thin release agent layer on the entire pit surface 3A of the stamper 3 can be performed by using the stamper processing apparatus 10 as shown in FIG. 2, for example. That is, in this stamper processing apparatus 10, the stamper 3 to be processed is set by placing it on the turntable 11. In this case, a nitrogen blow nozzle 12 is arranged above the turntable 11, the nitrogen blow nozzle 12 is connected to a release agent gas generator 14 having a heater 13, and the release agent gas generator 14 is a container. After a slight amount of release agent gas is included in the nitrogen gas supplied to the inside 15, the nitrogen gas is supplied to the nitrogen blow nozzle 1.
It is designed to be sent out to 2.

As a result, in this stamper processing apparatus 10, the pit surface 3A of the stamper 3 mounted on the turntable 11 is blown by blowing nitrogen gas from the nitrogen blow nozzle 12 while rotating the turntable 11.
Nitrogen gas containing a slight amount of the releasing agent gas can be blown onto the surface of the pit 3A, and thus the releasing agent can be applied thinly and uniformly on the pit surface 3A by sublimation or condensation.

According to the above method, the negative resist layer 2 is formed on the mirror substrate 1, the desired optical disc signal is exposed and recorded on the negative resist layer 2, and then the negative resist layer 2 is developed to develop the mirror surface of the mirror substrate 1. By forming the convex pits 2B made of a negative resist in the concave-convex pattern based on the optical disc signal on 1A, and then curing the convex pits 2B by a predetermined method to manufacture the stamper 3, Many steps conventionally performed for manufacturing the stamper 3 can be omitted. Therefore, Stamper 3
The manufacturing time can be greatly shortened, and thus the stamper 3 can be easily manufactured in a short time.

Further, since most of the steps which have been conventionally performed for manufacturing the stamper 3 can be omitted, the equipment and clean room area for manufacturing the stamper 3 can be reduced, and thus the stamper 3 can be reduced.
It is possible to drastically reduce the amount of capital investment for manufacturing the stamper, and to reduce the running cost for manufacturing the stamper 3.

Further, since the release agent layer is formed on the entire pit surface 3A of the stamper 3, when the optical disk is subjected to the ink injection molding using the stamper 3, the molded optical disk is removed from the stamper 3. It can be easily released from the mold, and thus the releasability of the optical disc from the stamper 3 can be greatly improved.

(2) Second Embodiment A manufacturing process of an optical disk stamper according to the second embodiment will be described with reference to FIGS. 3 (A) to 4 (B). First, Fig. 3
As shown in (A), the positive resist layer 21 is formed by applying a positive resist on the mirror surface 20A of the glass plate 20 whose one surface is extremely smooth. Then Fig. 3
As shown in (A), after a desired optical disc signal is exposed and recorded on the positive resist layer 21, it is developed to form a residual positive resist layer on the glass plate 20 in an uneven pattern corresponding to the optical disc signal. Convex pit 21 consisting of
Form A.

The above steps are performed according to a normal mastering process. Then, as shown in FIG.
Each convex pit 20A on the glass plate 20 is irradiated with ultraviolet rays or 12
It is cured by a predetermined method such as heat treatment at 0 ° or more (hereinafter, the cured convex pit 20A is referred to as a cured convex pit 20B). Then, as shown in FIG.
After a predetermined amount of the cross-linking type UV resin 22 is supplied to the mirror surface 20A of the glass plate 20, for example, the mirror surface substrate 23 formed by the same process as the mirror surface substrate 1 (FIG. 1A) of the first embodiment is subjected to UV. Glass plate 20 through resin solution 22
The UV resin 22 is brought into close contact with the mirror surface 20A of the above so as not to generate bubbles. In this case, the surface of the mirror-like substrate 23 facing the glass plate 20 (hereinafter, this surface is referred to as the lower surface) 22A has UV light.
A predetermined surface treatment is performed in advance in order to enhance the adhesion with the resin 22.

Next, the UV resin 22 is irradiated with ultraviolet rays through the glass plate 20 so that the UV resin 22 is
Is cured (hereinafter, this cured UV resin 22 is referred to as a cured UV resin 22A). This makes the UV resin 2
The uneven pattern on the glass plate 20 is transferred to 2. After that, the mirror-finished substrate 23 is peeled off from the glass plate 20 together with the cured UV resin 22A. As a result, the stamper 24 including the mirror-like substrate 23 and the cured UV resin 22A as shown in FIG. 4B can be obtained.

After that, if necessary, the stamper 2 made of the surface of the cured UV resin 22A is formed in the same manner as in the first embodiment.
A release agent is applied to the entire pit surface 24A of No. 4 to form an extremely thin release agent layer. This makes it possible to improve the releasability of the molded optical disk from the stamper 24 when the optical disk is molded by using the stamper 24.

Here, as a method for bringing the mirror-like substrate 23 into close contact with the mirror surface 20A of the glass plate 20 via the UV resin 22 so as not to generate bubbles, as shown in FIG. Predetermined amount (eg 0.5-5 [m
l)) UV resin solution 22 is poured, and then a mirror-like substrate 23
Is expanded toward the glass plate 20 side by a predetermined method (for example, air pressure is applied from the upper side of the mirror-like substrate 23, or the lower side of the mirror-like substrate 23 is depressurized). The so-called 2P method, which is performed by pressing it against 23, may be used.

The lower surface of the mirror substrate 23 and the UV resin 22
The surface treatment to be performed on the lower surface of the mirror-like substrate 23 in order to enhance the adhesion with
Within the range of [%], it is necessary after spin coating an adhesion improver formed by dissolving a solvent such as silane coupling such as aminoethoxysilane or epoxyethoxysilane in a predetermined solvent such as alcohol, MIBK or ethyl lactate. Depending on the case, a method of baking at 100 to 200 [°] for about 10 to 30 minutes may be used.

According to an actual experiment, a nickel plate having a mirror-like surface (mirror surface nickel plate) is used as the mirror substrate 23, and the unevenness on the glass plate 20 formed on the mirror surface nickel plate as described above is used. As a result of transferring the pattern by the 2P method, the cured convex pits 21 that form this concave and convex pattern.
The uneven pattern on the glass plate 20 could be transferred cleanly without damaging B. In this case, it has been confirmed that the pit shape formed on the mirror-like nickel plate has almost the same accuracy as the pit shape of the nickel-made stamper formed by ordinary electroforming.

Further, the stamper 24 manufactured in this way
As a result of molding an optical disk by in-molding using, it was possible to mold a normal optical disk without changing the conditions at the time of in-mold molding from the conventional conditions. In this case, the releasability between the 2P resin layer and the molding disk was good enough for practical use, and the adhesion between the mirror surface nickel plate and the 2P resin layer was also good enough for practical use.

According to the above steps, the positive resist layer 21 is formed on the glass plate 20, and after the desired signal is recorded on the positive resist layer 21 by exposure and recording, the positive resist layer 21 is developed to cure the remaining positive resist, and As a result, the stamper 24 is manufactured by transferring the concavo-convex pattern based on the optical disk signal formed on the glass plate 20 onto the mirror-like substrate 23 using the 2P method. Therefore, many steps that have been conventionally performed can be omitted. Therefore, as in the case of the first embodiment, the manufacturing time of the stamper 24 can be greatly shortened, and thus the stamper 24 can be easily manufactured in a short time.

Further, since most of the steps conventionally performed for manufacturing the stamper 24 can be omitted, the equipment and clean room area for manufacturing the stamper 24 can be reduced, thus manufacturing the stamper 24. It is possible to significantly reduce the amount of capital investment required when performing, and to reduce the running cost for manufacturing the stamper 24.

(3) Other Embodiments In the above-mentioned first and second embodiments, a cleaned glass plate or a resist-coated glass plate manufactured by a normal process is subjected to metallization and electroforming. To produce a mirror surface master stamper, perform a mirror surface mother stamper in the usual procedure using the mirror surface master stamper, and use the mirror surface mother stamper to produce the mirror substrate 1 or 2.
However, the present invention is not limited to this. For example, a commercially available polished stainless steel plate is punched into a predetermined shape to form a stainless master plate, and a resin layer is formed on the upper surface of the stainless master plate. After that, the resin layer may be formed by irradiating the resin layer with ultraviolet rays to cure the entire surface.

Further, in this case, instead of the stainless steel plate, another metal plate such as a copper plate or a brass plate, or this plate member may be used. Further, at this time, as the resin to be applied on the metal plate, a cheap low-resolution resin may be used.
The material may be any material.

In the second embodiment described above, as a method for increasing the adhesion between the mirror-like substrate 23 and the 2P resin, the surface of the mirror-like substrate 23 is cleaned and then the glass plate 20 of the mirror-like substrate 23 is opposed. Spin an adhesion improver formed by dissolving a solvent such as silane coupling such as aminoethoxysilane or epoxyethoxysilane in a predetermined solvent such as alcohol, MIBK or ethyl lactate in the range of 0.05 to 5% on the surface. The case of coating is described, but the present invention is not limited to this, and titanium caps such as titanium and acetoacetonate may be used in a predetermined solvent such as alcohol, MIBK, ethyl lactate in the range of 0.05 to 5%. Even if an adhesiveness improver formed by dissolving a solvent such as a ring agent or HMDS (hexamethyldisilazane) is applied to the surface of the mirror-like substrate 20. There.

Further, as another method, 0.05 to 5
Within a range of [%], titanium coupling agents such as titanium and acetoacetonate or HMDS (hexamethyldisilazane) can be added to a specified solvent such as alcohol, MIBK, ethyl lactate, etc.
Adhesion improver formed by dissolving solvent such as 2
A method of adding Cr to the P resin or cleaning the surface of the metal plate forming the mirror substrate 20 in a vacuum by bombarding, reverse sputtering or plasma cleaning, and then Cr.
A method of thinning a metal such as (chrome) or Ti (titanium) can also be used.

Further, in the above-mentioned first and second embodiments, as means for applying the mold release agent to the pit surfaces 3A, 24A of the stampers 3, 24, while rotating the stampers 3, 24 with the turntable 11, The case where the nitrogen gas containing a slight amount of the release agent is blown onto the upper surfaces of the stampers 3 and 24 has been described, but the present invention is not limited to this, and the stampers 3 and 24 are rotated by the turntable 11 while the stampers 3 and 24 are rotated. A thin solvent having a release agent concentration of about 0.01 to 1.0 [%] may be applied to the upper surface of the.

In this case, particularly in the second embodiment, the stamper 2
4 is not formed on the pit surface 24A of the stamper 24, but the convex pits 21A on the glass plate 20 are cured and then the surface of the cured convex pits 21B and the exposed glass plate. The mold release agent layer may be formed in this portion by blowing nitrogen gas containing a small amount of the above-mentioned mold release agent onto the mirror surface 20A of 20.

By doing so, the stamper 24 can be released from the glass plate 20 without damaging the cured convex pits 21B on the glass plate 20 in the subsequent steps, so that the developed glass plate 20 is released. Use any number of 2P
The stamper 24 can be manufactured by the method, and the mold release property is transferred to the surface of the manufactured stamper 24, so that the mold releasability from the stamper 24 at the time of injection molding of the optical disc is increased. Can be improved. Further, in this case, as a means for forming the release agent layer, a solvent may be spin-coated as long as it does not attack the positive resist layer 21B.

Further, in the above-mentioned second embodiment, as a means for copying the uneven pattern of the residual positive resist layer 21A on the glass plate 20, no UV resin 2 is added.
Although the case where 2 is used has been described, the present invention is not limited to this, and the UV resin 22 to which fine particles such as silica and alumina are added may be used. As a result, the UV resin 2 is cured by UV in the subsequent steps.
2 can be increased in strength.

A release agent may be added to the UV resin 22. By doing so, the releasability of the optical disc from the stamper can be improved during optical disc molding. Furthermore, UV resin 22
Instead of, a two-liquid reaction type epoxy resin, various types of resins with variable hardness such as a composite type of UV and thermosetting type can be used. .

Further, in the above-mentioned second embodiment, the case where the glass plate 20 is used as the master for applying the positive resist has been described, but the present invention is not limited to this, and the point is that an extremely smooth surface is used. Any other one may be used as long as it has it.

Further, in the above-described first and second embodiments, the pit surface 3 of the stamper is used as a means for easily releasing the optical disc from the stamper when molding the optical disc.
The case where the method of forming the release agent layer made of the release agent on A and 23A is applied to the stampers 3 and 23 has been described, but the present invention is not limited to this, and other various methods may be used. The present invention can be applied to various stampers for optical discs or molds for producing optical discs.

Further, in the above-mentioned first and second embodiments, the case where the present invention is applied to the manufacture of the stampers 3 and 24 has been described, but the present invention is not limited to this, and various other light beams are also used. It can be applied to the manufacture of molds for manufacturing disks.

[0055]

As described above, according to the present invention, a negative resist layer is formed on one surface side of a substrate whose one surface is extremely smooth, and after the desired optical disk signal is exposed and recorded on the negative resist layer, By developing the negative resist layer and then curing the negative resist layer on the substrate to produce a direct recording medium for an optical disk, it is possible to form an optical disk in a shorter time in a shorter step than in the conventional method. A direct recording medium for an optical disk which can be manufactured as a mold for an optical disk, which can be manufactured in a short time and easily, and a method for manufacturing the same. realizable.

Further, a positive resist layer is formed on one side of the master, and after the desired optical disc signal is exposed and recorded on the positive resist layer, the positive resist layer is developed and the positive resist remaining on the one side of the master thereafter. After curing the resist layer, and then closely adhering one surface of the substrate whose one surface is extremely smooth to one surface of the master through a flexible hardness variable resin,
By curing the variable-hardness resin, the pattern of the photoresist layer on the master is transferred to the variable-hardness resin, and then the substrate and variable-hardness resin are integrally released from the master for optical disc molding. By producing the optical disk direct recording medium used as a mold of, it is possible to produce the optical disk direct recording medium in a shorter time and in a shorter step than in the past, and thus in a short time and It is possible to realize a direct recording medium for an optical disc, which can be easily manufactured, as a mold for optical disc molding, and a manufacturing method thereof.

[Brief description of drawings]

FIG. 1 is a side view for explaining a manufacturing process of an optical disk stamper according to a first embodiment.

FIG. 2 is a schematic diagram showing a configuration of a stamper processing device.

FIG. 3 is a schematic diagram used for explaining a manufacturing process of an optical disk stamper according to a second embodiment.

FIG. 4 is a schematic diagram used to describe a manufacturing process of an optical disk stamper according to a second embodiment.

FIG. 5 is a schematic diagram for explaining the 2P method.

[Explanation of symbols]

1, 23 ... Mirror surface substrate, 1A, 20A ... Mirror surface, 2 ...
Negative resist layer, 2A, 21A ... Convex pits, 2B, 2
1B ... Curing convex pit, 3, 24 ... Stamper, 21 ...
… Positive resist layer, 22 …… UV resin.

Claims (13)

[Claims] 1. A mold used for optical disk molding,
In a direct recording medium for an optical disc on which a desired optical disc signal is recorded, a substrate having one surface formed extremely smooth, and a resin for forming a minute uneven pattern based on the optical disc signal on the one surface side of the substrate A direct recording medium for an optical disk, which comprises a layer. 2. The direct recording medium for an optical disk according to claim 1, wherein the resin layer is made of a hardened resist resin or 2P resin resin. 3. The direct recording medium for an optical disk according to claim 1, wherein the substrate is a metal plate. 4. A method of manufacturing a direct recording medium for an optical disk used as a mold for optical disk molding, wherein a negative resist layer is formed by applying a negative resist on the one surface side of a substrate having one surface formed extremely smooth. A first step of forming, a second step of exposing and recording a desired optical disc signal on the negative resist layer, and then developing the negative resist layer, and a step of developing the negative resist layer on the substrate after the developing. And a third step of curing. A method for manufacturing a direct recording medium for an optical disk, which comprises: 5. The optical disc according to claim 4, wherein the substrate comprises a metal plate and a resin layer provided on one surface of the metal plate and forming the one surface of the substrate. Direct recording medium manufacturing method. 6. The first step comprises the step of subjecting the one surface of the substrate to a surface treatment for improving the adhesion between the negative resist layer and the one surface of the substrate. Item 5. A method for manufacturing a direct recording medium for an optical disk according to item 4. 7. The third step comprises: forming a surface of the cured negative resist layer and a surface of the substrate exposed from between the cured negative resist layer, at the time of molding the optical disk. The direct recording medium for an optical disk according to claim 4, further comprising a step of forming a release agent layer made of a release agent that facilitates releasing the optical disk from the direct recording medium for the optical disk. Production method. 8. A method for manufacturing a direct recording medium for an optical disc used as a mold for optical disc molding, wherein a positive resist is applied to one surface of a master having a predetermined shape to form a positive resist layer. And a step of exposing and recording a desired optical disc signal on the positive resist layer, developing the positive resist layer, and thereafter leaving the positive resist on the one surface of the master in a pattern based on the optical disc signal. Second hardening layer
And the one surface of the substrate having one surface formed extremely smooth is adhered to the one surface side of the master through the flexible hardness variable resin, and then the hardness variable resin is cured,
The method further comprises a third step of transferring the pattern of the photoresist layer on the master to the variable hardness resin, and a fourth step of releasing the substrate and the variable hardness resin integrally from the master. A method of manufacturing a recording medium for an optical disc, comprising: 9. The method for manufacturing a direct recording medium for an optical disk according to claim 8, wherein the master is a glass plate. 10. The optical disk direct optical disk according to claim 8, wherein the substrate comprises a metal plate and a resin layer provided on one surface of the metal plate and forming the one surface of the substrate. Recording medium manufacturing method. 11. The third step includes the step of subjecting the one surface of the substrate to a surface treatment for improving the adhesion between the positive resist layer and the one surface of the substrate. 8. A method for manufacturing a direct recording medium for an optical disc according to item 8. 12. In the second step, the surface of the cured positive resist layer and the one surface of the substrate exposed between the cured positive resist layers are formed at the time of molding the optical disk. 9. The direct recording medium for an optical disk according to claim 8, further comprising a step of forming a release agent layer made of a release agent that facilitates releasing the optical disk from the direct recording medium for the optical disk. Production method. 13. A method of manufacturing a direct recording medium for an optical disc used as a mold for optical disc molding, wherein a fine concave-convex pattern based on a desired optical disc signal is formed on one surface of a substrate having a predetermined shape. And a second step of forming a release agent layer made of a release agent on the one surface of the substrate for facilitating the release of the optical disk from the substrate during the optical disk molding. A method for manufacturing a direct recording medium for an optical disk.