JPH0824772A - Method for cleaning inside of lip of mouthpiece of curtain flow coater and production of coating film for color film - Google Patents

Method for cleaning inside of lip of mouthpiece of curtain flow coater and production of coating film for color film

Info

Publication number
JPH0824772A
JPH0824772A JP16528794A JP16528794A JPH0824772A JP H0824772 A JPH0824772 A JP H0824772A JP 16528794 A JP16528794 A JP 16528794A JP 16528794 A JP16528794 A JP 16528794A JP H0824772 A JPH0824772 A JP H0824772A
Authority
JP
Japan
Prior art keywords
lip
cleaning
coating film
film
curtain flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16528794A
Other languages
Japanese (ja)
Other versions
JP3163905B2 (en
Inventor
Osamu Wada
修 和田
Shinji Tomimatsu
伸二 富松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP16528794A priority Critical patent/JP3163905B2/en
Publication of JPH0824772A publication Critical patent/JPH0824772A/en
Application granted granted Critical
Publication of JP3163905B2 publication Critical patent/JP3163905B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To easily clean the inside of the lip in the mouthpiece of a curtain flow coater used in coating a flat sheet with paint and to obtain the coating film for a color filter excellent in quality and economics by using a cleaning member consisting of film. CONSTITUTION:A paint 9 is supplied into the mouthpiece 3 from a paint feed pipeline 7 with a pump 8. Under such conditions, the foreign matter deposited in a lip 4 in the mouthpiece 3 is cleaned off with a cleaning member 5 fixed to a support 6 and consisting of film, and the paint 9 is applied as a curtain from the lip 4 as the tip of the mouthpiece 3 onto a flat sheet 1 sucked and fixed on a suction sheet 1 sucked and fixed on a suction stage 2 as the flat sheet 1 is transported A to form a coating film. Consequently, the foreign matter deposited in the lip is easily cleaned off, and the coating film for a color filter without any streak and excellent in quality and economics is obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、液晶を用いたカラーデ
ィスプレイや固体撮像素子などに用いられるカラーフィ
ルタ用塗膜の塗布時などに特に好適に用いられるカーテ
ンフローコータの口金のリップ内部の清掃方法およびそ
れを利用したカラーフィルタ用塗膜の製造方法に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to cleaning of the inside of a lip of a die of a curtain flow coater which is particularly suitable for applying a coating film for a color filter used for a color display using a liquid crystal or a solid-state image pickup device. The present invention relates to a method and a method for producing a color filter coating film using the method.

【0002】[0002]

【従来の技術】一般に液晶を用いたディスプレイ等に利
用されるカラーフィルタは、ガラス板等の透明基板上
に、赤、緑、青の3原色パターンがある一定の位置関係
を保って配列されている。このガラス基板等への薄膜塗
布方式の一つとして、カーテンフローコータがある。こ
の塗布方法としては、例えば特開平5−11105号公
報に開示されおり,スリットダイ、ダイヘッド、Tダイ
と呼ばれる口金のリップ部先端から塗料をカーテン状に
吐出し、基板に非接触で塗布する方式のものである。こ
の方式は、吐出されるまでの塗料供給経路が密閉されて
いるために塗料の粘度変化が少なく、塗布膜厚が均一で
あるなどの特徴を有している。
2. Description of the Related Art Generally, a color filter used for a display using liquid crystal is arranged on a transparent substrate such as a glass plate so that three primary color patterns of red, green and blue are arranged in a fixed positional relationship. There is. There is a curtain flow coater as one of the thin film coating methods for the glass substrate and the like. This coating method is disclosed in, for example, Japanese Patent Application Laid-Open No. 5-11105, and a method in which a coating material is discharged in a curtain shape from the tip of a lip portion of a die called a slit die, a die head, and a T die, and is applied in a non-contact manner to a substrate. belongs to. This system is characterized in that the change in the viscosity of the paint is small and the coating film thickness is uniform because the paint supply path until it is discharged is closed.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、この塗
布方法の欠点は、口金のリップ部間隔が50〜150μ
mと狭いために、塗料成分の一つである顔料の凝集物や
顔料以外の混入異物が塗料と共に口金から吐出される際
にリップ内部の一部がつまり、塗布した塗膜に塗布方向
の縦スジとなって発生しやすいことである。
However, the drawback of this coating method is that the lip interval of the die is 50 to 150 .mu.m.
Since it is as narrow as m, a part of the inside of the lip is clogged when pigment agglomerates, which are one of the paint components, and mixed foreign substances other than the pigment are discharged from the die together with the paint. It is likely to occur as streaks.

【0004】したがって、本発明の目的は、塗料粘度の
変化が少なく、塗布膜厚が均一であるなどの従来のカー
テンフローコータの特徴を保持したままで、これまでの
課題である口金のリップ内部に付着した異物を容易に清
掃して、塗布スジがなく、品質および経済性に優れたカ
ラーフィルタ用塗膜を提供することのできるカーテンフ
ローコータの口金の清掃方法を提供することにある。
Therefore, it is an object of the present invention to maintain the characteristics of the conventional curtain flow coater such as a change in the viscosity of the coating and a uniform coating film thickness, while maintaining the inside of the lip of the mouthpiece, which has been a problem to date. (EN) Provided is a method for cleaning a die of a curtain flow coater, which can easily clean foreign matter attached to a coating material and can provide a coating film for a color filter having no coating stripe and excellent in quality and economy.

【0005】[0005]

【課題を解決するための手段】本発明は、次の構成を有
するものである。
The present invention has the following configuration.

【0006】 平板上に塗料を塗布する際に用いられ
るカーテンフローコータの口金のリップ内部の清掃方法
において、該口金のリップ内部をフィルムからなる清掃
部材を用いて清掃することを特徴とするカーテンフロー
コータの口金のリップ内部の清掃方法。
[0006] In a method of cleaning the inside of the lip of a die of a curtain flow coater used when applying a coating material on a flat plate, the inside of the lip of the die is cleaned using a cleaning member made of a film. How to clean the inside of the coater lip.

【0007】 透明平板上にカラーフィルタ用塗膜形
成用塗料をカーテンフローコータを用いて塗布する工程
を含むカラーフィルタ用塗膜の製造方法において、該カ
ーテンフローコータの口金のリップ内部をフィルムから
なる清掃部材を用いて清掃する工程を含むことを特徴と
するカラーフィルタ用塗膜の製造方法。
In a method for producing a coating film for a color filter including a step of applying a coating material for forming a coating film for a color filter on a transparent flat plate by using a curtain flow coater, the inside of a lip of a die of the curtain flow coater is made of a film. A method for producing a coating film for a color filter, comprising a step of cleaning using a cleaning member.

【0008】次に本発明におけるカーテンフローコータ
の口金のリップ内部の清掃方法を図面にしたがって説明
する。
Next, a method of cleaning the inside of the lip of the die of the curtain flow coater according to the present invention will be described with reference to the drawings.

【0009】図1,図2,図3および図4は、本発明に
かかるカーテンフローコータ(スリットダイコータ)に
よる塗布の一例を示す概略図である。すなわち、図1お
よび図2は、塗料を塗布する直前に清掃部材5によって
口金3のリップ4の内部を清掃している状態を示し、図
3および図4は、口金3のリップ4の内部の清掃が終了
し、塗料の塗布を開始した状態を示す。図1および図3
は平板の搬送方向に垂直な方向から見た図であり、図2
および図4は平板の搬送方向から見た図である。
1, FIG. 2, FIG. 3 and FIG. 4 are schematic views showing an example of coating by a curtain flow coater (slit die coater) according to the present invention. That is, FIGS. 1 and 2 show a state in which the inside of the lip 4 of the mouthpiece 3 is cleaned by the cleaning member 5 immediately before applying the paint, and FIGS. 3 and 4 show the inside of the lip 4 of the mouthpiece 3. Shows the state where the cleaning is completed and the application of paint is started. 1 and 3
2 is a view seen from a direction perpendicular to the conveyance direction of the flat plate.
4 and FIG. 4 are views seen from the transport direction of the flat plate.

【0010】すなわち、塗料9はポンプ8によって塗料
供給配管7から口金3の内部に供給される。この状態
で、口金3のリップ4の内部に付着した異物を清掃部材
5によって清掃する。つづいて平板1の搬送(矢印A方
向)に従い、口金3の先端であるリップ4からカーテン
状態で吸着ステージ2上に吸着固定された平板1上に塗
料が塗布され、塗膜10が形成される。塗膜の均一性
は、カーテン状に吐出される塗料を口金先端部にあるリ
ップ4の間隔や平板1とリップ4の間隔を調整してコン
トロールされる。
That is, the paint 9 is supplied to the inside of the base 3 from the paint supply pipe 7 by the pump 8. In this state, the cleaning member 5 cleans the foreign matter adhering to the inside of the lip 4 of the mouthpiece 3. Subsequently, as the flat plate 1 is conveyed (in the direction of arrow A), the coating is applied from the lip 4 which is the tip of the die 3 to the flat plate 1 which is suction-fixed on the suction stage 2 in a curtain state, and a coating film 10 is formed. . The uniformity of the coating film is controlled by adjusting the distance between the lips 4 at the tip of the die and the distance between the flat plate 1 and the lips 4 when the coating material is discharged in a curtain shape.

【0011】清掃手順の一例を図2にしたがって説明す
る。すなわち、清掃部材5は支持体(治具など)6によ
って固定されており、清掃部材5が口金3のリップ4の
中に入り込んだ状態で清掃装置(清掃部材5および支持
体6)がリップ4に沿ってBまで往復し、清掃を完了す
る。ただし、本発明はこれに限定されず、清掃部材5は
支持体によって固定されていなくてもよい。
An example of the cleaning procedure will be described with reference to FIG. That is, the cleaning member 5 is fixed by the support member (jig or the like) 6, and the cleaning device (the cleaning member 5 and the support member 6) moves in the state where the cleaning member 5 enters the lip 4 of the mouthpiece 3. Return to B along and complete the cleaning. However, the present invention is not limited to this, and the cleaning member 5 may not be fixed by the support.

【0012】清掃方法としては、清掃部材を口金リップ
内部に挿入し手動清掃をする方法、清掃部材を支持体に
固定したものを用いて自動清掃する方法があげられる。
手動清掃は作業工程において時間がかかると共に人体か
ら発生した埃りにより基板が汚染され、塗膜の異物原因
になるなどの問題があるために、自動清掃が好ましい。
Examples of the cleaning method include a method in which a cleaning member is inserted into the mouthpiece lip for manual cleaning, and a method in which a cleaning member fixed to a support is used for automatic cleaning.
Manual cleaning has a problem in that it takes time in a work process and the substrate is contaminated by dust generated from a human body, which may cause foreign matter in the coating film. Therefore, automatic cleaning is preferable.

【0013】清掃部材5はフィルムからなるものであ
り、テフロン、ポリエステル、ポリプロピレン、ポリイ
ミドなどのフィルムが好ましく用いられる。図5に清掃
部材5の一例を示すが、フィルムの厚みは、リップ4の
先端の間隔より10〜25μm狭い厚さのものが好まし
い。これよりも薄い場合清掃効果が低く、これよりも厚
いとフィルムがリップ内部に入らない。
The cleaning member 5 is made of a film, and a film made of Teflon, polyester, polypropylene, polyimide or the like is preferably used. An example of the cleaning member 5 is shown in FIG. 5, but the thickness of the film is preferably 10 to 25 μm narrower than the distance between the tips of the lips 4. If it is thinner than this, the cleaning effect is low, and if it is thicker than this, the film does not enter the inside of the lip.

【0014】清掃部材による清掃は、塗料を塗布する直
前に行うと、口金のリップ内部に付着した塗料や異物が
ほとんど除去されるので最も効果的であるが、これに限
定されず、適宜行うことができる。
The cleaning by the cleaning member is most effective if it is carried out immediately before the coating of the coating material, because most of the coating material and the foreign matter adhering to the inside of the lip of the die are removed. You can

【0015】本発明のカーテンフローコータによる塗布
は、スリットダイコータによる方法に限定されず、ダイ
ヘッド、Tダイなどによる方法でも良い。また塗料の供
給手段は、ポンプに限定されず、圧空などの方式による
ものでも良い。
The coating by the curtain flow coater of the present invention is not limited to the method using the slit die coater, but may be a method using a die head, a T-die or the like. Further, the paint supply means is not limited to the pump, and may be a method such as compressed air.

【0016】塗料がカラーフィルタ用塗膜形成用塗料で
ある場合には、特に塗膜の外観が良好であることが要求
されるので、本発明のカーテンフローコータの口金のリ
ップ内部の清掃方法は特に好適に用いられる。
When the paint is a paint for forming a paint film for a color filter, it is particularly required that the appearance of the paint film is good. Therefore, the method for cleaning the inside of the lip of the die of the curtain flow coater of the present invention is Particularly preferably used.

【0017】以下、カラーフィルタ用塗膜形成に本発明
の口金のリップ内部の清掃方法を適用した場合について
説明する。
The case of applying the method for cleaning the inside of the lip of the die of the present invention to the formation of a color filter coating film will be described below.

【0018】カラーフィルタ用塗膜形成の場合、平板と
して透明平板を用いる。透明平板としては、特に限定さ
れるものでないが、ポリカーボネート、ポリメチルメタ
クリレート等のプラスチック平板やプラスチックフイル
ムおよびガラス板等全光線透過率が70%以上の透明平
板が好ましく用いられる。なおこれらの中ではガラス板
がより好ましく用いられる。
When forming a coating film for a color filter, a transparent flat plate is used. The transparent flat plate is not particularly limited, but a transparent flat plate having a total light transmittance of 70% or more, such as a plastic flat plate made of polycarbonate, polymethylmethacrylate or the like, a plastic film or a glass plate is preferably used. Of these, a glass plate is more preferably used.

【0019】塗料の種類としては、特に限定されるもの
でないが、アクリル樹脂、ポリエステル樹脂、ポリビニ
ルアルコール樹脂、ポリアミド酸樹脂、ポリイミド樹脂
等の一種または二種以上の混合物およびこれらの感光性
樹脂等が好ましく用いられる。なお、これらの樹脂に染
料または顔料等の着色剤を分散混合して使用することも
できる。
The type of coating material is not particularly limited, but one or a mixture of two or more of acrylic resin, polyester resin, polyvinyl alcohol resin, polyamic acid resin, polyimide resin, etc., and photosensitive resin thereof, etc. may be used. It is preferably used. In addition, a colorant such as a dye or a pigment may be dispersed and mixed with these resins before use.

【0020】透明平板への塗布後の膜厚は、特に限定さ
れるものでないが、乾燥塗膜の状態で0.1μm〜5μ
mの範囲が好ましく、より好ましくは、0.2μm〜3
μmの範囲が好適に用いられる。乾燥後の塗膜が0.1
μm未満では、乾燥塗膜に縦状のスジが発生し、品質上
問題である。一方5μmをこえる場合は、塗料の使用量
が多くなり、経済性に欠ける。
The film thickness after coating on a transparent flat plate is not particularly limited, but is 0.1 μm to 5 μm in the state of a dry coating film.
The range of m is preferable, and more preferably 0.2 μm to 3
The range of μm is preferably used. The coating film after drying is 0.1
If it is less than μm, vertical streaks are generated in the dried coating film, which is a quality problem. On the other hand, if it exceeds 5 μm, the amount of paint used increases, and the economy is poor.

【0021】カラーフィルタの製造方法については、例
えば、以下の方法が挙げられるが、これらに限定される
ものでない。まず透明平板上に微細パターンからなる遮
光層を形成する。この遮光層上に着色剤を添加した熱硬
化性の塗料を塗布し、50℃〜150℃の温度で乾燥し
て、熱硬化性塗膜を形成する。続いて該熱硬化性塗膜上
にポジ型フォトレジストを塗布し、超高圧水銀灯等を用
いてマスク露光を行い、次いで該ポジ型フォトレジスト
を現像・エッチングし、レリーフパターンを形成した
後、該レリーフパターンをマスクとして、該熱硬化性塗
膜をエッチングする。続いて該ポジ型フォトレジストを
剥離した後、200℃〜350℃に加熱焼成し、塗膜を
熱硬化する。以上の工程を赤色、緑色および青色につい
てくり返し、所定の赤色、緑色および青色の微細パター
ンを形成し、カラーフィルタとする。
The method of manufacturing the color filter includes, for example, the following methods, but is not limited to these. First, a light shielding layer having a fine pattern is formed on a transparent flat plate. A thermosetting paint containing a colorant is applied onto the light-shielding layer and dried at a temperature of 50 ° C. to 150 ° C. to form a thermosetting coating film. Subsequently, a positive photoresist is applied on the thermosetting coating film, mask exposure is performed using an ultrahigh pressure mercury lamp or the like, and then the positive photoresist is developed and etched to form a relief pattern, The thermosetting coating film is etched using the relief pattern as a mask. Then, after peeling off the positive photoresist, the coating film is heat-baked at 200 ° C. to 350 ° C. to thermally cure the coating film. The above steps are repeated for red, green, and blue to form predetermined red, green, and blue fine patterns to form a color filter.

【0022】塗料の乾燥温度は、50℃〜160℃の範
囲が好ましく、より好ましくは、80℃〜130℃の範
囲が好適である。50℃未満では、乾燥時間が長く生産
効率が悪くなる。一方160℃をこえる場合は、熱硬化
が進行してしまい現像液に不溶化してしまう。
The drying temperature of the coating material is preferably in the range of 50 ° C to 160 ° C, more preferably 80 ° C to 130 ° C. If the temperature is lower than 50 ° C, the drying time will be long and the production efficiency will be poor. On the other hand, when the temperature exceeds 160 ° C., thermosetting proceeds and becomes insoluble in the developing solution.

【0023】一方着色剤を添加した感光性塗料の場合
は、透明平板上に微細パターンからなる遮光層を形成
し、該遮光層上に着色剤を添加した感光性塗料を塗布し
て、50℃〜150℃の温度で乾燥して、感光性塗膜を
形成する。続いて超高圧水銀灯等を用いてマスク露光を
行い、感光性塗膜を光硬化する。その後遮光層上の未硬
化感光性塗膜を現像・エッチングする。以上の工程を赤
色、緑色および青色についてくり返し、所定の赤色、緑
色および青色の微細パターンを形成し、カラーフィルタ
とする。
On the other hand, in the case of a photosensitive coating containing a colorant, a light-shielding layer having a fine pattern is formed on a transparent flat plate, the photosensitive coating containing a colorant is applied on the light-shielding layer, and the temperature is 50 ° C. Dry at a temperature of ~ 150 ° C to form a photosensitive coating. Subsequently, mask exposure is performed using an ultra-high pressure mercury lamp or the like to photo-cur the photosensitive coating film. Then, the uncured photosensitive coating film on the light shielding layer is developed and etched. The above steps are repeated for red, green, and blue to form predetermined red, green, and blue fine patterns to form a color filter.

【0024】なお必要に応じて、該赤色、緑色および青
色の微細パターン上に保護膜および平滑性を高める目的
で着色剤を含まない塗料を塗布して、カラーフィルタと
してもよい。
If necessary, a paint containing no colorant may be applied to the red, green and blue fine patterns to form a protective film and a smoothness to form a color filter.

【0025】本発明によるカーテンフローコータの口金
のリップ内部の清掃方法は、以上のカラーフィルタ製造
工程における各種カラーフィルタ用塗膜形成用塗料の塗
布に有効である。すなわち、赤色、緑色、青色の微細パ
ターン形成用塗料、遮光層形成用塗料、保護膜形成用塗
料などである。
The method for cleaning the inside of the lip of the die of the curtain flow coater according to the present invention is effective for applying the coating material for forming a coating film for various color filters in the above color filter manufacturing process. That is, a red, green, and blue fine pattern forming paint, a light shielding layer forming paint, a protective film forming paint, and the like.

【0026】[0026]

【実施例】以下に、実施例を挙げて本発明を詳細に説明
するが、これらに限定されるものでない。
The present invention will be described in detail below with reference to examples, but the invention is not limited thereto.

【0027】実施例1、比較例1 図1,図2,図3および図4に示す塗布装置を用いて、
ガラス基板上に塗料を塗布した。ガラス基板は、大きさ
300mm×350mm、厚さ1.1mmのものを使用
し、塗布する直前に清掃部材5を用いて口金3のリップ
4の内部を清掃した。その後にNメチルピロリドン溶剤
と塩臭素化フタルシアニングリーン(C.I.ピグメン
トグリーン36)とジスアゾイエローHR(C.I.ピ
グメントイエロー83)顔料を添加・分散したポリアミ
ド酸塗料を固形分8wt%、粘度100cpの状態で2
m/分の速度で塗布し、120℃で10分乾燥した。清
掃部材5としては、100μm厚のポリエステルフィル
ムを口金のリップ内部に接する形状に作成し、幅15m
mで使用した(実施例1,2)。以上の方法でガラス基
板50枚おきに自動清掃(実施例1)および手動清掃
(実施例2)を行い1000枚連続塗布した結果、清掃
後のリップ部内部には、異物の付着が非常に少なく、得
られたいずれの塗布基板も縦状のスジ、および埃などに
よる汚染がなく、良好な塗膜が得られた。
Example 1, Comparative Example 1 Using the coating apparatus shown in FIGS. 1, 2, 3 and 4,
The paint was applied on a glass substrate. A glass substrate having a size of 300 mm × 350 mm and a thickness of 1.1 mm was used, and the inside of the lip 4 of the die 3 was cleaned with the cleaning member 5 immediately before coating. After that, a polyamic acid paint in which an N-methylpyrrolidone solvent, a salt-brominated phthalcyanine green (CI Pigment Green 36), and a disazo yellow HR (CI Pigment Yellow 83) pigment were added and dispersed was added, and the solid content was 8 wt%. 2 at a viscosity of 100 cp
It was applied at a speed of m / min and dried at 120 ° C. for 10 minutes. As the cleaning member 5, a polyester film having a thickness of 100 μm is formed in such a shape as to come into contact with the inside of the lip of the die, and the width is 15 m.
m (Examples 1 and 2). As a result of automatic cleaning (Embodiment 1) and manual cleaning (Embodiment 2) of every 50 glass substrates by the above method and continuously applying 1000 sheets, foreign matters are very little adhered inside the lip portion after cleaning. All of the obtained coated substrates were free from vertical stripes and contamination by dust, etc., and good coating films were obtained.

【0028】一方、本発明の清掃部材を使用しないで実
施例1,実施例2と同様な方法で塗布を行った(比較例
1)。表1に実施例1,2で得られた塗布基板と比較例
1で得られた塗布基板の塗膜の外観を目視評価した結果
を比較して示した。
On the other hand, application was carried out in the same manner as in Examples 1 and 2 without using the cleaning member of the present invention (Comparative Example 1). Table 1 shows the results of visual evaluation of the appearance of the coating films of the coated substrates obtained in Examples 1 and 2 and the coated substrate obtained in Comparative Example 1 for comparison.

【0029】[0029]

【表1】 比較例1では、塗布枚数が多くなるにつれて、口金のリ
ップ内部に付着した異物で汚れてくる。その結果、縦状
スジの発生、および人体発塵起因の異物が増大する。一
方実施例1では、この様な現象が発生せず、外観上問題
のない良好な塗布基板が得られた。また実施例2では若
干の異物の付着があったものの、実用上問題のない範囲
であった。
[Table 1] In Comparative Example 1, as the number of coatings increases, the foreign matter adhered inside the lip of the die contaminates. As a result, the generation of vertical stripes and the amount of foreign matter due to human body dust increase. On the other hand, in Example 1, such a phenomenon did not occur, and a good coated substrate having no problem in appearance was obtained. Further, in Example 2, although some foreign matter was attached, it was within a range where there was no practical problem.

【0030】[0030]

【発明の効果】本発明によると、口金のリップ内部に付
着した塗料成分の一つである顔料の凝集物や顔料以外の
混入異物を確実に除去することができる。したがって、
平板上の塗膜に縦スジや塗布むら、顔料起因の汚染など
の外観不良が発生せず、生産性を著しく向上させること
ができる。
According to the present invention, it is possible to reliably remove a pigment aggregate which is one of the paint components adhering to the inside of the lip of the die and a foreign substance mixed in other than the pigment. Therefore,
The appearance of defects such as vertical stripes, uneven coating and stains due to pigments does not occur on the coating film on the flat plate, and the productivity can be remarkably improved.

【0031】また、該清掃を自動清掃で行うことにより
人体の発塵起因の異物汚染による外観不良も確実に防止
することができる。
Further, by performing the cleaning automatically, it is possible to surely prevent the appearance defect due to the contamination of foreign substances due to the dust generation of the human body.

【0032】なお、カラーフィルタ用塗膜には特に外観
が良好であることが要求されるので、カラーフィルタ用
塗膜をカーテンフローコータで形成する場合にこの清掃
方法は特に有効である。
Since the color filter coating film is required to have a particularly good appearance, this cleaning method is particularly effective when the color filter coating film is formed by a curtain flow coater.

【0033】したがって、高品質で価格の安い経済性に
優れたカラーフィルタの連続生産が可能となる。
Therefore, it is possible to continuously produce a color filter which is high in quality, low in cost and excellent in economic efficiency.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明にかかるカーテンフローコータ(スリッ
トダイコータ)による塗布の一例を示す概略図であり、
塗料を塗布する直前に清掃部材によって口金の内部を清
掃している状態を平板の搬送方向に垂直な方向から見た
図である。
FIG. 1 is a schematic view showing an example of coating by a curtain flow coater (slit die coater) according to the present invention,
It is the figure which looked at the state which is cleaning the inside of the mouthpiece by the cleaning member just before applying paint from the direction perpendicular to the conveyance direction of a flat plate.

【図2】本発明にかかるカーテンフローコータ(スリッ
トダイコータ)による塗布の一例を示す概略図であり、
塗料を塗布する直前に清掃部材によって口金の内部を清
掃している状態を平板の搬送方向から見た図である。
FIG. 2 is a schematic view showing an example of coating by a curtain flow coater (slit die coater) according to the present invention,
It is the figure which looked at the state where the inside of the mouthpiece was cleaned by the cleaning member just before applying paint from the conveyance direction of the flat plate.

【図3】本発明にかかるカーテンフローコータ(スリッ
トダイコータ)による塗布の一例を示す概略図であり、
口金のリップ内部の清掃が終了し、塗料の塗布を開始し
た状態を平板の搬送方向に垂直な方向から見た図であ
る。
FIG. 3 is a schematic view showing an example of coating by a curtain flow coater (slit die coater) according to the present invention,
It is the figure which looked at the state where cleaning of the inside of the lip of the mouthpiece was completed and application of paint was started from the direction perpendicular to the transport direction of the flat plate.

【図4】本発明にかかるカーテンフローコータ(スリッ
トダイコータ)による塗布の一例を示す概略図であり、
口金のリップ内部の清掃が終了し、塗料の塗布を開始し
た状態を平板の搬送方向から見た図である。
FIG. 4 is a schematic view showing an example of coating by a curtain flow coater (slit die coater) according to the present invention,
It is the figure which looked at the state where the cleaning of the inside of the lip of the mouthpiece was completed and the application of the paint was started from the conveyance direction of the flat plate.

【図5】カーテンフローコータの口金のリップ内部を清
掃する清掃部材の一例を示す概略図である。
FIG. 5 is a schematic view showing an example of a cleaning member for cleaning the inside of the lip of the die of the curtain flow coater.

【符号の説明】[Explanation of symbols]

1:平板 2:吸着ステージ 3:口金 4:リップ 5:清掃部材 6:清掃部材の支持体 7:塗料供給配管 8:ポンプ 9:塗料 10:塗膜 1: Flat plate 2: Suction stage 3: Base 4: Lip 5: Cleaning member 6: Support for cleaning member 7: Paint supply pipe 8: Pump 9: Paint 10: Paint film

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 平板上に塗料を塗布する際に用いられる
カーテンフローコータの口金のリップ内部の清掃方法に
おいて、該口金のリップ内部をフィルムからなる清掃部
材を用いて清掃することを特徴とするカーテンフローコ
ータの口金のリップ内部の清掃方法。
1. A method for cleaning the inside of the lip of a die of a curtain flow coater used when applying paint on a flat plate, wherein the inside of the lip of the die is cleaned using a cleaning member made of a film. How to clean the inside of the lip of the curtain flow coater.
【請求項2】 フィルムからなる清掃部材を支持体で固
定した清掃装置を用いて清掃することを特徴とする請求
項1記載のカーテンフローコータの口金のリップ内部の
清掃方法。
2. The method for cleaning the inside of the lip of the mouthpiece of a curtain flow coater according to claim 1, wherein the cleaning member is made of a film and fixed to a support to clean the cleaning member.
【請求項3】 平板上にカーテンフローコータで塗料を
塗布する直前に該カーテンフローコータの口金のリップ
内部を清掃することを特徴とする請求項1記載のカーテ
ンフローコータの口金のリップ内部の清掃方法。
3. The cleaning of the inside of the lip of the base of the curtain flow coater according to claim 1, wherein the inside of the lip of the base of the curtain flow coater is cleaned immediately before the coating of the paint on the flat plate with the curtain flow coater. Method.
【請求項4】 塗料がカラーフィルタ用塗膜形成用塗料
であることを特徴とする請求項1記載のカーテンフロー
コータの口金のリップ内部の清掃方法。
4. The method for cleaning the inside of the lip of the die of a curtain flow coater according to claim 1, wherein the paint is a paint for forming a coating film for a color filter.
【請求項5】 透明平板上にカラーフィルタ用塗膜形成
用塗料をカーテンフローコータを用いて塗布する工程を
含むカラーフィルタ用塗膜の製造方法において、該カー
テンフローコータの口金のリップ内部をフィルムからな
る清掃部材を用いて清掃する工程を含むことを特徴とす
るカラーフィルタ用塗膜の製造方法。
5. A method for producing a coating film for a color filter, comprising the step of applying a coating material for forming a coating film for a color filter onto a transparent flat plate by using a curtain flow coater, wherein a film is formed inside the lip of the die of the curtain flow coater. A method for producing a coating film for a color filter, comprising the step of cleaning using a cleaning member consisting of.
【請求項6】 フィルムからなる清掃部材を支持体で固
定した清掃装置を用いて清掃することを特徴とする請求
項5記載のカラーフィルタ用塗膜の製造方法。
6. The method for producing a coating film for a color filter according to claim 5, wherein cleaning is performed using a cleaning device in which a cleaning member made of a film is fixed by a support.
【請求項7】 透明平板上にカーテンフローコータでカ
ラーフィルタ用塗膜形成用塗料を塗布する直前に該カー
テンフローコータの口金のリップ内部を清掃することを
特徴とする請求項5記載のカラーフィルタ用塗膜の製造
方法。
7. The color filter according to claim 5, wherein the inside of the lip of the die of the curtain flow coater is cleaned immediately before applying the coating material for forming a color filter coating film on the transparent flat plate with the curtain flow coater. Of manufacturing coating film for automobile.
JP16528794A 1994-07-18 1994-07-18 Method for cleaning inside lip of mouthpiece of curtain flow coater and method for producing coating film for color filter Expired - Lifetime JP3163905B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16528794A JP3163905B2 (en) 1994-07-18 1994-07-18 Method for cleaning inside lip of mouthpiece of curtain flow coater and method for producing coating film for color filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16528794A JP3163905B2 (en) 1994-07-18 1994-07-18 Method for cleaning inside lip of mouthpiece of curtain flow coater and method for producing coating film for color filter

Publications (2)

Publication Number Publication Date
JPH0824772A true JPH0824772A (en) 1996-01-30
JP3163905B2 JP3163905B2 (en) 2001-05-08

Family

ID=15809466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16528794A Expired - Lifetime JP3163905B2 (en) 1994-07-18 1994-07-18 Method for cleaning inside lip of mouthpiece of curtain flow coater and method for producing coating film for color filter

Country Status (1)

Country Link
JP (1) JP3163905B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110050254A (en) * 2009-11-06 2011-05-13 주식회사 디엠에스 Slit coater
KR20120116880A (en) * 2011-04-13 2012-10-23 도쿄 오카 고교 가부시키가이샤 Coating apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5970329B2 (en) 2012-10-17 2016-08-17 日本航空電子工業株式会社 connector

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110050254A (en) * 2009-11-06 2011-05-13 주식회사 디엠에스 Slit coater
KR20120116880A (en) * 2011-04-13 2012-10-23 도쿄 오카 고교 가부시키가이샤 Coating apparatus
JP2012222281A (en) * 2011-04-13 2012-11-12 Tokyo Ohka Kogyo Co Ltd Coating apparatus
TWI571316B (en) * 2011-04-13 2017-02-21 Tokyo Ohka Kogyo Co Ltd Coating device

Also Published As

Publication number Publication date
JP3163905B2 (en) 2001-05-08

Similar Documents

Publication Publication Date Title
KR101085845B1 (en) Coating method of die coater and pellicle for photolithographies manufactured by this method
JP3306838B2 (en) CLEANING METHOD FOR CURTAIN FLOW COATER AND METHOD FOR PRODUCING COATING FILM FOR COLOR FILTER
JPH0824772A (en) Method for cleaning inside of lip of mouthpiece of curtain flow coater and production of coating film for color film
JP2003112103A (en) Coating apparatus, coating method, and apparatus and method for producing color filter
JPH078894A (en) Formation of coating film
JPH08155369A (en) Curtain-flow coater and production of coating film using same
JP3963329B2 (en) Curtain flow coater, coating method using the same and method for producing coating film for color filter
KR970007060B1 (en) Apparatus for forming a coating of a viscous liquid on an object
TWI558677B (en) Glass recycling process, recycled glass substrate, photomask blanks using recycled glass substrate, and photomask using recycled glass substrate
JP3728798B2 (en) Development method
JP3869497B2 (en) Application method
JPH02290277A (en) Method and apparatus for applying viscous liquid
JPH0619125A (en) Production of pellicle
JP3033632B2 (en) Method for manufacturing color filter and liquid crystal display element
JPH08173891A (en) Production of coated film
JPH09268032A (en) Cleansing of glass substrate for color filter
JPH11242106A (en) Manufacture of color filter
JPH02118662A (en) Developing processing method
JPH039354A (en) Method for correcting defect of emulsion mask or the like
JPH08182960A (en) Coating film-formed material
JPH0611828A (en) Production of pellicle
JPH1090513A (en) Production of color filter by laser etching and polishing system
JP2004012609A (en) Residue removing device for color filter substrate and method for manufacturing color filter substrate by using the device
JP2002071932A (en) Method of forming resist pattern
JPH02245705A (en) Production of color filter

Legal Events

Date Code Title Description
FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080302

Year of fee payment: 7

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090302

Year of fee payment: 8

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090302

Year of fee payment: 8

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100302

Year of fee payment: 9

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110302

Year of fee payment: 10

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 10

Free format text: PAYMENT UNTIL: 20110302

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120302

Year of fee payment: 11

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 11

Free format text: PAYMENT UNTIL: 20120302

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 12

Free format text: PAYMENT UNTIL: 20130302

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 12

Free format text: PAYMENT UNTIL: 20130302

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 13

Free format text: PAYMENT UNTIL: 20140302

EXPY Cancellation because of completion of term