JPH08234188A - Production of liquid crystal display device - Google Patents

Production of liquid crystal display device

Info

Publication number
JPH08234188A
JPH08234188A JP7037142A JP3714295A JPH08234188A JP H08234188 A JPH08234188 A JP H08234188A JP 7037142 A JP7037142 A JP 7037142A JP 3714295 A JP3714295 A JP 3714295A JP H08234188 A JPH08234188 A JP H08234188A
Authority
JP
Japan
Prior art keywords
color filter
cell
liquid crystal
substrate
filter substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7037142A
Other languages
Japanese (ja)
Inventor
Nobuhiko Ohashi
信彦 大橋
Takeshi Kohama
武史 小浜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP7037142A priority Critical patent/JPH08234188A/en
Publication of JPH08234188A publication Critical patent/JPH08234188A/en
Pending legal-status Critical Current

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  • Liquid Crystal (AREA)

Abstract

PURPOSE: To shorten the time of pressure reducing, heating and holding prior to liquid crystal injection in a cell state and to suppress cell deformation by previously subjecting a color filter substrate alone to a reduced pressure heat treatment prior to assembling a cell, then executing degassing of color filters. CONSTITUTION: The color filter substrate 4 is formed by successively forming the color filters 12, a protective film 13, transparent electrodes 14 and an insulating film 15 on the glass substrate 11. This color filter substrate 4 is arranged in a vacuum chamber in order to subject the substrate to the degassing treatment. After the pressure in the chamber is reduced, the color filter substrate 4 is heated and is held under the reduced pressure heating conditions and thereafter, the vacuum chamber is opened. An oriented film control film and sealing materials 19 are then formed on the substrate 4. On the other hand, transparent electrodes (not shown), an insulating film 15a and an orientation control film 16a are successively formed on the opposite glass substrate 11a and thereafter, spacers 18 and adhesive particulates 7 are sprayed thereon. This substrate and the color filter substrate 4 are superposed on each other and are adhered to form an empty cell (the cell into which liquid crystals are not injected).

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は液晶表示装置の製造方法
に係り、特にセル組み立て前にカラーフィルタ基板を真
空加熱処理することにより、液晶注入時の真空保持時間
短縮とセル内残留気泡発生の防止を可能にしたカラーフ
ィルタを有する液晶表示装置の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a liquid crystal display device, and in particular, by performing a vacuum heat treatment on a color filter substrate before cell assembly, the vacuum holding time during liquid crystal injection is shortened and residual bubbles in the cell are generated. The present invention relates to a method for manufacturing a liquid crystal display device having a color filter that enables prevention.

【0002】[0002]

【従来の技術】カラーフィルタを有する液晶表示装置に
おいては、減圧状態でカラーフィルタからガスが発生し
やすい。特に、強誘電性、反強誘電性液晶では液晶注入
時にセルを加熱する必要があるため、上記のガス発生は
より顕著となる。
2. Description of the Related Art In a liquid crystal display device having a color filter, gas is easily generated from the color filter under reduced pressure. Particularly, in the case of a ferroelectric or antiferroelectric liquid crystal, it is necessary to heat the cell at the time of injecting the liquid crystal, so that the above gas generation becomes more remarkable.

【0003】そして、このようなカラーフィルタを有す
る液晶表示装置の液晶注入においては、カラーフィルタ
からガスが発生すると、液晶注入後にセル内に残留気泡
が発生することにより、液晶表示装置としては致命的な
欠陥となる。
In the liquid crystal injection of a liquid crystal display device having such a color filter, when gas is generated from the color filter, residual bubbles are generated in the cell after the liquid crystal is injected, which is fatal for the liquid crystal display device. It becomes a defect.

【0004】このため、特開平4−42129号公報に
開示されているように、液晶注入前にセルを減圧加熱条
件下に長時間保持することでカラーフィルタからのガス
を除去して、液晶注入後の残留気泡を防止する方法が従
来より行われている。
Therefore, as disclosed in Japanese Unexamined Patent Publication No. 4-42129, the gas from the color filter is removed by holding the cell under reduced pressure heating conditions for a long time before injecting the liquid crystal to inject the liquid crystal. The method of preventing the residual air bubbles afterwards is conventionally performed.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、この場
合、液晶注入前の減圧加熱保持時間が著しく長くなるこ
とと、減圧過程でのセル内外圧力差および加熱ストレス
によるセル変形、すなわちセルギャップが乱れるという
問題がある。
However, in this case, the depressurization heating and holding time before injecting the liquid crystal becomes remarkably long, and the cell deformation due to the pressure difference between the inside and outside of the cell during the depressurization process and the heating stress, that is, the cell gap is disturbed. There's a problem.

【0006】特に、セル内部に接着微粒子を散布した液
晶表示装置では、上記セル変形によって接着微粒子が剥
離することがある。そこで本発明は、以上のような点に
鑑みてなされたもので、カラーフィルタ基板をセル組み
立て前にあらかじめ単体で減圧加熱処理して、カラーフ
ィルタの脱ガスを行うことにより、セル状態での液晶注
入前の減圧加熱保持時間を短縮し、これに伴なうセル変
形を抑制し、液晶注入後のセル内残留気泡発生を防止す
ることができるようにした液晶表示装置の製造方法を提
供することを目的としている。
Particularly, in the liquid crystal display device in which the adhesive fine particles are dispersed inside the cell, the adhesive fine particles may be peeled off due to the cell deformation. Therefore, the present invention has been made in view of the above point, and the color filter substrate is preliminarily subjected to a reduced pressure heat treatment prior to cell assembly, and degassing of the color filter is performed to thereby obtain a liquid crystal in a cell state. To provide a method for manufacturing a liquid crystal display device capable of shortening a holding time under reduced pressure before injection, suppressing a cell deformation accompanying it, and preventing generation of residual bubbles in a cell after liquid crystal injection. It is an object.

【0007】[0007]

【課題を解決するための手段】本発明によると、上記課
題を解決するために、カラーフィルタ基板と対向基板と
をセル化してなる液晶表示装置の製造方法において、上
記カラーフィルタ基板をセル組み立て前にあらかじめ単
体で減圧加熱処理する工程を具備することを特徴とする
液晶表示装置の製造方法が提供される。
According to the present invention, in order to solve the above problems, in a method of manufacturing a liquid crystal display device in which a color filter substrate and a counter substrate are made into cells, the color filter substrate is not assembled into cells. A method for manufacturing a liquid crystal display device is provided, which further comprises a step of subjecting a single unit to heat treatment under reduced pressure.

【0008】また、本発明によると、上記カラーフィル
タ基板を減圧加熱処理する工程における加熱温度が、セ
ル組み立て後の液晶注入時にセルを加熱する温度よりも
高温であることを特徴とする液晶表示装置の製造方法が
提供される。
According to the present invention, the liquid crystal display device is characterized in that the heating temperature in the step of heat-treating the color filter substrate under reduced pressure is higher than the temperature for heating the cell at the time of injecting the liquid crystal after cell assembly. A method of manufacturing the same is provided.

【0009】[0009]

【作用】具体的には、先ずカラーフィルタを有するガラ
ス基板を単体でセル組み立て前に真空加熱チャンバ内に
設置して、チャンバ内を減圧及び加熱を行い、それを所
定時間保持して、カラーフィルタの脱ガスを行う。
Specifically, first, a glass substrate having a color filter is placed in a vacuum heating chamber before cell assembly by itself, the chamber is depressurized and heated, and the chamber is held for a predetermined time to obtain a color filter. Degas.

【0010】その後、上記カラーフィルタ基板と対向す
るガラス基板を既知の方法で組み立ててセル化する。次
に、セルを液晶注入装置のチャンバ内に設置して、その
チャンバ内を減圧した後、セルの液晶注入口に液晶を接
触させてからチャンバ内を大気圧に戻してセル内に液晶
を充填する。
Then, the glass substrate facing the color filter substrate is assembled into a cell by a known method. Next, the cell is placed in the chamber of the liquid crystal injection device, the pressure in the chamber is reduced, the liquid crystal is brought into contact with the liquid crystal injection port of the cell, and then the chamber is returned to atmospheric pressure to fill the cell with the liquid crystal. To do.

【0011】このとき、カラーフィルタの脱ガス処理は
セル組み立て前にあらかじめ基板単体で行われているの
で、液晶注入時にカラーフィルタからの脱ガスの為に真
空保持時間を長くとる必要は無く、それに伴なうセルの
変形も抑制でき、残留気泡発生の無い液晶表示装置を製
造することができる。この場合、カラーフィルタ基板に
対する単体での脱ガス処理は、セル化後の減圧加熱処理
よりも高温下で行うことができる点にも本発明の特徴が
ある。
At this time, since the degassing process of the color filter is performed on the substrate alone before the cell is assembled, it is not necessary to take a long vacuum holding time for degassing from the color filter when injecting the liquid crystal. The accompanying deformation of the cells can be suppressed, and a liquid crystal display device without generation of residual bubbles can be manufactured. In this case, the feature of the present invention is that the degassing treatment of the color filter substrate alone can be performed at a higher temperature than the reduced pressure heat treatment after the cell formation.

【0012】[0012]

【実施例】以下図面を参照して本発明の実施例について
説明する。すなわち、図2に示すように、ガラス基板1
1上にカラーフィルタ12、保護膜13、透明電極1
4、絶縁膜15を順次形成してカラーフィルタ基板4を
形成する。
Embodiments of the present invention will be described below with reference to the drawings. That is, as shown in FIG. 2, the glass substrate 1
1, a color filter 12, a protective film 13, and a transparent electrode 1
4, the insulating film 15 is sequentially formed to form the color filter substrate 4.

【0013】このカラーフィルタ基板4を脱ガス処理を
行うために、図1に示す真空チャンバ1内に配置する。
そして、このチャンバ1内を5×10-6torrに減圧
した後、カラーフィルタ基板4を遠赤外線ヒータ2で1
80℃に加熱して、減圧加熱条件下で6時間保持した
後、常圧常温に開放する。
The color filter substrate 4 is placed in the vacuum chamber 1 shown in FIG. 1 for degassing.
Then, after depressurizing the inside of the chamber 1 to 5 × 10 −6 torr, the color filter substrate 4 is set to 1 by the far infrared heater 2.
After heating to 80 ° C. and holding under reduced pressure heating conditions for 6 hours, it is opened to normal temperature and normal temperature.

【0014】その後、図3に示すようにこの脱ガス処理
されたカラーフィルタ基板4上に配向制御膜16、シー
ル材19を形成する。一方、対向するガラス基板11a
上に透明電極(図示せず)、絶縁膜15a、配向制御膜
16aを順次形成した後、スペーサ18および接着微粒
子17を散布し、前記カラーフィルタ基板4と重ね合わ
せ接着して、空セル(液晶を注入していないセル)を形
成する。
Thereafter, as shown in FIG. 3, an orientation control film 16 and a sealing material 19 are formed on the degassed color filter substrate 4. On the other hand, the opposite glass substrate 11a
After a transparent electrode (not shown), an insulating film 15a, and an alignment control film 16a are sequentially formed on the upper surface, spacers 18 and adhesive fine particles 17 are dispersed, and the color filter substrate 4 is superposed and adhered to form an empty cell (liquid crystal). Cells not implanted) are formed.

【0015】そして、この空セルを液晶注入装置のチャ
ンバ内に配置し、このチャンバ内を5×10-6torr
に減圧し、さらに130℃に加熱して、約1時間保持し
た後、反強誘電性液晶を空セルに供給した後、大気開放
して液晶を注入する。
Then, the empty cell is placed in the chamber of the liquid crystal injecting apparatus, and the inside of the chamber is set to 5 × 10 -6 torr.
After depressurizing to 130 ° C., heating to 130 ° C. and holding for about 1 hour, antiferroelectric liquid crystal is supplied to the empty cell, and then opened to the atmosphere to inject liquid crystal.

【0016】図4は以上のような本発明の実施例による
液晶表示装置の製造方法に係る工程図を示している。す
なわち、カラーフィルタ(CF)基板側では、第1の工
程S1で透明電極・絶縁膜を形成した後、第2の工程S
2で脱ガス処理のための減圧・加熱処理を行い、第3の
工程S3で配向制御膜を形成する。
FIG. 4 is a flow chart showing a method of manufacturing the liquid crystal display device according to the embodiment of the present invention. That is, on the color filter (CF) substrate side, after the transparent electrode / insulating film is formed in the first step S1, the second step S is performed.
In step 2, depressurization / heat treatment for degassing treatment is performed, and in the third step S3, an orientation control film is formed.

【0017】一方、対向基板側では、第4の工程S4で
透明電極・絶縁膜を形成した後、第5の工程S5で配向
制御膜を形成する。次に、第6の工程でCF基板と対向
基板とを用いてセル組み立てを行った後、第7の工程S
7でセル内に液晶を注入する。
On the other hand, on the counter substrate side, after the transparent electrode / insulating film is formed in the fourth step S4, the orientation control film is formed in the fifth step S5. Next, in the sixth step, cell assembly is performed using the CF substrate and the counter substrate, and then the seventh step S
At 7, the liquid crystal is injected into the cell.

【0018】図5は以上のような本発明の実施例による
結果と従来例の条件を変えた場合による結果とを図表化
して対比している。すなわち、本発明の実施例ではセル
組み立て前のカラーフィルタ基板に減圧加熱(10-6
orr、180℃×6時間)を行っているので、空セル
での減圧加熱保持(10-6torr、130℃×1時
間)を短かくしても、セルギャップの変化量は0.09
μmと極めて小さいと共に、セル内の残留気泡量は0m
2 となっている。
FIG. 5 graphically compares the results according to the embodiment of the present invention as described above and the results according to the conventional example in which the conditions are changed. That is, in the embodiment of the present invention, the color filter substrate before cell assembly was heated under reduced pressure (10 −6 t).
Orr, 180 ° C. × 6 hours), the amount of change in cell gap is 0.09 even if the heating under reduced pressure in an empty cell (10 −6 torr, 130 ° C. × 1 hour) is shortened.
It is extremely small (μm) and the amount of residual bubbles in the cell is 0 m.
It is m 2 .

【0019】これに対し、セル組み立て前のカラーフィ
ルタ基板に減圧加熱を行わない従来例では空セルでの減
圧加熱保持(10-6torr、130℃×1時間)が短
かいと、セルギャップは0.08μmと小さいが、セル
内には600mm2 もの残留気泡量の発生が認められ
た。
On the other hand, in the conventional example in which the pressure reduction heating is not performed on the color filter substrate before the cell assembly, if the pressure reduction heating and holding in the empty cell (10 −6 torr, 130 ° C. × 1 hour) is short, the cell gap becomes small. Although it was as small as 0.08 μm, generation of residual air bubbles of 600 mm 2 was recognized in the cell.

【0020】また、セル組み立て前のカラーフィルタ基
板に減圧加熱を行わない従来例2では、空セルでの減圧
加熱保持(10-6torr、130℃×11時間)を長
くすると、セル内の残留気泡量は0mm2 であるもの
の、セルギャップの変化量が0.25μmと極めて大き
な値となっている。
Further, in the conventional example 2 in which the color filter substrate before cell assembly is not heated under reduced pressure, if the vacuum cell heating and holding (10 −6 torr, 130 ° C. × 11 hours) in the empty cell is lengthened, it remains in the cell. Although the amount of bubbles is 0 mm 2 , the amount of change in cell gap is 0.25 μm, which is an extremely large value.

【0021】これらの本実施例と従来例との対比からも
本発明による効果が良好であることが認められた。そし
て、以上のような本実施例では、カラーフィルタ基板4
の減圧加熱処理をセル組み立て前にあらかじめ単体で施
してあるので、液晶注入工程における空セル状態での減
圧条件についてカラーフィルタからの脱ガスを考慮する
必要がない。
From the comparison between the present embodiment and the conventional example, it was confirmed that the effect of the present invention was good. In the above-described embodiment, the color filter substrate 4
Since the reduced pressure heat treatment of (1) is performed by itself before the cell assembly, it is not necessary to consider degassing from the color filter for the reduced pressure condition in the empty cell state in the liquid crystal injection step.

【0022】従って、空セル状態での減圧加熱保持時間
を短縮することができるので、液晶注入後にセル内に気
泡が残留することもないと共に、減圧加熱に伴うストレ
スに起因するセル変形(セルギャップの変化)も減少さ
せることができる。
Therefore, since the holding time under reduced pressure heating in the empty cell state can be shortened, bubbles do not remain in the cell after the liquid crystal is injected, and the cell deformation (cell gap due to the stress associated with the reduced pressure heating is caused). Change) can also be reduced.

【0023】尚、本実施例ではカラーフィルタ基板4の
減圧加熱処理を絶縁膜15の成膜後に処理しているが、
絶縁膜15の成膜前、あるいは透明電極14の形成の前
に減圧加熱処理を行うようにしてもよい。
In this embodiment, the color filter substrate 4 is heated under reduced pressure after the insulating film 15 is formed.
The reduced pressure heat treatment may be performed before forming the insulating film 15 or before forming the transparent electrode 14.

【0024】[0024]

【発明の効果】従って、以上詳述したように本発明によ
れば、カラーフィルタ基板をセル組み立て前にあらかじ
め単体で減圧加熱処理して、カラーフィルタの脱ガスを
行うことにより、セル状態での液晶注入前の減圧加熱保
持時間を短縮し、これに伴なうセル変形を抑制し、液晶
注入後のセル内残留気泡発生を防止することができるよ
うにした液晶表示装置の製造方法を提供することが可能
となる。
Therefore, as described in detail above, according to the present invention, the color filter substrate is subjected to the depressurization heat treatment in advance before the cell is assembled to degas the color filter. Provided is a method for manufacturing a liquid crystal display device capable of shortening a heating time under reduced pressure before injecting liquid crystal, suppressing cell deformation accompanying it, and preventing generation of residual bubbles in a cell after injecting liquid crystal. It becomes possible.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例によるカラーフィルタ基板の
脱ガス処理を示す図。
FIG. 1 is a diagram showing a degassing process of a color filter substrate according to an embodiment of the present invention.

【図2】一実施例に用いるカラーフィルタ基板を示す
図。
FIG. 2 is a diagram showing a color filter substrate used in one embodiment.

【図3】カラーフィルタ基板と対向基板とのセル組み立
てを示す図。
FIG. 3 is a diagram showing cell assembly of a color filter substrate and a counter substrate.

【図4】本発明の一実施例による製造工程を示すフロー
チャート。
FIG. 4 is a flowchart showing a manufacturing process according to an embodiment of the present invention.

【図5】本発明の効果を従来との対比において示す図。FIG. 5 is a diagram showing an effect of the present invention in comparison with a conventional one.

【符号の説明】[Explanation of symbols]

1…真空チャンバ、2…ヒータ、3…基板ホルダ、4…
カラーフィルタ基板、5…バルブ、6…真空ポンプ、1
1…ガラス、12…カラーフィルタ、13…保護膜、1
4…透明電極、15…絶縁膜、11a…ガラス、13a
…保護膜、15a…絶縁膜、16a,16…配向制御
膜、17…接着微粒子、18…スペーサ、19…シー
ル。
1 ... Vacuum chamber, 2 ... Heater, 3 ... Substrate holder, 4 ...
Color filter substrate, 5 ... Valve, 6 ... Vacuum pump, 1
1 ... Glass, 12 ... Color filter, 13 ... Protective film, 1
4 ... Transparent electrode, 15 ... Insulating film, 11a ... Glass, 13a
... Protective film, 15a ... Insulating film, 16a, 16 ... Alignment control film, 17 ... Adhesive particles, 18 ... Spacer, 19 ... Seal.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 カラーフィルタ基板と対向基板とをセル
化してなる液晶表示装置の製造方法において、 上記カラーフィルタ基板をセル組み立て前にあらかじめ
単体で減圧加熱処理する工程を具備することを特徴とす
る液晶表示装置の製造方法。
1. A method for manufacturing a liquid crystal display device in which a color filter substrate and a counter substrate are formed into cells, and the method further comprises a step of subjecting the color filter substrate to a single heat treatment under reduced pressure prior to cell assembly. Liquid crystal display device manufacturing method.
【請求項2】 上記カラーフィルタ基板を減圧加熱処理
する工程における加熱温度が、セル組み立て後の液晶注
入時にセルを加熱する温度よりも高温であることを特徴
とする請求項1に記載の液晶表示装置の製造方法。
2. The liquid crystal display according to claim 1, wherein a heating temperature in the step of heat-treating the color filter substrate under reduced pressure is higher than a temperature for heating the cell at the time of injecting the liquid crystal after the cell is assembled. Device manufacturing method.
JP7037142A 1995-02-24 1995-02-24 Production of liquid crystal display device Pending JPH08234188A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7037142A JPH08234188A (en) 1995-02-24 1995-02-24 Production of liquid crystal display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7037142A JPH08234188A (en) 1995-02-24 1995-02-24 Production of liquid crystal display device

Publications (1)

Publication Number Publication Date
JPH08234188A true JPH08234188A (en) 1996-09-13

Family

ID=12489372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7037142A Pending JPH08234188A (en) 1995-02-24 1995-02-24 Production of liquid crystal display device

Country Status (1)

Country Link
JP (1) JPH08234188A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001221998A (en) * 1991-08-01 2001-08-17 Seiko Epson Corp Liquid crystal display element and electronic instrument
US6833895B2 (en) 2002-04-26 2004-12-21 Hitachi Displays, Ltd. Liquid crystal display device and fabrication method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001221998A (en) * 1991-08-01 2001-08-17 Seiko Epson Corp Liquid crystal display element and electronic instrument
US6833895B2 (en) 2002-04-26 2004-12-21 Hitachi Displays, Ltd. Liquid crystal display device and fabrication method thereof

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