JPH08233862A - Probe unit for inspection board - Google Patents

Abstract

PURPOSE: To improve the reliability of an inspection by determining that the ends of a plurality of probes are effectively brought into contact with the conduc tor pattern of a bare board in contact with the pattern of the board at the ends of a plurality of probes, and then inspecting the disconnection or the short- circuit of the pattern. CONSTITUTION: The probe unit comprises two probes 56 in which the base ends are supported to a holder 4 supported on a supporting plate 43 and the ends are opposed at a small interval to be simultaneously brought into contact with a conductor pattern. A controller checks that the probes 56 of the unit 15 are not in contact with the pattern, then lowers the two probes to predetermined positions, then stops them, and thereafter a measuring instrument checks whether the two probes conducts or not by the pattern. Thus, the contact of the probes with the pattern is confirmed. After the contact is determied, the disconnection or the short-circuit of the pattern is inspected by the signal from the unit 15.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe device for inspecting a board for inspecting a conductor pattern of a printed wiring board for shorts, opens and the like.

[0002]

2. Description of the Related Art Printed circuit boards are subjected to various inspections at each stage until electronic circuit parts are mounted and incorporated into electronic equipment and a finished product is obtained. That is, the short and open inspections (bare board test) performed with the pudding wiring board alone, the presence / absence of mounting after circuit component mounting, the polarity inspection (mounting inspection), the short and open inspections performed after soldering (in-circuit test). ), After that, a functional test is performed, and finally, the performance test as a system is performed after the system is incorporated into a device.

Printed wiring board alone (hereinafter "bare board")
Is a test for electrically checking for shorts and opens in conductor patterns and through holes. Normally, a pin called a contact probe with a spring is brought into contact with a specified location on the bare board to electrically connect the conductor pattern. It is performed by an automatic inspection machine that detects the state. Moreover, since the bare board for surface mounting does not have a hole for mounting a component, there are some portions that cannot be inspected from one side.
Therefore, for such a bare board, a jig or the like that is sandwiched from both sides for inspection is used.

[0004]

However, since the conventional contact probe has a structure in which the tip of the pin is simply brought into contact with the conductor pattern of the bare board by the spring force, it is possible to judge whether or not the contact is surely made. I can't
Even if the conductor pattern is short-circuited, there is a risk of misdiagnosis that the conductor pattern is not short-circuited, and there is a problem that the reliability of the inspection is poor.

The present invention has been made in view of the above points, and it is determined whether or not the probe is surely in contact with the conductor pattern to be inspected before performing the disconnection and short circuit inspection of the printed wiring board (bare board). An object of the present invention is to provide a substrate inspection probe device that is checked.

[0006]

In order to achieve the above object, according to the present invention, a holder supported by a support plate fixed to a base, and each base end supported by the holder and each tip end In this configuration, there are provided two probes that face each other with a slight distance and can contact the conductor pattern at the same time.

According to a second aspect of the present invention, each of the two probes has a structure in which each tip is electrically connected via the conductor pattern. According to a third aspect of the present invention, the holder is supported by the support plate so as to be able to move up and down, and the tips of the two probes are brought into contact with the conductor pattern.

[0008]

When the tips of the two probes come into contact with the conductor pattern of the bare board, they conduct through the conductor pattern. As a result, it is determined that the tip of the probe has surely contacted the conductor pattern to be inspected. Then, after determining that the tip of the probe has surely contacted the conductor pattern, the conductor pattern is inspected for disconnection or short circuit.

According to a third aspect of the present invention, the holder is supported by the support plate so as to be able to move up and down, and the tips of the two probes are simultaneously brought into contact with the conductor pattern of the bare board with one touch.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 is a front view of a substrate inspection apparatus 1 equipped with a substrate inspection probe device according to the present invention, FIG. 2 is a side view of FIG. 1, and FIG. 3 is a lower surface viewed from the direction of arrows III-III in FIG. It is a figure. 1 to 3, the board inspection apparatus 1 includes a housing 2, a frame 3 installed on the housing 2, and a frame 3
Platen 5 mounted and fixed on the upper ends of the columns 4 at the four corners of the
A platen 6 horizontally arranged and fixed on the upper surface of the housing 2 so as to face the platen 5, and a plurality of flat motors 7 to 10 and 11 to 14 respectively arranged on the platens 5 and 6, respectively. , These planar motors 7-10 and 11-
Probe devices 15-18 and 19 mounted on 14
˜22 and a platen 5 and 6 at a substantially intermediate position horizontally and penetrating the center of the frame 3 in the left-right direction, and the left and right sides are supported by the columns 4 to transfer the bare board, for example, It is composed of a belt conveyor 30 and the like.

The platen 5 is made of a pure iron thick plate having a flat plate shape and high magnetic permeability, and has grooves with a predetermined groove width on the lower surface 5a at a predetermined pitch and in the lateral (X-axis) direction. , A toothed plate-shaped iron core in which a large number of teeth are formed by being accurately engraved over the entire surface in the vertical (Y-axis) direction (FIG. 3) and at a predetermined depth. The platen 6 is also formed in the same manner as the platen 5, and the upper surface 6a (FIG. 2) of the platen 5 that faces the toothed plate-shaped lower surface 5a is also toothed plate-shaped.

At the four corners of the platen 5, planar motors 7-1 are provided.
An origin returning device 25 (FIG. 3) for accurately returning 0 to each origin position (four corners of the platen 5) is provided. Similarly, the platen 6 is also provided with an origin returning device (not shown) for accurately returning the planar motors 11 to 14 to the origin position. Further, the upper surface of the housing 2 is provided with inlets / outlets 26, 26 ′ for loading and unloading the planar motors 7 to 10 into and from the platen 5 adjacent to the center positions on both sides of the platen 5. These inlets and outlets 26, 26 ′ are formed by a flat plate of a non-magnetic member such as aluminum or a synthetic resin member which is slightly larger than the plane motor 7, and the lower surface is flush with the lower surface 5 a of the platen 5. .

The planar motor 7 includes a housing 40 made of a square non-magnetic member such as aluminum.
An electromagnet for traveling in the X-axis direction along the lower surface 5a of the platen 5 and an electromagnet (not shown) for traveling in the Y-axis direction are housed in (FIG. 3). An iron core having a groove of a predetermined width is provided on each upper surface of the iron core of each electromagnet so as to face the tooth profile of the lower surface 5a of the platen 5. Further, the plane motor 7 is operated in the X-axis direction, Y
Extremely strong permanent magnets (not shown) are arranged in the electromagnets for traveling in the axial direction, and these permanent magnets cooperate with the electromagnets in the X-axis and Y-axis directions. And has a function of forming a closed magnetic path with the platen 5 to strongly attract the housing 40 to the lower surface 5a of the platen 5.

Slits are formed at predetermined positions on the upper surface of the housing 40, and one end of each small hole is opened at the center of each slit (both not shown). The other ends of these small holes are put together in a housing and connected to a high pressure air source (not shown) via an air hose. Then, high-pressure air is ejected from each of the small holes to horizontally separate the housing 40 from the lower surface 5a of the platen 5 with a slight gap (for example, about 10 μm) against the attraction force of the permanent magnet. . As a result, the plane motor 7 can freely travel with the slight gap between the plane motor 7 and the lower surface 5a of the platen 5, that is, in a state of floating in the space.

The other plane motors 8 to 14 are also constructed similarly to the plane motor 7. The upper four plane motors 7 to 10 are horizontally held below the platen 5 while floating in the space. In addition, the lower four plane motors 11
˜14 are horizontally held in a state of floating in the space with a slight gap on the platen 6. In this way, the upper four plane motors 7 to 10 are on the lower side of the platen 5, and the lower four plane motors 11 to 14 are on the platen 6.
Each of them can run horizontally in the X-axis and Y-axis directions.

As described above, the probe device 1 is provided on the lower surface of each housing 40 of the plane motors 7-10, 11-14.
5-18 and 19-22 (FIG. 2) are provided. These probe devices 15 to 22 are for inspecting the conductor pattern of the bare board for disconnection and short circuit. The probe devices 15 to 22 have a predetermined angle, for example, 45 ° with respect to the traveling direction of each plane motor, that is, the X-axis and Y-axis directions. Housing 4 at an angle (Fig. 3)
It is located at 0.

The base 41 of the probe device 15 is fixed to the lower surface of the housing 40 substantially in the center thereof.
On one side of the lower surface of the support plate 4 through the L-shaped bracket 42
3 is attached vertically facing downward. Support plate 4
A holder 44 having a substantially U-shape when viewed from the end is provided on one side surface of the front end of 3.
(Fig. 4) is fixed vertically. This holder 44 is
Both opposite ends are located above and below, and the central part is fixed to the support plate 43 by bolts. Two shafts 45, 4
6 (FIG. 4), the upper and lower ends are supported vertically and parallel to the upper and lower end portions of the holder 44, respectively, and the holder 47 is attached to the shafts 45 and 46 by the ball bushes 48 and 49 (see FIG. 4). 4, FIG. 7), and is supported so as to be vertically movable.

An attachment 50 is attached to the front end of the holder 47.
Is detachably attached. That is, two pins 51, 51 (FIG. 6) are fixed horizontally and parallel to each other on the left and right sides of the front end surface of the holder 47, facing forward.
A bolt hole 47a is horizontally formed in the center, and a flat hole 47b is formed vertically in the upper surface of the front end so as to be orthogonal to the bolt hole 47a. Then, the plate nut 52 is inserted in the hole 47b.
Has been inserted. On the other hand, holes 50a, 50a and bolt holes 50b corresponding to the pins 51, 51 of the holder 47 and the bolt holes 47a are formed at the upper end of the attachment 50. The attachment 50 has pins 5 in the holes 50a, 50a.
1, 51 are fitted and supported, and bolt holes 50c, 47
It is fixed by a bolt 53 in which a is inserted and screwed into the plate nut 52.

As shown in FIGS. 6 to 8, the attachment 50 is formed in a taper shape in which the left and right side surfaces 50c and 50d of the front portion face forward and form a predetermined angle α (for example, 70 °). A hole 50e is formed substantially at the center of the front surface of the left side surface 50c, and bolt holes 50f and 50f are vertically formed at the rear portion of the left surface 50c, and a flat surface perpendicular to the rear ends of these bolt holes 50f and 50f is formed on the upper surface. A hole 50g is formed therethrough.
The plate nut 54 is fitted in the hole 50g. The right side surface 50d is also formed similarly to the left side surface 50c.

Both sides 50c, 50 of the attachment 50
Probes 55 and 56 are detachably attached to d. The probe 55 has a plate-like shape and has a small hole 55c formed substantially at the center of a base end 55a, and a tip 55b is sharpened so that it can contact a conductor pattern formed on a bare board. The probe 55 has, for example, a proximal end 5
The upper end of the tip 55b is connected and fixed to the lower end of 5a so as to be electrically conductive. The probe 55 has a base end 55a.
Is about 1 mm and the tip 55b is formed of a conductive member having a plate thickness of about 0.3 mm. The probe 56 is also formed similarly to the probe 55.

The probe holder 57 is for supporting the probe 55 on the attachment 50, has a groove 57a in which the base end 55a of the probe 55 fits, and the rear end of the side surface of the attachment 50. Bolt holes 57b and 57 corresponding to bolt holes 55f and 55f of 55c.
b is drilled. The probe holder 57 is fixed to the side surface 50c of the attachment 50 by bolts 58, 58 which are screwed into the plate nut 54 through the bolt holes 57b, 57b, 50f, 50f. A spring 59 and a ball 60 are provided in the hole 50e of the side surface 50c of the attachment 50.
The ball 60 is pressed against the opposing surface of the groove 57a of the probe holder 57 by the spring force of the spring 59.

The probe 55 has a base end 55a inserted into the groove 57a of the probe holder 57 from below, and has a ball 60a.
Is pushed into the hole 50e against the spring force of the spring 59. Then, when the hole 55c is aligned with the ball 60, the tip of the ball 60 is moved by the spring force of the spring 59 into the hole 5c.
5c is pushed and engaged, and the base end 55a is brought into pressure contact with the groove 57a of the probe holder 57. This allows the probe 5
5 is supported by the attachment 50. Probe 55
When removing, the ball 60 is pulled out from the hole 55c against the spring force of the spring 59, the engagement is released, and the ball 60 is removed. In this way, the probe 55 is detachably attached to the attachment 50. Like the probe 55, the probe 56 is also detachably attached to the right side surface 50d of the attachment 50. Then, the left and right two probes 55 and 56 are connected to each tip 55.
b and 56b are attached so as to face each other with a slight gap d (for example, about 0.02 mm) (FIG. 10).

Referring back to FIGS. 5 and 7, the rear end surface of the holder 47 has a base end of the dog plate 62 fixed horizontally, and a slit 43c vertically formed in the support plate 43.
Is projected horizontally to the opposite side of the holder 44, and the tip 62a is bent rearward at a substantially right angle. Support plate 43
On the side opposite to the holder 47, a sensor 64 is fixed near the upper end of the slit 43c via a bracket 63.
The bracket 63 is attached to the support plate 43 so as to be vertically adjustable. The sensor 64 detects the tip 62a of the dog plate 62 and detects the upper limit position of the holder 47.

A drive motor 66 is attached to the support plate 43 at a position rearward of the sensor 64 (FIG. 5), and the rotation is projected through the hole of the support plate 43 to the opposite side (holder 47 side). A toothed pulley 67 is fixed to the shaft (FIG. 4). Further, toothed pulleys 68, 69 are rotatably supported on the support plate 47 at the holder 47 side and at positions near the upper and lower ends of the slit 43c (FIG. 4). Toothed belt 70
Is wound around pulleys 67, 68, 69, and the rear end of the holder 47 is fixed between the pulleys 68, 69. As shown in FIGS. 4 and 7, the holder 47 is fixed by pressing the belt 70 between the holder 47 and the base end of the dog plate 62. Thereby, the holder 47, that is, the probes 55, 56
Is moved up and down by the rotation of the motor 66. The base ends 55a and 56a of the probes 55 and 56 (FIG. 8), the sensor 64, and the motor 66 are connected to a control device 81 (FIG. 1) described later.

Probe devices 16-18, 19-mounted on the other plane motors 8-10, 11-14 (FIG. 1).
22 is also configured similarly to the probe device 15. Then, for example, at the predetermined position on one side of each housing 40 of the two probe devices 16 and 17 facing each other among the four probe devices 15 to 18 on the upper side, the bare board is stopped so as to be positioned and stopped. A position detection camera 75 for detecting a predetermined position is arranged vertically with its lens surface facing directly below, and the position of the tip of each probe is located near each probe device 16, 17. A surveillance camera 76 (FIG. 3) for monitoring is attached.

The position detecting camera 75 and the monitoring camera 76 need not be provided in each probe device, but are located above the belt conveyor 30 (FIG. 2), that is, above the bare board and on the front end side of the bare board. It is sufficient to provide one of the two probe devices located. Further, each probe device (not shown) attached to the lower four linear motors need not be provided with a position detection camera and a surveillance camera.

Then, the upper four plane motors 7 to 10
On the upper surface of the bare board placed on the belt conveyor 30 in which the probe devices 15 to 18 respectively face the center of the platen below the platen 5 (FIG. 3) and the tips of the probes are located below. On the other hand, they are arranged so as to face each other obliquely downward at a predetermined angle θ (about 3 °) (FIGS. 4 and 5). The lower four plane motors 11 to 14 are arranged on the platen 6 with respect to the lower surface of the inspection board on which the probe devices face the center of the platen 6 and the tips of the probes are located above. It is disposed so as to face obliquely upward at the predetermined angle θ.

The upper probe devices 15 to 18 make an angle of 45 ° with respect to the X-axis and Y-axis directions of the plane motors 7 to 10 as described above, and the tips of the probes are perpendicular to the bare board. With respect to the angle .theta. Therefore, these four probe devices 15
.About.18 can be concentrated at any one point without interfering with each other as shown in FIG. 9, and the tip of each probe is set at one point P of any conductor pattern on the upper surface of the bare board as shown in FIG. Range (within a circle with a diameter of about 0.1 to 0.2 mm)
It is possible to concentrate on. Alternatively, as shown in FIG. 11, they can be arranged side by side in a line at a slight interval q (about 0.2 mm). The same applies to the four lower probe devices 19 to 22.

Returning to FIG. 1, the belt conveyor 30 conveys the bare board into the board inspection apparatus 1 from the preceding process, conveys the bare board carried by the conveyor 30a to a predetermined inspection position, and inspects it. Medium Conveyor 30 that stops and holds the relevant position and carries it out after the inspection is completed
b, a conveyor 30c for carrying the bare board carried by the conveyor 30b to the next step.

Further, as shown in FIGS. 1 and 2, a drive unit 80 for controlling the plane motors 7 to 14 and a drive motor for the probe units 15 to 22 are controlled in the housing 2. Control device 81 for moving each probe up and down, the plane motors 7 to 10 at the origin position of the platen 5,
Signals from the origin return devices 25 (FIG. 3) for returning the plane motors 11 to 14 to the origin position of the platen 6, the control device 82 for controlling the belt conveyor 30 and the probe devices 15 to 22 are transmitted. Measuring device 83 for inputting and inspecting the board, and each of these control devices 80 to 8
2. A computer 84 for controlling the measuring device 83 is stored.

The probe device 15 is provided on the frame 3.
A display device for displaying the tip of the probe and the inspection board photographed by the monitoring camera 76 provided on the display device, various input data for inspecting the inspection board, a display device for displaying the inspection result, etc. No) is placed. In addition, a display device is also installed to warn of inspection errors and step out of the flat motor. In addition, the inspection board data, inspection items, etc. can be input to the housing 2,
An input device (keyboard) (not shown) for controlling the computer 84 is arranged. The display device is not limited to the one that displays the result on the screen, and it goes without saying that the result may be displayed by a lamp or the like.

The plane motors 7 to 14 are connected to the control device 80, and the probe devices 15 to 22 are connected to the control device 81 and the measuring device 83 by cables not shown. The plane motors 7 to 14 are also connected to high-pressure air sources (both not shown) via air hoses. Cable protection flexible tubes 91 to 98 (FIGS. 1 to 3) are attached substantially horizontally between the frame 3 and the planar motors 7 to 14. These cable protection flexible tubes 91 to 9
8, each base end is fixed to the frame 3 and each front end is fixed to the plane motors 7 to 14, respectively.
To 14 and accommodates the cables and air hoses, and the cables and air hoses of the respective plane motors 7 to 14 do not interfere with other plane motors, the frame 3, the platen 6, the belt conveyor 30 and the like, and each plane. The motors 7 to 14 are supported so that they can be freely curved and follow the traveling of the motors 7 to 14 (shown by a two-dot chain line in FIG. 3). As a result, the plane motors 7 to 14 can travel freely.

The operation will be described below. Substrate inspection device 1
In the standby state, as shown in FIGS. 1 to 3, the planar motors 7 to 10 and 11 to 14 are stopped at the four corners of the platens 5 and 6, that is, the respective origin positions. For example, the plane motors 7 to 10 are stopped at the respective origin positions at the four corners of the platen 5, as shown in FIG. When the high-pressure air is not supplied, these plane motors 7 to 10 and 11 to 14 are strongly attracted to and held by the platens 5 and 6 by the permanent magnets as described above. Also, the probe device 1
In each of 5 to 22, the probe is retracted, and each tip is vertically separated from the belt conveyor 30 by a predetermined distance.

When the input device is operated to start the inspection of the bare board, the controller 80 causes the plane motor 7 to operate.
To 14 to supply a driving current to these planar motors 7 to
14 is run at a high speed to a predetermined inspection position, and the positioning is accurately stopped at that position. On the other hand, the control device 82 drives the belt conveyor 30a to carry in a bare board (not shown) into the substrate inspection device 1, and further to convey the belt conveyor 30b.
Is driven to convey it toward the center of the substrate inspection apparatus 1. Then, when the position detection camera 75 (FIG. 3) of the plane motor 7 detects a predetermined portion of the bare board, for example, the front end, the control device 82 stops the belt conveyors 30a and 30b. As a result, the bare board is transported to the predetermined inspection position.

Next, the control device 81 controls the probe devices 15 to.
The respective drive motors 22 are driven to bring the respective tips of the probes into contact with the predetermined inspection points of the conductive pattern of the bare board. When the tips 55b and 56b of the probes 55 and 56 of the probe device 15 descend and come into contact with predetermined portions of the conductor pattern, the probes 55 and 56 are electrically connected by the conductor pattern. That is, the control device 81 controls the probes 55 and 56 of the probe device 15.
After confirming that the probes 55 and 56 are not in contact with each other, the probes 55 and 56 are lowered to a predetermined position and stopped, and then the measuring device 83 determines whether or not the probes 55 and 56 are electrically connected by the conductor pattern. Confirm. This allows the probe 5
It is confirmed that 5, 56 are in contact with the conductor pattern. The same applies to the other probe devices 16 to 18.

As a result, the measuring device 83 determines with a single touch that each probe has surely come into contact with a predetermined conductor pattern before inspecting the conductor pattern of the bare board for disconnection or short circuit. Then, the measuring device 83 determines that each probe of the probe devices 15 to 18 has surely contacted a predetermined position of the conductor pattern of the bare board, and then disconnects the conductor pattern by a signal from the probe devices 15 to 18. , Short circuit inspection.

The control device 81 drives the motor 66 (FIG. 5) to raise the holder 47 when the inspection of the location by the probe device 15 is completed, and the probe 55,
56 rises and separates from the conductor pattern. When the holder 47 moves up and the sensor 64 detects the dog plate 62, the control device 81 stops the motor 66. As a result, the holder 47, that is, the probes 55 and 56, is separated from the bare board conductor pattern by a predetermined height h (shown by a chain double-dashed line in FIGS. 4 and 5). Further, the control device 81
Confirms that the probes 55, 56 are not in contact. That is, the controller 81 controls the probes 55 and 5 after the inspection.
In order to find a short circuit with 6, confirm that they are non-conductive after separating from the conductor pattern. This enhances the reliability of the inspection. The same applies to the other probe devices 16 to 18.

Then, the control device 80 causes the planar motors 7 to operate.
-14 are run at high speed to the next inspection point on the bare board. When the plane motors 7 to 14 stop at the inspection location, the controller 81 brings the tips of the probes of the probe apparatuses 15 to 18 into contact with a predetermined location of the conductor pattern of the bare board. Then, after detecting the continuity of each probe at the location and determining that the probe is surely in contact with the conductor pattern, disconnection or short circuit of the conductor pattern is detected. In this way, the probe devices 15 to 22 are moved to sequentially perform the disconnection and short-circuit inspection of the conductor pattern of the bare board.

When all the disconnection and short-circuit inspections of the conductor pattern of the bare board are completed, the control device 81 separates the probe devices from the bare board and waits for the inspection of the next bare board. When the inspection of the bare board is completed, the controller 82 drives the belt conveyors 30b and 30c to convey the bare board to the next step.

Depending on the contents of the bare board inspection,
In some cases, the probe device on either one of the upper and lower sides, for example, the upper side probe devices 15 to 18 alone may be used, and further, a predetermined two to three probe devices among the four probe devices 15 to 18 may be used. An inspection may be performed.

[0041]

As described above, according to the present invention, the holder supported by the support plate fixed to the base and the base end supported by the holder, and the front ends have a slight interval. By providing two probes that face each other and can contact the conductor pattern at the same time, it is determined that the tip of each probe has surely contacted the conductor pattern before the disconnection and short circuit inspection of the conductor pattern of the bare board. Therefore, disconnection and short circuit of the conductor pattern can be surely inspected, and reliability is improved.

According to the second aspect of the present invention, it is possible to easily and surely determine whether or not the tips of the probes are in contact with the conductor pattern by electrically connecting the tips of the two probes through the conductor pattern. Is. In claim 3, 2
By providing the holder that supports the one probe on the support plate so as to be able to move up and down, the tips of these two probes can be brought into contact with the conductor pattern with one touch, and the inspection efficiency is improved.

[Brief description of drawings]

FIG. 1 is a front view showing an embodiment of a substrate inspection apparatus equipped with a substrate inspection probe device according to the present invention.

FIG. 2 is a side view of FIG.

FIG. 3 is a bottom view seen from the direction of arrows III-III in FIG.

FIG. 4 is a partially cutaway right side view showing an embodiment of the substrate inspection probe device according to the present invention.

5 is a left side view of the probe device of FIG. 4. FIG.

6 is a partial cutaway plan view of FIG.

FIG. 7 is a plan view of a partly cutaway main part of FIG.

FIG. 8 is an exploded perspective view of a main part of the probe device of FIG.

9 is a plan view of relevant parts showing a state in which the probe device of FIG. 3 is concentrated on one point.

FIG. 10 is an enlarged view of the tip of each probe of the probe device of FIG.

11 is an enlarged view of the tip of each probe when the probe devices of FIG. 3 are concentrated close to each other in a line.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate inspection device 2 Housing 3 Frame 4 Support 5, 6 Platen 7-14 Plane motor 15-22 Probe device 25 Origin return device 26, 26 'Inlet / outlet 30 Belt conveyor 40 Housing 41 Base 43 Support plate 47 Holder 50 Attachment 55 , 56 probe 57 probe holder 62 dog plate 64 sensor 66 motor 67-69 toothed pulley 70 toothed belt 75, 76 camera 80-82 control device 83 measuring device 84 computer 91-98 cable protection flexible tube

Claims (3)

[Claims] 1. A holder supported by a support plate fixed to a base, each base end of which is supported by the holder, and each tip of the holder is opposed to the conductor pattern with a slight gap and is capable of simultaneously contacting a conductor pattern. A probe device for board inspection, comprising: a plurality of probes. 2. The two probes are electrically connected at their tips through the conductor pattern.
A probe device for board inspection according to. 3. The substrate inspection probe according to claim 1, wherein the holder is supported by the support plate so as to be capable of moving up and down, and the tips of the two probes are brought into contact with the conductor pattern. apparatus.