JPH0822636A - Assembling device and assembling method of galvanomirror - Google Patents

Abstract

PURPOSE:To improve assembling accuracy even if there are dimensional errors in parts by pressing and adhering a mirror to one main surface side of a leaf spring through the aperture of a supporting base and pressing and adhering a voice coil to another main surface side of this leaf spring synchronously therewith. CONSTITUTION:This assembling device has the supporting base 10 which holds a yoke 1 fixed with the leaf spring 2 and is provided with the aperture 12 communicating with the hollow part 1a of this yoke 1 and a mirror adhering means 15 which presses the mirror 3 to one main surface side of the leaf spring 2 through the aperture 12. The device has also a voice coil adhering means 30 which is disposed to face this mirror adhering means 15 and presses the voice coil 4 to the other main surface side of the leaf spring 2 in synchronization with the mirror adhering means 15. The damages to be incurred on the leaf spring 2 are thereby substantially eliminated and the assembly is made possible without deforming the leaf spring 2 in the event of presence of the dimensional errors in the yoke 1, the mirror 3, the voice coil 4, etc. The assembling accuracy is thus improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a galvanometer mirror used in, for example, an optical disk driver, and more particularly to an assembling apparatus and an assembling method thereof.

[0002]

2. Description of the Related Art In recent years, miniaturization of information equipment has been promoted, and there is a great demand for miniaturization of an optical disk driver used as an external storage device in a computer, for example.

Therefore, the so-called light, thin, short, and miniaturization is progressing also in the galvanometer mirror as a component constituting this optical disk driver. The galvanometer mirror is obtained by applying the principle of a galvanometer. That is, an electromagnetic force is generated by passing a current through a movable coil in a magnetic field, and a rotational force proportional to the current is generated. A galvanometer is a measuring instrument that oscillates the pointer with this torque to check the presence or absence of current and the magnitude of the current.

In the galvano mirror, a small mirror is attached to the axis of the movable coil to swing the mirror to an angle at which the torque proportional to the current and the control torque of the control spring are balanced. When laser light is incident on such a mirror, the laser light is deflected and reflected at an angle 2θ that is twice the rotation angle θ with respect to the rotation angle θ of the mirror.

The galvano mirror used in the optical disk driver is constructed as shown in FIGS. 8 and 9. In the figure, 1 is a fixed iron piece, the outer diameter of which is approximately 20 mm x 1
It is a rectangular frame-shaped yoke of about 0 mm square. That is, the yoke 1 has a hollow portion 1a, and fixing portions 2a and 2b formed at both ends of a leaf spring 2 which is a torsion spring having low rigidity are attached and fixed to the inner periphery facing each other.

The leaf spring 2 is made of beryllium copper (BeCu), for example, and has a very thin thickness of about 120 μm. Also, each of the fixed portions 2a,
2b is a twisted portion 2c, 2d having a width of about the plate thickness.
Are continuously provided and extend into the yoke hollow portion 1a.

A movable portion 2e having a size of, for example, 7 mm × 6 mm square is integrally formed between the twisted portions 2c and 2d. The mirror 3 with its mirror surface facing upward is adhered to the upper surface of the movable portion 2e on the one main surface side in the drawing. The voice coil 4 is adhered to the lower surface which is the other main surface side of the movable portion 2e.

The voice coil 4 is formed in an inverted concave shape in cross section and has an opening on the lower surface, and is located in the hollow portion 1a of the yoke 1. Then, an electromagnet (not shown) is inserted into the inside of the voice coil 4 through the lower surface opening, and is supported by an appropriate means.

In the galvano mirror constructed as described above, a current is passed through the voice coil 4 to form a magnetic circuit between the electromagnet and the yoke 1, and the torsion portion 2 of the leaf spring 2 is formed.
In c and 2d, the oscillating motion of the movable part 2e is generated, and this is linked to the deflecting motion of the mirror 3 which is integral with this.

[0010]

By the way, in the galvano mirror used for such an optical disk driver, the operation thereof can be performed without any trouble, but there is a problem in that the assembling method has hitherto been relied on by hand. Many.

That is, the leaf spring 2 is so thin that it may be called a foil shape, and the movable portion 2e is provided via the twisted portions 2c and 2d having a width dimension almost equal to the thickness. Will be lined up with. The movable portion 2e also has an extremely small area, and the mirror 3 and the voice coil 4 having the same area must be bonded to both surfaces thereof.

The actual bonding work is carried out on each side of the leaf spring 2,
It is done in order. At this time, a high degree of skill is required to keep the adhesive force to the leaf spring 2 uniform, and deformation is often caused.

If it is used as it is, there is an offset at the initial position of the galvanometer mirror, and if the laser beam is reflected, a predetermined deflection angle cannot be obtained. It is possible to correct the deformation of the leaf spring during the test in the finished product, but the working time is long and the cost is adversely affected.

The present invention has been made in view of the above circumstances, and an object of the present invention is to assemble and assemble a galvanometer mirror that can be assembled automatically and accurately while using a leaf spring having low rigidity. To provide a method.

[0015]

In order to satisfy the above object, the galvano mirror assembling apparatus according to the first invention has a yoke having a hollow portion and an end portion fixed to the hollow portion. In a device for assembling a galvano mirror having a leaf spring, a mirror fixed to one main surface side of the leaf spring, and a voice coil fixed to the other main surface side of the leaf spring, the leaf spring is fixed. A supporting base that holds the formed yoke and has an opening communicating with the hollow portion of the yoke, and a mirror adhesive that abuts the mirror on one main surface side of the leaf spring via the opening. And a voice coil adhering means which is arranged so as to face the mirror adhering means and which abuts the voice coil on the other main surface side of the leaf spring in synchronization with the mirror adhering means. And it features.

According to a second aspect of the present invention, the support base according to the first aspect includes a reference surface for supporting the yoke provided with the leaf spring, and the means for abutting the mirror on one main surface side of the leaf spring comprises: The Y stage and the Z stage, which are arranged below the support table and have a mirror attracting portion for vacuum attracting the mirror and transfer the mirror attracting portion, are provided with a voice coil on the other main surface side of the leaf spring. The contact means has a voice coil suction portion for vacuum-sucking the voice coil, and an XY stage and a Z stage for transferring the voice coil suction portion.

According to a third aspect of the present invention, the reference surface of the support base according to the first aspect has a suction hole for vacuum-sucking the yoke, and a reference surface for engaging with a pin hole provided in the yoke to regulate its position. It is characterized in that the pins are erected.

According to a fourth aspect of the present invention, the means for bringing the mirror into contact with the one main surface side of the leaf spring according to the second aspect is a displacement gauge for detecting the position of the mirror attracted to the mirror attracting portion.
A means for abutting the voice coil on the other main surface side of the leaf spring is attached to the voice coil attracting portion, which is provided with an abutting body for abutting the mirror according to the detection signal of the displacement meter to adjust the position of the mirror. And a means for adjusting the position of the XY stage according to a detection signal of the displacement meter.

According to a fifth aspect of the present invention, the means for bringing the mirror into contact with one principal surface side of the leaf spring according to the second aspect is such that the mirror attracting portion is a plate via a UV adhesive applied to the non-mirror surface of the mirror. The means for supporting the spring and abutting the voice coil on the other main surface side of the leaf spring is such that the voice coil adsorbing portion vacuum adsorbs the voice coil and elastically supports the voice coil, and the other surface of the leaf spring. The voice coil is elastically pressed and urged through the anaerobic adhesive applied to.

In order to satisfy the above-mentioned object, a method for assembling a galvano mirror according to a second aspect of the present invention is, as a sixth aspect, a yoke having a hollow portion, a leaf spring whose end portion is fixed to the hollow portion, and the above-mentioned. In a method of assembling a galvano mirror having a mirror fixed to one main surface side of a leaf spring and a voice coil fixed to the other main surface side of the leaf spring,
Positioning and fixing the yoke to which the leaf spring is fixed to a support base provided with a reference surface, and bringing the mirror into contact with one main surface side of the leaf spring via an adhesive agent and the voice coil. Abutting the other main surface side of the leaf spring via an adhesive agent and sandwiching the leaf spring by the mirror and the voice coil, thereby adhering the mirror and the voice coil at the same time. It is characterized by A seventh aspect of the present invention is characterized in that the adhesive according to the sixth aspect is an ultraviolet curing adhesive or an anaerobic adhesive.

[0021]

In the first aspect of the invention, the yoke having the leaf springs provided on the support base is positioned and supported, and the mirror is adhered to the leaf spring from one main surface side of the support base through the opening of the support base. The voice coil is bonded to the other surface of the leaf spring from the other main surface side of the support base in synchronization with the bonding of the mirror.

In the second invention, a yoke having a leaf spring attached thereto is positioned and supported on a reference surface provided on the support base,
A mirror is adhered to one main surface side of the leaf spring, a voice coil is adhered to the other main surface side of the leaf spring in synchronization with the adhesion of the mirror, and both surfaces of the leaf spring are bonded by a mirror and a voice coil. It is sandwiched and the mirror and voice coil are bonded to the leaf spring at the same time.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. As shown in FIG. 1, an assembly device for a galvanometer mirror is constructed. In the figure, 10 is a pillar 11 at its four corners.
It is a support base supported by. The upper surface of the support 10 serves as a reference surface S in the galvano mirror assembly work.

On the reference plane S, the reference line Y set along the longitudinal direction of the central portion of the support 10 and the reference line X set along the widthwise direction of the central portion of the support are located at the intersections. The yoke 1 is supported.

To explain further, as shown in FIG. 2, a rectangular opening 12 is provided at a predetermined position of the support base 10, and a pair of opposite side portions of the opening 12 are formed. While the suction holes 13 and 13 are opened on the reference line Y,
The reference pins 14 and 14 are provided upright in this vicinity position.

The suction hole 13 communicates with a vacuum passage provided in the support base 10 and a vacuum pump as a vacuum source via a hose connected to an end of the passage. (Neither is shown above) On the reference plane S of such a support base 10,
The yoke 1 described above is supported. The size of the hollow portion 1a formed in the yoke 1 matches the size of the opening 12 of the support base.

Pin holes 5 and 5 are provided on a pair of opposing sides of the hollow portion 1a of the yoke so that they can be fitted into the reference pins 14 and 14 provided upright on the support 10. There is. Moreover, the vacuum pressure is applied to the suction holes 13, so that the yoke 1 is supported on the support base reference surface S while being accurately positioned.

As shown in FIG. 1 again, a mirror bonding mechanism 15 is arranged below the support base 10. That is, the rail portion 16 is laid on the lower surface of the support base 10 below the reference line Y and at a position parallel to this line.

A Y stage 17 is laid across the rail portion 16 so as to be movable on the rail portion. An L-shaped pedestal 18 is mounted on the Y stage 17,
A guide rail portion 19 is provided on the vertical piece in the vertical direction. The guide rail section 19 has a Z stage 20.
Is spanned so as to be vertically movable.

On the side surface of the Z stage 20, a mirror attracting portion 21 described later is provided. This mirror suction part 2
The displacement gauge 22 faces the mirror suction unit 21 at a position where 1 moves outward from the lower surface of the support base 10 by the movement of the Y stage 17, that is, at a distance L in the Y direction from the intersection of the reference lines X and Y. It is arranged.

The displacement gauge 22 includes the mirror suction portion 21.
The position of the mirror 3 attracted to is detected from above.
Then, the detection signal is sent from here to a control circuit (not shown) and further sent to the abutting rods 23 and 24 which are abutting bodies.

The abutting rods 23 and 24 have the distance L
Of the mirror 3 vacuum-sucked by the mirror suction unit 21 at the position of the
Butt and finely adjust its position.

As shown in FIG. 4, the mirror suction portion 21 is provided with a window hole 25 penetrating the upper and lower end surfaces thereof, and only the lower end opening portion is closed by a window 26 which is a glass plate. A UV lamp 27, which is a UV light (ultraviolet) irradiation source, is disposed below the window 26, and the UV lamp 27 is directed toward the window hole.
It is designed to emit V light.

The window hole 2 is provided on the side of the mirror suction portion 21.
A horizontal hole 28 communicating with the middle portion of 5 is opened, and a hose (not shown) is connected here to communicate with the vacuum pump. Therefore, if the mirror 3 is placed on the mirror suction section 21, the mirror can be vacuum-sucked and can be transported to a predetermined position by the operation of the Y stage 17 and the Z stage 20.

As shown in FIG. 1 again, at the upper portion of the support base 10 which is symmetrical to the mirror bonding mechanism 15,
A voice coil bonding mechanism 30 is provided. That is, the XY stage 31 is mounted on a base (not shown). An L-shaped pedestal 32 is mounted on the XY stage 31, and a vertical guide rail 33 is provided on the vertical piece, and a Z stage 34 is movable vertically in the guide rail 33. Straddled.

The Z stage 34 is also formed in an L shape, and a voice coil attracting portion 35 described later is provided on the lower surface of this horizontal piece. As shown in FIG. 3, the voice coil attracting portion 35 includes an outer casing 36 integrally provided on the Z stage 34. A head portion 37 a of the suction nozzle 37 and a spring 38 are housed in the outer jacket 36.

The suction nozzle 37 is elastically urged downward by a spring 38, and a main body portion 37b protruding downward from an opening portion 36a provided on the lower surface of the outer casing 36, and a lower end portion of the main body portion 37b. Diameter reduced diameter part 3
7c is integrally formed.

A suction hole 39 is provided from the lower surface of the small-diameter portion 37c to the upper end surface of the head portion 37a, and is connected to the vacuum pump arranged outside the outer casing 36 via a hose (not shown).

Therefore, the small diameter portion 37 of the suction nozzle 37
The voice coil 4 can be vacuum-sucked to the tip of c. As shown in FIG. 1 again, the support base reference plane S
At a position of a predetermined height H1 from the above, two sets of displacement gauges 40 and 41 for detecting the position of the voice coil 4 sucked by the suction nozzle 37 from the X direction and the Y direction are provided.

All the detection signals of the displacement meters 40 and 41 are transmitted to the control circuit, compared with the reference position of the voice coil 4 stored in advance here, and the control signal is sent to the XY stage 31 to be adsorbed. The position of the voice coil 4 is adjusted.

Next, the assembling operation of the galvanometer mirror will be described in order. First, as shown in FIG. 4, the yoke 1 to which the fixing portions 2a and 2b of the leaf spring 2 have been attached and fixed in advance is placed on the reference surface S of the support 10. As described above, the pin holes 5 and 5 provided in the yoke 1 may be fitted into the reference pins 14 and 14 which are erected on the reference surface S. At the same time, a vacuum pressure is applied to the yoke 1 to fix this position.

On the other hand, in the mirror suction mechanism 15, the mirror suction portion 21 is moved to a distance L from the reference position of the support base 10 previously described with reference to FIG. Place and vacuum adsorb.

At this time, the mirror surface of the mirror 3 is placed on the lower surface side for vacuum adsorption, and the non-mirror surface is placed on the upper surface side, and the UV adhesive 42 is supplied to this surface. The UV adhesive 42 is cured for the first time after being irradiated with UV light (ultraviolet light) for a predetermined time or longer.

In this way, the position of the mirror 3 placed on the mirror suction portion 21 is detected by the displacement meter 22, and the detection signal is sent to the control circuit to automatically control the abutting rods 23 and 24, and the mirror is used as a reference. Move to position and adjust.

On the other hand, the voice coil 4 is vacuum-sucked to the voice coil suction portion 35. And XY stage 31 and Z
When the stage 34 is operated, the height H1 from the support base reference plane S is increased.
Move the voice coil 4 to the
The position is detected by 0 and 41, and the XY stage 31 moves and adjusts the voice coil to the reference position.

Next, as shown in FIG. 5, the mirror suction unit 2
1 descends by a height H3, and along the rail part 16 a distance L
Only move, then raise height H4. As a result, the mirror 3 is placed between the leaf spring movable portion 2e and the U
The V adhesive 42 is crushed and brought into contact.

The distance H4 is set so that the distance between the leaf spring 2 and the bonding surface of the mirror 3 is appropriate from the conditions such as the characteristics of the UV adhesive 42 and the coating amount.
The mirror 3 and the mirror attracting portion 21 via the V adhesive 42.
Support.

Even if the yoke 1 has a dimensional error, since the leaf spring mounting surface is attracted to the reference surface S, the distance between the leaf spring movable portion 2e surface and the mirror 3 bonding surface is reproduced with high accuracy. Therefore, the mutual adhesive surfaces are not too far apart from each other, and the mutual adhesive surfaces are not too close to each other to collide with each other.

On the other hand, the anaerobic adhesive 43 is supplied from above the yoke 1 to the upper surface of the leaf spring movable portion 2e through the hollow portion 1a formed therein. This anaerobic adhesive 43
When the adhesives are pressed against each other for a predetermined time or more, the adhesives are cured to bond the adhesives to each other.

Next, as shown in FIG. 6, the position of the mirror attracting portion 21 is left as it is, that is, the supporting state of the leaf spring 3 by the mirror 3 and the mirror attracting portion 21 is continued, and U
The V lamp 27 is turned on.

The UV light emitted from here passes through the window 26 and is applied to the mirror 3 located at the end of the window hole 25.
The adhesive 42 is cured. Therefore, the mirror 3 is adhesively fixed to one main surface side of the leaf spring movable portion 2e.

On the other hand, the voice coil suction unit 35 is lowered,
When the distance between the tip of the small diameter portion 37c and the reference surface S reaches the position of H2, the lowering of the suction portion is stopped. The adhesive surface, which is the lower surface of the voice coil 4, crushes the anaerobic adhesive 43 between itself and the leaf spring movable portion 2e.

At this time, the voice coil 4 and the leaf spring movable portion 2e may be spaced from each other by setting the spacing dimension H2, or may be pressed by the spring 38 in the outer casing 36 at a constant pressure.

Even if the molded voice coil 4 has a dimensional error and the adhesive surface of the voice coil 4 comes into pressure contact with the adhesive surface of the leaf spring movable portion 2e, the spring 38 is compressed and the voice is compressed. Since the coil 4 moves upward and the lower surface of the leaf spring movable portion 2e is supported by the mirror 3 and the mirror attraction portion 21, the leaf spring 2 is not deformed.

By continuing such a state for a predetermined time, the anaerobic adhesive 43 between the leaf spring movable portion 2e and the voice coil 4 is hardened. Therefore, the voice coil 4 is adhesively fixed to the other main surface side of the leaf spring movable portion 2e.

Then, as shown in FIG. 7, application of the vacuum pressure to the mirror suction portion 21 and the voice coil suction portion 35 is stopped, and the Z stage 20 of the mirror suction portion 21 is moved downward.
Moreover, the Z stage 34 of the voice coil attracting portion 35 is moved upward.

Finally, the application of vacuum pressure to the yoke 1 on the support 10 is stopped, and the yoke 1 is removed from the reference pin 14. That is, the assembly of the galvano mirror described above with reference to FIGS. 8 and 9 is completed.

As described above, the fixing portion 2 of the leaf spring 2
Since the mirror 3 and the voice coil 4 are simultaneously mounted on both surfaces of the a and 2b fixed to the yoke 1, the leaf spring 2 is not handled by itself, and the leaf spring 2 is hardly damaged. There is no.

Further, even if there are dimensional errors in the yoke 1, the mirror 3 and the voice coil 4, the leaf spring 2 can be assembled without being deformed, and the relative positions of the respective parts can be reproduced. Therefore, the assembling accuracy can be improved. Further, since the deformation of the leaf spring 2 is prevented and the assembling accuracy is improved, the conventional correction after assembling becomes unnecessary, which leads to a reduction in assembling time.

[0060]

As described above, in the apparatus for assembling a galvano mirror according to the first aspect of the invention, the opening of the support is communicated with the hollow part of the yoke to hold the yoke on the support, and the opening is provided through the opening of the support. Then, the mirror is brought into contact with and adhered to one main surface side of the leaf spring, and the voice coil is brought into contact with and adhered to the other main surface side of the leaf spring in synchronism with this, so that the damage to the leaf spring is almost eliminated. Even if there is a dimensional error in the yoke, the mirror and the voice coil, the leaf spring can be assembled without being deformed, and the relative position of each component can be reproduced, and the assembling accuracy can be improved. . Since there is no need for correction after assembly as in the prior art, the assembly time can be shortened, and there is an effect that assembly can be performed automatically and accurately while using a leaf spring having low rigidity.

In the method of assembling the galvano mirror according to the second aspect of the invention, the yoke having the leaf spring fixed thereto is positioned and fixed on the support base provided with the reference surface, and the mirror is bonded to one main surface side of the leaf spring with an adhesive. And the voice coil is brought into contact with the other main surface side of the leaf spring via an adhesive agent, and the leaf spring is sandwiched between the mirror and the voice coil, thereby simultaneously adhering the mirror and the voice coil. As a result, there is almost no damage to the leaf springs, the assembling accuracy can be improved, the conventional modification after assembling is unnecessary, and the assembling time can be shortened. The effect of automatically and accurately assembling can be obtained while using.

[Brief description of drawings]

FIG. 1 is a schematic perspective view of a galvano mirror assembling apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a state where the yoke is disassembled from the support base reference surface in the embodiment.

FIG. 3 is a vertical cross-sectional view of a voice coil attracting portion of the embodiment.

FIG. 4 is a view for explaining the first step of assembling the galvanometer mirror in the embodiment.

FIG. 5 is a view for explaining the next step of assembling the galvanometer mirror according to the embodiment.

FIG. 6 is a view for explaining the further next step of assembling the galvanometer mirror of the embodiment.

FIG. 7 is a diagram illustrating a final step of assembling the galvanometer mirror according to the embodiment.

FIG. 8 is a perspective view in which a part of the assembled galvanometer mirror is cut away.

FIG. 9 is an exploded perspective view of a galvanometer mirror.

[Explanation of symbols]

1a ... Hollow part, 2 ... Leaf spring, 1 ... Yoke, 12 ... Opening part, 10 ... Support stand, 3 ... Mirror, 15 ... Mirror bonding mechanism, 4 ... Voice coil, 30 ... Voice coil bonding mechanism,
S ... Reference plane, 21 ... Mirror suction part, 17 ... Y stage,
20 ... Z stage, 35 ... Voice coil suction part, 31 ...
XY stage, 34 ... Z stage, 13 ... suction holes, 5 ...
Pin hole, 14 ... Reference pin, 22 ... (Mirror) displacement gauge, 2
3, 24 ... Abutting body, 42 ... UV adhesive, 37 ... Suction nozzle, 43 ... Anaerobic adhesive.

Claims (7)

[Claims] 1. A yoke having a hollow portion, a leaf spring whose end is fixed to the hollow portion, a mirror fixed to one principal surface side of the leaf spring, and the other principal surface of the leaf spring. In a device for assembling a galvano mirror having a voice coil fixed to a side thereof, a support base for holding a yoke to which the leaf spring is fixed and provided with an opening communicating with a hollow portion of the yoke, and the opening. And a mirror adhering means for bringing the mirror into contact with one main surface side of the leaf spring via the, and a voice coil arranged in opposition to the mirror adhering means and synchronized with the mirror adhering means. An apparatus for assembling a galvano mirror, comprising: a voice coil adhering means that is brought into contact with the other main surface side of the leaf spring. 2. The support base has a reference surface for supporting a yoke provided with the leaf spring, and the means for abutting a mirror on one main surface side of the leaf spring comprises:
The Y stage and the Z stage, which are disposed below the support table and have a mirror suction unit for vacuum sucking the mirror and transfer the mirror suction unit, are provided with a voice coil on the other main surface side of the leaf spring. The contact means has a voice coil suction part for vacuum-sucking the voice coil and transfers the voice coil suction part X.
The assembly apparatus for a galvano mirror according to claim 1, further comprising a Y stage and a Z stage. 3. The reference surface of the support base is provided with a suction hole for vacuum-sucking the yoke, and a reference pin which engages with a pin hole provided in the yoke and regulates its position is provided upright. The assembly device for a galvano mirror according to claim 1, which is characterized in that. 4. A means for abutting a mirror on one main surface side of the leaf spring includes a displacement gauge for detecting the position of the mirror attracted to the mirror attraction portion, and the mirror according to the detection signal of the displacement gauge. A means for abutting the voice coil on the other main surface side of the leaf spring is provided with a displacement gauge for detecting the position of the voice coil attracted to the voice coil attracting portion. 3. The assembly apparatus for a galvano mirror according to claim 2, further comprising means for adjusting the position of the XY stage according to a detection signal of the displacement meter. 5. A means for bringing a mirror into contact with one main surface side of the leaf spring supports the leaf spring via a UV adhesive applied to the non-mirror surface of the mirror by the mirror attracting portion. The means for abutting the voice coil on the other main surface side of the above is an anaerobic adhesive applied to the other surface of the leaf spring by the voice coil suction portion vacuum suctioning the voice coil and elastically supporting the voice coil. 3. The assembly apparatus for a galvano mirror according to claim 2, wherein the voice coil is elastically biased and biased via the. 6. A yoke having a hollow portion, a leaf spring whose end is fixed to the hollow portion, a mirror fixed to one main surface side of the leaf spring, and the other main surface of the leaf spring. In a device for assembling a galvano mirror having a voice coil fixed to a side thereof, a step of positioning and fixing a yoke to which the leaf spring is fixed to a support base provided with a reference surface; The main surface side of the leaf spring with an adhesive agent and the voice coil with the other main surface side of the leaf spring with an adhesive agent to sandwich the leaf spring with the mirror and the voice coil. The method of assembling a galvano mirror according to claim 1, further comprising the step of simultaneously bonding the mirror and the voice coil. 7. The method for assembling a galvano mirror according to claim 6, wherein the adhesive is an ultraviolet curing adhesive or an anaerobic adhesive.