JPH07125838A - Positioning table device - Google Patents

Abstract

PURPOSE:To position and hold a holder means for a base means at a high speed and with high precision, with the simple constitution. CONSTITUTION:A holder means 13 on which a prescribed positioning objective body is placed asd a part or the whele 13A and 13B of a base means 11 on which the holder means 13 is placed are made of the magnetic material, and a rolling means 12 made of the magnetic material is nipped between the base means 11 and the holder means 13, and the holder means 13 can be positioned through the shift at high speed and with high precision for the base means 11. Further, if necessary, a magnetic attractive force is generated between the holder means 13 and the base means 11 through the rolling means 12 by an electromagnetic means, and the position of the holder means 13 which is positioning-performed can be held with high precision.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning table device, and can be applied to, for example, a device for positioning and holding a substrate or a reticle of a semiconductor manufacturing device or a liquid crystal display plate manufacturing device.

[0002]

2. Description of the Related Art Conventionally, as a positioning table for a reticle or a substrate in a semiconductor manufacturing apparatus or a liquid crystal display panel manufacturing apparatus, there is one that slides a substrate holder with respect to a base. That is, as shown in FIG. 3, in the positioning table 1, the substrate holder 4 is placed on the base 2 via the sliding member 3. The sliding member 3 is formed of a material suitable for sliding, such as loulon, and is fixed to the base 2 and then the upper surface is finished in a surface state suitable for sliding.

On the other hand, the bottom surface of the substrate holder 4 is finished in a surface state suitable for sliding. Also, this substrate holder 4
A drive unit 6A mounted on the base 2 via links 5A, 5B, 5C having hinges at both ends,
It is bound to 6B and 6C. As a result, the drive unit 6A-
6C moves the substrate holder 4 in the XYθ directions by driving the links 5A to 5C in the directions indicated by arrows a, b, and c or in the opposite directions, respectively, and the reticle R that is vacuum-adsorbed on the substrate holder 4 is moved. The alignment mark M is used for positioning with respect to the alignment optical system (not shown).

In the case of this positioning table 1, as shown in FIG. 4, a suction hole 4A is formed inside the substrate holder 4, and when the positioning process of the substrate holder 4 with respect to the alignment optical system is completed, this suction is performed. The substrate holder 4 is vacuum-sucked to the sliding member 3 through the use hole 4A, so that the positioning state of the substrate holder 4 is maintained.

[0005]

By the way, in the positioning table 1 having such a structure, it is moved by sliding by the guide surface of the sliding member 3 interposed between the base 2 and the substrate holder 4. The so-called status slip phenomenon occurs. Therefore, there is a limit to the high-accuracy and high-speed positioning, and there is a problem in that the substrate holder 4 is held by vacuum suction even after the positioning, so that there is a problem in that a positional deviation occurs. It was practically difficult to obtain an adsorption surface that does not generate.

The present invention has been made in consideration of the above points, and is intended to realize a positioning table device capable of positioning and holding the holder means with respect to the base means with a simple structure at high speed and with high accuracy. is there.

[0007]

In order to solve such a problem, according to the present invention, a part 13A or a part thereof is made of a magnetic material, and a holder means 13 on which a predetermined positioning object is placed, and a part 11A. Alternatively, the base means 11 is formed entirely of a magnetic material, and the holder means 13 is placed on the base means 11, and the base means 11 and the holder means 13 are sandwiched between the base means 11 and the holder means 13. A rolling means 12 for movably supporting it and an electromagnet means 14 for generating a magnetic attraction force between the holder means 13 and the base means 11 via the rolling means 12 are provided, and the holder means 13 is used as the base means. The holder means 1 is positioned in the XYθ direction within one plane on 11 and positioned.
3 was retained by magnetic attraction.

[0008]

Function: Holder means 13 on which a predetermined positioning object is placed, and base means 11 on which the holder means 13 is placed
By forming a part 13A, 11A or all of the above and the magnetic material, and by sandwiching the rolling means 12 formed of the magnetic material between the base means 11 and the holder means 13, the holder means 13 is formed. Can be moved and positioned with respect to each other at high speed and with high precision, and further, by the electromagnet means 14, magnetic attraction force can be applied between the holder means 13 and the base means 11 via the rolling means 12 as required. Is generated, the position of the positioned holder means 13 can be held with high accuracy.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings.

In FIG. 1 in which parts corresponding to those in FIG. 3 are designated by the same reference numerals, 10 indicates a positioning table according to the present invention as a whole, and a substrate holder 13 is provided on a base 11 via three rolling members 12. Is placed. The rolling member 12 is configured to have, for example, a ball-shaped rolling mechanism,
As a result, the substrate holder 13 is supported on the base 11 so as to be movable in the XYθ directions.

The substrate holder 13 has links 5A to 5C having hinges at both ends, and one end of each of the links 5A to 5C is connected to the substrate holder 13.
The drive unit 6 in which the other ends of A to 5C are fixed to the base 11.
A to 6C, respectively. Thereby, the drive units 6A to 6C independently drive the links 5A to 5C in the directions indicated by the arrows a to c or in the opposite directions,
The substrate holder 13 is moved in the XYθ directions, and an alignment optical system (not shown) is used by using the alignment mark M on the reticle R that is vacuum-adsorbed by the substrate holder 13.
Position with respect to.

In the case of the positioning table 10 of this embodiment, as shown in FIG. 2, the first flat plate member 11A made of a magnetic material is arranged on the base 11 where the rolling member 12 is placed. Has been done. An electromagnet 14 is arranged in the base 11 below the first flat plate member 11A. The electromagnet 14 has the first flat plate member 1 having a magnetic force generation surface.
It is embedded and fixed in the base 11 so as to contact the lower surface of 1A. Further, the substrate holder 13 is used to roll the rolling member 1.
A second flat plate member 13A made of a magnetic material is fixed to the portion that comes into contact with 2.

As a result, when no current is flowing through the electromagnet 14, the first flat plate member 11A, the rolling member 12 and the second flat plate member 11A.
Since they do not have any coupling force with the flat plate member 13A, the reticle R can be positioned by driving the substrate holder 13 by the driving units 6A to 6C. When the electromagnet 14 is energized after the positioning of the reticle R is completed, a magnetic attraction force is generated between the first flat plate member 11A, the rolling member 12 and the second flat plate member 13A, which causes the rolling member 12 to pass through. Base 11
The positioning state of the substrate holder 13 with respect to is held.

According to the above structure, the substrate holder 13 is formed on the base 11 via the rolling member 12 made of a magnetic material.
Is mounted to support the substrate holder 13 on the base 11 so as to be movable in the XYθ directions.
1 is energized, the magnetic attraction between the first and second flat plate members 11A and 13A formed of a magnetic material and fixed to the base 11 and the substrate holder 13 and the rolling member 12, respectively. By generating a force and holding the position of the substrate holder 13 with respect to the base 11 via the rolling member 12, the substrate holder 13 is positioned and held with respect to the base 11 with a simple structure at high speed and with high accuracy. can do.

In the above embodiment, the rolling member 1
First and second flat plate members 1 formed of a magnetic material on the portions of the base 11 and the substrate holder 13 which are in contact with each other.
The case where 1A and 13A are fixed and the position of the substrate holder 13 with respect to the base 11 is held by the magnetic attraction force generated by the electromagnet 14 has been described, but the present invention is not limited to this, and the entire base and / or substrate holder is provided. Even if is formed of a magnetic material, the same effect as that of the above-described embodiment can be obtained.

Further, in the above-mentioned embodiment, the case where the rolling member having the ball-shaped rolling mechanism is used as the rolling means has been described, but the rolling means is not limited to this and the point is that it is made of a magnetic material. In addition, if it is sandwiched between the base and the substrate holder and movably supports the substrate holder with respect to the base by rolling at high speed and with high accuracy, the same effect as the above-described embodiment can be realized. . Further, at this time, the substrate holder can be easily leveled by selecting the diameter of the rolling means.

Further, in the above-described embodiment, the case where the positioning table device according to the present invention is applied to a device for positioning and holding the substrate and the reticle of the semiconductor manufacturing apparatus or the liquid crystal display panel manufacturing apparatus has been described. However, the present invention is not limited to this, and as long as a predetermined object to be positioned is placed on the holder to be positioned and held, it is suitable for wide application to other positioning table devices such as precision machining devices.

[0018]

As described above, according to the present invention, a part or all of the holder means on which a predetermined positioning object is placed and the base means on which the holder means is placed are formed of a magnetic material. At the same time, by sandwiching the rolling means made of a magnetic material between the base means and the holder means, the holder means can be moved and positioned with respect to the base means at high speed and with high accuracy, and the electromagnet means can be further positioned. Therefore, if necessary, by generating a magnetic attraction force between the holder means and the base means via the rolling means, it is possible to hold the position of the positioned holder means with high accuracy,
Thus, it is possible to realize a positioning table device having a simple structure and capable of positioning and holding the holder means with respect to the base means at high speed and with high accuracy.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a positioning table device according to the present invention.

FIG. 2 is a side view for explaining a positioning holding method in the positioning table device of FIG.

FIG. 3 is a perspective view showing a conventional positioning table device.

FIG. 4 is a side view for explaining a positioning holding method in the positioning table device of FIG.

[Explanation of symbols]

1, 10 ... Positioning table, 2, 11 ... Base,
11A ... first flat plate member, 3 ... sliding member, 4,13
... substrate holder, 4A ... suction hole, 13A ... second flat plate member, 5 ... link, 6 ... drive unit, 12 ... rolling member, 14 ... electromagnet, R ... reticle, M ……Alignment mark.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI Technical display location H05K 13/04 P // B23Q 3/18 Z 8612-3C

Claims (1)

[Claims] 1. A holder means on which a predetermined positioning object is placed, a part or all of which is made of a magnetic material, and a base on which a part or all of which is made of a magnetic material, on which the holder means is placed. Means, a rolling means formed of a magnetic material, sandwiched between the base means and the holder means, for movably supporting the holder means with respect to the base means, and the rolling means. An electromagnet means for generating a magnetic attraction force between the holder means and the base means,
XYθ the holder means in a plane on the base means.
The positioning table device is characterized in that it is positioned in the direction and the positioned holder means is held by the magnetic attraction force.