JPH08212514A - Thin-film magnetic head and its production - Google Patents

Abstract

PURPOSE: To shorten the thin film forming stage and to improve the yield by separately forming a substrate for reproducing elements and a substrate for recording elements and simultaneously forming leader conductors for reproducing and leader conductors for recording on either substrate. CONSTITUTION: The substrate 1 for forming the reproducing elements of the thin-film magnetic head and the substrate 2 for forming the recording elements are dividedly formed. The leader conductors 4A for reproducing and the leader conductors 4B for recording are simultaneously and collectively formed on the substrate 1. The reproducing elements have magneto-resistance effect films 3 and magnetic films 5. The recording elements have recording coils 8 for generating recording magnetic fields in the grooves formed out of insulating films on the substrate 2. The substrate 1 and the substrate 2 are laminated and fixed so that the reproducing elements and the recording elements are superposed on each other. The leader conductors for recording of the substrate 2 not having the leader conductors 4 formed and the junctures 7 of the leader conductors 4B of the substrate 1 come into contact with each other and are electrically connected.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film magnetic head formed by a thin film forming technique and a method of manufacturing the same, and more particularly to a thin film for recording and reproducing in which a reproducing head and a recording head are laminated in a thickness direction. The present invention relates to a head and a manufacturing method thereof.

[0002]

2. Description of the Related Art Among conventional thin film heads, a magnetoresistive element is used for a reproducing head and an inductive type inductive element is used for a recording head, and a thin film magnetic layer in which the reproducing head and the recording head are laminated The head is, for example, JP-A-51.
No. 44971. In the prior art disclosed in this prior application, a magnetoresistive film is formed on a magnetic substrate serving as a first shield via an insulating layer, and the second shield and the recording head's first shield are formed via the insulating layer. A magnetic layer that also serves as the first magnetic pole is formed. Then, an insulating layer for forming a recording gap is formed, and a spiral winding for generating a recording magnetic field is formed.
A second magnetic pole was formed via an insulating layer, and finally a protective film was formed to complete a recording / reproducing thin film magnetic head.

[0003]

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
Since a method of sequentially stacking a magnetoresistive element for reproduction and an inductive element for recording on one substrate is formed, a process using a thin film forming technique for one substrate becomes long, and each process is performed. However, there is a problem that the yield decreases due to defects such as defects, resulting in an expensive thin film magnetic head.

Further, when a multi-channel thin-film magnetic head is formed by using the conventional technique, the yield is very low, and therefore the multi-channel head cannot be practically manufactured from the viewpoint of cost. There was also.

Therefore, the technical problem to be solved by the present invention is to solve the above-mentioned problems of the prior art. The purpose is to solve the problems in the conventional thin film magnetic head for recording / reproducing of the laminated structure. It is possible to fabricate a multi-channel thin film magnetic head with high yield by shortening the thin film forming process as a whole and the thin film forming process for one substrate without changing the structure to obtain the same characteristics. Another object is to provide an inexpensive thin film magnetic head.

[0006]

In order to achieve the above object, the present invention provides a thin film magnetic head for recording / reproducing of a laminated structure, and a first substrate on which a reproducing element is formed in the thin film forming process. It is divided into a second substrate on which a recording element is formed, and a reproduction lead conductor and a recording lead conductor are simultaneously formed on one of the first substrate and the second substrate at the same time to reproduce the same. The first substrate and the second substrate are laminated and fixed so that the element and the recording element overlap each other, and the element portion on the substrate side on which the lead-out conductor is not formed and the corresponding reproducing element. The lead conductor or the recording lead conductor is configured to be electrically connected.

[0007]

The reproducing lead conductor and the recording lead conductor are simultaneously formed on either the first substrate on which the reproducing element is formed or the second substrate on which the recording element is formed. When the lead conductor is formed in the same step as described above, as compared with the conventional technique, a step of forming either the lead-out conductor for reproduction or the lead-out conductor for recording and an insulating layer forming step for insulating the lead-out conductor are performed. However, the total number of thin film forming steps is reduced by this amount, and the yield is improved. Further, in the thin film forming process, since the first substrate for forming the reproducing element and the second substrate for forming the recording element are divided, the thin film forming step for one substrate is reduced. The yield also improves from the point. Therefore, the yield is improved, an inexpensive thin film magnetic head can be provided, and it can be applied to a multi-channel head.

[0008]

The present invention will be described below with reference to the illustrated embodiments.

1 to 3 relate to a first embodiment of the present invention,
1 is a plan view schematically showing main forming elements on a first substrate in the present embodiment, and FIG. 2 is a plan view schematically showing a part of forming elements on a second substrate in the present embodiment. FIG. 3 and FIG. 3 are schematic cross-sectional views of a thin-film magnetic head for recording / reproducing having a laminated structure according to this embodiment.

As shown in FIG. 3, a first insulating film 9 for forming a first gap of the reproducing head is formed on the magnetic substrate 1 which also serves as the first shield of the reproducing head. Then, the magnetoresistive effect film 3 is formed into a desired shape by using a photolithography technique. Although not shown here, it is necessary to provide a means for applying a bias to the magnetoresistive effect film 3 so as to obtain an optimum reproduction output. Further, on the magnetoresistive film 3, a reproducing lead conductor 4 (4A) for determining the track width of the reproducing head and taking out a reproduced output, and a recording lead conductor 4 (4B) for a recording head described later. And are formed at the same time.
Next, as shown in FIG. 3, a second insulating film 10 for forming the second gap of the reproducing head is formed, and a pad 6 for drawing out a lead wire 12 for connecting to a reproducing circuit and a recording circuit is formed. To form. Subsequently, the magnetic film 5 which also serves as the second shield of the reproducing head and the magnetic pole of the recording head is formed, and the recording lead-out conductor 4 (4B) is formed with the connecting portion 7 to the recording head. By this, the first
The step of forming a thin film on the substrate is completed.

As shown in FIG. 2, on the magnetic substrate 2 for constructing the magnetic circuit of the recording head, as shown in FIG. 3, an insulating film 11 for forming a recording gap is formed.
Are deposited by a technique such as sputtering, and a groove for forming a coil is formed by a photolithography technique. Then, the recording coil 8 for generating the recording magnetic field
Is formed in the groove formed by the insulating film 11, and the thin film forming process on the second substrate is completed.

After the above-mentioned thin film forming step, the first substrate and the second substrate are bonded together by a resin adhesive or the like to be integrated, and a thin film magnetic head having a laminated structure as shown in FIG. 3 is manufactured. At the time of this bonding, the connection portion 7 formed on the first substrate and a part of the recording coil 8 (coil terminal connection portion) formed on the second substrate are made of conductive resin or low temperature solder. Electrically connected by. As a result, the recording lead conductor 4B and the recording coil 8 shown in FIG. 1 are electrically connected, and the recording head is electrically connected to the recording circuit via the pad 6 and the lead wire 12. It is made possible.

According to this embodiment having such a structure and manufacturing method, the reproducing lead conductor 4A and the recording lead conductor 4B are formed on the first substrate in the same step. Compared with the conventional technique that is formed in a separate step, the step of forming either the reproducing lead conductor or the recording lead conductor and the insulating layer forming step for insulating the lead conductor are shortened. The total number of thin film forming steps is reduced by this amount, and the yield is improved. Further, in the thin film forming process, since the first substrate for forming the reproducing head and the second substrate for forming the recording head are divided, the number of thin film forming steps for one substrate is reduced. The yield also improves from the point. Therefore, the yield is improved and an inexpensive thin film magnetic head can be provided. Further, it can be applied to a multi-track head with high yield.

Further, in this embodiment, since the magnetic film 5 forming the magnetic pole of the recording head is formed on the side of the first substrate on which the reproducing head is formed, the reproducing track and the recording track are formed. Since the position alignment can be performed by using the photolithography technique, there is also an advantage that the track alignment can be performed with high accuracy even if the first substrate and the second substrate are divided.

FIG. 4 is a perspective view showing a bidirectional recording / reproducing multi-track head according to a second embodiment of the present invention. This embodiment is constructed by combining two multi-track heads having a laminated structure in which the first substrate and the second substrate produced in the first embodiment are attached. In the present embodiment having such a configuration, recording is performed by the recording element W of the block A and reproduction is performed by the reproducing element R of the block B for the magnetic recording medium which advances from the block A side shown in FIG.
Further, for the magnetic recording medium proceeding from the block B, recording is performed by the recording element W of the block B and reproduced by the reproducing element R of the block A. Therefore, it is possible to manufacture a multi-track head capable of simultaneous recording and reproduction in both directions with a high yield.

FIG. 5 is a perspective view showing a flying type magnetic head according to a third embodiment of the present invention. In the present embodiment, a recording / reproducing head for one channel is cut out from the multi-track head having a laminated structure in which the first substrate and the second substrate produced in the first embodiment are bonded together, and is machined or sputter-etched. By the method described above, the air bearing surface is processed with rails to produce a flying type magnetic head. According to the present invention, such a flying type magnetic head can be manufactured with high yield.

6 to 8 relate to a fourth embodiment of the present invention,
FIG. 6 is a plan view schematically showing the main forming elements on the first substrate in the present embodiment, and FIG. 7 is a plan view schematically showing the main forming elements on the second substrate in the present embodiment, FIG. 8 is a schematic cross-sectional view of a thin-film magnetic head for recording / reproducing with a laminated structure according to this embodiment.

6 to 8, components equivalent to those of the first embodiment shown in FIGS. 1 to 3 are designated by the same reference numerals,
The explanation is omitted to avoid duplication. In this embodiment,
The recording head is formed on the second substrate, and the recording lead conductor 4 (4B) and the reproducing lead conductor 4 (4
A) and A) are formed in the same step, and a reproducing head is formed on the first substrate. In FIG. 7, 1
Reference numeral 3 denotes a conductor connected to the magnetoresistive effect film 3, which is used when the first substrate and the second substrate are bonded together.
And the connection portion 7 on the reproduction lead-out conductor 4A on the second substrate side are electrically connected by the same means as in the first embodiment.

Also in this embodiment having such a structure, as in the first embodiment, the thin film forming process can be shortened as compared with the prior art, and a thin film magnetic head for recording and reproducing can be manufactured with high yield. You can Further, in this embodiment, the film forming temperature of the second substrate on which the lead conductor 4 is formed can be arbitrarily determined without considering the heat resistance of the magnetoresistive effect film 3, and the film forming temperature of each film can be determined. A high temperature process can be applied to improve adhesion, and high reliability for film adhesion can be secured.

[0020]

As described above, according to the present invention, in the thin film forming process, the first substrate on which the reproducing element is formed,
Since it is divided into the second substrate for forming the recording element,
The number of thin film forming steps for one substrate is reduced, and the yield is greatly improved. In addition, a first element for forming a reproducing element
Since the reproducing lead conductor and the recording lead conductor are simultaneously formed on one of the second substrate and the second substrate on which the recording element is formed, the reproducing lead conductor or the recording lead conductor can be formed as compared with the conventional technique. The step of forming either one of the lead conductors for use and the insulating layer forming step for insulating the lead conductors will be shortened, and the thin film forming step in total will be reduced by this amount, Yield improves. Therefore, the yield is improved,
It is possible to provide an inexpensive recording / reproducing thin film magnetic head having a laminated structure, and it is possible to apply the thin film magnetic head to a multi-channel head, and its value is great.

[Brief description of drawings]

FIG. 1 is a plan view schematically showing main forming elements on a first substrate in a thin film magnetic head according to a first embodiment of the invention.

FIG. 2 is a plan view schematically showing a part of forming elements on the second substrate in the thin film magnetic head according to the first embodiment of the invention.

FIG. 3 is a schematic cross-sectional view of a recording / reproducing thin film magnetic head according to a first embodiment of the invention.

FIG. 4 is a perspective view showing a multi-track head capable of bidirectional recording / reproducing according to a second embodiment of the present invention.

FIG. 5 is a perspective view showing a flying type magnetic head according to a third embodiment of the invention.

FIG. 6 is a plan view schematically showing main forming elements on a second substrate in a thin film magnetic head according to a fourth example of the invention.

FIG. 7 is a plan view schematically showing main forming elements on a first substrate in a thin film magnetic head according to a fourth example of the invention.

FIG. 8 is a schematic cross-sectional view of a recording / reproducing thin film magnetic head according to a fourth embodiment of the invention.

[Explanation of symbols]

 1, 2 Magnetic Substrate 3 Magnetoresistive Film 4 Leading Conductor 5 Magnetic Film 6 Pad 7 Connection Part 8 Recording Coil 9 First Insulating Film 10 Second Insulating Film 11 Insulating Film

Claims (2)

[Claims] 1. A first substrate having a reproducing element formed thereon and a second substrate having a recording element formed thereon, wherein the first element is arranged so that the reproducing element and the recording element overlap each other. Is a thin-film magnetic head for recording / reproduction, in which the substrate and the second substrate are laminated, wherein a reproducing lead conductor and a recording lead are provided on either one of the first substrate and the second substrate. A thin film magnetic head having a conductor formed thereon. 2. A first substrate having a reproducing element formed thereon and a second substrate having a recording element formed thereon, wherein the first element is arranged so that the reproducing element and the recording element overlap each other. A method of manufacturing a thin-film magnetic head for recording / reproduction in which the substrate and the second substrate are laminated, wherein a reproducing lead conductor and a reproducing lead conductor are provided on either one of the first substrate and the second substrate. A step of simultaneously forming a recording lead conductor, laminating and fixing a substrate on which the lead conductor is formed and a substrate on which the lead conductor is not formed, and a substrate side on which the lead conductor is not formed Element part,
And a step of electrically connecting a reproduction lead conductor or a recording lead conductor corresponding thereto, and a method of manufacturing a thin film magnetic head.