JPH08155249A - Exhaust gas purificating apparatus by plasma process - Google Patents
Exhaust gas purificating apparatus by plasma processInfo
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- JPH08155249A JPH08155249A JP6306477A JP30647794A JPH08155249A JP H08155249 A JPH08155249 A JP H08155249A JP 6306477 A JP6306477 A JP 6306477A JP 30647794 A JP30647794 A JP 30647794A JP H08155249 A JPH08155249 A JP H08155249A
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- exhaust gas
- plasma
- electrode
- electrodes
- discharge
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、発電用ボイラ、各種燃
焼機関、燃焼炉等から排出される排ガス中に含まれる有
害物質を浄化する手段の１つであるプラズマ法排ガス浄
化装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma method exhaust gas purifying apparatus which is one of means for purifying harmful substances contained in exhaust gas discharged from power generation boilers, various combustion engines, combustion furnaces and the like.
【０００２】[0002]
【従来の技術】プラズマ法排ガス浄化装置は、公知のも
のであり（公表特許公報昭６３−５０００２０号公報参
照）、この原理を図５を参照して説明する。2. Description of the Related Art A plasma-type exhaust gas purifying apparatus is known (see Japanese Patent Laid-Open No. 63-500020), and its principle will be described with reference to FIG.
【０００３】図５において、(1) はプラズマを発生させ
るための高電圧パルス発生電源を示し、(2) はワイヤ型
放電電極、(3) はプレート型対向電極を示す。この両電
極(2)(3)間にパルスピーク電圧１ｋＶ〜５００Ｋｖ、パ
ルス周波数１０ＨＺ〜２５０ＨＺ、パルス幅１ナノ秒〜
１０マイクロ秒、立ち上がり時間１００ｋＶ／ナノ秒〜
１００Ｖ／ナノ秒の高電圧パルスを連続的に印加する
と、電極間に非平衡プラズマ(4) が発生する。このよう
な場に有害ガス成分を含む排ガス(5) を通じるとプラズ
マ(4) によって各種ラジカルが発生する。In FIG. 5, (1) shows a high voltage pulse generating power source for generating plasma, (2) shows a wire type discharge electrode, and (3) shows a plate type counter electrode. A pulse peak voltage of 1 kV to 500 Kv, a pulse frequency of 10 HZ to 250 HZ, and a pulse width of 1 nanosecond to between both electrodes (2) and (3).
10 microseconds, rise time 100 kV / nanoseconds ~
When a high voltage pulse of 100 V / nanosecond is continuously applied, a non-equilibrium plasma (4) is generated between the electrodes. When the exhaust gas (5) containing harmful gas components passes through such a place, various radicals are generated by the plasma (4).
【０００４】排ガス中の有害成分はこのラジカルとの反
応によりＣＯはＣＯ2 に、ＳＯｘはＳＯ3 に、ＮＯｘは
ＮＯ2 に酸化され、無害な形態あるいは捕集されやすい
形態に変化する。また、被処理ガスがごみ焼却炉からの
排ガスの場合、ガス中に含まれるダイオキシンなどは分
解されて無害化される。これらの反応が生じている反応
器内、あるいは反応器後流にアンモニア、石灰等を吹き
込むとＳＯｘ成分およびＮＯｘ成分はそれぞれ硫酸アン
モニウムおよび硝酸アンモニウムまたは硫酸カルシウム
および硝酸カルシウム等の固体に変化するので、後流に
電気集塵器あるいはバグフィルターを設けてこれらを捕
集することにより排ガス浄化が達成される。By reacting these radicals with harmful components in exhaust gas, CO is converted into CO 2 , SOx is converted into SO 3 , NOx is converted into NO 2 , and changes into a harmless form or a form easily collected. Further, when the gas to be treated is the exhaust gas from the refuse incinerator, dioxins and the like contained in the gas are decomposed and rendered harmless. When ammonia, lime, etc. are blown into the reactor where these reactions occur or in the downstream of the reactor, the SOx component and NOx component change to solids such as ammonium sulfate and ammonium nitrate or calcium sulfate and calcium nitrate. An exhaust gas purification is achieved by providing an electrostatic precipitator or a bag filter and collecting them.
【０００５】図６は、電極の変形例を示すもので、高電
圧パルス発生電源(6) から、ワイヤ放電電極(7) とシリ
ンダー電極(8) に高電圧パルスを連続的に印加して、両
電極(7)(8)間にプラズマ(9) を発生させるタイプのもの
である。排ガス(5) はワイヤ放電電極(7) とシリンダー
電極(8) との間に流される。FIG. 6 shows a modification of the electrode, in which a high voltage pulse is continuously applied from the high voltage pulse generating power source (6) to the wire discharge electrode (7) and the cylinder electrode (8), It is a type that generates a plasma (9) between both electrodes (7) and (8). The exhaust gas (5) is caused to flow between the wire discharge electrode (7) and the cylinder electrode (8).
【０００６】[0006]
【発明が解決しようとする課題】上記の図５に示したワ
イヤ型放電電極とプレート型対向電極とを使用するもの
では、排ガスの通過方向にプレートを長くするとともに
ワイヤを多数本設置することにより１つの電極ユニット
を形成し、この電極ユニットを通過方向と直角方向に複
数配置することによりスケールアップが可能であり、大
量の排ガス処理ができるという利点を有しているが、ワ
イヤの長さ方向に間欠的にプラズマが発生する特徴を持
つので、発生するプラズマに疎の部分ができてプラズマ
と排ガスとの接触効率が良くないと言う問題を有してい
る。In the case of using the wire type discharge electrode and the plate type counter electrode shown in FIG. 5, the plate is elongated in the passage direction of the exhaust gas and a large number of wires are installed. By forming one electrode unit and arranging multiple electrode units in the direction perpendicular to the passing direction, it is possible to scale up, and it has the advantage that a large amount of exhaust gas can be treated. Since the plasma has a characteristic of being intermittently generated, there is a problem that the generated plasma has a sparse portion and the contact efficiency between the plasma and the exhaust gas is not good.
【０００７】また、上記の図６に示したワイヤ型放電電
極とシリンダー型対向電極とを使用するものでは、プラ
ズマと排ガスとの接触効率は良いが、電界強度が小さい
ため、大量の排ガスを処理するためには、小口径のシリ
ンダーを多数本配置する方法を取らなければならず、各
電極の配線と絶縁が複雑化するのでスケールアップに適
していないという問題がある。Further, in the case of using the wire type discharge electrode and the cylinder type counter electrode shown in FIG. 6 described above, the contact efficiency between the plasma and the exhaust gas is good, but the electric field strength is small, so that a large amount of exhaust gas is treated. In order to do so, it is necessary to adopt a method of arranging a large number of small-diameter cylinders, which complicates wiring and insulation of each electrode, which is not suitable for scale-up.
【０００８】本発明の目的は、プラズマと排ガスとの接
触効率の問題と、スケールアップの問題とを同時に解決
したプラズマ法排ガス浄化装置を提供することにある。An object of the present invention is to provide a plasma method exhaust gas purifying apparatus which simultaneously solves the problem of contact efficiency between plasma and exhaust gas and the problem of scale-up.
【０００９】[0009]
【課題を解決するための手段】本発明によるプラズマ法
排ガス浄化装置は、煙道の内部に放電電極および対向電
極が設けられてなる反応器と、両電極に接続された高電
圧パルス発生電源とを備え、両電極間に高電圧パルスを
連続的に印加することにより非平衡プラズマを発生さ
せ、被処理排ガスが反応器中を通過する間に排ガス中の
有害ガス成分を捕集しやすい形態もしくは無害な形態に
転換するプラズマ法排ガス浄化装置において、放電電極
が、支持板と、支持板に設けられた複数の先端が尖った
放電針とよりなり、支持板に被処理排ガスの流入孔が設
けられ、支持板から対向電極に向かう排ガス流路が形成
されていることを特徴とするものである。A plasma-type exhaust gas purifying apparatus according to the present invention comprises a reactor provided with a discharge electrode and a counter electrode inside a flue, and a high-voltage pulse generation power source connected to both electrodes. A non-equilibrium plasma is generated by continuously applying a high voltage pulse between both electrodes, and a harmful gas component in the exhaust gas is easily collected while the exhaust gas to be treated passes through the reactor or In a plasma-type exhaust gas purifying apparatus that converts into a harmless form, a discharge electrode includes a support plate and a plurality of pointed discharge needles provided on the support plate, and the support plate is provided with an inflow hole for the exhaust gas to be treated. The exhaust gas flow path from the support plate to the counter electrode is formed.
【００１０】支持板上における放電針の存在密度は、放
電電圧、電流、排ガス中のダスト濃度、排ガスの性状等
を考慮して決められるが、通常、０．１〜１０本／平方
ｃｍ程度である。放電針の長さも放電電圧、電流等の諸
条件によって任意に設計されるものであるが、通常は
０．１ｃｍから１０ｃｍの間の値が採用される。The density of the discharge needles on the support plate is determined in consideration of the discharge voltage, the current, the dust concentration in the exhaust gas, the properties of the exhaust gas, etc., but is usually about 0.1 to 10 needles / square cm. is there. The length of the discharge needle is also designed arbitrarily according to various conditions such as discharge voltage and current, but normally a value between 0.1 cm and 10 cm is adopted.
【００１１】支持板に設ける排ガスの流入孔の大きさお
よび数は、流入孔の面積の和が排ガス導入パイプの断面
積以上となるように決められる。流入孔の形状は、丸孔
であっても長孔であってもよい。The size and number of the exhaust gas inflow holes provided in the support plate are determined so that the sum of the areas of the inflow holes is equal to or larger than the cross-sectional area of the exhaust gas introduction pipe. The shape of the inflow hole may be a round hole or a long hole.
【００１２】放電電極および対向電極が交互に複数対設
けられ、各対向電極に処理済み排ガスの流出孔が設けら
れていることが好ましい。排ガス流出孔の大きさおよび
数は、放電電極の支持板に設ける排ガス流入孔の大きさ
および数と同様にして決められる。It is preferable that a plurality of pairs of discharge electrodes and counter electrodes are provided alternately, and each counter electrode is provided with an outflow hole for the treated exhaust gas. The size and the number of the exhaust gas outflow holes are determined in the same manner as the size and the number of the exhaust gas inflow holes provided in the support plate of the discharge electrode.
【００１３】放電電極および対向電極が交互に複数対設
けられ、各対向電極が網目状の電極よりなるようにして
もよい。A plurality of pairs of discharge electrodes and counter electrodes may be provided alternately, and each counter electrode may be a mesh electrode.
【００１４】[0014]
【作用】本発明によるプラズマ法排ガス浄化装置は、放
電電極が、支持板と、支持板に設けられた複数の先端が
尖った放電針とよりなるものであるから、プラズマに疎
の部分ができないように放電針の密度を調整し、スケー
ルアップするさいは、支持板の面積を大きくする。ま
た、支持板に排ガスの流入孔が設けられ、支持板から対
向電極に向かう排ガス流路が形成されているから、発生
するプラズマの進展方向が排ガスの流れと平行となり、
しかも、発生するプラズマの進展速度は排ガスの流れよ
りも速いから、排ガスは多段的にプラズマと接触する。In the plasma-type exhaust gas purifying apparatus according to the present invention, since the discharge electrode is composed of the support plate and the plurality of discharge needles provided with the support plate and having a sharp tip, no sparse portion can be formed in the plasma. As described above, when the density of the discharge needles is adjusted and the scale is increased, the area of the support plate is increased. Further, since the exhaust gas inflow hole is provided in the support plate and the exhaust gas flow path from the support plate to the counter electrode is formed, the progressing direction of the generated plasma is parallel to the flow of the exhaust gas,
Moreover, since the progressing speed of the generated plasma is faster than the flow of the exhaust gas, the exhaust gas comes into contact with the plasma in multiple stages.
【００１５】[0015]
【実施例】本発明の実施例を、以下図面を参照して説明
する。Embodiments of the present invention will be described below with reference to the drawings.
【００１６】図１は、本発明によるプラズマ法排ガス浄
化装置の第１実施例を示し、図２はそのプラズマ発生用
電極の概念を示す。FIG. 1 shows a first embodiment of a plasma method exhaust gas purifying apparatus according to the present invention, and FIG. 2 shows the concept of the plasma generating electrode.
【００１７】第１実施例のプラズマ法排ガス浄化装置
は、煙道(11)の内部に放電電極(13)および対向電極(14)
が設けられてなる反応器(10)と、両電極(13)(14)に接続
された高電圧パルス電源(12)とを備えている。The plasma-type exhaust gas purifying apparatus of the first embodiment has a discharge electrode (13) and a counter electrode (14) inside a flue (11).
And a high voltage pulse power source (12) connected to both electrodes (13) and (14).
【００１８】反応器(10)の左側壁の上端部に被処理排ガ
ス(18)の導入パイプ(19)が、同下端部に処理済み排ガス
(33)の排出パイプ(20)が設けられている。放電電極(13)
は反応器(10)の上部に水平に配置され、放電電極(13)の
上方が排ガス導入空間となされている。対向電極(14)は
反応器(10)の底壁を形成しており、放電電極(13)と反応
器(10)とは、絶縁用セラミック(32)によって電気的に絶
縁されている。An inlet pipe (19) for introducing the treated exhaust gas (18) is provided at the upper end portion of the left side wall of the reactor (10), and the treated exhaust gas is provided at the lower end portion thereof.
A discharge pipe (20) for (33) is provided. Discharge electrode (13)
Is horizontally arranged above the reactor (10), and the upper part of the discharge electrode (13) serves as an exhaust gas introduction space. The counter electrode (14) forms the bottom wall of the reactor (10), and the discharge electrode (13) and the reactor (10) are electrically insulated by the insulating ceramic (32).
【００１９】対向電極(14)はプレート型であり、放電電
極(13)は、対向電極(14)と同じ面積の支持板(15)と、支
持板(15)下面に設けられた下向きの多数の放電針(16)と
よりなる。放電電極(13)の支持板(15)には、多数の排ガ
ス流入孔(31)が設けられており、これにより、支持板(1
5)から対向電極(14)に向かう排ガス流路(30)が形成され
ている。The counter electrode (14) is a plate type, and the discharge electrode (13) has a support plate (15) having the same area as the counter electrode (14) and a large number of downward facing electrodes provided on the lower surface of the support plate (15). It consists of a discharge needle (16). The support plate (15) of the discharge electrode (13) is provided with a large number of exhaust gas inflow holes (31), whereby the support plate (1)
An exhaust gas channel (30) extending from 5) to the counter electrode (14) is formed.
【００２０】放電電極(13)は、良好な導電性材料からな
り、放電針(16)の先端部は０．１ｃｍ〜１ｃｍの直径を
有している。放電針(16)の基端部の直径は任意である
が、その先端部は尖っているほうが好ましい。放電針(1
6)の先端部を尖った形状とすることにより、電界強度を
大きくすることができる。支持板(15)上における放電針
(16)の存在密度は、放電電圧、電流、被処理排ガス(18)
中のダスト濃度、被処理排ガス(18)の性状等を考慮して
決められるが、通常、０．１〜１０本／平方ｃｍ程度で
ある。放電針(16)の長さも放電電圧、電流等の諸条件に
よって任意に設計されるものであるが、通常は０．１ｃ
ｍから１０ｃｍの間の値が採用される。The discharge electrode (13) is made of a good conductive material, and the tip of the discharge needle (16) has a diameter of 0.1 cm to 1 cm. The diameter of the base end portion of the discharge needle (16) is arbitrary, but it is preferable that the tip end portion thereof be pointed. Discharge needle (1
The electric field strength can be increased by making the tip of 6) sharp. Discharge needle on the support plate (15)
Existence density of (16) is discharge voltage, current, exhaust gas to be treated (18)
It is determined in consideration of the dust concentration therein, the properties of the exhaust gas to be treated (18), etc., but it is usually about 0.1 to 10 particles / square cm. The length of the discharge needle (16) is also arbitrarily designed according to various conditions such as discharge voltage and current, but normally it is 0.1c.
Values between m and 10 cm are adopted.
【００２１】支持板(15)に設ける排ガス流入孔(31)の大
きさおよび数は、流入孔(31)の面積の和が排ガス流入パ
イプ(19)の断面積以上となるように決められる。このよ
うにすることにより、排ガス(18)が排ガス流入孔(31)を
通過するさいに抵抗損失が発生することが防止される。
流入孔(31)の形状は、丸孔であっても長孔であってもよ
い。The size and number of the exhaust gas inflow holes (31) provided in the support plate (15) are determined so that the sum of the areas of the inflow holes (31) is equal to or larger than the cross-sectional area of the exhaust gas inflow pipe (19). By doing so, resistance loss is prevented from occurring when the exhaust gas (18) passes through the exhaust gas inflow hole (31).
The shape of the inflow hole (31) may be a round hole or a long hole.
【００２２】ＮＯｘとＳＯｘを含む被処理排ガス(18)
は、流入パイプ(19)から反応器(10)中に入り、支持板(1
5)の排ガス流入孔(31)を通り、両電極(13)(14)間の排ガ
ス流路(30)を放電針(16)と平行に下向きに流れ、無害化
処理される。処理済みの排ガス(33)は流出パイプ(20)よ
り反応器(10)外に排出される。Exhaust gas to be treated containing NOx and SOx (18)
Enters the reactor (10) through the inflow pipe (19) and the support plate (1
It passes through the exhaust gas inflow hole (31) of 5) and flows downward in the exhaust gas flow path (30) between the electrodes (13) and (14) in parallel with the discharge needle (16) to be detoxified. The treated exhaust gas (33) is discharged from the reactor (10) through the outflow pipe (20).
【００２３】放電電極(13)と対向電極(14)との間には、
高電圧パルスが印加されることにより非平衡プラズマ
（パルスストリーマコロナ）(21)が発生している。被処
理排ガス(18)は反応器(10)中の排ガス流路(30)を通過す
る間にプラズマ(21)と接触し、これにより排ガス中に各
種ラジカルが発生する。このラジカルによって排ガス中
のＮＯｘとＳＯｘは酸化されて、ＮＯ2 とＳＯ3 に変化
する。このように変化した有害ガス成分を含む処理済み
排ガス(33)は流出パイプ(20)を通って後流に設けた捕集
部（図示略）に移動する。発生するプラズマ(21)の進展
方向は、排ガス流路(30)の方向と平行であるから、たえ
ず排ガス(18)とプラズマ(21)とが接触し、処理効率が向
上する。さらに、発生するプラズマ(21)の進展速度は、
排ガス流路(30)における排ガスの流れよりも速いから、
処理される排ガスは多段的にプラズマ(21)と接触して解
離が起こり、より一層処理効率が向上する。Between the discharge electrode (13) and the counter electrode (14),
Non-equilibrium plasma (pulse streamer corona) (21) is generated by the application of high voltage pulse. The treated exhaust gas (18) comes into contact with the plasma (21) while passing through the exhaust gas passage (30) in the reactor (10), whereby various radicals are generated in the exhaust gas. The radicals oxidize NOx and SOx in the exhaust gas to change them into NO 2 and SO 3 . The treated exhaust gas (33) containing the changed harmful gas component moves through the outflow pipe (20) to a trap (not shown) provided in the downstream. Since the progressing direction of the generated plasma (21) is parallel to the direction of the exhaust gas flow channel (30), the exhaust gas (18) and the plasma (21) are constantly in contact with each other, and the treatment efficiency is improved. Furthermore, the rate of progress of the generated plasma (21) is
Because it is faster than the flow of exhaust gas in the exhaust gas flow path (30),
The treated exhaust gas is brought into contact with the plasma (21) in multiple stages to cause dissociation, and the treatment efficiency is further improved.
【００２４】図１には図示していないが、ＮＯ2 および
ＳＯ3 などのガスはアルカリ性の物質例えばアンモニア
あるいは消石灰と極めて良く反応するのでダクトを出た
後、捕集部において例えば次のような方法によってガス
中から除去される。Although not shown in FIG. 1, since gases such as NO 2 and SO 3 react extremely well with alkaline substances such as ammonia or slaked lime, after leaving the duct, for example, It is removed from the gas by the method.
【００２５】ガス中にアンモニアを吹き込むことによ
って、硝酸アンモニウムと硫酸アンモニウムを生成さ
せ、さらに後流に設けた電気集塵機もしくはバグフィル
ターで捕集する。By blowing ammonia into the gas, ammonium nitrate and ammonium sulfate are produced and further collected by an electrostatic precipitator or a bag filter provided downstream.
【００２６】ガス中に消石灰を吹き込むことによっ
て、硝酸カルシウムと硫酸カルシウムを生成させ、さら
に後流に設けた電気集塵機もしくはバグフィルターで捕
集する。By blowing slaked lime into the gas, calcium nitrate and calcium sulfate are produced and further collected by an electrostatic precipitator or a bag filter provided downstream.
【００２７】湿式洗煙塔に導き、石灰スラリーあるい
は水酸化ナトリウム水溶液で洗浄してガス中から除く。It is led to a wet smoke washing tower, washed with a lime slurry or an aqueous solution of sodium hydroxide and removed from the gas.
【００２８】なお、上記において、排ガス中のＮＯｘを
ＮＯ2 とする例について説明したが、条件によりＮＯｘ
はＮ2 となる場合がある。排ガス中にアンモニア、炭化
水素などの還元剤を共存させると、Ｎ2 への転換が著し
くなる。この場合、上記実施例とは逆に還元剤を先に吹
き込んだ後、反応器を通過させることになるが、この場
合でも本発明による効果は変わらない。In the above description, the example in which the NOx in the exhaust gas is changed to NO 2 has been explained.
May be N 2 . When a reducing agent such as ammonia or hydrocarbon coexists in the exhaust gas, conversion to N 2 becomes remarkable. In this case, contrary to the above-mentioned example, the reducing agent is blown in first and then passed through the reactor, but even in this case, the effect of the present invention does not change.
【００２９】図３は本発明によるプラズマ法排ガス浄化
装置の第２実施例を示している。第２実施例のプラズマ
法排ガス浄化装置では、反応器(10)内に、放電電極(13)
および対向電極(14)が交互に複数対設けられている。放
電針(16)は放電電極(13)の支持板(15)の両面に設けら
れ、両端の電極はいずれも対向電極(14)となされてい
る。放電電極(13)の支持板(15)には、第１実施例と同じ
く、多数の排ガス流入孔(31)が設けられており、対向電
極(14)には、多数の処理済み排ガス流出孔(32)が設けら
れている。FIG. 3 shows a second embodiment of the plasma-type exhaust gas purifying apparatus according to the present invention. In the plasma type exhaust gas purifying apparatus of the second embodiment, the discharge electrode (13) is provided in the reactor (10).
And a plurality of pairs of counter electrodes (14) are provided alternately. The discharge needles (16) are provided on both sides of the support plate (15) of the discharge electrode (13), and the electrodes at both ends are counter electrodes (14). The discharge electrode (13) support plate (15) is provided with a large number of exhaust gas inflow holes (31) as in the first embodiment, and the counter electrode (14) is provided with a large number of treated exhaust gas outflow holes. (32) is provided.
【００３０】放電電極(13)と反応器(10)外壁とはセラミ
ック製の絶縁体によって電気的に絶縁されている。高圧
パルス電源(12)と各電極(13)(14)とをつなぐ導線(17)も
同様に反応器(10)外壁と絶縁されている。The discharge electrode (13) and the outer wall of the reactor (10) are electrically insulated by a ceramic insulator. The lead wire (17) connecting the high-voltage pulse power supply (12) and each electrode (13) (14) is also insulated from the outer wall of the reactor (10).
【００３１】対向電極(14)に設ける流出孔(32)の大きさ
および数は、放電電極(13)の支持板(15)に設ける流入孔
(31)の大きさおよび数と同様にして決められる。The size and number of the outflow holes (32) provided in the counter electrode (14) are the same as the inflow holes provided in the support plate (15) of the discharge electrode (13).
It is determined in the same manner as the size and number of (31).
【００３２】第２実施例の装置では、導入パイプ(19)か
ら反応器(10)中に導入された被処理排ガス(18)は、各放
電電極(13)の支持板(15)の排ガス流入孔(31)および各対
向電極(14)の排ガス流出孔(32)を順次通って両電極(13)
(14)間を放電針(16)と平行に流され、すべての電極(13)
(14)間を通る間に無害化処理される。処理済みの排ガス
(33)は排出パイプ(20)より反応器(10)外に排出される。In the apparatus of the second embodiment, the treated exhaust gas (18) introduced into the reactor (10) from the introduction pipe (19) is introduced into the exhaust gas of the support plate (15) of each discharge electrode (13). Both electrodes (13) through the hole (31) and the exhaust gas outflow hole (32) of each counter electrode (14) sequentially
Flowed parallel to the discharge needle (16) between (14) and all electrodes (13)
(14) It is detoxified while passing through. Treated exhaust gas
(33) is discharged from the reactor (10) through the discharge pipe (20).
【００３３】したがって、導入から排出までの間に、被
処理排ガス(18)がプラズマ(21)と接触する時間が非常に
長くなり、排ガスは極めてきれいに無害化処理される。Therefore, the time during which the treated exhaust gas (18) is in contact with the plasma (21) during the period from the introduction to the exhaustion becomes very long, and the exhaust gas is treated extremely cleanly and harmlessly.
【００３４】図４は本発明によるプラズマ法排ガス浄化
装置の第３実施例のプラズマ発生用電極の概念を示して
いる。FIG. 4 shows the concept of the plasma generating electrode of the third embodiment of the plasma method exhaust gas purifying apparatus according to the present invention.
【００３５】第３実施例のプラズマ法排ガス浄化装置の
プラズマ発生用電極は、第１実施例と同じ放電電極(13)
と、網目状の対向電極(34)とよりなる。そして、放電電
極(13)の支持板(15)から対向電極(34)に向かう排ガス流
路(30)が形成されている。これらの電極(13)(33)は、図
３に示した第２実施例のプラズマ法排ガス浄化装置と同
じく、交互に複数対設けられる。The plasma generation electrode of the plasma type exhaust gas purifying apparatus of the third embodiment has the same discharge electrode (13) as that of the first embodiment.
And a counter electrode (34) having a mesh shape. Further, an exhaust gas flow channel (30) extending from the support plate (15) of the discharge electrode (13) to the counter electrode (34) is formed. A plurality of pairs of these electrodes (13) and (33) are alternately provided, like the plasma-type exhaust gas purifying apparatus of the second embodiment shown in FIG.
【００３６】第３実施例の装置では、被処理排ガス(18)
は、各放電電極(13)の支持板(15)の排ガス流入孔(31)お
よび各対向電極(33)の網目の間を順次通って両電極(13)
(33)間を放電針(16)と平行に流され、すべての電極(13)
(33)間を通った後、排出される。したがって、導入から
排出までの間に、排ガス(18)がプラズマ(21)と接触する
時間が非常に長くなり、排ガスは極めてきれいに無害化
処理される。In the apparatus of the third embodiment, the treated exhaust gas (18)
Are both electrodes (13) sequentially passing through the exhaust gas inflow hole (31) of the support plate (15) of each discharge electrode (13) and the mesh of each counter electrode (33).
Flowed parallel to the discharge needle (16) between (33) and all electrodes (13)
(33) After passing through the space, it is discharged. Therefore, the time during which the exhaust gas (18) is in contact with the plasma (21) becomes extremely long between the time of introduction and the time of exhaustion, and the exhaust gas is extremely cleanly treated to be harmless.
【００３７】[0037]
【発明の効果】本発明のプラズマ法排ガス浄化装置によ
ると、プラズマに疎の部分ができないように放電針の密
度が調整できるので、プラズマと排ガスとの接触効率が
良い。しかも、発生するプラズマの進展方向が排ガスの
流れと平行でかつ排ガスは多段的にプラズマと接触する
ので、排ガスとプラズマとの接触時間が十分得られ、処
理効率が向上する。また、スケールアップするさいは、
支持板の面積を大きくすればよいので、容易にスケール
アップができる。According to the plasma-type exhaust gas purifying apparatus of the present invention, since the density of the discharge needles can be adjusted so as to prevent sparse areas in the plasma, the contact efficiency between the plasma and the exhaust gas is good. Moreover, since the progress direction of the generated plasma is parallel to the flow of the exhaust gas and the exhaust gas comes into contact with the plasma in multiple stages, a sufficient contact time between the exhaust gas and the plasma is obtained, and the treatment efficiency is improved. Also, when scaling up,
Since it suffices to increase the area of the support plate, it is possible to easily scale up.
【図１】本発明によるプラズマ法排ガス浄化装置を概略
的に示す垂直断面図である。FIG. 1 is a vertical sectional view schematically showing a plasma method exhaust gas purifying apparatus according to the present invention.
【図２】同装置におけるプラズマ発生用の電極の概念を
示す斜視図である。FIG. 2 is a perspective view showing the concept of an electrode for plasma generation in the same apparatus.
【図３】本発明によるプラズマ法排ガス浄化装置の他の
実施例を概略的に示す一部を切欠いた斜視図である。FIG. 3 is a partially cutaway perspective view schematically showing another embodiment of the plasma-type exhaust gas purifying apparatus according to the present invention.
【図４】プラズマ発生用の電極の他の実施例の概念を示
す斜視図である。FIG. 4 is a perspective view showing the concept of another embodiment of the electrode for plasma generation.
【図５】従来のプラズマ法排ガス浄化装置におけるプラ
ズマ発生用の電極の概念を示す斜視図である。FIG. 5 is a perspective view showing the concept of electrodes for plasma generation in a conventional plasma-type exhaust gas purifying apparatus.
【図６】従来のプラズマ法排ガス浄化装置におけるプラ
ズマ発生用の電極の概念を示す斜視図である。FIG. 6 is a perspective view showing the concept of electrodes for plasma generation in a conventional plasma-type exhaust gas purifying apparatus.
(10) 反応器 (11) 煙道 (12) 高圧パルス電源 (13) 放電電極 (14)(34) 対向電極 (15) 支持板 (16) 放電針 (18) 排ガス (21) プラズマ (30) 排ガス流路 (31) 排ガス流入孔 (32) 排ガス流出孔 (10) Reactor (11) Flue (12) High-voltage pulse power supply (13) Discharge electrode (14) (34) Counter electrode (15) Support plate (16) Discharge needle (18) Exhaust gas (21) Plasma (30) Exhaust gas flow path (31) Exhaust gas inflow hole (32) Exhaust gas outflow hole
フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｂ０１Ｄ 53/74 Continuation of the front page (51) Int.Cl. 6 Identification number Office reference number FI technical display location B01D 53/74
Claims (3)
設けられてなる反応器と、両電極に接続された高電圧パ
ルス発生電源とを備え、両電極間に高電圧パルスを連続
的に印加することにより非平衡プラズマを発生させ、被
処理排ガスが反応器中を通過する間に排ガス中の有害ガ
ス成分を捕集しやすい形態もしくは無害な形態に転換す
るプラズマ法排ガス浄化装置において、放電電極が、支
持板と、支持板に設けられた複数の先端が尖った放電針
とよりなり、支持板に被処理排ガスの流入孔が設けら
れ、支持板から対向電極に向かう排ガス流路が形成され
ていることを特徴とするプラズマ法排ガス浄化装置。1. A reactor provided with a discharge electrode and a counter electrode inside a flue, and a high-voltage pulse generating power source connected to both electrodes, and a high-voltage pulse is continuously applied between both electrodes. A non-equilibrium plasma is generated by applying an electric discharge in a plasma method exhaust gas purifying device that converts the harmful gas component in the exhaust gas into a form that is easy to collect or a harmless form while the exhaust gas to be treated passes through the reactor. The electrode is composed of a support plate and a plurality of pointed discharge needles provided on the support plate, the support plate is provided with an inflow hole for the exhaust gas to be treated, and an exhaust gas flow path from the support plate to the counter electrode is formed. The exhaust gas purifying apparatus using the plasma method, which is characterized in that
設けられ、各対向電極に処理済み排ガスの流出孔が設け
られている請求項１記載のプラズマ法排ガス浄化装置。2. The plasma method exhaust gas purifying apparatus according to claim 1, wherein a plurality of pairs of discharge electrodes and counter electrodes are alternately provided, and each counter electrode is provided with an outflow hole for the treated exhaust gas.
設けられ、各対向電極が網目状の電極よりなる請求項１
記載のプラズマ法排ガス浄化装置。3. A plurality of pairs of discharge electrodes and counter electrodes are alternately provided, each counter electrode being a mesh electrode.
The plasma method exhaust gas purification apparatus described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30647794A JP3227635B2 (en) | 1994-12-09 | 1994-12-09 | Exhaust gas purification system by plasma method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30647794A JP3227635B2 (en) | 1994-12-09 | 1994-12-09 | Exhaust gas purification system by plasma method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08155249A true JPH08155249A (en) | 1996-06-18 |
| JP3227635B2 JP3227635B2 (en) | 2001-11-12 |
Family
ID=17957491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30647794A Expired - Fee Related JP3227635B2 (en) | 1994-12-09 | 1994-12-09 | Exhaust gas purification system by plasma method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3227635B2 (en) |
Cited By (18)
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|---|---|---|---|---|
| FR2762524A1 (en) * | 1997-04-25 | 1998-10-30 | Electricite De France | Treating waste gas containing volatile pollutants |
| JP2001293070A (en) * | 2000-04-12 | 2001-10-23 | Natl Inst Of Advanced Industrial Science & Technology Meti | Deodorizing and sterilizing device |
| JP2002336689A (en) * | 2001-05-21 | 2002-11-26 | Daikin Ind Ltd | Plasma reactor and air cleaner |
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| WO2006003846A1 (en) * | 2004-07-02 | 2006-01-12 | Daikin Industries, Ltd. | Air cleaner |
| US7042159B2 (en) | 2004-02-10 | 2006-05-09 | Daikin Industries, Ltd. | Plasma reactor and purification equipment |
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| FR2762524A1 (en) * | 1997-04-25 | 1998-10-30 | Electricite De France | Treating waste gas containing volatile pollutants |
| JP2001293070A (en) * | 2000-04-12 | 2001-10-23 | Natl Inst Of Advanced Industrial Science & Technology Meti | Deodorizing and sterilizing device |
| JP2002336689A (en) * | 2001-05-21 | 2002-11-26 | Daikin Ind Ltd | Plasma reactor and air cleaner |
| KR100809075B1 (en) * | 2002-01-12 | 2008-03-03 | 김태곤 | Apparatus for cleaning automobile exhaust gas to readily attach and remove |
| JP2003230830A (en) * | 2002-02-07 | 2003-08-19 | Daikin Ind Ltd | Insulating structure of plasma reactor |
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| US7042159B2 (en) | 2004-02-10 | 2006-05-09 | Daikin Industries, Ltd. | Plasma reactor and purification equipment |
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| AU2005256106B8 (en) * | 2004-07-02 | 2008-09-18 | Daikin Industries, Ltd. | Air purifier |
| AU2005256106B2 (en) * | 2004-07-02 | 2007-06-14 | Daikin Industries, Ltd. | Air purifier |
| WO2006003846A1 (en) * | 2004-07-02 | 2006-01-12 | Daikin Industries, Ltd. | Air cleaner |
| KR100921325B1 (en) * | 2008-03-13 | 2009-10-13 | 권상민 | decomposition device car exhaust gas |
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| CN103127810A (en) * | 2013-02-26 | 2013-06-05 | 中维环保科技有限公司 | Inhomogeneous field strength plasma waste gas processing apparatus and processing system thereof |
| CN105056717A (en) * | 2015-07-17 | 2015-11-18 | 佛山市城市森林净化科技有限公司 | Decomposing device for gaseous pollutants |
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