JPH0814994A - Method and instrument for measuring magnetic physical quantity of sample using ac electromagnetic induction system, method and instrument for measuring weight, and ac electromagnetic induction sensor - Google Patents

Abstract

PURPOSE:To very quickly measure the magnetic physical quantity of a sample to be measured in a non-contacting state with higher accuracy than that of the conventional example. CONSTITUTION:By providing an AC electromagnetic induction sensor 1 composed of an external AC magnetic field impressing coil 5 and measuring coil 6 and moving a sample 7 to be measured along the direction of the magnetic field generated by the coil 5, the phase of an alternating current is changed so as to change the magnetic field and to induce an electromotive force in the measurement coil 6. Then, after a composite signal which is the sum of a signal induced by the external AC magnetic field and the signal of the magnetic physical quantity of the sample is measured as a signal to be measured, the measured signal of the net magnetic physical quantity of the sample is detected by removing the signal induced by the external magnetic field and the detected signal is digitized into a numerical signal as a basic measured signal. Finally, the magnetic physical quantity of the sample is calculated by multiplying the numerical signal by a magnetic physical quantity conversion factor.

Description

Detailed Description of the Invention

[0001]

INDUSTRIAL APPLICABILITY The present invention is based on measuring the electromotive force generated by the law of electromagnetic induction for the magnetic physical quantity of a sample to be measured such as raw materials, parts and products manufactured from magnetic metals and other magnetic materials. The present invention relates to a method for measuring a magnetic physical quantity of a sample to be measured by an alternating-current electromagnetic induction method that automatically and non-contactly measures quickly, a measuring apparatus therefor, a weight measuring method and a weight measuring apparatus therefor. Such measuring methods and measuring devices include weight measurement, mass measurement and selection that can be calculated from magnetic physical quantities, differences in shape and size due to changes in magnetic physical quantities, differences in composition of magnetic metals, differences in heat treatment, and ingots. It can be used to discriminate between different structures, differences in hardness, scratches, etc.

[0002]

2. Description of the Related Art Conventionally, a sample to be measured made of a magnetic metal or other magnetic material has a characteristic that an electromotive force is induced by the law of electromagnetic induction with a change in magnetic flux. By measuring automatically and speedily by measuring the difference in composition or size of the sample to be measured, the method of finding flaws, etc., or the composition judging device, electromagnetic induction flaw detector, defect detector, etc. Is being researched and developed by.

However, it is difficult to control the influence of the external magnetic field and the measurement sensitivity, and the measured electromotive force signal is generally a composite signal of the signal induced by the external magnetic field and the signal of the magnetic physical quantity related to the sample to be measured. It is technically difficult to separate and measure only the net magnetic physical quantity of the sample to be measured, and it has not been used.

Various methods have been developed for a long time for measuring the weight and mass of a sample to be measured. However, the conventional measuring method is a method of utilizing the weight based on the acceleration of gravity, that is, gravity, and measuring the balance with gravity acting on a known mass directly or through a lever. Recently, an electronic scale / load cell has been developed as a device having high measurement accuracy, and the measurement accuracy can be measured up to 0.001 g. However, in general, it takes time to make a balance and it is difficult to measure the weight quickly. For example, in the case of electronic scales, it takes about 7 seconds / piece to stabilize the measured values, and it is vulnerable to the vibration of the working environment, and there are many technical problems such as the transportation means to the measuring instrument is difficult due to its shape. At present, it has been difficult to automate and save labor in the assembly line work of the manufacturing industry. For this reason, in the weight inspection of factories, in many cases, a manual sampling inspection method is employed for each predetermined rod.

[0005]

Therefore, the present inventors decided to research and develop a non-contact type weight measuring method and apparatus suitable for automation, labor saving and speeding up. As a result of earnest research, we focused on the technical knowledge that "the voltage of the electromagnetic induction coil changes in proportion to the volume (weight) of the test material." We have developed a weight measuring device and a cylindrical electromagnetic induction sensor (Japanese Patent Application No. 5-176279). This developed technology is epoch-making as a technology that can be automated and labor-saving to be incorporated into the manufacturing industry's flow work as a non-contact, quick weight measurement technology. The basic method of this measurement method is to change the magnetic field by passing a magnetic material to be measured in the magnetic field along the direction of the magnetic field, thereby generating an electromotive force in the electromagnetic induction coil, and the induced electromotive force. A weight measuring method is characterized in that an output voltage of electric power is measured, and a numerical value of the digitized output voltage is multiplied by a weight conversion coefficient to calculate a weight.

The inventor of the present invention has sufficient practicality with the non-contact weight measurement technology based on the electromagnetic induction method originally developed, but it is more realistic to aim at a more accurate measurement value and a more stable measurement value. As a result of diligent research and development of a method for measuring a magnetic physical quantity of a new sample to be measured, the method of measuring the magnetic physical quantity of the sample to be measured by an alternating current electromagnetic induction method and the technical development of its measuring device were succeeded.

That is, the initially developed non-contact type weight measurement technique using the electromagnetic induction method does not have a sufficient function of canceling the external magnetic field in the measurement, and it has been difficult to perform stable high precision measurement. Therefore, the inventors have developed a measurement technique for removing an external magnetic field generated by an alternating current from a measurement signal.

Since this method is a method of inducing an electromotive force by a magnetic flux change caused by a phase change of an alternating current, uniformity of the magnetic flux change is ensured and high-speed measurement is possible. However, the change of the magnetic flux of the alternating current not only changes the magnetic field based on the sample but also the change of the external magnetic field. It is said that some measurements are difficult.

Further, in the case of an alternating current, the measurement signal of the external magnetic field cannot be canceled even if two measuring coils are connected in series as in the case of a direct current external magnetic field. There is only a bridge method that prepares a pair of coils, a coil that measures the measured magnetic field and a coil that measures only the external magnetic field, subtracts the external magnetic field measured value from the composite magnetic field measured value, and calculates the sample magnetic field measured value. It had been. However, with this bridge method, it is difficult to always adjust the basic conditions and environmental conditions of the pair of coils uniformly. In other words, various types of strains and errors are likely to occur, such as drifting due to temperature differences and causing errors, differences due to the difference in the number of turns of coils, errors in symmetry, and errors in measurement values. , Accuracy and stability are limited.

Further, in the case of measuring an AC magnetic field, since it is a system in which a composite signal of a signal induced by an external magnetic field and a signal of a magnetic physical quantity related to a magnetic material to be measured is always proportionally converted as a basic measurement output signal, When the magnetic field changes, accurate conversion of the magnetic physical quantity cannot be performed unless the conversion coefficient is adjusted, and there is a problem in that the measured numerical value lacks reality.

The present inventor intends to solve the above technical problems and obtain a more accurate measurement value and a more stable measurement value than the initially developed non-contact type weight measurement technology by the electromagnetic induction method. As a result of diligent research and development, we succeeded in technological development of a method for measuring the net magnetic physical quantity of a measured sample with good reality by the AC electromagnetic induction method.
This is a concrete development of a magnetic physical quantity measuring device utilizing this developed technique, a weight measuring method and a weight measuring device to which the magnetic physical amount is applied.

The basic principle of them is that "the rate of change of magnetic flux and the permeability due to the phase change of alternating current are proportional to the mass of the test material".
Focusing on the technical knowledge that the magnetic permeability is measured, the idea is that the magnetic physical quantity can be understood, and an AC external magnetic field is generated in the state where the sample to be measured is present in a predetermined measurement area, and the phase change of the AC An electromotive force is induced by the accompanying change in magnetic flux. After measuring the composite signal of the signal induced by the external magnetic field and the signal of the magnetic physical quantity related to the sample to be measured, the signal induced by the external magnetic field is removed to obtain the net magnetic physical quantity measurement signal related to the sample to be measured. Is detected and the magnetic physical quantity of the sample to be measured is calculated based on this.

That is, the first object common to the present invention is to extract a net measurement signal of the magnetic physical quantity of the sample to be measured from the composite signal in the method of measuring the magnetic physical quantity of the sample to be measured, so that it is easy to cause a flaw and is accurate. Even in the case of measuring the rate of change of the magnetic flux of alternating current, which is considered difficult to measure, it is possible to obtain a more accurate and more stable measurement value, and to measure the magnetic physical quantity with better reality than before. To do.

A second object common to the present invention is to make it possible to measure the magnetic physical quantity of a sample to be measured by a non-contact method with higher accuracy than ever before and very quickly.

The AC type electromagnetic induction sensor used in the present invention is a newly developed unique AC type electromagnetic induction sensor, and has a magnetic physical quantity signal relating to the sample to be measured and a signal induced by an AC external magnetic field. It is designed to be able to simultaneously obtain a measured signal that is a composite signal of and a measurement signal that can cancel the signal induced by an AC external magnetic field, and provide a more accurate and stable base measurement value than the conventional one. It enables quick measurement.

A second aspect of the present invention uses an AC electromagnetic induction sensor having two coils capable of simultaneously obtaining a signal under measurement and a canceling measurement signal, and is induced by an AC external magnetic field from the obtained signal under measurement. It is intended to embody a measurement method of a system in which signals are simply canceled to detect a measurement signal of a net magnetic physical quantity, and the magnetic physical quantity of a sample to be measured is calculated on the basis of the detected signal.

A third invention uses an AC electromagnetic induction sensor having one coil for measuring a signal under measurement and two coils for measuring a canceling measurement signal, and an AC external magnetic field is obtained from the obtained measurement signal. A new method is used to cancel the signal induced by the method with less error, detect the net magnetic physical quantity measurement signal, and based on this, a highly realistic measurement method that calculates the magnetic physical quantity of the sample to be measured. It is to be embodied.

According to a fourth aspect of the present invention, an AC electromagnetic induction sensor is improved so as to include two coils for measuring a signal under measurement and two coils for measuring a canceling measurement signal, and particularly, the signals under measurement are synthesized. For stability and high accuracy,
After that, the same method as the third invention is used to cancel out, a more stable and highly accurate net magnetic physical quantity measurement signal is detected, and the method of calculating the magnetic physical quantity of the sample to be measured on the basis of this is more realistic. It is intended to embody the measurement method.

The fifth invention to the seventh invention are measuring devices of the magnetic physical quantity of the sample to be measured, and the measuring devices are adapted to the implementation of the second invention to the fourth invention, respectively. 8th
The invention, the ninth invention, and the tenth invention are inventions of a non-contact type weight measuring method by an electromagnetic induction method, and the technical knowledge that "the magnetic physical quantity changes in proportion to the weight of the test material". Focusing attention, we developed a new weight measurement method that measures the net magnetic physical quantity of the measured sample as a highly accurate and stable numerical value, specifies the weight calculation coefficient, and calculates the weight of the measured sample. It is intended to be provided. That is, this is an application of the first invention, the third invention, and the fourth invention, respectively, and a highly realistic weight measurement method of calculating the weight of the sample to be measured based on a highly accurate net magnetic physical quantity measurement signal. Is provided. Compared with the conventional weighing method, it is a non-contact type and provides an epoch-making thing in terms of speediness, high accuracy and stability.

The eleventh invention and the twelfth invention of the present invention are weight measuring devices embodied so that the non-contact type weight measuring method by the electromagnetic induction method of the ninth invention and the tenth invention can be carried out. The measuring device of the sixth and seventh inventions is also applied to a weight measuring device. Since most conventional weight measuring devices use gravity, the realization of a non-contact electromagnetic induction type weight measuring device is extremely innovative and highly unique.

13th, 14th and 1st aspects of the present invention
The fifth invention is an AC electromagnetic induction sensor for measuring a magnetic physical quantity of a sample to be measured. This sensor is capable of stably and quickly measuring a highly accurate measurement value of a net magnetic physical quantity of a sample to be measured as a base.

[0022]

The present invention is configured as follows as a means for achieving the above object.

The first invention to obtain a patent is to prepare an AC electromagnetic induction sensor 1 composed of an AC external magnetic field applying coil 5 and a measuring coil 6, and to generate a magnetic field generated by the AC external magnetic field applying coil 5. By passing the sample 7 to be measured along the direction, the magnetic field associated with the phase change of the alternating current is changed, thereby inducing an electromotive force in the measuring coil 6,
After measuring the composite signal, which is the sum of the signal induced by the AC external magnetic field and the signal of the magnetic physical quantity related to the sample to be measured, as the measured signal, remove the signal induced by the external magnetic field and It detects the measurement signal of the net magnetic physical quantity, digitizes it as the measurement signal which becomes the basis, converts it into a numerical signal, and calculates the magnetic physical quantity by multiplying the numerical signal by the magnetic physical quantity conversion coefficient. A method of measuring a magnetic physical quantity of a sample to be measured by an alternating-current electromagnetic induction method, which is characterized in that

A second invention to be patented is a method for measuring a magnetic physical quantity of a sample to be measured by an alternating current electromagnetic induction method, characterized in that the following first means to sixth means are performed.

First means: Prepare a measuring device characterized by including an AC electromagnetic induction sensor 1 configured as follows, an AC external magnetic field generating means 8, an output signal measuring means 9 and a computing means 10. To do.

In the AC electromagnetic induction sensor 1, the AC external magnetic field generated when an AC current is applied is applied to the measurement area 3 and its peripheral area 4 which are large enough to wrap the sample 7 to be measured, and the measurement area 3 And an AC external magnetic field applying coil 5 which is set so that the magnetic field distribution is uniform within the range of the peripheral region 4 and an output induced by the AC external magnetic field in the predetermined measurement region 3 and its peripheral region 4. The measurement coil 6 is arranged so as to be able to measure a signal, and the measurement coil 6 is induced by an AC external magnetic field in the measurement region 3 when the sample 7 to be measured is present in the predetermined measurement region 3. Output signal (measured signal) φ
A main measurement coil B capable of measuring _B (X), and an output signal (adjustment measurement signal) φ _A (adjustment measurement signal) induced by an AC external magnetic field in the peripheral region 4 separated from the measurement region 3 by a predetermined distance ± α. X ± a) and an external magnetic field canceling measurement coil A, and the AC external magnetic field generating means 8 is connected to the AC electromagnetic induction sensor 1 to generate an AC external magnetic field applying coil. 5 is configured so that an AC external magnetic field can be applied to the measurement region 3 and its peripheral region 4 by flowing an AC current, and the output signal measuring means 9 is connected to the AC electromagnetic induction sensor 1. Then, the output signal of the electromotive force induced in the measurement coil 4 by the application of the AC external magnetic field (measured signal, adjustment measurement signal)
Output signal (measured signal, adjusted measurement signal)
Select the appropriate one from the
The calculation means 10 is configured to adjust the measured and digitized output signals (the signal under measurement, the adjusted measurement signal) and calculate as necessary.

Second means: The measuring system of the measuring apparatus is adjusted in advance so that the following is satisfied. Output signal (signal to be measured) measured by the main measurement coil B φ _B (X)
And the output signal (adjustment measurement signal) φ (X ± a) measured by the measuring coil A for canceling the external magnetic field is the output signal W (X) induced by the AC external magnetic field and the magnetic physical quantity of the measured sample 5. As a composite signal as the sum of the output signals M (X),
Since recognized as _{follows, φ B (X) = α} (W B (X) + M B (X)) φ A (X ± a) = δ (W A (X + a) + M A (X + a)) (However, α and δ are constants for adjustment, which are coefficients proportional to the amplification factor and the number of turns of the coil when an amplifier is inserted on the way.) Using α and δ as adjustment factors, adjustment is made so that the following is satisfied. When the sample to be measured 7 is in the measurement region 3, the measurement sensitivity of the main measurement coil A is adjusted to be a substantially uniform space in the measurement region 3, and M _B (X) ≈constant Is not in the measurement region 3, the signal values W _B (X) and W _A (X ±) induced by the AC external magnetic field measured by the main measurement coil B and the external magnetic field cancellation measurement coil A are measured.
aW _B (X) = δW _A (X ± a) When the sample to be measured 7 is present in the measurement area 3, the sample to be measured measured with the external magnetic field canceling measurement coil A 7. The signal value M _A (X ± a) of the magnetic physical quantity related to 7 is measured by the main measurement coil B, and the signal value M of the magnetic physical quantity related to the measured sample 7 is measured.
_It is adjusted so that it is constantly smaller than _B (X) by a predetermined ratio ε. ε M _B (X) = M _A (X ± a), ε <1 / Σ

Third means: the AC electromagnetic induction sensor 1
When the sample 7 to be measured is present in the predetermined measurement region 3 by using the AC external magnetic field generating means 8 and the output signal measuring means 9, an AC current is passed through the AC external magnetic field applying coil 5 to generate an AC external magnetic field. The signal under measurement induced by the AC external magnetic field in the measurement region 3 at this time (composite signal which is the sum of the signal induced by the AC external magnetic field and the signal of the magnetic physical quantity related to the sample to be measured) φ _B (X ) Is measured by the main measurement coil B, and φ _B (X) = α (W _B (X) + M _B (X)) is induced by an AC external magnetic field in the peripheral region 4 separated from the measurement region 3 for a predetermined period. The adjusted measurement signal (composite signal which is the sum of the signal induced by the AC external magnetic field and the signal of the magnetic physical quantity relating to the sample to be measured) φ _A (X ± a) is measured by the external magnetic field offsetting measurement coil A. φ _A (X ± a) = δ (W _A (X ± a) + M _A (X ± a))

Fourth means: Using the arithmetic means 10, the signal to be measured (composite signal which is the sum of the signal induced by the AC external magnetic field and the signal of the magnetic physical quantity relating to the sample to be measured) φ
_The adjusted measurement signal (composite signal that is the sum of the signal induced by the AC external magnetic field and the signal of the magnetic physical quantity related to the sample to be measured) φ _A (X ± a) is subtracted from _B (X). The induced signals are canceled, and the signal of the net magnetic physical quantity relating to the sample 7 to be measured is detected as the magnetic physical quantity measurement signal φ _T proportional to the predetermined coefficient θ. _{φ T = φ B (X)} -φ A (X ± a) = α (W B (X) + M B (X)) - δ (W A (X ± a) + M A (X ± a)) αW B (X) = from being adjusted to _{δW a (X ± a),} αW B (X) -δW a (X ± a) = 0 and are offset _{= αM B (X) -δM a} (X ± a _{) εM B (X) = M} a (X ± a), ε <1 / from being adjusted to _{Σ = αM B (X) -δεM} B (X) = (α-δε) M B (X) α , Δ, ε are all predetermined coefficients, (α-δε) can be replaced with the predetermined coefficient θ. Therefore, φ _T = θM _B (X), and the output is detected as a measurement signal proportional to M _B (X).

The fifth means: magnetic physical quantity measurement signal of the standard sample S are found authentic magnetic physical quantity SM _B (X) Sφ _T
And using said measuring device was measured in the same manner as the sample to be measured 7 detects the magnetic physical quantity measuring signal Esufai _T of the standard sample S by computing, magnetic physical quantity measuring signal Esufai _T of the standard sample S True magnetic physical quantity SM known to be
_The coefficient ψ is specified from _B (X). _{ψ = Sφ T / SM B (} X) (Sφ T, since both the SM _B (X) is specifically quantified, also quantify [psi.)

Sixth means: The fifth means using the calculating means 10
The measured sample 7 using the specified coefficient ψ from the magnetic physical quantity measurement signal φ _T relating to the measured sample 7 detected by the means.
Calculate the magnetic physical quantity of. M _B (X) ＝ φ _T / ψ

A third invention to be granted a patent is a method for measuring a magnetic physical quantity of a sample to be measured by an AC electromagnetic induction method, characterized in that the following first to sixth means are performed.

First means: Prepare a measuring device characterized by comprising an AC electromagnetic induction sensor 1 constructed as follows, an AC external magnetic field generating means 8, an output signal measuring means 9 and an arithmetic means 10. To do.

In the measuring apparatus, an AC external magnetic field generated when an AC current is applied is applied to the measurement area 3 and its peripheral area 4 having a size that encloses the sample 7 to be measured, and further, the measurement area 3 and its peripheral area. The AC external magnetic field applying coil 5 set so that the magnetic field distribution is uniform within the range of 4 and the output signal induced by the AC external magnetic field in the predetermined measurement region 3 and its peripheral region 4 are measured. The measuring coil 6 is arranged so as to obtain an output signal () generated by an AC external magnetic field in the measurement area 3 when the sample 7 to be measured is present in the predetermined measurement area 3. the main measuring coil B and the induced output signal by alternating external magnetic field at a position ± alpha from the measurement region 3 spaced a predetermined distance (adjusted measurement signal for measuring the signal to be measured) phi _B (X) consists of a φ _Ac (X ± a) external magnetic field canceling the measurement coil AC to measure, the external magnetic field canceling measuring coil AC is AC at position + alpha spaced a predetermined distance in the forward direction of the magnetic lines of force from the measuring region 3 Output signal induced by external magnetic field (first adjustment measurement signal) φ _A (X +
a) A first external magnetic field canceling measurement coil A for measuring a) and an output signal (second adjustment measurement signal) induced by an AC external magnetic field at a position -α separated from the measurement region 3 by a predetermined distance in the rearward direction of the magnetic field lines. ) An electromagnetic induction sensor 1 including a second magnetic field cancellation measuring coil C for measuring φ _C (X-a)
And an AC configured to connect the AC electromagnetic induction sensor 1 and to apply an AC external magnetic field to the measurement region 3 and its peripheral region 4 by causing an AC current to flow through the AC external magnetic field applying coil 5. External magnetic field generating means 8,
The output signal of the electromotive force (measured signal, adjusted measurement signal) which is connected to the AC electromagnetic induction sensor 1 and induced in the measuring coil 4 by the application of an AC external magnetic field is measured, and the output signal (measured signal, Output signal measuring means 9 configured so that a proper one can be selected from the adjusted measurement signals) and digitized.
And an arithmetic means 10 capable of adjusting the measured and digitized output signals (measured signal, adjusted measurement signal) and performing arithmetic operations as necessary.

Second means: The measuring system of the measuring device is adjusted in advance so as to satisfy the following items. Output signal (signal to be measured) φ measured by the main measurement coil B
_B (X) and output signal measured by the first external magnetic field offset measuring coil A (first adjustment measurement signal) φ _A (X + a) and output signal measured by the second external magnetic field offset measuring coil C (Second adjusted measurement signal) φ _C (X-a) is a composite signal of the output signal W (X) induced by the AC external magnetic field and the output signal M (X) of the magnetic physical quantity related to the sample 7 to be measured, because it represented as _{follows, φ B (X) = α} (W B (X) + M B (X)) φ a (X + a) = β (W a (X + a) + M a (X + a)) φ _C (X-a) = γ (W _C (X-a) + M _C (X-a)) (where α, β, γ are constants for adjustment, and an amplifier is inserted in the middle In this case, it is a coefficient that is proportional to the amplification factor and the number of turns of the coil.) Using the adjustment constants α, β, and γ as adjustment factors, the measurement system of the measurement coil 6 is adjusted and set in advance so that deep. When the sample 7 to be measured is located in the predetermined measurement region 3, the measurement sensitivity is adjusted to be a substantially uniform space in the predetermined measurement region 3, and M _B (X) ≈constant main measurement coil B The output signal φ _B (X) of the magnetic physical quantity related to the sample to be measured measured in 1. is almost the output signal W _A (X + a) induced by the AC external magnetic field measured by the first external magnetic field offsetting measurement coil A. ), And W _B (X) = 2W _A (X + a) and the output signal W _A (X + a) induced by the AC external magnetic field measured by the first external magnetic field cancellation measuring coil A The output signal W _C (X-a) induced by the AC external magnetic field measured by the second external magnetic field offsetting measurement coil C is adjusted to be equal, and W _A (X + a) = W _C (X -a) Output signal of the magnetic physical quantity related to the sample to be measured 7 measured by the first measuring coil A for canceling the external magnetic field Adjusted to _A (X + a) and the second external output signal of the magnetic field canceling measuring coil C and magnetically physical quantity related to the measurement sample 7 measured in M _C (X-a) are equal, M _A ( X + a) = M _C (X-a) When the measured sample 7 is present in the measurement region 3, the output signal M _A (of the magnetic physical quantity relating to the measured sample measured by the first external magnetic field cancellation measuring coil _A ) X + a) is adjusted so as to be constantly reduced by a predetermined ratio ε compared with the output signal M _B (X) of the magnetic physical quantity related to the sample to be measured measured by the main measurement coil B. _{εM B (X) = M A} (X + a), ε <1 / Σ

Third means: the AC electromagnetic induction sensor 1
When the sample 7 to be measured is present in the predetermined measurement region 3 by using the AC external magnetic field generating means 8 and the output signal measuring means 9, an AC current is passed through the AC external magnetic field applying coil 3 to generate an AC external magnetic field. Apply and measure the measured signal φ _B (X) with the main measurement coil B, φ _B (X) = α (W _B (X) + M _B (X)) with the first external magnetic field cancellation measurement coil A The first adjustment measurement signal φ _A (X + a) is measured, and the second adjustment measurement signal φ _C (X-a) is measured by the second external magnetic field cancellation measurement coil C. _{φ A (X + a) =} β (W A (X + a) + M A (X + a)) φ C (X-a) = γ (W C (X-a) + M C (X-a))

Fourth means: measuring coil A for canceling the external magnetic field,
The first adjustment measurement signal φ _A (X + a) output by C and the second adjustment measurement signal φ _C (X-a) are added to output signal for external magnetic field cancellation φ _A (X + a) + φ _C ( X-a) values and _{without, φ A (X + a)} + φ C (X-a) = β (W A (X + a) + M A (X + a)
) + Γ (W _C (X-a) + M _C (X-a)) From the measured signal φ _B (X) measured by the main measurement coil B,
By subtracting the external magnetic field canceling output signal φ _A (X + a) + φ _C (X-a) value measured by the external magnetic field canceling measuring coils A and C, the signal induced by the AC external magnetic field is canceled. , The net magnetic physical quantity of the measured sample 7 is detected as a magnetic physical quantity output signal φ _T proportional to a predetermined coefficient κ. _{φ T = φ B (X)} - (φ A (X + a) + φ C (X-a)) = α (W B (X) + M B (X)) - {β (W A (X + a) _{+ M A (X + a)} ) + γ (W C (X-a) + M C (X-a)} = αW B (X) - {β (W A (X + a) + γW C (X-a)} + ΑM _B (X)-{βM _A (X + a) + γM _C (X-a)} At this time, W _B (X) = 2W _A (X + a), so α ≈ β + γ is adjusted, and W _A (X + Since a) = W _C (X-a) and M _A (X + a) = M _C (X-a), β ≈ γ is adjusted, so αW _B (X)-{β (WA (X _{A + a) + γ (W C} (X-a)} ≒ 0 and _{offset, = αM B (X) -} {βM a (X + a) + γM C (X-a)} = αM B (X) -2M _{a (X + a) = α} (M B (X) -2εM B (X)) = α (1-2ε) M B (X) α (1-2ε) because substituted in the coefficient kappa, phi _T = ΚM _B (X), and the magnetic physical quantity output signal φ _T is detected as a signal proportional to M _B (X).

The fifth means: magnetic physical quantity measurement signal of the standard sample S are found authentic magnetic physical quantity SM _B (X) Sφ _T
Is measured by the same measuring method as that of the sample 7 to be measured using the above-mentioned measuring device to calculate the magnetic physical quantity measurement signal Sφ _T of the standard sample S, and the magnetic physical quantity of the detected standard sample S is measured. specifying the coefficient λ from genuine magnetically physical quantity SM _B (X) are found to signal Sφ _{T. λ = Sφ T / SM B (} X) (Sφ T, since both the SM _B (X) is specifically quantified, also quantify lambda.)

Sixth means: The fifth means using the arithmetic means 10
The sample 7 to be measured using the specified coefficient λ from the magnetic physical quantity measurement signal φ _T relating to the sample 7 detected by the means.
Calculate the magnetic physical quantity of. M _B (X) ＝ φ _T / λ

A fourth invention to be granted a patent is a measuring device in which the AC electromagnetic induction sensor 1 described in the first means of claim 3 is replaced with an improved AC electromagnetic induction sensor 1 configured as follows. To prepare. In the AC electromagnetic induction sensor 1, the AC external magnetic field induced when an AC current is applied is applied to the measurement region 3 and its peripheral region 4 having a size that encloses the sample 7 to be measured, and further, the measurement region 3 and its periphery. An AC external magnetic field applying coil 5 set so that the magnetic field distribution is uniform within the range of the area 4, and an output signal induced by the AC external magnetic field in the predetermined measurement area 3 and its peripheral area 4 is measured. And a measuring coil 6 arranged so that
Is a main measurement coil B capable of measuring a measured signal φ _B (X) induced by an AC external magnetic field in the measurement area 3 when the measured sample 7 is present in the measurement area 3 and the measurement area 3
Output signal (adjustment measurement signal) φ _Ac (X ±
a) and a measuring coil AC for canceling the external magnetic field for measuring a).
The first main measurement coil B1 located in front of the magnetic field lines in the inside and the second main measurement coil B2 located in the rear are arranged so as to be separated by a predetermined distance. The measured signal φ _B (X) induced by the magnetic field is configured so that it can be measured as an output signal obtained by combining the magnetic fields of the first main measurement coil B1 and the second main measurement coil B2, and the external magnetic field cancellation is performed. The measurement coil AC for measurement measures the output signal (adjustment measurement signal) φ _A (X + a) induced by the AC external magnetic field at a position + α separated from the measurement region 3 in the forward direction of the magnetic field lines by a predetermined distance. External magnetic field canceling measurement coil A and output signal induced by an AC external magnetic field at a position -α which is separated from the measurement area 3 in the rear direction of the magnetic field lines by a predetermined distance (adjustment measurement signal) φ _C (X-
and a second magnetic field cancellation measuring coil C for measuring a). Then, the second to sixth means described in claim 3 are sequentially performed, which is a method for measuring a magnetic physical quantity of a sample to be measured by an AC electromagnetic induction method.

In the fifth invention to be patented, an AC external magnetic field generated when an AC current is applied is applied to the measurement region 3 and its peripheral region 4 having a size enclosing the sample 7 to be measured, and the measurement is performed. An AC external magnetic field applying coil 5 that is set so that the magnetic field distribution is uniform within the region 3 and its peripheral region 4, and an AC external magnetic field induced in the predetermined measurement region 3 and its peripheral region 4 And a measuring coil 6 arranged so as to measure an output signal, the measuring coil 6 is provided with an AC external magnetic field in the measuring region 3 when the sample 7 to be measured is present in the predetermined measuring region 3. Induced output signal (measured signal) φ
_A main measurement coil B capable of measuring _B (X) and an output signal (adjustment measurement signal) φ _A (X ± a) induced by an AC external magnetic field at a position separated from the measurement area 3 by a predetermined distance ± α.
An AC electromagnetic induction sensor 1 configured to include an external magnetic field offsetting measurement coil A capable of measuring and an AC external magnetic field applying coil 5 connected to the AC electromagnetic induction sensor 1 to flow an AC current. The AC external magnetic field generating means 8 configured to apply the AC external magnetic field to the measurement area 3 and the peripheral area 4 thereof and the AC electromagnetic induction sensor 1 are connected to each other, and the measurement coil is applied by the application of the AC external magnetic field. The output signal measuring means 9 adapted to measure and digitize the output signal (measurement signal, adjustment measurement signal) of the electromotive force induced in 4 and the measured and digitized output signal (measurement signal, adjustment measurement). The calculation means 10 capable of adjusting the signal) and performing the calculation as necessary, and at least the magnetic physical quantity of the measured sample calculated by the calculation means 10 can be output. And output means 11 to a magnetic physical quantity measuring device of the sample by the AC electromagnetic induction, characterized in that it includes.

In the sixth invention to be patented, an AC external magnetic field induced when an AC current is applied is applied to the measurement region 3 and its peripheral region 4 having a size enclosing the sample 7 to be measured, and the measurement is performed. An AC external magnetic field applying coil 5 that is set so that the magnetic field distribution is uniform within the region 3 and its peripheral region 4, and an AC external magnetic field induced in the predetermined measurement region 3 and its peripheral region 4 And a measuring coil 6 arranged so as to measure an output signal, the measuring coil 6 is provided with an AC external magnetic field in the measuring region 3 when the sample 7 to be measured is present in the predetermined measuring region 3. Induced output signal (measured signal) φ
_The main measurement coil B for measuring _B (X) and the output signal (adjustment measurement signal) φ _Ac (X ± a) induced by the AC external magnetic field at the positions ± α separated from the measurement area 3 by a predetermined distance are measured. And a measuring coil AC for canceling the external magnetic field, the measuring coil AC for canceling the external magnetic field having an output signal () generated by an AC external magnetic field at a position + α separated from the measuring region 3 by a predetermined distance in the forward direction of the magnetic field lines. First adjustment measurement signal) _A first external magnetic field offsetting measurement coil A for measuring φ _A (X + a), and an AC external magnetic field at a position -α separated from the measurement region 3 by a predetermined distance in the rear direction of the magnetic field lines An AC electromagnetic induction sensor 1 including a second magnetic field offsetting measurement coil C that measures the induced output signal (second adjustment measurement signal) φ _C (X-a), and the AC electromagnetic induction sensor 1 AC external magnetic field coupled to An AC external magnetic field generating means 8 configured to apply an AC external magnetic field to the measurement region 3 and its peripheral region 4 by applying an AC current to the applying coil 5 is connected to the AC electromagnetic induction sensor 1. , Output signal of electromotive force induced in measuring coil 4 by application of AC external magnetic field (measured signal, adjusted measurement signal)
Output signal measuring means 9 for measuring and digitizing
And an arithmetic means 10 capable of adjusting the measured and digitized output signals (measured signal, adjusted measurement signal) and performing arithmetic operation as necessary, and at least the arithmetic means 10
And an output means 11 capable of outputting the magnetic physical quantity of the sample to be measured, which is calculated by the above method, and an apparatus for measuring the magnetic physical quantity of the sample to be measured by an alternating current electromagnetic induction method.

In the seventh invention to be patented, an AC external magnetic field induced when an AC current is applied is applied to the measurement region 3 and its peripheral region 4 having a size enclosing the sample 7 to be measured, and the measurement is performed. An AC external magnetic field applying coil 5 that is set so that the magnetic field distribution is uniform within the region 3 and its peripheral region 4, and an AC external magnetic field induced in the predetermined measurement region 3 and its peripheral region 4 Measuring coil 6 arranged so as to measure the output signal, the measuring coil 6 is induced by an AC external magnetic field in the measuring region 3 when the sample 7 to be measured is present in the measuring region 3. Output signal (adjustment measurement signal) φ _A induced by the AC external magnetic field at the main measurement coil B capable of measuring the measured signal φ _B (X) and the position ± α separated from the measurement region 3 by a predetermined distance. _The main measurement coil B is composed of an external magnetic field cancellation measurement coil AC for measuring _c (X ± a), and the main measurement coil B is further located in front of the magnetic field lines in the measurement region 3, and The second main measurement coil B2 located in the rear is arranged so as to be separated from the second main measurement coil by a predetermined distance, and the measured signal φ _B (X) induced by the AC external magnetic field in the measurement region 3 is The magnetic field of the first main measurement coil B1 and the second main measurement coil B2 is configured to be able to be measured as an output signal, and the external magnetic field offsetting measurement coil AC is arranged in the forward direction of the magnetic field lines from the measurement region 3. _A first external magnetic field offsetting measurement coil A for measuring an output signal (adjustment measurement signal) φ _A (X + a) induced by an AC external magnetic field at a position + α separated from a predetermined distance, and a magnetic field line from the measurement area 3 concerned. Position separated backward for a predetermined period − Induced output signal the output signal by an alternating external magnetic field in the (adjusted measurement signal) φ _C (X-a) second magnetic field canceling the measurement coil C improved alternating current electromagnetic induction sensor is composed of a 1 to measure And an AC external magnetic field can be applied to the measurement area 3 and its peripheral area 4 by connecting to the improved AC electromagnetic induction sensor 1 and applying an AC current to the AC external magnetic field applying coil 5. The measuring coil 4 is connected to the AC external magnetic field generating means 8 and the improved AC electromagnetic induction sensor 1 by applying an AC external magnetic field.
Output signal measuring means 9 for measuring and quantifying the output signal (measurement signal, adjustment measurement signal) of the electromotive force induced in the sensor, and the measured and quantified output signal (measurement signal, adjustment measurement signal). ) Is adjusted so that calculation can be performed as necessary, and at least output means 11 capable of outputting the magnetic physical quantity of the sample to be measured calculated by the calculation means 10. It is an apparatus for measuring a magnetic physical quantity of a sample to be measured by an alternating-current electromagnetic induction method characterized by the above.

The eighth invention to be patented is to prepare an AC electromagnetic induction sensor 1 composed of an AC external magnetic field applying coil 5 and a measuring coil 6, and to generate a magnetic field generated by the AC external magnetic field applying coil 5. By passing the sample 7 to be measured along the direction, the magnetic field associated with the phase change of the alternating current is changed, whereby an electromotive force is induced in the measuring coil 6,
Measure the composite signal, which is the sum of the signal induced by the AC external magnetic field and the signal of the magnetic physical quantity of the sample to be measured, as the signal to be measured, and then remove the signal induced by the external magnetic field to measure the sample material. It is characterized in that it detects the measurement signal of the net magnetic physical quantity, converts it to a digitized numerical signal as a basic measurement signal, and multiplies the numerical signal by a weight calculation coefficient to calculate the weight. Is a method for measuring the weight of a sample to be measured by an alternating current electromagnetic induction method.

A ninth invention for which a patent is sought is a method for measuring the weight of a sample to be measured by an alternating current electromagnetic induction method, characterized in that the following first to sixth means are performed.

First means: A weight measuring device comprising an AC electromagnetic induction sensor 1, an AC external magnetic field generating means 8, an output signal measuring means 9 and a computing means 10 configured as described below. prepare.

In the weight measuring device, an AC external magnetic field generated when an AC current is applied is applied to the measurement region 3 and its peripheral region 4 having a size that encloses the sample 7 to be measured, and further the measurement region 3 and its periphery. An AC external magnetic field applying coil 5 which is set so that the magnetic field distribution is uniform within the range of the region 4, the predetermined measurement region 3 and its peripheral region 4
In the predetermined measurement region 3, the measurement coil 6 is arranged so as to measure the output signal induced by the AC external magnetic field.
When there is a main measurement coil B that measures an output signal (signal to be measured) φ _B (X) induced by an AC external magnetic field in the measurement area 3 and a predetermined distance from the measurement area 3 in the front direction of the magnetic field lines. Output signal (adjustment measurement signal) φ _A (X + a) induced by AC external magnetic field at remote position + α
Measuring coil A for canceling the external magnetic field and a position separated from the measuring region 3 in the rear direction of the magnetic field line by a predetermined distance.
An output signal induced by an AC external magnetic field at α, and an external magnetic field cancellation measurement coil AC including a second magnetic field cancellation measurement coil C for measuring the same output signal (adjustment measurement signal) φ _C (X-a) The electromagnetic induction sensor 1 is connected to the AC electromagnetic induction sensor 1, and an AC external magnetic field can be applied to the measurement area 3 and its peripheral area 4 by passing an AC current through the AC external magnetic field applying coil 5. The AC external magnetic field generating means 8 configured as described above and the AC electromagnetic induction sensor 1 are connected to each other, and the output signal of the electromotive force induced in the measurement coil 4 by the application of the AC external magnetic field (measured signal, adjusted measurement signal). ) Is measured, an appropriate signal is selected from the output signals (the signal under measurement, the adjustment measurement signal), and the output signal measuring means 9 is configured to be quantified, and the measured and digitized output signal. At least provided with a device and the computing means 10 which can be (measured signal, adjusting the measurement signal) adjusted as necessary operations.

Second means: The measuring system of the weight measuring device is
Adjust in advance so that the following items are satisfied. Output signal (measured signal) measured by the main measurement coil B
φ _B (X) and output signal measured by the first external magnetic field offset measuring coil A (first adjustment measurement signal) φ _A (X + a) and output measured by the second external magnetic field offset measuring coil C The signal (second adjustment measurement signal) φ _C (X-a) is a composite signal of the output signal W (X) induced by the AC external magnetic field and the output signal M (X) of the magnetic physical quantity related to the DUT 7. , Φ _B (X) = α (W _B (X) + M _B (X)) φ _A (X + a) = β (W _A (X + a) + M _A (X + a)) φ _C (X-a) = γ (W _C (X-a) + M _C (X-a)) (where α, β and γ are constants for adjustment, and an amplifier is inserted in the middle. In this case, it is a coefficient proportional to the amplification factor and the number of turns of the coil.) Using the adjustment constants α, β, and γ as adjustment factors, the measurement system of the measurement coil 6 is adjusted and set in advance so that Keep it. When the sample 7 to be measured is located in the predetermined measurement region 3, the measurement sensitivity is adjusted to be a substantially uniform space in the predetermined measurement region 3, and M _B (X) ≈constant main measurement coil B The output signal φ _B (X) of the magnetic physical quantity related to the sample to be measured measured in 1. is almost the output signal W _A (X + a) induced by the AC external magnetic field measured by the first external magnetic field offsetting measurement coil A. ), And W _B (X) = 2W _A (X + a) and the output signal W _A (X + a) induced by the AC external magnetic field measured by the first external magnetic field cancellation measuring coil A The output signal W _C (X-a) induced by the AC external magnetic field measured by the second external magnetic field offsetting measurement coil C is adjusted to be equal, and W _A (X + a) = W _C (X -a) Output signal of the magnetic physical quantity related to the sample to be measured 7 measured by the first measuring coil A for external magnetic field cancellation M _A (X + a) and adjusted to magnetic physical quantity of the output signal M _C (X-a) equals about the measured sample 7 is measured by the second external magnetic field canceling the measurement coil C, M _A (X + a) = M _C (X-a) When the sample to be measured 7 is present in the measurement region 3, the output signal M _A of the magnetic physical quantity related to the sample to be measured measured by the first external magnetic field cancellation measurement coil _A (X + a) is adjusted so as to be constantly reduced by a predetermined ratio ε compared with the output signal M _B (X) of the magnetic physical quantity related to the sample to be measured measured by the main measurement coil B. _{εM B (X) = M A} (X + a), ε <1 / Σ

Third means: the AC electromagnetic induction sensor 1
When the sample 7 to be measured is present in the predetermined measurement region 3 by using the AC external magnetic field generating means 8 and the output signal measuring means 9, an AC current is passed through the AC external magnetic field applying coil 3 to generate an AC external magnetic field. Apply and measure the measured signal φ _B (X) with the main measurement coil B, φ _B (X) = α (W _B (X) + M _B (X)) with the first external magnetic field cancellation measurement coil A The first adjustment measurement signal φ _A (X + a) is measured, and the second adjustment measurement signal φ _C (X-a) is measured by the second external magnetic field cancellation measurement coil C. _{φ A (X + a) =} β (W A (X + a) + M A (X + a)) φ C (X-a) = γ (W C (X-a) + M C (X-a))

Fourth means: measuring coil A for canceling the external magnetic field,
Output signal φ for external magnetic field cancellation by adding the first adjustment measurement signal φ _A (X + a) output by C and the second adjustment measurement signal φ _C (X-a)
_{A (X + a) + φ} C (X-a) values and _{without, φ A (X + a)} + φ C (X-a) = β (W A (X + a) + M A (X + a)
) + Γ (W _C (X-a) + M _C (X-a)) From the measured signal φ _B (X) measured by the main measurement coil B,
By subtracting the external magnetic field canceling output signal φ _A (X + a) + φ _C (X-a) value measured by the external magnetic field canceling measuring coils A and C, the signal induced by the AC external magnetic field is canceled. , The net magnetic physical quantity of the measured sample 7 is detected as a magnetic physical quantity output signal φ _T proportional to a predetermined coefficient κ. _{φ T = φ B (X)} - (φ A (X + a) + φ C (X-a)) = α (W B (X) + M B (X)) - {β (W A (X + a) _{+ M A (X + a)} ) + γ (φ C (X-a) + M C (X-a)} = αW B (X) - {β (W A (X + a) + γW C (X-a)} + ΑM _B (X)-{βM _A (X + a) + γM _C (X-a)} At this time, W _B (X) = 2W _A (X + a), so α ≈ β + γ is adjusted, and W _A (X + Since a) = W _C (X-a) and M _A (X + a) = M _C (X-a), β ≈ γ is adjusted, so αW _B (X)-{β (WA (X _A + a) + γ (W _C (X-a)} ≈ 0, which is offset by: = αM _B (X)-{βM _A (X + a) + γM _C (X-a)} = α (M _B (X) _{-2M a (X + a) =} α (M B (X) -2εM B (X)) = α (1-2ε) M B (X) α (1-2ε) because substituted in the coefficient kappa, Since φ _T = κM _B (X), the magnetic physical quantity output signal φ _T is detected as a signal proportional to M _B (X).

Fifth means: A standard is obtained by measuring and calculating the magnetic physical quantity measurement signal Sφ _T of the standard sample S of which the true weight SG is known by the same measuring method as that of the sample 7 to be measured by using the measuring device. Magnetic physical quantity measurement signal Sφ _{T of} sample S
Is detected and the weight calculation coefficient η is specified from the detected magnetic physical quantity measurement signal Sφ _{T of} the standard sample S and the true weight SG which is known. η = Sφ _T / SG (Since both Sφ _T and SG are concrete numerical values, η
Also digitize. )

Sixth means: Using the calculating means 10, the fifth means
The weight of the sample 7 to be measured is calculated from the magnetic physical quantity measurement signal φ _T relating to the sample 7 to be measured detected by the means, using the specified weight calculation coefficient η. M _B (X) ＝ φ _T / η

A tenth aspect of the present invention, which intends to receive a patent, is a measuring apparatus in which the AC electromagnetic induction sensor 1 described in the first means of claim 9 is replaced with an improved AC electromagnetic induction sensor 1 configured as follows. To prepare. In the AC electromagnetic induction sensor 1, the AC external magnetic field induced when an AC current is applied is applied to the measurement region 3 and its peripheral region 4 having a size that encloses the sample 7 to be measured, and further, the measurement region 3 and its periphery. An AC external magnetic field applying coil 5 set so that the magnetic field distribution is uniform within the range of the area 4, and an output signal induced by the AC external magnetic field in the predetermined measurement area 3 and its peripheral area 4 is measured. And a measuring coil 6 arranged so that
Is a main measurement coil B capable of measuring a measured signal φ _B (X) induced by an AC external magnetic field in the measurement area 3 when the measured sample 7 is present in the measurement area 3 and the measurement area 3
Output signal (adjustment measurement signal) φ _Ac (X ±
a) and a measuring coil AC for canceling the external magnetic field for measuring a).
The first main measurement coil B1 located in front of the magnetic field lines in the inside and the second main measurement coil B2 located in the rear are arranged so as to be separated by a predetermined distance. The measured signal φ _B (X) induced by the magnetic field is configured so that it can be measured as an output signal obtained by combining the magnetic fields of the first main measurement coil B1 and the second main measurement coil B2, and the external magnetic field cancellation is performed. The measurement coil AC for measurement measures the output signal (adjustment measurement signal) φ _A (X + a) induced by the AC external magnetic field at a position + α separated from the measurement region 3 in the forward direction of the magnetic field lines by a predetermined distance. External magnetic field canceling measurement coil A and output signal induced by an AC external magnetic field at a position -α which is separated from the measurement area 3 in the rear direction of the magnetic field lines by a predetermined distance (adjustment measurement signal) φ _C (X-
and a second magnetic field cancellation measuring coil C for measuring a). In addition, the second to sixth means described in claim 9 are sequentially performed, which is a method for measuring a magnetic physical quantity of a sample to be measured by an AC electromagnetic induction method.

The eleventh invention to be patented is that the AC external magnetic field induced when an AC current is applied is measured sample 7
AC external magnetic field applying coil 5 which is applied to the measurement region 3 and its peripheral region 4 having a size that encloses the magnetic field and is set so that the magnetic field distribution is uniform within the range of the measurement region 3 and its peripheral region 4. And a measuring coil 6 arranged so as to be able to measure an output signal induced by an AC external magnetic field in the predetermined measuring region 3 and its peripheral region 4.
The measurement coil 6 has an output signal (measurement signal) induced by an AC external magnetic field in the measurement area 3 when the measurement sample 7 is present in the predetermined measurement area 3.
a main measuring coil B to measure phi _B (X), the induced output signals by alternating external magnetic field at the position + alpha spaced a predetermined distance in the forward direction of the magnetic lines of force from the measuring region 3 (adjusted measurement signal) phi _A (X + a) for measuring the first external magnetic field offsetting measurement coil A, and the output signal induced by the AC external magnetic field at the position -α separated from the measurement area 3 in the rearward direction of the magnetic field by a predetermined distance. (Measurement signal) φ _C (X-a) for measuring the external magnetic field canceling measuring coil AC including the second magnetic field canceling measuring coil C for measuring An electromagnetic induction sensor 1 for measuring a magnetic physical quantity of a measurement sample and an AC external magnetic field application coil 5 connected to the AC electromagnetic induction sensor 1
AC external magnetic field is measured by applying an AC current to the measurement area 3
And an AC external magnetic field generating means 8 configured to be applied to the peripheral area 4 thereof and the AC electromagnetic induction sensor 1, and the electromotive force induced in the measuring coil 4 by the application of the AC external magnetic field. Output signal (measured signal,
Output signal measuring means 9 for measuring and digitizing the adjusted measurement signal, and for adjusting the measured and digitized output signal (measured signal, adjusted measurement signal) and calculating as necessary. The calculation means 10 described above and at least the weight of the sample to be measured calculated by the calculation means 10, or an evaluation judgment by comparing the preset standard weight with the measured weight value can be output. An output means 11 and a measured sample supply / unload means 12 for transferring and supplying the measured sample 7 to a predetermined measurement region 3 of the AC electromagnetic induction sensor 1 and carrying it out after the weight measurement are provided. It is a characteristic device for measuring the weight of a sample to be measured by an AC electromagnetic induction method.

In the twelfth aspect of the invention, which is going to receive a patent, the alternating external magnetic field induced when an alternating current is applied is measured sample 7
AC external magnetic field applying coil 5 which is applied to the measurement region 3 and its peripheral region 4 having a size that encloses the magnetic field and is set so that the magnetic field distribution is uniform within the range of the measurement region 3 and its peripheral region 4. And a measuring coil 6 arranged so as to be able to measure an output signal induced by an AC external magnetic field in the predetermined measuring region 3 and its peripheral region 4.
The measurement coil 6 comprises a main measurement coil B capable of measuring a signal under test φ _B (X) induced by an AC external magnetic field in the measurement region 3 when the sample 7 under measurement is present in the measurement region 3. And an external magnetic field canceling measuring coil AC for measuring an output signal (adjustment measuring signal) φ _Ac (X ± a) induced by an AC external magnetic field at a position ± α separated from the measurement region 3 by a predetermined distance. The main measurement coil B is further provided with a first main measurement coil B1 located in front of the magnetic field lines in the measurement area 3 and a second main measurement coil B2 located behind the magnetic field lines, which are separated by a predetermined distance. The measured signal φ _B (X) induced by the AC external magnetic field in the measurement area 3 is an output signal obtained by combining the magnetic fields of the first main measurement coil B1 and the second main measurement coil B2. Is configured to be measured as The external magnetic field canceling measurement coil AC has an output signal (adjustment measurement signal) φ _A (X + a) induced by an AC external magnetic field at a position + α separated from the measurement region 3 in the front direction of the magnetic field lines by a predetermined distance. ) Of the first external magnetic field canceling measurement coil A, and the output signal same as the output signal (adjustment measurement signal) induced by the AC external magnetic field at a position -α separated from the measurement region 3 by a predetermined distance in the rear direction of the magnetic field lines. ) An improved AC electromagnetic induction sensor 1 composed of a second magnetic field cancellation measuring coil C for measuring φ _C (X-a), and an AC external connected to the improved AC electromagnetic induction sensor 1. An AC external magnetic field generating means 8 configured to apply an AC external magnetic field to the measurement region 3 and its peripheral region 4 by applying an AC current to the magnetic field applying coil 5, and the improved AC electromagnetic induction sensor. Connected to server 1, the measuring coil 4 by application of an AC external magnetic field
Output signal measuring means 9 for measuring and quantifying the output signal (measurement signal, adjustment measurement signal) of the electromotive force induced in the sensor, and the measured and quantified output signal (measurement signal, adjustment measurement signal). ) Is adjusted so that calculation can be performed as necessary, and at least the weight of the sample to be measured calculated by the calculation means 10 or a standard weight set in advance is measured and calculated. Output means 11 capable of outputting an evaluation judgment comparing with a weight value,
An AC electromagnetic wave, comprising: a sample-to-be-measured supply / unloading means 12 configured to carry and supply the sample 7 to be measured to a predetermined measurement region 3 of the AC electromagnetic induction sensor 1 and carry it out after weighing. It is an apparatus for measuring the weight of a sample to be measured by an induction method.

In the thirteenth aspect of the invention for which a patent is sought, the alternating external magnetic field generated when an alternating current is applied is measured sample 7
AC external magnetic field applying coil 5 which is applied to the measurement region 3 and its peripheral region 4 having a size that encloses the magnetic field and is set so that the magnetic field distribution is uniform within the range of the measurement region 3 and its peripheral region 4. And a measuring coil 6 arranged so as to be able to measure an output signal induced by an AC external magnetic field in the predetermined measuring region 3 and its peripheral region 4.
The measurement coil 6 has an output signal (measurement signal) induced by an AC external magnetic field in the measurement area 3 when the measurement sample 7 is present in the predetermined measurement area 3.
Main measurement coil B capable of measuring φ _B (X) and the measurement area 3 concerned
Output signal (adjustment measurement signal) φ _A (X ±
It is an AC electromagnetic induction sensor for measuring a magnetic physical quantity of a sample to be measured by an AC electromagnetic induction method, characterized in that it comprises an external magnetic field canceling measurement coil A capable of measuring a).

The fourteenth invention, which seeks to obtain a patent, is that the AC external magnetic field induced when an AC current is applied is measured sample 7
AC external magnetic field applying coil 5 which is applied to the measurement region 3 and its peripheral region 4 having a size that encloses the magnetic field and is set so that the magnetic field distribution is uniform within the range of the measurement region 3 and its peripheral region 4. And a measuring coil 6 arranged so as to be able to measure an output signal induced by an AC external magnetic field in the predetermined measuring region 3 and its peripheral region 4.
The measurement coil 6 has an output signal (measurement signal) induced by an AC external magnetic field in the measurement area 3 when the measurement sample 7 is present in the predetermined measurement area 3.
A main measurement coil B for measuring φ _B (X) and an output signal (adjustment measurement signal) φ _Ac (X ± a) induced by an AC external magnetic field at a position ± α separated from the measurement area 3 by a predetermined distance.
And an external magnetic field offset measuring coil AC for measuring
The measurement coil AC for canceling the external magnetic field corresponds to the measurement area 3
_A first external magnetic field offsetting measurement coil A for measuring an output signal (first adjustment measurement signal) φ _A (X + a) induced by an AC external magnetic field at a position + α that is separated by a predetermined distance in the forward direction of the magnetic field line from , A second magnetic field cancellation for measuring an output signal (second adjustment measurement signal) φ _C (X-a) induced by an AC external magnetic field at a position -α which is separated from the measurement region 3 in the rear direction of the magnetic field by a predetermined distance. It is an AC electromagnetic induction sensor for measuring a magnetic physical quantity of a sample to be measured by an AC electromagnetic induction method, which is characterized in that it is configured with a measurement coil C for measurement.

In the fifteenth aspect of the invention for which a patent is sought, the alternating external magnetic field induced when an alternating current is applied is measured sample 7
AC external magnetic field applying coil 5 which is applied to the measurement region 3 and its peripheral region 4 having a size that encloses the magnetic field and is set so that the magnetic field distribution is uniform within the range of the measurement region 3 and its peripheral region 4. And a measuring coil 6 arranged so as to be able to measure an output signal induced by an AC external magnetic field in the predetermined measuring region 3 and its peripheral region 4.
The measurement coil 6 comprises a main measurement coil B capable of measuring a signal under test φ _B (X) induced by an AC external magnetic field in the measurement region 3 when the sample 7 under measurement is present in the measurement region 3. And an external magnetic field canceling measuring coil AC for measuring an output signal (adjustment measuring signal) φ _Ac (X ± a) induced by an AC external magnetic field at a position ± α separated from the measurement region 3 by a predetermined distance. The main measurement coil B is further provided with a first main measurement coil B1 located in front of the magnetic field lines in the measurement area 3 and a second main measurement coil B2 located behind the magnetic field lines, which are separated by a predetermined distance. The measured signal φ _B (X) induced by the AC external magnetic field in the measurement area 3 is an output signal obtained by combining the magnetic fields of the first main measurement coil B1 and the second main measurement coil B2. Is configured to be measured as The external magnetic field canceling measurement coil AC has an output signal (adjustment measurement signal) φ _A (X + a) induced by an AC external magnetic field at a position + α separated from the measurement region 3 in the forward direction of the magnetic field lines by a predetermined distance. ) Of the first external magnetic field canceling measurement coil A, and the output signal induced by the AC external magnetic field at the position -α separated from the measurement region 3 in the rearward direction of the magnetic field lines by a predetermined distance (adjustment measurement signal). ) An improved AC for measuring the magnetic physical quantity of the sample to be measured by the AC electromagnetic induction method, characterized in that it comprises a second magnetic field cancellation measuring coil C for measuring φ _C (X-a) Type electromagnetic induction sensor.

[0059]

EXAMPLES The inventors of the present application, based on the technical knowledge that "the rate of change of magnetic flux and the magnetic permeability due to the phase change of alternating current are proportional to the mass of the test material." A measurement method and its measurement apparatus, and a weight measurement method and a weight measurement apparatus to which the measurement method and its measurement apparatus were concretely manufactured, and an experiment was carried out by the examples. In particular, development of a specific detection coil called an AC electromagnetic induction sensor 1 having a measurement technique capable of removing an external magnetic field generated by an AC current from a measurement signal, and an AC external magnetic field generation means for generating a uniform AC external magnetic field 10, an output signal measuring means 11 for improving and stabilizing the accuracy of the measured value, a calculating means 12 for calculating the measurement signal at high speed, and an outputting means for outputting the calculation result and various related data. It was originally developed with an amplifier controller consisting of. Less than,
The present invention will be described in detail based on the illustrated embodiments.

12 and 10 are explanatory views showing the configuration of the measuring device developed by the inventor of the present application. As shown in FIG. 12, the technical configuration of the measuring apparatus is as follows: AC electromagnetic induction sensor 1, AC external magnetic field generating means 8, output signal measuring means 9, computing means 10, output means 11, sample supply and unloading. The means 12 is provided. On the other hand, in FIG.
The measuring device actually manufactured by the present inventor is described by its specific constituent parts. Note that FIG. 12 also shows the relationship between the technical configuration of the present invention and the specific components shown in FIG. FIG. 7 is a perspective view showing an embodiment of the AC electromagnetic induction sensor 1, and FIG. 13 is an AC electromagnetic induction sensor 1 and a measured sample supply / unload means 12.
FIG. 15 is a front view showing an embodiment of a measuring device (a magnetic physical quantity measuring device, a weight measuring device) that is a combination of FIG.
FIG. 3 is a side view showing an embodiment of a measuring device (magnetic physical quantity measuring device, weight measuring device) in which the AC electromagnetic induction sensor 1 and the measured sample supply / unloading means 12 are combined.

The inventors of the present invention started with a cylindrical electromagnetic induction sensor (Japanese Patent Application No. 5-176279) developed earlier as a starting point, and developed a unique AC electromagnetic induction sensor 1 ( Research and development of detection coil) started. The cylindrical electromagnetic induction sensor (Japanese Patent Application No. 5-176279) used in the previously developed weight measuring device is an improvement of the mini-bridge type electromagnetic induction coil, and its configuration is composed of an electromagnet coil and an electromagnetic induction coil. The coils are arranged coaxially in close proximity to each other in series so that the magnetic flux created by the electromagnet coil penetrates through the electromagnetic induction coil. A magnetic field is generated in the cylinder, and the magnetic material to be measured is passed through the cylinder of the cylindrical electromagnetic induction sensor at a predetermined speed to change the magnetic field in the cylinder to generate an electromotive force in the electromagnetic induction coil. It was a cylindrical electromagnetic induction sensor characterized in that

However, since the tubular electromagnetic induction sensor developed previously is a mini-bridge type detection coil, it cannot be used unless two coils are used, and the characteristics may change depending on the place where the unused coil is placed, or There is a defect that the magnetic field does not uniformly wrap the sample. In addition, the cylindrical electromagnetic induction sensor is difficult to control the influence of the external magnetic field and the measurement sensitivity, and the measured electromotive force signal is the signal induced by the external magnetic field and the signal of the magnetic physical quantity of the magnetic material to be measured. It is a composite signal of the above, and the configuration is such that it is not possible to distinguish between them and extract and measure only the net magnetic physical quantity of the magnetic material to be measured.

Therefore, the AC electromagnetic induction sensor 1 according to the present invention, which is to be newly developed, has a combination of a signal induced by an external magnetic field and a signal of the magnetic physical quantity of the sample 7 to be measured with only one sensor. To be able to measure both the signal under test and the adjustment measurement signal centered on the signal induced by the external magnetic field; 〓 Ensure that the external magnetic field uniformly wraps the sample under test; 〓 The measurement signal is stable. It is more stable than the prior art by enabling measurement, and by removing the signal induced by the external magnetic field from the measured composite signal, and extracting only the net magnetic physical quantity measurement signal. Research and development were carried out for the purpose of making it possible to measure highly realistic magnetic physical quantities, and the specific development was successful.

AC electromagnetic induction sensor 1 according to the present invention
As shown in FIG. 1, FIG. 2, FIG. 4, FIG. 5 and FIG.
And a measuring coil 6.

The former AC external magnetic field applying coil 5 is a solenoid type coil, and the AC external magnetic field generated when an AC current is applied is applied to the measurement region 3 and its peripheral region 4 of a size that wraps the sample 7 to be measured. And the measurement area 3
And the length of the coil bobbin, the inner diameter of the cylinder, the number of turns, so that the magnetic field distribution is uniform within the range of the peripheral region 4.
Are set. The inventor devised a method for making the AC external magnetic field generated by the AC external magnetic field applying coil 5 as uniform as possible, and as a result, as shown in FIG. 8, a method of winding a long coil wire in the longitudinal direction of a long coil bobbin, and As shown in FIG. 2, the AC external magnetic field applying coil 5 is wound around two coils of a coil Y and a coil Z with a predetermined gap, and a coil wire is wound, and the magnetic fields of the two coils are combined (Y ′ + Z ′) to produce a central portion. We have found a way to make it uniform. still,
It has been found that the method of arranging two coils separately and synthesizing the magnetic fields of both coils to make the central portion uniform can be applied to the measuring coil 6 as described later.

The latter measuring coil 6 is arranged so as to be able to measure the output signal induced by the AC external magnetic field in the predetermined measuring region 3 and its peripheral region 4. That is, the measurement coil 6 is designed to measure an output signal (measurement signal) induced by an AC external magnetic field in the measurement area 3 when the measurement sample 7 is present in the predetermined measurement area 3. It is composed of a coil and an external magnetic field canceling measuring coil capable of measuring an output signal (adjustment measuring signal) induced by an AC external magnetic field in a peripheral region 4 separated from the measuring region 3 by a predetermined distance ± α. ing. Moreover, the signal induced by the external magnetic field is removed by subtracting the adjustment measurement signal of the measurement coil for external magnetic field cancellation from the measurement signal of the main measurement coil, and only the net magnetic physical quantity measurement signal of the DUT 7 is extracted. It is configured to be able to.

FIG. 1 is an explanatory view showing the constitution and measurement signal of the AC electromagnetic induction sensor 1 according to the first embodiment. The first invention, the second invention, the fifth invention, the eighth invention and the thirteenth invention are shown in FIG. It can be used. When an AC external magnetic field is applied to the AC electromagnetic induction sensor 1, one of the output signals of the electromotive force induced in the measurement coils A and B becomes the measured signal and the other becomes the adjusted measurement signal. In FIG. 1, the output signals A ′, B ′ of the electromotive force induced in the measurement coils A, B are shown.
And a simulation of the measurement output signal B'-A 'that cancels the signal induced by the external magnetic field so that it becomes 0 V when there is no sample to be measured in the measurement coil B', and the actually manufactured measurement coils A, B A graph showing the measured data of the measured output signal B′-A ′, which is obtained by actually measuring the measured value using the, and cancels the signal induced by the external magnetic field is described. As shown in the figure, the simulation and the measured data are in agreement.
If the AC electromagnetic induction sensor 1 (thirteenth invention) shown in FIG. 1 is used, the signal induced by the external magnetic field can be canceled from the composite signal, and only the net magnetic physical quantity measurement signal of the DUT 7 is measured. It was confirmed that can be extracted.

FIG. 2 is an explanatory view showing the constitution and measurement signal of the AC electromagnetic induction sensor 1 according to the second embodiment. The first invention, the third invention, the sixth invention, the eighth invention, the ninth invention, 14th
It is used in the invention. In FIG. 2, an output signal of the electromotive force induced in the measurement coils A, B, C by applying an AC external magnetic field to the AC electromagnetic induction sensor 1 (measured signal B ′, adjusted measurement signal A ′, C ′), the adjustment measurement signal A ′ + C ′ for canceling induced in the measurement coil A + C for canceling the external magnetic field, and the external magnetic field so that the measurement sample 6 does not have the sample 7 to be measured to be 0V. 7 is a graph showing a simulation result as a result of calculating a measurement output signal B ′ − (A ′ + C ′) that cancels the signal induced by.

FIG. 3 shows the output signal of the electromotive force induced in the measuring coils A, B, C by applying an AC external magnetic field to the AC electromagnetic induction sensor 1 according to the second embodiment shown in FIG. It is a graph which shows the measured data of the measurement output signal B '-(A' + C ') which actually measured the measured signal B', the adjustment measurement signal A ', C'), and canceled the signal induced by the external magnetic field. . Also in this case, the simulation and the measured data match, and the AC electromagnetic induction sensor 1 according to the second embodiment
It was confirmed that by using (14th invention), only the net magnetic physical quantity measurement signal of the sample 7 to be measured can be extracted.

In the AC electromagnetic induction sensor 1 according to the second embodiment (the fourteenth invention), the external magnetic field canceling measurement coils A and C for obtaining the adjustment measurement signal are provided before and after the main measurement coil B for obtaining the measured signal. By disposing the two separately, the adjustment measurement signal induced by the AC external magnetic field in the peripheral region 4 of the measurement region 3 can be more accurately measured. AC electromagnetic induction sensor 1 according to the present invention (first
4 invention) is a coaxial cylinder type, is often measured in a state in which the sample 7 to be measured is moving, and has a directional magnetic field line, etc. This is because the adjustment measurement signal is measured in the peripheral areas 4 before and after the measurement area 3 because the arrangement allows the adjustment measurement signal induced by the AC external magnetic field to be measured most accurately. AC electromagnetic induction sensor 1 according to the second embodiment
The basic arrangement configuration of the measurement coil 6 is considered to be the most suitable and practical configuration as a method for removing the signal induced by the external magnetic field from the signal under measurement.

FIG. 4 shows the configuration of the AC electromagnetic induction sensor 1 according to the second embodiment shown in FIGS. 2 and 3 and the measuring coil A,
It is explanatory drawing which analyzed and displayed each measurement signal of the output signal (measured signal, adjustment measurement signal) of the electromotive force induced by B and C. The measurement signals A ′, B ′, C ′ of the measurement coils A, B, C for cleanly removing the signal induced by the external magnetic field from the signal under measurement, the adjustment conditions thereof, and the measurement coil A + C for canceling the external magnetic field are The state of the induced adjustment measurement signal A '+ C' for cancellation and the signal induced by the external magnetic field when there is no sample 7 to be measured in the measurement coil are canceled to 0 V, and the net magnetic physical quantity measurement signal B '-( 7 is a graph showing a simulation in which only A ′ + C ′) can be extracted.

FIG. 5 is an explanatory view showing the constitution and measurement signal of the AC electromagnetic induction sensor 1 according to the third embodiment. The first invention, the fourth invention, the seventh invention, the eighth invention, the tenth invention, First
It can be used for the second invention and the fifteenth invention. In FIG. 5, the measured signal obtained by adjusting the output / output signal of the electromotive force induced in the measurement coils A, B1, B2, C by applying an AC external magnetic field to the AC electromagnetic induction sensor 1. B '
(Combined signal of B1 '+ B2') and the adjustment measurement signal A '+ C' for cancellation induced by the measurement coil A + C for external magnetic field cancellation
And the adjusted measurement signal for cancellation A '+ C' is subtracted from the signal under measurement B '= B1' + B2 '(B1' + B2 ')-
A simulation graph showing the situation of (A '+ C') is described.

FIG. 6 shows an output signal of the electromotive force induced in the measurement coils A, B1, B2, and C by applying an AC external magnetic field to the AC electromagnetic induction sensor 1 shown in FIG. '+ B2', the adjustment measurement signal (A '+ C') is actually measured, and the adjustment measurement signal (A '+ C') is subtracted from the measured signal to cancel the signal induced by the external magnetic field.
Remaining net magnetic physical quantity measurement signal (B1 '+ B2')-
It is a graph which shows the measured data of (A '+ C'). Also in this case, the simulation and the measured data are almost the same,
AC electromagnetic induction sensor 1 of the third embodiment (15th invention)
It has been confirmed that only the net magnetic physical quantity measurement signal of the sample 7 to be measured can be extracted by using.

The measuring coil of the AC electromagnetic induction sensor 1 according to the third embodiment is composed of four main measuring coils B1 and B2 and external magnetic field canceling measuring coils A and C, and the number of measuring coils is increased. However, substantially the same method as in the second embodiment is used to subtract the adjustment measurement signal from the signal under measurement and cancel the signal induced by the external magnetic field.
In other words, the configuration of the measurement coil is such that the external measurement field canceling measurement coils A and C are provided before and after the main measurement coils B1 and B2 that obtain the measurement signal are separated by a predetermined distance to obtain the adjustment measurement signal. The main measurement coil for obtaining the signal is separated into two, B1 and B2, and these are arranged at a predetermined interval, and the magnetic field of both is combined (B1 + B2) to obtain the measured signal B ', which is the measurement area 3 It has been improved so that it becomes wide and uniform and stable. The improvement is that, as shown in FIG. 9, if the two coils are separated and placed close to each other, and the magnetic fields of the two coils are combined, the central portion becomes uniform and the output signal data to be selected is stable. Therefore, this method is applied to the main measurement coil.

As described above, the main characteristic of the AC electromagnetic induction sensor 1 according to the present invention is that the basic structure in which the AC external magnetic field applying coil 5 and the plurality of measuring coils 6 are combined as shown in each of the embodiments. By specifying the relationship of the arrangement positions, the signal to be measured in which the signal induced by the external magnetic field and the signal of the magnetic physical quantity of the sample to be measured 7 are combined by a single sensor integrated as a whole. And the adjustment measurement signal which is almost only the signal induced by the external magnetic field can be stably measured with high accuracy, and the adjustment measurement signal is removed from the obtained composite signal to obtain the net magnetic field. The point is that only the physical quantity measurement signal can be extracted. As a result, a stable and highly realistic magnetic physical quantity can be converted using the net magnetic physical quantity measurement signal as a basic measurement value.

Next, the inventors independently researched and developed an amplifier controller for a measurement signal obtained by using the AC electromagnetic induction sensor 1. In developing an amplifier controller for the measurement signal, the stability of the measurement signal against temperature changes, the linearity around the base point of the measurement output voltage should be improved, and the digitization of the circuit should not affect the temperature and magnetic field. The objective is to enable stable data calculation by a calculation method such as stabilization of the correction temperature and variation ratio.

As shown in FIG. 12, the amplifier controller of the measurement signal recognized as a constituent element of the present invention is an AC external magnetic field generating means 8 for applying a stable power source to the AC external magnetic field applying coil 5 to generate an AC external magnetic field. And measuring coil 6
By amplifying and rectifying the AC output voltage induced by, and converting it to a DC output voltage, a stable measurement signal is obtained while maintaining high accuracy even when the environmental temperature changes, and then the measurement signal is converted from analog to digital. Output signal measuring means 9 adapted to be digitized, operation means 10 for performing high-speed sampling data processing (calculation) of the digitized measurement signal by using a computer or the like, magnetic physical quantity obtained by the operation, It comprises an output means for discriminating and outputting the weight and other related data.

The inventors specifically made an amplifier controller for the measurement signal. The specific parts composition is
This is as shown in FIG. It is composed of two objects: an amplifier controller body designed and manufactured independently, and a stabilized power supply unit using a commercially available AC inverter.
The amplifier controller body includes an AC conversion unit,
The system power supply unit, the output signal measurement unit, the analog / digital conversion unit (A / D conversion unit), the high-speed sampling data processing unit, and the post-computation data output unit are included. In particular, since the prototype controller has a digital amplifier controller circuit, it has become possible to deal with temperature and magnetic field effects, and it has become possible to perform stable data calculation using arithmetic means such as temperature correction and stabilization of the variation ratio. . Note that the relationship between the basic constituent elements of the present invention and the parts configuration of the amplifier controller of the measurement signal that the inventors have specifically produced is as shown in FIG. The relationship between the two will be described below.

The AC external magnetic field generating means 8 is connected to the AC electromagnetic induction sensor 1 and applies an AC current to the AC external magnetic field applying coil 5 through a stable constant voltage constant frequency power source to generate an AC external magnetic field. It is configured so that it can be applied to the measurement region 3 and its peripheral region 4. In the specific example of FIG. 10, a household AC 100 is used.
Connect the outlet from the V power supply 8a to the stabilized power supply (A
A stable AC power source having a constant voltage and a constant frequency is formed by a C inverter), and a voltage is applied to the AC external magnetic field applying coil 5 via an AC converting unit in the amplifier controller.

The output signal measuring means 9 is connected to the AC electromagnetic induction sensor 1 and outputs the output signal (measured signal, adjusted measurement signal) of the electromotive force induced in the measuring coil 4 by the application of the AC external magnetic field. The measurement is performed, and the output signals (the signal under measurement, the adjusted measurement signal) are rectified and converted into a proper and stable DC signal, and the analog / digital conversion is performed to digitize the signal. In the specific example of FIG. 10, since the AC output voltage of the electromotive force generated in the measurement coil 6 is voltage-amplified in the measurement unit, detected and rectified, and further smoothed and rectified, the measurement signal is digitized in the analog / digital conversion unit. is there. FIG. 11 is an explanatory diagram for explaining a more detailed configuration and processing method of the measuring unit, which is composed of a voltage amplifying unit, a detection rectifying unit, and a smoothing rectifying unit, and a measurement AC signal from the measurement coil 6 is converted into a DC signal. Is shown. still,
As shown in FIG. 10, the power source for operating the measuring unit and the analog-digital converting unit that constitute the output signal measuring unit 9 is a system power source unit for adjusting a stable AC power source from the stabilized power source unit (AC inverter). Use what you did.

The calculation means 10 adjusts the output signals (measured signal, adjusted measurement signal) measured by the output signal measuring means 9 and converted into analog and digital values, and
It is configured so that signals induced by an external magnetic field can be removed from the measured composite signal to extract only the net magnetic physical quantity measurement signal, or a coefficient can be calculated, etc. ing. In a specific example, as shown in FIG. 10, the high-speed sampling processing section performs calculations such as adjusting or converting the digitized output signal as necessary, calculating a coefficient, and the like. The power source for operating the high-speed sampling processing unit that constitutes the arithmetic means 10 is a stable AC power source from the stabilized power source unit (AC inverter) as shown in FIG. Designed for dual use.

The output means 11 is such that at least the result of the magnetic physical quantity, weight, etc. of the sample to be measured calculated by the calculation means 10 can be output by the data output section. The specific output means 11 may be a CRT display system, a printer recording system, or a counting display device. Regarding the output content, not only the display of specific numerical values such as the magnetic physical quantity, weight, and mass of the sample 7 to be measured but also pass / fail judgment display corresponding to various standards may be performed. In addition, various intermediate or partial elements such as measured signal, adjusted measurement signal, coefficient, magnetic physical quantity measurement signal, applied voltage, weight, number of measurement samples, passage time, temperature, etc. Of course, the data may be selected and output. As a power source for operating the data output section constituting the output means 11, a stable AC power source from the stabilized power source section (AC inverter), which is adjusted by the system power source section, is used as shown in FIG. Designed to

The sample-to-be-measured supply / unloading means 12 is adapted to carry and supply the sample-to-be-measured 7 to a predetermined measurement region 3 of the AC electromagnetic induction sensor 1 and carry it out after the measurement. FIG. 13 is a front view showing a main part of a measuring apparatus which is a combination of the sample supply / carrying-out means 12 to be measured manufactured by the inventors and the AC electromagnetic induction sensor 1, and FIG. 14 is a side view of the same. In the figure, reference numeral 13 denotes an endless belt conveyor which conveys the sample 7 to be measured along a magnetic field direction through a measurement region in the AC electromagnetic induction sensor. In the embodiment, the belt conveyor type is shown as shown in FIGS. 10, 13 and 14, but needless to say, it is not limited to this.

Next, the inventors manufactured a measuring device by combining the concretely manufactured AC electromagnetic induction sensor 1, amplifier controller, sample-to-be-measured supply / unload means 12, etc., and used the first invention. , Second invention, third invention, fourth
An experiment was carried out to carry out the method of measuring the magnetic physical quantity of the sample to be measured by the AC electromagnetic induction method according to the invention.

Since the first invention is a basic invention of a common superordinate concept, specifically, an experiment for carrying out the second invention was first carried out. A magnetic physical quantity measuring device according to the fifth invention was prepared as a measuring device used for carrying out the second invention. That is,
The measuring apparatus having the structure shown in FIGS. 10 and 12 is equipped with the AC electromagnetic induction sensor of the thirteenth invention (see FIG. 1).

In the practical experiment, 12 kinds of work materials (6 kinds each with and without S30C annealing) were prepared, and an applied voltage of +9.073 V (AC) was applied to the AC external magnetic field applying coil 5 to obtain 0.5. It was measured while passing it at a speed of second / piece, and the peak value of the digitized one was selected and calculated based on this measured numerical value to calculate the magnetic physical quantity. Such measurement was performed as a repeated sampling test 100 times, the maximum value and the minimum value of the magnetic physical quantity measured and calculated as a result were calculated, and the average value was calculated. The variation ratio was 1.14 in the case without annealing. %. 1.16% with annealing
Met. As a result, the measuring method according to the present invention is based on the previously developed cylindrical electromagnetic induction sensor (Japanese Patent Application No. 5-176279).
It was confirmed that the measurement accuracy was highly accurate and stable even when compared with the variation ratio when using No.).

Next, the inventors prepared a measuring device according to the sixth aspect of the invention as described below, and carried out a practical experiment according to the third aspect of the invention. The prepared measuring device is shown in FIG.
The AC electromagnetic induction sensor 1 shown in FIG.
The fourteenth invention shown in FIGS. 2 and 3 was used for this. Specifically, the AC external magnetic field applying coil 5 is a coil bobbin having a length of 120 mm and a diameter of 80 mm and a coil wire wound 1120 times, and the measuring coil 6 has a length of 120 mm and a diameter of 6 mm.
At the center of the 8 mm coil bobbin, the main measurement coil B is wound 1600 times in a width of 40 mm, and then 25 mm before, the measurement coil A for the first external magnetic field cancellation is wound 1100 times in a width of 15 mm, and 25 mm ahead from the main measurement coil B. As the measurement coil C for canceling the second external magnetic field, a coil wound 1104 times was used. As a concrete implementation experiment of the third invention,
12 types of work materials (6 each for S30C with and without annealing)
Types), and add +9.8 to the AC external magnetic field applying coil 5.
An applied voltage of 88 V (AC) was applied, passage measurement was performed at a speed of 0.5 seconds / piece, a peak value was selected, digitized, and calculated to obtain a net magnetic physical quantity measurement signal. Such measurement was adopted as the repeated sampling data of 500 times, and as a result, the maximum value, the minimum value and the average value of the measured and calculated magnetic physical quantity measurement signal were obtained. 0.80%, 0.88% with annealing
Met. From these results, it was confirmed that the measurement method according to the present invention had higher measurement accuracy than the second invention, more stable measurement values, and higher practicality.

The results of the experiment for carrying out the third invention are shown in Table 1.
(No annealing) and Table 2 (with annealing). Further, FIG. 15 shows an average value of the above data in the work material.

[0089]

[Table 1]

[0090]

[Table 2]

Next, the inventors prepared a measuring device according to the seventh aspect of the invention as described below, and carried out a practical experiment according to the fourth aspect of the invention. The prepared measuring device is shown in FIG.
The configuration shown in FIG. 12 is used, and the AC type electromagnetic induction sensor 1 uses the fifteenth invention shown in FIGS. 5 and 6. Specifically, the AC external magnetic field applying coil 5 has a length of 140 m.
m, coil is 58 mm on a coil bobbin with a diameter of 140 mm
The width is 725 times and is wound at two places 24 mm apart. The measuring coil 6 has a length of 140 mm and a diameter of 82 m.
m coil bobbin as the first external magnetic field offsetting measurement coil A, wound 1033 times in a width of 20 mm, the first main measurement coil B1
Used as the second main measurement coil B2 having 800 turns of 6 mm width and the second external magnetic field offsetting measurement coil C having 1034 turns of 20 mm width. As a concrete implementation experiment of the fourth invention, 12 kinds of work materials (6 kinds each with and without S30C annealing) were prepared, and 704 mV (AC) was applied to the AC external magnetic field applying coil 5.
The applied voltage was applied, and the measurement was performed at a speed of 0.5 seconds / piece, and the peak value was selected, digitized, and calculated to calculate a magnetic physical quantity measurement signal. Such measurement was repeatedly sampled 500 times, and the average of the top 10 was adopted as the basic measurement data. As a result, the maximum value, the minimum value, and the average value of the measured and calculated magnetic physical quantity measurement signals were obtained. The variation ratios were 0.14% without annealing and 0.13% with annealing. . The method of sampling the measurement data is different from that of the second experiment because the test results show that the variation ratio is more stable. From the results, it was confirmed that the measurement method according to the present invention has higher measurement accuracy than the third and fourth inventions and the measured values are stable, and is highly practical.

The results of the experiment of the sixth invention are shown in Table 3.
(No annealing) and Table 4 (with annealing). Further, FIG. 16 shows the average value of each work material.

[0093]

[Table 3]

[0094]

[Table 4]

Next, the inventor uses a measuring device which is made by combining the sample-to-be-measured sample supplying and unloading means 12 and the like, which is made up of a prototype AC electromagnetic induction sensor 1 and an amplifier controller. Using the measuring apparatus of the twelfth invention, an experiment was conducted using the measuring apparatus to measure the magnetic physical quantity of the sample to be measured by the AC electromagnetic induction method according to the eighth invention, the ninth invention, and the tenth invention.

The eighth invention is a superordinate invention of the method for rapidly measuring the weight of the sample 7 to be measured by an alternating current electromagnetic induction method in a non-contact manner. The ninth invention and the tenth invention, It is a more specific invention. This eighth invention measures the weight based on the finding that the magnetic physical quantity and the weight of the sample 7 to be measured change in proportion to each other, and the net magnetic physical quantity is measured by the AC electromagnetic induction method. The signal is detected, and the weight is calculated by the weight calculation coefficient using the signal as a basic numerical signal. According to this method, the non-contact method enables quick weight measurement in a short time of 0.2 seconds / piece to 0.5 seconds / piece, and the variation ratio is 0.1 to 1.14. Stable weight measurement with high accuracy of%

As described above, the gravity measuring method according to the present invention is completely different from the conventional weight measuring method using the acceleration of gravity in the natural law. The feature is
The point is that the weight can be quickly measured without contact. In the case of the present invention, at a speed of 0.2 seconds / piece to 0.5 seconds / piece,
It can be measured with an accuracy of 0.4 / 1000 to 2/1000.
Although this is slightly less accurate than an electronic scale, the weight measurement can be performed in a non-contact manner in an extremely short time of 10 times or more. Therefore, the weight measuring method according to the present invention is a suitable measuring method for automatically measuring the weight of a product or material with considerably high accuracy without stopping the flow during the flow work. In particular, the present invention, the influence of peripheral devices, which is a technical problem of the electromagnetic induction method, the influence of temperature,
Even if the electromotive force fluctuates due to the influence of the local field, etc., the net magnetic physical quantity measurement signal is calculated by excluding these influences from the measurement output signal, so that a stable weight Made it possible to perform highly accurate measurements. As a result, the present invention has become a highly accurate and highly practical weight measuring method.

Next, the inventors conducted an experiment for carrying out the ninth invention. This experiment, after the implementation experiment of the third invention,
Using the same 12 kinds of work materials as the same measuring equipment as the present invention, apply a voltage of AC + 9.073V, measure the passage at a speed of 0.5 seconds / piece, select the peak value, digitize and calculate Then, the net magnetic physical quantity measurement signal was detected, and the weight was calculated by the weight calculation coefficient based on the detected signal. This was repeated 30 times and this was adopted as sampling data, and as a result, the maximum value, the minimum value and the average value of the measured weight were obtained. The variation ratio of the same weight measurement was 0.
21%, 0.19% with annealing, accuracy error is
It was ± 0.05 g.

Next, the inventors conducted an experiment for carrying out the tenth invention. In this experiment, after the implementation experiment of the fourth invention, 12 kinds of work materials same as the same measuring device as the same invention were prepared, AC + 9.888V voltage was applied, and passage measurement was performed at a speed of 0.5 seconds / piece. To select the peak value, digitize and calculate to detect the net magnetic physical quantity measurement signal,
Based on this, the weight was calculated by the weight calculation coefficient.
This was repeated 30 times and this was adopted as sampling data, and as a result, the maximum value, the minimum value and the average value of the measured weight were obtained. Table 5 and Table 6 show it.
The average variation error of the same weight measurement is 0.21 without annealing.
%, With annealing 0.19%, accuracy error is ±
It was 0.03 g.

[0100]

[Table 5]

[0101]

[Table 6]

The eleventh invention and the twelfth invention are a weight measuring device for a sample to be measured by a novel AC electromagnetic induction method. Specifically, the weight measuring apparatus according to the eleventh invention is equipped with the electromagnetic induction sensor according to the fourteenth invention shown in FIGS. 2 and 3 in the measuring apparatus shown in FIGS. 10 to 14, and similarly,
It is the first that the measuring apparatus shown in FIGS. 10 to 14 is equipped with the electromagnetic induction sensor according to the fifteenth invention shown in FIGS.
2 is a weight measuring device according to the invention. Since the detailed configuration has already been described, the description thereof is omitted here.

The thirteenth invention, the fourteenth invention, and the fifteenth invention are
This is an alternating-current electromagnetic induction sensor 1 for measurement used in the magnetic physical quantity measuring device and the weight measuring device. Since its schematic configuration has already been described, detailed description thereof is omitted here. The AC electromagnetic induction sensor 1 is characterized by the size and geometrical position of the measuring coil with respect to the AC external magnetic field applying coil 5. Checking the output signal, the best one was identified.

[0104]

The first and second aspects of the present invention include an AC electromagnetic induction sensor 1, an AC external magnetic field generating means 8, an output signal measuring means 9 and a computing means 10. A magnetic physical quantity measuring device for the sample to be measured according to is prepared, the measurement system of the prepared measuring device is adjusted in advance, and the sample to be measured 7 is present in a predetermined measurement region 3 of the AC electromagnetic induction sensor. An AC external magnetic field is applied, and the output signal of the electromotive force (measured signal, adjustment measurement signal) induced in the measurement coil 4 by this is measured by the output signal measuring means 9 and digitized, and this is calculated by the computing means 10. The adjustment measurement signal is subtracted from the signal under measurement to remove the signal induced by the external magnetic field, and the net magnetic physical quantity measurement signal for the magnetic material under measurement is detected. It is a measurement method for calculating the physical quantity.

This measuring method uses the law of electromagnetic induction,
The non-contact method reduces the magnetic physical quantity of the measured sample to 0.2
It has become possible to measure extremely rapidly with high accuracy, from seconds / piece to 0.5 seconds / piece.

In this measuring method, the signal induced by the external magnetic field is removed to detect the net magnetic physical quantity measurement signal for the sample to be measured, and the magnetic physical quantity of the sample to be measured is calculated based on this signal. Since it is a system, even if there is a flaw in the electromotive force caused by the influence of peripheral equipment, the influence of temperature, the influence of the local field, etc., it is excluded by canceling the signal due to these external magnetic fields, so the measurement accuracy is always high. The stable measurement value can be obtained by the method. Specifically, the inspection accuracy is 0.4 / 1000 to 2/1000, and the magnetic physical quantity of the sample to be measured can be stably measured with high reality. .

Further, according to the present invention, the net magnetic physical quantity of the sample to be measured can be found. This allows not only the measurement of the weight and the measurement of the mass to be calculated but also the selection of the weight and the mass of the magnetic metal, the determination of the sample to be measured. It is highly practical because it can be used to distinguish between dimensional differences, magnetic metal composition differences, heat treatment, metallurgical structure differences, hardness differences, scratches, and profiles.

The effects of the first and second inventions described above are also common to the second to eighth inventions.

The third invention is a method for measuring the magnetic physical quantity of a sample to be measured, which has the same basic principle as the first invention. In the present invention, unlike the second invention, the external magnetic field canceling measurement coil 5 is divided into two, a first coil and a second coil, and the measurement is performed from both front and rear directions with respect to the magnetic field lines in the measurement region. When the measurement is performed from both the front and rear directions with respect to the magnetic field lines in this way, even if some error occurs due to the position shift of the sample to be measured in the measurement region 3, both of them can average and cover the error. . In this way, the measurement accuracy of the adjustment measurement signal by the measurement coils A and C for canceling the external magnetic field is increased, and not only the measured value is stabilized, but also the cancellation of the AC external magnetic field becomes more complete, so that finally The measured value of the calculated magnetic physical quantity is more realistic than the conventional one, and further more realistic than the second invention.

A fourth invention is a method for measuring a magnetic physical quantity of a sample to be measured, to which the third invention and the seventh invention are applied. By preparing a measuring device to which the seventh invention is applied and subtracting the external magnetic field canceling output signal measured by the external magnetic field canceling measuring coils A and C from the measured signal synthesized by measuring with the main measuring coil B1 + B2, The signal induced by the AC external magnetic field is canceled, the net magnetic physical quantity measurement signal for the measured sample 7 is detected, and the magnetic physical quantity for the measured sample 7 is calculated based on this signal. Therefore, the method for measuring a magnetic physical quantity according to the present invention is a non-contact method and has a measurement accuracy of the third level.
It is possible to perform highly accurate and stable measurement at an extremely high speed (0.2 seconds / piece to 0.5 seconds / piece) more than the invention.

The fifth, sixth, and seventh inventions are measuring apparatuses for carrying out the measuring methods according to the second, fourth, and fifth inventions, respectively. This measuring device consists of a newly developed AC electromagnetic induction sensor 1 and an amplifier controller. It is a non-contact type AC electromagnetic induction system, and the magnetic physical quantity of the sample 7 to be measured can be stabilized very quickly and high. It can be measured with high accuracy and has a wide range of applications. Such a feature is that the AC electromagnetic induction sensor
A main measuring coil in which an AC external magnetic field applying coil and a measuring coil are integrated, and the output coil (measured signal) induced by the AC external magnetic field is measured in the measuring region. And an external magnetic field canceling measurement coil capable of measuring an output signal (adjustment measurement signal) induced by an AC external magnetic field in a peripheral region 4 separated from the measurement region 3 by a predetermined distance. The feature is that the signal under measurement and the adjusted measurement signal are obtained under the same environmental conditions. Moreover, in the amplifier controller, the measured signal is canceled by the adjusted measurement signal to eliminate the external magnetic field that creates unstable strain as much as possible, and the magnetic physical quantity with high reality is always maintained without being affected by the environmental temperature change. I was able to get it.

The eighth invention, the ninth invention, and the tenth invention are weight measurement methods for the sample to be measured to which the method for measuring the magnetic physical quantity of the sample to be measured by the AC electromagnetic induction method is applied. that is. An eleventh invention A twelfth invention is prepared, a signal induced by an AC external magnetic field is offset, a net magnetic physical quantity output signal regarding a sample to be measured is detected, and the weight measurement device is specified based on this. This is a method of calculating the weight of the sample 7 to be measured using the weight calculation coefficient.

The weight measuring method according to the present invention is a non-contact method like the fourth invention, and the measurement accuracy is high (0.4 / 10).
(00 to 2/1000) and stable weight measurement can be performed at extremely high speed (0.2 seconds / piece to 0.5 seconds / piece). In this way, the epoch-making measurement method is capable of performing high-speed measurement and high-accuracy measurement in a non-contact method, which was not possible with the conventional weight measurement method using gravity. Is. As a result, this weight measuring method is suitable as a weight measuring technique for automation and labor saving, which has been considered difficult in the past, to be incorporated into the assembly line work in the manufacturing industry, and is highly practical.

The eleventh invention and the twelfth invention are a weight measuring device for carrying out a weight measuring method of a sample to be measured to which a method of measuring a magnetic physical quantity of the sample to be measured by an AC electromagnetic induction method is applied. The weight measuring device is a device completed by using a non-contact type AC electromagnetic induction type magnetic physical quantity measuring device, and is capable of high-speed measurement, high-accuracy measurement, and measurement with excellent stability. In particular, even if there are variations in electromotive force caused by the influence of peripheral devices, temperature influences, local influences, etc., which are technical issues of the AC electromagnetic induction method, the measured sample is excluded by canceling out these influences. Since the net magnetic physical quantity measurement signal of can be specified and the weight is measured based on this, there is a great feature in that the reality is high.

The thirteenth invention, the fourteenth invention, and the fifteenth invention are
AC measuring electromagnetic induction sensor. In this AC electromagnetic induction sensor, an AC external magnetic field applying coil and a measuring coil are integrated into one detecting coil, and the structure of the measuring coil is an output signal (signal to be measured) induced by the AC external magnetic field in the measurement region. And a measurement coil for external magnetic field cancellation, which is capable of measuring an output signal (adjustment measurement signal) induced by an AC external magnetic field in a peripheral region separated from the measurement region by a predetermined distance. It is characterized in that the signal to be measured and the adjusted measurement signal can be obtained under the same environmental conditions by using a coil.

In particular, in the fourteenth aspect of the invention, a measuring AC electromagnetic induction sensor is provided with a measuring coil for canceling the external magnetic field.
It is divided into two and is configured to measure from both the front and back directions of the measurement area, which can cover the error due to the position deviation of the sample to be measured in the measurement area. The measurement accuracy of the signal goes up,
Not only will the measured value be stable, but the cancellation of the AC external magnetic field will be more complete, so the calculated magnetic physical quantity measurement signal will be more accurate than before, and the final calculated based on this. The reality of magnetic physical quantity and weight is high.

The fifteenth invention is an AC electromagnetic induction sensor for measurement which is a further improvement of the fourteenth invention. This improved AC electromagnetic induction sensor not only divides the external magnetic field canceling measurement coil into the first and second measurement coils, but also the main measurement coil B has the first main measurement coil B1 and the second main measurement coil.
It is configured so that a stable signal to be measured can be obtained with high accuracy by dividing it into two parts B2 and synthesizing the magnetic fields generated by them. As described above, the measurement accuracy of the measured signal and the adjustment measurement signal obtained from the improved AC electromagnetic induction sensor is improved, and the measured value is stable. Therefore, the calculated net magnetic physical quantity measurement signal becomes more realistic than the conventional sensor.

[Brief description of drawings]

FIG. 1 is an explanatory view showing a configuration of an AC electromagnetic induction sensor according to a thirteenth invention, a measured signal obtained by measuring an output signal of an electromotive force induced in a measurement coil, an adjustment measurement signal, and a net magnetic physical quantity measurement signal. It is a graph explanatory drawing of the simulation which shows and, and actual measurement data.

FIG. 2 is an explanatory view showing a configuration of an AC electromagnetic induction sensor according to a fourteenth aspect of the present invention, a measured signal obtained by measuring an output signal of an electromotive force induced in a measurement coil, an adjustment measurement signal, and a net magnetic physical quantity measurement signal. It is a graph explanatory drawing of the simulation which shows and.

FIG. 3 is a graph explanatory view of actual measurement data showing a net magnetic physical quantity measurement signal measured by a measurement coil of an AC electromagnetic induction sensor according to a fourteenth invention.

FIG. 4 is an explanatory diagram showing a configuration of an AC electromagnetic induction sensor according to a fourteenth aspect of the present invention, a measured signal obtained by measuring an output signal of an electromotive force induced in a measurement coil, an adjustment measurement signal, and a net magnetic physical quantity measurement signal. It is a graph explanatory view of the simulation which displayed the reason why it is possible to analyze and to obtain a net magnetic physical quantity measurement signal.

FIG. 5 is an explanatory diagram showing a configuration of an improved AC electromagnetic induction sensor according to a fifteenth aspect of the invention, a measured signal obtained by measuring an output signal of an electromotive force induced in a measurement coil, an adjustment measurement signal, and a net magnetic physical quantity. It is a graph explanatory view of a simulation showing a measurement signal.

FIG. 6 is a graph explanatory view of actual measurement data showing a net magnetic physical quantity measurement signal measured by a measurement coil of the AC electromagnetic induction sensor according to the fifteenth invention.

FIG. 7 is a perspective view showing an embodiment of an AC electromagnetic induction sensor according to the present invention.

FIG. 8 is a graph explanatory diagram of a simulation showing a configuration of a coil and an output signal generated in order to make a magnetic field generated by an AC external magnetic field applying coil uniform in a measurement region.

FIG. 9 is a graph explanatory diagram of the simulation showing the configuration of the coil and the output signal generated in another example for making the magnetic field generated by the AC external magnetic field applying coil uniform in the measurement region.

FIG. 10 is an explanatory diagram showing a component configuration in an example of a specifically manufactured measuring apparatus.

FIG. 11 is an explanatory view of a main part in which a measuring section of the measuring device shown in FIG. 11 is enlarged.

FIG. 12 is an explanatory diagram showing a technical configuration of a measuring apparatus according to the present invention.

FIG. 13 is a front view showing a main part of a measuring device manufactured by combining an AC electromagnetic induction sensor according to the present invention and a measured sample supply / unloading means.

FIG. 14 is a side view showing a main part of a measuring device manufactured by combining an AC electromagnetic induction sensor according to the present invention with a sample supply / carrying means for measurement.

FIG. 15 is a graph showing a measurement result of a net magnetic physical quantity measurement signal of the AC electromagnetic induction sensor according to the fourteenth invention.

FIG. 16 is a graph showing a measurement result of a net magnetic physical quantity measurement signal of the AC electromagnetic induction sensor according to the fifteenth invention.

[Explanation of main signs]

 1: AC electromagnetic induction sensor 3: Measuring area 4: Peripheral area 5: AC external magnetic field applying coil 6: Measuring coil A: External magnetic field offset measuring coil B: Main measuring coil C: External magnetic field offset measuring coil 7: Target Measurement sample 8: AC external magnetic field generation means 9: Output signal measurement means 10: Calculation means 11: Output means 12: Measured sample supply / discharge means

Claims (15)

[Claims] 1. An AC electromagnetic induction sensor 1 comprising an AC external magnetic field applying coil 5 and a measuring coil 6 is prepared, and a sample 7 to be measured is placed along a direction of a magnetic field produced by the AC external magnetic field applying coil 5. By passing it, the magnetic field associated with the phase change of the alternating current is changed, thereby inducing an electromotive force in the measuring coil 6, and the sum of the signal induced by the alternating external magnetic field and the signal of the magnetic physical quantity related to the sample to be measured. After measuring a composite signal as the signal under test, the signal induced by the external magnetic field is removed, the measurement signal of the net magnetic physical quantity of the material under test is detected, and this is digitized as the underlying measurement signal. Convert it to a numerical signal,
A method for measuring a magnetic physical quantity of a sample to be measured by an AC electromagnetic induction method, wherein the numerical signal is multiplied by a magnetic physical quantity conversion coefficient to calculate a magnetic physical quantity. 2. A first means: a measuring device comprising an AC electromagnetic induction sensor 1, an AC external magnetic field generating means 8, an output signal measuring means 9 and a computing means 10 configured as described below. To prepare. In the AC electromagnetic induction sensor 1, the AC external magnetic field generated when an AC current is applied is applied to the measurement region 3 and its peripheral region 4 having a size that encloses the sample 7 to be measured, and further, the measurement region 3 and its periphery. An AC external magnetic field applying coil 5 set so that the magnetic field distribution is uniform within the range of the area 4, and an output signal induced by the AC external magnetic field in the predetermined measurement area 3 and its peripheral area 4 is measured. And a measurement coil 6 that is arranged so that the measurement coil 6 can measure when the sample 7 to be measured is present in a predetermined measurement region 3.
In the main measurement coil B, which is capable of measuring the output signal (signal to be measured) φ _B (X) induced by the AC external magnetic field at, and the AC in the peripheral area 4 separated from the measurement area 3 by a predetermined distance ± α. And an external magnetic field canceling measuring coil A capable of measuring an output signal (adjustment measuring signal) φ _A (X ± a) induced by an external magnetic field. The AC external magnetic field is connected to the AC electromagnetic induction sensor 1 and an AC external magnetic field is applied to the measurement region 3 and its peripheral region 4 by passing an AC current through the AC external magnetic field applying coil 5. The output signal measuring means 9 is connected to the AC electromagnetic induction sensor 1 and measures an output signal (measured signal, adjusted measurement signal) of the electromotive force induced in the measurement coil 4 by applying an AC external magnetic field. Appropriate ones are selected from the output signals (measured signal, adjusted measurement signal) and configured so that they can be digitized, and the arithmetic means 10 is the measured and digitized output signal (measured signal, adjusted measurement signal). Can be adjusted and calculated as necessary. Second means: The measuring system of the measuring apparatus is adjusted in advance so that the following is satisfied. The output signal (measured signal) φ _B (X) measured by the main measurement coil B and the output signal (adjustment measurement signal) φ (X ± a) measured by the measurement coil A for external magnetic field cancellation are AC external Since it is recognized as a composite signal as the sum of the output signal W (X) induced by the magnetic field and the output signal M (X) of the magnetic physical quantity related to the sample 5 to be measured, φ _B (X) = α (W _B (X) + M _B (X)) φ _A (X ± a) = δ (W _A (X + a) + M _A (X + a)) (where α and δ are constants for adjustment Then, it is a coefficient proportional to the amplification factor and the number of turns of the coil when an amplifier is inserted in the middle.) In the measurement system of the above-mentioned measuring apparatus, the coefficients α and δ are used as adjustment factors in advance so that adjust. When the sample to be measured 7 is in the measurement region 3, the measurement sensitivity of the main measurement coil A is adjusted to be a substantially uniform space in the measurement region 3, and M _B (X) ≈constant Is not in the measurement region 3, the signal values W _B (X) and W _A (X ±) induced by the AC external magnetic field measured by the main measurement coil B and the external magnetic field cancellation measurement coil A are measured.
aW _B (X) = δW _A (X ± a) When the sample to be measured 7 is present in the measurement area 3, the sample to be measured measured with the external magnetic field canceling measurement coil A 7. The signal value M _A (X ± a) of the magnetic physical quantity related to 7 is measured by the main measurement coil B, and the signal value M of the magnetic physical quantity related to the measured sample 7 is measured.
_It is adjusted so that it is constantly smaller than _B (X) by a predetermined ratio ε. _{εM B (X) = M A} (X ± a), ε <1 / Σ third means: the alternating current using an electromagnetic induction sensor 1 and AC external magnetic field generating means 8 and the output signal measuring unit 9, a predetermined When the sample 7 to be measured is present in the measurement area 3, an AC current is applied to the AC external magnetic field applying coil 5 to apply an AC external magnetic field, and at this time, a signal to be measured induced by the AC external magnetic field in the measurement area 3 (Composite signal, which is the sum of the signal induced by the AC external magnetic field and the signal of the magnetic physical quantity related to the sample to be measured) φ _B (X) is measured by the main measurement coil B, and φ _B (X) = α (W _B (X) + M _B (X)) An adjustment measurement signal induced by an AC external magnetic field in a peripheral region 4 separated from the measurement region 3 for a predetermined period (a signal induced by the AC external magnetic field and a magnetic field related to the sample to be measured). Composite signal that is the sum of physical quantity signals) φ _A (X ± a) Is measured by the measuring coil A for canceling the external magnetic field. _{φ A (X ± a) =} δ (W A (X ± a) + M A (X ± a)) 4 means: signal and the induced by the measured signal (AC external magnetic field by using an arithmetic unit 10 Adjusted measurement signal from φ _B (X) (composite signal that is the sum of the signals of the magnetic physical quantity related to the measurement sample) (composite signal that is the sum of the signal induced by the AC external magnetic field and the signal of the magnetic physical quantity related to the measured sample)
φ _A (X ± a) is subtracted to cancel the signal induced by the AC external magnetic field, and the signal of the net magnetic physical quantity related to the sample 7 to be measured is proportional to the predetermined coefficient θ. Detect as _{T. φ T = φ B (X)} -φ A (X ± a) = α (W B (X) + M B (X)) - δ (W A (X ± a) + M A (X ± a)) αW B (X) = from being adjusted to _{δW a (X ± a),} αW B (X) -δW a (X ± a) = 0 and are offset _{= αM B (X) -δM a} (X ± a _{) εM B (X) = M} a (X ± a), ε <1 / from being adjusted to _{Σ = αM B (X) -δεM} B (X) = (α-δε) M B (X) α , Δ, ε are all predetermined coefficients, (α-δε) can be replaced with the predetermined coefficient θ. Therefore, φ _T = θM _B (X), and the output is detected as a measurement signal proportional to M _B (X). Fifth means: magnetic physical quantity measuring signal Esufai _T of Known standard sample S authentic magnetic physical quantity SM _B (X), measured and calculated in the same measuring method as the measured sample 7 with the measuring device detecting a magnetic physical quantity measuring signal Esufai _T of the standard sample S, for identifying the coefficients ψ from the standard sample S magnetic physical quantity measuring signal Esufai _T and Known authentic magnetic physical quantity SM _B of (X) by . _{ψ = Sφ T / SM B (} X) (Sφ T, since both the SM _B (X) is specifically quantified, also quantify [psi.) The sixth means: using said operation means 10 5 The magnetic physical quantity of the sample 7 to be measured is calculated from the magnetic physical quantity measurement signal φ _T relating to the sample 7 to be measured detected by the means using the specified coefficient ψ. M _B (X) = φ _T / φ The method for measuring the magnetic physical quantity of the sample to be measured by the alternating-current electromagnetic induction method, characterized in that the above first to sixth means are performed. 3. A first means: a measuring device comprising an AC electromagnetic induction sensor 1, an AC external magnetic field generating means 8, an output signal measuring means 9 and a computing means 10 configured as described below. To prepare. In the measurement device, an AC external magnetic field generated when an AC current is applied is applied to a measurement region 3 and its peripheral region 4 having a size that wraps the sample 7 to be measured,
Moreover, the AC external magnetic field applying coil 5 is set so that the magnetic field distribution is uniform within the measurement region 3 and its peripheral region 4, and the AC external magnetic field in the predetermined measurement region 3 and its peripheral region 4. And a measuring coil 6 arranged so as to measure an output signal induced by the measuring coil 6. When the measured sample 7 is present in a predetermined measuring region 3, the measuring coil 6 has an alternating current in the measuring region 3. Output signal induced by external magnetic field (measured signal) φ _B (X)
And a main measurement coil B that measures the output signal (adjustment measurement signal) φ _Ac (X ± a) induced by an AC external magnetic field at a position ± α separated from the measurement region 3 by a predetermined distance. And a measuring coil AC for canceling the external magnetic field. The measuring coil AC for canceling the external magnetic field is an output signal (first adjustment measurement) induced by an AC external magnetic field at a position + α separated from the measuring region 3 by a predetermined distance in the forward direction of the magnetic field lines. Signal) _A first external magnetic field canceling measuring coil A for measuring φ _A (X + a), and an output induced by an AC external magnetic field at a position -α which is separated from the measuring region 3 by a predetermined distance in the rear direction of the magnetic field lines. An electromagnetic induction sensor 1 including a second magnetic field offsetting measurement coil C for measuring a signal (second adjustment measurement signal) φ _C (X-a) and the AC electromagnetic induction sensor 1, and an AC external Magnetic field application coil An AC external magnetic field generating means 8 configured to apply an AC external magnetic field to the measurement region 3 and its peripheral region 4 by passing an AC current through 5, is connected to the AC electromagnetic induction sensor 1,
The electromotive force output signal (measurement signal, adjustment measurement signal) induced in the measurement coil 4 by the application of the AC external magnetic field is measured, and a proper one is selected from the output signals (measurement signal, adjustment measurement signal). At least the output signal measuring means 9 configured so as to be digitized and the computing means 10 capable of adjusting the measured and digitized output signal (measured signal, adjusted measurement signal) and computing as necessary. It is an equipped device. Second means: The measuring system of the measuring device is adjusted in advance so that the following items (1) to (4) are satisfied. The main measurement coil B
Output signal (measured signal) φ _B (X) and the output signal measured by the first external magnetic field cancellation measurement coil A (first adjustment measurement signal) φ _A (X + a) and the second external Output signal measured by the measurement coil C for magnetic field cancellation (second adjustment measurement signal) φ _C (X-
a) is the output signal W (X) induced by the AC external magnetic field
And the output signal M (X) of the magnetic physical quantity related to the measured sample 7
Is expressed as the following composite signal, φ _B (X) = α (W _B (X) + M _B (X)) φ _A (X + a) = β (W _A (X + a) _{+ M a (X + a)} ) φ C (X-a) = γ (W C (X-a) + M C (X-a)) ( although, alpha, beta, gamma is a constant for adjustment, middle It is a coefficient that is proportional to the amplification factor and the number of turns of the coil when an amplifier is inserted in.) Using the adjustment constants α, β, and γ as adjustment factors, make sure that the measurement system of the measurement coil 6 satisfies the following items in advance. Adjust and set to. When the sample 7 to be measured is located in the predetermined measurement region 3, the measurement sensitivity is adjusted to be a substantially uniform space in the predetermined measurement region 3, and M _B (X) ≈constant main measurement coil B The output signal φ _B (X) of the magnetic physical quantity related to the sample to be measured measured in 1. is almost the output signal W _A (X + a) induced by the AC external magnetic field measured by the first external magnetic field offsetting measurement coil A. ), And W _B (X) = 2W _A (X + a) and the output signal W _A (X + a) induced by the AC external magnetic field measured by the first external magnetic field cancellation measuring coil A The output signal W _C (X-a) induced by the AC external magnetic field measured by the second external magnetic field offsetting measurement coil C is adjusted to be equal, and W _A (X + a) = W _C (X -a) Output signal of the magnetic physical quantity related to the sample to be measured 7 measured by the first measuring coil A for canceling the external magnetic field Adjusted to _A (X + a) and the second external output signal of the magnetic field canceling measuring coil C and magnetically physical quantity related to the measurement sample 7 measured in M _C (X-a) are equal, M _A ( X + a) = M _C (X-a) When the measured sample 7 is present in the measurement region 3, the output signal M _A (of the magnetic physical quantity relating to the measured sample measured by the first external magnetic field cancellation measuring coil _A ) X + a) is adjusted so as to be constantly reduced by a predetermined ratio ε compared with the output signal M _B (X) of the magnetic physical quantity related to the sample to be measured measured by the main measurement coil B. _{εM B (X) = M A} (X + a), ε <1 / Σ third means: the alternating current using an electromagnetic induction sensor 1 and AC external magnetic field generating means 8 and the output signal measuring unit 9, a predetermined When the sample 7 to be measured is present in the measurement region 3, an alternating current is applied to the alternating external magnetic field applying coil 3 to apply an alternating external magnetic field, and the main measuring coil B measures the measured signal φ _B (X). φ _B (X) = α (W _B (X) + M _B (X)) The first adjustment measurement signal φ _A (X + a) is measured by the first external magnetic field canceling measurement coil A, and the second external magnetic field is measured. The second adjustment measurement signal φ _C (X-a) is measured by the offset measurement coil C. φ _A (X + a) = β (W _A (X + a) + M _A (X + a)) φ _C (X-a) = γ (W _C (X-a) + M _C (X-a)) Fourth means: the first adjustment measurement signal φ _A (X + a) output by the external magnetic field cancellation measurement coils A and C, and the second adjustment measurement signal φ
Output signal φ _A (X + a) for external magnetic field cancellation by adding _C (X-a)
+ Φ _C (X-a) values and _{without, φ A (X + a)} + φ C (X-a) = β (W A (X + a) + M A (X + a)
) + Γ (W _C (X-a) + M _C (X-a)) From the measured signal φ _B (X) measured by the main measurement coil B,
By subtracting the external magnetic field canceling output signal φ _A (X + a) + φ _C (X-a) value measured by the external magnetic field canceling measuring coils A and C, the signal induced by the AC external magnetic field is canceled. , The net magnetic physical quantity of the measured sample 7 is detected as a magnetic physical quantity output signal φ _T proportional to a predetermined coefficient κ. _{φ T = φ B (X)} - (φ A (X + a) + φ C (X-a)) = α (W B (X) + M B (X)) - {β (W A (X + a) _{+ M A (X + a)} ) + γ (W C (X-a) + M C (X-a)} = αW B (X) - {β (W A (X + a) + γW C (X-a)} _{+ αM B (X) - {} βM a (X + a) + γM C (X-a)} adjust this time _{W B (X) = 2W a} (X + a) Since α ≒ β + γ and, W _a (X + Since a) = W _C (X-a) and M _A (X + a) = M _C (X-a), β ≈ γ is adjusted, so αW _B (X)-{β (WA (X _{A + a) + γ (W C} (X-a)} ≒ 0 and _{offset, = αM B (X) -} {βM a (X + a) + γM C (X-a)} = αM B (X) -2M _{a (X + a) = α} (M B (X) -2εM B (X)) = α (1-2ε) M B (X) α (1-2ε) because substituted in the coefficient kappa, phi _T = κM _B (X), and the magnetic physical quantity output signal phi _T is detected as a signal proportional to M _B (X) fifth means:. it has been found in the authentic magnetic physical quantity SM _B (X) The magnetic physical quantity measuring signal Esufai _T quasi sample S, the magnetic physical quantity measuring signal Esufai _T of the standard sample S by measuring calculated in the same measuring method as the measured sample 7 with the measuring device
The detected, the detected magnetic physical quantity measuring signal Esufai _T and Known authentic magnetic physical quantity SM _B of the standard sample S (X)
From the above, the coefficient λ is specified. _{λ = Sφ T / SM B (} X) (Sφ T, since both the SM _B (X) is specifically quantified, also quantify lambda.) Sixth means: using said operation means 10 5 The magnetic physical quantity of the sample 7 to be measured is calculated from the magnetic physical quantity measurement signal φ _T relating to the sample 7 to be measured detected by the means using the specified coefficient λ. M _B (X) = φ _T / λ The method for measuring the magnetic physical quantity of the sample to be measured by the AC electromagnetic induction method is characterized in that the first to sixth means are performed. 4. A measuring apparatus is provided in which the AC electromagnetic induction sensor 1 described in the first means of claim 3 is replaced with an improved AC electromagnetic induction sensor 1 configured as follows. In the improved AC electromagnetic induction sensor 1, an AC external magnetic field induced when an AC current is applied is applied to a measurement region 3 and its peripheral region 4 having a size that encloses the sample 7 to be measured, and the measurement region 3 and An AC external magnetic field applying coil 5 whose magnetic field distribution is set to be uniform within the peripheral region 4, and an output signal induced by the AC external magnetic field in the predetermined measurement region 3 and its peripheral region 4. And a measurement coil 6 arranged so as to be able to measure the measurement target. The measurement coil 6 measures the sample 7 to be measured in the measurement region 3 when the sample 7 is measured in the measurement region 3. Output signal (adjustment measurement signal) φ _Ac (X ± a) induced by an AC external magnetic field at a position ± α that is separated from the main measurement coil B that can measure the signal φ _B (X) and the measurement area 3 by a predetermined distance ) Of the external magnetic field canceling measurement coil AC, and the main measurement coil B further includes a first main measurement coil B1 located in front of the magnetic field lines in the measurement area 3 and a second main measurement coil located in the rear. The two main measurement coils B2 are arranged so as to be separated from each other by a predetermined distance, and the measured signal φ _B (X) induced by the AC external magnetic field in the measurement region 3 is the first main measurement coil. The magnetic field of B1 and the second main measuring coil B2 is configured to be able to be measured as an output signal that is combined, and the external magnetic field canceling measuring coil AC is isolated from the measuring region 3 in the front direction of the magnetic field lines for a predetermined period. _A first external magnetic field offsetting measurement coil A for measuring an output signal (adjustment measurement signal) φ _A (X + a) induced by an AC external magnetic field at a position + α, and a predetermined direction in the backward direction of the magnetic field line from the measurement region 3 concerned. At a position -α And a induced output signal the output signal (adjusted measurement signal) φ _C (X-a) and the second magnetic field canceling the measurement coil C to measure the alternating external magnetic field Te. Then, the second means to the sixth means described in claim 3 are sequentially performed, and a method of measuring a magnetic physical quantity of a sample to be measured by an alternating-current electromagnetic induction method. 5. An AC external magnetic field generated when an AC current is applied is applied to a measurement region 3 and its peripheral region 4 having a size that encloses the sample 7 to be measured, and moreover, the range of the measurement region 3 and its peripheral region 4 In order to measure the output signal induced by the AC external magnetic field in the AC external magnetic field applying coil 5 in which the magnetic field distribution is set to be uniform, and in the predetermined measurement area 3 and its peripheral area 4. The measuring coil 6 is provided, and the measuring coil 6 is
When the sample to be measured 7 is present in the predetermined measurement area 3, the main measurement coil B capable of measuring the output signal (signal to be measured) φ _B (X) induced by the AC external magnetic field in the measurement area 3
And an external magnetic field canceling measurement coil A capable of measuring an output signal (adjustment measurement signal) φ _A (X ± a) induced by an AC external magnetic field at a position separated from the measurement region 3 by a predetermined distance ± α. An alternating current electromagnetic induction sensor 1 configured to be connected to the alternating current electromagnetic induction sensor 1,
An AC external magnetic field generating means 8 configured to apply an AC external magnetic field to the measurement region 3 and its peripheral region 4 by causing an AC current to flow through the AC external magnetic field applying coil 5, and the AC electromagnetic induction sensor 1. And an output signal measuring means 9 for measuring and quantifying the output signal (measured signal, adjustment measurement signal) of the electromotive force induced in the measurement coil 4 by applying an AC external magnetic field. Calculating means 10 capable of adjusting the converted output signal (measured signal, adjusted measurement signal) and calculating as necessary, and at least a magnetic physical quantity of the measured sample calculated by the calculating means 10. And an output means 11 capable of outputting a magnetic physical quantity of the sample to be measured by an AC electromagnetic induction method. 6. An AC external magnetic field induced when an AC current is applied is applied to a measurement region 3 and its peripheral region 4 having a size that encloses the sample 7 to be measured, and moreover, the range of the measurement region 3 and its peripheral region 4 In order to measure the output signal induced by the AC external magnetic field in the AC external magnetic field applying coil 5 in which the magnetic field distribution is set to be uniform, and in the predetermined measurement area 3 and its peripheral area 4. The measuring coil 6 is provided, and the measuring coil 6 is
When the sample to be measured 7 is present in the predetermined measurement area 3, the main measurement coil B for measuring the output signal (signal to be measured) φ _B (X) induced by the AC external magnetic field in the measurement area 3
And an external magnetic field canceling measuring coil AC for measuring an output signal (adjustment measuring signal) φ _Ac (X ± a) induced by an AC external magnetic field at a position ± α separated from the measurement region 3 by a predetermined distance. , The measuring coil A for canceling the external magnetic field
C is a first external device that measures an output signal (first adjustment measurement signal) φ _A (X + a) induced by an AC external magnetic field at a position + α that is separated from the measurement region 3 in the forward direction of the magnetic field lines by a predetermined distance. An output signal (second adjustment measurement signal) φ _C (X-a) induced by an AC external magnetic field at a position −α that is separated from the measurement region 3 in the rear direction of the magnetic field lines by a predetermined distance from the measurement coil A for magnetic field cancellation. AC electromagnetic induction sensor 1 composed of a second magnetic field offsetting measurement coil C for measuring and an AC external magnetic field applying coil 5 by connecting an AC current to the AC external magnetic field applying coil 5. An AC external magnetic field generating means 8 configured to apply a magnetic field to the measurement area 3 and its peripheral area 4 and the AC electromagnetic induction sensor 1 are connected to each other, and the AC external magnetic field is applied to the measurement coil 4. The output signal (measured signal, adjusted measurement signal) of the electromotive force to be measured and digitized, and the measured and digitized output signal (measured signal, adjusted measurement signal). Computation means 10 adjusted so that computation can be performed as needed, and output means 11 capable of outputting at least the magnetic physical quantity of the sample to be measured computed by the computation means 10 were provided. An apparatus for measuring a magnetic physical quantity of a sample to be measured by an alternating-current electromagnetic induction method characterized by the above. 7. An AC external magnetic field induced when an AC current is applied is applied to a measurement region 3 and its peripheral region 4 having a size enclosing a sample 7 to be measured, and moreover, the range of the measurement region 3 and its peripheral region 4 In order to measure the output signal induced by the AC external magnetic field in the AC external magnetic field applying coil 5 in which the magnetic field distribution is set to be uniform, and in the predetermined measurement area 3 and its peripheral area 4. The measuring coil 6 is provided, and the measuring coil 6 is
When the measured sample 7 is present in the measurement area 3, the measured signal φ induced by the AC external magnetic field in the measurement area 3
_The output signal (adjustment measurement signal) φ _Ac (X ± a) induced by the AC external magnetic field is measured at a position ± α which is separated from the main measurement coil B capable of measuring _B (X) and the measurement area 3 by a predetermined distance. The main measurement coil B is composed of an external magnetic field canceling measurement coil AC, and the main measurement coil B further includes a first main measurement coil B1 located in front of the magnetic field lines in the measurement region 3 and a second main measurement coil located behind. B2 and the second main measurement coil B1 are separated from each other by a predetermined distance, and the measured signal φ _B (X) induced by the AC external magnetic field in the measurement region 3 is The external magnetic field canceling measuring coil AC is configured so that it can be measured as an output signal obtained by combining the magnetic fields of the main measuring coil B2. Induced by an external magnetic field Output signal (adjusted measurement signal) φ _A (X + a) and the first external magnetic field canceling the measurement coil A of measuring, AC outside in a position -α spaced a predetermined distance in the direction following the magnetic field lines from the measurement area 3 An improved AC electromagnetic induction sensor 1 comprising a second magnetic field offsetting measurement coil C for measuring the output signal (adjustment measurement signal) φ _C (X-a) induced by a magnetic field, and An AC external magnetic field connected to the improved AC electromagnetic induction sensor 1 and configured to apply an AC external magnetic field to the measurement region 3 and its peripheral region 4 by passing an AC current through the AC external magnetic field applying coil 5. The output signal (measured signal, adjustment measurement signal) of the electromotive force induced in the measurement coil 4 by the application of the AC external magnetic field is measured and digitized by connecting to the generating means 8 and the improved AC electromagnetic induction sensor 1. obtain Unishi was output signal measuring unit 9, the measured digitized output signal (signal to be measured, adjusting the measurement signal) and calculating means 10 to be able to be adjusted as required operation,
An output device 11 capable of outputting at least the magnetic physical quantity of the sample to be measured calculated by the calculating means 10, and an apparatus for measuring a magnetic physical quantity of a sample to be measured by an AC electromagnetic induction method. . 8. An AC electromagnetic induction sensor 1 composed of an AC external magnetic field applying coil 5 and a measuring coil 6 is prepared, and a sample 7 to be measured is placed along a direction of a magnetic field produced by the AC external magnetic field applying coil 5. By passing it, the magnetic field associated with the phase change of the alternating current is changed, thereby inducing an electromotive force in the measuring coil 6, and the sum of the signal induced by the alternating external magnetic field and the signal of the magnetic physical quantity related to the sample to be measured. After measuring a composite signal as the signal under test, the signal induced by the external magnetic field is removed, the measurement signal of the net magnetic physical quantity related to the sample under test is detected, and this is digitized as the underlying measurement signal. Converted into a numerical signal
A method for measuring the weight of a sample to be measured by an AC electromagnetic induction method, characterized in that the numerical signal is multiplied by a weight calculation coefficient to calculate the weight. 9. A first means: a weight measurement comprising an AC electromagnetic induction sensor 1, an AC external magnetic field generating means 8, an output signal measuring means 9 and a computing means 10 configured as described below. Prepare the device. In the weight measuring device, an AC external magnetic field generated when an AC current is applied is applied to the measurement region 3 and its peripheral region 4 having a size that wraps the sample 7 to be measured, and the measurement region 3 and its peripheral region 4 are An AC external magnetic field applying coil 5 whose magnetic field distribution is set to be uniform within the range, and an output signal induced by the AC external magnetic field in the predetermined measurement area 3 and its peripheral area 4 can be measured. The measurement coil 6 is disposed in the predetermined measurement area 3
When the sample to be measured 7 is inside, the main measurement coil B that measures the output signal (signal to be measured) φ _B (X) induced by the AC external magnetic field in the measurement region 3 and the magnetic field line from the measurement region 3 are measured. _A first external magnetic field offsetting measurement coil A for measuring an output signal (adjustment measurement signal) φ _A (X + a) induced by an AC external magnetic field at a position + α separated by a predetermined distance in the forward direction, and the measurement area 3 Output signal (adjustment measurement signal) φ _C (X-
An electromagnetic induction sensor 1 including an external magnetic field cancellation measurement coil AC including a second magnetic field cancellation measurement coil C for measuring a) and an AC external magnetic field application coil connected to the AC electromagnetic induction sensor 1. An AC external magnetic field generating means 8 configured to apply an AC external magnetic field to the measurement region 3 and its peripheral region 4 by passing an AC current through 5, is connected to the AC electromagnetic induction sensor 1,
The electromotive force output signal (measurement signal, adjustment measurement signal) induced in the measurement coil 4 by the application of the AC external magnetic field is measured, and a proper one is selected from the output signals (measurement signal, adjustment measurement signal). At least the output signal measuring means 9 configured so as to be digitized and the computing means 10 capable of adjusting the measured and digitized output signal (measured signal, adjusted measurement signal) and computing as necessary. It is an equipped device. Second means: The measurement system of the weight measuring device is adjusted in advance so as to satisfy the following items. The output signal (signal to be measured) φ _B (X) measured by the main measurement coil B and the first
Output signal (first adjustment measurement signal) φ _A (X + a) measured by the external magnetic field cancellation measurement coil A and output signal (second adjustment measurement signal) measured by the second external magnetic field cancellation measurement coil C φ
_C (X-a) is the output signal W induced by the AC external magnetic field
(X) and the output signal M of the magnetic physical quantity related to the measured sample 7
As a composite signal of (X), so is represented as _{follows, φ B (X) = α} (W B (X) + M B (X)) φ A (X + a) = β (W A (X _{+ a) + M a (X} + a)) φ C (X-a) = γ (W C (X-a) + M C (X-a)) ( although, alpha, beta, gamma is a constant for adjustment Then, it is a coefficient proportional to the amplification factor and the number of turns of the coil when an amplifier is inserted in the middle.) Using the adjustment constants α, β, and γ as adjustment factors, Adjust and set to satisfy. When the sample 7 to be measured is located in the predetermined measurement region 3, the measurement sensitivity is adjusted to be a substantially uniform space in the predetermined measurement region 3, and M _B (X) ≈constant main measurement coil B The output signal φ _B (X) of the magnetic physical quantity related to the sample to be measured measured in 1. is almost the output signal W _A (X + a) induced by the AC external magnetic field measured by the first external magnetic field offsetting measurement coil A. ), And W _B (X) = 2W _A (X + a) and the output signal W _A (X + a) induced by the AC external magnetic field measured by the first external magnetic field cancellation measuring coil A The output signal W _C (X-a) induced by the AC external magnetic field measured by the second external magnetic field offsetting measurement coil C is adjusted to be equal, and W _A (X + a) = W _C (X -a) Output signal of the magnetic physical quantity related to the sample to be measured 7 measured by the first measuring coil A for external magnetic field cancellation M _A (X + a) and adjusted to magnetic physical quantity of the output signal M _C (X-a) equals about the measured sample 7 is measured by the second external magnetic field canceling the measurement coil C, M _A (X + a) = M _C (X-a) When the sample to be measured 7 is present in the measurement region 3, the output signal M _A of the magnetic physical quantity related to the sample to be measured measured by the first external magnetic field cancellation measurement coil _A (X + a) is adjusted so as to be constantly reduced by a predetermined ratio ε compared with the output signal M _B (X) of the magnetic physical quantity related to the sample to be measured measured by the main measurement coil B. _{εM B (X) = M A} (X + a), ε <1 / Σ third means: the alternating current using an electromagnetic induction sensor 1 and AC external magnetic field generating means 8 and the output signal measuring unit 9, a predetermined When the sample 7 to be measured is present in the measurement region 3, an alternating current is applied to the alternating external magnetic field applying coil 3 to apply an alternating external magnetic field, and the main measuring coil B measures the measured signal φ _B (X). φ _B (X) = α (W _B (X) + M _B (X)) The first adjustment measurement signal φ _A (X + a) is measured by the first external magnetic field canceling measurement coil A, and the second external magnetic field is measured. The second adjustment measurement signal φ _C (X-a) is measured by the offset measurement coil C. φ _A (X + a) = β (W _A (X + a) + M _A (X + a)) φ _C (X-a) = γ (W _C (X-a) + M _C (X-a)) Fourth means: First adjustment measurement signal φ _A (X + a) and second adjustment measurement signal φ _C (X-
a) is added to output signal for external magnetic field cancellation φ _A (X + a) + φ
_C (X-a) values and _{without, φ A (X + a)} + φ C (X-a) = β (W A (X + a) + M A (X + a)
) + Γ (W _C (X-a) + M _C (X-a)) From the measured signal φ _B (X) measured by the main measurement coil B,
By subtracting the external magnetic field canceling output signal φ _A (X + a) + φ _C (X-a) value measured by the external magnetic field canceling measuring coils A and C, the signal induced by the AC external magnetic field is canceled. , The net magnetic physical quantity of the measured sample 7 is detected as a magnetic physical quantity output signal φ _T proportional to a predetermined coefficient κ. _{φ T = φ B (X)} - (φ A (X + a) + φ C (X-a)) = α (W B (X) + M B (X)) - {β (W A (X + a) _{+ M A (X + a)} ) + γ (φ C (X-a) + M C (X-a)} = αW B (X) - {β (W A (X + a) + γW C (X-a)} _{+ αM B (X) - {} βM a (X + a) + γM C (X-a)} adjust this time _{W B (X) = 2W a} (X + a) Since α ≒ β + γ and, W _a (X + Since a) = W _C (X-a) and M _A (X + a) = M _C (X-a), β ≈ γ is adjusted, so αW _B (X)-{β (WA (X _A + a) + γ (W _C (X-a)} ≈ 0, which is offset by: = αM _B (X)-{βM _A (X + a) + γM _C (X-a)} = α (M _B (X) _{-2M a (X + a) =} α (M B (X) -2εM B (X)) = α (1-2ε) M B (X) α (1-2ε) because substituted in the coefficient kappa, φ _T = κ M _B (X) and the magnetic physical quantity output signal φ _T is detected as a signal proportional to M _B (X) Fifth means: For the standard sample S of which the true weight SG is known. A magnetic physical quantity measurement signal Sφ _T of the standard sample S is detected by measuring and calculating the magnetic physical quantity measurement signal Sφ _T by the same measuring method as that of the sample 7 to be measured using the above-described measuring device, and the detected standard is detected. Magnetic physical quantity measurement signal Sφ _{T of} sample S
The weight calculation coefficient η is specified from the true weight SG known to be. η = Sφ _T / SG (Since both Sφ _T and SG are concrete numerical values, η
Also digitize. ) Sixth means: Calculate the weight of the sample 7 to be measured from the magnetic physical quantity measurement signal φ _T relating to the sample 7 detected by the fifth means using the calculating means 10 by using the specified weight calculation coefficient η. . M _B (X) = φ _T / η The method for measuring the weight of a sample to be measured by the AC electromagnetic induction method is characterized by performing the above first to sixth means. 10. A measuring apparatus is provided in which the AC electromagnetic induction sensor 1 described in the first means of claim 9 is replaced with an improved AC electromagnetic induction sensor 1 configured as described below. In the AC electromagnetic induction sensor 1, the AC external magnetic field induced when an AC current is applied is applied to the measurement region 3 and its peripheral region 4 having a size that encloses the sample 7 to be measured, and further, the measurement region 3 and its periphery. An AC external magnetic field applying coil 5 set so that the magnetic field distribution is uniform within the range of the area 4, and an output signal induced by the AC external magnetic field in the predetermined measurement area 3 and its peripheral area 4 is measured. And a measurement coil 6 which is arranged so that the measurement sample 6 is placed in the measurement area 3.
, The main measurement coil B capable of measuring the measured signal φ _B (X) induced by the AC external magnetic field in the measurement area 3 and the AC external magnetic field at a position ± α separated from the measurement area 3 by a predetermined distance. The measurement coil AC for external magnetic field cancellation for measuring the induced output signal (adjustment measurement signal) φ _Ac (X ± a), and the main measurement coil B
Further has a configuration in which a first main measurement coil B1 located in front of the magnetic field lines in the measurement region 3 and a second main measurement coil B2 located in the rear are arranged so as to be separated by a predetermined distance. The signal to be measured φ _B (X) induced by the AC external magnetic field in the region 3 is configured to be measured as an output signal obtained by combining the magnetic fields of the first main measurement coil B1 and the second main measurement coil B2. And the measuring coil A for canceling the external magnetic field
C is a first for measuring an output signal (adjustment measurement signal) φ _A (X + a) induced by an AC external magnetic field at a position + α that is separated from the measurement region 3 in the forward direction of the magnetic field lines by a predetermined distance.
External magnetic field canceling measurement coil A and output signal induced by an AC external magnetic field at a position -α which is separated from the measurement area 3 in the rear direction of the magnetic field lines by a predetermined distance (adjustment measurement signal) φ _C (X- and a second magnetic field cancellation measuring coil C for measuring a). Then, the second means to the sixth means described in claim 9 are sequentially carried out, and a method for measuring the weight of a sample to be measured by an alternating-current electromagnetic induction method is characterized. 11. An AC external magnetic field induced when an AC current is applied is applied to a measurement region 3 and its peripheral region 4 having a size that encloses a sample 7 to be measured, and the range of the measurement region 3 and its peripheral region 4 is further affected. In order to measure the output signal induced by the AC external magnetic field in the AC external magnetic field applying coil 5 in which the magnetic field distribution is set to be uniform, and in the predetermined measurement area 3 and its peripheral area 4. The measurement coil 6 is provided, and the measurement coil 6 is provided.
Is a main measurement coil B that measures an output signal (measurement signal) φ _B (X) induced by an AC external magnetic field in the measurement region 3 when the measurement sample 7 is present in the predetermined measurement region 3. First to measure an output signal (adjustment measurement signal) φ _A (X + a) induced by an AC external magnetic field at a position + α separated from the measurement region 3 in the forward direction of the magnetic field lines by a predetermined distance.
External magnetic field canceling measurement coil A and output signal induced by an AC external magnetic field at a position -α which is separated from the measurement area 3 in the rear direction of the magnetic field lines by a predetermined distance (adjustment measurement signal) φ _C (X- The measurement of the magnetic physical quantity of the sample to be measured by the alternating-current electromagnetic induction method, characterized in that it is configured with an external magnetic field cancellation measurement coil AC including a second magnetic field cancellation measurement coil C for measuring a). So that the AC external magnetic field can be applied to the measurement area 3 and its peripheral area 4 by connecting the AC electromagnetic induction sensor 1 to the AC electromagnetic induction sensor 1 and applying an AC current to the AC external magnetic field applying coil 5. AC external magnetic field generating means 8 configured in
And an output that is connected to the AC electromagnetic induction sensor 1 and that can measure and quantify the output signal (measured signal, adjustment measurement signal) of the electromotive force induced in the measurement coil 4 by applying an AC external magnetic field. The signal measuring means 9, the calculating means 10 for adjusting the measured and digitized output signals (the signal under measurement, the adjusted measurement signal) and calculating as necessary, and at least the calculating means 10 calculates Output means 11 capable of outputting an evaluation judgment by comparing the weight value of the measured sample or the preset standard weight with the weight value calculated and calculated, and a predetermined value of the AC electromagnetic induction sensor 1. And a sample-to-be-measured supply / unloading means 12 configured to carry and supply the sample to be measured to and to carry out the sample after the weight measurement. Weight measurement device. 12. An AC external magnetic field induced when an AC current is applied is applied to a measurement region 3 and its peripheral region 4 having a size that encloses a sample 7 to be measured, and moreover, the range of the measurement region 3 and its peripheral region 4 In order to measure the output signal induced by the AC external magnetic field in the AC external magnetic field applying coil 5 in which the magnetic field distribution is set to be uniform, and in the predetermined measurement area 3 and its peripheral area 4. The measurement coil 6 is provided, and the measurement coil 6 is provided.
Is a main measurement coil B capable of measuring a measured signal φ _B (X) induced by an AC external magnetic field in the measurement area 3 when the measured sample 7 is present in the measurement area 3 and the measurement area 3
Output signal (adjustment measurement signal) φ _Ac (X ±
a) and a measuring coil AC for canceling the external magnetic field for measuring a).
The first main measurement coil B1 located in front of the magnetic field lines in the inside and the second main measurement coil B2 located in the rear are arranged so as to be separated by a predetermined distance. The measured signal φ _B (X) induced by the magnetic field is configured so that it can be measured as an output signal obtained by combining the magnetic fields of the first main measurement coil B1 and the second main measurement coil B2, and the external magnetic field cancellation is performed. The measurement coil AC for measurement measures the output signal (adjustment measurement signal) φ _A (X + a) induced by the AC external magnetic field at a position + α separated from the measurement region 3 in the forward direction of the magnetic field lines by a predetermined distance. External magnetic field canceling measurement coil A and output signal induced by an AC external magnetic field at a position -α which is separated from the measurement area 3 in the rear direction of the magnetic field lines by a predetermined distance (adjustment measurement signal) φ _C (X-
a) an improved AC electromagnetic induction sensor 1 composed of a second magnetic field offsetting measurement coil C for measuring a) and the improved AC electromagnetic induction sensor 1 connected to the AC external magnetic field applying coil 5 An AC external magnetic field generating means 8 configured to apply an AC external magnetic field to the measurement region 3 and its peripheral region 4 by passing an electric current, and the improved AC electromagnetic induction sensor 1 are connected to each other, and Output signal measuring means 9 for measuring and digitizing the output signal (measured signal, adjustment measurement signal) of the electromotive force induced in the measuring coil 4 by applying the magnetic field, and the measured and digitized output signal ( Arithmetic means 10 capable of adjusting (measured signal, adjusted measurement signal) and calculating as necessary
And an output means 11 capable of outputting an evaluation judgment comparing at least the weight of the sample to be measured calculated by the calculating means 10 or a preset standard weight with the measured and calculated weight value. The sample 7 to be measured is conveyed and supplied to a predetermined measurement region 3 of the AC electromagnetic induction sensor 1,
An apparatus for measuring the weight of a sample to be measured by an alternating-current electromagnetic induction method, comprising: a sample-to-be-measured supply / unloading means 12 to be carried out after the weight measurement. 13. An alternating external magnetic field generated when an alternating current is applied is applied to a measurement region 3 and its peripheral region 4 having a size that encloses a sample 7 to be measured, and moreover, the range of the measurement region 3 and its peripheral region 4 In order to measure the output signal induced by the AC external magnetic field in the AC external magnetic field applying coil 5 in which the magnetic field distribution is set to be uniform, and in the predetermined measurement area 3 and its peripheral area 4. The measurement coil 6 is provided, and the measurement coil 6 is provided.
Is a main measurement coil B capable of measuring an output signal (measurement signal) φ _B (X) induced by an AC external magnetic field in the measurement region 3 when the measurement sample 7 is present in the predetermined measurement region 3. , An external magnetic field canceling measurement coil A capable of measuring an output signal (adjustment measurement signal) φ _A (X ± a) induced by an AC external magnetic field at a position separated from the measurement region 3 by a predetermined distance ± α. An AC electromagnetic induction sensor for measuring a magnetic physical quantity of a sample to be measured by an AC electromagnetic induction method characterized by the above. 14. An AC external magnetic field induced when an AC current is applied is applied to a measurement region 3 and its peripheral region 4 having a size that encloses a sample 7 to be measured, and moreover, the range of the measurement region 3 and its peripheral region 4 In order to measure the output signal induced by the AC external magnetic field in the AC external magnetic field applying coil 5 in which the magnetic field distribution is set to be uniform, and in the predetermined measurement area 3 and its peripheral area 4. The measurement coil 6 is provided, and the measurement coil 6 is provided.
Is a main measurement coil B that measures an output signal (measurement signal) φ _B (X) induced by an AC external magnetic field in the measurement region 3 when the measurement sample 7 is present in the predetermined measurement region 3. And a measurement coil AC for canceling the external magnetic field for measuring an output signal (adjustment measurement signal) φ _Ac (X ± a) induced by an AC external magnetic field at a position ± α separated from the measurement region 3 by a predetermined distance. The external magnetic field canceling measurement coil AC has an output signal (first adjustment measurement signal) φ _A (X + a) induced by an AC external magnetic field at a position + α separated from the measurement region 3 in the front direction of the magnetic field lines by a predetermined distance. Measuring coil A for canceling a first external magnetic field and the measuring area 3
A second magnetic field offsetting measurement coil C for measuring an output signal (second adjustment measurement signal) φ _C (X-a) induced by an AC external magnetic field at a position −α which is separated by a predetermined distance in the backward direction from the magnetic field line from An AC electromagnetic induction sensor for measuring a magnetic physical quantity of a sample to be measured by an AC electromagnetic induction method, characterized by being configured as follows. 15. An AC external magnetic field induced when an AC current is applied is applied to a measurement region 3 and its peripheral region 4 having a size that encloses the sample 7 to be measured, and moreover, the range of the measurement region 3 and its peripheral region 4 In order to measure the output signal induced by the AC external magnetic field in the AC external magnetic field applying coil 5 in which the magnetic field distribution is set to be uniform, and in the predetermined measurement area 3 and its peripheral area 4. The measurement coil 6 is provided, and the measurement coil 6 is provided.
Is a main measurement coil B capable of measuring a measured signal φ _B (X) induced by an AC external magnetic field in the measurement area 3 when the measured sample 7 is present in the measurement area 3 and the measurement area 3
Output signal (adjustment measurement signal) φ _Ac (X ±
a) and a measuring coil AC for canceling the external magnetic field for measuring a).
The first main measurement coil B1 located in front of the magnetic field lines in the inside and the second main measurement coil B2 located in the rear are arranged so as to be separated by a predetermined distance. The measured signal φ _B (X) induced by the magnetic field is configured so that it can be measured as an output signal obtained by combining the magnetic fields of the first main measurement coil B1 and the second main measurement coil B2, and the external magnetic field cancellation is performed. The measurement coil AC for measurement measures the output signal (adjustment measurement signal) φ _A (X + a) induced by the AC external magnetic field at a position + α separated from the measurement region 3 in the forward direction of the magnetic field lines by a predetermined distance. External magnetic field canceling measurement coil A and output signal induced by an AC external magnetic field at a position -α which is separated from the measurement area 3 in the rear direction of the magnetic field lines by a predetermined distance (adjustment measurement signal) φ _C (X-
An improved AC electromagnetic induction sensor for measuring a magnetic physical quantity of a sample to be measured by an AC electromagnetic induction method, characterized in that it is configured by a second magnetic field cancellation measurement coil C for measuring a).