JPH08145983A - Sampling device of sample water - Google Patents

Abstract

PURPOSE: To accurately determine the concentration of an impurity which is originally contained by a sample water by preventing the impurity in air from being mixed and sampling the sample water such as ultrapure water into a sampling container. CONSTITUTION: A sampling device of sample water is provided with a water- sampling room 10 where a sampling container 1 can be loaded into and from the room, at the same time sample water can be supplied to the sampling container in the room from the outside, and a water storage part 13 for storing the sample water overflown from the sampling container, an air-feeding device 20 for feeding air to the water-sampling room, an air/liquid contact device 30 which is provided in the air-feeding path to the water-sampling room and where the lower surface communicates with the storage part 13 of the water sampling room 10, a circulation device 40 including a pump 41 for supplying water in the water storage part 13 of the water-sampling chamber 10 to the air/liquid supply device 30 for circulation, and an air circulation path 50 for circulating air fed to the water-sampling chamber 10 to the air-feeding device 20.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sampling device for sampling water in a sampling container to analyze and measure the impurity concentration contained in water (sample water) having extremely low impurity concentration such as ultrapure water for electronic industry. Regarding

[0002]

2. Description of the Related Art Conventionally, sample water from a faucet is directly collected in a sampling container, or a tube is connected to the faucet and the sample water is sampled from the tube into the sampling container.

[0003]

As described above, when the sample water is sampled from the faucet directly or from the tube into the sample container,
Since the sample water coming out of the faucet or the tube comes into contact with the air and enters the sampling container in the air, impurities such as chloride ions and sodium ions in the air are mixed into the sample water, although they are a little. Since the concentration of impurities originally contained in sample water is extremely low on the order of several ppb to several ppt, the concentration of impurities mixed from the air for sampling is equal to or higher than the concentration of impurities originally contained. As described above, the accurate concentration of impurities originally contained in the sample water cannot be measured.

In order to prevent the entry of impurities from the air, the collection container is housed in a closed container filled with an inert gas containing no impurities such as nitrogen gas or argon gas,
Sample water is also collected in this collection container, but this requires a facility for supplying an inert gas such as nitrogen gas or argon gas at the collection location, which increases the cost of the facility.

[0005]

The present invention has solved the above-mentioned problems and made it possible to sample water into a sampling container and a sampling container without mixing impurities in the air. The sampling container can be moved in and out of the room, the sample water can be supplied from the outside to the sampling container inside the room, and the sampling chamber is equipped with a water storage unit for storing the sample water overflowing from the sampling container, and the air is sent to the sampling chamber. An air supply device, a gas-liquid contact device provided in the air supply path to the water sampling chamber, the lower surface of which communicates with the water storage portion of the water sampling chamber, and the water in the water storage portion of the water sampling chamber to supply the gas liquid The apparatus is characterized by being provided with a circulation device including a pump for supplying and circulating the air to the device, and an air circulation path for circulating the air supplied to the water sampling chamber to the air supply device. An air filter is preferably provided in addition to the gas-liquid contact device in the air supply path to the water sampling chamber.

[0006]

Embodiment In the illustrated embodiment, 10 is a water collecting chamber and 20 is a water collecting chamber.
Is an air supply device, 30 is a gas-liquid contact device, 40 is a water circulation device, and 50 is an air circulation path.

The water sampling chamber 10 has a double-sided double door 11,
11 is provided, and the container 1 can be put in and out of the room by opening this door. The water sampling chamber has a perforated floor plate 12 formed by a punching plate, a sampling container is placed on the bottom plate, and a water storage section 13 is provided under the floor plate 12. The upper wall of the water sampling chamber has an opening 14 into which a tube 2 having one end connected to a faucet provided in a flow path of ultrapure water is inserted, and the other end of the tube inserted into the opening 14 is placed on the bottom plate 12. It can be inserted up to near the bottom of the placed collection container 1. The inside diameter of the opening 14 is almost equal to the outside diameter of the tube 2, and the outside air hardly enters the water sampling chamber between them.

In the illustrated embodiment, the storage chamber of the demister 15 is provided on the open rear surface of the water sampling chamber 10, the storage chamber of the gas-liquid contact device 30, the storage chamber of the air filter 60, and the air supply device 20 are provided behind it. A blower chamber 22 containing a blower fan 21 is connected. The demister 15 is for removing water droplets of the air sent into the water collection chamber 10 and is well known. The gas-liquid contact device 30 may be of any known type such as a packed tower type filled with a Raschig ring, a Lessing ring, a berl saddle, or the like, a spray tower type, a wet wall type, or the like. Further, the air filter 60 has a chamber filled with a mat made of glass fiber, synthetic fiber or the like in a laminated shape, a filter paper shape, or a membrane shape.

When the blower fan 21 is operated, the blower chamber 22
Of the air blows through the air filter 60, the gas-liquid contact device 30, and the demister 15 and enters the water sampling chamber 10, where the porous bottom plate 12
Through the air circulation path 50, which is a space between the bottom plate and the water surface of the water storage section 13, the air circulates in the blower chamber 22. In other words, the water storage section 13 extends from below the water collection chamber 10 to the back of the blower chamber 22 to form an air circulation path 50 on the water surface.
The air that has passed through 0 rises in the space 52 between the rear of the blower chamber and the rear wall 51 of the device, and flows into the blower chamber from the suction port 23 of the rear wall of the blower chamber. Further, the lower surfaces of the storage chamber of the demister and the storage chamber of the gas-liquid contact device also have porous bottom plates so that the water in the chamber can be drained to the water reservoir 13.

In order to secure the air circulation path 50, an overflow pipe 16 is provided in the water reservoir 13 so that the water level does not rise above the level of the overflow pipe. The water in the water reservoir is supplied to the sprinkler pipe 31 at the upper part of the gas-liquid device 30 by the water circulation device 40 including the circulation pump 41 and the circulation pipe 42.

To collect the sample water, the door 1 of the water sampling chamber 10
1 and 11 are opened, the collection container 1 is placed on the porous bottom plate 12, and the tube 2 is inserted into the water collection chamber through the opening 14.
Is inserted into the collection container, the tip is positioned at the bottom of the container, the door is closed, and the sample water is supplied from the tube 2 into the collection container. The supply of the sample water is continued even if the sample water overflows from the mouth of the sampling container, whereby the sampling container is washed with the sample water. The sample water overflowing from the container is the perforated bottom plate 1 of the water collection chamber.
It flows from 2 to the water storage section 13 and is stored. A part of the sample water may be put in the water reservoir in advance.

In this way, when the sample water is continuously supplied to the sampling container and the sample water is stored in the water storage section and the circulation pump 41 can be operated, the circulation pump and the blower fan 21 are operated.
This operation can be automatically started by the water level gauge installed in the water storage section. By the operation of the circulation pump, the sample water in the water reservoir is supplied to the sprinkler pipe 31 above the gas-liquid contactor 30 through the circulation pipe 42, flows downward in the gas-liquid contactor, is drained to the water reservoir, and is circulated. Blower room 2 by operation of blower fan 21
As described above, the air in 2 enters the water sampling chamber 10 by passing through the air filter 60, the gas-liquid contact device 30, and the demister 15, and circulates to the air blowing chamber via the circulation path 50 and the space 52 behind the air blowing chamber. The air that enters the water sampling chamber has the fine particles of 0.5 μm or more contained therein when passing through the air filter 60, captured and removed by the air filter, and flows downward through the device when passing through the gas-liquid contact device 31. Impurities that are in contact with water and dissolve in water, or move to the water side and are removed,
It is clean.

Sample water is supplied to a sampling container in a water sampling chamber to which clean air is supplied, and when the sample water overflows from the container to the reservoir for about 20 to 60 minutes, the sample water is supplied, and a circulation pump 41 and a blower fan 21 are provided. Stop driving. This stop can be controlled automatically by a timer.

Next, the door of the water sampling chamber is opened, the sampling container filled with the sample water is capped and taken out from the water sampling chamber, and the sampling is completed. Then, the sampling container containing the sample water is moved to the place where the analyzer is provided and used for analysis.

Since the sample water in the sampling container is sampled in the sampling container while the air cleaned by the air filter and the gas-liquid contact device is being blown into the sampling chamber, impurities are less mixed. Therefore, it is possible to accurately analyze and measure the extremely low concentration of impurities originally contained in the sample water.

In the illustrated embodiment, the blower chamber 22, the air filter 60, the gas-liquid contact device 30, the demister 15, the water sampling chamber 1
Although they are arranged in the order of 0, the order is changed to a gas-liquid contact device,
A blower chamber, an air filter, a demister, and a water collection chamber may be arranged in this order, and air may be circulated through the air circulation path 50 to the gas-liquid contact device. Further, the air filter may be omitted.

The sample water sampled in the sampling container was supplied to the ion chromatograph for cations and the ion chromatograph for anions, and the results were analyzed as follows. Chloride ion concentration is 140 ppt, sodium ion concentration is 63 ppt when water is sampled from the tap in the air, chloride ion concentration when sample water is sampled from the tap in the air with a clean tube Was 53 ppt and the sodium ion concentration was 38 ppt. On the other hand, when the water is sampled according to the illustrated embodiment, the chloride ion concentration is 3
The ion concentration of sodium was 0 ppt and the concentration of sodium was 22 ppt, and each ion showed a lower value than the sampling method of, and it was clearly shown that the contamination from the air during sampling was significantly suppressed.

[0018]

According to the present invention, sample water such as ultrapure water is
Water can be collected in a collection container while preventing air pollution. Therefore, it is possible to accurately determine the extremely low concentration of impurities that the sample water originally contains, and to obtain a standard that can be used with confidence in the electronics industry, medicine, etc.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of an embodiment of a sampling device of the present invention.

2 is a perspective view of the device of FIG. 1. FIG.

[Explanation of symbols]

 1 Collection Container 2 Collection Tube 10 Water Collection Room 11 Door 12 Perforated Floor Board 13 Water Storage Section 14 Tube Opening 15 Demister 20 Air Supply Device 21 Blower Fan 22 Blower Room 23 Suction Port 30 Gas-Liquid Contact Device 31 Water Sprinkle 40 Water Circulation device 42 Circulation pipe 50 Air circulation path 51 Rear wall of device 52 Vertical space 60 Air filter

Claims (2)

[Claims] 1. A water sampling chamber having a sampling container that can be put in and out of a room, can supply sample water to the sampling container from the outside, and has a water storage section for storing sample water overflowing from the sampling container; An air supply device for supplying air to the chamber, a gas-liquid contact device provided in the air supply path to the water sampling chamber and having a lower surface communicating with the water reservoir of the water sampling chamber, and water in the water reservoir of the water sampling chamber Sample water characterized by comprising a circulation device including a pump for supplying and circulating the gas to the gas-liquid supply device, and an air circulation path for circulating the air supplied to the water sampling chamber to the air supply device. Collecting device. 2. The sample water sampling device according to claim 1, wherein an air filter is provided in addition to the gas-liquid contact device in the air supply path to the water sampling chamber. apparatus.