JPH08138206A - Production of magnetic head - Google Patents

Production of magnetic head

Info

Publication number
JPH08138206A
JPH08138206A JP27644994A JP27644994A JPH08138206A JP H08138206 A JPH08138206 A JP H08138206A JP 27644994 A JP27644994 A JP 27644994A JP 27644994 A JP27644994 A JP 27644994A JP H08138206 A JPH08138206 A JP H08138206A
Authority
JP
Japan
Prior art keywords
magnetic head
magnetic
short
head
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27644994A
Other languages
Japanese (ja)
Inventor
Yasuhiro Nakaya
安広 仲谷
Shunsaku Muraoka
俊作 村岡
Akinaga Natsui
昭長 夏井
Hiroshi Yoda
広 養田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP27644994A priority Critical patent/JPH08138206A/en
Publication of JPH08138206A publication Critical patent/JPH08138206A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To produce a magnetic head having improved reproducing characteristics in a high frequency region as a magnetic head having a structure with metallic magnetic films inserted between nonmagnetic substrates. CONSTITUTION: In a magnetic head having a structure with each laminated film 3 consisting of metallic magnetic films 1 and insulating films 2 inserted between nonmagnetic substrates 4, a winding groove part 5, a winding fixing groove 7, etc., are mirror-finished by brush polishing. Burrs, etc., causing a magnetic short circuit to the laminated magnetic films are removed and characteristics of the head especially in a high frequency region are improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はVTR、DAT、FDD
等に使用する磁気ヘッドに関し、特に主磁路を軟磁性薄
膜と絶縁膜を積層して構成された磁気ヘッドの製造方法
に関する。
The present invention relates to VTR, DAT, FDD
In particular, the present invention relates to a magnetic head used for the above, and particularly to a method of manufacturing a magnetic head having a main magnetic path formed by laminating a soft magnetic thin film and an insulating film.

【0002】[0002]

【従来の技術】近年、VTRなどの磁気記録装置におい
ては、情報量が増大し、高密度記録化への強い要求があ
る。またメディアにおいては、高保磁力のメタル媒体の
製品化が行なわれ、それに対応する為に、十分な記録再
生能力を持つ磁気ヘッドの開発が精力的に進められてい
る。
2. Description of the Related Art In recent years, in a magnetic recording device such as a VTR, the amount of information has increased and there is a strong demand for high density recording. As for media, high coercive force metal media have been commercialized, and in order to cope with this, development of a magnetic head having a sufficient recording / reproducing capability has been vigorously pursued.

【0003】磁気ヘッドに関して、高飽和磁束密度Bs
を有するCo基アモルファス合金やFe基合金を用いた
多種多様の磁気ヘッドが開発され、既に一部については
実用化されている。
Regarding magnetic heads, high saturation magnetic flux density Bs
A wide variety of magnetic heads using Co-based amorphous alloys and Fe-based alloys have been developed, and some of them have already been put to practical use.

【0004】それらの中にあって、主磁路を高Bsを有
する金属磁性薄膜と絶縁膜を積層して構成され(渦電流
損失の低減)、両側から非磁性基板で挟み込んだ構造の
積層型ヘッドは、高周波特性に優れ、摺動ノイズもな
く、高密度記録に適したものである。
Among them, the main magnetic path is constituted by laminating a metal magnetic thin film having a high Bs and an insulating film (reduction of eddy current loss), and a laminated type having a structure in which a nonmagnetic substrate is sandwiched from both sides. The head is excellent in high-frequency characteristics, has no sliding noise, and is suitable for high-density recording.

【0005】磁気ヘッドでは、テ−プに信号を記録した
り、読み込んだりするのは、巻線を介してを行なってい
る。図6に示すようなコンビヘッドでは、特にテープの
入り側と出側部分が、ヘッドの前面研磨時(ギャップ深
さ調整)に多く削られる為、巻線がテ−プ摺動面に出や
すくなり、それを防止する目的でヘッド側面に巻線固定
溝7を形成してある。
In the magnetic head, the recording and reading of signals on the tape are performed through the windings. In the combination head as shown in FIG. 6, particularly the tape entry side and the tape output side are largely shaved during the front surface polishing of the head (gap depth adjustment), so that the winding easily comes out to the tape sliding surface. In order to prevent this, a winding fixing groove 7 is formed on the side surface of the head.

【0006】磁気ヘッドの製造方法には、溝形成、切断
などのダイヤモンド砥石で研削作用によって加工を行う
工程や、ガラスモ−ルド、ギャップ接合などの熱処理を
行う工程などがある。
The method of manufacturing a magnetic head includes a step of processing by a grinding action with a diamond grindstone such as groove formation and cutting, and a step of performing heat treatment such as glass molding and gap bonding.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、上記の
ような製造方法では、巻線溝や巻線固定溝は研削加工に
よって形成されている為、絶縁膜を介して積層した金属
磁性薄膜が加工によって短絡した状態となり、閉磁気回
路を形成することとなる。
However, in the above manufacturing method, since the winding groove and the winding fixing groove are formed by grinding, the metal magnetic thin film laminated via the insulating film is processed. A short circuit occurs and a closed magnetic circuit is formed.

【0008】つまり、金属磁性薄膜が研削加工される際
に、金属磁性薄膜の研削時のばり(塑性流動)が研削筋
に沿って発生し、このばりが、隣接する金属磁性薄膜と
接触して、隣接する金属磁性薄膜同士が磁気回路的につ
ながって、閉磁気回路を形成するのである。
That is, when the metal magnetic thin film is ground, burrs (plastic flow) during grinding of the metal magnetic thin film are generated along the grinding streaks, and the burrs come into contact with the adjacent metal magnetic thin film. The adjacent metal magnetic thin films are magnetically connected to each other to form a closed magnetic circuit.

【0009】また、閉磁気回路が形成される要因は、研
削時に発生するばりに限らず、例えばヘッドの熱処理に
よっても発生する。つまり大気が不活性ガスで十分に置
換されていない状態でヘッドの熱処理を行うと、この熱
処理によって隣接する金属磁性薄膜がヘッド側面におい
て磁気的に短絡された状態になるのである。
Further, the cause of the formation of the closed magnetic circuit is not limited to the flash generated during grinding, but is also generated by heat treatment of the head, for example. That is, when the heat treatment of the head is performed in a state where the atmosphere is not sufficiently replaced with the inert gas, the heat treatment causes the adjacent metal magnetic thin film to be magnetically short-circuited on the side surface of the head.

【0010】この場合は、我々の実験では、大気中の酸
素成分の置換が十分でないと磁気的な短絡が発生するこ
とから、ヘッド側面に形成されるある種の酸化物が磁気
回路を短絡させているものと推察される。
In this case, in our experiment, since a magnetic short circuit occurs when the oxygen component in the atmosphere is not sufficiently replaced, a certain kind of oxide formed on the side surface of the head short-circuits the magnetic circuit. It is presumed that

【0011】このように、加工や熱処理によって積層膜
の側面が短絡される為、渦電流損失が生じ高周波領域で
のヘッド特性が大きく低下する原因となっていた。
As described above, since the side surfaces of the laminated film are short-circuited by processing or heat treatment, eddy current loss occurs, which is a cause of significant deterioration in head characteristics in the high frequency region.

【0012】[0012]

【課題を解決するための手段】上記の課題を解決するた
めに、本発明の磁気ヘッドの製造方法は、巻線溝、巻線
固定溝やヘッドチップ側面等において形成された、短絡
磁気回路を構成する短絡物質(例えば、上記のばりや酸
化物)を除去する工程を備えたものである。
In order to solve the above problems, a method of manufacturing a magnetic head according to the present invention includes a short-circuit magnetic circuit formed in a winding groove, a winding fixing groove, a side surface of a head chip, or the like. It is provided with a step of removing constituent short-circuit substances (for example, the above-mentioned flash and oxide).

【0013】[0013]

【作用】本発明は、上記した工程を具備する事によっ
て、金属磁性薄膜の短絡をなくし渦電流損失を低減でき
る為、高周波特性に優れた磁気ヘッドが得られる。
According to the present invention, by providing the above steps, it is possible to eliminate the short circuit of the metal magnetic thin film and reduce the eddy current loss, so that the magnetic head having excellent high frequency characteristics can be obtained.

【0014】[0014]

【実施例】【Example】

(実施例1)以下、本発明の第1の実施例について図面
を参照しながら説明する。
(Embodiment 1) Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.

【0015】図1(a)は、金属磁性膜1と、この金属
磁性膜1に挟まれて形成された絶縁膜2の積層膜3を、
非磁性基板4で挟み込んだ一対のコア半体の少なくとも
一方に巻線溝5をダイヤモンド砥石で加工したものであ
る。
FIG. 1A shows a metal magnetic film 1 and a laminated film 3 of an insulating film 2 sandwiched by the metal magnetic film 1.
At least one of the pair of core halves sandwiched by the non-magnetic substrate 4 has the winding groove 5 processed with a diamond grindstone.

【0016】この時の巻線溝部の積層膜3は、図1
(b)に示すように金属磁性膜1が短絡された状態にな
っている。
The laminated film 3 in the winding groove portion at this time is shown in FIG.
As shown in (b), the metal magnetic film 1 is in a short-circuited state.

【0017】つまり、ダイヤモンド砥石で溝加工を行っ
た結果、砥石粒の研削筋に沿って金属磁性薄膜の塑性流
動(ばり)10が生じ、このばり10が、隣接する金属
磁性薄膜に接触し、短絡された磁気回路を構成する要因
となるのである。
That is, as a result of performing the groove processing with the diamond grindstone, a plastic flow (burr) 10 of the metal magnetic thin film is generated along the grinding streaks of the grindstone, and the flash 10 comes into contact with the adjacent metal magnetic thin film, It is a factor that constitutes a short-circuited magnetic circuit.

【0018】そこで、この巻線溝部を、研磨材(GC#
4000)と水の混合液を供給しながらブラシホイ−ル
を2000rpmで回転させて研磨(以下ブラシ研磨と
記する)することにより、図1(c)に示すように積層
膜3が鏡面に研磨され短絡がなくなった状態となり、ヘ
ッド特性を向上させることができる(砥粒を供給する代
わりに砥粒を含んだブラシで行っても良い)。
Therefore, the winding groove portion is made of an abrasive (GC #
4000) and water, the brush wheel is rotated at 2000 rpm for polishing (hereinafter referred to as brush polishing) to polish the laminated film 3 to a mirror surface as shown in FIG. 1 (c). The short circuit is eliminated, and the head characteristics can be improved (a brush containing abrasive grains may be used instead of supplying abrasive grains).

【0019】ブラシホイールとは、円筒の外周面に、例
えばナイロン等の樹脂繊維を植毛したものであり、上記
のブラシ研磨とは、従って、回転する樹脂繊維でヘッド
側面を研磨するものである。
The brush wheel is a cylinder in which resin fibers such as nylon are planted on the outer peripheral surface of the cylinder, and the above-mentioned brush polishing is to polish the side surface of the head with rotating resin fibers.

【0020】この様にブラシ研磨は、被研磨材よりも柔
らかな材料を、研磨材を介在させた状態で被研磨材に摺
擦させて、被研磨材を研磨するものであるから、従って
ダイヤモンド砥石による研削とは異なりブラシ研磨によ
って新たなばりを発生させることなく、ダイヤモンド砥
石による研削で生じたばりを有効に除去できる。
As described above, in the brush polishing, since a material softer than the material to be polished is rubbed against the material to be polished with the abrasive interposed, the material to be polished is polished. Unlike grinding with a grindstone, burrs generated by grinding with a diamond grindstone can be effectively removed without generating new burrs by brush polishing.

【0021】ブラシ研磨の特徴の一つは、溝内周面の研
磨が行えることである。つまり、溝深さに見合った長さ
の樹脂繊維を有するブラシホイールを用いることによ
り、溝の底面も十分に研磨できる。
One of the characteristics of brush polishing is that the inner peripheral surface of the groove can be polished. That is, the bottom surface of the groove can be sufficiently polished by using the brush wheel having the resin fiber whose length corresponds to the groove depth.

【0022】(実施例2)以下、本発明の第2の実施例
について図面を参照しながら説明する。
(Embodiment 2) A second embodiment of the present invention will be described below with reference to the drawings.

【0023】図2(a)は、金属磁性膜1と絶縁膜2の
積層膜3を、非磁性基板4で挟み込んだ一対のコア半体
の少なくとも一方に巻線溝5を形成し、ギャップ材6
(SiO2、ガラス膜)を介して熱処理によって接合さ
れたコアブロックである。
In FIG. 2A, a winding groove 5 is formed in at least one of a pair of core halves in which a laminated film 3 of a metal magnetic film 1 and an insulating film 2 is sandwiched by a non-magnetic substrate 4, and a gap material is formed. 6
It is a core block joined by heat treatment through (SiO 2 , glass film).

【0024】この熱処理によって接合されたコアブロッ
クの側面の積層膜3は、図2(b)に示すように金属磁
性膜1が短絡された状態になっている。
The laminated film 3 on the side surface of the core block joined by this heat treatment is in a state where the metal magnetic film 1 is short-circuited as shown in FIG. 2 (b).

【0025】このコアブロック側面をブラシ研磨によっ
て研磨すると、図2(c)に示すように積層膜3が鏡面
に仕上げられ、この側面に形成された短絡物質(おそら
く前述のようにある種の酸化物と思われる)10が除去
され、磁気回路の短絡状態が解消されてヘッド特性を向
上させることができる。
When the side surface of the core block is polished by brush polishing, the laminated film 3 is mirror-finished as shown in FIG. 2C, and the short-circuit substance formed on this side surface (probably some kind of oxidation as described above). It is possible to improve the head characteristics by removing the (10) which is considered to be a thing and eliminating the short circuit state of the magnetic circuit.

【0026】本実施例では、前述のように、コアブロッ
ク側面を鏡面状態になるまで研磨しているが、要は短絡
物質を除去することが重要なのであって、必ずしも鏡面
状態にまで研磨することは必須ではない。
In this embodiment, as described above, the side surface of the core block is polished to a mirror surface state. However, it is important to remove the short-circuit substance, and it is not always necessary to polish the mirror block surface. Is not mandatory.

【0027】しかしながら、実際の製造工程において
は、本実施例の様に、鏡面状態にまで研磨した状態をも
って短絡物質が除去されたと判断する判定方法が最も簡
便な判定方法の一つであろう。
However, in the actual manufacturing process, the judgment method for judging that the short-circuit substance is removed in the state of being polished to the mirror surface state is one of the simplest judgment methods as in the present embodiment.

【0028】(実施例3)以下、本発明の第3の実施例
について図面を参照しながら説明する。
(Third Embodiment) A third embodiment of the present invention will be described below with reference to the drawings.

【0029】図3(a)は、金属磁性膜1と絶縁膜2の
積層膜3を、非磁性基板4で挟み込んだ一対のコア半体
の少なくとも一方に巻線溝5を形成し、ギャップ材6
(SiO2、ガラス膜)を介して熱処理によってギャッ
プ接合され、巻線固定溝7をダイヤモンド砥石によって
加工したコアブロックである。
In FIG. 3A, a winding groove 5 is formed in at least one of a pair of core halves in which a laminated film 3 of a metal magnetic film 1 and an insulating film 2 is sandwiched by a non-magnetic substrate 4, and a gap material is formed. 6
It is a core block which is gap-bonded by heat treatment through (SiO 2 , glass film) and whose winding fixing groove 7 is processed by a diamond grindstone.

【0030】この巻線固定溝7の積層膜3は、図3
(b)に示すように金属磁性膜1が短絡された状態にな
っている。
The laminated film 3 of the winding fixing groove 7 is shown in FIG.
As shown in (b), the metal magnetic film 1 is in a short-circuited state.

【0031】この巻線固定溝7をブラシ研磨によって研
磨すると図3(c)に示すように積層膜3が鏡面に仕上
げられ短絡がなくなった状態になっている。この後、切
断して図4(a)に示すヘッドチップ8が得られる。
When the winding fixing groove 7 is polished by brush polishing, the laminated film 3 is mirror-finished and short-circuit is eliminated as shown in FIG. 3 (c). After that, the head chip 8 shown in FIG. 4A is obtained by cutting.

【0032】このような巻線固定溝7を有するヘッドチ
ップ8を2つベ−スに貼付けたものが図4(b)であ
り、テ−プ走行の入り側、出側は大きく研磨されている
が巻線固定溝7によって摺動面に巻線が出ない構造にな
っている。
FIG. 4 (b) shows a case in which two head chips 8 having such winding fixing grooves 7 are attached to a base, and the entrance side and the exit side of tape running are greatly polished. However, the winding fixing groove 7 prevents the winding from appearing on the sliding surface.

【0033】図5は、本発明による磁気ヘッドの相対出
力の周波数特性を示す。本発明の製造方法による巻線
溝、ヘッドチップ側面、巻線固定溝をブラシ研磨で鏡面
に加工したもの(a)は、従来の製造方法(b)に比べ
高周波領域での出力が高くなっている。
FIG. 5 shows the frequency characteristics of the relative output of the magnetic head according to the present invention. The winding groove, head chip side surface, and winding fixing groove processed by the manufacturing method of the present invention into a mirror surface by brush polishing have higher output in a high frequency region than the conventional manufacturing method (b). There is.

【0034】本発明は、上記に示した製造方法以外にも
適用でき、例えば、切断、研削などによってヘッド形状
を成形した時などに積層膜をブラシ研磨で鏡面にする事
により図5に示すものと同様の効果が得られる。
The present invention can be applied to a method other than the above-mentioned manufacturing method. For example, when the laminated film is made into a mirror surface by brush polishing when the head shape is formed by cutting, grinding, etc., the one shown in FIG. The same effect as can be obtained.

【0035】また、積層膜を狭持する非磁性基板の代わ
りに酸化物磁性基板を用いたリング型ヘッドの特開昭5
5−64619号公報や特開平2−78007号公報な
どのような構造においても前記ブラシ研磨を行う事によ
って同様の効果が得られた。
A ring-type head using an oxide magnetic substrate instead of the non-magnetic substrate sandwiching the laminated film is disclosed in Japanese Patent Laid-Open No. Sho 5 (1999).
Similar effects can be obtained by performing the brush polishing in the structures such as those disclosed in JP-A-5-64619 and JP-A-2-78007.

【0036】なお、上記実施例では、ブラシ研磨によっ
てばりや酸化物の除去を行ったが、その他にも、例えば
バフ研磨、化学的エッチング、電解研磨等によっても、
短絡磁気回路を形成する物質を除去できる。
Although burrs and oxides were removed by brush polishing in the above embodiment, other methods such as buff polishing, chemical etching, electrolytic polishing, etc.
The material forming the short circuit magnetic circuit can be removed.

【0037】[0037]

【発明の効果】以上のように本発明により、従来の工法
では不可能であった磁気ヘッドコアの巻線溝部、巻線固
定溝の積層膜を鏡面に仕上げる事でき、ヘッドコア側面
部は、従来のラッピング(砥粒研磨)に比べ貼付けが不
要となった為工数が低減でき、したがって、積層膜の側
面が全て鏡面に仕上げる事が可能となる為、高周波領域
での渦電流損失が低減できて高いヘッド出力が得られ
る。
As described above, according to the present invention, the laminated film of the winding groove portion and the winding fixing groove of the magnetic head core, which has been impossible by the conventional method, can be mirror-finished, and the side surface portion of the head core can be finished by the conventional method. Compared to lapping (abrasive polishing), the need for attachment is eliminated, so the number of steps can be reduced. Therefore, the side surfaces of the laminated film can all be mirror-finished, and eddy current loss in the high-frequency region can be reduced and high. Head output is obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の磁気ヘッドの製造方法の第1の実施例
の説明図
FIG. 1 is an explanatory diagram of a first embodiment of a magnetic head manufacturing method according to the present invention.

【図2】本発明の磁気ヘッドの製造方法の第2の実施例
の説明図
FIG. 2 is an explanatory diagram of a second embodiment of the magnetic head manufacturing method of the invention.

【図3】本発明の磁気ヘッドの製造方法の第3の実施例
の説明図
FIG. 3 is an explanatory diagram of a third embodiment of the magnetic head manufacturing method of the invention.

【図4】同実施例で得られた磁気ヘッドチップの説明図FIG. 4 is an explanatory diagram of a magnetic head chip obtained in the same example.

【図5】本発明で製造された磁気ヘッド出力の周波数特
性図
FIG. 5 is a frequency characteristic diagram of an output of a magnetic head manufactured by the present invention.

【図6】コンビ型ヘッドの構成を示す外観図FIG. 6 is an external view showing a configuration of a combination type head.

【符号の説明】 1 金属磁性膜 2 絶縁膜 3 積層膜 4 非磁性基板 5 巻線溝 6 ギャップ材 7 巻線固定溝 8 ヘッドチップ[Explanation of symbols] 1 metal magnetic film 2 insulating film 3 laminated film 4 non-magnetic substrate 5 winding groove 6 gap material 7 winding fixing groove 8 head chip

───────────────────────────────────────────────────── フロントページの続き (72)発明者 養田 広 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroshi Yoda 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】金属磁性薄膜と絶縁膜の積層膜を厚み方向
に積層して構成される磁気ヘッドの製造方法であって、
前記絶縁膜によって離間された前記金属磁性薄膜を磁気
的に短絡する短絡物質を除去する工程を具備したことを
特徴とする磁気ヘッドの製造方法。
1. A method of manufacturing a magnetic head comprising a laminated film of a metal magnetic thin film and an insulating film laminated in the thickness direction, comprising:
A method of manufacturing a magnetic head, comprising a step of removing a short-circuit substance that magnetically short-circuits the metal magnetic thin film separated by the insulating film.
【請求項2】短絡物質は、磁気ヘッドの製造工程におけ
る研削加工工程もしくは熱処理工程で発生したものであ
る請求項1記載の磁気ヘッドの製造方法。
2. The method of manufacturing a magnetic head according to claim 1, wherein the short-circuit substance is generated in a grinding process or a heat treatment process in the manufacturing process of the magnetic head.
【請求項3】短絡物質を除去する工程は、磁気ヘッドの
構成材料よりも柔らかな柔材料を、短絡物質が形成され
た磁気ヘッドの表面に、研磨材を介在させて摺擦させる
ことにより短絡物質を除去するものであることを特徴と
する請求項1または2記載の磁気ヘッドの製造方法。
3. The step of removing the short-circuit substance is performed by rubbing a soft material, which is softer than the constituent material of the magnetic head, against the surface of the magnetic head on which the short-circuit substance is formed, with an abrasive interposed therebetween. The method of manufacturing a magnetic head according to claim 1, wherein the substance is removed.
【請求項4】短絡物質が形成された磁気ヘッドの表面が
鏡面になるまで柔材料を磁気ヘッドの表面に摺擦させて
短絡物質を除去することを特徴とする請求項3記載の磁
気ヘッドの製造方法。
4. The magnetic head according to claim 3, wherein the short-circuit substance is removed by rubbing a soft material on the surface of the magnetic head until the surface of the magnetic head on which the short-circuit substance is formed becomes a mirror surface. Production method.
【請求項5】柔材料は、繊維状の樹脂材料であることを
特徴とする請求項3または4記載の磁気ヘッドの製造方
法。
5. The method of manufacturing a magnetic head according to claim 3, wherein the soft material is a fibrous resin material.
JP27644994A 1994-11-10 1994-11-10 Production of magnetic head Pending JPH08138206A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27644994A JPH08138206A (en) 1994-11-10 1994-11-10 Production of magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27644994A JPH08138206A (en) 1994-11-10 1994-11-10 Production of magnetic head

Publications (1)

Publication Number Publication Date
JPH08138206A true JPH08138206A (en) 1996-05-31

Family

ID=17569594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27644994A Pending JPH08138206A (en) 1994-11-10 1994-11-10 Production of magnetic head

Country Status (1)

Country Link
JP (1) JPH08138206A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022027761A (en) * 2020-07-29 2022-02-14 フジオーゼックス株式会社 Manufacturing method of engine valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022027761A (en) * 2020-07-29 2022-02-14 フジオーゼックス株式会社 Manufacturing method of engine valve

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