JPH08136723A - Production of color filter - Google Patents

Abstract

PURPOSE: To reduce error in an alignment and to quickly and exactly execute an alignment operation with an aligner by providing an alignment mark for rough alignment on a mask for exposure at the time of pattern forming of the color filter. CONSTITUTION: An opening A is opened on a metallic sheet 1 by etching, and a peeling layer 2 of polyvinyl alcohol is formed over the opening A by coating. Then, a UV-curable photosensitive resin dispersing a red (R) color pigment of first color is applied, and the resultant is exposed and developed through a photomask 5 with a guide pin 6 as reference to form the color filter layer 3. In this case, a rough alignment mark (a) on the photomask 5 and the opening 1 are aligned with each other with a microscope of the aligner by using X, Y and θ knobs. Then, the alignment is executed between main pattern parts of the color filter layer 3 already formed and the photomask at the time of forming the second and the third color filter layers 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a color liquid crystal display device,
The present invention relates to a method for manufacturing a color filter incorporated in a color facsimile, a color image pickup device or the like.

[0002]

2. Description of the Related Art A metal sheet is used as a transfer base sheet,
There is a technique of patterning a color filter layer on the color filter layer and then transferring the color filter to a transfer target substrate coated with an adhesive. At this time, since the base of the transfer sheet is a light-impermeable metal sheet, there is a problem of how to perform optical alignment (positioning).

Conventionally, as shown in FIG. 4, a substantially alignment opening A is formed on the metal sheet 1 by etching, and the opening A and the alignment mark a ″ on the chrome plate 10 are visually aligned. Then, the tape 11 is fixed with a tape 11. Then, a release layer 2 is formed by coating on the metal sheet 1,
A photosensitive resin having a color pigment dispersed therein was applied thereon, and the photosensitive resin was pattern-exposed through the photomask 5 with the guide pin 6 as a reference. Therefore, due to the deviation of the positional accuracy during the etching of the opening A on the metal sheet 1 and the error in the visual alignment step, the distance between the chrome plate 10 and the metal sheet 1 which is the reference during exposure is several tens of μm. Error occurred. Because of this error, the amount of movement of the alignment becomes large, and since it is necessary to rely on manual work, the time required for the alignment work in each subsequent process was excessive.

[0004]

SUMMARY OF THE INVENTION The present invention reduces the above-mentioned positional accuracy error and speeds up the alignment operation.
The purpose is to be accurate.

[0005]

According to the present invention, a transfer sheet having a color filter pattern formed on the surface of a base sheet is prepared, and the color filter on the transfer sheet is made of glass having a low expansion coefficient as a base material. In the method for producing a color filter for transferring to a transferred material, a light-impermeable metal sheet having a coefficient of thermal expansion equal to that of the transferred material is used as a base material of the transfer sheet, and a peripheral portion of the surface of the metal sheet is used. An opening for substantially alignment is formed, and when forming the color filter on the base sheet, this opening for alignment is used for substantially alignment with the alignment mark of the exposure mask, and the color filter is transferred to the transfer target. In this case, the color filter manufacturing method is characterized in that the color filter is used for substantially alignment with the alignment mark of the transferred material.

Specifically, first, as shown in FIG. 1, first, a release layer 2 is formed by coating on a metal sheet 1 on which a substantially alignment opening A is formed by etching, and a coloring pigment is dispersed on the release layer 2. The resin is applied, and the photosensitive resin is exposed through the photomask 5 based on the guide pins 6 and developed to form the color filter layer 3. At this time, the openings A and the photomask 5 are substantially formed. The alignment mark a is aligned with a microscope of an aligner (alignment machine) using X, Y, and θ knobs. When forming the second and third color filter layers 3, alignment is performed between the already formed first color filter layer 3 and the main pattern portion of the photomask 5.

Next, as shown in FIG. 2, the color filter layer surface of the transfer sheet 4 formed as described above faces the transferred body 7 coated with the adhesive 8 as shown in FIG. Alignment mark a ′ of X,
Align with the aligner 9 having Y and θ knobs,
Then, the light-shielding film 12 and the color filter layer 3 of the transferred body 7
Precise alignment of the main patterns of and then overlay. After that, the metal sheet 1 is peeled off from the peeling layer 2 to obtain the structure shown in FIG.
Obtain a color filter as shown in.

[0008]

By providing the exposure mask with the alignment marks for substantially aligning the color filter pattern, the positional accuracy of the color filter layer on the metal sheet 1 is dramatically improved. Therefore, when transferring the color filter layer from the transfer sheet to the transfer target,
The amount of movement of the transferred material for alignment is reduced,
Alignment operations are quick and accurate.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings. In a method of manufacturing a color filter in which a color filter layer is transferred and formed on an arbitrary transfer target by a transfer method, a metal and a plastic having a low coefficient of thermal expansion as a transfer base sheet, for example, a nickel-iron alloy (42 alloy), Amber material, polyethylene terephthalate, polycarbonate, etc. are used. The present invention is a method for manufacturing a color filter when a light-impermeable metal is used as a base sheet.
2 alloy is adopted as the base sheet. 42 alloy (Ni:
42% by weight and the balance Fe) have a coefficient of thermal expansion of 20 to 40 × 10 ⁻⁷ ° C., which is similar to the coefficient of thermal expansion of the substrate glass used for LCD.

In the present invention, first, as shown in FIG. 1, an opening A is opened on a metal sheet 1 by etching, and a release layer 2 of polyvinyl alcohol is applied and formed on the opening A.
Next, a UV-curable photosensitive resin in which a first color red (R) color pigment is dispersed is applied, and the color filter layer 3 is formed by exposing and developing through the photomask 5 with the guide pin 6 as a reference. However, at this time, the opening A and the substantially alignment mark a on the photomask 5 are aligned by using the X, Y, and θ knobs with a microscope of an aligner (alignment machine). This resulted in an error of several μm, which is far smaller than the conventional visual alignment. When forming the second and third color filter layers 3, alignment is performed between the already formed color filter layer 4 and the main pattern portion of the photomask 5.

Next, the transfer sheet 4 formed as described above is faced to the transferred body 7 coated with the adhesive 8 made of a UV-curable resin as shown in FIG. 2, and the opening A and the transferred body are transferred. Alignment mark a ′ on 7 with X,
Align with the aligner 9 having Y and θ knobs,
Then, the light-shielding film 12 and the color filter layer 3 of the transferred body 7
Precision alignment is performed by comparing the shapes with the main patterns of, and then superposed. According to the present invention, the movement amount from the substantial alignment to the precise alignment is reduced by several tens of μm as compared with the conventional technique, and the alignment operation can be performed quickly and accurately. Here, the transferred body 7 is a glass substrate with a light shielding film, a thin film transistor, a glass substrate with a wiring layer, or the like. Then, the metal sheet 1 is peeled from the peeling layer 2 to obtain a color filter as shown in FIG.

[0012]

EFFECTS OF THE INVENTION It becomes possible to perform substantially alignment by transmitted light, and it becomes possible to perform automatic alignment. Further, since the amount of movement from the substantial alignment to the precise alignment is small, the alignment operation is quick and accurate.

[0013]

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing an example of a transfer sheet forming process used in the present invention.

FIG. 2 is an explanatory view showing an example of a transfer step of the present invention.

FIG. 3 is an explanatory diagram showing an example of a color filter obtained by the present invention.

FIG. 4 is an explanatory diagram showing an example of a step of forming a color filter layer by a conventional method.

[Explanation of symbols]

 1 Metal Sheet 2 Release Layer 3 Color Filter Layer 4 Transfer Sheet 5 Photomask 6 Guide Pin 7 Transfer Target 8 Adhesive 9 Aligner 10 Chrome Plate 11 Tape 12 Light-Shielding Film A Opening a, a ', a "Alignment Mark

Claims (1)

[Claims] 1. A color in which a transfer sheet is formed by forming a pattern of color filters on the surface of a base sheet, and the color filters on the transfer sheet are transferred to a transfer target having glass having a low expansion coefficient as a base material. In the method for manufacturing a filter, a light-impermeable metal sheet having a thermal expansion coefficient equal to that of the transfer target is used as a base material of the transfer sheet, and a substantially alignment opening is formed in a peripheral portion of the surface of the metal sheet. Then, this alignment opening is used for substantially alignment with the alignment mark of the exposure mask when forming the color filter on the base sheet, and when transferring the color filter to the transfer target, the transfer target A method for manufacturing a color filter, which is used for substantially alignment with an alignment mark.