JPH0812902A - Coating fluid for forming antireflection film and substrate with antireflection film - Google Patents

Coating fluid for forming antireflection film and substrate with antireflection film

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Publication number
JPH0812902A
JPH0812902A JP6150966A JP15096694A JPH0812902A JP H0812902 A JPH0812902 A JP H0812902A JP 6150966 A JP6150966 A JP 6150966A JP 15096694 A JP15096694 A JP 15096694A JP H0812902 A JPH0812902 A JP H0812902A
Authority
JP
Japan
Prior art keywords
antireflection film
substrate
refractive index
average particle
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6150966A
Other languages
Japanese (ja)
Other versions
JP3186437B2 (en
Inventor
Hiroo Yoshitome
留 博 雄 吉
Hiroyasu Nishida
田 広 泰 西
Michio Komatsu
松 通 郎 小
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JGC Catalysts and Chemicals Ltd
Original Assignee
Catalysts and Chemicals Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Catalysts and Chemicals Industries Co Ltd filed Critical Catalysts and Chemicals Industries Co Ltd
Priority to JP15096694A priority Critical patent/JP3186437B2/en
Publication of JPH0812902A publication Critical patent/JPH0812902A/en
Application granted granted Critical
Publication of JP3186437B2 publication Critical patent/JP3186437B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To provide a coating fluid which can form an antireflection film excellent in the antireflection function on the surface of a substrate by a simple process at a low cost and provide a substrate which has an antireflection film formed from the same. CONSTITUTION:A coating fluid is provided which contains fine particles having a large average particle size D1 and a high refractive index n1, fine particles having a small average particle size D2 and a low refractive index n2, and a film-forming component and satisfies the relations: D1/D2>=3 and n1>n2. A substrate is provided which has an antireflection film formed thereon from the same.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の技術分野】本発明は、反射防止膜形成用塗布液
および反射防止膜付基材に関し、さらに詳しくはガラ
ス、プラスチックなどからなる基材の表面反射を防止す
る反射防止膜形成用塗布液および反射防止膜付基材に関
する。
TECHNICAL FIELD The present invention relates to a coating liquid for forming an antireflection film and a substrate with an antireflection film, and more specifically, a coating liquid for forming an antireflection film for preventing surface reflection of a substrate made of glass, plastic or the like. And a substrate with an antireflection film.

【0002】[0002]

【発明の技術的背景】従来より、ガラス、プラスチック
などからなる基材表面に、高屈折率を有する透明被膜と
低屈折率を有する透明被膜とを交互に積層することによ
り、基材表面の反射率を効果的に低減した反射防止膜を
得ている。
BACKGROUND OF THE INVENTION Conventionally, a transparent coating having a high refractive index and a transparent coating having a low refractive index are alternately laminated on the surface of a substrate made of glass, plastic or the like to reflect the surface of the substrate. An antireflection film having an effective reduction in the rate is obtained.

【0003】従来、このような多層反射防止膜は、各層
毎に真空蒸着法、スパッタリング法などの乾式薄膜形成
法またはコーティング法、ディッピング法などの湿式薄
膜形成法で形成されていた。
Conventionally, such a multilayer antireflection film has been formed for each layer by a dry thin film forming method such as a vacuum vapor deposition method and a sputtering method or a wet thin film forming method such as a coating method and a dipping method.

【0004】しかしながら、このような従来の多層反射
防止膜の形成法では、各層毎に薄膜を形成する工程を繰
り返さなければならず、このため、反射防止膜の形成工
程が複雑になり、反射防止膜を形成する際に必要とされ
るコストが高くなるといった問題点があった。
However, in such a conventional method for forming a multilayer antireflection film, the step of forming a thin film for each layer must be repeated, which complicates the step of forming the antireflection film and prevents the reflection. There is a problem that the cost required for forming the film becomes high.

【0005】さらに、上記従来の乾式薄膜形成法で多層
反射防止膜を形成した場合には大面積の反射防止膜が得
難く、上記従来の湿式薄膜形成法で多層反射防止膜を形
成した場合には、高屈折率を有する透明被膜と低屈折率
を有する透明被膜との界面での密着性が不充分であるな
どの問題点があった。
Further, when a multilayer antireflection film is formed by the above-mentioned conventional dry thin film forming method, it is difficult to obtain a large-area antireflection film, and when a multilayer antireflection film is formed by the above-mentioned conventional wet thin film forming method. Has problems such as insufficient adhesion at the interface between the transparent coating having a high refractive index and the transparent coating having a low refractive index.

【0006】[0006]

【発明の目的】本発明は、上記事情に鑑みてなされたも
ので、反射防止性能に優れた反射防止膜が簡単な工程で
安価に基材表面に形成できるような反射防止膜形成用塗
布液、およびこのような塗布液から得られた反射防止膜
を有する反射防止膜付基材を提供することを目的として
いる。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and is an antireflection film-forming coating liquid capable of inexpensively forming an antireflection film having excellent antireflection performance on a substrate surface in a simple process. , And an antireflection film-coated substrate having an antireflection film obtained from such a coating liquid.

【0007】[0007]

【発明の概要】本発明に係る反射防止膜形成用塗布液
は、平均粒径D1 が大きく、屈折率n1が大きな微粒子
1 と、平均粒径D2 が小さく、屈折率n2 が小さな微
粒子P2と、被膜形成成分Fとを含有してなり、 D1 /D2 ≧3 n1 >n2 であることを特徴としている。
Antireflection film-forming coating liquid according to the SUMMARY OF THE INVENTION The present invention has a large average particle diameter D 1, the refractive index n 1 is greater particles P 1, smaller average particle diameter D 2, the refractive index n 2 It is characterized in that it contains small particles P 2 and a film-forming component F and that D 1 / D 2 ≧ 3 n 1 > n 2 .

【0008】上記微粒子P1 は、TiO2 、ZrO2
CeO2 またはSnO2 からなることが好ましく、上記
微粒子P2 は、MgF2 またはSiO2 からなることが
好ましい。
The fine particles P 1 are composed of TiO 2 , ZrO 2 ,
CeO 2 or SnO 2 is preferable, and the fine particles P 2 are preferably made of MgF 2 or SiO 2 .

【0009】本発明に係る反射防止膜付基材は、上記塗
布液から得られた反射防止膜を基材上に有することを特
徴としている。
The base material with an antireflection film according to the present invention is characterized by having the antireflection film obtained from the above coating solution on the base material.

【0010】[0010]

【発明の具体的説明】反射防止膜形成用塗布液 まず、本発明に係る反射防止膜形成用塗布液について具
体的に説明する。
DETAILED DESCRIPTION OF THE INVENTION Coating Liquid for Forming Antireflection Film First, the coating liquid for forming antireflection film according to the present invention will be specifically described.

【0011】本発明に係る反射防止膜形成用塗布液は、
平均粒径D1 が大きく、屈折率n1が大きな微粒子P1
と、平均粒径D2 が小さく、屈折率n2 が小さな微粒子
2とを含有している。
The coating liquid for forming an antireflection film according to the present invention is
Large average particle diameter D 1, the refractive index n 1 is greater particles P 1
And fine particles P 2 having a small average particle diameter D 2 and a small refractive index n 2 .

【0012】上記平均粒径D1 は0.08〜1.0μ
m、好ましくは0.1〜0.5μmであることが望まし
く、上記平均粒径D2 は0.001〜0.1μm、好ま
しくは0.01〜0.05であることが望ましい。
The average particle diameter D 1 is 0.08 to 1.0 μm.
m, preferably 0.1 to 0.5 μm, and the average particle diameter D 2 is 0.001 to 0.1 μm, preferably 0.01 to 0.05.

【0013】本発明では、上記平均粒径D1 と上記平均
粒径D2 とが、下記式: D1 /D2 ≧3 を満足することが必要である。
In the present invention, it is necessary that the average particle diameter D 1 and the average particle diameter D 2 satisfy the following formula: D 1 / D 2 ≧ 3.

【0014】D1 /D2 <3の場合には、平均粒径がD
1 であり、屈折率がn1 である微粒子P1 と、平均粒径
がD2 であり、屈折率がn2 である微粒子P2 とを含む
塗布液から基材上に形成された反射防止膜により、充分
な反射防止性能を基材に付与できないことがある。
When D 1 / D 2 <3, the average particle size is D
1, the fine particles P 1 having a refractive index of n 1, an average particle diameter of D 2, the coating liquid antireflective formed on a substrate from containing and fine particles P 2 having a refractive index of n 2 Depending on the film, sufficient antireflection performance may not be imparted to the substrate.

【0015】屈折率n1 が大きな材料としては、屈折率
が1.60以上のものであれば良く、具体的にはTiO
2 、ZrO2 、SnO2 、CeO2 、In2 3 あるい
はチタン酸バリウム、ダイアモンド、硫化亜鉛などが挙
げられ、TiO2 、ZrO2、CeO2 またはSnO2
が好ましい。
As a material having a large refractive index n 1 , any material having a refractive index of 1.60 or more may be used.
2 , ZrO 2 , SnO 2 , CeO 2 , In 2 O 3 or barium titanate, diamond, zinc sulfide and the like, and TiO 2 , ZrO 2 , CeO 2 or SnO 2
Is preferred.

【0016】屈折率n2 が小さな材料としては、屈折率
が1.45以下のものであれば良く、具体的にはSiO
2 、MgF2 、CaF2 、LiF、フッ素樹脂などが挙
げられ、MgF2 、SiO2 (多孔性シリカを含む)が
好ましい。
As a material having a small refractive index n 2 , any material having a refractive index of 1.45 or less may be used.
2 , MgF 2 , CaF 2 , LiF, fluororesin and the like can be mentioned, and MgF 2 and SiO 2 (including porous silica) are preferable.

【0017】上記屈折率n1 と上記屈折率n2 とは、下
記式: n1 >n2 で表される。この屈折率差(n1 −n2 )は、0.1以
上、特に0.2以上であることが好ましい。
The refractive index n 1 and the refractive index n 2 are represented by the following formula: n 1 > n 2 . This refractive index difference (n 1 −n 2 ) is preferably 0.1 or more, and particularly preferably 0.2 or more.

【0018】屈折率差(n1 −n2 )が0.1未満の場
合には、平均粒径がD1 であり、屈折率がn1 である微
粒子P1 と、平均粒径がD2 であり、屈折率がn2 であ
る微粒子P2 とを含む塗布液から基材上に形成された反
射防止膜により、充分な反射防止性能を基材に付与でき
ないことがある。
[0018] When the refractive index difference (n 1 -n 2) is less than 0.1, an average particle size of D 1, the fine particles P 1 having a refractive index of n 1, an average particle diameter D 2 Therefore, the antireflection film formed on the substrate from the coating liquid containing the fine particles P 2 having a refractive index of n 2 may not be able to impart sufficient antireflection performance to the substrate.

【0019】本発明に係る塗布液は、上記のような平均
粒径がD1 であり、屈折率がn1 である微粒子P1 と、
平均粒径がD2 であり、屈折率がn2 である微粒子P2
とを含んでいればよく、さらに前記微粒子P1 と平均粒
径および屈折率がほぼ等しい他の材料からなる微粒子、
前記微粒子P2 と平均粒径および屈折率がほぼ等しい他
の材料からなる微粒子、平均粒径および屈折率が前記微
粒子P1 とP2 との中間の値を示す他の材料からなる微
粒子を含んでいてもよい。
The coating solution according to the present invention comprises the fine particles P 1 having the average particle diameter D 1 and the refractive index n 1 as described above,
Average particle diameter of D 2, fine particles P 2 having a refractive index of n 2
And a fine particle made of another material having an average particle diameter and a refractive index substantially equal to those of the fine particle P 1 .
Including fine particles made of another material having an average particle diameter and refractive index substantially equal to those of the fine particles P 2, and fine particles made of another material having an average particle diameter and refractive index intermediate between those of the fine particles P 1 and P 2. You can leave.

【0020】前記微粒子P1 と前記微粒子P2 との混合
比(P1 /P2 )は、平均粒径D1およびD2 、屈折率
がn1 およびn2 の値に応じて適宜調整され、80/2
0〜20/80重量比、好ましくは70/30〜20/
80重量比に調整することが望ましい。
The mixing ratio (P 1 / P 2 ) of the fine particles P 1 and the fine particles P 2 is appropriately adjusted according to the average particle diameters D 1 and D 2 and the refractive indices n 1 and n 2. , 80/2
0 to 20/80 weight ratio, preferably 70/30 to 20 /
It is desirable to adjust the weight ratio to 80.

【0021】P1 /P2 が80/20重量比を越える
と、これらの微粒子P1 およびP2 を含む塗布液から基
材上に形成された被膜は、高屈折率を有する単層被膜と
区別できなくなり、基材上に被膜が形成されていない場
合に比較して基材の反射率を高めることがある。逆にP
1 /P2 が20/80重量比未満の場合には、これらの
微粒子P1 およびP2 を含む塗布液から基材上に形成さ
れた被膜は、低屈折率を有する単層被膜と区別できなく
なり、充分な反射防止性能を発揮しえないことがある。
When P 1 / P 2 exceeds 80/20 weight ratio, the coating film formed on the substrate from the coating solution containing these fine particles P 1 and P 2 is a single layer coating having a high refractive index. It may become indistinguishable, and the reflectance of the substrate may be increased as compared with the case where the coating is not formed on the substrate. Conversely, P
When 1 / P 2 is less than 20/80 weight ratio, the coating formed on the substrate from the coating liquid containing these fine particles P 1 and P 2 can be distinguished from the single-layer coating having a low refractive index. In some cases, sufficient antireflection performance cannot be exhibited.

【0022】本発明に係る反射防止膜形成用塗布液は、
上記微粒子P1 およびP2 に加え、さらに被膜形成成分
Fを含有している。この被膜形成成分Fは、この成分か
ら基材上に形成された被膜に必要とされる基材との密着
性、硬度、機械的強度、透明性などに応じて適宜選択さ
れる。
The coating liquid for forming an antireflection film according to the present invention is
In addition to the fine particles P 1 and P 2 described above, a film-forming component F is further contained. The film-forming component F is appropriately selected according to the adhesion to the substrate, hardness, mechanical strength, transparency, etc. required for the film formed on the substrate from this component.

【0023】この被膜形成成分Fを具体的に例示する
と、ポリエステル樹脂、アクリル樹脂、ウレタン樹脂、
エポキシ樹脂、メラミン樹脂、シリコーン樹脂、フッ素
樹脂、塩化ビニル樹脂、酢酸ビニル樹脂、紫外線硬化樹
脂などの重合体またはこれらの重合体を形成する際に用
いられるモノマーおよび/またはオリゴマー、あるいは
アルコキシシランなどのような加水分解重縮合性化合
物、さらにはポリシラザン、ポリシラン等の無機ポリマ
ーなどが挙げられる。
Specific examples of the film-forming component F include polyester resin, acrylic resin, urethane resin,
Polymers such as epoxy resins, melamine resins, silicone resins, fluororesins, vinyl chloride resins, vinyl acetate resins, and ultraviolet curing resins, or monomers and / or oligomers used in forming these polymers, or alkoxysilanes, etc. Such hydrolytic polycondensable compounds, and further inorganic polymers such as polysilazane and polysilane can be mentioned.

【0024】これらの被膜形成成分は、単独で、あるい
は2種以上を混合して用いられる。本発明に係る反射防
止膜形成用塗布液では、微粒子P1 およびP2 と被膜形
成成分Fとの混合比〔(P1 +P2 )/F〕が20/8
0〜90/10重量比、好ましくは30/70〜80/
20重量比に調整されていることが望ましい。
These film-forming components may be used alone or in admixture of two or more. In the coating liquid for forming an antireflection film according to the present invention, the mixing ratio [(P 1 + P 2 ) / F] of the fine particles P 1 and P 2 and the film-forming component F is 20/8.
0-90 / 10 weight ratio, preferably 30 / 70-80 /
It is desirable that the weight ratio is adjusted to 20.

【0025】本発明に係る反射防止膜形成用塗布液は、
希釈剤としてさらに必要に応じて有機溶媒を含んでい
る。この有機溶媒としては、メタノール、エタノール、
イソプロパノール、ブタノールなどのアルコール類、ア
セトン、MEK、MIBKなどのケトン類、酢酸エチ
ル、酢酸ブチルなどのエステル類、トルエン、キシレン
などの芳香族類、メチルセロソルブ、エチルセロソルブ
などのエーテル類などが挙げられる。
The coating liquid for forming an antireflection film according to the present invention is
If necessary, an organic solvent is further contained as a diluent. As the organic solvent, methanol, ethanol,
Examples include alcohols such as isopropanol and butanol, ketones such as acetone, MEK and MIBK, esters such as ethyl acetate and butyl acetate, aromatics such as toluene and xylene, and ethers such as methyl cellosolve and ethyl cellosolve. .

【0026】これらの有機溶媒は、単独で、あるいは2
種以上を混合して用いられる。本発明に係る反射防止膜
形成用塗布液は、本発明の目的を損なわない範囲で、た
とえば、染料、顔料などの着色剤を加えても良い。
These organic solvents may be used alone or in a mixture of 2
It is used as a mixture of two or more species. The coating liquid for forming an antireflection film according to the present invention may contain a colorant such as a dye or a pigment within a range not impairing the object of the present invention.

【0027】また、得られる被膜の耐擦傷性を付与する
目的で平均粒径D1 よりも大きい粒径の粒子を、被膜の
反射防止性能を損なわない程度に混合しても良い。
For the purpose of imparting scratch resistance to the obtained coating, particles having a particle diameter larger than the average particle diameter D 1 may be mixed to the extent that the antireflection performance of the coating is not impaired.

【0028】反射防止膜付基材 次いで本発明に係る反射防止膜付基材について説明す
る。本発明に係る反射防止膜付基材は、上記塗布液から
得られた反射防止膜をアクリル樹脂、ポリカーボネート
樹脂、PETなどのプラスチックまたはガラスなどから
なる基材上に有している。
Substrate with Antireflection Film Next, the substrate with antireflection film according to the present invention will be described. The base material with an antireflection film according to the present invention has the antireflection film obtained from the coating solution on a base material made of acrylic resin, polycarbonate resin, plastic such as PET, or glass.

【0029】反射防止を必要とする基材としては、カメ
ラ、メガネなどのレンズ、CRT、液晶表示装置などの
ような表示装置、複写機において原稿を載置するコンタ
クトガラスなどが挙げられ、これらは、通常、透明であ
る。
Examples of the base material requiring antireflection include a camera, a lens such as glasses, a CRT, a display device such as a liquid crystal display device, a contact glass for placing an original in a copying machine, and the like. , Usually transparent.

【0030】本発明では、これらの反射防止を必要とす
る基材上に、通常、0.1〜0.4μm、好ましくは
0.1〜0.2μmの反射防止膜が形成されている。こ
の反射防止膜は、上記塗布液をバーコート法、スピンコ
ート法、ロールコート法、スプレー法などの方法で基材
上に塗布した後、基材、塗布液中に含まれる被膜形成成
分Fの性質などに応じて乾燥・被膜形成成分Fの硬化が
行われる。
In the present invention, an antireflection film having a thickness of usually 0.1 to 0.4 .mu.m, preferably 0.1 to 0.2 .mu.m is formed on the substrate which requires antireflection. This antireflection film is obtained by applying the above coating solution onto a base material by a method such as a bar coating method, a spin coating method, a roll coating method, or a spraying method, and then applying the coating film forming component F contained in the base material and the coating solution. Drying and film-forming component F are cured depending on their properties.

【0031】たとえば被膜形成成分Fが紫外線硬化樹脂
である場合、塗布液を塗布・乾燥した後の基材に紫外線
を照射して被膜形成成分Fを硬化させることにより反射
防止膜付基材が得られる。被膜形成成分Fが熱硬化性樹
脂である場合、あるいは塗布液が有機溶媒を含む場合に
は、塗布液を塗布・乾燥した後の基材に熱処理を施すこ
とにより反射防止膜付基材が得られる。
For example, when the film-forming component F is an ultraviolet curable resin, the substrate after coating and drying the coating solution is irradiated with ultraviolet rays to cure the film-forming component F to obtain a substrate with an antireflection film. To be When the film-forming component F is a thermosetting resin, or when the coating liquid contains an organic solvent, the substrate after coating and drying the coating liquid is heat-treated to obtain a substrate with an antireflection film. To be

【0032】このようにして得られる本発明に係る反射
防止膜付基材が反射防止性能に優れる理由は、上記乾燥
・被膜形成成分Fの硬化の過程、例えば有機溶媒が蒸発
する過程で、高屈折率の大粒径粒子が主として基材と反
射防止膜との界面近くに集まり、高屈折率の大粒径粒子
上に低屈折率の小粒径粒子が形成された反射防止膜が得
られる。この結果、高屈折率の大粒径粒子を含む層と低
屈折率の小粒径粒子を含む層とがこの順序で基材上に形
成された従来の反射防止膜より広い領域で反射防止性能
が発揮されるものと推定される。
The reason why the substrate with an antireflection film according to the present invention thus obtained is excellent in the antireflection performance is that the substrate is high in the process of curing the drying / film forming component F, for example, the process of evaporating the organic solvent. Large particles with a large refractive index gather mainly near the interface between the substrate and the antireflection film, and an antireflection film in which small particles with a small refractive index are formed on large particles with a high refractive index is obtained. . As a result, the layer containing the large particle size particles having a high refractive index and the layer containing the small particle size particles having a low refractive index are provided in this order in a wider area than the conventional anti-reflection film. Is estimated to be exhibited.

【0033】[0033]

【発明の効果】本発明によれば、単層でありながら可視
光の全領域で1%以下の反射率を有する反射防止性能に
優れた反射防止膜が基材上に形成された反射防止膜付基
材が得られる。
EFFECTS OF THE INVENTION According to the present invention, an antireflection film having a single layer and a reflectance of 1% or less in the entire visible light region and having an excellent antireflection performance is formed on a substrate. A coated substrate is obtained.

【0034】[0034]

【実施例】以下、本発明を実施例により説明するが、本
発明はこれら実施例に限定されるものではない。
EXAMPLES The present invention will be described below with reference to examples, but the present invention is not limited to these examples.

【0035】[0035]

【実施例1】平均粒径0.14μmの酸化スズ微粒子
(n1 =2.10)がエタノールに分散したゾル(酸化
スズ濃度:15wt%)と、平均粒径0.02μmのシ
リカ微粒子(n2 =1.45)がエタノールに分散した
ゾル(シリカ濃度:20wt%)とを酸化スズ/シリカ
=35/65重量比となるように混合した。
Example 1 A sol in which tin oxide fine particles (n 1 = 2.10) having an average particle diameter of 0.14 μm are dispersed in ethanol (tin oxide concentration: 15 wt%) and silica fine particles (n having an average particle diameter of 0.02 μm (n 2 = 1.45) was mixed with sol (silica concentration: 20 wt%) dispersed in ethanol so that tin oxide / silica = 35/65 weight ratio was obtained.

【0036】被膜形成成分として紫外線硬化樹脂(大日
本インキ社製ユニデック 17−824)を2%含むイ
ソプロパノール/ブタノール混合溶液(イソプロパノー
ル/ブタノール混合比=1/1(wt/wt))に上記
混合ゾルを加え、固形分濃度4重量%の反射防止膜形成
用塗布液を調製した。
An isopropanol / butanol mixed solution (isopropanol / butanol mixing ratio = 1/1 (wt / wt)) containing 2% of an ultraviolet curable resin (Unidec 17-824 manufactured by Dainippon Ink and Chemicals Inc.) as a film-forming component was added to the above mixed sol. Was added to prepare a coating liquid for forming an antireflection film having a solid content concentration of 4% by weight.

【0037】この塗布液をNo.5のバーコーターで偏
光フィルム(日東電工社製NPF105DU)に塗布
し、乾燥後、80W/cmの紫外線(高圧水銀ランプ)
を照射して反射防止膜付基材を得た。
This coating solution was Polarizing film (NPF105DU manufactured by Nitto Denko Corporation) is coated with a bar coater No. 5 and dried, and then 80 W / cm ultraviolet ray (high pressure mercury lamp)
Was irradiated to obtain a base material with an antireflection film.

【0038】得られた反射防止膜付基材の波長550n
mにおける反射率を分光光度計(日本分光社製)で測定
したところ、反射率は0.6%であった。
The wavelength of the obtained antireflection film-coated substrate is 550 n.
When the reflectance at m was measured with a spectrophotometer (manufactured by JASCO Corporation), the reflectance was 0.6%.

【0039】[0039]

【実施例2】平均粒径0.12μmの酸化チタン微粒子
(n1 =2.50)がエタノールに分散したゾル(酸化
チタン濃度:10wt%)と、平均粒径0.03μmの
多孔質シリカ微粒子(n2 =1.43)がエタノールに
分散したゾル(シリカ濃度:20wt%)とを酸化チタ
ン/シリカ=40/60重量比となるように混合した。
Example 2 A sol (titanium oxide concentration: 10 wt%) in which titanium oxide fine particles (n 1 = 2.50) having an average particle diameter of 0.12 μm are dispersed in ethanol, and porous silica fine particles having an average particle diameter of 0.03 μm A sol in which (n 2 = 1.43) was dispersed in ethanol (silica concentration: 20 wt%) was mixed in a titanium oxide / silica = 40/60 weight ratio.

【0040】被膜形成成分としてアクリル樹脂(大日本
インキ社製アクリディック A−190)を3%含むメ
チルエチルケトン/トルエン混合溶液(メチルエチルケ
トン/トルエン混合比=1/1(wt/wt))に上記
混合ゾルを加え、固形分濃度5重量%の反射防止膜形成
用塗布液を調製した。
The above mixed sol was added to a methylethylketone / toluene mixed solution (methylethylketone / toluene mixing ratio = 1/1 (wt / wt)) containing 3% of an acrylic resin (Acridic A-190 manufactured by Dainippon Ink and Chemicals) as a film forming component. Was added to prepare a coating liquid for forming an antireflection film having a solid content concentration of 5% by weight.

【0041】この塗布液をNo.4のバーコーターで実
施例1と同様の偏光フィルムに塗布し、乾燥後、70℃
で加熱して反射防止膜付基材を得た。得られた反射防止
膜付基材の反射率を実施例1と同様にして測定したとこ
ろ、反射率は0.8%であった。
This coating solution was The same polarizing film as in Example 1 was coated with a bar coater No. 4 and dried at 70 ° C.
The substrate with an antireflection film was obtained by heating at. When the reflectance of the obtained substrate with antireflection film was measured in the same manner as in Example 1, the reflectance was 0.8%.

【0042】[0042]

【実施例3】平均粒径0.3μmの酸化スズ微粒子(n
1 =2.10)がエタノールに分散したゾル(酸化スズ
濃度:20wt%)と、平均粒径0.03μmのフッ化
マグネシウム微粒子(n2 =1.38)がエタノールに
分散したゾル(フッ化マグネシウム濃度:10wt%)
とを酸化スズ/フッ化マグネシウム=50/50重量比
となるように混合した。
Example 3 Tin oxide fine particles having an average particle size of 0.3 μm (n
1 = 2.10) dispersed in ethanol (tin oxide concentration: 20 wt%) and sol in which magnesium fluoride fine particles (n 2 = 1.38) having an average particle diameter of 0.03 μm are dispersed in ethanol (fluorinated). Magnesium concentration: 10 wt%)
And were mixed so that tin oxide / magnesium fluoride = 50/50 weight ratio.

【0043】被膜形成成分としてフッ素樹脂(旭硝子社
製ルミフロン)を1%含むメチルエチルケトン/トルエ
ン混合溶液(メチルエチルケトン/トルエン混合比=1
/1(wt/wt))に上記混合ゾルを加え、固形分濃
度2重量%の反射防止膜形成用塗布液を調製した。
A methyl ethyl ketone / toluene mixed solution containing 1% of a fluororesin (Lumiflon manufactured by Asahi Glass Co., Ltd.) as a film forming component (methyl ethyl ketone / toluene mixing ratio = 1).
/ (Wt / wt)) to prepare a coating liquid for forming an antireflection film having a solid content concentration of 2% by weight.

【0044】この塗布液をNo.5のバーコーターでア
クリル板に塗布し、乾燥後、80℃で加熱して反射防止
膜付基材を得た。得られた反射防止膜付基材の反射率を
実施例1と同様にして測定したところ、反射率は1.1
%であった。
This coating solution was It was coated on an acrylic plate with a bar coater of No. 5, dried, and then heated at 80 ° C. to obtain a substrate with an antireflection film. When the reflectance of the obtained substrate with antireflection film was measured in the same manner as in Example 1, the reflectance was 1.1.
%Met.

【0045】[0045]

【実施例4】平均粒径0.1μmの酸化セリウム微粒子
(n1 =2.50)がエタノールに分散したゾル(酸化
セリウム濃度:10wt%)と、平均粒径0.002μ
mのシリカ微粒子(n2 =1.45)がエタノールに分
散したゾル(シリカ濃度:20wt%)とを酸化セリウ
ム/シリカ=30/70重量比となるように混合した。
Example 4 A sol (cerium oxide concentration: 10 wt%) in which cerium oxide fine particles (n 1 = 2.50) having an average particle size of 0.1 μm are dispersed in ethanol, and an average particle size of 0.002 μ
A sol (silica concentration: 20 wt%) in which silica fine particles of m (n 2 = 1.45) were dispersed in ethanol was mixed so as to have a cerium oxide / silica = 30/70 weight ratio.

【0046】被膜形成成分として紫外線硬化樹脂(大日
本インキ社製ユニデック V−5500)を5%含むエ
タノール/イソプロパノール混合溶液(エタノール/イ
ソプロパノール混合比=2/1(wt/wt))に上記
混合ゾルを加え、固形分濃度3重量%の反射防止膜形成
用塗布液を調製した。
The above mixed sol was added to an ethanol / isopropanol mixed solution (ethanol / isopropanol mixing ratio = 2/1 (wt / wt)) containing 5% of an ultraviolet curable resin (Unidec V-5500 manufactured by Dainippon Ink and Chemicals) as a film forming component. Was added to prepare a coating liquid for forming an antireflection film having a solid content concentration of 3% by weight.

【0047】この塗布液をガラス板にディッピング法
(引上げ速度 100mm/分)で塗布し、乾燥後、8
0W/cmの紫外線を照射して反射防止膜付基材を得
た。得られた反射防止膜付基材の反射率を実施例1と同
様にして測定したところ、反射率は0.6%であった。
This coating solution was applied to a glass plate by a dipping method (pulling speed 100 mm / min), dried and then 8
The substrate with an antireflection film was obtained by irradiating with 0 W / cm of ultraviolet rays. When the reflectance of the obtained substrate with antireflection film was measured in the same manner as in Example 1, the reflectance was 0.6%.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 平均粒径D1 が大きく、屈折率n1 が大
きな微粒子P1 と、平均粒径D2 が小さく、屈折率n2
が小さな微粒子P2 と、被膜形成成分Fとを含有してな
り、 D1 /D2 ≧3 n1 >n2 であることを特徴とする反射防止膜形成用塗布液。
1. A large average particle diameter D 1, the refractive index n 1 is greater particles P 1, smaller average particle diameter D 2, the refractive index n 2
Containing small particles P 2 and a film-forming component F, wherein D 1 / D 2 ≧ 3 n 1 > n 2 is satisfied.
【請求項2】 前記微粒子P1 がTiO2 、ZrO2
CeO2 またはSnO2 からなり、前記微粒子P2 がM
gF2 またはSiO2 からなることを特徴とする請求項
1に記載の反射防止膜付基材。
2. The fine particles P 1 are TiO 2 , ZrO 2 ,
CeO 2 or SnO 2 , and the fine particles P 2 are M
The base material with an antireflection film according to claim 1, which is made of gF 2 or SiO 2 .
【請求項3】 請求項1に記載の塗布液から形成された
反射防止膜を基材上に有することを特徴とする反射防止
膜付基材。
3. A base material with an antireflection film, comprising an antireflection film formed from the coating liquid according to claim 1 on a base material.
JP15096694A 1994-07-01 1994-07-01 Coating solution for forming anti-reflective film and substrate with anti-reflective film Expired - Lifetime JP3186437B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15096694A JP3186437B2 (en) 1994-07-01 1994-07-01 Coating solution for forming anti-reflective film and substrate with anti-reflective film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15096694A JP3186437B2 (en) 1994-07-01 1994-07-01 Coating solution for forming anti-reflective film and substrate with anti-reflective film

Publications (2)

Publication Number Publication Date
JPH0812902A true JPH0812902A (en) 1996-01-16
JP3186437B2 JP3186437B2 (en) 2001-07-11

Family

ID=15508335

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Country Status (1)

Country Link
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003049092A (en) * 2001-08-03 2003-02-21 Hitachi Chem Co Ltd Filler, resin composition, and application thereof
WO2003080718A1 (en) * 2002-03-22 2003-10-02 Institut für Neue Materialien Gemeinnützige GmbH Plastic film with a multilayered interference coating
JP2006161021A (en) * 2004-11-15 2006-06-22 Jsr Corp Curable liquid resin composition, cured film and laminate
JP2008007680A (en) * 2006-06-30 2008-01-17 Jsr Corp Curable resin composition and anti-reflection film
CN103052651A (en) * 2010-08-05 2013-04-17 日本曹达株式会社 Organic-inorganic complex and composition for forming same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003049092A (en) * 2001-08-03 2003-02-21 Hitachi Chem Co Ltd Filler, resin composition, and application thereof
WO2003080718A1 (en) * 2002-03-22 2003-10-02 Institut für Neue Materialien Gemeinnützige GmbH Plastic film with a multilayered interference coating
JP2006161021A (en) * 2004-11-15 2006-06-22 Jsr Corp Curable liquid resin composition, cured film and laminate
JP2008007680A (en) * 2006-06-30 2008-01-17 Jsr Corp Curable resin composition and anti-reflection film
CN103052651A (en) * 2010-08-05 2013-04-17 日本曹达株式会社 Organic-inorganic complex and composition for forming same
US20130131245A1 (en) * 2010-08-05 2013-05-23 Nippon Soda Co., Ltd. Organic-inorganic complex and composition for forming same
US9234117B2 (en) * 2010-08-05 2016-01-12 Nippon Soda Co., Ltd. Organic-inorganic complex and composition for forming same

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