JPH08118235A - Manufacture of liquid injection recording head and device thereof - Google Patents

Abstract

PURPOSE: To reduce the abrasion of a cutting blade grinding wheel as well as to prevent the generation of blinding, by predicting the self-growing function of the cutting blade grinding wheel. CONSTITUTION: A work W to be a substrate in which the structure member of a liquid injection recording head having a fluid passage including a discharge energy generating element is form, is fixed on a processing table 19, and the cutting part of the work W is positioned to the cutting blade grinding wheel 11. After that, the cutting blade grinding wheel 11 is rotated, a conductive cutting liquid L1 charged to the negative voltage by an electrolyte electrode 13,a is fed from a feeding port 14, and a positive voltage is applied to the cutting blade grinding wheel 11, so as to generate an electric elusion phenomemon, and the work W is cut. Consequently, since the abrasive grain binder of the cutting blade grinding wheel 11 is solved out to continue a dressing effect, a high accuracy of discharge port surface can be formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for manufacturing a liquid jet recording head used in a recording apparatus such as a liquid jet recording apparatus, a copying machine or a facsimile.

[0002]

2. Description of the Related Art A conventional liquid jet recording head is manufactured, for example, by the manufacturing method described below.

A wall member of a recording liquid flow path made of a photosensitive resin is formed on a substrate on which a plurality of ejection energy generating elements are provided at a predetermined distance from each other, and the ejection energy generating elements are sandwiched between the wall members. After forming a plurality of recording head units on one substrate by joining a covering member that covers the upper portion of the wall member, a portion of the recording liquid flow path is separated from the ejection energy generating element by a predetermined distance. A discharge port surface is formed by cutting in a direction intersecting the direction (see US Pat. No. 4,417,251).

In the above method, in order to obtain as many liquid jet recording heads as possible from one substrate, the cutting line width needs to be suppressed to about 0.1 to 0.3 mm. Therefore, using a resin-bonded or metal-bonded ultra-thin cutting blade grindstone, a single-cut method with one ultra-thin cutting blade grindstone or a step-cut method of cutting in stages with multiple types of ultra-thin cutting blade grindstones is adopted ing.

[0005]

However, in the above-mentioned prior art, since the liquid jet recording head is made of an organic material or an inorganic material including resin, the resin adheres to the cutting blade grindstone and clogging occurs. However, there is an unsolved problem as described below, because the autogenous action of the cutting blade grindstone is alienated.

(1) When the rigidity of the cutting blade grindstone is small, the cutting blade grindstone meanders and cannot linearly cut, and the area from the discharge energy generating element to the discharge port surface where the discharge port is opened. The distance becomes unstable, and as a result,
There may be variations in the recording liquid ejection characteristics of the liquid jet recording head.

(2) Since the cutting blade grindstone meanders due to clogging of the cutting blade grindstone due to adhesion of resin,
Side runout of the cutting blade grindstone during cutting increases,
As a result, the members around the discharge port are scratched or chipped, which is a major factor in reducing the manufacturing yield.

(3) In the case of a resin bond blade grindstone,
Although the self-action of the abrasive grains is excellent, it is easy to cause clogging due to fusion of the resin, so it is necessary to shorten the dressing interval and perform the dressing process frequently, and the cutting blade grindstone wears heavily, As a result, the life of the cutting blade grindstone is shortened. Further, in the case of a metal bond blade grindstone, although the wear is small, since there is almost no self-generated action, it is necessary to frequently perform the dressing process.

(4) When the step cut method is adopted, since various types of cutting blade grindstones are used, the cutting blade grindstone replacement timing and dressing timing are set depending on the variation in the life and dressing frequency of each cutting blade grindstone. Will be difficult. For this reason, using a cutting device equipped with two or more spindles is
It has been considered a disadvantage because it leads to a decrease in equipment availability.

The present invention has been made in view of the above-mentioned unsolved problems of the prior art, and it is possible to prevent clogging from occurring and accelerate the self-generated action of the cutting blade grindstone. It is an object of the present invention to realize a method and an apparatus for manufacturing a liquid jet recording head that can reduce the amount of wear of the liquid jet recording head.

[0011]

In order to achieve the above object, a method of manufacturing a liquid jet recording head according to the present invention is a structural member of a liquid jet recording head having a liquid flow path in which an ejection energy generating element is arranged. Manufacture of a liquid jet recording head in which a portion of the liquid flow path separated from the discharge energy generating element by a predetermined distance is cut by a cutting blade grindstone to form a discharge port surface having a discharge port. In the method, while applying a positive voltage to the cutting blade grindstone, cutting while supplying a negative voltage-charged conductive cutting fluid from the supply port of the electrolytic electrode to which a negative voltage is applied toward the cutting blade grindstone It is characterized by this.

In addition, it is possible to perform step cutting with a cutting blade grindstone that is rotated by two or more rotating means, or to add a negative voltage applied to the electrolytic electrode with an AC component to a predetermined DC bias voltage. Then it is effective.

Further, the distance between the electrolytic electrode and the cutting blade grindstone may be controlled by following the wear amount of the cutting blade grindstone, or the conductivity of the conductive cutting fluid may be controlled to a predetermined value and supplied. .

In the liquid jet recording head manufacturing apparatus of the present invention, the processing for supporting and positioning the substrate on which the structural member of the liquid jet recording head having the liquid flow path in which the ejection energy generating element is arranged is formed. A stage and a rotating means for supporting and rotating a cutting blade grindstone for cutting the substrate, an electrolytic electrode having a supply port for supplying a conductive cutting fluid toward the cutting blade grindstone, and the cutting An electrolytic power source for applying a positive voltage to the blade wheel and a negative voltage to the electrolytic electrode to charge the conductive cutting fluid to a negative voltage is provided.

Further, the rotating means for supporting and rotating the cutting blade grindstone is provided with two or more axes, or the electrolytic electrode is made of a material containing Ti as a main component.
The cutting blade grindstone is effective when it is a metal bond cutting blade grindstone containing Ni as a main component.

Further, a detecting means for detecting a wear amount of the cutting blade grindstone and outputting a gap amount correcting signal for correcting the distance between the electrolytic electrode and the cutting blade grindstone with respect to the wear amount, and a gap amount of the detecting means. With a correction signal, a gap adjusting mechanism for adjusting the distance between the electrolytic electrode and the cutting blade grindstone is provided, or with a conductivity control means for controlling the conductivity of the conductive cutting fluid to a predetermined value. And

[0017]

Since the abrasive grain binder of the cutting blade grindstone is eluted due to the electro-elution phenomenon of the conductive cutting fluid, the spontaneous action of the cutting blade grindstone during cutting is promoted and the stable dressing effect is maintained. As a result, highly accurate cutting is performed and a highly accurate ejection port surface is formed.

[0018]

Embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is an explanatory view showing the basic construction of an example of a liquid jet recording head manufacturing apparatus according to the present invention. The spindle 7 and the spindle 7 are rotated integrally by a driving means such as a motor (not shown). Rotating means for supporting and rotating the cutting blade grindstone 1 having a flange 2 for supporting the cutting blade grindstone 1 provided, and a processing table for supporting the work W and positioning it with respect to the cutting blade grindstone 1. 9, an electrolytic electrode 3 for charging the conductive cutting fluid to a negative voltage and supplying it to the cutting blade grindstone 1, and an electrolytic power source 5. The negative side of the electrolytic power source 5 has a measuring circuit 4 interposed. Is connected to the electrolytic electrode 3 by electric wiring, and the positive side is connected to the carbon brush 8 provided on the opposite flange side of the spindle 7 by electric wiring with the switching relay 6 interposed. To have. The surface of the electrolytic electrode 3 facing the cutting blade grindstone 1 has a planar shape.

FIG. 2 is an explanatory view showing only the electrolytic electrode of the first embodiment of the apparatus for manufacturing a liquid jet recording head of the present invention, and the cutting blade grindstone and the vicinity of the processing table. Predetermined space above (below,
It is called "gap". ) Placed with an electrolytic electrode 1
3 has a curved surface 15 whose surface facing the cutting blade grindstone 11 is curved along the outer periphery of the cutting blade grindstone 11,
A supply port 14 is opened in the curved surface 15 so that the conductive cutting fluid L ₁ supplied from a supply source (not shown) can be charged to a negative voltage and then supplied from the supply port 14 toward the cutting blade grindstone 11. It is configured.

Further, a nozzle 10 has its discharge port on the lower side of the cutting blade grindstone 11 for cutting blade grindstone 11.
The cutting fluid L ₂ discharged from the nozzle 10 flows in the same direction as the rotation direction of the cutting blade grindstone 11.

Except for the above-mentioned parts, the manufacturing apparatus shown in FIG.

FIG. 3 is a schematic partially cutaway perspective view showing an example of the liquid jet recording head manufactured according to the present invention. The substrate 2 is made of glass, ceramic, Si wafer or the like.
On the first element surface 21a, a plurality of electrodes 22 and electrothermal converters 22a, which are ejection energy generating elements, are arranged at predetermined intervals using a semiconductor manufacturing process such as sputtering, vapor deposition, and etching. , The element surface 21
The structural member 23 that forms a liquid chamber 27 made of a thermosetting resin such as an epoxy resin or a silicone resin and a plurality of liquid flow paths 24 that communicate the liquid chamber 27 and each discharge port 25 on the a Each electrothermal converter 22a is integrally molded so as to be located in each liquid flow path 24.

Such a liquid jet recording head is formed on the same substrate 21 in a state in which the portions which become the ejection port surface 25a in which the ejection port 25 is opened face each other, or
The liquid jet recording heads are formed in parallel in the same direction. In the former case, the cutting surface is cut so that the cut surface becomes the ejection opening surface 25a, and in the latter case, the adjacent portions are cut. At the same time, the liquid flow path 24 is obtained by cutting the liquid flow path 24 in a direction intersecting with the liquid flow path 24 so as to form the discharge port surface 25a in which the discharge port 25 is opened.

Next, the steps of a method of manufacturing a liquid jet recording head using this manufacturing apparatus will be described.

First, the substrate 21 (hereinafter referred to as “workpiece W”) on which the structural member 23 manufactured as described above is formed is fixed on the processing table 19 as shown in FIG. For this fixing, it is preferable to use any one of a vacuum suction means provided on the processing table 19, a hot-melt type adhesive, a dicing tape and the like.

After the above steps, the portion to be cut is positioned with respect to the cutting blade grindstone 11 based on the pattern or the like provided on the work W.

After the above steps, the cutting blade grindstone 11 is rotated, a negative voltage is applied to the electrolytic electrode 13 and a positive voltage is applied to the cutting blade grindstone 11, and the cutting blade grindstone 11 and the work W are fixed. Processing table 19
Is relatively moved and is cut by pressing the cutting blade grindstone 11 against the work W. At this time, conductive cutting charged to a negative voltage from the supply port 14 of the electrolytic electrode 13 to which a negative voltage is applied. The liquid L ₁ is supplied toward the cutting blade grindstone 11, and the cutting liquid L ₂ is supplied from the nozzle 10 so as to flow in the same direction as the rotation direction of the cutting blade grindstone 11.

In this case, the cutting blade grindstone 11 has a switching relay 6, a carbon brush 8,
A positive voltage is applied through the inner cylinder of the spindle 7 and the flange 12, and the electrolytic circuit 5 supplies the electrolytic circuit 13 with the measuring circuit 4
A negative voltage controlled to a predetermined value is applied by.

Through the above steps, the cutting blade grindstone 11 to which a positive voltage is applied cuts the work W,
At the time of this cutting, due to the electro-elution phenomenon that occurs with the conductive cutting fluid L ₁ that has been charged to a negative voltage as described above, the abrasive grain binder is eluted and the dressing effect can be maintained, so Accurate cutting can be performed.

In order to effectively generate this electro-elution phenomenon, the supply amount of the conductive cutting fluid is 0.1 to 3.0 liter / min, and the conductivity is 0.1 to 2.0 mS / cm. ,
The gap between the cutting blade grindstone and the electrolytic electrode is preferably within the range of 1/1 to 1/20 of the thickness of the cutting blade grindstone.
Below this range, the value of the current flowing between the cutting blade and the electrolytic electrode becomes small, and the cutting abrasive grains cannot be continuously exposed on the surface layer of the cutting blade grindstone, that is, the dressing effect cannot be continuously exerted. Further, in the range above this range, the current value becomes large, the wear of the cutting blade grindstone increases due to the excessive dressing action, and the ratio of the removal amount of the work to the wear amount of the cutting blade grindstone, that is, the so-called cutting ratio decreases. In addition, the abrasive grain binder on the surface of the cutting blade grindstone becomes rough, and the frequency of occurrence of chips or scratches on the cut surface of the work W increases. Further, the amount of cutting fluid supplied from the nozzle is preferably about 0.1 to 3.0 liters / min from the viewpoint of cooling effect and stable cutting accuracy.

Next, the second embodiment of the method of manufacturing the liquid jet recording head of the present invention and the second embodiment of the manufacturing apparatus used for the same.
Examples will be described.

As shown in FIGS. 4 and 5, the liquid jet recording head manufacturing apparatus of this embodiment has a processing table 39 for supporting and positioning the work W, and a cutting direction of the work W above the processing table 39. A first spindle 37a and a second spindle 37, which are arranged at intervals in the same direction and are rotated by driving means such as a motor (not shown).
b, a first cutting blade grindstone 31a supported by a flange 32a provided integrally with the first spindle 37a, and a second cutting blade grindstone 31a supported by a flange 32b provided integrally with the second spindle 37b. The cutting blade grindstone 31b is provided. Then, with respect to the first cutting blade grindstone 31a, an interval (hereinafter,
It is called "gap". ) Is put on the first electrolytic electrode 33a
Is provided and a nozzle 40a is provided at the side of the lower portion in the figure, while the second electrolytic electrode is spaced apart from the second cutting blade grindstone 31b above the figure in the figure. No. 33b is provided and a nozzle 40b is provided beside the lower portion in the figure, and the second spindle 37b is the first spindle 37b.
By setting the protruding length above the processing table 39 to be longer than a, the side surface of the first cutting blade grindstone 31a and the side surface of the second cutting blade grindstone 31b are parallel to each other with a predetermined gap. Is configured to be.

Further, the cutting blade grindstone used in the present invention may be a metal bond cutting blade grindstone or a range bond cutting blade grindstone, but the cutting blade grindstone is made of a material containing Ni as a main component, and the electrolytic electrode Is composed of a material containing Ti as a main component, the deterioration of the surface of the electrolytic electrode is prevented, the stability of the electrolytic current flowing between the cutting blade grindstone and the electrolytic electrode can be achieved, and the dressing effect can be stably connected. .

Next, the steps of the second embodiment of the method of manufacturing a liquid jet recording head will be described.

First, the work W manufactured as described above is fixed to the upper surface of the processing table 39 with the dicing tape 39a.

After the above steps, the portion to be cut is positioned with respect to the first cutting blade grindstone 31a based on the pattern or the like provided on the work W.
At this time, since the protruding length of the second cutting blade grindstone 31b is set so as to follow the cut portion of the work W cut by the first cutting blade grindstone 31a, the first cutting blade grindstone 31a The positioning is automatically performed by the above positioning.

After the above steps, the first cutting blade grindstone 31a and the second cutting blade grindstone 31b and the working table 39 to which the work W is fixed are moved relative to each other as in the step of the first embodiment. The cutting blade grindstones 31a and 31b are pressed against the work W for cutting, but the first cutting blade grindstone 31a is cut against the work W.
The depth of cut by the second cutting blade grindstone 31b is the second cutting blade grindstone 31 after making a cut at a predetermined cutting depth of the first cutting blade grindstone 31a.
Each cutting depth is set so as to completely cut at b. That is, it cuts by step cut.

At this time, the supply ports 34a and 34b of the first electrolytic electrode 33a and the second electrolytic electrode 33b, respectively.
The conductive cutting fluid charged to a more negative voltage is supplied to the cutting blade grindstones 31a and 31b, and the nozzles 40
cutting fluid from a, 40b, cutting blades 31a, 3
Supply toward 1b.

Next, the third embodiment of the method of manufacturing the liquid jet recording head of the present invention and the third embodiment of the manufacturing apparatus used for the same will be explained.

FIG. 6 is an explanatory view showing the basic construction of a third embodiment of the liquid jet recording head manufacturing apparatus of the present invention.
A spindle 47 rotated by a driving unit such as a motor (not shown), a flange 42 integrally provided on the spindle 47 for supporting and rotating the cutting blade grindstone 41, and a cutting blade grindstone supporting the work W. Four
1. A machining table 49 for positioning with respect to 1, and a cutting blade grindstone 41 by charging a conductive cutting fluid to a negative voltage.
Electrode 43 for supplying toward the
And the cutting blade grindstone 41 (hereinafter, “gap”)
And a gap control mechanism 51 for adjusting the gap amount, and a gap amount correction signal for detecting the wear amount of the cutting blade grindstone 41 and correcting the gap amount with respect to the wear amount is output to the gap control mechanism 51. Wear amount measuring mechanism 52 and an electrolysis power source 45
Has its negative side connected to the electrolytic electrode 43 via the measurement circuit 54 by electrical wiring, and its positive side connected via the switching relay 46 to the carbon brush 48 of the spindle 47 by electrical wiring.

The steps of a method of manufacturing a liquid jet recording head using the manufacturing apparatus shown in FIG. 6 will be described.

The work W is fixed to the processing table 49. The method of fixing the work W is the first in the manufacturing method described above.
The process may be similar to that of the embodiment.

After the above steps, the portion to be cut is positioned with respect to the cutting blade grindstone 41 based on the pattern or the like provided on the work W.

After the above steps, the processing table 49 on which the rotating cutting blade grindstone 41 and the work W are fixed
And relatively move and cutting blade grindstone 41
Cutting is started by pressing the
At this time, the conductive cutting liquid to which a negative voltage is applied is supplied from the supply port 44 of the electrolytic electrode 43, and the cutting liquid is supplied from the nozzle 50. In this case, a positive voltage is applied to the cutting blade grindstone 41 sequentially from the electrolytic power source 45 through the switching relay 46, the carbon brush 48, the inner cylinder of the spindle 47, and the flange 42.

The cutting blade grindstone 41, to which the positive voltage is applied in the above process, cuts the work W.
At the time of this cutting, an electro-elution phenomenon occurs between the conductive cutting fluid charged to the negative voltage, the abrasive bond is eluted to promote self-generation, and the dressing effect can be maintained. High-precision cutting is performed.

As the cutting progresses, the cutting blade grindstone 41 becomes worn due to the dressing effect and the electrolytic electrode 43
Although the gap between the cutting blade grindstone 41 and the cutting blade grindstone 41 increases, in this embodiment, the wear amount measuring mechanism 52 detects the wear amount of the cutting blade grindstone and outputs a gap amount correction signal corresponding to the wear amount to the gap control mechanism 51. And the gap control mechanism 51 moves the electrolytic electrode 43 in the direction toward the cutting blade grindstone 41 to maintain the set gap amount.

In this embodiment, since the gap amount between the cutting blade grindstone 41 and the electrolytic electrode 43 is kept constant, the electrolytic current becomes more stable, and as a result, the dressing effect can be stabilized.

Next, a fourth embodiment of the method of manufacturing the liquid jet recording head of the present invention and a fourth embodiment of the manufacturing apparatus used for the same will be described.

As shown in FIG. 8, the liquid jet recording head manufacturing apparatus of this embodiment is provided with a spindle rotated by a driving means such as a motor (not shown) and a cutting blade grindstone 6.
1. A flange 62 integrally provided on the spindle for supporting and rotating the workpiece ₁ , a working table 69 for supporting the work W and positioning it with respect to the cutting blade grindstone 61, and a conductive cutting fluid L ₁ Electrode 6 for charging the negative electrode to a negative voltage and supplying it toward the cutting blade grindstone 61
3, the electrolytic electrode 63 has an arc-shaped discharge port surface 63b facing the cutting blade grindstone 61.
3b includes a plurality of supply ports 64 that communicate with the common liquid chamber 63a.
Is supplied to the cutting blade grindstone 61 by supplying the conductive cutting fluid L ₁ whose conductivity is adjusted by the conductivity adjusting device 71 to the common liquid chamber 63a through the supply pipe 78. It is configured to be able to.

The conductivity adjusting device 71 includes a stock solution tank 72 for storing a stock solution 72a of a conductive cutting fluid, and a stock solution tank 7.
2. The conductivity adjustment for mixing and storing the undiluted solution 72a supplied by the introduction pipe 74 having the first control valve 75 interposed therebetween and the water supplied by the water supply pipe 76 having the second control valve 77 interposed therebetween. The tank 73 is provided, and the conductivity measurement control unit 79 controls the first control valve 75 or the second control valve 77 to change the supply amount of the stock solution 72a or water to adjust the concentration of the conductive cutting fluid L _1. It is configured so that the conductivity can be controlled to a predetermined value. The water may be tap water or distilled water.

Since the structure of the parts other than the above may be the same as that of the manufacturing apparatus shown in FIG. 1, the description thereof will be omitted. Further, it goes without saying that this embodiment can be applied to the manufacturing apparatus shown in FIG.

Further, the process of this embodiment may be the same as that of the first embodiment of the method for manufacturing the liquid jet recording head, and therefore its explanation is also omitted.

In the present embodiment, since the conductivity of the conductive cutting fluid L ₁ is controlled so as to always be a predetermined value, the current distribution of the electrolytic current flowing between the electrolytic electrode 63 and the cutting blade grindstone 61 is made uniform. It becomes possible to do. As a result, the cutting blade grindstone 61 is evenly worn and local wear is less likely to occur.
The gap between and can be stabilized.

FIG. 9 is an explanatory view showing a modification of the liquid jet recording head manufacturing apparatus. In this modification, the supply port 8 is used.
In addition to the electrolytic electrode 83 having 4 and the nozzle 90 for supplying the cutting fluid, a pair of L-shaped nozzles 91 are arranged on both sides in the thickness direction of the cutting blade grindstone 81 supported by the flange 82. The pair of L-shaped nozzles 91 is configured to supply the conductive cutting fluid toward the cutting blade grindstone 81.

According to this modification, the conductive cutting fluid supplied from the supply port 84 of the electrolytic electrode 83 and the pair of L-shaped nozzles 91 has a cooling and cleaning action on the cutting blade grindstone 81 and the work (not shown). A cutting blade grindstone of the conductive cutting fluid which is provided and is supplied to the gap between the electrolytic electrode 83 and the cutting blade grindstone 81 along the rotation direction of the cutting blade grindstone 81 and is supplied from the supply port 84 of the electrolytic electrode 83. Compensate for the loss due to the rotation of 81. As a result, the supply amount of the conductive cutting fluid is stable and the electrolytic current is also stable, so that the cutting blade grindstone 8 by the electro-elution phenomenon is generated.
The dressing effect of No. 1 is stable, and the life of the cutting blade grindstone can be extended.

(Experimental Example 1) The liquid jet recording head shown in FIG. 3 was manufactured using the first embodiment of the liquid jet recording head manufacturing apparatus shown in FIGS. The processing conditions at this time are as follows.

The supply amount of the conductive cutting fluid containing alkanolamine as a main component was 1.0 liter / min, and the conductivity was 0.
23 mS / cm, the gap between the electrolytic electrode and the cutting blade grindstone is 30 μm, which is 1/10 of the thickness of the cutting blade grindstone, which is 1/10, and an electrolytic power source having a variable frequency and variable amplitude AC voltage applying mechanism is used. (DC) and basic frequency 10Hz, 100Hz, 1,000
An alternating current component of Hz was applied (the amplitude was 100% of the bias voltage), and an electrolytic current of each form was generated when the amplitude was 30% at 100 Hz.

The power consumption (W) of the spindle motor, which is the driving means for rotating the cutting blade grindstone during the cutting processing under the above processing conditions, that is, the cutting load, and the electrolytic current flowing between the electrolytic electrode and the cutting blade grindstone. The result of measuring (mA) with respect to the cutting distance is shown in FIG. In order to stabilize the above-mentioned electrolytic current and the long cutting distance of the dressing effect corresponding thereto, a cutting distance of 10 times the actual cutting distance is cut and processed, and the effect of the DC electrolytic current by the DC voltage application and the DC application FIG. 11 shows the results of comparative measurement of the effect of the electrolytic current when the AC component voltage with the frequency changed was applied to the voltage.

As is clear from FIG. 10, since the change in the cutting load is small, it can be seen that the dressing effect of the cutting blade grindstone due to the electric dissolution phenomenon is maintained during the cutting process. Therefore, offline dressing using a dressboard or the like is not required, the life of the cutting blade grindstone is extended, and the cutting process can be stabilized and the manufacturing yield can be improved.

Further, as is apparent from FIG. 11, by using the DC bias voltage and the AC component voltage together, not only stable characteristics of the electrolytic current can be obtained at all times during the cutting distance, but also a microscale is obtained at the time of cutting. It was confirmed that the temperature was stabilized by, and the dressing effect was correspondingly stable.

The frequency of the applied AC component is preferably 100 Hz or less, and the amplitude of the AC component is 20% or less of the DC bias voltage, though it depends on the concentration of the conductive cutting fluid and the surface tension.
Particularly, the amplitude of the AC component was preferably within the range of 2 to 20% of the DC bias voltage. Also, the waveform need not be limited to a sine wave.

Further, Table 1 shows the examination results of the micro stability with respect to the cutting distance (10 μm to 10 mm) and the long-term stability (100 mm or more).

[0064]

[Table 1] Evaluation Criteria ⊚: Work chipping 5 μm or less ◯: Work chipping 10 μm or less Δ: Work chipping 20 μm or less (Experimental Example 2) Manufacturing apparatus similar to the second embodiment of the apparatus for manufacturing a liquid jet recording head shown in FIGS. 4 and 5 ( Product name Di
SDF DFD-3D / 8) is used, and the first cutting blade grindstone is a metal bond cutting blade grindstone # 100.
0, a metal bond cutting blade grindstone # 4000 was used as the second cutting blade grindstone. The electrolysis power source used had a variable frequency and variable amplitude AC voltage applying mechanism. The processing conditions at this time are as follows.

Cutting fluid supply rate 0.6 liter / min,
The supply amount of the conductive cutting fluid (using Kamata Shokai D-24 Co., Ltd.) is 1.0 liter / min together with the first electrolytic electrode and the second electrolytic electrode, the conductivity is 0.23 mS / cm, the electrolytic electrode and the cutting blade grindstone. The gap between and is 60 μm, which is ⅕ of the thickness of the cutting blade grindstone of 300 μm, the DC bias voltage is 10 V, and the AC component is 1 with each electrolytic power source.
V and 100 Hz. Furthermore, as the waveform, the fundamental wave 1
The pulse waveform was 00 Hz.

FIG. 12 shows the results of measuring the power consumption (W) of the spindle motors of the first spindle and the second spindle, that is, the cutting load, during cutting under the above processing conditions.

As is clear from FIG. 12, the fluctuations in the cutting load of the two cutting blade grindstones are small, and the difference between the two is small, and it is confirmed that the life of both cutting blade grindstones is almost equal. Was done.

An AC voltage of 70% Duty was applied using an electrolytic electrode having a duty (Duty%) adjustment mechanism and a mechanism for applying an AC voltage with respect to this Experimental Example 2, and the result is almost the same as in FIG. there were.

(Experimental Example 3) In this experimental example, the same type of cutting blade grindstone was attached to the first cutting blade grindstone and the second cutting blade grindstone in the same manufacturing apparatus as in Experimental Example 2, and two workpieces were simultaneously single-cut. I cut it. The conditions at that time are as follows.

Supply of conductive cutting fluid 1.0 liter / m
in, conductivity 0.23 mS / cm, gap between electrolytic electrode and cutting blade grindstone is thickness of cutting blade grindstone 2
It was set to 20 μm, which is 1/10 of 00 μm. Further, since the shape of the supply port surface of the electrolytic electrode is flat, the minimum gap is 20 μm.

In the present experimental example, since two positions of the work were single-cut at the same time, that is, two lines were cut simultaneously, mass productivity is improved.

Experimental Example 4 The liquid jet recording head shown in FIG. 3 was manufactured using the first embodiment of the liquid jet recording head manufacturing apparatus shown in FIGS. The electrolytic power source used was one provided with a duty (Duty%) adjusting mechanism and a mechanism for applying an AC voltage, and cutting was performed under the following processing conditions.

Supply of conductive cutting fluid 1.0 liter / m
in, conductivity 0.23 mS / cm, gap between electrolytic electrode and cutting blade grindstone is thickness of cutting blade grindstone 300
It was set to 30 μm, which is 1/10 of μm. In addition, the electrolysis power source is used to set a duty 50 as shown in FIG.
The setting was made to generate a positive / negative inversion current in%.

The power consumption (W) of the spindle motor during cutting under the above processing conditions, that is, the cutting load, and the electrolytic current (mA) flowing between the electrolytic electrode and the cutting blade grindstone were measured with respect to the cutting distance. FIG. 14 shows the amount of the electrolysis product attached to the electrolysis electrode.

From this experiment, it was confirmed that the use of a pulsed current with positive and negative inversions always provided stable electrolytic current characteristics over a long cutting distance, and correspondingly made the electrolytic dressing effect safe. In particular, according to the measurement result of the amount of deposited electrolytic products, the electrolytic products attached to the electrolytic electrodes are removed by applying a negative voltage, and the surface state of the electrolytic electrodes is constantly maintained by the electro-elution phenomenon. It becomes possible. In other words, it is possible to maintain the electrolytic electrode online, which improves the operating rate of the device.
The trouble factor for the additional mechanism around the electrolytic electrode such as the improvement of the conductive efficiency of the electrolytic electrode and the function of the electrolytic electrode to follow the abrasion of the cutting blade grindstone has been eliminated.

[0076]

Since the present invention is configured as described above, it has the following effects.

(1) The distance from the ejection energy generating element to the ejection port surface where the ejection port is opened is stable, and the recording liquid ejection characteristics of the liquid ejection recording head are improved.

(2) The clogging of the cutting blade grindstone due to the adhesion of the constituent material of the liquid jet recording head is effectively removed by the dressing effect by the self-generated action. For this reason, the wobbling of the side face of the cutting blade grindstone during the cutting process becomes small, and it becomes possible to form a highly accurate discharge port surface with no scratches or chips around the discharge port. As a result, the manufacturing yield is improved and a liquid jet recording head with stable quality can be manufactured.

(3) Since the cutting blade grindstone is dressed by self-production during the cutting process, the manufacturing efficiency is improved because the offline dressing step is unnecessary. In addition, since a cutting blade grindstone of a metal bond, which originally has a small self-generated effect, can be used, the cutting width can be narrowed and the number of liquid jet recording heads taken from the same substrate can be increased, so that the manufacturing cost can be reduced.

(4) When an electrolysis voltage obtained by adding an AC component to the DC bias voltage is applied to the electrolysis electrode, the electrolysis current is stabilized at a long cutting distance and power can be saved.

(5) Further, if the cutting process is performed by the cutting blade grindstones supported by the rotating means having two or more axes, the mass production can be improved, so that the number of installed manufacturing apparatuses can be reduced and the space can be saved. Further, labor saving can be realized, and the manufacturing cost of the liquid jet recording head can be remarkably reduced.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing a basic configuration of an example of a liquid jet recording head manufacturing apparatus of the present invention.

FIG. 2 is a first manufacturing apparatus for a liquid jet recording head according to the present invention.
It is explanatory drawing which shows only the principal part of an Example.

FIG. 3 is a schematic partially cutaway perspective view showing an example of a liquid jet recording head manufactured according to the present invention.

FIG. 4 is a second manufacturing apparatus for a liquid jet recording head according to the present invention.
It is explanatory drawing which shows only the principal part of an Example.

5 is a schematic plan view of a manufacturing apparatus of the liquid jet recording head shown in FIG.

FIG. 6 is a third manufacturing apparatus for a liquid jet recording head according to the present invention.
It is explanatory drawing which shows the basic composition of an Example.

FIG. 7 is an explanatory diagram showing only the main part of the third embodiment shown in FIG.

FIG. 8 is a fourth manufacturing apparatus for a liquid jet recording head according to the present invention.
It is explanatory drawing which shows only the principal part of an Example.

FIG. 9 is an explanatory diagram showing a modification of the manufacturing apparatus for the liquid jet recording head of the present invention.

FIG. 10 is a graph showing the relationship between the cutting load and the electrolytic current and the cutting distance in the liquid jet recording head manufacturing apparatus of the present invention.

FIG. 11 is a graph similar to FIG. 10, showing the effect of electrolytic current in the liquid jet recording head manufacturing apparatus of the present invention.

FIG. 12 is a graph showing a cutting load of each spindle motor in Experimental Example 2.

FIG. 13 is an explanatory diagram showing a pulse waveform with a duty of 50% in Experimental Example 4;

FIG. 14 is a graph showing a cutting load, an electrolytic current, and an adhesion amount of an electrolytic product in Experimental Example 4.

[Explanation of symbols]

1, 11, 31a, 31b, 41, 61, 81 Cutting blade grindstones 2, 12, 32a, 32b, 42, 62, 82 Flange 3, 13, 33a, 33b, 43, 63, 83 Electrolytic electrode 4, 54 Measuring circuit 5,45 Electrolytic power source 6,46 Switching relay 7,37a, 37b, 47 Spindle 8,48 Carbon brush 9,19,39,49,69 Processing table 10,40a, 40b, 50,70 Nozzle 21 Substrate 21a Element surface 22 Electrode 22a Electrothermal converter 23 Structural member 24 Liquid flow path 25 Discharge port 25a Discharge port surface 26 Supply pipe

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Hajime Yamamoto 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc.

Claims (15)

[Claims] 1. A part of the liquid flow path, on which a substrate on which a structural member of a liquid jet recording head having a liquid flow path in which an ejection energy generation element is provided is formed, is separated from the ejection energy generation element by a predetermined distance. In the method of manufacturing a liquid jet recording head for forming a discharge port surface where the discharge port is opened by cutting with a cutting blade grindstone, a positive voltage is applied to the cutting blade grindstone, and a negative voltage is applied to the electrolytic electrode. A method for manufacturing a liquid jet recording head, characterized in that a conductive cutting fluid charged to a negative voltage from a supply port is cut while being supplied toward the cutting blade grindstone. 2. The method for manufacturing a liquid jet recording head according to claim 1, wherein the cutting is performed by step cutting with a cutting blade grindstone that is rotated by two or more rotating means. 3. The method for manufacturing a liquid jet recording head according to claim 1, wherein the negative voltage applied to the electrolytic electrode is a predetermined DC bias voltage to which an AC component is added. 4. The method for manufacturing a liquid jet recording head according to claim 3, wherein the AC component is 100 Hz or less. 5. The method for manufacturing a liquid jet recording head according to claim 3, wherein the amplitude of the AC component is 20% or less of the DC bias voltage. 6. The method for manufacturing a liquid jet recording head according to claim 5, wherein the AC component has a pulse waveform. 7. The method for manufacturing a liquid jet recording head according to claim 6, wherein the pulse waveform is inverted in polarity. 8. The method for manufacturing a liquid jet recording head according to claim 1, wherein the distance between the electrolytic electrode and the cutting blade grindstone is controlled by following the wear amount of the cutting blade grindstone. . 9. The method of manufacturing a liquid jet recording head according to claim 1, wherein the conductivity of the conductive cutting fluid is controlled to a predetermined value before being supplied. 10. The gap between the surface where the supply port of the electrolytic electrode is opened and the cutting blade grindstone is in the range of 1/1 to 1/20 of the thickness of the cutting blade grindstone. 10. A method of manufacturing a liquid jet recording head according to any one of 9 to 10. 11. A processing stage for supporting and positioning a substrate on which a structural member of a liquid jet recording head having a liquid flow path in which an ejection energy generating element is arranged is formed,
The cutting blade grindstone for cutting the substrate is provided with a rotating means for supporting and rotating, an electrolytic electrode having a supply port for supplying a conductive cutting fluid toward the cutting blade grindstone, and the cutting blade grindstone An apparatus for manufacturing a liquid jet recording head, comprising an electrolytic power source for applying a positive voltage and a negative voltage to an electrolytic electrode to charge the conductive cutting fluid to a negative voltage. 12. The apparatus for manufacturing a liquid jet recording head according to claim 11, wherein two or more rotating means for supporting and rotating the cutting blade grindstone are provided. 13. The liquid jet recording according to claim 11, wherein the electrolytic electrode is made of a material containing Ti as a main component, and the cutting blade grindstone is a metal bond cutting blade grindstone containing Ni as a main component. Head manufacturing equipment. 14. A detection means for detecting the wear amount of the cutting blade grindstone and outputting a gap amount correction signal for correcting the distance between the electrolytic electrode and the cutting blade grindstone with respect to the wear amount.
14. The liquid jet recording head according to claim 11, further comprising a gap adjusting mechanism for adjusting a distance between the electrolytic electrode and the cutting blade grindstone according to a gap amount correction signal of the detecting means. apparatus. 15. The liquid jet recording head according to claim 11, further comprising conductivity control means for controlling the conductivity of the conductive cutting fluid to a predetermined value. apparatus.