JPH08115931A - Pellet bonding device - Google Patents

Abstract

PURPOSE: To surely prevent the bonding trouble caused by foreign matter on a pellet. CONSTITUTION: An air blow port 3 and a suction hole 3a are provided inside the middle pocket 2 of a pellet positioning part 1 where the positioning of a pellet 7 is performed prior to bonding, and each is connected, respectively, to a pipe 5 for air blowoff an a pipe 5a for exhaust provided inside a middle pocket 2 and a middle pocket mounting arm 4. Furthermore, each of the pipe 5 for air blowoff and the pipe 5a for exhaust is provided with a fiber 6, a filter 6a, a control valve 8, and a control valve 8a, and the air current for cleaning is made by performing the supply and exhaust operation of air to the middle pocket 2, and the foreign matter to the pellet 7 positioned inside the middle pocket 2 is removed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pellet bonding technique, and more particularly to a technique effectively applied to a pellet bonding technique with intermediate positioning.

[0002]

2. Description of the Related Art For example, "Latest semiconductor factory automation system comprehensive technology compilation" published by Science Forum Co., Ltd. 1
As described in the literature on pages 39 to 143, etc.,
In the pellet bonding apparatus, the pellets taken out from the pellet tray in which the pellets are stored in an aligned state are once transported to the intermediate pocket mechanism by the transport collet and positioned, and the pellets positioned by the intermediate pocket mechanism are bonded to the bonding collet. Bonding is performed on the target lead frame.

[0003]

By the way, the above-mentioned conventional intermediate pocket mechanism does not have a mechanism for removing foreign matters, and only positions the pellets conveyed from the pellet tray.

Therefore, when pellets are set in the intermediate pocket, foreign matter or the like is transferred / attached, and when bonding is performed with the foreign matter on the surface, pellet wetting or the like may occur due to the presence of foreign matter at the bonding site. There is a problem that defective bonding occurs.

An object of the present invention is to provide a pellet bonding technique capable of reliably preventing defective bonding due to adhesion of foreign matter to pellets.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0007]

Of the inventions disclosed in the present application, a representative one will be briefly described below.
It is as follows.

In the present invention, the intermediate pocket portion used for positioning the pellet is provided with a cleaning mechanism for cleaning at least one of the intermediate pocket portion and the pellet.

As the cleaning mechanism, for example, air and vacuum pipes are opened in the intermediate pocket portion, and the pellets set in the intermediate pocket portion are blown with air and sucked to remove foreign matters adhering to the pellets. A configuration can be adopted.

Further, the cleaning mechanism can be constituted by the adhesive tape exposed in the intermediate pocket portion and the winding mechanism for updating the adhesive tape by the winding operation.

[0011]

According to the above-described pellet bonding apparatus of the present invention, for example, when the pellet is set in the intermediate pocket portion, foreign matter or intermediate particles adhered to the pellet are operated by the operation of the air or vacuum piping established in the intermediate pocket portion. Foreign matter attached to the inner wall surface of the pocket can be forcibly shaken off and removed. This makes it possible to prevent foreign matter from adhering to the pellet that has arrived at the intermediate pocket portion by removing foreign matter from the pellet, and further removing foreign matter from the intermediate pocket portion.

Further, when the pellet is set in the intermediate pocket portion, the adhesive tape exposed on the bottom surface of the intermediate pocket portion is brought into contact with the pellet bottom surface (bonding surface), whereby foreign matters attached to the bottom portion of the pellet can be removed. . For this reason, it is possible to prevent a bonding failure due to the presence of foreign matter on the bottom surface of the pellet.

[0013]

Embodiments of the present invention will be described below in detail with reference to the drawings.

(Embodiment 1) FIG. 1 is a plan view showing an example of the structure of an intermediate pocket portion in a pellet bonding apparatus which is an embodiment of the present invention, and FIG. 2 is shown by II-II in FIG. FIG. 5 is a schematic plan view showing an example of the overall configuration of the pellet bonding apparatus of this embodiment.

First, an outline of the construction of the pellet bonding apparatus of this embodiment will be described with reference to FIG.

The pellet bonding apparatus of this embodiment is
It is provided with a lead frame supply unit 20 for supplying the lead frame 90 to which the pellets 7 are bonded, a lead frame transport unit 50, and a lead frame housing unit 60 for collecting the bonded lead frame 90.

In the vicinity of the lead frame carrying section 50, there are provided a preform section 30 and a bonding head 40 for applying a preform material such as silver paste to the bonding portion of the lead frame 90, A bonding collet 42 is supported on the bonding head 40 via a bonding arm 41. Although not shown in particular, the portion of the lead frame transport unit 50 immediately before the bonding head 40 functions as a bonding stage for bonding the pellet 7 to the lead frame 90.

At a position facing the bonding head 40 with the lead frame carrying section 50 interposed therebetween, a pellet positioning section 1 and a plurality of pellets 7 supported by an unillustrated casing via an intermediate pocket mounting arm 4 are provided. A pellet supply unit including an XY table (not shown) that supports the pellet trays 80 stored in the aligned state is provided.

Further, in the vicinity of the pellet supply section and the pellet locating section 1, a pellet transport arm 70 for individually transporting the pellets 7 from the pellet tray 80 to the pellet locating section 1 and a tip portion of the pellet transport arm 70. A transport collet 71 supported by the is provided.

FIG. 4 is a sectional view showing an example of the structure of the bonding collet 42 and the transfer collet 71 in this embodiment. For example, the main body 10 made of a high hardness material
On the bottom surface of 0, a pyramidal trapezoidal holding portion 101 is provided, and a suction path 102 for vacuum suction is provided at the center of the holding portion 101. The pellet 7 holding operation is performed by evacuating the closed space formed between the pellet 7 and the holding portion 101 in a state where the upper edge of the rectangular parallelepiped pellet 7 is in contact with the inclined surface portion of the holding portion 101. Is what is done.

In this case, the pellet positioning unit 1 is shown in FIG.
The configuration is illustrated in FIG.

That is, the air blow-out hole 3 and the suction hole 3a are provided in the inner peripheral surface of the intermediate pocket 2 which is provided in the pellet positioning portion 1 and has a flat bottom surface and a slope portion surrounding the flat bottom surface. Each is provided with an air blowing pipe 5 and an exhaust pipe 5 a provided inside the intermediate pocket 2 and the intermediate pocket mounting arm 4.
Respectively connected to. Air blowing pipe 5,
A filter 6 and a filter 6a are provided in each of the exhaust pipes 5a, and the air is cleanly supplied to the intermediate pocket 2.

A control valve 8 and a control valve 8a are provided in each of the air blowing pipe 5 and the exhaust pipe 5a to control whether air is supplied to the intermediate pocket 2 and whether the air is exhausted. It is possible.

Hereinafter, an example of the operation of the pellet bonding apparatus of this embodiment will be described with reference to the flowchart of FIG.

First, in the intermediate pocket 2 of the pellet positioning portion 1, for example, by simultaneously performing an air blowing operation from the air blowing hole 3 and a vacuum exhaust operation from the suction hole 3a, the intermediate pocket 2 Preliminary cleaning is performed in which an airflow is forcibly formed inside to remove foreign matter existing in the intermediate pocket 2 in advance.

After that, one pellet 7 in the pellet tray 80 is held by the transport collet 71 and is transported and positioned in the intermediate pocket 2 of the pellet positioning section 1.

After the transfer collet 71 is retracted from the intermediate pocket 2, for example, the air blowing operation from the air blowing hole 3 and the vacuum evacuation operation from the suction hole 3a are performed at the same time, whereby the intermediate pocket 2 An operation of forming a forced air flow inside and forcibly removing the foreign matter attached to the pellets 7 existing inside the intermediate pocket 2 is performed.

At this time, the control valve 8 and the control valve 8a are controlled in accordance with the size of the pellet 7 by controlling the flow rate of the air blown from the air blowing hole 3 and the strength of the vacuum exhaust operation from the suction hole 3a. Is controlled as appropriate.

Thereafter, the bonding collet 42 is operated by the movement of the bonding head 40 to hold the clean pellet 7 located inside the intermediate pocket 2.
The lead frame 9 is conveyed to the bonding stage on the lead frame conveying section 50 and is coated with a predetermined preforming agent when passing through the preform section 30 in advance.
Bonding is performed by thermocompression bonding or the like to a predetermined bonding portion of 0.

At this time, the pellet 7 is cleaned by removing the foreign matter in the intermediate pocket 2 as described above, so that the defective bonding due to the inclusion of the foreign matter with respect to the bonding site is surely avoided, and the good bonding is achieved. You can get results. That is, the product yield in the pellet process can be improved.

The lead frame 90 to which the pellets 7 are bonded is moved to the lead frame housing portion 60 side by a predetermined pitch.

By repeating such a series of operations, the pellets 7 are bonded to a plurality of positions on the lead frame 90, and the lead frame 90 after the bonding is collected in the lead frame housing section 60.

In the above description, the transport collet 71 is used.
Is performing the cleaning operation on the pellets 7 located inside the intermediate pocket 2 after retreating from the intermediate pockets 2.
Alternatively, the cleaning operation may be performed in a state where is fixed inside the intermediate pocket 2. In this case, there is an advantage that the position of the pellet 7 is stabilized and the transport collet 71 can be cleaned at the same time.

(Embodiment 2) FIG. 3 is a schematic sectional view showing the structure of a pellet positioning portion 1A in a pellet bonding apparatus which is another embodiment of the present invention.

In this case, an adhesive tape 10 is provided on the bottom surface 9 of the intermediate pocket 2A, and the adhesive tape 10 is stretched around the feeding roller 11 and the take-up roller 12.

Then, as illustrated in the flow chart of FIG. 7, the feeding roller 11 and the take-up roller 12
Is rotated to expose the clean surface of the adhesive tape 10 to the bottom surface 9 of the intermediate pocket 2A, and then the conveying collet 71 conveys the pellets 7 from the pellet tray 80 into the intermediate pocket 2A, and the bottom surface of the intermediate pocket 2A. The adhesive tape 10 is positioned on the clean surface of the adhesive tape 10 exposed at 9, and after the transport collet 71 is retracted from the intermediate pocket 2A, the bonding collet 42 holds the pellet 7 in the intermediate pocket 2A and carries it out to the bonding stage. .

At this time, the bottom surface of the pellet 7 is the adhesive tape 1
Since it is in contact with 0, the foreign matter on the bottom surface of the pellet 7 is captured and removed by the adhesive tape 10 side when being carried out by the bonding collet 42, and the pellet 7 is cleaned.
Therefore, when the bonding collet 42 is bonded to the lead frame 90, it is possible to prevent occurrence of defective bonding due to adhesion of foreign matter on the pellet 7.

It goes without saying that the structure of the second embodiment may be combined with the structure of the first embodiment.

Although the invention made by the present inventor has been specifically described based on the embodiments, the invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the invention. Needless to say.

[0040]

Advantageous effects obtained by typical ones of the inventions disclosed in the present application will be briefly described.
It is as follows.

According to the pellet bonding apparatus of the present invention, it is possible to surely prevent defective bonding due to adhesion of foreign matter to the pellet.

[Brief description of drawings]

FIG. 1 is a plan view showing an example of a configuration of an intermediate pocket portion in a pellet bonding apparatus which is an embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view of a portion indicated by II-II in FIG.

FIG. 3 is a schematic cross-sectional view showing the configuration of a pellet positioning section in a pellet bonding apparatus that is another embodiment of the present invention.

FIG. 4 is a cross-sectional view showing an example of the configurations of a bonding collet and a transport collet in the pellet bonding apparatus that is an embodiment of the present invention.

FIG. 5 is a schematic plan view showing an example of the overall configuration of a pellet bonding apparatus that is an embodiment of the present invention.

FIG. 6 is a flowchart showing an example of the operation of the pellet bonding apparatus which is an embodiment of the present invention.

FIG. 7 is a flowchart showing an example of the operation of the pellet bonding apparatus which is an embodiment of the present invention.

[Explanation of symbols]

 1 Pellet positioning part 1A Pellet positioning part 2 Intermediate pocket 2A Intermediate pocket 3 Air blowing hole 3a Suction hole 4 Intermediate pocket mounting arm 5 Air blowing pipe 5a Exhaust pipe 6 Filter 6a Filter 7 Pellet 8 Control valve 8a Control valve 9 Bottom surface 10 Adhesive tape 11 Feeding roller (adhesive tape feeding mechanism) 12 Winding roller (adhesive tape feeding mechanism) 20 Lead frame supply section 30 Preform section 40 Bonding head 41 Bonding arm 42 Bonding collet 50 Lead frame transport section 60 Lead frame storage Part 70 Pellet transfer arm 71 Transfer collet 80 Pellet tray 90 Lead frame (object) 100 Main body 101 Holding part 102 Suction path

Claims (4)

[Claims] 1. A bonding unit for bonding pellets to an object, a pellet supply unit for supplying the pellets from the outside, and a bonding unit provided between the bonding unit and the pellet supply unit for bonding the pellets. A pellet bonding apparatus including an intermediate pocket portion for which a positioning operation is performed prior to the step of performing a cleaning operation for at least one of the intermediate pocket portion and the pellets set in the intermediate pocket portion. A pellet bonding apparatus having a cleaning mechanism. 2. The cleaning mechanism includes a plurality of air blowing holes and suction holes formed in a wall surface of the pellet storage portion in the intermediate pocket portion, and an air supply for supplying clean air to the air blowing holes. The pellet bonding apparatus according to claim 1, comprising a mechanism and an exhaust mechanism for performing an exhaust operation in the intermediate pocket portion via the suction hole. 3. The foreign matter in the intermediate pocket portion is collected through the suction hole by simultaneously performing the air blowing operation through the air blowing hole and the exhausting operation through the suction hole. The pellet bonding apparatus according to claim 2. 4. The cleaning mechanism cleans an adhesive tape disposed on the bottom of the intermediate pocket portion on which the pellets are placed and a cleaning surface of the adhesive tape by performing a winding operation of the adhesive tape. The pellet bonding apparatus according to claim 1, further comprising an adhesive tape feeding mechanism that is exposed at the bottom.