JPH08107281A - Multilayer flexible printed circuit board and its manufacture - Google Patents

Multilayer flexible printed circuit board and its manufacture

Info

Publication number
JPH08107281A
JPH08107281A JP24250694A JP24250694A JPH08107281A JP H08107281 A JPH08107281 A JP H08107281A JP 24250694 A JP24250694 A JP 24250694A JP 24250694 A JP24250694 A JP 24250694A JP H08107281 A JPH08107281 A JP H08107281A
Authority
JP
Japan
Prior art keywords
printed circuit
flexible printed
polyimide
circuit board
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24250694A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Yamamori
義之 山森
Tohei Takimoto
東平 滝本
Etsu Takeuchi
江津 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP24250694A priority Critical patent/JPH08107281A/en
Publication of JPH08107281A publication Critical patent/JPH08107281A/en
Pending legal-status Critical Current

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  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PURPOSE: To obtain a multilayer flexible printed circuit board, which is easy in through-hole processing, does not need a desmear treatment, is good in platability and has the high reliability of connection, by a method wherein insulating materials constituting the circuit board are all constituted of a polyimide. CONSTITUTION: Insulating materials constituting a multilayer flexible printed circuit board formed by laminating a plurality of flexible printed circuit boards are all formed of a polyimide. A polyimide adhesive film is inserted between the two-layer flexible printed circuit boards subjected to prescribed patterning and with insulating layers, which are all constituted of the polyimide and are formed on the surfaces and rears of the circuit boards, and is bonded by thermocompression to the printed circuit boards to manufacture the multilayer flexible printed circuit board. As the two-layer flexible printed circuit boards, one coated with a covering coat consisting of the polyimide is used. The polyimide adhesive film is formed, for example, by a method wherein a polyamic acid solution is applied to both surfaces of a polyimide film using a bar coater and is dried for 15 minutes at 110 deg.C or for 15 minutes at 250 deg.C.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ポリイミド以外の絶縁
層を有さない、スルーホール信頼性、耐熱性に優れた多
層フレキシブルプリント回路板の製造方法に関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a multilayer flexible printed circuit board which has no insulating layer other than polyimide and is excellent in through hole reliability and heat resistance.

【0002】[0002]

【従来の方法】従来の多層フレキシブルプリント回路板
は、べ−スフィルムと導体層を接着剤によって接着した
基材、あるいは導体上に直接ポリイミド層を形成した基
材を用い、導体層の不要な部分をエッチング除去して複
数の導体配線を形成し、ポリイミド等の絶縁フィルムに
アクリルやエポキシ系の接着剤層を形成したカバーレイ
フィルムに必要に応じて金型やドリルにより孔加工し、
位置を合わせて重ね合わせた後、加熱・加圧を行いカバ
ーレイフィルム付フレキシブルプリント回路板とし、更
に複数のフレキシブルプリント回路板間にアクリル系や
エポキシ変性したポリイミド系のフィルム接着剤を挿入
し熱圧着することにより多層フレキシブルプリント回路
板を製造していた。
2. Description of the Related Art A conventional multilayer flexible printed circuit board uses a base material in which a base film and a conductor layer are bonded with an adhesive or a base material in which a polyimide layer is directly formed on a conductor, and a conductor layer is not necessary. Form a plurality of conductor wiring by removing the part by etching, and make holes with a mold or a drill in the cover lay film where an acrylic or epoxy adhesive layer is formed on an insulating film such as polyimide, if necessary,
After overlapping and aligning the positions, heat and pressure are applied to make a flexible printed circuit board with a coverlay film, and acrylic or epoxy-modified polyimide-based film adhesive is inserted between multiple flexible printed circuit boards to heat it. A multilayer flexible printed circuit board was manufactured by pressure bonding.

【0003】しかし、広く一般的に利用されているこの
方法では、基板あるいはカバーレイ、フィルム接着剤に
用いられているエポキシ、アクリル等の接着剤層の耐薬
品性、耐熱性等の諸特性が接着剤層以外の絶縁層に用い
られているポリイミド層に比べて著しく劣るためスルー
ホールを形成する際、ドリル加工時の熱により発生する
スミアの問題、過マンガン酸カリウムによるデスミア処
理時の膨潤の問題をかかえており製品歩留りが悪い、ス
ルーホール周りの信頼性が低いといった問題点を有して
いた。
However, according to this widely used method, various properties such as chemical resistance and heat resistance of an adhesive layer such as epoxy or acrylic used for a substrate or a coverlay, a film adhesive are used. Since it is significantly inferior to the polyimide layers used for insulating layers other than the adhesive layer, when forming a through hole, there is a problem of smear generated by heat during drilling, and swelling during desmear treatment with potassium permanganate. It had problems such as poor product yield and low reliability around through holes.

【0004】[0004]

【発明が解決しようとする課題】本発明の目的とすると
ころは、上記のアクリルやエポキシ等の樹脂系からなる
接着剤層に起因する問題点に関し、全ての絶縁層をポリ
イミドのみから構成する多層フレキシブルプリント回路
板とすることにより解決しようとするものである。
The object of the present invention is to solve the problems caused by the above-mentioned adhesive layer made of a resin such as acryl or epoxy, in which all the insulating layers are composed of only polyimide. This is to be solved by using a flexible printed circuit board.

【0005】[0005]

【課題を解決するための手段】本発明は、所定のパター
ン加工された絶縁層が全てポリイミドよりなるいわゆる
2層フレキシブルプリント回路板に、絶縁層がポリイミ
ドよりなるカバーコートを施し、更に複数のフレキシブ
ルプリント回路板間にポリイミド接着フィルムを挿入し
熱圧着することにより得られる、構成絶縁素材が全てポ
リイミドからなることを特徴とする多層フレキシブルプ
リント回路板およびその製造方法である。
According to the present invention, a so-called two-layer flexible printed circuit board in which a predetermined patterned insulating layer is entirely made of polyimide is coated with a cover coat made of polyimide as the insulating layer, and a plurality of flexible layers are further provided. A multilayer flexible printed circuit board and a method for producing the same, characterized in that the constituent insulating material is entirely made of polyimide, which is obtained by inserting a polyimide adhesive film between the printed circuit boards and performing thermocompression bonding.

【0006】本発明における接着剤層を持たないポリイ
ミドフィルム層のみからなる2層フレキシブルプリント
回路基板として用いることのできる材料としては、通常
のアクリル系やエポキシ系の接着剤層を持たないポリイ
ミドと導体金属箔層からなるものなら製造方法は、キャ
スティング法で作製されたものでもメッキ法で製造され
たものでも構わない。また目的に応じて片面板でも両面
板でも使用することができる。本基板に通常の方法によ
り回路加工することによりパターン加工されたフレキシ
ブルプリント回路板を得ることができる。
As a material that can be used as a two-layer flexible printed circuit board composed only of a polyimide film layer having no adhesive layer in the present invention, a polyimide and a conductor having no ordinary acrylic or epoxy adhesive layer are used. The manufacturing method may be either a casting method or a plating method as long as it is composed of a metal foil layer. Further, either a single-sided plate or a double-sided plate can be used depending on the purpose. By subjecting this substrate to circuit processing by a usual method, a flexible printed circuit board having a pattern processed can be obtained.

【0007】また絶縁層がポリイミドよりなるカバーコ
ートを2層フレキシブルプリント回路板に施す方法とし
ては、ポリイミド樹脂のみからなるものであればポリイ
ミドフィルム上にポリイミド接着剤を用いたフィルムカ
バーレイを熱圧着しても、2層フレキシブルプリント回
路板上にポリイミドインクからなるインクカバコートを
施し熱処理してもポリアミック酸フィルムを熱圧着後、
焼成イミド化する等、何れの方法で製造しても構わな
い。
As a method of applying a cover coat made of polyimide as an insulating layer to a two-layer flexible printed circuit board, a film cover lay using a polyimide adhesive on a polyimide film is thermocompression-bonded as long as it is made of only a polyimide resin. Even if the ink cover coat made of polyimide ink is applied on the two-layer flexible printed circuit board and heat-treated, the polyamic acid film is thermocompression-bonded,
It may be produced by any method such as baking and imidization.

【0008】本発明に使われるフィルム接着剤として
は、熱可塑性ポリイミドの単層フィルムや既存のポリイ
ミドフィルムの表裏に接着剤層として熱可塑性ポリイミ
ドを塗布した3層構造を持つもの等を挙げることができ
るが、素材が全てポリイミド樹脂で構成されていれば何
れの製法で製造されたものでも構わない。
Examples of the film adhesive used in the present invention include a single layer film of thermoplastic polyimide, and an existing polyimide film having a three-layer structure in which thermoplastic polyimide is applied as an adhesive layer on the front and back. However, as long as the material is entirely made of polyimide resin, it may be manufactured by any manufacturing method.

【0009】本発明では所定のパターン加工された絶縁
層が全てポリイミドよりなるフレキシブルプリント回路
板に絶縁層がポリイミドよりなるカバーコートを施し、
更に複数のフレキシブルプリント回路板間にポリイミド
接着フィルムを挿入し熱圧着することにより構成絶縁素
材が全てポリイミドからなる多層フレキシブルプリント
回路板を得るが、熱圧着する方法としては真空プレス等
の高温プレス可能なプレスを用いピン、ハトメ等通常の
方法で位置合わせした材料を用いフィルム接着剤のガラ
ス転移温度以上の温度でプレスすることにより得ること
ができる。通常熱可塑性ポリイミドフィルム接着剤のガ
ラス転移温度は200℃以上の高温だが、絶縁素材が全
てポリイミドから構成されているので素材が劣化するこ
とはない。一方、接着剤層として通常のエポキシ系やア
クリル系のものを用いていた場合接着剤層が劣化してし
まい、このような高温でプレスすることができない。
In the present invention, a flexible printed circuit board in which a predetermined patterned insulating layer is entirely made of polyimide is covered with a cover coat made of polyimide,
Furthermore, by inserting a polyimide adhesive film between multiple flexible printed circuit boards and thermocompression-bonding, a multilayer flexible printed circuit board in which the constituent insulating material consists entirely of polyimide can be obtained, but the method of thermocompression bonding can be a high-temperature press such as a vacuum press. It can be obtained by pressing at a temperature equal to or higher than the glass transition temperature of the film adhesive by using a material aligned by a usual method such as a pin or an eyelet using a different press. Normally, the glass transition temperature of a thermoplastic polyimide film adhesive is a high temperature of 200 ° C. or higher, but since the insulating material is entirely made of polyimide, the material does not deteriorate. On the other hand, when a normal epoxy type or acrylic type adhesive is used as the adhesive layer, the adhesive layer deteriorates, and it is impossible to press at such a high temperature.

【0010】本発明におけるポリイミド樹脂(ポリアミ
ドイミド樹脂を含む)は、通常ジアミンと酸無水物とを
反応後、加熱もしくは化学的にイミド化させることによ
り得られるが、ポリイミド樹脂であればその製造方法は
特に限定されるものではない。一般にジアミンとして
は、フェニレンジアミン、ジアミノジフェニルメタン、
ジアミノジフェニルスルホン、ジアミノジフェニルエ−
テルなどを、酸無水物としては、トリメリット酸無水
物、ピロメリット酸二無水物、ビフェニルテトラカルボ
ン酸二無水物、ベンゾフェノンテトラカルボン酸二無水
物などを使用することができ、それぞれ1種又は2種以
上を適宜組み合わせて用いることができる。
The polyimide resin (including polyamide-imide resin) in the present invention is usually obtained by reacting a diamine with an acid anhydride and then heating or chemically imidizing the same. Is not particularly limited. Generally, diamines include phenylenediamine, diaminodiphenylmethane,
Diaminodiphenyl sulfone, diaminodiphenyl ether
Ter, etc., as the acid anhydride, trimellitic acid anhydride, pyromellitic dianhydride, biphenyl tetracarboxylic acid dianhydride, benzophenone tetracarboxylic acid dianhydride, etc. can be used, each one or Two or more kinds can be used in appropriate combination.

【0011】[0011]

【作用】本発明によれば、構成素材が全てポリイミドか
らなるので、これまで素材耐熱性の制約上使用すること
ができなかった200℃以上の高温での熱圧着が必要な
エポキシ樹脂等で変成していない純粋な熱可塑性ポリイ
ミド接着フィルムを使用することができ、容易に生産性
・収率よく特性の優れた絶縁層が全てポリイミドからな
る多層フレキシブルプリント回路板を得ることができ
る。
According to the present invention, since the constituent material is entirely made of polyimide, it is modified with an epoxy resin or the like which requires thermocompression bonding at a high temperature of 200 ° C. or higher, which could not be used due to the heat resistance of the material. It is possible to use a pure thermoplastic polyimide adhesive film which is not used, and it is possible to easily obtain a multilayer flexible printed circuit board in which the insulating layer is entirely made of polyimide, which is excellent in productivity, yield, and characteristics.

【0012】[0012]

【実施例】【Example】

[実施例1]温度計、撹拌装置、環流コンデンサーおよ
び乾燥窒素ガス吹き込み口を備えた4つ口セパラブルフ
ラスコに2,2-ビス[4-(4-アミノフェノキシ)フェ
ニル]プロパン20.53g、1,3-ビス(3-アミノフ
ェノキシ)ベンゼン14.62gをとり、これに無水の
N-メチル―2―ピロリドン90重量%とトルエン10
重量%の混合溶剤を、全仕込原料中の固形分割合が20
重量%になるだけの量を加えて溶解した。乾燥窒素ガス
は反応の準備段階より生成物取り出しまでの全行程にわ
たり流しておいた。ついで精製した3,3',4,4'-ビフ
ェニルテトラカルボン酸二無水物20.60g、ベンゾ
フェノンテトラカルボン酸二無水物9.76gを撹拌し
ながら少量ずつ添加するが発熱反応であるため、外部水
槽に約15℃の冷水を循環させてこれを冷却した。添加
後、内部温度を20℃に設定し、5時間撹拌し反応を終
了してポリアミック酸溶液を得た、得られた樹脂のイミ
ド化後のガラス転移温度は229℃であった。
[Example 1] 20.53 g of 2,2-bis [4- (4-aminophenoxy) phenyl] propane in a 4-neck separable flask equipped with a thermometer, a stirrer, a reflux condenser and a dry nitrogen gas inlet. Taking 14.62 g of 1,3-bis (3-aminophenoxy) benzene, 90% by weight of anhydrous N-methyl-2-pyrrolidone and 10 parts of toluene were added.
The mixed solvent of weight% is used, and the solid content ratio in all the raw materials is 20.
It was dissolved by adding an amount enough to make it wt%. Dry nitrogen gas was allowed to flow throughout the entire process from the preparation of the reaction to the removal of the product. Next, 20.60 g of purified 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride and 9.76 g of benzophenonetetracarboxylic dianhydride were added little by little with stirring, but the reaction was exothermic, so external This was cooled by circulating cold water of about 15 ° C. in the water tank. After the addition, the internal temperature was set to 20 ° C., the reaction was terminated by stirring for 5 hours to obtain a polyamic acid solution, and the glass transition temperature after imidization of the obtained resin was 229 ° C.

【0013】このポリアミック酸溶液をバーコーターで
市販のポリイミドフィルム(デュポン社製:カプトン1
00H)の片面にバーコーターでイミド化後の厚みが2
0μmになるように塗布し、110℃で15分、250
℃で15分乾燥を行い、片面に熱可塑性ポリイミドの付
いたカバーレイフィルムを得た。
A commercially available polyimide film (manufactured by DuPont: Kapton 1) was prepared from this polyamic acid solution using a bar coater.
00H) has a thickness of 2 after imidization with a bar coater on one side.
Apply so that it becomes 0 μm, and at 110 ℃ for 15 minutes, 250
It was dried at ℃ for 15 minutes to obtain a cover lay film having thermoplastic polyimide on one surface.

【0014】同様にこのポリアミック酸溶液をバーコー
ターで市販のポリイミドフィルム(デュポン社製:カプ
トン100H)の両面にバーコーターでイミド化後の厚
みが20μmになるように塗布し、110℃で15分、
250℃で15分乾燥を行い、両面に熱可塑性ポリイミ
ドの付いたポリイミド接着フィルムを得た。
Similarly, this polyamic acid solution was applied by a bar coater to both sides of a commercially available polyimide film (manufactured by DuPont: Kapton 100H) so that the thickness after imidization was 20 μm by a bar coater, and at 110 ° C. for 15 minutes. ,
It was dried at 250 ° C. for 15 minutes to obtain a polyimide adhesive film having thermoplastic polyimide on both sides.

【0015】市販の両面2層フレキシブルプリント回路
用基板エスパネックス(新日鐵化学(株)製)の銅箔面に
所定の回路加工を施し両面2層フレキシブルプリント回
路板を得た。得られた両面2層フレキシブルプリト回路
板の両面に熱可塑性ポリイミド面が回路基板側に合うよ
うにカバーレイフィルムを配置し、真空プレスを用い2
80℃、40kg/cm2、15分加熱・圧着を行い絶縁層
がポリイミドのみからなるカバーレイフィルム付両面フ
レキシブルプリント回路板を得た。
A double-sided two-layer flexible printed circuit board was obtained by subjecting a copper foil surface of a commercially available double-sided two-layer flexible printed circuit board Espanex (manufactured by Nippon Steel Chemical Co., Ltd.) to a predetermined circuit processing. A coverlay film is placed on both sides of the obtained double-sided two-layer flexible printed circuit board so that the thermoplastic polyimide side faces the circuit board side.
By heating and pressure bonding at 80 ° C., 40 kg / cm 2 for 15 minutes, a double-sided flexible printed circuit board with a cover lay film in which the insulating layer was made of only polyimide was obtained.

【0016】カバーレイフィルム付両面2層フレキシブ
ルプリント回路板の両側にポリイミド接着フィルムおよ
び片面2層フレキシブルプリント回路用基板(エスパネ
ックス:新日鐵化学(株)製)の銅箔面が外側を向くよう
に順に配置し真空プレスを用いプレスを用い280℃、
40kg/cm2、15分加熱・圧着を行い積層した。更に
本積層板にドリル加工、スルーホールメッキ、パターン
形成後、所定の孔加工を施したカバーレイを先に述べた
のと同様の条件(熱可塑性ポリイミド面が回路基板側を
向くようにカバーレイフィルムを配置し、真空プレスを
用い280℃、40kg/cm2、15分)で加熱・圧着
後、外形加工を行い絶縁層がポリイミドのみからなる4
層フレキシブルプリント回路板を得た。
A copper foil surface of a polyimide adhesive film on both sides of a double-sided flexible printed circuit board with a coverlay film and a double-sided flexible printed circuit board (Espanex: Nippon Steel Chemical Co., Ltd.) faces outward. 280 ℃, using a vacuum press
40 kg / cm 2 , heating and pressure bonding for 15 minutes were performed to laminate. Furthermore, the cover lay obtained by drilling, through-hole plating, and patterning this laminated plate, and then performing the predetermined hole drilling was performed under the same conditions as described above (cover lay so that the thermoplastic polyimide surface faces the circuit board side). Place the film, heat and press it at 280 ° C, 40 kg / cm 2 , 15 minutes) using a vacuum press, and then perform external shape processing and the insulating layer will consist of only polyimide 4
A layer flexible printed circuit board was obtained.

【0017】本方法によれば、スルーホールのためにド
リル加工してもエポキシやアクリル等の接着剤を使用し
ていないため、仕上がり状態が良くスミアもほとんど発
生していないためデスミア処理が必要なかった。また仮
に過マンガン酸カリウム処理によりデスミアをしても耐
薬品性に極めて優れるため絶縁層が溶出するようなこと
はない。このようにして得られた多層フレキシブルプリ
ント回路板は絶縁層が全てポリイミドのみからなるた
め、優れた耐熱性(半田耐熱 300℃/30秒フロー
ト:OK)を示し、各種処理(JIS C 5012
9.3 熱衝撃100サイクル:OK)に対しても極め
て優れた特性を示していた。
According to this method, no desmear treatment is required because the finished state is good and almost no smear occurs because no adhesive such as epoxy or acrylic is used even when drilling for the through hole. It was Moreover, even if desmearing is performed by the potassium permanganate treatment, the insulating layer does not elute because it has extremely excellent chemical resistance. The multi-layer flexible printed circuit board thus obtained exhibits excellent heat resistance (solder heat resistance 300 ° C./30 seconds float: OK) because the insulating layer is entirely made of polyimide, and various treatments (JIS C 5012
It also showed extremely excellent characteristics against 9.3 thermal shock cycles (OK).

【0018】[0018]

【発明の効果】本発明の製造方法により、従来と同様の
工程で全ての絶縁素材をポリイミドとする多層フレキシ
ブルプリント回路板を得ることができ、得られた多層フ
レキシブルプリント回路板はスルーホール加工が容易で
デスミアの必要なくメッキ性の良好な接続信頼性の高い
優れた回路板である。
According to the manufacturing method of the present invention, it is possible to obtain a multilayer flexible printed circuit board in which all insulating materials are made of polyimide by the same process as the conventional one, and the obtained multilayer flexible printed circuit board is not through-hole processed. It is an excellent circuit board that is easy to use, does not require desmear, has good plating properties, and has high connection reliability.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 複数のフレキシブルプリント回路板を積
層してなる多層フレキシブルプリント回路板において、
構成する絶縁素材が全てポリイミドからなることを特徴
とする多層フレキシブルプリント回路板。
1. A multilayer flexible printed circuit board comprising a plurality of flexible printed circuit boards laminated together,
A multi-layer flexible printed circuit board characterized in that all the insulating materials that it comprises are made of polyimide.
【請求項2】 所定のパターン加工された、絶縁層が全
てポリイミドからなる、複数のいわゆる2層フレキシブ
ルプリント回路板間にポリイミド接着フィルムを挿入し
熱圧着することを特徴とする多層フレキシブルプリント
回路板の製造方法。
2. A multilayer flexible printed circuit board, characterized in that a polyimide adhesive film is inserted and thermocompression-bonded between a plurality of so-called two-layer flexible printed circuit boards, each of which has a predetermined pattern and whose insulating layer is entirely made of polyimide. Manufacturing method.
【請求項3】 前記2層フレキシブルプリント回路板
が、ポリイミドからなるカバーコートを施された2層フ
レキシブルプリント回路板であることを特徴とする請求
項2記載の多層フレキシブルプリント回路板の製造方
法。
3. The method of manufacturing a multilayer flexible printed circuit board according to claim 2, wherein the two-layer flexible printed circuit board is a cover-coated two-layer flexible printed circuit board made of polyimide.
JP24250694A 1994-10-06 1994-10-06 Multilayer flexible printed circuit board and its manufacture Pending JPH08107281A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24250694A JPH08107281A (en) 1994-10-06 1994-10-06 Multilayer flexible printed circuit board and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24250694A JPH08107281A (en) 1994-10-06 1994-10-06 Multilayer flexible printed circuit board and its manufacture

Publications (1)

Publication Number Publication Date
JPH08107281A true JPH08107281A (en) 1996-04-23

Family

ID=17090121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24250694A Pending JPH08107281A (en) 1994-10-06 1994-10-06 Multilayer flexible printed circuit board and its manufacture

Country Status (1)

Country Link
JP (1) JPH08107281A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100396867B1 (en) * 2001-02-26 2003-09-03 산양전기주식회사 manufacturing method of flexible printed circuit board used insulative polymer
JP2007129153A (en) * 2005-11-07 2007-05-24 Cmk Corp Rigid-flex multilayer printed wiring board
US20140051205A1 (en) * 2009-02-26 2014-02-20 Sharp Kabushiki Kaisha Method for manufacturing thin film compound solar cell

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100396867B1 (en) * 2001-02-26 2003-09-03 산양전기주식회사 manufacturing method of flexible printed circuit board used insulative polymer
JP2007129153A (en) * 2005-11-07 2007-05-24 Cmk Corp Rigid-flex multilayer printed wiring board
US20140051205A1 (en) * 2009-02-26 2014-02-20 Sharp Kabushiki Kaisha Method for manufacturing thin film compound solar cell
US9070819B2 (en) * 2009-02-26 2015-06-30 Sharp Kabushiki Kaisha Method for manufacturing thin film compound solar cell

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