JPH0810194Y2 - ウェーハ立替機 - Google Patents
ウェーハ立替機Info
- Publication number
- JPH0810194Y2 JPH0810194Y2 JP6763689U JP6763689U JPH0810194Y2 JP H0810194 Y2 JPH0810194 Y2 JP H0810194Y2 JP 6763689 U JP6763689 U JP 6763689U JP 6763689 U JP6763689 U JP 6763689U JP H0810194 Y2 JPH0810194 Y2 JP H0810194Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carrier
- pusher
- groove
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 22
- 235000012431 wafers Nutrition 0.000 description 79
- 238000000034 method Methods 0.000 description 5
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6763689U JPH0810194Y2 (ja) | 1989-06-09 | 1989-06-09 | ウェーハ立替機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6763689U JPH0810194Y2 (ja) | 1989-06-09 | 1989-06-09 | ウェーハ立替機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH038439U JPH038439U (enExample) | 1991-01-28 |
| JPH0810194Y2 true JPH0810194Y2 (ja) | 1996-03-27 |
Family
ID=31601378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6763689U Expired - Lifetime JPH0810194Y2 (ja) | 1989-06-09 | 1989-06-09 | ウェーハ立替機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0810194Y2 (enExample) |
-
1989
- 1989-06-09 JP JP6763689U patent/JPH0810194Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH038439U (enExample) | 1991-01-28 |
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