JPH079376Y2 - （１００）面異方性エッチング加工マスク - Google Patents

（１００）面異方性エッチング加工マスク

Info

Publication number
JPH079376Y2
JPH079376Y2 JP1988004154U JP415488U JPH079376Y2 JP H079376 Y2 JPH079376 Y2 JP H079376Y2 JP 1988004154 U JP1988004154 U JP 1988004154U JP 415488 U JP415488 U JP 415488U JP H079376 Y2 JPH079376 Y2 JP H079376Y2
Authority
JP
Japan
Prior art keywords
etching
plane
anisotropic etching
square hole
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988004154U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01110433U (OSRAM
Inventor
通昭 山県
▲てつ▼ 尾土平
宣夫 宮地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1988004154U priority Critical patent/JPH079376Y2/ja
Publication of JPH01110433U publication Critical patent/JPH01110433U/ja
Application granted granted Critical
Publication of JPH079376Y2 publication Critical patent/JPH079376Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP1988004154U 1988-01-19 1988-01-19 （１００）面異方性エッチング加工マスク Expired - Lifetime JPH079376Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988004154U JPH079376Y2 (ja) 1988-01-19 1988-01-19 （１００）面異方性エッチング加工マスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988004154U JPH079376Y2 (ja) 1988-01-19 1988-01-19 （１００）面異方性エッチング加工マスク

Publications (2)

Publication Number Publication Date
JPH01110433U JPH01110433U (OSRAM) 1989-07-26
JPH079376Y2 true JPH079376Y2 (ja) 1995-03-06

Family

ID=31206413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988004154U Expired - Lifetime JPH079376Y2 (ja) 1988-01-19 1988-01-19 （１００）面異方性エッチング加工マスク

Country Status (1)

Country Link
JP (1) JPH079376Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH01110433U (OSRAM) 1989-07-26

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