JPH0778546B2 - Fine motion table device - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fine movement table device that mounts a reticle of a semiconductor manufacturing apparatus and positions the reticle at high speed.

[Conventional technology]

A conventional fine movement table device is, for example, SAIkai Sho 52-14.
Some are described in Japanese Patent No. 7898 (first conventional example).

In this first conventional example, a base, a controlled body slidably provided on the base, and a plurality of leaf springs that support the controlled body elastically in a direction perpendicular to the power direction thereof. An electromagnet is disposed so as to face the controlled body in the elastic displacement direction of the controlled body, and the controlled body is elastically displaced by an attractive force generated in the electromagnet.

In addition, as another conventional example,
There is one described in Japanese Patent Laid-Open No. 58-105604 (second conventional example).

In the second conventional example, the fine movement table is connected to both ends of one of the opposite side faces through a leaf spring so that the block and the fine movement table are relatively elastically displaced in the one opposite direction. It has a configuration in which it is connected to a support bracket fixed on a coarse movement table so that it can be elastically displaced in a direction orthogonal to the one opposite direction via a leaf spring extending in a direction orthogonal to the leaf spring, and a fine movement is provided. By suctioning one side surface of the table with an electromagnet or the like, the fine movement table can be moved in the Y direction, for example, and by sucking the block with an electromagnet or the like, the fine movement table can be moved in the X direction, for example.

[Problems to be solved by the invention]

However, in the above-mentioned first conventional example, since the other end of the leaf spring whose one end is fixed to the controlled body is loosely inserted into the slit formed in the base, it is possible to attract the electromagnet of the controlled body. The leaf spring bends with respect to the X-direction displacement, and the Y-direction displacement amount is absorbed by shifting in the slit by the Y-direction displacement amount that is a direction perpendicular to the X-direction due to the deflection. As described above, in order to allow the displacement of the leaf spring in the slit, it is necessary to select the width of the slit to be a little wider than the width of the leaf spring. Especially, when the controlled object is in an unloaded state, When the driving force is transmitted,
When the controlled body may be displaced in the Y direction and the friction force between the leaf spring and the slit is different even when attracted in the X direction by the electromagnet, the controlled body is accurately translated in the X axis direction. Therefore, there is a problem that the coordinate origin and the movement amount cannot be maintained accurately.

Further, in the second conventional example, when the fine movement table is finely moved in the Y direction, the block is moved inward by the displacement amount of the leaf spring due to the fine movement in the Y direction, and the block is moved inward. It is possible to allow this by the leaf spring between this and the support bracket, but when moving the fine movement table in the X direction, the leaf spring between the block and the support bracket is displaced according to the displacement amount in the X direction. However, the amount of displacement in the direction orthogonal to the displacement cannot be absorbed, and therefore, the extension of the leaf spring in the longitudinal direction must be used exclusively, and a large driving force is required. was there.

Therefore, the present invention has been made by paying attention to the problems of the above-mentioned conventional example, and an elastic displacement member and a displacement direction of the elastic displacement member due to the displacement of the elastic displacement member are provided between the fine movement table and the support member supporting the fine movement table. By providing the elastic connecting member that alternately connects the elastic displacement absorbing member that absorbs the displacement in the direction orthogonal to, it is possible to increase the displacement amount of the fine movement table in the X and Y directions and reduce the driving force thereof. It is an object of the present invention to provide a fine movement table device that can be operated.

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a support member fixed on a base, and a fine movement mounting base on the support member in a XY direction via a connecting member. In the fine movement table device that is movably connected, the elastic displacement portion that is displaced in the displacement direction of the fine movement mounting table, and the displacement of the contact elastic displacement portion through the connecting member by the displacement of the elastic displacement portion. An elastic displacement absorbing portion that displaces in the absorbing direction, and at least one pair of the elastic displacement portion and the elastic displacement absorbing portion are provided.

Here, it is desirable that the supporting member, the connecting member, the elastic displacement portion, the elastic displacement absorbing portion, and the fine movement mounting table have the same cross-sectional shape in a plane orthogonal to the Z axis in the Z axis direction.

[Action]

In the present invention, between the fine movement mounting table and the supporting member supporting the same, an elastic displacement portion that is displaced according to a relative displacement amount between the fine movement mounting table and the supporting member, and a connecting member by the displacement of the elastic displacement portion. Since there is at least one pair of elastic members that are displaced in a direction that absorbs the displacement of the elastic displacement portion via, the elastic displacement portion is elastically displaced along with the movement when the fine movement mounting table moves in the X direction, for example. By absorbing this elastic displacement by the elastic displacement absorbing portion, it is possible to prevent an unreasonable force from acting on the connecting member, increase the amount of movement of the fine movement mounting table, and greatly reduce its driving force.

〔Example〕

 Embodiments of the present invention will be described below with reference to the drawings.

1 to 5 are views showing a first embodiment of the present invention when applied to a reticle stage.

In the figure, 1 is a base that constitutes the reticle stage,
As shown in FIG. 4 and FIG. 5, a through hole 1a is formed in the central portion, and irradiation light from a light source arranged in the upper portion (not shown) passes through a reticle R described later and is placed in the lower portion. The mask thus formed is irradiated, whereby the pattern formed on the reticle R can be printed on the mask.

In FIG. 1, four support brackets 2a to 2d as support members are fixed on a base 1 by fixing means such as screws, and leaf springs extending to the left side of these support brackets 2a and 2b in the X direction. Connecting member 4L via 3a, 3b,
A connecting member 4R is connected to the right sides of the support brackets 2c and 2d via leaf springs 3c and 3d extending in the X direction.

Then, on the right side of the connecting member 4L, the connecting member 6L is connected in parallel to the connecting member 4L via plate springs 5a, 5b extending in the X direction which are screwed inside the plate springs 3a, 3b, Connecting member
Similarly, in the 4R, the connecting member 6R is provided via the leaf springs 5c and 5d extending in the X direction, which are screwed to the inside of the leaf springs 3c and 3d on the left side.
Are connected in parallel with the connecting member 4R.

The connecting member 6L has one end of the connecting member 8F, 8R via leaf springs 7a, 7b extending in the front-rear direction which are respectively screwed to the front and rear end portions of the right side surface thereof, and the connecting member 6R has a left side surface thereof. Leaf springs 7c, 7 extending in the Y direction that are respectively screwed to the front and rear ends of the
The other ends of the connecting members 8F and 8R are connected via d.

The connecting member 8F is screwed inwardly of the leaf springs 7a, 7c, and the connecting member 8R is screwed inwardly of the leaf springs 7b, 7d via the leaf springs 9a, 9c extending in the Y direction. The fine movement mounting table 10 is connected via the attached leaf springs 9b and 9d extending in the front-rear direction. Here, each leaf spring 3a-3d, 5a-5d, 7a-7d and 9a
9d and the connecting members 4L, 4R, 6L, 6R and 8F, 8R constitute an elastic connecting member.

This fine movement mounting table 10 is formed in a substantially square shape having a through hole 10a at the center when viewed from the plane, and is connected to a vacuum source (not shown) around the through hole 10a on the upper surface thereof to be placed on a mounted object, for example. A vacuum pad 10b for adsorbing and holding the reticle R is formed, and a ridge 11a formed on an X-direction moving table 11 movable in the X direction is connected to the right side portion as shown in FIG. The movable table 11 is movable in the Y direction.
It is slidably disposed in a recess 12a formed in the direction moving table 12 and extending in the left-right direction.

The right end of the X-direction moving table 11 is connected to the X-direction driving mechanism 13, and the rear end of the Y-direction moving table 12 is connected to the Y-direction driving mechanism 14.

The X-direction drive mechanism 13 includes a guide roller on the right side of the connecting member 4R along an axis L ₁ slightly inclined clockwise with respect to the Y-axis.
A hollow rod 23, which is reciprocally guided by 21 and to which a ball nut 22 is fixed, and a DC servomotor 25 for rotationally driving a ball screw 24 screwed to the ball nut 22 are provided. A guide body 23b having an elongated hole 23a extending in the Y direction is integrally attached to the rod 23 at the center of the left side surface thereof, and an engaging member supported at the free end of the X-direction moving table 11 is provided in the elongated hole 23a. The combining roller 23c is engaged, and the guide roller 23d is supported at a position facing the engaging roller 23c of the X-direction moving table 11 and the side plate of the guide body 23b.

The Y-direction driving mechanism 14 is reciprocally guided by the guide roller 21 along the axis L ₂ slightly inclined clockwise with respect to the X-axis to the rear side of the connecting member 8R and the ball nut 22.
The rod 23 to which is fixed is arranged, and the long hole 23a of the guide body 23b is provided.
An engaging roller 26 supported by the Y-direction moving table 12 is engaged therein, and a guide roller 27 is provided at a position opposed to the engaging roller 26 of the Y-direction moving table 12 with the side plate of the guide body 23b interposed therebetween.
Except that it is supported by the X-direction drive mechanism 13
The configuration is similar to that of the above, corresponding parts are denoted by the same reference numerals, and detailed description thereof will be omitted.

Further, a magnetizing body 30 is fixed to the front end of the Y-direction moving table 12, the magnetizing body 30 is opposed to a detection head 31 fixedly mounted on the base 1, and the left side portion of the fine movement mounting table 10 is provided. The magnetic generator 33 is fixed to the free end of the support plate 32 that is fixed to the lower surface and extends leftward along the upper surface of the Y-direction moving table 12, and this magnetic body 33 is fixed to the left end of the Y-direction moving table 12. Opposed to the detection head 34, the detection heads 31 and 34 detect the origin position of the fine movement mounting table 10 in the X and Y directions, and the detected values are detected by the DC servo motor 25 of the X and Y direction drive mechanisms 13 and 14. Control device for drive control (not shown)
It is fed back as the origin position detection value.

Next, the operation of the above embodiment will be described. Now, the rod 23 of the X-direction drive mechanism 13 and the Y-direction drive mechanism 14 is in the neutral position, that is, the first position.
It is assumed to be in the position shown in the figure. In this state, the leaf springs 3a to 3d inserted between the support brackets 2a to 2d and the connecting members 4L and 4R, and the leaf springs inserted between the connecting members 4L and 4R and the connecting members 6L and 6R. 5a to 5d, connecting members 6L and 6R and connecting members 8F and 8R
No horizontal force is applied to the leaf springs 7a to 7d inserted between and the leaf springs 9a to 9d inserted between the connecting members 8F and 8R and the fine movement mounting table 10. , Each connecting member 4L, 4
Since R, 6L, 6R and 8F, 8R are in sliding contact with the Y-direction moving table 12, almost no vertical force acts and elastic deformation does not occur.

From this neutral state, for example, the DC servomotor 25 of the X-direction drive mechanism 13 is driven, for example, in the forward direction (or reverse direction) to move the rod 23.
When the rod is slid rearward (or frontward), the elongated hole 23a of the guide body 23b moves rearward (or frontward) according to the rearward (or frontward) sliding of the rod 23, while moving rightward (or leftward). Since the engaging roller 23c engaged in the elongated hole 23a moves rightward (or leftward), the X-direction moving table 11 moves rightward (or leftward). Then, the fine movement table 10 connected to the table starts to move in the X direction.

Thus, when the fine movement mounting table 10 starts moving in the right (or left) direction, the leaf springs 3a to 3d and 5a to 5d extending in the X direction are formed.
Does not cause elastic displacement in a direction orthogonal to the extension direction, and with respect to the leaf springs 9a to 9d extending in the Y direction, when the fine movement mounting table 10 moves rightward (or leftward) by ΔX, fine movement is performed. The tip end side is relatively elastically displaced leftward (or rightward) relative to the mounting table 10 side, and the connecting member is accordingly displaced.
8F and 8R also move to the right (or left) by ΔX / 2. on the other hand,
Since the connecting members 6L and 6R maintain their original positions, the leaf springs 7a
The tip ends of 7d are elastically displaced rightward (or leftward) with respect to the connecting members 6L and 6R side. Therefore, the connecting member
8F and 8R are the fine movement mounting table 1 due to the elastic displacement of the leaf springs 9a to 9d.
The leaf springs 7a to 7d and 9a can be absorbed by elastically displacing the movement amount in this case in the direction in which the other leaf springs 7a to 7d absorb the movement amount.
9d does not exert a large pulling force, and the movement of the fine movement mounting table 10 to the right (or the left) can be performed lightly, and the movement amount of the fine movement mounting table 10 in the X direction is set to 2 sets. The elastic displacement can be divided into the leaf springs 9a to 9d and 7a to 7d. Here, the leaf springs 9a to 9d are connected to the elastic displacement portion,
7a to 7d correspond to the elastic displacement absorbing portions, respectively.

Similarly, from the state in which the fine movement mounting table 10 is in the neutral position, the DC servomotor 25 of the Y-direction drive mechanism 14 is rotated normally (or reversely), and the rod 23 is slid leftward (or rightward). If the Y direction moving table 12 is
Since 11 moves on the back (or front) with it placed,
The fine movement mount 10 starts moving backward (or forward) along the Y axis.

In this way, when the fine motion mounting table 10 starts moving backward (or forward) along the Y axis, the leaf springs 7a to 7a extending in the Y axis direction.
For 7d and 9a to 9d, elastic displacement in the direction orthogonal to the longitudinal direction does not occur, so that the connecting members 8F.8R and 6L, 6R move rearward by the same movement amount ΔY as the fine movement mounting table 10, and the X-axis. The leaf springs 5a to 5d extending in the direction are elastically displaced toward the front (or rear) side relative to the connecting members 6L and 6R by moving the connecting members 6L and 6R rearward (or frontward). The connection members 4L and 4R are rearward (or frontward) accordingly.
By ΔY / 2, the leaf springs 3a to 3d are elastically displaced rearward (or frontward) based on the support brackets 2a to 2d side. Therefore, the inward movement amount of the connecting members 4L, 4R due to the forward (or backward) elastic displacement of the leaf springs 5a-5d can be absorbed by the elastic displacement of the leaf springs 3a-3d, and the connecting members 4L, 4R. Smoothly move inward, the Y-direction moving table 12 can be smoothly moved with a small driving force, and the movement amount ΔY of the fine movement mounting table 10 can be set to the leaf springs 3a to 3d.
Since the elastic displacement amount can be divided into the plate springs 5a to 5d, the movement amount of the fine movement mounting table 10 can be set to be as large as the X direction movement amount ΔX. Here, the leaf springs 5a to 5d
Corresponds to the elastic displacement portion, and the leaf springs 3a to 3d correspond to the elastic displacement absorbing portions.

Furthermore, when the DC servo motors 25 of the X-axis drive mechanism 13 and the Y-axis drive mechanism 14 are simultaneously driven to perform simultaneous two-axis control, the X-direction moving table 11 and The Y-direction moving table 12 is moved so that the fine movement mounting table 10 can be quickly moved to a predetermined position.

Further, in order to return the fine movement mounting table 10 to the neutral position, that is, the control origin, the DC servomotors 25 are rotated in reverse,
This can be done by returning the rod 23 to the state shown in FIG. 1. At this time, the elastically displaced leaf spring returns to its original position due to its elasticity, so that the control origin does not drift accurately and Home return can be performed.

When the fine movement mounting table 10 is moved in the X direction and the Y direction, the magnetism generating bodies 30, 33 move in accordance with the movement amounts, and the movement amounts are detected by the detection heads 31, 34, and the origin position detection of these is performed. By inputting the value as a feedback signal to the control device (not shown) of the DC servo motor 25, accurate origin positioning control can be performed.

Next, a second embodiment of the present invention will be described with reference to FIG.

In the second embodiment, instead of the support brackets 2a to 2d, a frame-shaped support member 2 is formed, and the plate spring, the connecting member, and the fine movement mounting base are integrally formed.

That is, as shown in FIG. 6, for example, a square plate material made of martensitic stainless steel finished to a predetermined flatness is
By performing electric discharge machining with a wire cut electric discharge machine, leaf springs 3a to 3d, 5a to 5d, 7a to 7d, and 9a to 9d, and a connecting member
The 4L, 4R, 6L, 6R and 8F, 8R and the fine movement mounting table 10 are integrally formed.

Although FIG. 6 does not show a drive mechanism for driving the fine movement mounting table 10 in the XY directions, as the XY moving mechanism,
For example, as described in Japanese Utility Model Laid-Open No. 52-147898, a base and a controlled body slidably provided on the base (corresponding to the fine movement mounting table 10) and an XY direction with respect to the controlled body. It is also possible to provide electromagnets arranged opposite to each other to give a displacement in the XY direction to the controlled body by the attraction force generated in the electromagnets. Further, the frame-shaped support member 2 is used for the support bracket 2a of the first embodiment described above. .. 2d, the fine movement mounting table is moved by the X-direction moving table 11 driven by the X-direction driving mechanism 13 and the Y-direction moving table 12 driven by the Y-direction driving mechanism 14 as in the first embodiment. The 10 may be driven in the XY directions, and in short, a drive mechanism capable of independently moving the fine movement mounting table 10 in the XY directions may be applied.

In FIG. 6, the fine movement mounting table 10 is on the right side (X direction).
When the leaf springs 9a to 9d are moved by ΔX, the leaf springs 9a to 9d are displaced in the direction of the X in the moving direction of the fine movement mounting table 10 in a V shape. Along with this movement, the leaf springs 7a to 7d move in the opposite direction to the c-shape of the leaf springs 9a to 9d so that the connecting members 8R and 8F are displaced rightward by ΔX / 2 to absorb the displacement. The connection members 8R and 8F are deformed into a letter shape and pulled toward the inside of the fine movement mounting table 10.

Therefore, in FIG. 6, the leaf springs 9a to 9d correspond to elastic displacement portions, and the leaf springs 7a to 7d correspond to elastic displacement absorbing portions.

According to the second embodiment, the supporting member, the leaf spring, the connecting member, and the fine movement mounting table have the same structure as that of the first embodiment. Therefore, the same effect as that of the first embodiment can be obtained. However, in addition to this, since the support member, the leaf spring, the connecting member, and the fine movement mounting base are integrally formed, the assembly process of screwing these with screws or the like can be omitted, and the fine movement mounting can be omitted. There is an advantage that static accuracy such as flatness and parallelism of the table 10 can be sufficiently secured without adjustment.

Next, a third embodiment of the present invention will be described with reference to FIG.

In the third embodiment, instead of the parallel leaf springs, the leaf springs in directions orthogonal to each other are alternately connected to each other, so that the first
The operation and effect are similar to those of the embodiment.

That is, as shown in FIG. 7, leaf springs 41a to 4a extending in the Y direction on the frame-shaped support member 2 fixedly arranged on the base 1.
A leaf spring 4 which connects the connecting members 42L and 42R extending in the Y direction via 1d and extends in the X direction to these connecting members 42L and 42R.
Connecting members 44F and 44R extending in the X direction are connected via 3a to 43d, and connecting members 46L and 46R extending in the Y direction via plate springs 45a to 45d extending in the Y direction to these connecting members 44F and 44R.
And connecting members 48F, which extend in the X direction via leaf springs 47a-47d extending in the X direction to these connecting members 46L, 46R.
48R is connected, and the fine movement mounting table 50 is connected to these connecting members 48F, 48R via leaf springs 49a to 49d extending in the X direction. The fine movement mounting table 50 is an electromagnet as in the second embodiment described above. It is driven directly or is driven in the XY direction by the X-direction drive mechanism 13 and the Y-direction drive mechanism 14 via the X-direction movement table 11 and the Y-direction movement table 12 similar to those in the first embodiment.

According to the third embodiment, when the fine movement mounting table 50 is moved leftward (or rightward) in the X direction, the leaf springs 49a to 49d are extended in the Y direction while the movement amount from the neutral state is small. Therefore, the leaf springs 49a to 49d are elastically displaced to the right (or left) with respect to the fine movement mounting table 50, and the elastic displacement causes the connecting members 48F and 48R to be slightly pulled inward. The movement of the connecting members 48F, 48R is allowed by the leaf springs 47a-47d serving as elastic displacement absorbing portions being elastically displaced inward at the tip end side with respect to the connecting members 46L, 46R. In addition, the movement amount of the fine movement mounting table 50 becomes large,
When the leaf springs 49a to 49d cannot be absorbed only by the elastic displacement, the unabsorbed movement amount causes the connecting members 46L and 46R to move leftward (or rightward) via the leaf springs 47a to 47d. The amount of movement is allowed by the elastic displacement of the leaf springs 45a to 45d, and the inward movement of the connecting members 44F and 44R by the elastic displacement of the leaf springs 45a to 45d is allowed by the elastic displacement of the leaf springs 43a to 43d.

As described above, when the fine movement mounting table 50 moves in the X direction, the leaf springs 49a to 49d correspond to the elastic displacement portions, and the other leaf springs 47 are used.
a to 47d, 45a to 45d, 43a to 43d, 41a to 41d correspond to the elastic displacement absorbing portion.

Therefore, the leaf spring caused by the movement of the fine movement mounting table 50 in the X direction is used.
Since the leaf spring of the next stage absorbs a slight movement of the connecting member due to the elastic displacement of 49a to 49d, a large driving amount of the leaf springs 49a to 49d itself can be taken with a small driving force. Since the leaf springs 45a to 45d are also elastically displaced according to the movement of the fine movement mounting table 50 in the X direction, it is possible to increase the movement amount of the fine movement mounting table 50, and to reduce the number of positioning times when performing precise positioning. As a result, the working efficiency of the exposure apparatus and the like can be greatly improved, and the same effects as those of the first embodiment can be obtained.

Further, when the fine movement mounting table 50 is moved in the Y direction, the leaf springs 49a to 49d are not elastically displaced, and the leaf springs 47a to 47d and 43a.
~ 43d is elastically displaced, and the connecting members 46L, 4 accompanying the elastic displacement
The movements of 6R, 42L and 42R can be absorbed by the leaf springs 45a to 45d and 41a to 41d.

As described above, when the fine movement mounting table 50 moves in the Y direction, the leaf springs 47a to 47d correspond to the elastically displacing portions and the other leaf springs 45.
a to 45d, 43a to 43d, 41a to 41d correspond to the elastic displacement absorbing portion.

Further, in the third embodiment, the case where eight connecting members are provided has been described. However, the outermost connecting members are connected according to the amount of movement of the fine motion mounting table 50 and the set value of the elastic coefficient of the leaf spring.
42L, 42R may be omitted, or as shown in FIG.
A connecting member 5 is provided outside the F and 42R via leaf springs 51a to 51d.
2F, 52R are connected, and leaf springs 53a ~ are connected to these connecting members 52F, 52R.
It goes without saying that the connecting members 54L and 54R can be added via the 53d. In FIG. 8, when the fine movement mounting table 50 moves in the X direction, the leaf springs 45a to 45d correspond to the elastic displacement portions, and the leaf springs 43a to 43d, 51a, as in FIG.
~ 51d, 53a ~ 53d, 41a ~ 41d corresponds to the elastic displacement absorbing portion,
When the fine movement mounting table 50 moves in the Y direction, the leaf spring 47
a to 47d correspond to elastic displacement portions, and leaf springs 45a to 45d and 51a to 51
d, 53a to 53d and 41a to 41d correspond to the elastic displacement absorbing portion.

In each of the above embodiments, the case where the ball screw, the ball nut, and the DC servomotor are applied as the X-direction drive mechanism 13 and the Y-direction drive mechanism 14 has been described, but the present invention is not limited to this, and the electromagnet is not limited thereto. Of course, other drive mechanisms such as a fluid pressure cylinder can be applied.

Further, in FIGS. 1, 6, 7, and 8, the embodiment in which the fine movement mounting table 10 (or 50) is moved in the X and Y directions has been described, but the fine movement mounting table 10 (or 50) is described. ) Is fixed to the base 1 as a support member, and the support member 2 or the support bracket 2a to
Even if 2d is used as a fine movement mounting table and is moved in the X and Y directions, the same effect as that of the above-described embodiment can be obtained.

〔The invention's effect〕

As described above, according to the present invention, the elastic displacement portion elastically displaced according to the movement amount of the fine movement mounting table and the elastic displacement absorption portion allowing the movement of the connecting member caused by the elastic displacement of the elastic displacement portion are provided. Since there is at least one pair of structures, the elastic displacement portion does not receive an unreasonable tensile force that prevents the elastic displacement, and the elastic displacement amount of the elastic displacement portion itself can be increased, and a large driving force can be achieved with a small driving force. It is possible to secure a sufficient amount, reduce the number of movements of the fine movement table when performing positioning for each minute distance, improve the positioning efficiency, and reliably prevent the control origin from drifting. The effect that it can be obtained is obtained.

[Brief description of drawings]

FIG. 1 is a plan view showing a first embodiment of the present invention, FIGS. 2 and 3 are a front view and a left side view of FIG. 1, respectively.
5 and 5 are sectional views taken along the lines IV-IV and VV of FIG. 1, respectively, and FIG. 6 is a plan view showing a second embodiment of the present invention.
FIG. 7 is a plan view showing a third embodiment of the present invention, and FIG. 8 is a plan view showing a modification of the third embodiment. In the figure, 1 is a base, 2 is a support member, 2a to 2d are support brackets, 3a to 3d, 5a to 5d, 7a to 7d and 9a to 9d are leaf springs, 4L, 4
R, 6L, 6R and 8F, 8R are connecting members, 10 is a fine movement mounting table, 11 is an X-direction moving table, 12 is a Y-direction moving table, and 13 is X.
Direction drive mechanism, 14 Y direction drive mechanism, 22 ball nut, 23 rod, 24 ball screw, 25 DC servo motor, 41a-41d, 43a-43d, 45a-45d, 47a-47d and 49a
~ 49d are leaf springs, 42L, 42R, 44F, 44R, 46L, 46R and 48F, 48
R is a connecting member, 50 is a fine movement mounting table, 51a to 51d, 53a to 53d are leaf springs, and 52F, 52R, 54L and 54R are connecting members.

Claims (2)

[Claims] 1. A fine movement table device comprising a support member fixed on a base and a fine movement mounting table connected to the support member via a connecting member so as to be elastically movable in the XY directions. An elastic displacement portion that displaces in the displacement direction of the mounting table; and an elastic displacement absorbing portion that displaces in a direction that absorbs the displacement of the elastic displacement portion via the connecting member due to the displacement of the elastic displacement portion. A fine movement table device comprising at least one pair of a portion and an elastic displacement absorbing portion. 2. The cross-sectional shape of the supporting member, the connecting member, the elastic displacement portion, the elastic displacement absorbing portion, and the fine movement mounting table in the plane orthogonal to the Z axis is the same in the Z axis direction. The fine movement table device according to item 1.