JPH0516079U - Fine positioning table - Google Patents

Abstract

(57) [Summary] [Objective] The position adjustment structure of the fine positioning table is made highly rigid, and position adjustment is made stable at a high reduction rate. [Structure] The fine positioning table includes a table 1 supported by a base so as to be two-dimensionally displaceable, a first contact surface 12 in the Y-axis direction of the table, and a second contact surface in the X-axis direction perpendicular to the table. Table position adjusting devices 4 provided along each of 13 and a pressing portion 5 that presses the table facing each of the table position adjusting devices, and the table position adjusting device includes a fixed side member and a fixed side. A movable taper member 44, which is movably guided in the longitudinal direction by the member, and is fitted between the fixed side member and each of the first contact surface and the second contact surface of the table, and the longitudinal displacement of the movable taper member. And means. When the taper member on the first (second) abutment surface side is displaced by a predetermined amount in the Y (X) axis direction with respect to the fixed side member, the table is moved to X by the wedge action of the movable taper member.
The displacement is reduced in the (Y) axis direction, and the position is adjusted in the X (Y) axis direction.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a fine positioning table for machine tools, measuring instruments and the like.

[0002]

[Prior Art]

 The conventional positioning table has a double structure as shown in FIG. 4, and a slide base 93 is slidably mounted on an X-axis guide 92 formed on a base 91 so as to be perpendicular to the X-axis guide. A table 95 is slidably mounted on a Y-axis guide 94 formed on the slide table.

The slide base 93 is displaced in the X-axis direction with respect to the base 91 by a feed screw 97 driven by a motor 96, and the table 95 is a feed screw driven by a motor 98. By 99, the sliding table 93 is displaced in the Y-axis direction. Therefore, the table 95 is two-dimensionally positioned with respect to the base 91 by displacing the slide table 93 and the table 95 respectively to desired positions.

[0004]

[Problems to be solved by the device]

 The positioning table in the above conventional technique has a double structure in which the portion that displaces in the X-axis direction and the portion that displaces in the Y-axis direction are separate bodies, so the rigidity is low, and the displacement due to only the screw mechanism is low. Since the size is reduced, the processing accuracy and measurement accuracy of objects (workpieces and measured objects) on the table are low. The present invention provides a fine positioning table without such drawbacks.

[0005]

[Means for Solving the Problems]

 The fine positioning table of this invention comprises a table that is supported by a base so that it can be displaced two-dimensionally, a first contact surface in the Y-axis direction of the table and a second contact surface in the X-axis direction that is perpendicular to the table. The table position adjusting device is provided along each of the table position adjusting devices, and the pressing portion that faces the table position adjusting device and presses the table. A movable taper member that is movably supported by a guide and is inserted between the fixed side member and each of the first contact surface and the second contact surface of the table, and a longitudinal displacement means of the movable taper member. Has been done.

[0006]

[Action]

 In the above fine positioning table, a table position adjusting device on the first contact surface side is used for position adjustment in the X-axis direction, and a table position adjusting device on the second contact surface side is used for position adjustment in the Y-axis direction. Operate each one.

The movable taper member is displaced by a predetermined amount in the Y-axis direction with respect to the fixed member by the longitudinal displacement means of the table position adjusting device on the first contact surface side. Then, due to the wedge action of the movable taper member, the table is reduced and displaced in the X-axis direction so as to face the pressing portion, and the position adjustment in the X-axis direction is performed.

Similar to the above-mentioned position adjustment in the X-axis direction, the table position adjusting device on the second contact surface side adjusts the position of the table in the Y-axis direction. Thus, the table is finely positioned two-dimensionally with respect to the base.

[0009]

【Example】

 A fine positioning table according to an embodiment of the present invention will be described with reference to the drawings. In FIG. 1, a table 1 is supported on a base 3 by three supporting portions 2 so that it can be two-dimensionally displaced in a plane.

As shown in FIG. 3, the support portion 2 has a double thrust ball bearing structure. The support portion 2 is planted in the base 3 and has a pillar 22 having a threaded portion 21 formed on an upper end thereof, a lower raceway 23, and an intermediate ring 23. The bearing ring 24 and the upper bearing ring 25 are fitted together, and balls 26, 26 ... Are fitted between them. The lower track ring 23 is supported by the base 3, the peripheral part of the mounting hole 11 of the table 1 is placed on the intermediate track ring 24, and the intermediate track ring 24 and the table 1 are fixed by screws 27, The bearing ring 25 is fixed from above by a lock nut 28 that is screwed into the screw portion 21.

A similar clearance is provided between the inner peripheral surface of the intermediate bearing ring 24 and the outer peripheral surface of the column 22, and between the inner peripheral surface of the mounting hole 11 and the outer peripheral surfaces of the upper guide ring 25 and the lock nut 28. d is open. Therefore, the table 1 can be displaced relative to the base 3 in the horizontal direction in the range of the distance 2d. A dustproof ring 29 is attached to the outer peripheral surface of the intermediate bearing ring 24 so as to cover the ball gap with the lower bearing ring 23.

As shown in FIGS. 1 and 3, on the base 3, one side surface (hereinafter referred to as a first side surface) 12 of the table 1 in the Y-axis direction and a side surface (hereinafter, referred to as a first side surface) in a direction perpendicular thereto (X-axis direction). Table position adjusting devices 4a and 4b are provided along each of the two side surfaces 13 and each of the side surfaces opposite to the first side surface 12 and the second side surface 13 (hereinafter referred to as the third side surface and the fourth side surface) 14 , 15 are provided with at least two pressing portions 5a, 5b for horizontally pressing the table 1 toward the table position adjusting device 4.

The table position adjusting devices 4a and 4b are fixed side members having a U-shaped cross section, which are slightly longer than the lengths of the first side surface 12 and the second side surface 13 of the table 1, respectively, and are inserted into the concave portions of the fixed side members to be elongated. It comprises a movable taper member having substantially the same length as the first side surface 12 (second side surface 13) movably supported in the direction, and a longitudinal displacement means of the movable taper member.

The fixed-side member having a U-shaped cross section attached to the base 3 along the first side face 12 (second side face 13) may be an integral member, but in the example shown in FIG. The member 41 and the side member 42 have an L-shaped cross section, and the lower surface member 43 is separately provided, and has a U-shaped cross section as a whole. The lower surface of the movable taper member 44 is supported on the upper surface of the lower surface member 43 via a linear motion rolling bearing (ball bearing) 45, and the upper surface is in sliding contact with the lower surface of the upper surface member 41, and both side surfaces and side surface members 42 and A linear motion rolling bearing (needle roller bearing) 46 is fitted between the first side surface 12 (second side surface 13) of the table.

A longitudinal hole is formed in each end surface of the movable taper member 44, one hole serves as a spring insertion hole 44a, and a nut 44c is attached to the opening of the other hole 44b. . Then, projecting portions 42a and 42b are formed at both ends of the side member 42, and the longitudinal guide shaft 42c planted in one projecting portion 42a is inserted into the spring insertion hole 44a of the movable taper member 44. The compression coil spring 47 that projects and surrounds the guide shaft 42c is fitted between the bottom of the spring insertion hole 44a and the projection 42a.

A screw shaft 48 in the longitudinal direction is rotatably supported and a motor 49 is mounted on the other protruding portion 42b, and the tip end of the screw shaft 48 is in a ball screw relationship with the nut 44c. The base end portion of the screw shaft 48 is connected to the motor shaft of the motor 49 via a joint.

The pressing portion 5 is fixed to the base 3 and is provided on the bracket 51 so that the pressing member 52 protrudes through the compression coil spring 53. The thrust ball bearing 54 attached to the tip end surface of the pressing member 52 is It is configured to abut the third side surface 14 (fourth side surface 15) of the table 1.

On the upper surface of the table 1, there is provided a positioning and holding device 6 for positioning an object (for example, a work piece or a measurement object). The positioning and holding device 6 is supported on both sides by the linear motion rolling bearings 62, 62 of the guide member 61 mounted on the upper surface of the table 1, and the positioning member 64 with the V block 63 mounted on the tip and the positioning member 64 of the table 1. A pneumatic cylinder 65 mounted on the upper surface to position and move the positioning member 64 in the longitudinal direction, a pressing member 67 to move forward and backward to face the V block 63 by the pneumatic cylinder 66, and a pin shaft planted on the upper surface of the table 1. It is rotatably mounted around 68a and is composed of presser pawls 68, 68 for pressing the object W on its upper surface.

On the base 3, on both sides of the table 1, a measuring device for measuring a spindle head for processing a workpiece or a measuring object so as not to interfere with the positioning movement of the table 1 and the movable taper member 44 ( The leg portions 7, 7 of the frame body for mounting (not shown) are attached.

The operation and action of the above fine positioning table will be described. The pneumatic cylinder 65 and the pneumatic cylinder 66 are operated to move the positioning member 64 and the pressing member 67 to the retracted position. Therefore, the object W is placed on the table 1 between the V block 63 of the positioning member 64 and the pressing member 67. Then, the pneumatic cylinder 65 is operated to move the positioning member 64 forward along the guide member 61 and position it at a predetermined position. The reference peripheral surface of the target object W is brought into contact with the V block 63, the pneumatic cylinder 66 is operated to advance the pressing member 67, the object W is pressed and fixed to the V block 63, and the pressing claws 68 and 68 are further fixed. It rotates and engages with the upper surface of the object W. Thus, the object W is positioned and fixed at a predetermined position on the table 1.

Next, when finely adjusting and positioning the position of the object W, the table position adjusting device 4a on the first side surface is used for position adjustment in the X-axis direction, and the second position is used for position adjustment in the Y-axis direction. Each of the side table position adjusting devices 4b is operated. Since the respective operations and actions are the same, the table position adjusting device 4a will be described as a representative.

The table 1 is pressed against the movable taper member 44 in the X-axis direction via the linear motion rolling bearing 46 by the spring force of the compression coil spring 53 of the pressing portion 5. In this state, the motor 49 rotationally drives the screw shaft 48 by a predetermined amount via the joint based on the input from the control device. Then, the movable taper member 44 is displaced by a predetermined amount in the Y-axis direction with respect to the fixed side member having a U-shaped cross section, that is, the base 3, as the compression coil spring 47 expands and contracts by the ball screw mechanism with the nut 44c. Then, the wedge action of the movable taper member 44 causes the table 1 to be displaced in the X-axis direction along with the expansion and contraction of the compression coil spring 53 of the pressing portion 5.

The rotation angle of the motor 49 is reduced by the ball screw mechanism and becomes the displacement amount of the movable taper member 44. The displacement amount of the movable taper member 44 is further reduced by the taper, and the displacement amount in the X-axis direction of the table 1 becomes Become. Therefore, the table 1 is adjusted very finely in the X-axis direction within the range of the distance 2d.

The displacement of the movable taper member 44 in the Y-axis direction is smoothly performed by the linear motion rolling bearings 45 and 46 on both surfaces thereof, and the displacement of the table 1 in the X-axis direction is performed by the table position adjusting device 4b on the second side surface. Of the linear motion rolling bearing 46, the thrust ball bearing 54 of the pressing portion 5 and the thrust ball bearing of the support portion 2 smoothly.

In the same manner as the position adjustment in the X-axis direction described above, the position adjustment in the Y-axis direction is performed by the table position adjusting device 4b. Thus, the table 1, that is, the object, is finely positioned two-dimensionally with respect to the base 3.

[0026]

[Effect of the device]

 The fine positioning table according to the present invention does not have a double structure in which a portion displacing in the X-axis direction and a portion displacing in the Y-axis direction such as the positioning table in the prior art are not separate bodies, but a single-layer structure. Because of its structure, it has high rigidity, and since the displacement mechanism that uses the wedge action of the taper member performs reduction displacement, stable position adjustment can be performed at a high reduction ratio. Therefore, the processing accuracy and measurement accuracy of the object (workpiece or measured object) on the table are high.

[Brief description of drawings]

FIG. 1 is a plan view of a fine positioning table according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along line II-II in FIG.

FIG. 3 is a sectional view taken along line III-III in FIG.

FIG. 4 is a perspective view of a positioning table in the related art.

[Explanation of symbols]

 1 table 12 1st side surface 13 2nd side surface 14 3rd side surface 15 4th side surface 2 bearing part 3 base 4 table position adjusting device 41 upper surface member 42 side surface member 43 lower surface member 44 movable taper member 45, 46, 62 linear motion rolling Bearing 47, 53 Compression coil spring 48 Screw shaft 5 Pressing part 52 Pressing member

Claims (1)

[Scope of utility model registration request] 1. A table movably supported on a base so as to be two-dimensionally displaceable, along a first contact surface in the Y-axis direction of the table and a second contact surface in the X-axis direction perpendicular thereto. The table position adjusting device includes a table position adjusting device and a pressing portion that presses the table so as to face each table position adjusting device, and the table position adjusting device guides the fixed side member and the fixed side member so as to be movable in the longitudinal direction. And a fine positioning including a movable taper member fitted between the fixed side member and each of the first contact surface and the second contact surface of the table, and a longitudinal displacement means of the movable taper member. table.