JPH07214438A - X and y stage - Google Patents

Abstract

PURPOSE:To provide an X and Y stage whose provision space to a use device is narrow and whose operation is easy. CONSTITUTION:An X axis base operation knob 12 to turn an X axis base drive screw shaft that moves an X axis base 2 in an X direction in regard to a fixing base 1, and a Y axis base operation knob 16 to move in an X direction a Y axis base drive pipe 10 that is for moving a Y axis base 3 in a Y direction are provided on one side surface of the X axis base 2 in a concentric state, and an X and Y movement direction converting means to move the Y axis base 3 in the Y direction by the X direction movement of the Y axis base drive pipe 10 by the operation of the X axis base operation knob 16 is built inside.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention moves a table (hereinafter referred to as a base) on which an inspection object, a workpiece, etc. (hereinafter referred to as a work) is mounted or fixed in 90 degrees different X and Y directions, The present invention relates to an X / Y stage for positioning a work.

[0002]

2. Description of the Related Art It is used in an observation device such as a microscope, an inspection device, a machine tool or the like (hereinafter referred to as a device to be used) for moving a work in a X direction and a Y direction on a predetermined plane and setting it at a predetermined position. As shown in the perspective view of FIG. 5, the conventional XY stage has a fixed base 1, an X-axis base 2 slidable in the X direction with respect to the fixed base 1, and a work (not shown). Is mounted and attached, and the Y-axis base 3 is slidable and movable in the Y-direction different from the moving direction of the X-axis base 2 by 90 degrees.

Then, the X-axis base drive shaft 4 provided so as to project from the side surface of the fixed base 1 is rotated to move the X-axis base 2 in the X direction with respect to the fixed base 1 so as to project from the side surface of the X-axis base 2. The Y-axis base drive shaft 5 thus provided is rotated to move the Y-axis base 3 in the Y direction with respect to the X-axis base 2.

The X-axis base drive shaft 4 is the X-axis base 2
There is also a configuration example in which the Y-axis base drive shaft 5 is provided on the side face of the Y-axis base 3. In either case, the X-axis base 2 is pushed by the X-axis base drive shaft 4 to move, and is moved in the opposite direction by a spring (not shown). Further, the Y-axis base 3 is pushed and moved by the Y-axis base drive shaft 5 protruding in a direction different from the X-axis base drive shaft 4 by 90 degrees, and is moved in the opposite direction by a spring (not shown).

[0005]

However, the above-mentioned conventional XY stage has an X-Y stage projecting in directions different by 90 degrees.
Since the work set on and fixed to the Y-axis base 3 is moved to a predetermined position by the axis-base drive shaft 4 and the Y-axis base drive shaft 5, the space for installing the X-Y stage in the device to be used is X. Widely required in both Y directions. Further, there is a problem that a large space is required in both the X and Y directions to operate the X-axis base drive shaft 4 and the Y-axis base drive shaft 5, and the operation is troublesome.

The present invention has been made to solve the above-mentioned problems of the prior art. The space required for installing an X / Y stage in an apparatus used is narrower than before, and an X-axis base and a Y-axis base are provided. The operation space required for moving the X can be smaller than before, and the operation is easy.
-The purpose is to provide a Y stage.

[0007]

Therefore, the X / Y stage according to the present invention has a fixed base, an X-axis base movable in the X direction with respect to the fixed base, and a Y-direction with respect to the X-axis base. An X-Y stage including a movable Y-axis base, and an X-axis base drive axis of an X-axis base drive means for moving the X-axis base in the X direction with respect to a fixed base.
The Y-axis base drive cylinder of the Y-axis base drive means for moving the Y-axis base in the Y-direction is fitted to the X-axis base drive shaft so as to move the Y-axis base drive cylinder with respect to the X-axis base in the X-direction. X to be converted into Y-axis based movement in the Y direction
It is intended to achieve the above-mentioned object by a configuration characterized in that it is provided with a Y movement direction conversion means.

[0008]

With the above structure, the X-axis base drive shaft provided on the X-axis base moves the X-axis base relative to the fixed base.
By moving in the direction, the Y-axis base moves in the X direction with respect to the fixed base.

Then, by moving the Y-axis base drive cylinder fitted on the X-axis base drive shaft in the X direction with respect to the X-axis base, the Y-axis base is converted to the X-axis base by the XY moving direction converting means. On the other hand, it moves in the Y direction, that is, in the Y direction with respect to the fixed base.

By the above-mentioned operation and action, the work placed and attached to the Y-axis base can be moved in the X and Y directions with respect to the fixed base, and the work can be moved and set to a predetermined position with respect to the apparatus used. It will be possible.

Moreover, by inserting the Y-axis base drive cylinder into the X-axis base drive shaft, the operating portion required for the operation has a structure protruding only in one direction and at one place.・ The space required for installing the Y stage may be smaller than before, and both operating parts for moving in the X and Y directions can be formed in close proximity to one another, and the moving operation in the X and Y directions is possible. Can be done easily.

Further, by having the structure of claim 4,
There is no backlash (back clearance) in movement in the X and Y directions, and precise movement control and position determination can be performed. In addition, a reverse drive mechanism using a spring is unnecessary, and a heavier work than in the past can be moved.

Further, as in the fifth and seventh aspects of the invention, the X-direction position display means and the Y-direction position display means can be provided close to each other, and the operation is easier and the position can be surely set.

[0014]

EXAMPLES The XY stage according to the present invention will be described below with reference to examples.

FIG. 1 is a perspective view showing the outline of the configuration of one embodiment. The same or corresponding parts as those in the conventional example are designated by the same reference numerals.

In this embodiment, a fixed base 1 is placed or fixed on the apparatus to be used, an X-axis base 2 is slidable in the X direction with respect to the fixed base 1, and a work (not shown) is placed.・ Y attached 90 degrees different from the moving direction of X-axis base 2
The Y-axis base 3 is slidable and movable in the direction.

The structure for sliding and moving is provided with a stepped portion for correctly guiding and smoothly moving in a predetermined X direction or Y direction, a structure with a linear guide, Various other conventional configurations can be selected and used, and not only the configuration that allows smooth sliding and movement with the interposition of lubricating oil, but also the configuration with a small roller or small ball interposed reduces the input for movement. You can also let it.

Then, an X-axis base operation knob 12 for rotating the X-axis base drive shaft of the X-axis base drive means for moving the X-axis base 2 in the X direction with respect to the fixed base 1, and Y.
A Y-axis base operating knob 16 for moving the Y-axis base drive cylinder 10 of the Y-axis base driving means for moving the shaft base 3 in the Y direction is provided on one side surface of the X-axis base 2 in a concentric state. .

It should be noted that there is built-in X / Y movement direction conversion means for moving the Y-axis base 3 in the Y-direction by moving the Y-axis base drive cylinder 10 in the X-direction by operating the Y-axis base operation knob 16.

FIG. 2 is a sectional view schematically showing this embodiment for explaining the operation of the above embodiment. The configuration and operation will be described with reference to FIG.

Reference numeral 6 denotes an X-axis base drive screw shaft, which is screwed into an X-direction female screw 7 provided on the fixed base 1, and is rotated to move the X-axis base 2 in the X direction (left and right direction in the drawing). An X-axis base drive ring 8 is formed so that it can be moved. A key groove 9 forming a sliding key structure is formed at the shaft end portion. An embodiment in which a female screw is provided at the tip of the X-axis base drive screw shaft 6 and is screwed into a male screw provided on the fixed base 1 is also possible.

Reference numeral 10 is a Y-axis base drive cylinder, which is fitted in the X-axis base drive screw shaft 6 with a gap. The outer peripheral surface is provided with a Y-axis base drive screw 11 and a movement amount detection screw for screwing the X-axis base operation knob 12. In the present embodiment, the Y-axis base drive cylinder outer peripheral surface portion between the Y-axis base drive screw 11 and the movement amount detection screw for screwing the X-axis base operation knob 12 is engraved with a scale for position display described later. .

The X-axis base operation knob 12 has a key groove 9 which forms a sliding key structure of the X-axis base drive screw shaft 6.
, And the inner movement amount detecting female screw 13 is screwed into the movement amount detecting screw of the Y-axis base drive cylinder 10, the X-axis base drive screw shaft is rotated by turning the X-axis base drive operation knob 12. The X-axis base 2 can be moved in the X direction with respect to the fixed base 1 by turning 6. At the same time, the relative position of the X-axis base operation knob 12 with respect to the Y-axis base drive cylinder 10 moves by the screwing of the movement amount detecting female screw 13, so that the X-direction position display means described later can be configured.

Reference numeral 14 denotes a slider portion extending from the Y-axis base drive cylinder 10, and a slider guide portion 15 provided on the X-axis base 2 prevents the Y-axis base drive cylinder 10 from rotating and guides its movement in the X direction. It has a structure that allows it.

Reference numeral 16 denotes a Y-axis base operation knob, which is attached to the X-axis base 2 so as to be rotatable without moving relative to the X-axis base 2 in the X direction. The Y-axis base drive barrel 10 is provided with a female screw for driving that is screwed into the Y-axis base drive screw 11, and by turning the Y-axis base operation knob 16, the Y-axis base drive barrel 10 is moved. It can be moved relative to the base 2 in the X direction.

The above-mentioned X / Y moving direction converting means projects from the lower surface of the Y-axis base 3 and the Y-axis base drive block 17 having a sliding surface oblique to the Y-direction, and the upper surface of the slider portion 14. It is configured by a Y-axis base drive roller 18 that comes into contact with the sliding surface of the Y-axis base drive block 17.

FIG. 3 is a plan view of an essential part schematically showing the structure of the X / Y moving direction converting means of the present embodiment.

As shown in the drawing, the Y-axis base drive block 17 formed on the Y-axis base 3 is oblique with respect to the Y direction, that is, also with respect to the X direction in which the Y-axis base drive cylinder 10 moves, in an oblique direction. In the present embodiment, the Y-axis base 3 is moved in the Y-direction by half the moving dimension of the Y-axis base drive cylinder 10 by inclining it by 26 degrees and 34 minutes with respect to the X-direction. Further, the Y-axis base drive block 17 has a surface on both sides which abuts and slides on the Y-axis base drive roller 18,
The Y-axis base drive block 1 is provided on the upper surface of the slider portion 14.
Two Y-axis base drive rollers 18 are projected so as to abut on both sides of 7. The Y-axis base drive roller 1
Numeral 8 is inserted into the eccentricity adjustment shaft, and the interval between the two Y-axis base drive rollers 18 is adjusted to adjust the Y-axis base drive block 1.
It is equipped with a space adjustment mechanism that can simultaneously abut 7 on both sides without backlash.

The structure of the X / Y moving direction converting means enables precise movement control and position determination. In addition, a reverse drive mechanism using a spring is unnecessary, and a heavier work than in the past can be moved.

The Y-axis base drive roller 18 is provided on the Y-axis base 3 and the Y-axis base drive block 17 is provided on the slider portion 14 of the Y-axis base drive cylinder 10 to form an X / Y moving direction converting means. You can also

As another embodiment, the Y-axis base drive cylinder 10 is one, and the sliding surface of the Y-axis base drive block 17 is also one side, and the Y-axis base 3 is urged by a spring to slide in abutment. A configuration is also possible.

FIG. 4 is a plan view of essential parts showing the X-direction position display scale and the Y-direction position display scale formed on the Y-axis base drive cylinder 10 portion protruding from the X-axis base 2.

As described above with reference to the schematic sectional view of FIG. 2, by rotating the X-axis base operation knob 12, the X-axis base drive screw shaft 6 is rotated to rotate the X-axis base 2 with respect to the fixed base 1. The X-axis base operating knob 12 and the Y-axis base drive cylinder 10 move relative to each other at the same time as the Y-axis base drive cylinder 1 moves as shown in FIG.
A scale 20 indicating the dimension of the X-axis base operation knob 12 relatively moved in the X direction on the outer peripheral surface of 0, and a scale 21 indicating the rotation angle with respect to the Y-axis base drive cylinder 10 on the outer peripheral edge portion of the X-axis base operation knob 12. Is formed, and similarly to the micrometer, it is configured such that a fine display of the position of the Y-axis base 3 in the X direction can be made by using both scales.

Further, Y is formed on the outer peripheral surface of the Y-axis base drive cylinder 10.
A scale 22 showing a dimension moved relative to the axis-based operation knob 16 and a scale 2 showing a rotation angle with respect to the Y-axis base drive cylinder 10 on an outer peripheral edge portion of the Y-axis operation knob 16.
3 is formed, and it is configured such that the position of the Y-axis base 3 in the Y direction can be finely displayed by using both scales like the micrometer. It should be noted that each of the above scales may be a scale indicating plus or minus from the zero reference, and may be formed so that the coordinate display from the origin of the work position can be confirmed.

The above embodiment is an example of a structure in which the Y-axis base 3 is moved in the X direction and the Y direction which are different by 90 degrees on the horizontal plane, but the X direction and the Y direction which are different by 90 degrees on the slope or the vertical plane. It is also possible to move it to.

With the configuration described above, the X-axis base drive screw shaft 6 provided in the X-axis base 2 moves the X-axis base 2 in the X direction with respect to the fixed base 1,
The Y-axis base 3 moves in the X direction with respect to the fixed base 1.

Then, by moving the Y-axis base drive cylinder 10 fitted in the X-axis base drive screw shaft 6 in the X direction with respect to the X-axis base 2, the Y-axis base 3 is moved by the X / Y moving direction converting means. Moves in the Y direction with respect to the X-axis base 2, that is, in the Y direction with respect to the fixed base 1.

By the above operation and action, the Y-axis base 3
Workpiece placed / attached to the X is fixed to the fixed base 1.
The work can be moved in the directions Y and Y, and the work can be moved and set at a predetermined position with respect to the device used.

Moreover, since the Y-axis base drive cylinder 10 is inserted into the X-axis base drive screw shaft 6, the X-axis required for the operation is
Since the axis base operation knob 12 and the Y axis base operation knob 16 are integrally projected in one direction and one place, the space for the equipment used for installing the X / Y stage can be smaller than before. Then, both operations for moving the work in the X direction and the Y direction can be performed in a part of one direction, and the moving operation in the X direction and the Y direction can be easily performed.

Further, the display of the position of the Y base 3 in the X direction and Y
The indication of the directional position is formed on the X-axis base operation knob 12 and the Y-axis base operation knob 16 portion, which is convenient for operation and enables accurate movement and position setting.

[0041]

As described above, according to the present invention,
The Y base on which the work is placed or fixed can be accurately moved and positioned in the X and Y directions, and the work can be easily moved and set to a predetermined position with respect to the apparatus to be used.

In addition, since the operation part required for operation is configured to project in only one direction and one place, the space required for installing the X / Y stage on the device used and the space required for operation are conventionally. May be narrower, and in the X direction and Y
Both operation parts to be moved in the direction can be formed close to one place, and the moving operation can be easily performed.

Further, backlash (back clearance) is eliminated in the movements in the X and Y directions, and precise movement control and position determination can be performed. In addition, a reverse drive mechanism using a spring is not required, and a heavier work than in the past can be moved.

[Brief description of drawings]

FIG. 1 is a perspective view of an embodiment.

FIG. 2 is a cross-sectional view schematically showing the structure of an example.

FIG. 3 is a main part plan view schematically showing the structure of an X / Y moving direction converting means of one embodiment.

FIG. 4 is a plan view of relevant parts showing an X-direction position display scale and a Y-direction position display scale according to an embodiment.

FIG. 5 is a perspective view of a conventional XY stage.

[Explanation of symbols]

 1 fixed base 2 X-axis base 3 Y-axis base 6 X-axis base drive screw shaft 9 key groove forming a sliding key structure 10 Y-axis base drive cylinder 11 Y-axis base drive screw 12 X-axis base operation knob 13 movement amount detection female Screw 14 Slider part 15 Slider guide part 16 Y-axis base operation knob 17 Y-axis base drive block 18 Y-axis base drive roller

Claims (7)

[Claims] 1. An XY stage including a fixed base, an X-axis base movable in the X direction with respect to the fixed base, and a Y-axis base movable in the Y direction with respect to the X-axis base. , X move the X-axis base in the X direction relative to the fixed base X
The X axis base drive shaft of the axis base drive means is provided on the X axis base, and the Y axis base drive cylinder of the Y axis base drive means for moving the Y axis base in the Y direction is inserted into the X axis base drive shaft, and the Y axis base drive shaft is inserted. An XY stage characterized by comprising XY movement direction conversion means for converting the X-direction movement of the base drive cylinder with respect to the X-axis base into the Y-direction movement of the Y-axis base. 2. An XY stage comprising a fixed base, an X-axis base movable in the X direction with respect to the fixed base, and a Y-axis base movable in the Y direction with respect to the X-axis base. , (A) an X-axis base drive screw shaft that slides the X-axis base in the X-direction by being screwed into an X-direction screw provided on the fixed base, and (b) a Y-axis base drive screw on the outer peripheral surface. A Y-axis base drive cylinder that is inserted into the X-axis base drive screw shaft with a gap, and (c) a slider portion extending from the Y-axis base drive cylinder; and (d) a Y-axis base drive cylinder. An X-axis having a slider guide portion provided on the X-axis base for preventing rotation and guiding the movement of the slider portion in the X-direction, and (e) a drive screw screwed into the Y-axis base drive screw of the Y-axis base drive cylinder. Rotation possible by preventing relative movement in the X direction with respect to the base A Y-axis base operation unit attached to the X-axis base, and (f) X-Y that converts the X-direction movement of the Y-axis base and the slider unit provided on the facing portion of the slider unit into the Y-direction movement of the Y-axis base. An X / Y stage comprising: a moving direction changing means; and (g) an X-axis base operation unit attached to an X-axis base drive screw shaft. 3. The X / Y moving direction converting means includes a Y-axis base drive block projecting from a lower surface of the Y-axis base and having a sliding surface oblique to the Y direction, and the Y-axis base drive block projecting from an upper surface of the slider section. An X / Y stage comprising a Y-axis base drive roller that abuts a sliding surface of an axis-base drive block. 4. The X / Y moving direction converting means comprises a Y-axis base drive block having sliding surfaces on both sides which project from a lower surface of the Y-axis base and are oblique to the Y-direction, and an upper surface of the slider portion. A plurality of Ys having an interval adjusting mechanism that projects and abuts on the sliding surfaces on both side surfaces of the Y-axis base drive block.
XY characterized by comprising an axis base drive roller
stage. 5. The Y-direction indicating the Y-direction position of the Y-axis base by displaying the relative position between the Y-axis base operating portion and the Y-axis base drive cylinder, in addition to the configuration according to any one of claims 1 to 4. An XY stage having a position display means. 6. In addition to the structure according to any one of claims 1 to 5, the Y-axis base drive cylinder has a movement amount detection screw for screwing the X-axis base operation unit, and the X-axis base operation unit is X-axis base drive screw shaft rotation drive and X
Axial base drive screw Allows relative movement in the X direction with the shaft X
X-axis base driving screw is attached to the shaft and is screwed to the movement amount detecting screw of the Y-axis base driving cylinder.
・ Y stage. 7. In addition to the structure according to claim 6, an X-direction position display means for indicating the X-direction position of the X-axis base by displaying the relative position of the X-axis base operating portion and the Y-axis base drive cylinder is provided. XY stage characterized by that.