CN108493294A - Redundant drive plane motion platform applied to optoelectronic packaging - Google Patents
Redundant drive plane motion platform applied to optoelectronic packaging Download PDFInfo
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- CN108493294A CN108493294A CN201810204447.9A CN201810204447A CN108493294A CN 108493294 A CN108493294 A CN 108493294A CN 201810204447 A CN201810204447 A CN 201810204447A CN 108493294 A CN108493294 A CN 108493294A
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- 230000005693 optoelectronics Effects 0.000 title claims abstract description 29
- 238000004806 packaging method and process Methods 0.000 title claims abstract description 25
- 239000000758 substrate Substances 0.000 claims description 36
- 238000009837 dry grinding Methods 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 abstract description 8
- 239000013307 optical fiber Substances 0.000 description 6
- 230000009471 action Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 206010037660 Pyrexia Diseases 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000000386 athletic effect Effects 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Details Of Measuring And Other Instruments (AREA)
Abstract
The present invention provides a kind of redundant drive plane motion platform applied to optoelectronic packaging, including：It objective table and is symmetrically arranged in the linear motor of the objective table both sides along first direction and second direction；The linear motor of the objective table both sides is symmetrically disposed on for driving the objective table to move in a second direction along first direction；It is symmetrically disposed on the linear motor of the objective table both sides in a second direction for driving the objective table to be moved along first direction.The invention avoids increase linear motor load because carrying moving link so that movement velocity, acceleration and the start and stop precision of each linear motor are unaffected.Simultaneously as linear motor is symmetrical arranged, linear motor number is double, faster movement velocity, the acceleration of bigger and higher start and stop precision can be provided for objective table, and then the efficiency and precision of optoelectronic packaging can be improved.
Description
Technical field
The present invention relates to optoelectronic packaging techniques fields, more particularly, to a kind of redundancy applied to optoelectronic packaging
Drive plane motion platform.
Background technology
Opto-electronic device is the core devices in fiber optic communication, needed when specifically used respectively with input array optical fiber and defeated
Go out array fibre connection.Opto-electronic device is respectively optoelectronic packaging with the connection of input array optical fiber and output array optical fiber.
Optoelectronic packaging is using the load clamping mechanism on motion platform by opto-electronic device and input array optical fiber or output array
Optical fiber carries out the process of optical alignment coupling.Wherein, the movement velocity of motion platform, acceleration and start and stop precision determine photoelectricity
The efficiency and precision of son encapsulation.
In the prior art frequently with conventional motion platform be objective table be equipped on the moving link in the direction X (or Y),
It is moved in the direction moving link upper edge X (or Y) in the direction X (or Y) under the action of the line correspondence motor of the direction X (or Y)；X (or Y)
The moving link in direction is equipped on the moving link in the direction Y (or X), under the action of Y (or X) direction line correspondence motor
The direction moving link upper edge Y (or X) in the direction Y (or X) moves, to be moved along the direction Y (or X) with dynamic object stage.
Above-mentioned conventional motion platform since the moving link in the direction X (or Y) is equipped on the moving link in the direction Y (or X),
The load of the direction Y (or X) line correspondence motor is aggravated so that the movement velocity of the direction Y (or X) line correspondence motor accelerates
Degree and start and stop precision are affected, and then reduce the efficiency and precision of optoelectronic packaging.
Invention content
The present invention provides a kind of redundant drive plane motion platform applied to optoelectronic packaging, to overcome the prior art
In, conventional motion platform has aggravated Y since the moving link in the direction X (or Y) is equipped on the moving link in the direction Y (or X)
The load of the direction (or X) line correspondence motor so that movement velocity, acceleration and the start and stop of the direction Y (or X) line correspondence motor
Precision is affected, and then the problem of the efficiency and precision of reduction optoelectronic packaging.
According to an aspect of the present invention, a kind of redundant drive plane motion platform applied to optoelectronic packaging is provided,
Including：It objective table and is symmetrically arranged in the linear motor of the objective table both sides along first direction and second direction；Edge
First direction is symmetrically disposed on the linear motor of the objective table both sides for driving the objective table to transport in a second direction
It is dynamic；It is symmetrically disposed on the linear motor of the objective table both sides in a second direction for driving the objective table along first party
To movement.
Wherein, the motion platform further includes substrate；The stator of each linear motor is fixed on the objective table,
The mover of each linear motor is fixed on the substrate.
Wherein, the stator includes upper plate and lower plate；The mover is long column shape, between the upper plate and lower plate.
Wherein, the upper plate and lower plate the upper surface of are arranged in parallel and are individually fixed in pinboard and in the following, and by described
Pinboard is connect with the objective table；It is separate that the side of the upper plate and lower plate far from the objective table is longer than the pinboard
The side of the objective table.
Wherein, the mover both ends are fixed on the substrate；The mover is located at the upper plate and lower plate and described
Objective table is parallel and be longer than the upper plate and lower plate far from the loading in the space that the side far from the objective table is formed
The side of the side of platform.
Wherein, the motion platform further includes synkinesia frame, and the synkinesia frame is fixed on the substrate；It is described
Objective table is moved on the substrate by the synkinesia frame；The synkinesia frame is opposite for reducing the objective table
The resistance when substrate motion.
Wherein, the synkinesia frame includes:Ball plummer, several balls and ball limiting plate；The ball carrying
Platform is fixed on the substrate, for carrying several balls；The ball limiting plate is fixed on the ball plummer,
For making each ball keep original place rotation.
Wherein, the synkinesia frame further includes ball protection board；The ball protection board is fixed on the ball carrying
On platform, for avoiding any ball from leaving the ball plummer.
Wherein, the motion platform further includes movement measuring device, is existed for measuring the relatively described substrate of the objective table
First direction or the distance of second direction movement.
Wherein, the movement measuring device is 2D grating scales；The scale of the 2D grating scales is set to any linear motor
Lower plate lower surface, the reading head of the 2D grating scales is set on the substrate to coordinate the scale.
Redundant drive plane motion platform proposed by the present invention applied to optoelectronic packaging, by that will be used to make objective table
The linear motor moved along first direction and second direction is respectively symmetrically disposed on objective table both sides, avoids and is moved because carrying
Component and the case where increase linear motor load so that movement velocity, acceleration and the start and stop precision of each linear motor will not be by
To influence.Simultaneously as linear motor is symmetrical arranged, linear motor number is double, and faster movement can be provided for objective table
Speed, the acceleration of bigger and higher start and stop precision, and then the efficiency and precision of optoelectronic packaging can be improved.In addition, this hair
The redundant drive plane motion platform by volume applied to optoelectronic packaging of bright proposition is small, and conventional motion platform can be overcome because of movement
Volume is larger caused by component coupled modes, the problem of not being suitable for narrow space.
Description of the drawings
Fig. 1 is a kind of redundant drive plane motion platform structure applied to optoelectronic packaging according to the embodiment of the present invention
Schematic diagram；
Fig. 2 is to be exploded according to a kind of redundant drive plane motion platform applied to optoelectronic packaging of the embodiment of the present invention
Figure；
Fig. 3 is the structure of the linear motion actuator schematic diagram according to the embodiment of the present invention；
Fig. 4 is the synkinesia frame explosive view according to the embodiment of the present invention.
Specific implementation mode
With reference to the accompanying drawings and examples, the specific implementation mode of the present invention is described in further detail.Implement below
Example is not limited to the scope of the present invention for illustrating the present invention.
As shown in Figure 1, according to an aspect of the present invention, providing a kind of redundant drive plane applied to optoelectronic packaging
Motion platform, including：It objective table 10 and is symmetrically arranged in 10 both sides of the objective table along first direction and second direction
Linear motor 20；The linear motor 20 that 10 both sides of the objective table are symmetrically disposed on along first direction is described for driving
Objective table 10 moves in a second direction；The linear motor 20 for being symmetrically disposed on 10 both sides of the objective table in a second direction is used
It is moved along first direction in driving the objective table 10.
Fig. 2 is the explosive view of the redundant drive plane motion platform shown in FIG. 1 applied to optoelectronic packaging.In this implementation
In example, objective table 10 is for placing the target object for waiting for being aligned with other objects, e.g., target object can with opto-electronic device,
His object can be input array optical fiber.Specific modes of emplacement can be to be fixed on the clamping mechanism for being used to fix target object
Objective table 10 recycles clamping mechanism to fix target object.It is symmetrically arranged in the load along first direction and second direction
The linear motor 20 of 10 both sides of object platform is mainly used for being respectively necessary for moving along first direction and second direction according to target object
Distance is moved accordingly with the target object in dynamic object stage 10.Loading when setting unilateral in order to avoid linear motor 20
Platform 10 deviates linear motion under the action of resistance, and in the present embodiment, linear motor 20 is symmetrical arranged in 10 both sides of objective table.It is excellent
Selection of land, it is four to be symmetrically arranged 20 number of linear motor in 10 both sides of the objective table along first direction and second direction
Platform.There are two 20 synchronizing redundant of linear motor drivings respectively along first direction and second direction.
Redundant drive plane motion platform proposed by the present invention applied to optoelectronic packaging, by that will be used to make objective table
The linear motor moved along first direction and second direction is respectively symmetrically disposed on objective table both sides, avoids and is moved because carrying
Component and the case where increase linear motor load so that movement velocity, acceleration and the start and stop precision of each linear motor will not be by
To influence.Simultaneously as linear motor is symmetrical arranged, linear motor number is double, and faster movement can be provided for objective table
Speed, the acceleration of bigger and higher start and stop precision, and then the efficiency and precision of optoelectronic packaging can be improved.In addition, this hair
The motion platform of bright proposition is small, conventional motion platform volume caused by moving link coupled modes can be overcome larger, no
The problem of suitable for narrow space.
As shown in Figure 1, as a kind of alternative embodiment, the motion platform further includes substrate 30；Each straight-line electric
The stator 21 of machine 20 is fixed on the objective table 10, and the mover 22 of each linear motor 20 is fixed on the substrate 30
On.
Substrate 30 is used to provide stable athletic ground for objective table 10.The selection of substrate 30 can need to have considering substrate 30
It is selected according to actual conditions in the case of standby certain degree of hardness and ability to bear.In embodiment itself, by the way that stator 21 is fixed
In on objective table 10, mover 22 is fixed on substrate 30, and in 20 course of work of linear motor, stator 21 is moved with objective table 10
Dynamic, mover 22 is motionless.The electric wire that can avoid connecting on mover 22 in this way moves repeatedly, and then avoids electric wire damaged because of long-term friction
Electric leakage.
As shown in figure 3, as a kind of alternative embodiment, the stator 21 includes upper plate 211 and lower plate 212；The mover
22 be long column shape, between the upper plate 211 and lower plate 212.
As shown in Fig. 2, as a kind of alternative embodiment, the upper plate 211 and lower plate 212 are arranged in parallel and are individually fixed in
It the upper surface of pinboard 40 and in the following, and is connect with the objective table 10 by the pinboard 40；The upper plate 211 and lower plate
212 sides far from the objective table 10 are longer than side of the pinboard 40 far from the objective table 10.
In the present embodiment, pinboard 40 is used to fix upper plate 211 and the side thickness of lower plate 212 can be according to upper plate 211
Spacing between lower plate 212 needs to choose, to ensure there is suitable spacing between upper plate 211 disposed in parallel and lower plate 212.
Pinboard 40 with 10 fixed side thickness of objective table for not limiting.In order to make the mover 22 and stator 21 of linear motor 20
It is used cooperatively, in this embodiment, it is separate that the side of upper plate 211 and lower plate 212 far from objective table 10 is longer than the pinboard 40
The side of the objective table 10.
As a kind of alternative embodiment, 22 both ends of the mover are fixed on the substrate 30；The mover 22 is located at institute
Upper plate 211 and lower plate 212 and the objective table 10 are stated in the space that the side far from the objective table 10 is formed, it is parallel and
It is longer than the side of the side of the upper plate 211 and lower plate 212 far from the objective table 10.
In the present embodiment, 22 both ends of mover can be fixed by the bracket on substrate 30, alternatively, as shown in Figure 1, adjacent dynamic
Son 22 is connected by Change-over frame, and Change-over frame is fixed by the bracket on substrate 30.In order to make the mover 22 of linear motor 20 and determine
Son 21 is used cooperatively, and makes the linear motion where being parallel to mover 22 of stator 21, in this embodiment, mover 22 is located at the upper plate
211 is parallel and be longer than institute in the space that the side far from the objective table 10 is formed with lower plate 212 and the objective table 10
State the side of the side of upper plate 211 and lower plate 212 far from the objective table 10.
As a kind of alternative embodiment, the motion platform further includes synkinesia frame 50, and the synkinesia frame 50 is solid
Due on the substrate 30；The objective table 10 is moved by the synkinesia frame 50 on the substrate 30；The auxiliary
Movement frame 50 is used to reduce resistance when the relatively described substrate 30 of the objective table 10 moves.
Objective table 10, when being moved on substrate 30, will produce frictional force under the drive of linear motor 20.This can hinder to carry
Object platform 10 moves, and influences the speed of objective table 10, reduces the efficiency of optoelectronic packaging.In the present embodiment, by the way that fortune will be assisted
Moving frame 50 is fixed on substrate 30, so that objective table 10 is moved on substrate 30 by synkinesia frame 50, can be greatly reduced loading
Institute is dampened when platform 10 moves, so as to avoid objective table 10 because damping causes speed impacted and then leads to optoelectronic packaging
The problem of efficiency reduces.
As shown in figure 4, as a kind of alternative embodiment, the synkinesia frame 50 includes:If ball plummer 51, dry milling
Pearl 52 and ball limiting plate 53；The ball plummer 51 is fixed on the substrate 30, for carrying several balls 52；
The ball limiting plate 53 is fixed on the ball plummer 51, for making each ball keep original place rotation.
In the present embodiment, ball plummer 51 is mainly used for holding ball.Ball plummer ball is standard spherical shape,
On the one hand carrying objective table 10, it is former under the action of ball is under frictional force on the other hand when 10 counter ball of objective table moves
Ground rotates, to reduce the resistance suffered by objective table 10.Ball limiting plate 53 is the thin plate for being provided with several holes, and each ball is located at
In one hole of ball limiting plate 53 with limit ball make ball be only capable of original place rotation it is irremovable.Ball limiting plate 53 can be used
The nonmetallic materials of self-lubricating property are reduced with reducing frictional force of the ball in high speed start and stop between ball limiting plate 53
The possibility of ball moving fever deformation avoids the movement velocity for influencing objective table and starts precision, and then improves photoelectron envelope
Fill precision.Ball limiting plate 53 is parallel with 51 upper surface of ball plummer and is smaller than the diameter of ball.Preferably, ball limits
Hole on the plate 53 of position is square hole, ball limiting plate 53 and the radius that 51 upper table interplanar distance of ball plummer is ball.For beauty
With it is easy to process, baffle can be respectively set in 51 both sides of ball plummer, the side wall as synkinesia frame.
As shown in figure 4, as a kind of alternative embodiment, the synkinesia frame 50 further includes ball protection board 54；It is described
Ball protection board 54 is fixed on the ball plummer 51, for avoiding any ball from leaving the ball plummer 51.
In the present embodiment, the nonmetallic materials of self-lubricating property can be used in ball protection board 54, to reduce ball in height
Frictional force when fast start and stop between ball protection board 54 reduces the possibility of ball moving fever deformation, avoids influencing loading
The movement velocity and startup precision of platform, and then improve optoelectronic packaging precision.Ball protection board 54 is to be provided with the thin of several holes
Plate, each ball are located at any ball when being inverted to avoid motion platform in a hole of ball protection board 54 and leave ball carrying
Platform 51.Ball protection board 54 is parallel with 51 upper surface of ball plummer and spacing is more than the radius of ball.Preferably, ball limits
Hole on plate 53 is circular hole.
As a kind of alternative embodiment, the motion platform further includes movement measuring device 60, for measuring the loading
The substrate 30 relatively of platform 10 is in a first direction or the distance of second direction movement.
Movement measuring device 60, which is mainly used for obtaining, measures the distance that objective table 10 is moved along first direction or second direction.
The range data can be used as the foundation for adjusting 20 speed of linear motor, and then control the movement and stopping of objective table 10.Movement is surveyed
Amount device 60 is the device that can be used for carrying out displacement detecting, such as inductive displacement transducer, electric vortex type displacement sensor, grating
Ruler etc..
As shown in Fig. 2, as a kind of alternative embodiment, the movement measuring device 60 is 2D grating scales；The 2D gratings
The scale of ruler is set to the lower surface of the lower plate 212 of any linear motor 20, and the reading heads of the 2D grating scales is set to described
To coordinate the scale on substrate 30.
In this embodiment, it is preferred that movement measuring device 60 uses 2D grating scales.
Finally it should be noted that：The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, it will be understood by those of ordinary skill in the art that：It still may be used
With technical scheme described in the above embodiments is modified or equivalent replacement of some of the technical features；
And these modifications or replacements, various embodiments of the present invention technical solution that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (10)
1. a kind of redundant drive plane motion platform applied to optoelectronic packaging, which is characterized in that including：Objective table and edge
First direction and second direction are symmetrically arranged in the linear motor of the objective table both sides；
The linear motor of the objective table both sides is symmetrically disposed on for driving the objective table along second along first direction
Direction moves；
It is symmetrically disposed on the linear motor of the objective table both sides in a second direction for driving the objective table along first
Direction moves.
2. motion platform according to claim 1, which is characterized in that the motion platform further includes substrate；It is each described
The stator of linear motor is fixed on the objective table, and the mover of each linear motor is fixed on the substrate.
3. motion platform according to claim 2, which is characterized in that the stator includes upper plate and lower plate；The mover
For long column shape, between the upper plate and lower plate.
4. motion platform according to claim 3, which is characterized in that the upper plate and lower plate are arranged in parallel and fix respectively
In the following, and it is connect in the upper surface of pinboard and with the objective table by the pinboard；The upper plate and lower plate are far from described
The side of objective table is longer than side of the pinboard far from the objective table.
5. motion platform according to claim 4, which is characterized in that the mover both ends are fixed on the substrate；Institute
It states mover and is located at the upper plate and lower plate and the objective table in the space that the side far from the objective table is formed, it is parallel
And it is longer than the side of the side of the upper plate and lower plate far from the objective table.
6. motion platform according to claim 1, which is characterized in that the motion platform further includes synkinesia frame, institute
Synkinesia frame is stated to be fixed on the substrate；
The objective table is moved on the substrate by the synkinesia frame；
The synkinesia frame be used for reduce the objective table relatively the substrate motion when resistance.
7. motion platform according to claim 6, which is characterized in that the synkinesia frame includes:If ball plummer,
Dry milling pearl and ball limiting plate；
The ball plummer is fixed on the substrate, for carrying several balls；
The ball limiting plate is fixed on the ball plummer, for making each ball keep original place rotation.
8. motion platform according to claim 7, which is characterized in that the synkinesia frame further includes ball protection board；
The ball protection board is fixed on the ball plummer, for avoiding any ball from leaving the ball plummer.
9. motion platform according to claim 3, which is characterized in that the motion platform further includes movement measuring device,
For measure the relatively described substrate of the objective table in a first direction or second direction movement distance.
10. motion platform according to claim 9, which is characterized in that the movement measuring device is 2D grating scales；It is described
The scale of 2D grating scales is set to the lower surface of the lower plate of any linear motor, and the reading heads of the 2D grating scales is set to described
To coordinate the scale on substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810204447.9A CN108493294B (en) | 2018-03-13 | 2018-03-13 | Redundant driving plane motion platform applied to photoelectronic packaging |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810204447.9A CN108493294B (en) | 2018-03-13 | 2018-03-13 | Redundant driving plane motion platform applied to photoelectronic packaging |
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| Publication Number | Publication Date |
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| CN108493294A true CN108493294A (en) | 2018-09-04 |
| CN108493294B CN108493294B (en) | 2020-01-14 |
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| CN201810204447.9A Active CN108493294B (en) | 2018-03-13 | 2018-03-13 | Redundant driving plane motion platform applied to photoelectronic packaging |
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Cited By (2)
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| CN111761552A (en) * | 2020-06-30 | 2020-10-13 | 中南大学 | Motion platform suitable for optical communication device encapsulation |
| CN114279338A (en) * | 2021-12-24 | 2022-04-05 | 北京华卓精科科技股份有限公司 | Reading head installation tool, integration method thereof and reading head installation method |
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| CN111761552A (en) * | 2020-06-30 | 2020-10-13 | 中南大学 | Motion platform suitable for optical communication device encapsulation |
| CN111761552B (en) * | 2020-06-30 | 2022-09-27 | 中南大学 | Motion platform suitable for optical communication device encapsulation |
| CN114279338A (en) * | 2021-12-24 | 2022-04-05 | 北京华卓精科科技股份有限公司 | Reading head installation tool, integration method thereof and reading head installation method |
| CN114279338B (en) * | 2021-12-24 | 2024-04-26 | 北京华卓精科科技股份有限公司 | Reading head mounting tool, integration method thereof and reading head mounting method |
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