JPH0772305A - Antireflection film and antireflection member - Google Patents

Antireflection film and antireflection member

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Publication number
JPH0772305A
JPH0772305A JP5241934A JP24193493A JPH0772305A JP H0772305 A JPH0772305 A JP H0772305A JP 5241934 A JP5241934 A JP 5241934A JP 24193493 A JP24193493 A JP 24193493A JP H0772305 A JPH0772305 A JP H0772305A
Authority
JP
Japan
Prior art keywords
antireflection
fluorine
layer
refractive index
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5241934A
Other languages
Japanese (ja)
Inventor
Yasuhisa Tojo
泰久 東條
Tadayuki Kameyama
忠幸 亀山
Suguru Yamamoto
英 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP5241934A priority Critical patent/JPH0772305A/en
Publication of JPH0772305A publication Critical patent/JPH0772305A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To provide the antireflection film and antireflection member having an excellent antireflection effect even with a number of superposition of two layers for light having a wavelength region, excellent mass productivity, excellent contamination resistance and excellent property to sustain the antireflection effect. CONSTITUTION:This antireflection film consists of at least the superposition of layers consists of a fluorine-containing layer (1) having an optical film thickness of 0.2 to 0.3 times the central wavelength in the wavelength region desired for antireflection and a Y2O3 layer (2) of 0.45 to 0.55 times the wavelength described above and has this fluorine-contained layer on an incident side surface. The fluorine-containing layer consists of a fluorine-contained compd. having thickness 100mum, transmittance >=80%, fluorine atom content >=60wt.% and refractive index <=1.40. This antireflection member has such antireflection film on at least one side of a transparent base material.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、量産性、耐汚染性に優
れて種々の視認装置等の反射防止に好適な反射防止膜及
びその反射防止部材に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an antireflection film excellent in mass productivity and stain resistance and suitable for antireflection of various visual recognition devices and the like, and an antireflection member thereof.

【0002】[0002]

【従来の技術】従来、可視光の如く波長域を有する光に
対する反射防止膜としては、金属酸化物等の透明薄膜を
重畳させて多層膜としたものが知られていた。かかる多
層化は、単層膜では単一波長の光に対しては有効に反射
防止しうるものの波長域を有する光に対しては有効に反
射防止できないことにより、重畳層数を増すほど広い波
長域の反射防止に有効となる。そのため、例えば波長4
00〜700nmの可視光域の反射防止には、入射側表面
をSiO2等の金属酸化物層で形成した3層以上の重畳層
とすることが一般的であり、2層の場合には高精度な反
射防止を達成できないとされてきた。
2. Description of the Related Art Conventionally, as an antireflection film for light having a wavelength range such as visible light, there has been known a multilayer film in which transparent thin films such as metal oxides are superposed. Such a multilayer structure can effectively prevent reflection of light having a single wavelength with a single-layer film, but cannot effectively prevent reflection of light having a wavelength range. It is effective in preventing reflection in the area. Therefore, for example, wavelength 4
In order to prevent reflection in the visible light region of 00 to 700 nm, it is general that the incident side surface is made up of three or more superposed layers formed of metal oxide layers such as SiO 2 , and in the case of two layers, it is high. It has been said that accurate antireflection cannot be achieved.

【0003】しかしながら、多層構造の反射防止膜の形
成には、重畳させる各薄膜の屈折率等を踏まえてその膜
厚を高精度に制御する高度な技術が要求され、そのため
重畳数を1層増すだけで多時間、多労力を要することと
なって製造効率を大きく低下させる問題点があった。ま
た入射側表面の金属酸化物層が指紋等で汚染されやす
く、その汚染で反射防止効果が著しく低下する問題点も
あった。
However, in order to form an antireflection film having a multi-layered structure, an advanced technique is required to control the film thickness of the thin films with high precision in consideration of the refractive index of each thin film to be superposed, and therefore the number of superposed films is increased by one layer. This alone requires a lot of time and labor, and there is a problem that the manufacturing efficiency is greatly reduced. Further, there is a problem that the metal oxide layer on the incident side surface is easily contaminated with fingerprints or the like, and the antireflection effect is significantly reduced due to the contamination.

【0004】[0004]

【発明が解決しようとする課題】本発明は、波長域を有
する光に対して2層の重畳数にても反射防止効果に優れ
て量産性に優れると共に、耐汚染性に優れて反射防止効
果の持続性に優れる反射防止膜及び反射防止部材を得る
ことを課題とする。
DISCLOSURE OF THE INVENTION The present invention has an excellent antireflection effect even when the number of superposed layers is two with respect to light having a wavelength range and is excellent in mass producibility, and is also excellent in stain resistance and antireflection effect. An object of the present invention is to obtain an antireflection film and an antireflection member having excellent durability.

【0005】[0005]

【課題を解決するための手段】本発明は、光学的膜厚が
反射防止目的の波長域における中心波長の0.2〜0.
3倍のフッ素含有層と0.45〜0.55倍のY23
との重畳層から少なくともなると共に、そのフッ素含有
層を入射側表面に有してなり、前記フッ素含有層が厚さ
100μmでの透過率80%以上、フッ素原子含有量6
0重量%以上、かつ屈折率1.40以下のフッ素含有化
合物からなることを特徴とする反射防止膜、及び前記の
反射防止膜を透明基材の少なくとも片側に有することを
特徴とする反射防止部材を提供するものである。
According to the present invention, the optical film thickness of the central wavelength of 0.2 to 0.
The fluorine-containing layer has a thickness of at least an overlapping layer of a 3-fold fluorine-containing layer and a 0.45-0.55-fold Y 2 O 3 layer, and has the fluorine-containing layer on the incident side surface. 80% transmittance at 100 μm, fluorine atom content 6
An antireflection film comprising a fluorine-containing compound having a refractive index of 0% by weight or more and a refractive index of 1.40 or less, and an antireflection member having the antireflection film on at least one side of a transparent substrate. Is provided.

【0006】[0006]

【作用】上記構成のフッ素含有層を入射側表面に有する
23層との重畳層とすることにより、かかる2層から
なる量産性に有利な反射防止膜である場合にも波長域を
有する光に対して満足できる反射防止効果を示す。ちな
みに、波長400〜700nmの可視光域において通例9
8%以上の平均透過率を達成することができる。また入
射側表面にフッ素含有層を有することより撥水性、撥油
性等に優れて汚染されにくく、また汚染が落ちやすくて
耐汚染性に優れ、反射防止効果を長期に持続させること
ができる。
By using the fluorine-containing layer having the above-mentioned structure as a layer that overlaps with the Y 2 O 3 layer having the incident side surface, the wavelength range can be improved even when the antireflection film is composed of such two layers and is advantageous for mass production. It exhibits a satisfactory antireflection effect with respect to its own light. By the way, in the visible light range of 400 to 700 nm, it is usually 9
An average transmittance of 8% or more can be achieved. Further, by having a fluorine-containing layer on the incident side surface, it is excellent in water repellency, oil repellency and the like and is unlikely to be contaminated, and the contamination is easily removed and the contamination resistance is excellent, and the antireflection effect can be maintained for a long period of time.

【0007】[0007]

【実施例】本発明の反射防止膜は、特殊なフッ素含有層
を入射側表面に有するY23層との重畳層から少なくと
もなるものである。その例を図1に示した。1がフッ素
含有層、2がY23層である。
EXAMPLES The antireflection film of the present invention comprises at least a layer superposed with a Y 2 O 3 layer having a special fluorine-containing layer on the incident side surface. An example thereof is shown in FIG. Reference numeral 1 is a fluorine-containing layer, and 2 is a Y 2 O 3 layer.

【0008】本発明においてフッ素含有層は、前記のと
おり反射防止膜の入射側表面を形成し、反射防止目的の
波長域における中心波長に基づきその0.2〜0.3倍
の光学的膜厚とされる。その厚さが前記範囲外では満足
できる低反射率の達成が困難となる。なお前記の光学的
膜厚は、屈折率と厚さの積として定義される。
In the present invention, the fluorine-containing layer forms the incident side surface of the antireflection film as described above, and has an optical film thickness 0.2 to 0.3 times that of the center wavelength in the wavelength range for antireflection purposes. It is said that If the thickness is out of the above range, it becomes difficult to achieve a satisfactory low reflectance. The optical film thickness is defined as the product of the refractive index and the thickness.

【0009】フッ素含有層の形成は、その厚さが100
μmの場合に80%以上の透過率を示し、フッ素原子の
含有量が60重量%以上で、かつ屈折率が1.40以下
のフッ素含有化合物を用いて行うことができる。フッ素
含有層を形成するフッ素含有化合物が前記の条件を満足
しない場合には、目的の低反射率が達成されにくい。好
ましく用いうるフッ素含有化合物は、屈折率が1.36
以下のものである。
The formation of the fluorine-containing layer has a thickness of 100.
It can be carried out using a fluorine-containing compound having a transmittance of 80% or more in the case of μm, a fluorine atom content of 60% by weight or more, and a refractive index of 1.40 or less. When the fluorine-containing compound forming the fluorine-containing layer does not satisfy the above conditions, it is difficult to achieve the target low reflectance. A fluorine-containing compound that can be preferably used has a refractive index of 1.36.
It is as follows.

【0010】本発明で用いうるフッ素含有化合物の例と
しては次のものなどがあげられる。 一般式(1): (ただし、Rはフッ素原子、水素原子又は一価の炭化水
素基、nは1〜40である。)で表され、フッ素原子の
含有量が60重量%以上のフッ素含有化合物。
Examples of the fluorine-containing compound that can be used in the present invention include the following. General formula (1): (However, R is a fluorine atom, a hydrogen atom or a monovalent hydrocarbon group, and n is 1 to 40.), and the fluorine-containing compound has a fluorine atom content of 60% by weight or more.

【0011】式(イ): で表される屈折率1.38のフッ素含有化合物。Formula (a): A fluorine-containing compound having a refractive index of 1.38 represented by

【0012】上記した一般式(1)において、Rの全て
がフッ素原子からなるフッ素含有化合物は本発明におい
て好ましく用いうる。ちなみに、Rの全てがフッ素原子
で、そのnが平均9.6個のものは、屈折率が1.34
であり、下記の一般式(2)で表されるパーフルオロ系
溶媒等の溶媒に可溶である。
In the above general formula (1), a fluorine-containing compound in which all R's are fluorine atoms can be preferably used in the present invention. By the way, if all of R are fluorine atoms and the average n is 9.6, the refractive index is 1.34.
And is soluble in a solvent such as a perfluoro-based solvent represented by the following general formula (2).

【0013】一般式(2): (ただし、nは2〜8である。)General formula (2): (However, n is 2 to 8.)

【0014】また上記した式(イ)で表されるフッ素含
有化合物もテトラヒドロフラン等に可溶であり、本発明
においては溶媒に可溶なフッ素含有化合物がディッピン
グ方式やスピンコート方式等の塗布方式で容易に薄膜を
形成でき、量産性等の点より好ましい。その場合、膜厚
制御等の点より溶液濃度は通例0.1〜20重量%とさ
れるがこれに限定するものではない。
Further, the fluorine-containing compound represented by the above formula (a) is also soluble in tetrahydrofuran or the like, and in the present invention, the fluorine-containing compound soluble in the solvent is used in a coating method such as a dipping method or a spin coating method. A thin film can be easily formed, which is preferable in terms of mass productivity. In that case, the solution concentration is usually 0.1 to 20% by weight from the viewpoint of film thickness control and the like, but is not limited to this.

【0015】本発明の反射防止膜において重畳層の形成
に少なくとも用いられるY23層は、反射防止目的の波
長域における中心波長に基づきその0.45〜0.55
倍の光学的膜厚とされる。その厚さが前記範囲外では満
足できる低反射率の達成が困難となる。かかるY23
の形成は、例えば真空蒸着法、スパッタリング法、イオ
ンプレーティング法の如き蒸着方式などの適宜な方式で
行うことができる。
In the antireflection film of the present invention, at least the Y 2 O 3 layer used for forming the superposed layer has 0.45 to 0.55 based on the central wavelength in the wavelength region for antireflection.
The optical film thickness is doubled. If the thickness is out of the above range, it becomes difficult to achieve a satisfactory low reflectance. The Y 2 O 3 layer can be formed by an appropriate method such as a vacuum evaporation method, a sputtering method, or an evaporation method such as an ion plating method.

【0016】なお本発明の反射防止膜においては、Si
2、ZrO2、Al23の如き金属酸化物やフッ化マグネ
シウムなどからなる公知の層も重畳させて3層以上の反
射防止膜として透過率の向上をはかることもできる。そ
の場合、フッ素含有層とY23層以外の層については、
その屈折率や重畳層数等に応じて従来に準じ適宜に形成
することができる。
In the antireflection film of the present invention, Si
It is also possible to improve the transmittance as an antireflection film having three or more layers by superposing known layers made of metal oxides such as O 2 , ZrO 2 and Al 2 O 3 and magnesium fluoride. In that case, for the layers other than the fluorine-containing layer and the Y 2 O 3 layer,
It can be appropriately formed according to the conventional method according to the refractive index, the number of overlapping layers, and the like.

【0017】本発明の反射防止膜の適用は、反射防止を
目的とする面に所定の重畳層を順次形成することにより
行うこともできるし、フィルム等の基材上に反射防止膜
を設けて反射防止部材を形成し、それを反射防止を目的
とする面に付設する方式などによっても適用することが
できる。反射防止部材として適用する方式は、ディスプ
レイ装置等の既成物品への付設や、湾曲面あるいは大面
積面等への付設が容易な利点を有している。
The antireflection film of the present invention can be applied by sequentially forming a predetermined superposed layer on the surface for the purpose of antireflection, or by providing the antireflection film on a substrate such as a film. It can also be applied by a method of forming an antireflection member and attaching it to a surface intended for antireflection. The method applied as an antireflection member has an advantage that it can be easily attached to an existing article such as a display device or attached to a curved surface or a large area surface.

【0018】本発明の反射防止部材は、透明基材の少な
くとも片側に本発明の反射防止膜を有するものである。
その例を図2に示した。3が透明基材である。なお4は
必要に応じて設けられる接着剤層である。
The antireflection member of the present invention has the antireflection film of the present invention on at least one side of the transparent substrate.
An example thereof is shown in FIG. 3 is a transparent substrate. In addition, 4 is an adhesive layer provided as needed.

【0019】透明基材としては適宜なものを用いうる。
透過率や強度に優れるものが好ましい。一般には、ガラ
スや、ポリエステル、トリアセチルセルロースの如きプ
ラスチックからなる板、フィルムないしシートなどが用
いられる。また偏光板や位相差板等の光学機能素材など
も用いうる。厚さは、適宜に決定でき5mm以下が一般的
であるが、これに限定されない。
As the transparent base material, an appropriate material can be used.
Those having excellent transmittance and strength are preferable. Generally, a plate, a film or a sheet made of glass, a plastic such as polyester or triacetyl cellulose is used. Further, optical functional materials such as a polarizing plate and a retardation plate can be used. The thickness can be appropriately determined and is generally 5 mm or less, but the thickness is not limited to this.

【0020】さらにハードーコート処理等の適宜な処理
を施した透明基材なども用いうる。ハードーコート処理
は基材、特にその表面の補強等を目的とするものでシリ
コーン系樹脂等の熱硬化性樹脂などで一般に形成され
る。またシリカ、アルミナ、チタニア、ジルコニア等の
酸化物微粒子、酸化錫、酸化インジウム、酸化アンチモ
ン等の導電性微粒子を混入させたハードーコート層とさ
れる場合もあり、本発明においては適宜に処理した公知
の透明基材を用いうる。反射防止部材の形成は、かかる
透明基材の片側又は両側に反射防止膜を構成する重畳層
を付設する方法などにより行うことができる。
Further, a transparent substrate which has been subjected to an appropriate treatment such as a hard coat treatment may be used. The hard coat treatment is intended to reinforce the substrate, especially the surface thereof, and is generally formed of a thermosetting resin such as a silicone resin. Further, it may be a hard coat layer mixed with oxide fine particles such as silica, alumina, titania and zirconia, and conductive fine particles such as tin oxide, indium oxide and antimony oxide. A transparent substrate can be used. The antireflection member can be formed by a method of attaching a superposed layer constituting an antireflection film on one side or both sides of the transparent substrate.

【0021】本発明の反射防止部材には、適用対象への
接着等を目的に接着剤層を設けることもできる。設ける
接着剤層は、透過率の低減防止等の点より屈折率差が透
明基材の±5%以内のものが好ましい。接着剤層の形成
には、例えばアクリル系粘着剤、ゴム系粘着剤、シリコ
ーン系粘着剤等の粘着剤やホットメルト系接着剤などの
適宜なものを用いうる。透明性や耐候性等に優れるもの
が好ましい。接着剤層の付設は、塗工方式やセパレータ
上に設けたものの移着方式など適宜な方式で行ってよ
い。なお接着剤層が粘着層の場合には、実用に供するま
での間その表面をセパレータ等で保護しておくことが好
ましい。
The antireflection member of the present invention may be provided with an adhesive layer for the purpose of adhering to the object of application. The adhesive layer to be provided preferably has a refractive index difference of ± 5% or less of the transparent substrate from the viewpoint of preventing reduction of transmittance. For forming the adhesive layer, an appropriate adhesive such as an acrylic adhesive, a rubber adhesive, a silicone adhesive or a hot melt adhesive can be used. Those having excellent transparency and weather resistance are preferable. The attachment of the adhesive layer may be performed by an appropriate method such as a coating method or a transfer method of the one provided on the separator. When the adhesive layer is a pressure-sensitive adhesive layer, it is preferable to protect the surface with a separator or the like until practical use.

【0022】本発明の反射防止膜ないし反射防止部材
は、偏光板等の光学機能素材や液晶表示装置等のディス
プレイ装置、重量計等の計器類など、種々の物品の界面
反射防止に好ましく用いることができる。
The antireflection film or the antireflection member of the present invention is preferably used for preventing interfacial reflection of various articles such as optical functional materials such as polarizing plates, display devices such as liquid crystal display devices, instruments such as weight scales. You can

【0023】実施例1 厚さ500μmのトリアセチルセルロースフィルム(屈
折率1.49)の片面に、蒸着方式で厚さ135nmのY
23層(屈折率1.87)を形成しその上に、上記した
一般式(1)においてRの全てがフッ素原子でnが平均
9.6個のフッ素含有化合物のパーフルオロ系溶媒によ
る溶液をディップコートして厚さ95nmのフッ素含有層
(屈折率1.34)を重畳させて反射防止部材を得た。
Example 1 On one surface of a 500 μm thick triacetyl cellulose film (refractive index 1.49), a Y layer having a thickness of 135 nm was formed by vapor deposition.
A 2 O 3 layer (refractive index of 1.87) is formed on the perfluoro solvent of a fluorine-containing compound in which all R in the general formula (1) are fluorine atoms and n is 9.6 on average. The solution was dip-coated and a 95 nm-thick fluorine-containing layer (refractive index 1.34) was superposed to obtain an antireflection member.

【0024】なお、蒸着は電子銃方式により蒸着面を加
熱することなく到達真空度5×1/105Torr、蒸
着速度約0.5nm/秒の条件、ディップコートはディッ
ピング速度1.0mm/秒の条件で行い、膜厚測定は電子
顕微鏡による断面観察により行った(以下同じ)。従っ
てディップコートによる膜厚は、溶液濃度に基づいて制
御した。また用いたパーフルオロ系溶媒は、上記の一般
式(2)で表されるものである。
The vapor deposition is carried out by an electron gun system without heating the vapor deposition surface, and the ultimate vacuum is 5 × 1/10 5 Torr and the vapor deposition rate is about 0.5 nm / sec. The dip coating is 1.0 mm / sec. The film thickness was measured by observing a cross section with an electron microscope (the same applies hereinafter). Therefore, the film thickness by dip coating was controlled based on the solution concentration. The perfluoro solvent used is represented by the above general formula (2).

【0025】実施例2 上記した式(イ)で表されるフッ素含有化合物のテトラ
ヒドロフラン溶液を用いて厚さ90nmのフッ素含有層
(屈折率1.38)としたほかは実施例1に準じて反射
防止部材を得た。
Example 2 Reflection was carried out according to Example 1 except that a fluorine-containing layer (refractive index 1.38) having a thickness of 90 nm was formed using a tetrahydrofuran solution of the fluorine-containing compound represented by the above formula (a). The prevention member was obtained.

【0026】実施例3 厚さ1mmのガラス板(屈折率1.53)の片面に、蒸着
方式で厚さ85nmのAl23層(屈折率1.62)と厚
さ140nmのY23層(屈折率1.87)を順次形成し
そのY23層上に、厚さ95nmのフッ素含有層(屈折率
1.34)を重畳させて実施例1に準じ反射防止部材を
得た。
Example 3 An Al 2 O 3 layer (refractive index 1.62) having a thickness of 85 nm and Y 2 O having a thickness of 140 nm were formed on one surface of a glass plate (refractive index 1.53) having a thickness of 1 mm by a vapor deposition method. Three layers (refractive index 1.87) are sequentially formed, and a fluorine-containing layer (refractive index 1.34) having a thickness of 95 nm is superposed on the Y 2 O 3 layer to obtain an antireflection member according to Example 1. It was

【0027】比較例1 Y23層に代えて厚さ125nmのZrO2(屈折率2.0
5)を形成したほかは実施例1に準じて反射防止部材を
得た。
Comparative Example 1 Instead of the Y 2 O 3 layer, a ZrO 2 film having a thickness of 125 nm (refractive index 2.0
An antireflection member was obtained in the same manner as in Example 1 except that 5) was formed.

【0028】比較例2 Y23層の厚さを130nmとし、その上にフッ素含有層
に代えて厚さ85nmのSiO2(屈折率1.46)を形成
したほかは実施例1に準じて反射防止部材を得た。
Comparative Example 2 Same as Example 1 except that the Y 2 O 3 layer was 130 nm thick, and the fluorine-containing layer was replaced with 85 nm thick SiO 2 (refractive index 1.46). Thus, an antireflection member was obtained.

【0029】比較例3 厚さ500μmのポリエステルフィルム(屈折率1.6
8)の片面に、蒸着方式で厚さ120nmのZrO2(屈折
率2.05)と厚さ90nmのSiO2(屈折率1.46)
を順次形成して反射防止部材を得た。
Comparative Example 3 A polyester film having a thickness of 500 μm (refractive index 1.6
On one surface of 8), by vapor deposition, ZrO 2 with a thickness of 120 nm (refractive index 2.05) and SiO 2 with a thickness of 90 nm (refractive index 1.46)
Were sequentially formed to obtain an antireflection member.

【0030】評価試験 汚染前 実施例、比較例で得た反射防止部材の反射防止膜側より
波長400〜700nmの光を垂直入射させ、分光光度計
にて反射率、透過率を測定し、それより可視域の平均反
射率及び平均透過率を求めた。
Evaluation Test Before Contamination Light having a wavelength of 400 to 700 nm is vertically incident from the antireflection film side of the antireflection members obtained in Examples and Comparative Examples, and the reflectance and the transmittance are measured with a spectrophotometer. The average reflectance and the average transmittance in the visible range were obtained.

【0031】汚染後 反射防止膜の上にアクリル系粘着テープを圧着して消し
ゴムで10回擦すったのち、粘着テープを垂直方向に勢
いよく剥がし、その反射防止部材について前記に準じ平
均反射率及び平均透過率を求めた。
After contamination, an acrylic pressure-sensitive adhesive tape was pressure-bonded on the antireflection film and rubbed with an eraser 10 times, and then the adhesive tape was peeled off in a vertical direction vigorously. The average transmittance was determined.

【0032】前記の結果を表1に示した。The above results are shown in Table 1.

【表1】 [Table 1]

【0033】表1より、本発明の反射防止膜は2層構造
の場合にも可視域の光に対して優れた反射防止効果を示
し実用上満足できる透過率を示すと共に、汚染されにく
くて反射防止効果、透過率の持続性に優れていることが
わかる。
It can be seen from Table 1 that the antireflection film of the present invention has an excellent antireflection effect with respect to light in the visible region even in the case of a two-layer structure, shows a practically satisfactory transmittance, and is less likely to be contaminated and reflected. It can be seen that the prevention effect and the durability of the transmittance are excellent.

【0034】[0034]

【発明の効果】本発明によれば、2層からなる重畳層の
場合にも波長域を有する光に対して優れた反射防止効果
を示し、実用的で量産性に優れる反射防止膜を得ること
ができる。また入射側表面にフッ素含有層を有して汚染
されにくく、汚染も落ちやすくて耐汚染性に優れ、反射
防止効果の持続性に優れている。
According to the present invention, it is possible to obtain a practical anti-reflection film which exhibits an excellent anti-reflection effect against light having a wavelength range even in the case of a superposed layer composed of two layers and which is practical and excellent in mass productivity. You can Further, it has a fluorine-containing layer on the incident side surface and is less likely to be contaminated, and the contamination is easily removed, and the contamination resistance is excellent and the antireflection effect is durable.

【図面の簡単な説明】[Brief description of drawings]

【図1】反射防止膜の実施例の断面図。FIG. 1 is a sectional view of an example of an antireflection film.

【図2】反射防止部材の実施例の断面図。FIG. 2 is a sectional view of an embodiment of an antireflection member.

【符号の説明】 1:フッ素含有層 2:Y23層 3:透明基材 4:接着剤層[Explanation of Codes] 1: Fluorine-containing layer 2: Y 2 O 3 layer 3: Transparent base material 4: Adhesive layer

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 光学的膜厚が反射防止目的の波長域にお
ける中心波長の0.2〜0.3倍のフッ素含有層と0.
45〜0.55倍のY23層との重畳層から少なくとも
なると共に、そのフッ素含有層を入射側表面に有してな
り、前記フッ素含有層が厚さ100μmでの透過率80
%以上、フッ素原子含有量60重量%以上、かつ屈折率
1.40以下のフッ素含有化合物からなることを特徴と
する反射防止膜。
1. A fluorine-containing layer having an optical film thickness of 0.2 to 0.3 times the center wavelength in the wavelength range for antireflection, and
It is composed of at least a 45-0.55 times Y 2 O 3 layer and a fluorine-containing layer on the incident side surface, and the fluorine-containing layer has a transmittance of 80 at a thickness of 100 μm.
%, A fluorine atom content of 60% by weight or more, and a refractive index of 1.40 or less, an antireflection film, characterized by comprising:
【請求項2】 フッ素含有層を形成するフッ素含有化合
物が、一般式: (ただし、Rはフッ素原子、水素原子又は一価の炭化水
素基、nは1〜40である。)で表される溶媒に可溶な
屈折率1.36以下のものである請求項1に記載の反射
防止膜。
2. The fluorine-containing compound forming the fluorine-containing layer has a general formula: (However, R is a fluorine atom, a hydrogen atom or a monovalent hydrocarbon group, and n is 1 to 40.) A solvent-soluble refractive index of 1.36 or less. The antireflection film described.
【請求項3】 請求項1に記載の反射防止膜を透明基材
の少なくとも片側に有することを特徴とする反射防止部
材。
3. An antireflection member having the antireflection film according to claim 1 on at least one side of a transparent substrate.
【請求項4】 屈折率差が透明基材の±5%以内の接着
剤層を有する請求項3に記載の反射防止部材。
4. The antireflection member according to claim 3, which has an adhesive layer having a refractive index difference of ± 5% or less of that of the transparent substrate.
JP5241934A 1993-09-01 1993-09-01 Antireflection film and antireflection member Pending JPH0772305A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5241934A JPH0772305A (en) 1993-09-01 1993-09-01 Antireflection film and antireflection member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5241934A JPH0772305A (en) 1993-09-01 1993-09-01 Antireflection film and antireflection member

Publications (1)

Publication Number Publication Date
JPH0772305A true JPH0772305A (en) 1995-03-17

Family

ID=17081749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5241934A Pending JPH0772305A (en) 1993-09-01 1993-09-01 Antireflection film and antireflection member

Country Status (1)

Country Link
JP (1) JPH0772305A (en)

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