JPH075628Y2 - 真空成膜装置 - Google Patents

真空成膜装置

Info

Publication number
JPH075628Y2
JPH075628Y2 JP5695490U JP5695490U JPH075628Y2 JP H075628 Y2 JPH075628 Y2 JP H075628Y2 JP 5695490 U JP5695490 U JP 5695490U JP 5695490 U JP5695490 U JP 5695490U JP H075628 Y2 JPH075628 Y2 JP H075628Y2
Authority
JP
Japan
Prior art keywords
chamber
plate
electrode unit
gas
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP5695490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0415832U (enrdf_load_stackoverflow
Inventor
富佐雄 中村
正義 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP5695490U priority Critical patent/JPH075628Y2/ja
Publication of JPH0415832U publication Critical patent/JPH0415832U/ja
Application granted granted Critical
Publication of JPH075628Y2 publication Critical patent/JPH075628Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP5695490U 1990-05-30 1990-05-30 真空成膜装置 Expired - Fee Related JPH075628Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5695490U JPH075628Y2 (ja) 1990-05-30 1990-05-30 真空成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5695490U JPH075628Y2 (ja) 1990-05-30 1990-05-30 真空成膜装置

Publications (2)

Publication Number Publication Date
JPH0415832U JPH0415832U (enrdf_load_stackoverflow) 1992-02-07
JPH075628Y2 true JPH075628Y2 (ja) 1995-02-08

Family

ID=31581239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5695490U Expired - Fee Related JPH075628Y2 (ja) 1990-05-30 1990-05-30 真空成膜装置

Country Status (1)

Country Link
JP (1) JPH075628Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0021815D0 (en) * 2000-09-06 2000-10-18 Lofting Marcus J Plasma enhanced gas reactor

Also Published As

Publication number Publication date
JPH0415832U (enrdf_load_stackoverflow) 1992-02-07

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees