JPH0754996Y2 - 半導体ウエハ−用キャリア−の判別装置 - Google Patents
半導体ウエハ−用キャリア−の判別装置Info
- Publication number
- JPH0754996Y2 JPH0754996Y2 JP4233785U JP4233785U JPH0754996Y2 JP H0754996 Y2 JPH0754996 Y2 JP H0754996Y2 JP 4233785 U JP4233785 U JP 4233785U JP 4233785 U JP4233785 U JP 4233785U JP H0754996 Y2 JPH0754996 Y2 JP H0754996Y2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- mark
- identification code
- semiconductor wafer
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 22
- 235000012431 wafers Nutrition 0.000 claims description 34
- 230000003287 optical effect Effects 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 9
- 238000004886 process control Methods 0.000 claims description 4
- 239000000969 carrier Substances 0.000 claims description 3
- 230000002411 adverse Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000012050 conventional carrier Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4233785U JPH0754996Y2 (ja) | 1985-03-26 | 1985-03-26 | 半導体ウエハ−用キャリア−の判別装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4233785U JPH0754996Y2 (ja) | 1985-03-26 | 1985-03-26 | 半導体ウエハ−用キャリア−の判別装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61158943U JPS61158943U (enrdf_load_stackoverflow) | 1986-10-02 |
| JPH0754996Y2 true JPH0754996Y2 (ja) | 1995-12-18 |
Family
ID=30553001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4233785U Expired - Lifetime JPH0754996Y2 (ja) | 1985-03-26 | 1985-03-26 | 半導体ウエハ−用キャリア−の判別装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0754996Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012007942A (ja) * | 2010-06-23 | 2012-01-12 | Fuji Xerox Co Ltd | 位置測定装置 |
-
1985
- 1985-03-26 JP JP4233785U patent/JPH0754996Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61158943U (enrdf_load_stackoverflow) | 1986-10-02 |
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