JPH0753263B2 - Method of driving composite vibration of ultrasonic transducer - Google Patents
Method of driving composite vibration of ultrasonic transducerInfo
- Publication number
- JPH0753263B2 JPH0753263B2 JP2027459A JP2745990A JPH0753263B2 JP H0753263 B2 JPH0753263 B2 JP H0753263B2 JP 2027459 A JP2027459 A JP 2027459A JP 2745990 A JP2745990 A JP 2745990A JP H0753263 B2 JPH0753263 B2 JP H0753263B2
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- Prior art keywords
- vibration
- flexural
- longitudinal
- vibrator
- resonance frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【発明の詳細な説明】 産業上の利用分野 本発明は、従来多用されている縦およびたわみなどの単
一方向振動を複合化して振動させる超音波振動子の複合
振動駆動方法に係り、とくに、プラスチックや金属を溶
着接合する超音波ウエルダー、超音波ボンダー、シート
材を切断する超音波カッタ、金型や超硬合金あるいはセ
ラミックなどを研磨する超音波ラッパーなどに利用され
る超音波振動子の複合振動駆動方法に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite vibration driving method for an ultrasonic vibrator that combines and vibrates unidirectional vibrations such as longitudinal and flexural vibrations that have been frequently used in the past. A composite of ultrasonic transducers used for ultrasonic welders that weld and join plastics and metals, ultrasonic bonders, ultrasonic cutters that cut sheet materials, ultrasonic wrappers that polish metal molds, cemented carbide, or ceramics. The present invention relates to a vibration driving method.
従来の技術 従来、複合振動を発生させる超音波振動子としては、縦
とたわみ、あるいは、縦とねじる共振周波数を一致させ
て円振動を発生させるものや、もしくは、進行波を用い
て超音波モーターに適用するようにしたものがあるが、
一般的には、縦型の単一方向振動のみを発生する超音波
振動子が大部分である。2. Description of the Related Art Conventionally, as an ultrasonic transducer that generates a composite vibration, one that generates a circular vibration by flexing the longitudinal and flexural or longitudinal and torsional resonance frequencies, or an ultrasonic motor that uses a traveling wave There are some that have been adapted to
Generally, most of the ultrasonic transducers generate only vertical unidirectional vibration.
そのような中で、本出願人は先に特開昭62−114478号公
報に見られるように、たわみ振動子の出力端部に設けた
刃を、振動子軸と直角あるいは制御された角度に振動さ
せて用いるようにした超音波カッタを提案した。Under such circumstances, the applicant of the present invention, as previously disclosed in JP-A-62-114478, sets the blade provided at the output end of the flexural vibrator at a right angle to the vibrator axis or at a controlled angle. We proposed an ultrasonic cutter that can be used by vibrating it.
そのような振動子を用いた一例を第6図ないし第9図に
より説明する。An example using such a vibrator will be described with reference to FIGS. 6 to 9.
まず、厚み方向に分極された円環状の電歪素子2,3は、
その一面に絶縁部13を中心として電極14,15が二分割し
て形成され、他面には全面に共通電極16が形成されてい
る。First, the annular electrostrictive elements 2 and 3 polarized in the thickness direction are
Electrodes 14 and 15 are formed on one surface of the insulating portion 13 as a center, and a common electrode 16 is formed on the other surface of the electrode 14 and 15.
このような電歪素子2,3の二個は、絶縁部13を一致させ
るとともに2個の電極板4,5を間にして前記電14,15を対
向させて配設されている。そして、一方の電歪素子3の
共通電極16の面には、共通電極板6が接合され、さら
に、出力端部10を細く形成すると共にエクスポネンシャ
ルステップ8を設けた金属材9が接合されている。ま
た、他方の電歪素子2の共通電極16の面には金属材7が
を接合されている。そして、ボルト11によりこれらは一
体的に固定されてたわみ振動子1が構成されている。The two electrostrictive elements 2 and 3 are arranged so that the insulating portions 13 are aligned and the electrodes 14 and 15 are opposed to each other with the two electrode plates 4 and 5 interposed therebetween. Then, the common electrode plate 6 is joined to the surface of the common electrode 16 of one of the electrostrictive elements 3, and further, the metal material 9 having the output end portion 10 formed thin and having the exponential step 8 is joined. ing. A metal material 7 is bonded to the surface of the common electrode 16 of the other electrostrictive element 2. Then, these are integrally fixed by the bolts 11 to form the flexural vibrator 1.
ついで、たわみ振動子1の出力端部10にカッタ刃12が銀
ろう接合などによって固定されている。Next, a cutter blade 12 is fixed to the output end 10 of the flexural vibrator 1 by silver brazing or the like.
このような構成において、共通電極板6を基準として、
電極板4,5に互いに位相の反転したたわみ共振周波数の
駆動電圧を印加すると、軸に直角で電極の分割方向に直
角にたわみ共振振動し、刃先は矢印17の方向に強く振動
する。In such a configuration, with the common electrode plate 6 as a reference,
When a driving voltage having a flexural resonance frequency in which the phases are inverted to each other is applied to the electrode plates 4 and 5, flexural resonance vibration occurs at right angles to the axis and in the electrode dividing direction, and the blade edge vibrates strongly in the direction of arrow 17.
しかして、第9図のように被カット材であるシート19
を、刃先部分を逃げるために設けた座ぐり20を持つテー
ブル18に載せて、シート19を右または左方向に送ると、
シート19はカッタ刃12の超音波振動の大きな加速度の繰
り返しによって容易に切断される。さらに、縦とたわみ
共振周波数を一致させたたわみ振動子によれば、軸に直
角な方向の振動を刃先に与えることができるとともに、
各電極に印加する駆動電圧を制御することによって刃先
の振動方向を軸方向からそれと直角方向まで連続的に制
御することができる。Then, as shown in FIG. 9, the sheet 19 which is the material to be cut
Is placed on the table 18 having the spot facing 20 provided to escape the cutting edge portion, and the sheet 19 is fed in the right or left direction,
The sheet 19 is easily cut by repeating the large acceleration of the ultrasonic vibration of the cutter blade 12. Furthermore, according to the flexural vibrator in which the longitudinal and flexural resonance frequencies are matched, it is possible to apply vibration in a direction perpendicular to the axis to the cutting edge,
By controlling the drive voltage applied to each electrode, the vibration direction of the cutting edge can be continuously controlled from the axial direction to the direction perpendicular thereto.
発明が解決しようとする課題 しかるに、縦共振周波数とたわみ共振周波数とを一致さ
せることは、固定された工具ではともかく、かなり困難
が多い。すなわち、工具の交換、摩耗や再研削によって
は勿論、負荷の大きさによって変化する共振周波数は、
その共振モードによって変化率が異なり、負荷とともに
各共振周波数の差は大きく離れてしまう。その結果、相
対位相や相対振幅がずれて振動方向を正しく制御するこ
とができなくなる。However, matching the longitudinal resonance frequency and the flexural resonance frequency is quite difficult, even with a fixed tool. That is, the resonance frequency that changes depending on the magnitude of the load is, of course, due to tool replacement, wear and regrinding.
The rate of change differs depending on the resonance mode, and the difference between the resonance frequencies greatly separates with the load. As a result, the relative phase and relative amplitude are deviated and the vibration direction cannot be controlled correctly.
課題を解決するための手段 請求項1記載の発明は、たわみ振動子を縦共振周波数で
縦振動の駆動をすると共に、それと異なるたわみ共振周
波数でたわみ振動の駆動をするようにした。Means for Solving the Problems The invention according to claim 1 drives the flexural vibrator for longitudinal vibration at a longitudinal resonance frequency, and at the same time, drives the flexural vibration at a flexural resonance frequency different from that.
請求項2記載の発明は、たわみ振動子を縦共振周波数で
縦振動の駆動をすると共に、それと異なるたわみ共振周
波数でそれぞれ互いに直角なたわみ振動を複合させた複
合たわみ振動の駆動をするようにした。According to the second aspect of the present invention, the flexural vibrator is driven for longitudinal vibration at a longitudinal resonance frequency, and at the same time, the flexural vibrator is driven for complex flexural vibration by compounding flexural vibrations at right angles. .
作用 1個のたわみ振動子により軸方向とそれに直角な方向と
の合成複合振動を容易に発生することができ、また、縦
方向とたわみ方向と、あるいは、互いに直角な第1と第
2のたわみ方向との共振周波数を合わせる必要がないた
め、たわみ振動子のディメンジョンの自由度が大きく、
このことは振動系の構成を非常に簡単にすることができ
るものである。Action A single flexural vibrator can easily generate a composite compound vibration in the axial direction and the direction perpendicular to it, and also, the first and second flexures perpendicular to each other in the longitudinal direction and the bending direction. Since it is not necessary to match the resonance frequency with the direction, the flexibility of the dimension of the flexible oscillator is large,
This can greatly simplify the structure of the vibration system.
実施例 本発明の第一の実施例を第1図および第2図に基づいて
説明する。本実施例は超音波カッタに関するもので、第
6図について説明した部分と同一部分は同一符号を用い
その説明も省略する。Embodiment A first embodiment of the present invention will be described with reference to FIGS. 1 and 2. This embodiment relates to an ultrasonic cutter, and the same parts as those described with reference to FIG. 6 are designated by the same reference numerals and the description thereof will be omitted.
まず、電歪素子2,3をもつたわみ振動子21は、その出力
端部22に右雄ネジ23が設けられている。また、刃26が銀
ろう接合された工具24には、左雄ネジ25が設けられてい
る。それらのたわみ振動子21と工具24とは、右および左
雌ネジとスパナ掛け28が設けられた締着リング27と嵌合
して、刃26のカット方向とたわみ振動方向とのそれぞれ
の向きを合せて締着されている。First, the flexural vibrator 21 having the electrostrictive elements 2 and 3 is provided with a right male screw 23 at its output end 22. A left male screw 25 is provided on the tool 24 in which the blade 26 is joined by silver brazing. The flexural vibrator 21 and the tool 24 are fitted with the fastening ring 27 provided with the right and left female screws and the spanner hook 28, and the respective directions of the cutting direction of the blade 26 and the flexural vibration direction are set. It is fastened together.
前記刃26は、図示した剣先以外にR刃、尖り刃、平刃な
ど多様な刃があり、これらの刃26を持つ複数種の工具が
用意され、締着リング27を介して選択的に交換使用され
る。The blade 26 has various blades such as an R blade, a sharp blade, and a flat blade in addition to the sword tip shown in the drawing. A plurality of types of tools having these blades 26 are prepared and selectively exchanged through the fastening ring 27. used.
そして、工具24を含めたたわみ振動子21のたわみ共振周
波数に調節した高周波電源30から、出力トランス31の二
次コイル32より互いに位相の反転した電圧を電極板4,5
に印加すると、電歪素子2,3の上半分の厚みが伸びた瞬
間に下半分は縮み、半周期後反転するサイクル動作によ
ってたわみモードの振動分布が発生して矢印37の如く刃
先は軸と直角方向に振動する。Then, from the high-frequency power source 30 adjusted to the flexural resonance frequency of the flexural vibrator 21 including the tool 24, voltages having mutually inverted phases are output from the secondary coil 32 of the output transformer 31 to the electrode plates 4,5.
When applied to the electrostrictive elements 2 and 3, the lower half contracts at the moment when the thickness of the upper half of the electrostrictive elements 2 and 3 expands, and a bending mode vibration distribution occurs due to the cycle operation that reverses after a half cycle, and the cutting edge is aligned with the axis as shown by arrow 37. It vibrates at right angles.
次に、縦共振周波数をもつ高周波数電源34から出力トラ
ンス35を経てトランス31の二次コイル32の中点タップ33
に電圧を印加すると、電極板4,5には同相電圧として印
加されて電歪素子2,3は上下ともに同時に伸縮するの
で、軸方向の縦モードの振動分布が発生して矢印38の如
く刃先は軸方向に振動する。Next, a high frequency power supply 34 having a longitudinal resonance frequency, an output transformer 35, a secondary coil 32 of the transformer 31 and a middle point tap 33.
When a voltage is applied to the electrode plates 4 and 5, as a common-mode voltage, the electrostrictive elements 2 and 3 expand and contract at the same time in the vertical direction, so that an axial longitudinal mode vibration distribution occurs and the cutting edge as indicated by arrow 38. Vibrates in the axial direction.
そこで、両高周波電源30,34を同時に駆動すると、刃先
には互いに直角な方向の振動の合成複合振動が発生す
る。それぞれの共振周波数は、工具24を交換したり刃先
の摩耗あるいは負荷がかかるとともに変化するので、高
周波電源30,34の周波数はそれぞれの共振周波数を追尾
して発振できるものが好ましい。各発振周波数は独立し
て発振しているため周波数、位相とも互いに関係なく、
合成複合振動はランダムな方向に変化する。その刃先に
おける合成複合振動は、たわみ振動37と縦振動38との合
成されたものであり、各振動の振幅を制御することによ
り、その振動軌跡の包絡線の形状を第2図のようにたわ
み方向から縦方向に(a)直線、(b)矩形、(c)正
方形、(d)矩形、(e)直線とすることができ、被カ
ット材の材質や切断加工内容によって適宜選択される。Therefore, when both high frequency power sources 30 and 34 are driven at the same time, a composite compound vibration of vibrations in directions perpendicular to each other is generated at the cutting edge. Since the respective resonance frequencies change as the tool 24 is replaced or the cutting edge is worn or a load is applied, it is preferable that the frequencies of the high frequency power supplies 30 and 34 can oscillate by tracking the respective resonance frequencies. Since each oscillation frequency oscillates independently, there is no relation between frequency and phase,
The composite compound vibration changes in random directions. The composite compound vibration at the cutting edge is a combination of the flexural vibration 37 and the longitudinal vibration 38. By controlling the amplitude of each vibration, the shape of the envelope of the vibration locus is flexed as shown in FIG. The direction may be a straight line (a), a rectangle (b), a square (c), a rectangle (d), and a straight line (e), which are appropriately selected depending on the material of the material to be cut and the content of the cutting process.
このように刃先は軸方向とそれ直角な方向を二軸とする
面上での合成複合振動によって、ランダムにあらゆる方
向に振動するので、振動子の刃と被カット材との相対角
度に関係なく良好な切断が行える。In this way, the blade edge vibrates randomly in all directions by the combined compound vibration on the plane with the axis and the direction perpendicular to it as biaxial, so it does not depend on the relative angle between the blade of the vibrator and the material to be cut. Good cutting is possible.
ことことはまた、刃先が被カット材に対してあらゆる角
度で切り込むので、従来の単一方向振動に比べて著しい
切断効果を示すものである。This also means that the cutting edge cuts at any angle with respect to the material to be cut, and thus exhibits a remarkable cutting effect as compared with the conventional unidirectional vibration.
次に、本発明の第二の実施例を第3図ないし第5図に基
づいて説明する。本実施例は、超音波ラッパーに適用し
たもので、第3図および第4図に示すものは、第1のた
わみ振動とそれに直角な方向に互いに90度の位相差で駆
動される第2のたわみ振動との合成された複合たわみ振
動とともに、縦振動を発生するようにした振動子とその
駆動回路とである。Next, a second embodiment of the present invention will be described with reference to FIGS. This embodiment is applied to an ultrasonic wrapper, and the one shown in FIGS. 3 and 4 has a first flexural vibration and a second flexural vibration which is driven with a phase difference of 90 degrees in the direction perpendicular thereto. A vibrator and its drive circuit that generate longitudinal vibration together with combined flexural vibration combined with flexural vibration.
しかして、第1のたわみ振動を発生する電歪素子41,42
は、一面に上下二分割された電極をもち、電極板43,44
により通電される。そして、第1のたわみ振動と直角方
向に第2のたわみ振動を発生する電歪素子45,46は、一
方の面に左右に分割された電極をもち、電極板47,48に
よって通電される。それらは共通電極49,50とともに金
属材51および52によって挟み込まれ中心ボルト53によっ
て一体に締着され複合たわみ振動子40が構成されてい
る。たわみ振動駆動用高周波電源54から出力トランス55
によって位相の反転した電圧が電極板43,44に印加され
ると、電歪素子41,42は上下で反転駆動されて上下方向
の第1のたわみ振動を発生させる。Then, the electrostrictive elements 41, 42 that generate the first flexural vibration
Has electrodes divided into upper and lower parts on one side, and electrode plates 43,44
Is energized by. The electrostrictive elements 45 and 46 that generate the second flexural vibration in the direction perpendicular to the first flexural vibration have electrodes divided into left and right on one surface and are energized by the electrode plates 47 and 48. These are sandwiched by the metal materials 51 and 52 together with the common electrodes 49 and 50, and are integrally fastened by the central bolt 53 to form the composite flexural vibrator 40. Output transformer 55 from high-frequency power supply 54 for driving flexural vibration
When a voltage whose phase is inverted by is applied to the electrode plates 43 and 44, the electrostrictive elements 41 and 42 are driven to be inverted up and down to generate the first bending vibration in the up and down direction.
また、電源54の一部は移相器56によって90度位相がずら
され、その電圧は出力トランス57を経て電極板47,48に
印加されて電歪素子45、46を左右に反転駆動して左右方
向の第2のたわみ振動を発生させる。Further, a part of the power supply 54 is 90 degrees out of phase by the phase shifter 56, and the voltage is applied to the electrode plates 47 and 48 through the output transformer 57 to invert and drive the electrostrictive elements 45 and 46 to the left and right. A second flexural vibration in the left-right direction is generated.
ついで、縦振動駆動用高周波電源58は、出力トランス59
を経て、たわみ用出力トランス55,57の二次巻き線中間
タップに接続され、全ての電極板43,44,47および48を同
相で駆動する。そのため、軸方向の縦振動を励起する。
振動子40の出力端部には同筒状砥石60を持った工具61が
左右雌ネジを持つ締着ナット62により堅く締着されてい
る。Next, the high frequency power supply 58 for vertical vibration drive is the output transformer 59.
Via the secondary winding intermediate taps of the deflection output transformers 55, 57, and drives all the electrode plates 43, 44, 47 and 48 in phase. Therefore, longitudinal vibration in the axial direction is excited.
A tool 61 having the same cylindrical grindstone 60 is tightly fastened to the output end of the oscillator 40 by fastening nuts 62 having left and right female threads.
第5図に工具61と先端の振動姿態を示す。砥石60の先端
部には第5図(b)に示す矢印のように第1のたわみ振
動63,第2のたわみ振動64が発生するが、それらは90度
の位相差で同期しているため、その振動姿態は第5図
(c)のように円振動65となり、またそれらと同期しな
い縦振動66とによりランダムな方向に振動する円筒状複
合振動67を発生する。FIG. 5 shows the vibration mode of the tool 61 and the tip. A first flexural vibration 63 and a second flexural vibration 64 are generated at the tip of the grindstone 60 as shown by arrows in Fig. 5 (b), but they are synchronized with a phase difference of 90 degrees. As shown in FIG. 5 (c), its vibration form becomes a circular vibration 65, and a longitudinal vibration 66 not synchronized with them causes a cylindrical compound vibration 67 vibrating in random directions.
また、工具のディメンジョンが左右方向と上下方向でか
なり異なると、第1と第2のたわみ共振周波数が離れて
円振動65の発生が困難となる。しかし、このようなケー
スでは、第1と第2のたわみ振動はそれぞれ単独に独立
して共振周波数を追尾すれば良好な効果を上げることが
できる。Further, if the dimensions of the tool are considerably different in the left-right direction and the vertical direction, the first and second flexural resonance frequencies are separated from each other, and it becomes difficult to generate the circular vibration 65. However, in such a case, if the first and second flexural vibrations are independently tracked independently of the resonance frequency, a good effect can be obtained.
このような、円筒状砥石60とその円筒状複合振動67は、
R状コーナー部を研磨するのに有用である。側面ではた
わみ振動成分が、底面に対しては縦振動成分が補助的に
作用して研磨効果を増大させる。Such a cylindrical grindstone 60 and its cylindrical composite vibration 67,
It is useful for polishing R-shaped corners. The flexural vibration component on the side surface and the longitudinal vibration component on the bottom surface act as an auxiliary to increase the polishing effect.
縦振動成分とそれに直角なたわみ振動成分との合成振動
は、その振動周波数が異なると合成振動方向がランダム
に変化するが、そのランダムな振動方向の変化は加工結
果に良好な影響を及ぼす。従来の単一の縦あるいはたわ
み振動のみによる研磨作用に比べて、それと直角方向振
動との複合振動となって研磨効果の著しい増大をもたら
す。さらに研磨面の形状や加工状況に応じて縦とたわみ
成分の振幅を最適な値に制御することにより、あら研磨
加工から仕上げ加工まで効果的な研磨を行うことができ
る。The synthetic vibration of the longitudinal vibration component and the flexural vibration component at right angles to the synthetic vibration direction changes randomly at different vibration frequencies, and the random change of the vibration direction has a favorable effect on the machining result. Compared with the conventional polishing action only by a single longitudinal or flexural vibration, a combined vibration of the vibration and the orthogonal vibration results in a significant increase in the polishing effect. Furthermore, by controlling the amplitudes of the vertical and flexural components to optimal values according to the shape of the polished surface and the processing conditions, effective polishing can be performed from rough polishing to finishing.
発明の効果 本発明は上述のように、たわみ振動子を縦共振周波数で
縦振動の駆動をすると共に、それと異なるたわみ共振周
波数でたわみ振動の駆動をするようにしたので、1個の
たわみ振動子により軸方向とそれに直角な方向との合成
複合振動を容易に発生させることができ、また、縦方向
とたわみ方向、あるいは、互いに直角な第1と第2のた
わみ方向との共振周波数を合わせる必要がないので、工
具のディメンジョンの自由度が大きく、振動系の構成を
非常に簡単にすることができると云う効果を有する。EFFECTS OF THE INVENTION As described above, according to the present invention, the flexural vibrator is driven for the longitudinal vibration at the longitudinal resonance frequency, and the flexural vibration is driven for the flexural resonance frequency different from the longitudinal resonance frequency. This makes it possible to easily generate a composite compound vibration in the axial direction and the direction perpendicular to it, and it is necessary to match the resonance frequencies in the longitudinal direction and the bending direction or in the first and second bending directions perpendicular to each other. Therefore, there is an advantage that the degree of freedom of the dimension of the tool is large and the configuration of the vibration system can be very simplified.
第1図は本発明の第一の実施例を示す側面図、第2図は
各種の振動軌跡の包絡線の形状を示す平面図、第3図は
本発明の第二の実施例を示す側面図、第4図は電極板の
斜視図、第5図は工具とその先端の振動姿態を示す説明
図、第6図は従来の一例を示す側面図、第7図は電極板
の斜視図、第8図は電歪素子の斜視図、第9図は切断動
作を示す一部の断面図である。 21……たわみ振動子1 is a side view showing a first embodiment of the present invention, FIG. 2 is a plan view showing the shapes of envelopes of various vibration loci, and FIG. 3 is a side view showing a second embodiment of the present invention. Fig. 4 is a perspective view of an electrode plate, Fig. 5 is an explanatory view showing a vibration state of a tool and its tip, Fig. 6 is a side view showing a conventional example, Fig. 7 is a perspective view of an electrode plate, FIG. 8 is a perspective view of the electrostrictive element, and FIG. 9 is a partial sectional view showing the cutting operation. 21 ... Flexible vibrator
Claims (2)
動をすると共に、それと異なるたわみ共振周波数でたわ
み振動の駆動をすることを特徴とする超音波振動子の複
合振動駆動方法。1. A composite vibration driving method for an ultrasonic vibrator, comprising: driving a flexural vibrator to longitudinal vibration at a longitudinal resonance frequency and driving flexural vibration to a flexural resonance frequency different from that.
動をすると共に、それと異なるたわみ共振周波数でそれ
ぞれ互いに直角なたわみ振動を複合させた複合たわみ振
動の駆動をすることを特徴とする超音波振動子の複合振
動駆動方法。2. A flexural oscillator is driven for longitudinal vibration at a longitudinal resonance frequency, and at the same time, it is driven for complex flexural vibration by compounding flexural vibrations at different flexural resonance frequencies. Method for driving complex vibration of sound wave oscillator.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2027459A JPH0753263B2 (en) | 1990-02-07 | 1990-02-07 | Method of driving composite vibration of ultrasonic transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2027459A JPH0753263B2 (en) | 1990-02-07 | 1990-02-07 | Method of driving composite vibration of ultrasonic transducer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03232575A JPH03232575A (en) | 1991-10-16 |
JPH0753263B2 true JPH0753263B2 (en) | 1995-06-07 |
Family
ID=12221703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2027459A Expired - Lifetime JPH0753263B2 (en) | 1990-02-07 | 1990-02-07 | Method of driving composite vibration of ultrasonic transducer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0753263B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3784391B2 (en) * | 2004-02-24 | 2006-06-07 | 京セラ株式会社 | Ultrasonic processing vibrator and processing apparatus |
KR100830530B1 (en) * | 2007-01-09 | 2008-05-21 | (주)푸로맥스 | Portable apparatus for skin-care |
JP4947602B2 (en) * | 2008-12-24 | 2012-06-06 | 精電舎電子工業株式会社 | In-plane composite resonator, in-plane composite resonance apparatus and in-plane composite resonance method using the same |
CN106113097A (en) * | 2016-08-19 | 2016-11-16 | 杭州驰飞超声波设备有限公司 | Hand-held composite ultraphonic ripple food carving knife |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6344970A (en) * | 1986-08-13 | 1988-02-25 | 多賀電気株式会社 | Ultrasonic vibrator and drive control method thereof |
JPS62247870A (en) * | 1986-04-21 | 1987-10-28 | 多賀電気株式会社 | Method of controlling drive of ultrasonic vibrator |
-
1990
- 1990-02-07 JP JP2027459A patent/JPH0753263B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
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JPH03232575A (en) | 1991-10-16 |
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