JP2601653B2 - Wave matching method of ultrasonic transducer - Google Patents
Wave matching method of ultrasonic transducerInfo
- Publication number
- JP2601653B2 JP2601653B2 JP62070099A JP7009987A JP2601653B2 JP 2601653 B2 JP2601653 B2 JP 2601653B2 JP 62070099 A JP62070099 A JP 62070099A JP 7009987 A JP7009987 A JP 7009987A JP 2601653 B2 JP2601653 B2 JP 2601653B2
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- wave
- longitudinal
- torsional
- vibration wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 4
- 239000002184 metal Substances 0.000 claims description 21
- 238000002604 ultrasonography Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910000737 Duralumin Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Description
【発明の詳細な説明】 ＜産業上の利用分野＞ 本発明は、超音波モータ，超音波加工，霧化器等に応
用される超音波振動子の波動整合方法に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a wave matching method of an ultrasonic vibrator applied to an ultrasonic motor, ultrasonic processing, an atomizer, and the like.
＜従来技術＞ 周方向に逆位相の歪振動を生ずる捩れ振動素子と、厚
み方向に歪振動を生ずる縦振動素子を積層し、その前後
面に金属ブロックを配設して、これらをボルト等で一体
的に結合したものは特開昭61−120677号に開示されてい
るように公知である。<Prior art> A torsional vibrating element that generates a strain vibration in opposite phases in the circumferential direction and a longitudinal vibration element that generates a strain vibration in the thickness direction are laminated, and a metal block is disposed on the front and rear surfaces thereof, and these are bolted or the like. The one integrally joined is known as disclosed in JP-A-61-120677.
このものは、その捩れ振動素子により、捩れ振動に伴
う回動と、縦振動素子による軸方向への直線往復運動と
を端面に発生させ、該端面で、その組合わせによる楕円
運動を生じさせることを目的とするものである。In this device, the torsional vibrating element generates rotation associated with torsional vibration and linear reciprocating motion in the axial direction by the longitudinal vibrating element on an end face, and generates an elliptical motion by the combination on the end face. It is intended for.
ところで、かかる構成にあって、縦波の音速に比して
横波（捩れ振動波）の音速は遅く、約６割程度しかな
い。具体的には、縦波5000m/sに対して、横波は3000m/s
程度である。このため、その端面に所期の楕円駆動を取
出すには、縦振動の共振周波数と、捩れ振動の共振周波
数とを整合させる必要があり、しかも、夫々振動モード
が異なるために、前後の金属ブロックが同径の通常形状
では、実際には楕円運動を取出すことができず、机上の
提案に過なくなっている。By the way, in such a configuration, the sound speed of the shear wave (torsional vibration wave) is lower than the sound speed of the longitudinal wave, and is only about 60%. Specifically, for a longitudinal wave of 5000 m / s, a transverse wave of 3000 m / s
It is about. Therefore, it is necessary to match the resonance frequency of the longitudinal vibration and the resonance frequency of the torsional vibration in order to take out the desired elliptical drive on the end face, and since the vibration modes are different, the front and rear metal blocks are different. However, in the case of a normal shape having the same diameter, elliptical motion cannot be actually extracted, and this is merely a proposal on a desk.
本発明は、縦振動波と捩れ振動波を整合することによ
り、かかる構造の超音波振動子の製造を可能とする超音
波振動子の波動整合方法の提供を目的とするものであ
る。An object of the present invention is to provide a wave matching method of an ultrasonic vibrator that can manufacture an ultrasonic vibrator having such a structure by matching a longitudinal vibration wave and a torsional vibration wave.
＜問題点を解決するための手段＞ 本発明は、周方向に逆位相の歪振動を生ずる捩れ振動
素子と、厚み方向に歪振動を生ずる縦振動素子とを積層
し、その前後面に配設した金属ブロックにより各振動素
子を挟持し、縦振動とねじれ振動の組合わせにより、先
端面に楕円運動を生じさせるようにしたものにおいて、
前記金属ブロックの横断面積を変化させて捩れ振動波を
調整し、その全長の設定により縦振動波を調整して、捩
れ振動波と縦振動波を整合させるようにしたものであ
る。<Means for Solving the Problems> According to the present invention, a torsional vibrating element that generates a strain vibration in opposite phases in the circumferential direction and a longitudinal vibrating element that generates a strain vibration in the thickness direction are stacked and disposed on the front and rear surfaces thereof. Each of the vibrating elements is sandwiched by a metal block and a combination of longitudinal vibration and torsional vibration causes an elliptical motion on the tip end surface.
The torsional vibration wave is adjusted by changing the cross-sectional area of the metal block, the longitudinal vibration wave is adjusted by setting the total length thereof, and the torsional vibration wave and the longitudinal vibration wave are matched.
＜作用＞ 本発明者は、かかる構造の振動子につき、種々の検討
及び実験を重ねた結果、縦振動波は、振動子の全長の影
響を大きく受けるのに比し、捩れ振動波は、回転慣性力
による影響が大きいので、横断面積の変化によって大き
く変わるという特性を見い出した。<Operation> The inventor of the present invention has conducted various investigations and experiments on a vibrator having such a structure. As a result, the longitudinal vibration wave is greatly affected by the total length of the vibrator, while the torsional vibration wave is rotated. Since the effect of the inertial force is large, it has been found that the characteristics vary greatly with changes in the cross-sectional area.
本発明は、これらの特性を使って、全長と横断面積を
調整することにより、縦振動波と、捩れ振動波の見かけ
の音速を同じとし、各振動波に対応する振動モードの共
振周波数を合致させるようにしたものである。The present invention uses these characteristics to adjust the overall length and cross-sectional area to make the apparent sound speed of the longitudinal vibration wave and the torsional vibration wave the same, and to match the resonance frequency of the vibration mode corresponding to each vibration wave. It is intended to be.
尚、縦振動と捩れ振動の各モードの共振周波数を確実
に一致させることは量産上困難であるため、±10％程
度、望ましくは±５％以内のばらつきがあっても問題は
ない。また、縦振動波と捩れ振動波の重なり合う振動モ
ードは、縦振動波が半波長共振（１次モード）のとき捩
れ振動波は１波長共振（２次モード），縦振動波が１波
長共振（２次モード）のとき捩れ振動波は1.5波長共振
（３次モード）の組合わせがある。そのほか縦振動波が
３次モードで捩れ振動波が５次モード等の組合わせもあ
る。It is difficult in mass production to reliably match the resonance frequencies of the longitudinal vibration mode and the torsional vibration mode. Therefore, there is no problem even if there is a variation of about ± 10%, preferably within ± 5%. The vibration mode in which the longitudinal vibration wave and the torsional vibration wave overlap is such that when the longitudinal vibration wave is half-wave resonance (primary mode), the torsional vibration wave is one-wavelength resonance (secondary mode), and the longitudinal vibration wave is one-wavelength resonance (primary mode). In the case of the second mode, the torsional vibration wave has a combination of 1.5 wavelength resonance (third mode). In addition, there is a combination of a longitudinal vibration wave in the third mode and a torsional vibration wave in the fifth mode.
すなわち、この振動モードの組合わせに基いて、全長
と横断面積を決定すればよいこととなる。That is, the total length and the cross-sectional area may be determined based on the combination of the vibration modes.
＜実施例＞ 添付図面について本発明の一実施例を説明する。An embodiment of the present invention will be described with reference to the accompanying drawings.
第１図について、2a,2bは、周方向に分極し、相互に
逆位相の周方向の歪振動を生ずるようにしたPZT等から
なる二枚の環状圧電素子からなる捩れ振動素子であっ
て、これに相互に厚み分極方向を異ならせた二枚の環状
圧電素子からなる縦振動素子3a,3bを積層する。Referring to FIG. 1, 2a and 2b are torsional vibrating elements composed of two annular piezoelectric elements made of PZT or the like that are polarized in the circumferential direction and generate circumferentially distorted vibrations of opposite phases to each other, The longitudinal vibration elements 3a and 3b composed of two annular piezoelectric elements having thickness polarization directions different from each other are laminated on this.
そして、積層体の両側にジュラルミン製の金属ブロッ
ク4,5を配設し、さらに各部材の中心にボルト６を挿入
して、その上下端の螺子6a,6bを後部の金属ブロック５
の内面に周設した螺子と、金属ブロック４の前端に配置
したナット７に螺合して、振動素子2a,2b,3a,3bを金属
ブロック4,5で挟持し、而て超音波振動子１を構成す
る。Then, metal blocks 4 and 5 made of duralumin are arranged on both sides of the laminate, and a bolt 6 is inserted into the center of each member, and screws 6a and 6b at the upper and lower ends thereof are connected to the metal block 5 at the rear.
And the nuts 7 arranged at the front end of the metal block 4 are screwed together, and the vibrating elements 2a, 2b, 3a, 3b are clamped between the metal blocks 4, 5, and the ultrasonic vibrator 1.
かかる構成にあって、金属ブロック４は、その前部を
テーパー面８を介して細径部９に連成することにより縮
径部10を形成し、前記ナット７を細径部９と同径とす
る。In such a configuration, the metal block 4 has a reduced diameter portion 10 formed by coupling a front portion thereof to a small diameter portion 9 via a tapered surface 8, and the nut 7 has the same diameter as the small diameter portion 9. And
これにより、金属ブロック4,5の長さを夫々定めてそ
の全長を決定し、かつ金属ブロック４の縮径部10の径寸
法を決定して、横断面積を調整する。そしてこの調整に
より、第１図に併記するように縦振動素子3a,3bの駆動
による縦振動波が半波長共振（１次モード）のとき、捩
れ振動素子2a,2bの駆動による捩れ振動波は１波長共振
（２次モード）となるようにする。このほか、上述のよ
うに各種モードの組合わせを実現することもできる。As a result, the length of the metal blocks 4 and 5 is determined to determine the overall length, and the diameter of the reduced diameter portion 10 of the metal block 4 is determined to adjust the cross-sectional area. By this adjustment, as shown in FIG. 1, when the longitudinal vibration waves driven by the longitudinal vibration elements 3a and 3b are at half-wave resonance (first-order mode), the torsional vibration waves driven by the torsional vibration elements 2a and 2b are One-wavelength resonance (secondary mode) is set. In addition, combinations of various modes can be realized as described above.
尚、前記金属ブロック４は縮径部10によりホーンの役
割も生じ、速度分布波形で示されるように、その先端
で、金属ブロック５の後端に比して大きな振巾が発生す
る。The metal block 4 also functions as a horn due to the reduced diameter portion 10, and a large amplitude is generated at the front end thereof as compared with the rear end of the metal block 5, as shown by the velocity distribution waveform.
かかる構成にあって、捩れ振動素子2a,2bと縦振動素
子3a,3bに上述の関係に基き所定周波数の交番電圧を印
加すると、金属ブロック４の先端に捩れ振動に伴う回転
運動と、縦振動に伴う往復直線運動が合成した運動が発
生する。そして、捩れ振動と、縦振動の振巾が同じで、
位相が同じであると円運動をし、振巾及び位相を変える
と楕円運動をする。さらには回転を逆にすることもでき
る。In such a configuration, when an alternating voltage of a predetermined frequency is applied to the torsional vibrating elements 2a, 2b and the longitudinal vibrating elements 3a, 3b based on the above-described relationship, the rotational motion accompanying the torsional vibration and the longitudinal vibration , A motion is generated that combines the reciprocating linear motion. And the amplitude of torsional vibration and longitudinal vibration is the same,
When the phases are the same, a circular motion is performed, and when the amplitude and the phase are changed, an elliptical motion is performed. Furthermore, the rotation can be reversed.
次に第２図は横断面積の他の調整手段を示すものであ
って、金属ブロック４に、その中途を縮径して、縮頸部
20を形成したものである。そしてこの縮頸部20の径選定
により金属ブロック４の横断面積が調整されることとな
る。Next, FIG. 2 shows another adjusting means of the cross-sectional area.
20 is formed. The cross-sectional area of the metal block 4 is adjusted by selecting the diameter of the neck portion 20.
また第３図は、中心に螺子孔を形成した同径の金属ブ
ロック4,5の、該螺子孔にボルト30を螺合して振動素子2
a,2b,3a,3bを挟持したものにあって、ボルト30を短く
し、これにより金属ブロック４の螺子孔を利用して調整
孔31を形成するようにしたものである。そして、この調
整孔31により金属ブロック４の横断面積は縮小され、そ
の調整が可能となる。FIG. 3 shows a vibration element 2 of a metal block 4, 5 having the same diameter formed with a screw hole at the center.
The bolts 30 are shortened so that the adjustment holes 31 are formed by using the screw holes of the metal block 4 in the one holding the a, 2b, 3a, 3b. Then, the cross-sectional area of the metal block 4 is reduced by the adjustment hole 31, and the adjustment can be performed.
＜発明の効果＞ 本発明は、上述のように、金属ブロックの横断面積を
変化させて捩れ振動波を調整し、その全長の設定により
縦振動波を調整して、捩れ振動波と縦振動波を整合させ
たものであり、而て、その端部から楕円運動を有効に取
出し得ることとなる優れた効果がある。<Effect of the Invention> As described above, the present invention adjusts the torsional vibration wave by changing the cross-sectional area of the metal block, and adjusts the longitudinal vibration wave by setting the total length thereof. Thus, there is an excellent effect that the elliptical motion can be effectively extracted from the end.
添付図面は本発明の実施例を示し、第１図はブロックの
横断面積調整手段の一実施例を示す超音波振動子１の下
半分を縦断した側面図であり、縦振動と、捩れ振動の速
度分布波形を軸方向に沿って併記する。また第２図は同
第二実施例の側面図、第３図は同第三実施例の下半分を
縦断した側面図である。 1;超音波振動子、2a,2b;捩れ振動素子、3a,3b;縦振動素
子、4,5;金属ブロック、10;縮径部、20:縮頸部、31;調
整孔The accompanying drawings show an embodiment of the present invention, and FIG. 1 is a side view in which the lower half of an ultrasonic vibrator 1 showing one embodiment of a block cross-sectional area adjusting means is longitudinally cut. The velocity distribution waveform is also shown along the axial direction. FIG. 2 is a side view of the second embodiment, and FIG. 3 is a side view in which a lower half of the third embodiment is longitudinally cut. 1; ultrasonic vibrator, 2a, 2b; torsional vibrating element, 3a, 3b; longitudinal vibrating element, 4, 5; metal block, 10; reduced diameter portion, 20: reduced neck portion, 31; adjustment hole
───────────────────────────────────────────────────── フロントページの続き (72)発明者 黒澤 実 神奈川県横浜市緑区すすき野１丁目６− 11 (72)発明者 増田 道幸 愛知県名古屋市瑞穂区高辻町14番18号 日本特殊陶業株式会社内 (56)参考文献 特開 昭60−148388（ＪＰ，Ａ) 特開 昭62−152377（ＪＰ，Ａ) 特開 昭62−247871（ＪＰ，Ａ) ──────────────────────────────────────────────────続 き Continued on the front page (72) Minoru Kurosawa 1-6-11 Susukino, Midori-ku, Yokohama-shi, Kanagawa Prefecture (72) Michiyuki Masuda 14-18 Takatsuji-cho, Mizuho-ku, Nagoya-shi, Aichi Japan Special Ceramics Co., Ltd. (56) References JP-A-60-148388 (JP, A) JP-A-62-152377 (JP, A) JP-A-62-247871 (JP, A)
Claims (1)
素子と、厚み方向に歪振動を生ずる縦振動素子とを積層
し、その前後面に配設した金属ブロックにより各振動素
子を挟持し、縦振動とねじれ振動の組合わせにより、先
端面に楕円運動を生じさせるようにしたものにおいて、
前記金属ブロックの横断面積を変化させて捩れ振動波を
調整し、その全長の設定により縦振動波を調整して、捩
れ振動波と縦振動波を整合させるようにしたことを特徴
とする超音波振動子の波動整合方法。1. A torsional vibrating element that generates a strain vibration in opposite phases in the circumferential direction and a longitudinal vibrating element that generates a strain vibration in the thickness direction are laminated, and each of the vibrating elements is sandwiched by metal blocks disposed on the front and rear surfaces thereof. Then, by combining the longitudinal vibration and the torsional vibration, an elliptical motion is generated on the tip surface.
Ultrasound characterized in that the torsional vibration wave is adjusted by changing the cross-sectional area of the metal block, the longitudinal vibration wave is adjusted by setting the total length thereof, and the torsional vibration wave and the longitudinal vibration wave are matched. A method for matching the wave of a vibrator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62070099A JP2601653B2 (en) | 1987-03-24 | 1987-03-24 | Wave matching method of ultrasonic transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62070099A JP2601653B2 (en) | 1987-03-24 | 1987-03-24 | Wave matching method of ultrasonic transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63236577A JPS63236577A (en) | 1988-10-03 |
| JP2601653B2 true JP2601653B2 (en) | 1997-04-16 |
Family
ID=13421745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62070099A Expired - Lifetime JP2601653B2 (en) | 1987-03-24 | 1987-03-24 | Wave matching method of ultrasonic transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2601653B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02228275A (en) * | 1989-02-28 | 1990-09-11 | Nec Corp | Ultrasonic motor and method of drive thereof |
| JP5545825B2 (en) * | 2010-03-23 | 2014-07-09 | オリンパス株式会社 | Ultrasonic motor |
| US10258505B2 (en) | 2010-09-17 | 2019-04-16 | Alcon Research, Ltd. | Balanced phacoemulsification tip |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60148388A (en) * | 1984-01-13 | 1985-08-05 | Hitachi Maxell Ltd | Supersonic vibrator of twisting mode |
| JPS62152377A (en) * | 1985-12-24 | 1987-07-07 | Taga Denki Kk | Drive-controlling method for ultrasonic wave vibrator |
| JPS62247871A (en) * | 1986-04-21 | 1987-10-28 | 多賀電気株式会社 | Ultrasonic vibrator |
-
1987
- 1987-03-24 JP JP62070099A patent/JP2601653B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63236577A (en) | 1988-10-03 |
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