JP4947602B2 - In-plane composite resonator, in-plane composite resonance apparatus and in-plane composite resonance method using the same - Google Patents

Description

  The present invention relates to an in-plane composite resonator that can be used as an ultrasonic processing tool horn for joining metallic objects and welding plastic objects using ultrasonic vibration, and a surface using the same. The present invention relates to an inner composite resonance apparatus and an in-plane composite resonance method.

For example, ultrasonic welding in which an object is welded using ultrasonic vibration is performed by any one vibration selected from longitudinal vibration, lateral vibration, flexural vibration, and torsional vibration of a tool horn that is a resonator. The so-called single vibration mode is often used. In particular, ultrasonic welding using longitudinal vibration is widely used because precise welding is possible and control is easy (see Patent Documents 1 and 2) .
On the other hand, in ultrasonic welding, the composite vibration mode that combines two or more vibrations can draw a more complex vibration trajectory than the single vibration mode. It is suggested that high welding strength can be obtained (see Non-Patent Documents 1 and 2).

  In the composite vibration mode, for example, as shown in FIG. 16, a plurality of oblique slits (fragile portions) 103 are provided on the circumferential surface of the cylindrical resonator 100 in a direction oblique to the axial direction of the resonator 100. (See Non-Patent Documents 1 and 2). With such a configuration, in the welding tip portion 102 provided at the tip of the resonator 100, it is possible to obtain a composite vibration in which the longitudinal vibration due to the ultrasonic vibration and the torsional vibration generated by the oblique slit 103 are combined. . FIG. 16 is an external view showing an example of a resonator for obtaining a conventionally known composite vibration.

  In the composite vibration mode, for example, as shown in FIG. 17, the resonator 200 is ultrasonically vibrated by a plurality of vibrators 215 (in FIG. 17, four vibrators connected to the sides of the resonator). Can also be obtained (see Non-Patent Document 3). With such a configuration, it is possible to oscillate in a vertical and horizontal cross shape in the plane, so that the welding tip portion 202 at the tip of the resonator 200 can be oscillated in a plane so as to draw a circle. It becomes possible. According to such in-plane vibration, an impact is not directly applied to the object, so that it is considered possible to reduce damage to the object. FIG. 17 is a perspective view showing another example of a resonator for obtaining a conventionally known composite vibration.

JP-A-8-198777 Japanese Patent Publication No.54-23349 Jiro Kanno, Ryohei Karatsu, Shun Tanaka, Tetsuyoshi Ueoka, Proc. Symp. Ultrason. Electron., Vol. 26, (2005) pp. 97-98 Jiro Kanno, Takahiro Kawasaki, Go Kishimoto, Kazuki Hirai, Proc. Symp. Ultrason. Electron., Vol. 26, (2005) pp. 101-102 Jiro Kanno, Hiroyuki Miura, Misugi Moesu, Proc. Symp. Ultrason. Electron., Vol. 26, (2005) pp. 99-100

  However, since the vibration locus is only a straight line in the single vibration mode, there is a problem that a high welding strength cannot be obtained as in the composite vibration mode. In order to obtain high welding strength in the single vibration mode, the output of ultrasonic vibration must be increased. However, if the output of ultrasonic vibration is increased, the ultrasonic vibration that vibrates in the longitudinal direction causes welding with higher precision and higher welding strength. When doing so, there was a problem that the damage given to the object was increased.

  Further, in the case of the composite vibration mode in which the longitudinal vibration and the torsional vibration described in Non-Patent Documents 1 and 2 are combined, the vibration locus is caused by the straight line due to the longitudinal vibration and the torsional vibration generated at an angle corresponding to the direction of the slit. Since there are only straight lines, there is a problem that a sufficiently complicated vibration trajectory cannot be drawn. Further, in the composite vibration modes described in Non-Patent Documents 1 and 2, when the vibration frequencies at the time of composite match, the vibration trajectory becomes a straight line, so that only the same effect as the single vibration mode can be obtained. There was a problem.

  In the composite vibration mode described in Non-Patent Document 3, although it is possible to vibrate in a circle in the plane of the welding tip portion, a plurality of oscillators and vibrators for generating ultrasonic vibration are provided. There was a problem that the device had to be used, and the size and cost of the device increased.

  The present invention has been made in view of the above-mentioned problems.For example, an in-plane composite resonator capable of performing in-plane resonance with a complicated vibration locus in order to enable precise welding and obtain high welding strength, It is another object of the present invention to provide an in-plane composite resonance apparatus and an in-plane composite resonance method using the same.

  As a result of intensive studies to solve the above problems, the present inventors have obtained not only longitudinal vibration but also flexural vibration having a resonance frequency far from the resonance frequency at the same time. It has been found that an in-plane composite resonator having a vibration locus that cannot be obtained, an in-plane composite resonator using the same, and an in-plane composite resonance method can be obtained, and the present invention has been completed.

[1] An in-plane composite resonator according to the present invention that solves the above-described problems is an in-plane composite resonator having a resonance part that performs in-plane resonance by combining longitudinal vibration and flexural vibration, and the in-plane composite resonance The body is obtained by adding the ultrasonic vibration of the first frequency, which is the resonance frequency of the in-plane composite resonator, and the ultrasonic vibration of the second frequency having a frequency different from the first frequency. In order to generate longitudinal vibration by being excited by ultrasonic vibration, and to generate the flexural vibration from the ultrasonic vibration of the second frequency among the ultrasonic components of the longitudinal vibration on the peripheral surface of the in-plane composite resonator. It is characterized in that a deflection vibration generating means is provided.

  In this way, when the longitudinal vibration is excited by the ultrasonic vibration generated by adding the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency, the bending vibration generating means is provided. Therefore, it is possible to generate a flexural vibration on the peripheral surface of the in-plane composite resonator from the ultrasonic vibration of the second frequency among the ultrasonic vibrations generated by addition. Further, since the ultrasonic vibration of the first frequency is the resonance frequency of the in-plane composite resonator, the entire in-plane composite resonator can be longitudinally vibrated by the ultrasonic vibration of the first frequency. Since the ultrasonic vibration of the first frequency is a frequency different from the second frequency, it is not affected by the flexural vibration generating means provided at a position that becomes a node of the ultrasonic vibration of the second frequency. . That is, the bending vibration due to the ultrasonic vibration of the first frequency does not occur. As a result, in the plane of the peripheral surface, a resonance unit that performs in-plane resonance with a complex vibration locus that combines longitudinal vibration due to ultrasonic vibration of the first frequency and flexural vibration due to ultrasonic vibration of the second frequency. An in-plane composite resonator having the above can be realized.

[2] In the present invention, it is preferable that the flexural vibration generating means is provided at a position that becomes a node of the ultrasonic vibration of the second frequency. In this way, since the flexural vibration generating means is provided at a position that becomes a node of the ultrasonic vibration of the second frequency, the ultrasonic vibration of the second frequency among the ultrasonic vibrations generated by addition. Thus, flexural vibration can be reliably and suitably generated in the in-plane composite resonator.

[3] In the present invention, the flexural vibration generating means is preferably a fragile part, and [4] the fragile part as the flexural vibration generating means is perpendicular to the direction in which the longitudinal vibration is applied. It is preferable that two or more weak portions are provided side by side. In this way, the flexural vibration generating means is a fragile part, and preferably two or more fragile parts are provided as the flexural vibration generating means, so that the flexural vibration can be reliably generated. Furthermore, when the fragile portion as the flexural vibration generating means is provided at a position that becomes a node of the ultrasonic vibration of the second frequency as described above, the fragile portion is bent by the ultrasonic vibration of the second frequency. Vibration can be reliably generated.

[5] In the present invention, the formation angle α of the slit-like fragile portion as the flexural vibration generating means is preferably 40 to 50 ° as an opening angle from the longitudinal vibration application direction. In this way, since the formation angle of the slit-like weak part as the flexural vibration generating means is appropriate, the flexural vibration can be generated efficiently. [6] In the present invention, it is preferable that the fragile portion as the flexural vibration generating means is a slit-like through-hole penetrating the in-plane composite resonator. [7] In the present invention, it is preferable that the weakened portion as the flexural vibration generating means is a slit-shaped bottomed hole in which a part of the in-plane composite resonator is thinned.

[ 8 ] In the present invention, the flexural vibration cancellation for canceling the flexural vibration generated by the flexural vibration generating means at a position that is another node different from the ultrasonic vibration node of the second frequency. Preferably means are provided. In this way, the flexural vibration generated by the flexural vibration generating means can be canceled by the flexural vibration canceling means. Accordingly, one end side of the in-plane composite resonator according to the present invention is connected and fixed to a vibrator that oscillates ultrasonic vibration, and the other end side opposite to the one end side can be fixed by a fixing means. become able to.

[ 9 ] In the present invention, the flexural vibration canceling means is preferably a fragile part, and [ 10 ] the fragile part as the flexural vibration canceling means is in a direction in which the longitudinal vibration is applied. It is preferable that two or more weak portions are provided side by side in a vertical direction. In this way, the flexural vibration canceling means is a fragile portion, and preferably two or more fragile portions as the flexural vibration canceling means are provided, so that the flexural vibration can be reliably canceled.

In [11] the present invention, slit-like fragile portions are formed angle α as the bending vibration generating means is formed, forming an angle of the slit-shaped fragile portion as the bending vibration canceling means β is the angle formed In relation to α, it is preferable to satisfy the condition of β = 180−α or β = α in terms of the opening angle from the application direction of the longitudinal vibration. In this way, since the formation angle of the fragile portion as the bending vibration canceling means is appropriate, the bending vibration can be canceled efficiently.

[12] In the present invention, it is preferable that the fragile portion as the flexural vibration canceling means is a slit-shaped through-hole penetrating the in-plane composite resonator. [13] In the present invention, it is preferable that the fragile portion as the flexural vibration canceling means is a slit-shaped bottomed hole in which a part of the in-plane composite resonator is thinned. [ 14 ] In the present invention, the ultrasonic vibration of the second frequency is 0.5n times the first frequency, and n is preferably a number larger than two . Thus, ultrasonic vibration of the first frequency and a relationship is more suitable to the ultrasonic vibration of the second frequency, because these frequencies are away oscillates by adding these However, the frequency does not match, and longitudinal vibration and flexural vibration can be generated more reliably.

[ 15 ] An in-plane composite resonator according to the present invention is an in-plane composite resonator using an in-plane composite resonator having a resonance part that performs in-plane resonance by combining longitudinal vibration and flexural vibration. A first oscillator that outputs a first voltage signal for oscillating ultrasonic vibration of a second frequency, and a first oscillator for oscillating second frequency ultrasonic vibration having a frequency different from the first frequency. A second oscillator that outputs a voltage signal of 2; a first voltage signal that is input from the first oscillator; and a second voltage signal that is input from the second oscillator. An adder for obtaining a voltage signal, a vibrator for oscillating ultrasonic vibrations by the voltage signal added by the adder, and any one of [1] to [ 14 ] connected to the vibrator And an in-plane composite resonator according to claim 1. Yes.

Thus, since the first oscillator, the second oscillator, the adder, and the vibrator are provided, the first voltage signal for oscillating the ultrasonic vibration of the first frequency, The second voltage signal for oscillating the ultrasonic vibration of the second frequency can be output, and the ultrasonic vibration obtained by adding them can be oscillated. Since the in-plane composite resonator according to any one of [1] to [ 14 ] is provided, the in-plane composite resonator is longitudinally vibrated by being excited by the oscillated ultrasonic vibration. Then, the flexural vibration can be generated from the ultrasonic vibration of the second frequency among the ultrasonic components of the longitudinal vibration by the flexural vibration generating means provided in the in-plane composite resonator. As a result, the in-plane composite resonance device according to the present invention is a complex in which longitudinal vibration caused by ultrasonic waves of the first frequency and flexural vibration caused by ultrasonic waves of the second frequency are combined in the resonance part of the in-plane composite resonator. In-plane resonance can be generated with a simple vibration trajectory.

[ 16 ] The in-plane composite resonance method according to the present invention is an in-plane composite resonance method that generates in-plane resonance in which longitudinal vibration and flexural vibration are combined using the in-plane composite resonance apparatus according to [ 15 ]. The first oscillator outputs a first voltage signal for oscillating the ultrasonic vibration of the first frequency, and the second oscillator has a second frequency having a frequency different from the first frequency. A voltage signal output step of outputting a second voltage signal for oscillating the ultrasonic vibration of the first voltage signal, a first voltage signal input from the first oscillator, and a second voltage input from the second oscillator. The voltage signal adding step of adding the voltage signals of the two by an adder and obtaining the added voltage signal, and the ultrasonic vibration for causing the vibrator to oscillate longitudinally oscillating ultrasonic vibration by the voltage signal added by the adder Oscillation process and said vibration The in-plane composite resonator according to any one of [1] to [ 14 ] connected to a child is excited by the oscillated ultrasonic vibration to longitudinally vibrate, and the in-plane composite An in-plane composite resonance generating step of generating an in-plane resonance in which the longitudinal vibration and the flexural vibration are combined by generating the flexural vibration from the longitudinal vibration by a flexural vibration generating means provided in a resonator. It is characterized by.

Thus, in the voltage signal output step, the first voltage signal for oscillating the ultrasonic vibration of the first frequency and the second voltage signal for oscillating the ultrasonic vibration of the second frequency are output. In the voltage signal adding step, the first voltage signal and the second voltage signal are added, and in the ultrasonic vibration oscillating step, ultrasonic vibration by the added voltage signal can be oscillated. Then, by the in-plane composite resonance generating step, the in-plane composite resonator according to any one of [1] to [ 14 ] is longitudinally vibrated by the oscillated ultrasonic vibration, and the in-plane composite resonator is The flexural vibration generating means provided in the can generate the flexural vibration from the ultrasonic vibration of the second frequency among the ultrasonic components of the longitudinal vibration. As a result, the in-plane composite resonance method according to the present invention is a complex in which longitudinal vibration by ultrasonic waves of the first frequency and flexural vibration by ultrasonic waves of the second frequency are combined in the resonance part of the in-plane composite resonator. In-plane resonance can be performed with a simple vibration locus.

  According to the in-plane composite resonator according to the present invention, since the flexural vibration generating means is provided, the longitudinal vibration due to the resonance frequency of the in-plane composite resonator (that is, the longitudinal vibration due to the ultrasonic vibration of the first frequency). And in-plane resonance of a complex vibration trajectory that combines the flexural vibration generated by the flexural vibration generating means (that is, the flexural vibration due to the ultrasonic vibration of the second frequency). Therefore, according to the in-plane composite resonator according to the present invention, precise welding can be achieved and high welding strength can be obtained. In addition, since high welding strength can be obtained by the composite vibration, damage to the object can be reduced. Furthermore, since a plurality of vibrating bodies are not used when performing the composite vibration, the apparatus can be downsized and the cost can be kept low.

  According to the in-plane composite resonator according to the present invention, since the in-plane composite resonator according to the present invention is provided, the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency are added. The in-plane composite resonator is excited and longitudinally vibrated by the ultrasonic vibration, and the flexural vibration is generated by the flexural vibration generating means provided in the in-plane composite resonator, and the longitudinal vibration and the flexural vibration are combined. In-plane resonance of a complicated vibration trajectory can be generated. Therefore, according to the in-plane composite resonance device according to the present invention, precise welding can be performed and high welding strength can be obtained. In addition, since high welding strength can be obtained by the composite vibration, damage to the object can be reduced. Furthermore, since a plurality of vibrating bodies are not used when performing the composite vibration, the apparatus can be downsized and the cost can be kept low.

  According to the in-plane composite resonance method of the present invention, the in-plane composite resonator according to the present invention is obtained by ultrasonic vibration obtained by adding the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency. By exciting and causing longitudinal vibration, flexural vibration is generated by the flexural vibration generating means provided in the in-plane composite resonator, and in-plane resonance of a complex vibration trajectory that combines longitudinal vibration and flexural vibration is generated. Can do. Therefore, according to the in-plane composite resonance method according to the present invention, precise welding can be performed and high welding strength can be obtained. In addition, since high welding strength can be obtained by the composite vibration, damage to the object can be reduced. Furthermore, since a plurality of vibrating bodies are not used when performing the composite vibration, the apparatus can be downsized and the cost can be kept low.

Hereinafter, an in-plane composite resonator according to the present invention, an in-plane composite resonance apparatus using the same, and an in-plane composite resonance method will be described in detail with reference to the drawings as appropriate.
First, the in-plane composite resonator according to the present invention will be described. FIG. 1 is a perspective view showing a configuration of an in-plane composite resonator according to the present invention.

The in-plane composite resonator 1 according to the present invention includes a resonance unit 2 that performs in-plane resonance that combines longitudinal vibration and flexural vibration.
The in-plane composite resonator 1 according to the present invention has a first frequency (that is, one wavelength) ultrasonic vibration that is a resonance frequency of the in-plane composite resonator 1 and a frequency different from the first frequency. The ultrasonic vibration generated by adding the ultrasonic vibration having the second frequency is longitudinally vibrated and the flexural vibration generating means 3 is provided as shown in FIG. A complex vibration locus in which a flexural vibration is generated from the ultrasonic vibration of the second frequency of the ultrasonic components of the longitudinal vibration on the peripheral surface of the body 1 and the above-described longitudinal vibration and the generated flexural vibration are combined. Can be generated in the upper and lower surfaces of a so-called rectangular (square bar) in-plane composite resonator 1. Note that a portion that resonates in a plane with a complex vibration locus in which longitudinal vibration and flexural vibration are combined on the peripheral surface of the in-plane composite resonator is the resonance portion 2. Note that FIGS. 14 and 15 show the temporal movement of the in-plane composite resonator due to longitudinal vibration and flexural vibration and the positional relationship of the resonance part 2.

  Here, as is known in the technical field, longitudinal vibration means that the entire in-plane composite resonator 1 is vibrated in a direction parallel to the longitudinal direction of the in-plane composite resonator 1. Means that at least a part of the in-plane composite resonator 1 is vibrated so as to bend in a lateral direction (that is, a short direction) with respect to the longitudinal direction of the in-plane composite resonator 1.

  Note that the longitudinal vibration combined to generate the in-plane resonance is due to the ultrasonic vibration of the first frequency that is the resonance frequency of the in-plane composite resonator 1, and is combined to generate the in-plane resonance. The flexural vibration that is generated is due to the ultrasonic vibration of the second frequency having a higher frequency than the first frequency. Regarding the ultrasonic vibration of the first frequency, the ultrasonic vibration of the second frequency, the position where the flexural vibration generating means 3 is provided, the setting of the shape of the in-plane composite resonator 1 and the selection of the material, the in-plane composite will be described later. The design procedure of the resonator 1 will be described.

  The in-plane composite resonator 1 according to the present invention is a known material such as duralumin, titanium alloy, K-monel, tool steel, low loss steel, stainless steel, phosphor bronze, or a chrome plated surface thereof. Can be formed. Also, the overall shape of the in-plane composite resonator 1 can be arbitrarily set according to the shape and material of the object to be processed, the ease of processing the shape of the in-plane composite resonator 1, and the like. . For example, a known shape such as a so-called rectangle, cylinder, column, index, cone, or stepped shape can be used. In the case of the stepped shape, it is preferable to connect the portions to be stepped by R processing in order to strengthen the stress.

The flexural vibration generating means 3 is preferably provided at a position that becomes a node of ultrasonic vibration of the second frequency. If the flexural vibration generating means 3 is provided at a position deviated from the position of the ultrasonic vibration node having the second frequency, the generation efficiency of the flexural vibration is deteriorated, which is not preferable. A method for providing the flexural vibration generating means 3 and the flexural vibration canceling means 4 described later will be described later.
Such a flexural vibration generating means 3 is preferably a weak part. Such a fragile portion may be a bottomed hole in which a part of the in-plane composite resonator 1 is thinned, or may be a through-hole penetrating the in-plane composite resonator 1. It is possible to arbitrarily set whether the fragile portion is a bottomed hole or a through hole. If the bottomed hole is used, it is possible to suppress a decrease in the rigidity of the in-plane composite resonator 1 and to expect an improvement in durability. On the other hand, if the through hole is used, the rigidity of the in-plane composite resonator 1 is lower than that of the bottomed hole. Therefore, the flexural vibration generating means 3 can easily generate flexural vibration, and the amplitude of the flexural vibration can be increased. there is a possibility.

Two or more weak portions as the flexural vibration generating means 3 are preferably provided side by side in a direction perpendicular to the direction in which the longitudinal vibration is applied, and more preferably provided in parallel. A single weak portion is not preferable because it is difficult to generate a flexural vibration. The shape of the fragile portion may be any shape as long as it is a shape that can obtain a flexural vibration as a result of analysis using finite element analysis software. For example, the width may be 7 mm, the width may be 3 mm, and the like. When the fragile portion is a bottomed hole, for example, the depth can be 5 mm.
Any commercially available finite element analysis software can be used, but these can be used if modal analysis (frequency analysis of natural vibration mode) and frequency response analysis (stress analysis at a certain frequency, etc.) are possible. It is possible to perform the same analysis by doing.

  The formation angle α of the fragile portion as the flexural vibration generating means 3 is preferably 40 to 50 ° as an opening angle from the application direction of the longitudinal vibration. If the formation angle α of the fragile portion as the flexural vibration generating means 3 deviates from the upper limit value or the lower limit value of the above-described range, it is not preferable because the generation efficiency of the flexural vibration is deteriorated. It is most preferable that the formation angle α of the fragile portion as the bending vibration generating means 3 is 45 ° at which the generation efficiency of the bending vibration is the best.

  The in-plane composite resonator 1 according to the present invention cancels the flexural vibration generated by the flexural vibration generating means 3 at a position that is another node different from the ultrasonic vibration node of the second frequency. It is preferable to provide a bending vibration canceling means 4. That is, it bends to a position that becomes a node of ultrasonic vibration of the second frequency on the other end 6 side that is the opposite side of the one end 5 of the in-plane composite resonator 1 to be bonded to the vibrator 15 (see FIG. 2) described later. Vibration canceling means 4 can be provided. In this way, it becomes easy to fix the in-plane composite resonator 1 at both ends of the one end portion 5 and the other end portion 6. Similarly to the flexural vibration generating means 3, it is not preferable to provide the flexural vibration canceling means 4 at a position shifted from the position of the ultrasonic vibration at the second frequency because the flexural vibration canceling efficiency is deteriorated. When the in-plane composite resonator 1 according to the present invention is fixed only at the one end portion 5 to which longitudinal vibration is applied, the bending vibration canceling means 4 need not be provided.

  The flexural vibration canceling means 4 is preferably a fragile portion, similar to the flexural vibration generating means 3, and the fragile portion is a bottomed hole in which a part of the in-plane composite resonator 1 is thinned. Alternatively, a through hole penetrating the in-plane composite resonator 1 may be used.

  Two or more fragile portions serving as the flexural vibration canceling means 4 are preferably provided side by side in a direction perpendicular to the direction in which the longitudinal vibration is applied, and more preferably provided in parallel. It is not preferable that only one fragile portion is provided because it is difficult to cancel the flexural vibration.

  The shape of the fragile portion is the same as the shape of the fragile portion as the flexural vibration generating means 3, as long as it can be obtained as a result of analysis using finite element analysis software. It is good. For example, the width may be 7 mm, the width may be 3 mm, and the like. When the fragile portion is a bottomed hole, for example, the depth can be 5 mm.

  The formation angle β of the fragile portion as the flexural vibration canceling means 4 is in relation to the formation angle α described above, and satisfies the condition of β = 180−α or β = α in terms of the opening angle from the application direction of the longitudinal vibration. Is preferred. For example, when the formation angle α of the fragile portion as the flexural vibration generating means 3 is formed at 40 to 50 °, the formation angle β of the fragile portion as the flexural vibration canceling means 4 is 140 to 130 °, or 40 to 50 It is good to form at °. Further, for example, when the formation angle α of the fragile portion as the flexural vibration generating means 3 is formed at an opening angle of 45 ° from the application direction of the longitudinal vibration, the formation angle β of the fragile portion as the flexural vibration canceling means 4 is The opening angle from the direction of application of longitudinal vibration is preferably 135 ° or 45 °. If the formation angle β of the fragile portion as the flexural vibration canceling means 4 deviates from the upper limit value or the lower limit value of the above-described conditions, any flexural vibration canceling efficiency is deteriorated. The formation angle β of the fragile portion as the bending vibration canceling means 4 is most preferably set to 135 ° or 45 ° at which the bending vibration canceling efficiency is best.

  In other words, the flexural vibration canceling means 4 has a shape that is symmetrical to the shape of the flexural vibration generating means 3 described above at a position that is another node different from the node of the ultrasonic vibration of the second frequency. It is preferable to provide the forming angle or the same shape and angle. The flexural vibration canceling means 4 only needs to be able to prevent the ultrasonic vibration from being transmitted to the vibrator side, and between the weak part as the flexural vibration generating means 3 and the weak part as the flexural vibration canceling means 4. Depending on the frequency of the flexural vibration propagating to the surface, that is, the shape and the forming angle that is symmetrical with the shape of the flexural vibration generating means 3 according to the second frequency, or exactly the same shape as the shape of the flexural vibration generating means 3 and An angle can be arbitrarily selected.

Further, the width dimension of the portion outside the flexural vibration generating means 3 and outside the flexural vibration canceling means 4 may be larger than the width dimension between the flexural vibration generating means 3 and the flexural vibration canceling means 4. . By doing in this way, the influence of the flexural vibration to the location which has fixed the vibrator | oscillator 15 or the in-plane composite resonator 1 can be decreased.
Further, as shown in FIG. 1, by increasing the width dimension on the one end portion 5 side outside the flexural vibration generating means 3 and decreasing the width dimension ahead of the flexural vibration generating means 3, longitudinal vibration, particularly It is also possible to obtain a modification effect of longitudinal vibration by ultrasonic vibration of the first frequency. That is, it is possible to obtain an effect of amplifying the amplitude from the vibrator 15.

  The ultrasonic vibration of the second frequency is preferably 0.5n times the first frequency (n is a number larger than 2, preferably an integer of 3 or more). If the ultrasonic vibration of the second frequency is not 0.5n times the first frequency (n is a number larger than 2, preferably an integer of 3 or more), for example, near the center of the in-plane composite resonator 1 As a result, ultrasonic vibrations having antiphase antinodes with respect to antinodes of ultrasonic vibrations of the first frequency may occur, which may cancel each other. As a result, the in-plane resonance may not be obtained, or the obtained in-plane resonance may be weak. It should be noted that any number larger than 2 is arbitrarily selected depending on the thickness, strength, etc. of the resonance part 2 between the flexural vibration generating means 3 and the flexural vibration canceling means 4. Can do. In addition, it can be easily analyzed by using the above-described finite element analysis software whether n is greater than 2 or not.

  The ultrasonic vibration of the second frequency can be set as described above, but the relationship between the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency is that the frequency ratio is as follows: The ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency are set at a ratio that can obtain a vibration frequency as far as possible and can sufficiently maintain the strength of the in-plane composite resonator 1. Is preferred.

  Specifically, the frequency ratio between the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency is most preferably set to 1: 1.5, but from the shape of the in-plane composite resonator 1 and the like. The frequency ratio between the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency that can be applied may not be accurately 1: 1.5. Even in such a case, if the frequency ratio between the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency is within the range of 1: 1.5 to 1: 2, the desired of the present invention. The above effect can be obtained and sufficient strength can be maintained, so that it is allowed. When the frequency ratio is out of the range of 1: 1.5 to 1: 2, as described above, it is opposite to the antinode of the ultrasonic vibration of the first frequency near the center of the in-plane composite resonator 1. An ultrasonic vibration having antinodes is generated, and the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency cancel each other, so that in-plane resonance cannot be obtained or the obtained in-plane resonance is weak. There is a risk of becoming a thing. Moreover, since the strength is not sufficient, it may break.

Next, the design procedure of the in-plane composite resonator 1 according to the present invention is an example in which the frequency ratio between the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency is 1: 1.5. Explained.
First, the length of the in-plane composite resonator 1 is set. The length of the in-plane composite resonator 1 can be arbitrarily set according to the following formula from the material used when used as a one-wavelength resonator.
In-plane composite resonator length [mm] = sonic velocity [m / s] / resonance frequency [kHz]

  Therefore, for example, when the design frequency is the resonance frequency of the in-plane composite resonator 1 and the square rod (resonance frequency 28.3 kHz) of duralumin 2024S (sound speed 5186 m / s) is used as a one-wavelength resonator, the length is It can be 180 mm. The width and thickness of the in-plane composite resonator 1 can also be set arbitrarily. For example, a rectangular rod-like resonator having a width of 30 mm and a thickness of 20 mm can be obtained. Whether or not the design frequency becomes the resonance frequency of the in-plane composite resonator 1 is determined by a device known in the technical field, such as a frequency characteristic analyzer manufactured by NF Circuit Design Block, an impedance analyzer manufactured by Hewlett Packard, or the like. This can be confirmed by using a frequency characteristic analyzer. The optimization of the width of the portion that becomes the resonance portion 2 of the in-plane composite resonator 1 will be described later.

Next, a flexural vibration generating means 3 is provided. The position where the flexural vibration generating means 3 is provided can be determined by finite element analysis software or the like. Further, when the flexural vibration canceling means 4 is provided, it can be determined by finite element analysis software or the like in the same manner as the flexural vibration generating means 3 described above.
When only the flexural vibration generating means 3 is provided, the ultrasonic wave of the second frequency that is 1.5 times the ultrasonic vibration (one wavelength) of the first frequency that is the resonance frequency of the square bar whose length is set. A position that becomes a node of vibration (1.5 wavelengths) may be analyzed by finite element analysis software, and a bending vibration generating means 3 may be provided there.
On the other hand, when both the flexural vibration generating means 3 and the flexural vibration canceling means 4 are provided, the first frequency which is 1.5 times the ultrasonic vibration of the first frequency which is the resonance frequency of the square bar whose length is set. The position that becomes the node of the ultrasonic vibration of the second frequency is determined such that the position of the antinode of the ultrasonic vibration of the second frequency is located between the flexural vibration generating means 3 and the flexural vibration canceling means 4. To do.

In the above description, the case where the frequency ratio between the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency is 1 : 1.5 is described as an example. The position of the vibration antinode is set so as to be located between the flexural vibration generating means 3 and the flexural vibration canceling means 4, but the first frequency ultrasonic vibration and the second frequency ultrasonic vibration This is not the case when the frequency ratio is not 1 : 1.5, for example, 1: 2 or 1: 2.5. Depending on the frequency ratio, what is positioned between the flexural vibration generating means 3 and the flexural vibration canceling means 4 may be a node of ultrasonic vibration of the second frequency.

  This will be explained using the above-described example. When the above-described square bar having a length of 180 mm is used with a resonant frequency that longitudinally vibrates at 38.5 kHz corresponding to 1.5 wavelengths, the ultrasonic vibration node having the second frequency is used. The positions are 20 mm and 160 mm from one end 5. The position that becomes the node of the ultrasonic vibration of the second frequency is measured and confirmed by using a device known in the technical field, for example, a vibration displacement distribution measuring instrument such as a laser Doppler vibrometer and a lock-in amplifier. can do.

  The weak part as the flexural vibration generating means 3 is perpendicular to the direction in which the longitudinal vibration is applied at a position 20 mm from the one end part 5 of the measured position of the ultrasonic vibration of the second frequency. Two or more are arranged in parallel in the direction. For example, two bottomed holes of 7 mm in length, 3 mm in width, and 5 mm in depth are provided in parallel so that the weakened portion has an angle of formation α of 45 ° with respect to the application direction of the longitudinal vibration.

  Further, when the in-plane composite resonator 1 is fixed at both ends, the bending vibration canceling means 4 is positioned at a position of 160 mm from the one end portion 5 of the measured position of the ultrasonic vibration at the second frequency. Establish a vulnerable part. Since the fragile part can be identified by analyzing with finite element analysis software, the shape is determined by analyzing with finite element analysis software. When the flexural vibration generating means 3 is provided on the condition that the square bar and the ultrasonic vibration of the second frequency are provided, the flexural vibration canceling means 4 is provided so as to be symmetrical with the flexural vibration generating means 3. Good. That is, when the flexural vibration generating means 3 is provided, the weakened portion as the flexural vibration canceling means 4 is set in a direction perpendicular to the direction in which the longitudinal vibration is applied, and the formation angle β is the longitudinal vibration. Two bottomed holes having a length of 7 mm, a width of 3 mm, and a depth of 5 mm are provided in parallel so that the opening angle from the application direction is 135 °.

Next, in the in-plane composite resonator 1, the width of the resonance portion 2 that resonates in a plane with a complex vibration locus in which longitudinal vibration and flexural vibration are combined is optimized. The optimization of the width of the portion where the flexural vibration is excited can be obtained, for example, from a fl _loop- fh curve graph (see FIG. 7) known in the art. That is, in the case where the in-plane composite resonator 1 is fixed at both ends of the one end portion 5 and the other end portion 6, the longitudinal vibration frequency (first frequency), the flexural vibration generating means 3 and the flexural vibration canceling means described above. From the length between 4, it can be obtained by an even function distribution using the fl _loop- fh curve graph.

Note that the deflection from the symmetry of vibration, fl _loop -fh curve fl _loop of the graph corresponds to 1/2 of the distance between the bending vibration generating means 3 with the flexural vibration canceling means 4. Further, f is a resonance frequency at the time of excitation by the longitudinal vibration obtained by adding the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency. Therefore, the width dimension of the resonance part 2 between the flexural vibration generating means 3 and the flexural vibration canceling means 4 can be obtained from the fl _loop- fh curve graph.

For example, in the case of the in-plane composite resonator 1 provided with the above-described length and the flexural vibration generating means 3 and the flexural vibration canceling means 4, the fl _loop- fh curve graph is used in consideration of the symmetry of flexural vibration. From the even function distribution, the width dimension of the resonance part 2 between the flexural vibration generating means 3 and the flexural vibration canceling means 4 is determined when l _loop is a flexural vibration of the third mode order (3rd in FIG. 7). 21.8 mm. Therefore, cutting is performed so that the width dimension between the flexural vibration generating means 3 and the flexural vibration canceling means 4 provided so that the opening angle from the application direction of the longitudinal vibration is bilaterally symmetric is 21.8 mm.

On the other hand, for example, in the case where the in-plane composite resonator 1 is fixed only on the one end portion 5 side to which the longitudinal vibration is applied, the longitudinal vibration frequency (first frequency), the above-described flexural vibration generating means 3 and the in-plane From the length to the other end portion 6 of the composite resonator 1, the width dimension of the resonance portion 2 can be obtained by an odd function distribution using the fl _loop- fh curve graph.

Even in the case of the in-plane composite resonator 1 provided with the above-described length and the flexural vibration generating means 3 and the flexural vibration canceling means 4, it is convenient from the odd function distribution using the fl _loop- fh curve graph. Needless to say, the width dimension of the resonating part 2 can be obtained.
Further, in the case where the in-plane composite resonator 1 is fixed only at the one end 5 side to which longitudinal vibration is applied, the longitudinal vibration frequency (first frequency), the flexural vibration generating means 3 and the in-plane composite resonance are described. It goes without saying that the width dimension of the resonance part 2 can be conveniently obtained from the even function distribution using the fl _loop- fh curve graph from the length to the other end part 6 of the body 1.

  The in-plane composite resonator 1 according to the present invention can be designed by the procedure described above. In addition, since the shape etc. of the in-plane composite resonator 1 completed by designing are different from the shape of the square bar at the start of design, the resonance frequency may also be different. Therefore, it is preferable to measure the resonance frequency of the completed in-plane composite resonator 1 with the above-described frequency characteristic analyzer and excite the resonance frequency obtained by the measurement as ultrasonic vibration of the first frequency. Similarly, the ultrasonic vibration of the second frequency of the completed in-plane composite resonator 1 is also measured by the above-described vibration displacement distribution measuring instrument, and the ultrasonic vibration of the second frequency is measured at the obtained frequency. It is good to be excited.

Next, the in-plane composite resonance apparatus 10 provided with the in-plane composite resonator 1 according to the present invention will be described. In addition, the matter already demonstrated by description of the in-plane composite resonator 1 is shown with the same code | symbol, and the description is abbreviate | omitted.
FIG. 2 is a conceptual diagram showing the configuration of the in-plane composite resonance apparatus 10 according to the present invention.
An in-plane composite resonance apparatus 10 according to the present invention is an in-plane composite resonance apparatus using an in-plane composite resonator 1 having a resonance section 2 that performs in-plane resonance that combines longitudinal vibration and flexural vibration. As shown in FIG. 1, the first oscillator 11, the second oscillator 12, the adder 13, the vibrator 15, and the in-plane composite resonator 1 are provided.

  The first oscillator 11 outputs a first voltage signal for oscillating ultrasonic vibration having a first frequency, which is the resonance frequency of the in-plane composite resonator 1, to an adder 13 described later. The first voltage signal output from the first oscillator 11 is preferably output as the ultrasonic vibration having the first frequency at the resonance frequency of the in-plane composite resonator 1 that has been designed and completed. As the ultrasonic vibration of the first frequency, for example, ultrasonic vibration of 26.477 kHz can be used.

  The second oscillator 12 has a frequency different from the first frequency, preferably 0.5n times the first frequency (n is a number larger than 2, preferably an integer of 3 or more). The second voltage signal for oscillating the ultrasonic vibration of the frequency is output to the adder 13 described later. As described above, the second oscillator 12 outputs the second voltage signal so that the frequency ratio between the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency is 1: 1.5. Is output. As the ultrasonic vibration of the second frequency, for example, ultrasonic vibration of 38.090 kHz can be used.

  The adder 13 adds the first voltage signal input from the first oscillator 11 and the second voltage signal input from the second oscillator 12 to obtain an added voltage signal. . The adder 13 may include an amplifier 14 for amplifying the added voltage signal and outputting the amplified voltage signal to a vibrator 15 described later.

  The vibrator 15 oscillates ultrasonic vibration by the voltage signal added by the adder 13 and preferably amplified by the amplifier 14. That is, an ultrasonic vibration obtained by adding the ultrasonic vibration of the first frequency and the ultrasonic vibration of the second frequency is generated, and the in-plane composite resonator 1 described later is excited and longitudinally vibrated.

Note that the first oscillator 11 and the second oscillator 12 may be normally used oscillators whose outputs are set to have respective frequencies. Further, each of the first oscillator 11 and the second oscillator 12 preferably includes a frequency tracking circuit (for example, a PLL circuit). By providing such a frequency tracking circuit, the vibration system can be driven at the optimum frequency.
The adder 13 and the amplifier 14 may be those normally used.
As the vibrator 15, a piezoelectric vibrator or a magnetostrictive vibrator can be used. For example, a bolted Langevin type ultrasonic vibrator using a piezoelectric vibrator can be preferably used.

Next, the in-plane composite resonance method according to the present invention will be described. In addition, the matter already demonstrated by description of the in-plane composite resonator 1 and the in-plane composite resonator 10 is shown with the same code | symbol, and the description is abbreviate | omitted.
FIG. 3 is a flowchart showing a flow of the in-plane composite resonance method according to the present invention.
The in-plane composite resonance method according to the present invention generates in-plane resonance that combines longitudinal vibration and flexural vibration using the above-described in-plane composite resonance apparatus 10, and as shown in FIG. The in-plane composite resonance method includes a voltage signal output step S1, a voltage signal addition step S2, an ultrasonic vibration oscillation step S3, and an in-plane composite resonance generation step S4.

  In the voltage signal output step S1, a first voltage signal for causing the first oscillator 11 to oscillate ultrasonic vibration of the first frequency is output to the adder 13, and the second oscillator 12 is set to the first frequency. , Preferably 0.5n times the first frequency (where n is a number greater than 2, preferably an integer greater than or equal to 3), more preferably ultrasonic vibration of the first frequency and the second frequency This is a step of outputting to the adder 13 a second voltage signal for oscillating the ultrasonic vibration of the second frequency with a frequency ratio of 1: 1.5 to the ultrasonic vibration of the frequency.

  In the voltage signal addition step S2, the adder 13 adds the first voltage signal input from the first oscillator 11 and the second voltage signal input from the second oscillator 12, and the added voltage This is a step of obtaining a signal. In this voltage signal addition step S2, the voltage signal added by the amplifier 14 may be amplified if necessary.

  The ultrasonic vibration oscillating step S3 is a step of causing the vibrator 15 to oscillate longitudinally oscillating ultrasonic vibration by the voltage signal added by the adder 13 and preferably amplified by the amplifier 14.

  In the in-plane composite resonance generating step S4, the in-plane composite resonator 1 connected to the vibrator 15 is excited by the oscillated ultrasonic vibration to longitudinally vibrate, and provided in the in-plane composite resonator 1 A step of generating a flexural vibration from the ultrasonic vibration of the second frequency among the ultrasonic components of the longitudinal vibration by the flexural vibration generating means 3 to generate an in-plane resonance in which the longitudinal vibration and the flexural vibration are combined. It is.

Next, an in-plane composite resonator according to the present invention, an in-plane composite resonance apparatus using the same, and an example in which the effect of the in-plane composite resonance method has been confirmed will be described.
[1] Design of in-plane composite resonator First, the side surface of the in-plane composite resonator that longitudinally vibrates at one wavelength was used as the first in-plane vibration. In the design of the in-plane composite resonator, a longitudinal vibrator having a resonance frequency of 28.3 kHz was used. Duralumin 2024S (sound speed: 5186 m / s) was used as the in-plane composite resonator. Since the design frequency is the resonant frequency of the in-plane composite resonator, the in-plane composite resonator is set to a length of 180 mm, and a rectangular bar having a width of 30 mm and a thickness of 20 mm is used (see FIG. 6). ).

Next, the second flexural vibration, which is the in-plane vibration, is generated by inserting a 45 ° slit (that is, a fragile portion) at a position that becomes a node of the longitudinal vibration.
In order to move away from the resonance frequency of the longitudinal vibration, the resonance frequency that vibrates longitudinally at 1.5 wavelengths is used for the length of the in-plane composite resonator that vibrates longitudinally at one wavelength. The aforementioned slit is provided to generate a flexural vibration. Therefore, the position which becomes the node of the longitudinal vibration of 1.5 wavelength was examined by vibration displacement distribution measurement.

The vibration displacement distribution measurement was performed as shown in FIG. FIG. 4 is a schematic diagram for explaining how the vibration velocity distribution in the direction perpendicular to the side surface of the square bar provided with the slit is measured.
As shown in FIG. 4, the A-side and B-side sides of the in-plane composite resonator longitudinally vibrated by a vibrator are connected to a laser Doppler vibrometer (FIG. 4 shows a laser probe of a laser Doppler vibrometer). Is measured at regular intervals using a lock-in amplifier connected to the laser Doppler vibrometer and an XY recorder connected to the lock-in amplifier at a constant interval. It was done by doing. The measured A-side and B-side data are obtained as V ₁ and V ₂ , respectively, and the following equations are used to calculate the longitudinal vibration distribution (stress distribution) and the flexural vibration distribution (vibration distribution).
Longitudinal vibration distribution (stress distribution) V _L = (V ₁ + V ₂ ) / 2
Distribution of flexural vibration (vibration distribution) V _B = (V ₁ −V ₂ ) / 2

FIG. 5 shows the result of the vibration displacement distribution measurement. In the figure, the horizontal axis indicates the length [mm] from the left end (one end) of the in-plane composite resonator of the square bar, and the vertical axis indicates the amplitude [μm _pp ]. A voltage of 8.2 V _pp was applied.
As shown in FIG. 5, it was found that the positions of the nodes are 20 mm and 160 mm from the left end of the in-plane composite resonator. It was also found that the resonance frequency of longitudinal vibration at 1.5 wavelengths was 38.5 kHz.

  Therefore, as shown in FIG. 6, a slit having an opening angle of 45 ° from the application direction of the longitudinal vibration is provided at a position 20 mm from the left end of the in-plane composite resonator so as to generate a flexural vibration. In addition, as shown in FIG. 6, at the position of 160 mm from the left end of the in-plane composite resonator, slits having the same shape are arranged from the direction of application of longitudinal vibration so that the directions of the slits are opposite (symmetric). By providing the opening angle to be 135 °, the bending vibration is generated between the slits. FIG. 6 is a plan view showing a state in which a slit is provided in a part of the in-plane composite resonator having a square bar shape. The numbers without units in the figure indicate dimensions, and the units are millimeters (mm).

Next, the flexural vibration was designed using the fl _loop- fh curve graph of FIG. 7 showing the distance from the position that becomes the node of the flexural vibration to the position fl _loop that becomes the antinode. In the figure, the horizontal axis indicates fh [kHz · cm], and the vertical axis indicates fl _loop [kHz · cm].
From the symmetry of flexural vibration, l _loop in FIG. 7 corresponds to ½ of the distance L _B between the slits. F is the resonance frequency at 1.5 wavelengths of longitudinal vibration. Therefore, the width h between slits can be obtained from the fl _loop- fh curve graph of FIG. 7 (E. Mori et. Al., Ultarasonics International 89 Conference Proceedings, 256-261, 1989.). l When the _loop is the antinode of the third mode (3rd in FIG. 7) mode order flexural vibration, the width h is 21.8 mm.

  FIG. 8A shows the in-plane composite resonator manufactured in this manner. In addition, the number without the unit in the figure shows a dimension, The unit is a millimeter (mm). FIG. 8B shows a theoretical curve of flexural vibration in the in-plane composite resonator shown in FIG. In order to make it difficult for the produced in-plane composite resonator to transmit flexural vibration to the vibrator, the outer width of both slits was kept at 30 mm. In addition, by reducing the thickness of the in-plane composite resonator, consideration was given to reduce the occurrence of vibration in the direction perpendicular to the resonance portion due to stress when resonating longitudinal vibration of 1.5 wavelengths.

[2] Measurement of vibration characteristics of in-plane composite resonator FIG. 9 shows an admittance circle of the manufactured in-plane composite resonator. In the figure, the horizontal axis indicates conductance [mS], and the vertical axis indicates susceptance [mS]. As shown in FIG. 9, in the longitudinal vibration, the resonance frequency f _L = 26.477 kHz, Q = 348.82, | Y _m0 | = 5.42 mS were obtained. In the flexural vibration, the resonance frequency f _B = 38.090 kHz, Q = 793.54, and | Y _m0 | = 3.40 mS were obtained.

Next, as shown in FIG. 10, a laser Doppler vibrometer (FIG. 10 shows a laser probe of the laser Doppler vibrometer) is used to be perpendicular to the side surface of the fabricated in-plane composite resonator. The vibration velocity distribution in the direction was measured. For longitudinal vibration, since a distribution proportional to the vibration stress distribution is obtained, a combined result with the flexural vibration distribution is measured. Therefore, the measured values of the vibration velocity distribution are V ₁ and V _{2 on} both sides of the A side and B side, and the distribution of longitudinal vibration and flexural vibration is separated using the following equation.
Longitudinal vibration distribution (stress distribution) V _L = (V ₁ + V ₂ ) / 2
Distribution of flexural vibration (vibration distribution) V _B = (V ₁ −V ₂ ) / 2
FIG. 11 shows the result of measuring the vibration velocity distribution in the direction perpendicular to the side surface of the manufactured in-plane composite resonator. In the figure, the horizontal axis indicates the length [mm] in the in-plane composite resonator, and the vertical axis indicates the relative amplitude. The vibration velocity distribution was measured by applying a voltage of 8.2 V _pp to the longitudinal vibration and the flexural vibration.

  As shown in FIG. 11, it was found that longitudinal vibration with one wavelength and flexural vibration due to longitudinal vibration with 1.5 wavelengths are combined in a substantially central portion. It was also found that the flexural vibration lacks symmetry and the amplitude at the center is small. However, it was found that longitudinal vibrations and flexural vibrations having different frequencies were combined at two locations of about 70 mm from both ends of the produced in-plane composite resonator.

Therefore, the in-plane composite resonance device shown in FIG. 12 was manufactured, and the vibration trajectory when the longitudinal vibration of one wavelength and the flexural vibration due to the longitudinal vibration of 1.5 wavelength were combined was measured. The in-plane composite resonance apparatus shown in FIG. 12 includes an oscillator having a resonance frequency f _L of 26.477 kHz, an oscillator having a resonance frequency f _B of 38.090 kHz, an adder connected to these oscillators, A connected amplifier and a vibrator connected to the amplifier were provided, and the in-plane composite resonator produced was connected to the vibrator. In order to measure the vibration locus at a position 70 mm from the end of the in-plane composite resonator connected to the vibrator, a photon sensor for measuring the vibration locus in the lateral (X) direction, and the longitudinal (Y) direction A photon sensor for measuring the vibration trajectory was provided, connected to an oscilloscope via these photon sensors and a band pass filter (BPF), and the vibration trajectory was measured. FIG. 13 shows the measurement result of the vibration trajectory when the longitudinal vibration of one wavelength and the flexural vibration due to the longitudinal vibration of 1.5 wavelength are combined. The vibration trajectory was measured by applying a voltage of 80 V _pp to each vibration.
As shown in FIG. 13, since the in-plane composite resonator includes the above-described in-plane composite resonator, a complex vibration in which a longitudinal vibration of one wavelength and a flexural vibration due to a longitudinal vibration of 1.5 wavelengths are combined. It was confirmed that a trajectory was obtained.

[3] Summary By exciting simultaneously in one in-plane composite resonator provided with a flexural vibration generating means using two frequencies of longitudinal vibration of one wavelength and flexural vibration due to longitudinal vibration of 1.5 wavelengths, A complicated vibration trajectory that cannot be obtained by single mode vibration with a single frequency was obtained.

In addition to the above, using the finite element analysis software (ANSYS Mechanical ver. 11), the state of longitudinal vibration and flexural vibration of the fabricated in-plane composite resonator was analyzed. FIGS. 14A to 14D are views sequentially showing how the produced in-plane composite resonator is longitudinally oscillated in order. FIGS. 15A to 15D are views sequentially showing how the produced in-plane composite resonator is flexibly vibrated. 14 and 15 show the analysis of the longitudinal vibration and the flexural vibration individually, but actually, the longitudinal vibration shown in FIGS. 14 (a) to (d) and FIGS. 15 (a) to (d). A very complicated vibration is generated in combination with the flexural vibration shown in FIG.
In FIGS. 14 and 15, the formation angles of the respective weak portions as the flexural vibration generating means 3 and the flexural vibration canceling means 4 are shown in the opposite directions as in FIG. Even if the opening angle is opposite to that shown in FIG. 1, the effect is the same.

  Although the present invention has been described with reference to examples together with particularly preferred embodiments and various alternative embodiments, various changes in form and detail may be made without departing from the spirit and scope of the invention. It will be appreciated by those skilled in the art that this is possible. All published publications, etc. mentioned in this specification are hereby incorporated by reference.

1 is a perspective view showing a configuration of an in-plane composite resonator according to the present invention. It is a conceptual diagram which shows the structure of the in-plane composite resonance apparatus which concerns on this invention. It is a flowchart which shows the flow of the in-plane compound resonance method which concerns on this invention. It is the schematic explaining a mode that the vibration velocity distribution of a direction perpendicular | vertical to the side surface of the square bar provided with the slit is measured. It is a figure which shows the result of vibration displacement distribution measurement. It is a top view which shows a mode that the slit was provided in some in-plane composite resonators which are square rod shape. It is a fl _loop -fh curve graph. (A) is a top view of the produced in-plane composite resonator, (b) is a figure which shows the theoretical curve of the flexural vibration in the in-plane composite resonator shown to (a). It is a figure which shows the admittance circle | round | yen of the produced in-plane composite resonator. It is the schematic explaining a mode that the vibration velocity distribution of the direction perpendicular | vertical to the side surface of the produced in-plane composite resonator is measured. It is a figure which shows the result of having measured the vibration velocity distribution of the direction perpendicular | vertical to the side surface of the produced in-plane composite resonator. It is a conceptual diagram which shows the structure of the in-plane composite resonance apparatus produced in order to measure a vibration locus. It is a figure which shows the measurement result of the vibration locus | trajectory at the time of combining the longitudinal vibration of 1 wavelength and the flexural vibration by a 1.5 wavelength longitudinal vibration measured with the in-plane composite resonance apparatus of the structure shown in FIG. (A)-(d) is the figure which showed a mode that the produced in-plane composite resonator longitudinally vibrates in order. (A)-(d) is the figure which showed sequentially a mode that the produced in-plane composite resonator was bending-vibrated in order. It is an external view which shows an example of the resonator for obtaining a conventionally well-known composite vibration. It is a perspective view which shows another example of the resonator for obtaining the conventionally well-known composite vibration.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 In-plane composite resonator 2 Resonance part 3 Deflection vibration generation means 4 Deflection vibration cancellation means 5 One end part 6 Other end part 10 In-plane compound resonance apparatus 11 1st oscillator 12 2nd oscillator 13 Adder 14 Amplifier 15 Vibration Child S1 Voltage signal output step S2 Voltage signal addition step S3 Ultrasonic vibration oscillation step S4 In-plane composite resonance generation step

Claims (16)

An in-plane composite resonator having a resonance part that performs in-plane resonance that combines longitudinal vibration and flexural vibration,
The in-plane composite resonator includes a first frequency ultrasonic vibration that is a resonance frequency of the in-plane composite resonator, a second frequency ultrasonic vibration having a frequency different from the first frequency, and As it is excited by ultrasonic vibration that adds
Bending vibration generating means for generating the bending vibration from the ultrasonic vibration of the second frequency among the ultrasonic components of the longitudinal vibration is provided on the peripheral surface of the in-plane composite resonator. In-plane composite resonator.   2. The in-plane composite resonator according to claim 1, wherein the flexural vibration generating means is provided at a position that becomes a node of the ultrasonic vibration of the second frequency.   The in-plane composite resonator according to claim 1 or 2, wherein the flexural vibration generating means is a fragile portion.   The in-plane composite resonance according to claim 3, wherein two or more weak portions as the flexural vibration generating means are provided side by side in a direction perpendicular to a direction in which the longitudinal vibration is applied. body. The formation angle α of the slit-like fragile portion as the flexural vibration generating means is 40 to 50 ° in terms of an opening angle from the application direction of the longitudinal vibration. In-plane composite resonator.   6. The in-plane composite according to claim 3, wherein the weakened portion as the flexural vibration generating means is a slit-like through-hole penetrating the in-plane composite resonator. 6. Resonator.   6. The fragile portion as the flexural vibration generating means is a slit-shaped bottomed hole in which a part of the in-plane composite resonator is thinned. The in-plane composite resonator according to the item. Bending vibration canceling means for canceling the bending vibration generated by the bending vibration generating means is provided at a position that is another node different from the node of the ultrasonic vibration of the second frequency. The in-plane composite resonator according to any one of claims 1 to 7 . The in-plane composite resonator according to claim 8 , wherein the flexural vibration canceling means is a fragile portion. 10. The in-plane composite according to claim 9 , wherein two or more fragile portions as the flexural vibration canceling means are provided side by side in a direction perpendicular to a direction in which the longitudinal vibration is applied. Resonator. A slit-like fragile portion having a forming angle α is formed as the flexural vibration generating means,
The formation angle β of the slit-like fragile portion as the bending vibration canceling means is β = 180−α or β = α in terms of the opening angle from the application direction of the longitudinal vibration in relation to the formation angle α. The in-plane composite resonator according to claim 9 or 10 , wherein the condition is satisfied.   The in-plane according to any one of claims 8 to 11, wherein the fragile portion as the bending vibration canceling means is a slit-like through-hole penetrating the in-plane composite resonator. Composite resonator.   12. The fragile portion as the bending vibration canceling means is a slit-shaped bottomed hole in which a part of the in-plane composite resonator is thinned. The in-plane composite resonator according to item 1.   14. The ultrasonic vibration of the second frequency is 0.5n times the first frequency, and n is a number larger than 2, 14. The in-plane composite resonator according to item 1. An in-plane composite resonance apparatus using an in-plane composite resonator having a resonance part that performs in-plane resonance that combines longitudinal vibration and flexural vibration,
A first oscillator that outputs a first voltage signal for oscillating ultrasonic vibration of a first frequency;
A second oscillator that outputs a second voltage signal for oscillating ultrasonic vibration of a second frequency having a frequency different from the first frequency;
An adder that adds the first voltage signal input from the first oscillator and the second voltage signal input from the second oscillator to obtain an added voltage signal;
A vibrator that oscillates ultrasonic vibrations by the voltage signal added by the adder;
The in-plane composite resonator according to any one of claims 1 to 14 connected to the vibrator,
An in-plane composite resonance device comprising: An in-plane composite resonance method for generating in-plane resonance by combining longitudinal vibration and flexural vibration using the in-plane composite resonance apparatus according to claim 15 ,
The first oscillator outputs a first voltage signal for oscillating ultrasonic vibrations having a first frequency, and the second oscillator has a second frequency exceeding the first frequency. A voltage signal output step of outputting a second voltage signal for oscillating the sonic vibration;
A voltage signal adding step of adding a first voltage signal input from the first oscillator and a second voltage signal input from the second oscillator by an adder to obtain an added voltage signal; ,
An ultrasonic vibration oscillating step of causing a vibrator to oscillate longitudinally oscillating ultrasonic vibration by the voltage signal added by the adder;
The in-plane composite resonator according to any one of claims 1 to 14 connected to the vibrator is excited by the oscillated ultrasonic vibration to longitudinally vibrate, and the in-plane An in-plane composite resonance generating step of generating an in-plane resonance in which the longitudinal vibration and the flexural vibration are combined by generating the flexural vibration from the longitudinal vibration by a flexural vibration generating means provided in a composite resonator;
An in-plane composite resonance method comprising:

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