JPH0752437Y2 - 磁気浮上除振装置の除振制御器 - Google Patents

磁気浮上除振装置の除振制御器

Info

Publication number
JPH0752437Y2
JPH0752437Y2 JP14891U JP14891U JPH0752437Y2 JP H0752437 Y2 JPH0752437 Y2 JP H0752437Y2 JP 14891 U JP14891 U JP 14891U JP 14891 U JP14891 U JP 14891U JP H0752437 Y2 JPH0752437 Y2 JP H0752437Y2
Authority
JP
Japan
Prior art keywords
vibration isolation
vibration
magnetic
controller
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14891U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0493539U (OSRAM
Inventor
金光陽一
渡辺和英
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Kajima Corp
Original Assignee
Ebara Corp
Kajima Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Kajima Corp filed Critical Ebara Corp
Priority to JP14891U priority Critical patent/JPH0752437Y2/ja
Publication of JPH0493539U publication Critical patent/JPH0493539U/ja
Application granted granted Critical
Publication of JPH0752437Y2 publication Critical patent/JPH0752437Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Vibration Prevention Devices (AREA)
JP14891U 1991-01-08 1991-01-08 磁気浮上除振装置の除振制御器 Expired - Lifetime JPH0752437Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14891U JPH0752437Y2 (ja) 1991-01-08 1991-01-08 磁気浮上除振装置の除振制御器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14891U JPH0752437Y2 (ja) 1991-01-08 1991-01-08 磁気浮上除振装置の除振制御器

Publications (2)

Publication Number Publication Date
JPH0493539U JPH0493539U (OSRAM) 1992-08-13
JPH0752437Y2 true JPH0752437Y2 (ja) 1995-11-29

Family

ID=31726828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14891U Expired - Lifetime JPH0752437Y2 (ja) 1991-01-08 1991-01-08 磁気浮上除振装置の除振制御器

Country Status (1)

Country Link
JP (1) JPH0752437Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH0493539U (OSRAM) 1992-08-13

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