JPH0744020Y2 - ウエーハ容器におけるウエーハ支持板 - Google Patents
ウエーハ容器におけるウエーハ支持板Info
- Publication number
- JPH0744020Y2 JPH0744020Y2 JP1408989U JP1408989U JPH0744020Y2 JP H0744020 Y2 JPH0744020 Y2 JP H0744020Y2 JP 1408989 U JP1408989 U JP 1408989U JP 1408989 U JP1408989 U JP 1408989U JP H0744020 Y2 JPH0744020 Y2 JP H0744020Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support plate
- container
- wafers
- slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 105
- 230000000630 rising effect Effects 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 6
- 229920003002 synthetic resin Polymers 0.000 claims description 3
- 239000000057 synthetic resin Substances 0.000 claims description 3
- 238000011109 contamination Methods 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 210000000988 bone and bone Anatomy 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1408989U JPH0744020Y2 (ja) | 1989-02-10 | 1989-02-10 | ウエーハ容器におけるウエーハ支持板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1408989U JPH0744020Y2 (ja) | 1989-02-10 | 1989-02-10 | ウエーハ容器におけるウエーハ支持板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02106831U JPH02106831U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-08-24 |
| JPH0744020Y2 true JPH0744020Y2 (ja) | 1995-10-09 |
Family
ID=31224973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1408989U Expired - Lifetime JPH0744020Y2 (ja) | 1989-02-10 | 1989-02-10 | ウエーハ容器におけるウエーハ支持板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0744020Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6267245B1 (en) * | 1998-07-10 | 2001-07-31 | Fluoroware, Inc. | Cushioned wafer container |
| SG184004A1 (en) | 2010-03-11 | 2012-10-30 | Entegris Inc | Thin wafer shipper |
| JP5441797B2 (ja) * | 2010-04-05 | 2014-03-12 | 信越ポリマー株式会社 | リテーナ及び基板収納容器 |
| US11101155B2 (en) | 2017-04-05 | 2021-08-24 | Miraial Co., Ltd. | Board storing container |
-
1989
- 1989-02-10 JP JP1408989U patent/JPH0744020Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02106831U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-08-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |