JPH0742084Y2 - 表面形状測定器 - Google Patents

表面形状測定器

Info

Publication number
JPH0742084Y2
JPH0742084Y2 JP10005590U JP10005590U JPH0742084Y2 JP H0742084 Y2 JPH0742084 Y2 JP H0742084Y2 JP 10005590 U JP10005590 U JP 10005590U JP 10005590 U JP10005590 U JP 10005590U JP H0742084 Y2 JPH0742084 Y2 JP H0742084Y2
Authority
JP
Japan
Prior art keywords
light
interference
measuring
order diffracted
acousto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP10005590U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0457706U (enrdf_load_stackoverflow
Inventor
克巳 磯崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP10005590U priority Critical patent/JPH0742084Y2/ja
Publication of JPH0457706U publication Critical patent/JPH0457706U/ja
Application granted granted Critical
Publication of JPH0742084Y2 publication Critical patent/JPH0742084Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP10005590U 1990-09-25 1990-09-25 表面形状測定器 Expired - Fee Related JPH0742084Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10005590U JPH0742084Y2 (ja) 1990-09-25 1990-09-25 表面形状測定器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10005590U JPH0742084Y2 (ja) 1990-09-25 1990-09-25 表面形状測定器

Publications (2)

Publication Number Publication Date
JPH0457706U JPH0457706U (enrdf_load_stackoverflow) 1992-05-18
JPH0742084Y2 true JPH0742084Y2 (ja) 1995-09-27

Family

ID=31842414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10005590U Expired - Fee Related JPH0742084Y2 (ja) 1990-09-25 1990-09-25 表面形状測定器

Country Status (1)

Country Link
JP (1) JPH0742084Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5924166B2 (ja) * 2012-07-09 2016-05-25 株式会社島津製作所 波長可変単色光光源

Also Published As

Publication number Publication date
JPH0457706U (enrdf_load_stackoverflow) 1992-05-18

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