JPH0742084Y2 - 表面形状測定器 - Google Patents
表面形状測定器Info
- Publication number
- JPH0742084Y2 JPH0742084Y2 JP10005590U JP10005590U JPH0742084Y2 JP H0742084 Y2 JPH0742084 Y2 JP H0742084Y2 JP 10005590 U JP10005590 U JP 10005590U JP 10005590 U JP10005590 U JP 10005590U JP H0742084 Y2 JPH0742084 Y2 JP H0742084Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- interference
- measuring
- order diffracted
- acousto
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003595 spectral effect Effects 0.000 claims description 14
- 238000004611 spectroscopical analysis Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 4
- 238000005259 measurement Methods 0.000 description 25
- 238000010586 diagram Methods 0.000 description 6
- 230000010287 polarization Effects 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10005590U JPH0742084Y2 (ja) | 1990-09-25 | 1990-09-25 | 表面形状測定器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10005590U JPH0742084Y2 (ja) | 1990-09-25 | 1990-09-25 | 表面形状測定器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0457706U JPH0457706U (enrdf_load_stackoverflow) | 1992-05-18 |
JPH0742084Y2 true JPH0742084Y2 (ja) | 1995-09-27 |
Family
ID=31842414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10005590U Expired - Fee Related JPH0742084Y2 (ja) | 1990-09-25 | 1990-09-25 | 表面形状測定器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0742084Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5924166B2 (ja) * | 2012-07-09 | 2016-05-25 | 株式会社島津製作所 | 波長可変単色光光源 |
-
1990
- 1990-09-25 JP JP10005590U patent/JPH0742084Y2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0457706U (enrdf_load_stackoverflow) | 1992-05-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2553276B2 (ja) | 3波長光学測定装置及び方法 | |
US7259860B2 (en) | Optical feedback from mode-selective tuner | |
CN110361099B (zh) | 一种谱域低相干光干涉光程差解调方法 | |
JPS63502778A (ja) | 物理量を遠隔検出するためのオプトエレクトロニック検出装置 | |
JPH07311182A (ja) | 光熱変位計測による試料評価方法 | |
JPS61202128A (ja) | 半導体レ−ザヘテロダイン干渉計 | |
KR101987402B1 (ko) | 편광픽셀어레이를 이용한 박막과 후막의 두께 및 삼차원 표면 형상 측정 광학 장치 | |
KR20130039005A (ko) | 3차원 형상 및 두께 측정 장치 | |
JP2009025245A (ja) | 光干渉観測装置 | |
US20170241766A1 (en) | System for analyzing optical properties of an object | |
JP2004144581A (ja) | 変位検出装置 | |
KR101251292B1 (ko) | 편광을 이용한 3차원 형상 및 두께 측정 장치 | |
JP2732849B2 (ja) | 干渉測長器 | |
US20140160490A1 (en) | Interference measuring apparatus and interference measuring method | |
JP2002333371A (ja) | 波長計 | |
JPH0742084Y2 (ja) | 表面形状測定器 | |
Dandliker et al. | Two-wavelength laser interferometry using super-heterodyne detection | |
JP2007132727A (ja) | 干渉測定装置 | |
RU2085843C1 (ru) | Оптический профилометр | |
US6816264B1 (en) | Systems and methods for amplified optical metrology | |
JP2001272216A (ja) | 角分散光ヘテロダインプロフィロメトリー装置 | |
JP3634327B2 (ja) | 光波長分散空間干渉断層画像化装置 | |
RU2085840C1 (ru) | Оптический профилометр | |
JPS61501876A (ja) | インタ−フェログラムのためのサンプル信号発生装置および方法 | |
JPS6350703A (ja) | 膜厚測定装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees | ||
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R323115 |
|
R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |