JPH0740523Y2 - 真空蒸着装置 - Google Patents
真空蒸着装置Info
- Publication number
- JPH0740523Y2 JPH0740523Y2 JP2386490U JP2386490U JPH0740523Y2 JP H0740523 Y2 JPH0740523 Y2 JP H0740523Y2 JP 2386490 U JP2386490 U JP 2386490U JP 2386490 U JP2386490 U JP 2386490U JP H0740523 Y2 JPH0740523 Y2 JP H0740523Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum pressure
- dome
- vapor deposition
- pressure gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001771 vacuum deposition Methods 0.000 title description 5
- 238000007740 vapor deposition Methods 0.000 claims description 19
- 239000010408 film Substances 0.000 description 19
- 239000007789 gas Substances 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 238000009530 blood pressure measurement Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000007738 vacuum evaporation Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 101001056108 Xenopus laevis Protein max Proteins 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2386490U JPH0740523Y2 (ja) | 1990-03-09 | 1990-03-09 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2386490U JPH0740523Y2 (ja) | 1990-03-09 | 1990-03-09 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03115661U JPH03115661U (enrdf_load_stackoverflow) | 1991-11-29 |
| JPH0740523Y2 true JPH0740523Y2 (ja) | 1995-09-20 |
Family
ID=31526845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2386490U Expired - Lifetime JPH0740523Y2 (ja) | 1990-03-09 | 1990-03-09 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740523Y2 (enrdf_load_stackoverflow) |
-
1990
- 1990-03-09 JP JP2386490U patent/JPH0740523Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03115661U (enrdf_load_stackoverflow) | 1991-11-29 |
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