JPH0740166Y2 - シート状物質の厚さ測定装置 - Google Patents

シート状物質の厚さ測定装置

Info

Publication number
JPH0740166Y2
JPH0740166Y2 JP1989037149U JP3714989U JPH0740166Y2 JP H0740166 Y2 JPH0740166 Y2 JP H0740166Y2 JP 1989037149 U JP1989037149 U JP 1989037149U JP 3714989 U JP3714989 U JP 3714989U JP H0740166 Y2 JPH0740166 Y2 JP H0740166Y2
Authority
JP
Japan
Prior art keywords
substance
measured
thickness
chamber
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989037149U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02128910U (enExample
Inventor
武志 植田
豊 斎藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1989037149U priority Critical patent/JPH0740166Y2/ja
Publication of JPH02128910U publication Critical patent/JPH02128910U/ja
Application granted granted Critical
Publication of JPH0740166Y2 publication Critical patent/JPH0740166Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
JP1989037149U 1989-03-30 1989-03-30 シート状物質の厚さ測定装置 Expired - Lifetime JPH0740166Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989037149U JPH0740166Y2 (ja) 1989-03-30 1989-03-30 シート状物質の厚さ測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989037149U JPH0740166Y2 (ja) 1989-03-30 1989-03-30 シート状物質の厚さ測定装置

Publications (2)

Publication Number Publication Date
JPH02128910U JPH02128910U (enExample) 1990-10-24
JPH0740166Y2 true JPH0740166Y2 (ja) 1995-09-13

Family

ID=31543999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989037149U Expired - Lifetime JPH0740166Y2 (ja) 1989-03-30 1989-03-30 シート状物質の厚さ測定装置

Country Status (1)

Country Link
JP (1) JPH0740166Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2555256Y2 (ja) * 1991-08-01 1997-11-19 文男 東條 シート厚みの計測装置
DE102006022882B4 (de) * 2006-05-15 2016-04-14 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Vorrichtung zum Messen der Dicke dünner Schichten mit einer Messsonde

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4449398A (en) 1982-06-24 1984-05-22 Accuray Corporation Sheet property sensor with sheet wrinkle remover

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6260747A (ja) * 1985-09-07 1987-03-17 Hiroshi Akashi 無接触支持装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4449398A (en) 1982-06-24 1984-05-22 Accuray Corporation Sheet property sensor with sheet wrinkle remover

Also Published As

Publication number Publication date
JPH02128910U (enExample) 1990-10-24

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