JPH0739048U - Photo tool holder in exposure apparatus - Google Patents

Abstract

(57) [Summary] [Object] To provide a phototool holder in an exposure apparatus capable of changing the size of a frame. [Structure] Both ends of the first movable frame 1 and the second movable frame 2 are slidably mounted on a base frame 3, and by sliding the first movable frame 1 and the second movable frame 2, an arbitrary size can be obtained. The frame of can be formed. The photo tool F is attached to this frame.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 This invention relates to a photo tool holder in an exposure apparatus.

[0002]

[Prior art]

 In the manufacture of printed circuit boards and the like, a lithographic method has recently been used in which a circuit pattern is printed on a substrate using an exposure apparatus. A photo tool having a circuit pattern is attached to the exposure device, and the photo tool is held by a holder and then brought into close contact with k to perform exposure.

[0003]

[Problems to be solved by the device]

 However, since there are various sizes of photo tools, it is conventionally necessary to prepare a large number of holders according to the size of the photo tool, and the holders must be replaced each time the size of the photo tool changes. There was a problem that it took time to do. The present invention aims to solve the above-mentioned problems of the prior art.

[0004]

[Means for Solving the Problems]

 In order to achieve the above object, a photo tool holder in an exposure apparatus of the present invention comprises a base frame, a pair of first movable frames whose both ends are slidably provided on the base frame, and both ends of the base frame. The part is provided with a pair of second movable frames slidably provided in a direction orthogonal to the first movable frame.

[0005]

[Action]

 By sliding the first movable frame and the second movable frame, the size of the frame can be arbitrarily changed, and phototools of different sizes can be dealt with.

[0006]

【Example】

 An embodiment of the present invention will be described below with reference to the drawings. FIG. 7 shows the entire structure of the pressure exposure apparatus. The substrate K to be exposed is placed on a base 20 that can be rotated, moved up and down, and moved in the x and y directions. The phototool F held by the holder A is set on the substrate K, the phototool F and the substrate K are aligned by the CCD camera 22, and the substrate K and the phototool F are raised by raising the base 20. It is designed to be touched. Then, the pressurizing film P is inflated to bring the phototool F into close contact with the substrate K, and then light is emitted from the light source 21 for exposure.

As shown in FIG. 1, the holder A includes a rectangular base frame 3, a pair of first movable frames 1 and a pair of second movable frames 2 mounted on the base frame 3. The first movable frame 1 is adapted to slide vertically in the drawing. On the other hand, the second movable frame 2 slides in the left-right direction in the figure, and the size of the frame formed by the first movable frame 1 and the second movable frame 2 can be arbitrarily changed according to the slide. It is designed to be used.

FIG. 1 shows a state in which the first movable frame 1 and the second movable frame 2 are closest to the base frame 3 side, and the frame formed by the first movable frame 1 and the second movable frame 2 is the largest. It is sized. On the other hand, FIG. 2 shows a state in which the first movable frame 1 and the second movable frame 2 are closest to the center, and it can be seen that the size of the frame is reduced. The photo tool F is attached to the frame formed by the first movable frame 1 and the second movable frame 2 with tape or the like and fixed. Instead of tape or the like, any other fixing means may be used.

The first movable frame 1 and the second movable frame 2 are slidably supported by the base frame 3 at their ends. A slide groove 31 is formed on the back surface side of the base frame 3 as shown in FIGS. 3 to 5, and the end portions of the first movable frame 1 and the second movable frame 2 slide in the slide groove 31. ing. As shown in FIG. 1, the slide groove 31 is provided at a predetermined distance from the end portion of the base frame 3, and the first movable frame 1 and the second movable frame 2 can slide by the length of the slide groove 31. It has become.

As shown in FIG. 4, slide pieces 5 are attached to the upper end sides of the first movable frame 1 and the second movable frame 2, respectively, to improve the strength and to fix them with a fixed piece 6. Forming a fixed part. The first movable frame 1 and the second movable frame 2 are fixed to the lower surface side of the slide piece 5 by a plurality of setscrews 7, as shown in FIG.

As shown in FIG. 4, a slit 30 is formed on the upper surface side of the slide groove 31, and the fixed piece 6 is loosely fitted in the slit 30. The head portion of the fixed piece 6 is wider than the slit 30 and is in contact with the upper surface of the base frame 3. A bolt 60 is attached to the fixed piece 6, and a female screw 50 is formed on the slide piece 5 at a position facing the bolt 60. Then, the bolt 60 is screwed into the female screw 50 and tightened so that the head frame of the fixed piece 6 and the slide piece 5 sandwich the base frame 3 to fix the first movable frame 1 or the second movable frame 2. Has become.

As shown in FIG. 3, graduations 32 and numbers are written on the sides of the slit 30 so that the first movable frame 1 and the second movable frame 2 can be easily aligned.

As the material of the first movable frame 1 and the second movable frame 2, it is desirable to use a thin plate having a rigidity of a predetermined level or more. In the case of a pressure type exposure apparatus that uses the pressure film P, as the first movable frame 1 or the second movable frame 2 becomes thinner, the gap B formed between the pressure film P and the phototool F becomes smaller as shown in FIG. Get smaller. Therefore, there is an advantage that the pressure film P is evenly pressed to the end portion of the photo tool F and the adhesion to the substrate K is improved. The lower part of FIG. 6 shows a case where the photo tool F is directly attached to the base frame 3 ′ as in the conventional case, and the problem that the gap B ′ becomes large and the area not pressed by the pressure film P becomes large. is there.

In the configuration described above, the first movable frame 1 and the second movable frame 2 are slid, the bolt 60 is tightened at an arbitrary position, and the slide piece 5 is fixed, whereby the first movable frame 1 and the second movable frame 1 are fixed. A frame of any size formed by the second movable frame 2 can be formed. A photo tool F is attached to this frame using a tape or the like, and the frame is attached to an exposure device to perform exposure. Therefore, it is not necessary to prepare the holder A corresponding to the size of the photo tool F, and the cost can be reduced.

[0015]

[Effect of device]

 As described above, the photo tool holder in the exposure apparatus of the present invention includes a base frame, a pair of first movable frames whose both ends are slidably provided on the base frame, and both ends of the base frame. Since the first movable frame includes a pair of second movable frames that are slidable in a direction orthogonal to the first movable frame, the first movable frame and the second movable frame can be slid to form a frame. The size of can be changed arbitrarily, and different size photo tools can be dealt with.

[Brief description of drawings]

FIG. 1 is a plan view showing an embodiment of the present invention.

FIG. 2 is a plan view showing an embodiment of the present invention.

FIG. 3 is a partially enlarged view showing an embodiment of the present invention.

FIG. 4 is a sectional view taken along the line Aa in FIG.

FIG. 5 is a sectional view taken along the line E-I in FIG.

FIG. 6 is a comparative explanatory view of a contact state between a pressure film P and a photo tool F.

FIG. 7 is a schematic front view of a pressure exposure apparatus.

[Explanation of symbols]

1: First movable frame, 2: Second movable frame, 3: Base frame, 5: Slide piece, 6: Fixed piece, 7: Set screw, 20: Base, 2
1: Light source, 22: CCD camera, 30: Slit, 3
1: slide groove, 32: scale, 50: female screw, 60: bolt.

[Procedure amendment]

[Submission date] May 10, 1994

[Procedure Amendment 1]

[Document name to be corrected] Drawing

[Correction target item name] All drawings

[Correction method] Change

[Correction content]

[Figure 1]

[Fig. 2]

[Figure 3]

[Figure 4]

[Figure 5]

[Figure 6]

[Figure 7]

Claims (3)

[Scope of utility model registration request] 1. A base frame, and a pair of first ends slidably provided on the base frame.
A movable frame, and a pair of second movable frames whose both ends are slidably provided in the base frame in a direction orthogonal to the first movable frame. Tool holder. 2. A photo tool holder in an exposure apparatus according to claim 1, further comprising a fixture for fixing the first and second movable frames at arbitrary positions of a base frame. 3. A phototool holder in an exposure apparatus according to claim 1, wherein the first and second movable frames are made of a material thinner than the base frame.