JPH0737494A - Method for forming field sheilding transparent conductive film - Google Patents

Method for forming field sheilding transparent conductive film

Info

Publication number
JPH0737494A
JPH0737494A JP20205393A JP20205393A JPH0737494A JP H0737494 A JPH0737494 A JP H0737494A JP 20205393 A JP20205393 A JP 20205393A JP 20205393 A JP20205393 A JP 20205393A JP H0737494 A JPH0737494 A JP H0737494A
Authority
JP
Japan
Prior art keywords
film
conductive film
transparent conductive
electric field
field shielding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20205393A
Other languages
Japanese (ja)
Inventor
Kenji Adachi
健治 足立
Atsushi Yamanaka
厚志 山中
Junji Tofuku
淳司 東福
Keiichi Orita
桂一 折田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal Mining Co Ltd
Tohoku Chemical Industries Ltd
Original Assignee
Sumitomo Metal Mining Co Ltd
Tohoku Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Mining Co Ltd, Tohoku Chemical Industries Ltd filed Critical Sumitomo Metal Mining Co Ltd
Priority to JP20205393A priority Critical patent/JPH0737494A/en
Publication of JPH0737494A publication Critical patent/JPH0737494A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a method for forming a transparent conductive film, which is appropriate for the field shielding effect and for preventing the reflection, on a CRT front glass by means by of a ink applying method. CONSTITUTION:A CRT front glass is coated with the field shielding liquid, which is obtained by dispersing ITO powder of mean grain diameter of 50nm or less and alkylsilicate in a polar solvent including N-methyl-2 pyrrolydinone, and dried, Thereafter, it is over-coated with a solution including alkylsilicate, and burned in the atmosphere at 200-350C or in inert gas atmosphere and reducing gas atmosphere at 200-450C.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、OA機器のディスプレ
イ、テレビジョンのブラウン管などの陰極線管の前面ガ
ラスに電界シールド効果を付与するための透明導電膜形
成方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a transparent conductive film for imparting an electric field shield effect to a front glass of a cathode ray tube such as a display of an office automation equipment or a cathode ray tube of a television.

【0002】[0002]

【従来の技術】テレビジョンのブラウン管の表面には、
静電気帯電によるホコリが付着しやすく、また人体が接
触した時に放電して電気ショックを受けるため、帯電防
止の処理を施すことは古くから知られている。静電気帯
電に伴う問題は、陰極線管(以下CRTという)ガラス
表面に導電膜を付してアースすることにより解決され、
表面抵抗で108 Ω/□程度の導電性が要求される。こ
こにおける導電膜は、画面の透明性や解像度を損うもの
であってはならない。すなわち膜中を通過する光の拡散
透過の量が極力少ないことが望ましく、実用CRTに対
しては、拡散透過光の直接透過光に対する百分率で定義
されるヘイズ値が、おおよそ5%以下の極力少ない値で
あることが要求される。ヘイズを減らすには、膜中の光
散乱源が少ないとともに、膜厚ができるだけ薄いことが
必要である。また画像を見やすくするためには、CRT
表面に防眩処理を施して、画面の反射を押さえることが
望ましい。
2. Description of the Related Art On the surface of a television cathode ray tube,
It has been known for a long time that antistatic treatment is performed because dust due to electrostatic charging is apt to adhere, and when a human body comes into contact with it, it discharges and receives an electric shock. The problems associated with electrostatic charging are solved by attaching a conductive film to the glass surface of a cathode ray tube (hereinafter referred to as CRT) and grounding it.
A surface resistance of about 10 8 Ω / □ is required. The conductive film here should not impair the transparency and resolution of the screen. That is, it is desirable that the amount of diffuse transmission of light passing through the film is as small as possible, and for a practical CRT, the haze value defined by the percentage of the diffuse transmission light with respect to the direct transmission light is as small as approximately 5% or less. It is required to be a value. In order to reduce the haze, it is necessary that the light scattering source in the film is small and the film thickness is as thin as possible. Also, to make the image easier to see, a CRT
It is desirable to apply antiglare treatment to the surface to suppress reflection on the screen.

【0003】TVの大型化に伴って益々大きな電磁界が
周囲に漏れる傾向にあり、電界の漏洩に対する対応は、
帯電防止と同様に、CRTガラス表面に導電性の透明被
膜を形成することにより防止できる。しかし電界シール
ドと帯電防止とでは、被膜に要求される導電性のレベル
には大きな差があり、帯電防止には表面抵抗で108Ω
/□程度で十分とされているが、漏洩電界を防ぐために
は少なくとも105 Ω/□以下、好ましくは103 Ω/
□台の低抵抗の透明膜を形成する必要がある。
With the increase in size of TVs, an increasingly large electromagnetic field tends to leak to the surroundings.
Similar to antistatic, it can be prevented by forming a conductive transparent film on the surface of the CRT glass. However, there is a large difference in the level of conductivity required for the film between the electric field shield and the antistatic property, and the surface resistance is 10 8 Ω for the antistatic property.
Although about / □ is sufficient, at least 10 5 Ω / □ or less, preferably 10 3 Ω / □ to prevent a leakage electric field.
□ It is necessary to form a low resistance transparent film on the table.

【0004】[0004]

【発明が解決しようとする課題】上記の要求に対応する
ため、従来よりいくつかの提案が為されているが、その
中でも低コストで低い表面抵抗を実現できるものとし
て、本発明者等はアルキルシリケートとN−メチル−2
−ピロリジノンを主成分とする極性溶媒中に、錫を1〜
10重量%含有した平均粒径50nm以下のインジウム
錫酸化物粉末を1〜15重量%分散させた電界シールド
用処理液を特許出願した(特願平4−307189
号)。この処理液をCRT前面ガラスに塗布・乾燥後、
200℃以下の温度で焼成することにより、103 〜1
4 Ω/□の表面抵抗値が得られる。このインク塗布法
は、真空蒸着やスパッタ法などの他の透明導電膜形成方
法に比べてはるかに簡便であって製造コストも低く、C
RTの電界シールドへの対応としては極めて有利な方法
である。しかしながら得られる表面抵抗値においては、
蒸着法、スパッタリング法などに比べてやや劣るという
欠点がある。
In order to meet the above requirements, several proposals have been made in the past, but among them, the present inventors have found that it is possible to realize low surface resistance at low cost. Silicate and N-methyl-2
-In a polar solvent containing pyrrolidinone as a main component, 1 to 1 tin is added.
A patent application was filed for a treatment liquid for electric field shielding in which 1 to 15 wt% of indium tin oxide powder containing 10 wt% and having an average particle size of 50 nm or less was dispersed (Japanese Patent Application No. 4-307189).
issue). After applying this treatment liquid to the CRT front glass and drying it,
By firing at a temperature of 200 ° C. or less, 10 3 to 1
A surface resistance value of 0 4 Ω / □ is obtained. This ink coating method is much simpler and has a lower manufacturing cost than other transparent conductive film forming methods such as vacuum deposition and sputtering, and C
This is an extremely advantageous method for dealing with the electric field shield of RT. However, in the surface resistance value obtained,
It has a drawback that it is slightly inferior to the vapor deposition method and the sputtering method.

【0005】本発明は、CRT前面ガラスに適用した時
に、電界シールド効果に十分な低い表面抵抗値を有し、
且つヘイズ値が低く、反射防止に適した高い屈折率を持
つ透明導電膜の形成方法を提供することを目的とする。
The present invention, when applied to a CRT front glass, has a sufficiently low surface resistance value for the electric field shielding effect,
Another object of the present invention is to provide a method for forming a transparent conductive film having a low haze value and a high refractive index suitable for antireflection.

【0006】[0006]

【課題を解決するための手段】上記課題を達成するため
に種々検討の結果、焼成温度に着目して本発明を為すに
至った。すなわち、本発明は平均粒径50nm以下のイ
ンジウム錫酸化物粉末と、アルキルシリケートとを、N
−メチル−2ピロリジノンを含む極性溶媒に分散させた
電界シールド用処理液を、CRT前面ガラスに塗布、乾
燥した後、アルキルシリケートを含む溶液をオーバーコ
ートし、次いで大気中200〜350℃の温度範囲で焼
成するか又は不活性ガス、還元性ガス雰囲気中200〜
450℃の温度範囲で焼成することを特徴とする。
As a result of various studies for achieving the above-mentioned object, the present invention has been accomplished by paying attention to the firing temperature. That is, in the present invention, an indium tin oxide powder having an average particle size of 50 nm or less and an alkyl silicate are mixed with N
-A treatment liquid for electric field shielding dispersed in a polar solvent containing methyl-2pyrrolidinone is applied to a CRT front glass and dried, and then a solution containing an alkyl silicate is overcoated, and then a temperature range of 200 to 350 ° C in the atmosphere. Or by firing in an inert gas or reducing gas atmosphere
It is characterized by firing in a temperature range of 450 ° C.

【0007】[0007]

【作用】本発明において、ITO粉末の平均粒径が50
nm以下であるのはITO粉末が膜中に分散した場合、
膜を通過する光の散乱はほとんどがいわゆるRayle
igh散乱又はMie散乱のモードとなり、物体の透明
性は極めて高くなり、ヘイズ値も実用的レベルの3%以
下に下がるからである。ITO粉末は電界シールド処理
液中に1〜15重量%含有することが好ましい。
In the present invention, the ITO powder has an average particle size of 50.
When the ITO powder is dispersed in the film, it is below nm.
Most of the scattering of light passing through the membrane is the so-called Rayle.
This is because it becomes a mode of high scattering or Mie scattering, the transparency of the object becomes extremely high, and the haze value falls to 3% or less of the practical level. The ITO powder is preferably contained in the electric field shield treatment liquid in an amount of 1 to 15% by weight.

【0008】また、アルキルシリケートは、ITO粉を
ガラス表面上に結合固定するためのものであって、この
ようなアルキルシリケートとしては、例えばオルトアル
キルシリケート或いはこれを加水分解してある程度脱水
縮重合を進行させた形のものなどが使用される。オルト
アルキルシリケートとしては、例えばオルトメチルシリ
ケートSi(OCH3 4 、オルトエチルシリケートS
i(OC2 5 4 、オルトプロピルシリケートSi
(OC3 7 4 、オルトブチルシリケートSi(OC
4 9 4 などを使用することができ、また2種類以上
のアルキル基を同一分子内に有するオルトアルキルシリ
ケートでも良い。また2種類以上のアルキルオルトシリ
ケートを混合して使用しても差し支えない。オルトアル
キルシリケートは、水分があると容易に加水分解を受け
てアルコキシル基が水酸基となり、更に水酸基同志から
水がとれて脱水縮重合を起こして重合していくが、この
ようにある程度脱水縮合が進んでいるものもアルキルシ
リケートとして使用することができる。要するに加熱に
より脱水縮重合が進行し、最終的にシリケートの形でI
TO粉をガラス表面上に固定させる能力を有すればよ
い。なお脱水縮重合反応を進行させるために、少量の水
分や反応促進剤として塩酸や硫酸のような酸を共存させ
ると良い。アルキルシリケートは処理液中に0.1〜6
重量%含有することが好ましい。
The alkyl silicate is used to bond and fix the ITO powder on the glass surface. As such an alkyl silicate, for example, an orthoalkyl silicate or a hydrolyzate thereof is subjected to dehydration polycondensation to some extent. The advanced form is used. Examples of orthoalkyl silicates include orthomethyl silicate Si (OCH 3 ) 4 and orthoethyl silicate S.
i (OC 2 H 5 ) 4 , orthopropyl silicate Si
(OC 3 H 7 ) 4 , orthobutyl silicate Si (OC
4 H 9 ) 4 or the like can be used, and an orthoalkyl silicate having two or more kinds of alkyl groups in the same molecule may be used. Further, two or more kinds of alkyl orthosilicates may be mixed and used. Orthoalkyl silicates are easily hydrolyzed in the presence of water and the alkoxyl groups become hydroxyl groups, and water is removed from the hydroxyl groups to cause dehydration polycondensation and polymerize. Those that are exposed can also be used as the alkyl silicate. In short, dehydration polycondensation progresses by heating, and finally in the form of silicate I
It suffices that it has the ability to fix the TO powder on the glass surface. In order to proceed the dehydration polycondensation reaction, a small amount of water or an acid such as hydrochloric acid or sulfuric acid as a reaction accelerator is preferably allowed to coexist. Alkyl silicate is 0.1 to 6 in the processing liquid.
It is preferable to contain it by weight%.

【0009】極性溶媒としては、焼成温度以下の適当な
沸点をもち、ITO粒子を効率良く分散し得るものであ
ればよく、N−メチル−2−ピロリジノンと例えば、エ
タノール、イソプロピルアルコール、ジメチルフォルム
アミド(DMF)、ジメチルアセトアミド、メチルセロ
ソルブ、ジアセトンアルコール、アセトン、テトラヒド
ロキシフランなどとの混液を好ましい例として挙げるこ
とができる。N−メチル−2−ピロリジノンは、ITO
粉末の分散を助長するために使用され、電界シールド処
理液中に1〜20重量%含有することが好ましい。
Any polar solvent may be used as long as it has an appropriate boiling point below the firing temperature and can disperse ITO particles efficiently. For example, N-methyl-2-pyrrolidinone and ethanol, isopropyl alcohol or dimethylformamide may be used. A preferable example is a mixed solution of (DMF), dimethylacetamide, methyl cellosolve, diacetone alcohol, acetone, tetrahydroxyfuran and the like. N-methyl-2-pyrrolidinone is ITO
It is used to promote the dispersion of the powder and is preferably contained in the electric field shield treatment liquid in an amount of 1 to 20% by weight.

【0010】本発明において、焼成温度を大気中200
〜350℃とするのは、アルキルシリケートのゲル縮重
合化、あるいは乾燥が完了すると共に形成される透明導
電膜がさらに収縮するので、ITO微粒子の充填密度が
上がり、このため導電パス密度が増加し、表面抵抗値が
下がるからである。また、ITO微粒子間の接触状態も
溶媒成分の蒸発に伴い改善されて、表面抵抗値の経時変
化も小さくなる。焼成温度が200℃未満では表面抵抗
値が向上しなく、350℃を越えるとすでに還元処理し
て酸素欠損を導入してあるITO粉が酸化され、導電性
が下がるため表面抵抗値が高くなるからである。
In the present invention, the firing temperature is set to 200 in the atmosphere.
The temperature of ˜350 ° C. causes the shrinkage of the transparent conductive film formed as the polycondensation polymerization of the alkyl silicate or the drying is completed, so that the packing density of the ITO fine particles increases and the conductive path density increases accordingly. , Because the surface resistance value decreases. Further, the contact state between the ITO fine particles is also improved with the evaporation of the solvent component, and the change of the surface resistance value with time is also reduced. If the firing temperature is less than 200 ° C, the surface resistance value does not improve, and if it exceeds 350 ° C, the ITO powder that has already undergone a reduction treatment to introduce oxygen vacancies is oxidized and the conductivity decreases, so the surface resistance value increases. Is.

【0011】また、焼成温度を不活性ガスあるいは還元
性ガス雰囲気中200〜450℃とするのは、200℃
未満では表面抵抗値が向上しなく、450℃を越えると
CRTのガラス軟化点以上になるからである。
Further, the firing temperature is set to 200 to 450 ° C. in an inert gas or reducing gas atmosphere at 200 ° C.
If it is less than 450 ° C., the surface resistance will not be improved, and if it exceeds 450 ° C., it will be higher than the glass softening point of CRT.

【0012】本発明において、アルキルシリケートを含
む溶液をオーバーコートし、CRT表面にITO微粒子
を含むITO膜とシリケート膜との二層構造を形成する
のは、ITO膜とシリケート膜の屈折率差により、CR
T表面の反射率を低減することができるからである。さ
らに高温で焼成することによりITO膜中のITO微粒
子の充填密度が上がるのでITO膜の屈折率は大きくな
り、反射防止効果を高めることができる。
In the present invention, a solution containing an alkyl silicate is overcoated to form a two-layer structure of an ITO film containing ITO fine particles and a silicate film on the CRT surface because of the difference in refractive index between the ITO film and the silicate film. , CR
This is because the reflectance of the T surface can be reduced. By firing at a higher temperature, the packing density of the ITO fine particles in the ITO film increases, so that the refractive index of the ITO film increases and the antireflection effect can be enhanced.

【0013】また、ITO膜上にシリケート膜を形成し
たので、高温で焼成することにより、ゲルの縮重合反応
と乾燥化が完了し、このためCRT表面の硬度も増加す
る。
Further, since the silicate film is formed on the ITO film, the polycondensation reaction and the drying of the gel are completed by firing at a high temperature, which increases the hardness of the CRT surface.

【0014】[0014]

【実施例】以下、本発明の実施例を示す。形成した膜の
膜厚と屈折率は、溝尻光学工業所製エリプソメータで測
定した。表面抵抗は、三菱油化(株)製表面抵抗計MC
P−T200を用いて測定した。ヘイズ値と透過率は村
上色彩技術研究所製ヘイズメータHR−200を用いて
測定した。
EXAMPLES Examples of the present invention will be shown below. The film thickness and the refractive index of the formed film were measured by an ellipsometer manufactured by Mizojiri Optical Co., Ltd. Surface resistance is Mitsubishi Yuka Co., Ltd. surface resistance meter MC
It measured using P-T200. The haze value and the transmittance were measured using a haze meter HR-200 manufactured by Murakami Color Research Laboratory.

【0015】(実施例1)比表面積27.5cm2 、平
均粒径25.3nm(透過電子顕微鏡で評価)の、住友
金属鉱山(株)製ITO超微粉(ITO−UFP)を1
5g、N−メチル−2−ピロリドン(NMP)を20
g、N,N−ジメチルフォルムアミド(DMF)を7
g、及び4−ヒドロキシ−4−メチル−2−ペンタノン
(ジアセトンアルコール)70gを混合し、ITO分散
溶液を作製した。一方平均重合度で4〜5量体である多
摩化学工業製エチルシリケート40を1.5g、ジアセ
トンアルコール16g、蒸留水1.5gの混合溶液を攪
拌しながら、5%塩酸水溶液3g、ジアセトンアルコー
ル2g、蒸留水2.4gの混合溶液を滴下して、エチル
シリケート溶液を調整した。ITO分離溶液とエチルシ
リケート溶液の2液を混合し、150rpmで回転する
と200×200×3mmの板ガラス上にビーカから滴
下した。
Example 1 1 ITO ultrafine powder (ITO-UFP) manufactured by Sumitomo Metal Mining Co., Ltd. having a specific surface area of 27.5 cm 2 and an average particle size of 25.3 nm (evaluated by a transmission electron microscope) was used.
5 g, N-methyl-2-pyrrolidone (NMP) 20
g, N, N-dimethylformamide (DMF) 7
g and 4-hydroxy-4-methyl-2-pentanone (diacetone alcohol) 70 g were mixed to prepare an ITO dispersion solution. On the other hand, while stirring a mixed solution of 1.5 g of ethyl silicate 40 manufactured by Tama Chemical Industry Co., Ltd. having an average degree of polymerization of 4 to 5, 16 g of diacetone alcohol, and 1.5 g of distilled water, 3 g of 5% hydrochloric acid aqueous solution, diacetone. A mixed solution of 2 g of alcohol and 2.4 g of distilled water was added dropwise to prepare an ethyl silicate solution. Two liquids of the ITO separation solution and the ethyl silicate solution were mixed and rotated at 150 rpm, and the solution was dropped from a beaker onto a plate glass of 200 × 200 × 3 mm.

【0016】板ガラス上に第1層目の膜をコートした
後、そのまま2分乾燥し、その後第1層目に用いたエチ
ルシリケート溶液のみを、オーバーコート液として15
0rpmで回転する板ガラス上にビーカから滴下した。
続いて大気中で焼成温度250℃でそれぞれ30分焼成
し、2層膜とした。評価結果を表1に示す。
After coating the first layer film on the plate glass, it is dried for 2 minutes as it is, and then only the ethyl silicate solution used for the first layer is used as an overcoat solution.
It dripped from the beaker on the plate glass rotated at 0 rpm.
Then, each was baked in the air at a baking temperature of 250 ° C. for 30 minutes to form a two-layer film. The evaluation results are shown in Table 1.

【0017】(実施例2)焼成条件を300℃/30分
とした他は、すべて実施例1と同様にして膜を形成し、
特性評価した。評価結果を表1に示す。 (実施例3)焼成条件を350℃/30分とした他は、
すべて実施例1と同様にして膜を形成し、特性評価し
た。評価結果を表1に示す。 (実施例4)焼成条件を窒素雰囲気中で450℃/30
分とした他は、すべて実施例1と同様にして膜を形成
し、特性評価した。評価結果を表1に示す。 (実施例5)焼成条件として、水素10%混合アルゴン
ガス雰囲気中で、徐々に加熱してまず250℃で30分
保持し、続いて450℃で30分保持し徐冷した。その
他は、すべて実施例1と同様にして膜を形成し、特性評
価した。評価結果を表1に示す。
(Example 2) A film was formed in the same manner as in Example 1 except that the baking conditions were 300 ° C / 30 minutes.
Characterized. The evaluation results are shown in Table 1. (Example 3) Except that the firing conditions were 350 ° C./30 minutes,
A film was formed and the characteristics were evaluated in the same manner as in Example 1. The evaluation results are shown in Table 1. (Example 4) The firing conditions were 450 ° C / 30 in a nitrogen atmosphere.
A film was formed and the characteristics were evaluated in the same manner as in Example 1 except that the amount was changed. The evaluation results are shown in Table 1. (Example 5) As a firing condition, in a 10% hydrogen-mixed argon gas atmosphere, the material was gradually heated and first held at 250 ° C for 30 minutes, and then held at 450 ° C for 30 minutes and gradually cooled. A film was formed in the same manner as in Example 1 except for the above, and characteristics were evaluated. The evaluation results are shown in Table 1.

【0018】(比較例1)焼成条件を大気中で80℃/
30分とした他は、すべて実施例1と同様にして膜を形
成し、特性評価した。評価結果を表1に示す。 (比較例2)焼成条件を大気中で160℃/30分とし
た他は、すべて実施例1と同様にして膜を形成し、特性
評価した。評価結果を表1に示す。 (比較例3)焼成条件を大気中で400℃/30分とし
た他は、すべて実施例1と同様にして膜を形成し、特性
評価した。評価結果を表1に示す。 (比較例4)焼成条件を大気中で450℃/30分とし
た他は、すべて実施例1と同様にして膜を形成し、特性
評価した。評価結果を表1に示す。
(Comparative Example 1) The firing conditions were 80 ° C. in the air /
A film was formed and the characteristics were evaluated in the same manner as in Example 1 except that the time was 30 minutes. The evaluation results are shown in Table 1. (Comparative Example 2) A film was formed and the characteristics were evaluated in the same manner as in Example 1 except that the firing conditions were 160 ° C./30 minutes in the atmosphere. The evaluation results are shown in Table 1. (Comparative Example 3) A film was formed and the characteristics were evaluated in the same manner as in Example 1 except that the firing conditions were 400 ° C / 30 minutes in the atmosphere. The evaluation results are shown in Table 1. (Comparative Example 4) A film was formed and the characteristics were evaluated in the same manner as in Example 1 except that the firing conditions were 450 ° C / 30 minutes in the atmosphere. The evaluation results are shown in Table 1.

【0019】[0019]

【表1】 [Table 1]

【0020】表1より、電界シールド用処理液を大気中
200〜350℃、あるいは不活性ガス、還元性ガス雰
囲気中200〜450℃の条件で焼成して形成されるI
TO膜とシリケート膜との二層構造からなる透明導電膜
は、表面抵抗値が3〜5×103 Ω/□であり、ITO
膜とシリケート膜との屈折率差が高く、またヘイズ値、
全光線透過率、鉛筆強度も優れていることが分かる。
From Table 1, I is formed by firing the treatment liquid for electric field shielding in the atmosphere at 200 to 350 ° C. or in the atmosphere of inert gas or reducing gas at 200 to 450 ° C.
The transparent conductive film having a two-layer structure of a TO film and a silicate film has a surface resistance value of 3 to 5 × 10 3 Ω / □ and ITO.
The refractive index difference between the film and the silicate film is high, the haze value,
It can be seen that the total light transmittance and pencil strength are also excellent.

【0021】[0021]

【発明の効果】本発明によれば、CRT前面ガラスの電
界シールド効果にきわめて好適な表面抵抗値と反射防止
に適した屈折率を有する透明導電膜を形成することがで
きるので、蒸着法、スパッタリング法に比べて電界シー
ルド用透明導電膜を簡便で低いコストで製造することが
可能になる。
According to the present invention, a transparent conductive film having a surface resistance value extremely suitable for the electric field shielding effect of a CRT front glass and a refractive index suitable for antireflection can be formed. Compared with the method, the transparent conductive film for electric field shield can be manufactured easily and at low cost.

フロントページの続き (72)発明者 折田 桂一 東京都品川区西五反田7丁目9番4号 東 北化工株式会社内Continued Front Page (72) Keiichi Orita Inventor Keiichi Orita 7-9-4 Nishigotanda, Shinagawa-ku, Tokyo Tohoku Kako Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 平均粒径50nm以下のインジウム錫酸
化物粉末とアルキルシリケートとを、N−メチル−2ピ
ロリジノンを含む極性溶媒に分散させた電界シールド用
処理液を、陰極線管前面ガラスに塗布、乾燥した後、ア
ルキルシリケートを含む溶液をオーバーコートし、次い
で大気中200〜350℃の温度範囲で焼成することを
特徴とする電界シールド用透明導電膜の形成方法。
1. A cathode ray tube front glass is coated with an electric field shielding treatment liquid comprising an indium tin oxide powder having an average particle diameter of 50 nm or less and an alkyl silicate dispersed in a polar solvent containing N-methyl-2pyrrolidinone. A method for forming a transparent conductive film for electric field shielding, which comprises drying, then overcoating with a solution containing an alkyl silicate, and then baking in a temperature range of 200 to 350 ° C. in the atmosphere.
【請求項2】 請求項1に記載の方法において、焼成を
不活性ガス及び/又は還元性ガス雰囲気中200〜45
0℃の温度範囲で行うことを特徴とする電界シールド用
透明導電膜の形成方法。
2. The method according to claim 1, wherein the firing is performed in an inert gas and / or reducing gas atmosphere at a pressure of 200 to 45.
A method for forming a transparent conductive film for electric field shielding, which is performed in a temperature range of 0 ° C.
JP20205393A 1993-07-23 1993-07-23 Method for forming field sheilding transparent conductive film Pending JPH0737494A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20205393A JPH0737494A (en) 1993-07-23 1993-07-23 Method for forming field sheilding transparent conductive film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20205393A JPH0737494A (en) 1993-07-23 1993-07-23 Method for forming field sheilding transparent conductive film

Publications (1)

Publication Number Publication Date
JPH0737494A true JPH0737494A (en) 1995-02-07

Family

ID=16451163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20205393A Pending JPH0737494A (en) 1993-07-23 1993-07-23 Method for forming field sheilding transparent conductive film

Country Status (1)

Country Link
JP (1) JPH0737494A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003049123A1 (en) * 2001-12-05 2003-06-12 Asahi Glass Company, Limited Conductive film, manufacturing method thereof, substrate having the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003049123A1 (en) * 2001-12-05 2003-06-12 Asahi Glass Company, Limited Conductive film, manufacturing method thereof, substrate having the same

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